TWI265393B - Method and apparatus for selecting tools in manufacturing scheduling - Google Patents

Method and apparatus for selecting tools in manufacturing scheduling

Info

Publication number
TWI265393B
TWI265393B TW093130847A TW93130847A TWI265393B TW I265393 B TWI265393 B TW I265393B TW 093130847 A TW093130847 A TW 093130847A TW 93130847 A TW93130847 A TW 93130847A TW I265393 B TWI265393 B TW I265393B
Authority
TW
Taiwan
Prior art keywords
tool
manufacturing scheduling
selecting tools
manufacturing
scheduling
Prior art date
Application number
TW093130847A
Other languages
English (en)
Other versions
TW200532410A (en
Inventor
Pai-Cheng Huang
Ming-Feng Ou
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Publication of TW200532410A publication Critical patent/TW200532410A/zh
Application granted granted Critical
Publication of TWI265393B publication Critical patent/TWI265393B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32283—Machine scheduling, several machines, several jobs
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32315—Machine with least work
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
TW093130847A 2004-03-26 2004-10-12 Method and apparatus for selecting tools in manufacturing scheduling TWI265393B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/811,358 US6941183B1 (en) 2004-03-26 2004-03-26 Method and apparatus for selecting tools in manufacturing scheduling

Publications (2)

Publication Number Publication Date
TW200532410A TW200532410A (en) 2005-10-01
TWI265393B true TWI265393B (en) 2006-11-01

Family

ID=34887667

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093130847A TWI265393B (en) 2004-03-26 2004-10-12 Method and apparatus for selecting tools in manufacturing scheduling

Country Status (2)

Country Link
US (1) US6941183B1 (zh)
TW (1) TWI265393B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7477956B2 (en) * 2004-07-12 2009-01-13 Applied Materials, Inc. Methods and apparatus for enhancing electronic device manufacturing throughput
US7610122B2 (en) * 2005-08-16 2009-10-27 Deere & Company Mobile station for an unmanned vehicle
US7610111B2 (en) * 2007-02-13 2009-10-27 Tech Semiconductor Singapore Pte Ltd Method and system for wafer lot order
US7979151B2 (en) * 2007-12-06 2011-07-12 International Business Machines Corporation Run-time dispatch system for enhanced product characterization capability
EP2164033A1 (en) * 2008-08-28 2010-03-17 Siemens Aktiengesellschaft Method for selecting equipment resources in a manufacturing process
US9037279B2 (en) * 2009-09-09 2015-05-19 Taiwan Semiconductor Manufacturing Company, Ltd. Clustering for prediction models in process control and for optimal dispatching
US10204387B2 (en) 2013-05-08 2019-02-12 Nmetric, Llc Sequentially configuring manufacturing equipment to reduce reconfiguration times
CN104752288B (zh) * 2013-12-30 2018-03-06 北京北方华创微电子装备有限公司 半导体设备工艺加工调度的方法及系统
US10295979B2 (en) * 2015-09-15 2019-05-21 Applied Materials, Inc. Scheduling in manufacturing environments

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6790686B1 (en) * 2002-12-18 2004-09-14 Advanced Micro Devices, Inc. Method and apparatus for integrating dispatch and process control actions

Also Published As

Publication number Publication date
TW200532410A (en) 2005-10-01
US6941183B1 (en) 2005-09-06
US20050216112A1 (en) 2005-09-29

Similar Documents

Publication Publication Date Title
ATE529851T1 (de) Verfahren und system zur optimalen auswahl einer strategie für statistische klassifikationen
TW201129888A (en) A method and system for intelligent automated reticle management
WO2005114504A3 (en) Method and apparatus for executing event driven simulations
WO2006043018A3 (en) Focus priority in window management
WO2007078567A3 (en) Fully automated interactive promotion tool including wizard-driven web interface
GB201113886D0 (en) Network capacity management system and method
TWI265393B (en) Method and apparatus for selecting tools in manufacturing scheduling
TW200710675A (en) Methods and apparatus for resource management in a logically partitioned processing environment
EP1433104A4 (en) NON-DETERMINATION METHOD AND SYSTEM FOR OPTIMIZING TARGETED CONTENT DELIVERY
HK1105995A1 (en) Method of improving t cell receptors
WO2012129249A3 (en) Biologically based chamber matching
TW200504517A (en) Information processing apparatus, communication control method, and communication control program
ATE413056T1 (de) System und verfahren zur kompetenzbasierten anrufverteilung in einer anrufzentrale
TWI257118B (en) System and method for scheduling the movement of wafers in a wafer-processing tool
WO2013087989A3 (en) Method and apparatus for providing information collection using template-based user tasks
WO2005116862A3 (en) An apparatus for evaluating a mathematical function
TW200627105A (en) Method and system for dynamically controlling metrology work in progress
WO2006073667A3 (en) Insertion machine job scheduling systems and methods
EP2407902A3 (en) System and method for configuring a simulation model utilizing a tool for automatic input/output assignment
MY143002A (en) Method and apparatus for color management
TW200707279A (en) Task scheduling to devices with same connection address
EP2226700A3 (en) Clock supply method and information processing apparatus
MX2010004347A (es) Academia para el sistema de manejo de conocimiento.
TW200517871A (en) Dynamically adjusting the distribution for dispatching lot between current and downstream tool by using expertise weighting mechanism
DK1736664T3 (da) Fremgangsmåde og indretning til måling af et vindenergianlæg

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees