TWI264799B - Stacked structure for forming damascene structure, method of fabricating the stacked structure, and damascene process - Google Patents

Stacked structure for forming damascene structure, method of fabricating the stacked structure, and damascene process

Info

Publication number
TWI264799B
TWI264799B TW94120141A TW94120141A TWI264799B TW I264799 B TWI264799 B TW I264799B TW 94120141 A TW94120141 A TW 94120141A TW 94120141 A TW94120141 A TW 94120141A TW I264799 B TWI264799 B TW I264799B
Authority
TW
Taiwan
Prior art keywords
stacked structure
dielectric layer
damascene
fabricating
forming
Prior art date
Application number
TW94120141A
Other languages
English (en)
Other versions
TW200701390A (en
Inventor
Chin-Hsiang Lin
Chih-Chien Liu
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW94120141A priority Critical patent/TWI264799B/zh
Application granted granted Critical
Publication of TWI264799B publication Critical patent/TWI264799B/zh
Publication of TW200701390A publication Critical patent/TW200701390A/zh

Links

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW94120141A 2005-06-17 2005-06-17 Stacked structure for forming damascene structure, method of fabricating the stacked structure, and damascene process TWI264799B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94120141A TWI264799B (en) 2005-06-17 2005-06-17 Stacked structure for forming damascene structure, method of fabricating the stacked structure, and damascene process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94120141A TWI264799B (en) 2005-06-17 2005-06-17 Stacked structure for forming damascene structure, method of fabricating the stacked structure, and damascene process

Publications (2)

Publication Number Publication Date
TWI264799B true TWI264799B (en) 2006-10-21
TW200701390A TW200701390A (en) 2007-01-01

Family

ID=37969470

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94120141A TWI264799B (en) 2005-06-17 2005-06-17 Stacked structure for forming damascene structure, method of fabricating the stacked structure, and damascene process

Country Status (1)

Country Link
TW (1) TWI264799B (zh)

Also Published As

Publication number Publication date
TW200701390A (en) 2007-01-01

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