TWI267106B - Structure for electron emission source of field emission display and the fabrication method thereof - Google Patents
Structure for electron emission source of field emission display and the fabrication method thereofInfo
- Publication number
- TWI267106B TWI267106B TW93113949A TW93113949A TWI267106B TW I267106 B TWI267106 B TW I267106B TW 93113949 A TW93113949 A TW 93113949A TW 93113949 A TW93113949 A TW 93113949A TW I267106 B TWI267106 B TW I267106B
- Authority
- TW
- Taiwan
- Prior art keywords
- emission source
- electron emission
- cavities
- cathode
- electron
- Prior art date
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- Cold Cathode And The Manufacture (AREA)
Abstract
The present invention relates to a structure for electron emission source of field emission display and the fabrication method thereof, which includes: providing a first substrate with cathode formed thereon; employing screen-printing or lithography etching technique to form a cathode electrode layer containing cavities on the first substrate, and onto the surface of cathode electrode layer is produced with photoresist protection layer through lithography process; employing low viscosity carbon nanotube solution to spray on the photoresist protection layer and deposit in the cavities; and, employing vacuum sintering and etching technique to strip off the photoresist protection layer and form the electron emission source layer in the cavities with a flat surface. Compared with the conventional process, the present invention could provide better flatness, increase the uniformity for image and brightness, and increase the density of carbon nanotube for improving the electron density of electron beam. The structure for electron emission source comprises a cathode formed on the first substrate, a cathode electrode layer formed on the surface of the cathode containing cavities, and an electron emission source layer deposited in the cavities in high density through etching, developing and vacuum sintering to form a flat surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93113949A TWI267106B (en) | 2004-05-18 | 2004-05-18 | Structure for electron emission source of field emission display and the fabrication method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93113949A TWI267106B (en) | 2004-05-18 | 2004-05-18 | Structure for electron emission source of field emission display and the fabrication method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200539222A TW200539222A (en) | 2005-12-01 |
TWI267106B true TWI267106B (en) | 2006-11-21 |
Family
ID=38191756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93113949A TWI267106B (en) | 2004-05-18 | 2004-05-18 | Structure for electron emission source of field emission display and the fabrication method thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI267106B (en) |
-
2004
- 2004-05-18 TW TW93113949A patent/TWI267106B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW200539222A (en) | 2005-12-01 |
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Legal Events
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MM4A | Annulment or lapse of patent due to non-payment of fees |