TWI265691B - Multi-function teach pendant for a semiconductor manufacturing environment - Google Patents

Multi-function teach pendant for a semiconductor manufacturing environment

Info

Publication number
TWI265691B
TWI265691B TW094107045A TW94107045A TWI265691B TW I265691 B TWI265691 B TW I265691B TW 094107045 A TW094107045 A TW 094107045A TW 94107045 A TW94107045 A TW 94107045A TW I265691 B TWI265691 B TW I265691B
Authority
TW
Taiwan
Prior art keywords
instructions
tool
specific type
semiconductor manufacturing
input
Prior art date
Application number
TW094107045A
Other languages
English (en)
Other versions
TW200610314A (en
Inventor
Te-Hsiang Liu
Yu-Wen Fang
Chao-Ying Chiu
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Publication of TW200610314A publication Critical patent/TW200610314A/zh
Application granted granted Critical
Publication of TWI265691B publication Critical patent/TWI265691B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/409—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by using manual data input [MDI] or by using control panel, e.g. controlling functions with the panel; characterised by control panel details or by setting parameters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/34—Director, elements to supervisory
    • G05B2219/34224—Select appropriate interface, according to kind of tool or other detection
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/36—Nc in input of data, input key till input tape
    • G05B2219/36159—Detachable or portable programming unit, display, pc, pda

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • General Factory Administration (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Devices For Executing Special Programs (AREA)
TW094107045A 2004-09-13 2005-03-08 Multi-function teach pendant for a semiconductor manufacturing environment TWI265691B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/939,863 US7286896B2 (en) 2004-09-13 2004-09-13 Multi-function teach pendant for a semiconductor manufacturing environment

Publications (2)

Publication Number Publication Date
TW200610314A TW200610314A (en) 2006-03-16
TWI265691B true TWI265691B (en) 2006-11-01

Family

ID=36035170

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094107045A TWI265691B (en) 2004-09-13 2005-03-08 Multi-function teach pendant for a semiconductor manufacturing environment

Country Status (2)

Country Link
US (1) US7286896B2 (zh)
TW (1) TWI265691B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8399931B2 (en) 2010-06-30 2013-03-19 Taiwan Semiconductor Manufacturing Company, Ltd. Layout for multiple-fin SRAM cell
KR101458433B1 (ko) * 2013-10-22 2014-11-07 (주)바론시스템 반도체 자동화 설비 실시간 원격 제어 시스템
US9606525B2 (en) * 2013-12-23 2017-03-28 Mitutoyo Corporation Remote accessory for generating customized and synchronized reference notes for a programmable metrology system
US9736135B2 (en) * 2014-10-17 2017-08-15 Lam Research Corporation Method, apparatus, and system for establishing a virtual tether between a mobile device and a semiconductor processing tool
JP2022122729A (ja) * 2021-02-10 2022-08-23 セイコーエプソン株式会社 教示装置、教示方法および教示プログラム

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002065031A1 (en) * 2001-02-09 2002-08-22 Scotsman Ice Systems Ice-making machinery and a tool and method for control thereof
US20020156542A1 (en) * 2001-02-23 2002-10-24 Nandi Hill K. Methods, devices and systems for monitoring, controlling and optimizing processes
US6813533B1 (en) * 2001-05-15 2004-11-02 Vladimir V. Semak Method for simulation of laser material deposition
US20020198964A1 (en) * 2001-06-26 2002-12-26 International Business Machines Corporation Method and system for wireless remote monitoring and control of a manufacturing execution system
US20030045947A1 (en) * 2001-08-30 2003-03-06 The Boeing Company System, method and computer program product for controlling the operation of motion devices by directly implementing electronic simulation information
JP4008899B2 (ja) * 2003-09-08 2007-11-14 株式会社東芝 半導体装置の製造システムおよび半導体装置の製造方法

Also Published As

Publication number Publication date
US20060058894A1 (en) 2006-03-16
US7286896B2 (en) 2007-10-23
TW200610314A (en) 2006-03-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees