TWI262254B - Gravity compensation type fluid manipulation device and method - Google Patents

Gravity compensation type fluid manipulation device and method Download PDF

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Publication number
TWI262254B
TWI262254B TW91125292A TW91125292A TWI262254B TW I262254 B TWI262254 B TW I262254B TW 91125292 A TW91125292 A TW 91125292A TW 91125292 A TW91125292 A TW 91125292A TW I262254 B TWI262254 B TW I262254B
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Taiwan
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fluid
gravity
passage
compensated
fluid passage
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TW91125292A
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Chinese (zh)
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Yung-Chiang Chung
Chien Chih Huang
Shr-Hau Huang
Ming-Zheng Shiu
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Ind Tech Res Inst
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Abstract

The present invention relates to a kind of gravity compensation type fluid manipulation device and method. The fluid way parallel to the gravity direction is arranged in the middle part of the fluid passage (11) of the fluid component. When the fluid gradually moves toward one end of the fluid passage due to the deviation of the back and forth driving force, the fluid in the passage parallel to the gravity direction will provide the balance force to prevent the fluid from gradually moving toward one end of the passage (11) to make the fluid maintain the long-term steady back-and-forth motion.

Description

1262254 九、發明說明: 【發明的應用範圍】 本發明是關於一種流體操控裝置及其方法,特別是關於一種 重力補償式流體操控裝置及其方法。 【發明的背景】 流體操控可廣泛應用於各種領域,其應用範圍包含從生化合 成矛刀析熱官理、贺液元件到操控固體元件(s〇Hd components) 專技術。隨著細微加工技術(micr〇faj3r][ca^〇n)的快速進展,而 產生整合大量的流體元件的流體分析系統。利用流體在三維結構 的:道與系統中進行傳輸、混合、對流或驅動等各種行為,來達 成符合不同技術需求之目的。例如,微流體晶片中的氣動式微流 體驅動7L件,財接觸的方式來轉W内的流體,不僅可進行 複雜多元的動作,並且能避免臨床上所可能發生的交叉污染。 而為了驗控懈體在管道聽射的速妙位置,發 展出各種越‘鶴方法,包含了顧峨式幫浦、氣動式幫航 電滲透細偷。-。喊ic)等。在_分析系統中,流體在三维 7的管道係受猶式的兩股驅動力,以控制流體的來回運 動。然而’無論是何種驅動方法皆报難使其兩股驅動力完全相等, 在、’工過㈣間的4流程之後,會使流體逐漸偏向於管道的一 端’甚而脫離所設計的管道。因此,常需要使用人為監㈣方法, 在流體未脫料道之前修正流體的饮置。 ' 此外,也有部錄_她蝴她㈣,如美國第 1262254 的問題。 式’ϋ專和係使用感測器來偵測流體的情形;利用流體流經 =器之管道時職纹電_變化,個越之位移並回饋電 =控亀物㈣置。_,應_喻制的概念 j配合主動元件,在實際製作時會提誠本及料產生使用上 &牲 彡何有效掌減體之分析、操控能力及购方法的動 = 本心目膽展重點;對流體行 、X ^整的瞭解’才能對流體系統的設計與製作,達到 更好的效果及更佳的效率。 【發明之目的與概述】 控裝置及J1古、、技術的問題’本發明提供一種重力補償式流體操 門口之十〜/係H統崎了平面賴f道外,其於管道的 开 刖逛才合配平行重力方向的直立法俨鸽、# ^ 於管道的1日士,〜…直立4㈣。纽體逐漸偏向 τ直官迢内的液體將提供-抗衡之力量,利用 自,、、'、界既有_力來_流體逐摘向 流體不會獅__,—她峨 使 成二ff補償式流體操控裝置係由驅動裝置和流體元件所组 式的驅動力,以^ 通路的開口端,提供往復 於流體通路峰端之前係設有立於 ^通路’ 、古Μ出认十 力卫體通路之一流體管道,在 來回的驅動力不盡相同,而逐漸偏向於流體通路的一端 1262254 ^ ’流至直立管道的流體則會由於重力而產生一抗衡之力量。 透過此種被動式的設計,本發明可以簡單的方法來維持流體 兀件當中的流體不脫離其流體通路,亦即,當流體由於來回的驅 動力不盡相同,而逐漸偏向於通路的一端時,流至直立管道的流 體則由於重力產生一抗衡之力量,使偏向一端的流體受到壓力, 而維持其n體通路巾適當軸置。此重力補償式流體操控方法 的步驟包含有:先提供具有流體通路之流體元件,且於流體通路 的開口端之前係設有立於流體通路之一流體管道;再提供一往復 式的驅動力,使流體於流體通路產生來回運動;然後,使流體流 至立於流體通路之流體管道產生—重力,在流體由於往復式的驅 動力差異,而逐漸偏向於流體通路的—端時,重力即成為抗衡力 阻止流體由流體通路的開口端脫離流體元件。 為使對本發明的目的、構造特徵及其功能有進一步的了解, 茲配合圖示詳細說明如下: 【實施例說明】 本發明實施例係由驅動裝置和流體元件所組成,請參考第工 圖,其為本發明第1實施例之流體元件結構圖,此流體元件係於聚 曱基丙稀酸曱 S 旨(p〇lymethyl methaerylai:e,pMMA)基材 上, 刻晝出彎_渠道11,其深度錢度皆為兩絲,兩端略為挖大 以作為漸變段12。接合兩塊相同之PMMA基材,使渠道丨丨部分互通 成為僅兩端開π之流體通路,再將其兩端開口稍微挖大以作為氣 1262254 流入口 13 〇 為更進_步說明本發明,請參考_,其為本發明第1實施 軸。本刺第1實施觸將兩支料之開口細玻璃管 =!Γ的兩端並加以固定之,使其平行於重力方向;再用 雜兩相連接部分㈣止_。並且㈣使流體產生 ^動的_浦物嚇置,透過t線使其連結於流體元 端。本發明可使實驗中流體元件當中的流體不脫離其流體 i路首先’啟動氣動幫浦提供往復式的驅動力,並調整流量使 流體於流贿路產生來回運動;流體由於來_驅動力不盡相 同’會逐漸偏向於流體通路的—端;然而,當流體流至立於開口 細_管時則會形成-重力,以阻止流體由流體通路的開口端脫 離流體元件;重力平衡之後,流體即於流體通路作狱的來回運 動。 、,此外’將第1實施例之流體元件豎立即可使流體通路的部分管 道平行於重力方向,如此,不需於流體树的兩端設置細玻璃管, 其流體S件即具有立於流體通路之流體管道,再將氣動幫浦透過 官線使其連結於流體元件的一端即組成本發明第2實施例之架 構。請參考附件2A,其為本發明第2實施例之架構實體圖。 為證明本發明之功效,特提供一對照組以對其實驗結果作一 比較,此對照組係將第2實施例之流體元件水平放置,如一般之麻 驗狀態,其餘實驗條件、流體元件結構及其驅動流體之氣動幫浦 1262254 皆完全相同,請參考附侧,其為對照組之架構實體圖。首先, 硯察第2實施例之實驗情形,啟動氣動幫浦提供往復式的驅動力之 後’需調整流量使流體於流體通路產生來回運動,·流體由於來回 的驅動力不盡相同,會逐漸偏向於流體通路的—端;然而,由於 其流體元件之流體通路具有平行㈣力方向之流體管道,流體於 其流體管道上升至某-高度,其_高度卿奴重力即與驅動 力的差異達成平衡;使流體持續於流體通路作穩定的來回運動, 並阻止流體由流體通路的開σ端脫料體元件。請參考附件2β, 其為本㈣第2實施麟實驗觸3G分鐘之,即絲流體能 長時間持續於流體通路作穩定的來回運動。 再觀察對照組的實驗情形,啟域動幫浦提供往復式的驅動 力之後,需流量使流流體通路產絲料動;流體由於 來回的驅動力不盡相同’會逐漸偏向於越通路的一端,最後由 流體通路的開π端完全脫離流體元件,請參考附細,其為對照 組實驗持續3分鐘之實體圖,即表示由於其來回_力差異的影 =,流體於3分鐘之内即脫離流體通路,所以在整個實驗進行中皆 需要持續的人為監控,實為人力浪費。 、、另外,本發明所使用之驅動褒置係選自氣動幫浦、機械式幫 浦及電動式幫浦。其流體通路則由於其設計上的不同可由複數個 平面管道與直立管道組合而成。而且,其提供重力平衡之流體管 運係以平行或接近平行於重力方向立於流體通路的開口端之前。 1262254 雖然本發明之實補賊如±所述,财並_罐定本發 明,任何熟習相關技藝者,在不脫離本發明之精神和範圍内,; 可作些权更触潤飾,因此本發明之專娜護範關視本說明 書所附之申請專利範圍所界定者為準。 【發明功效】 本發明所揭露之:t力補償式流體操控裝置及其方法,可藉由 構造簡單、製程容易且成本低廉之結構設計來達到液體控制的目 的。並且不需要增加任何❹指及_祕等元件,也減少可能 發生的故障等問題。同時,其應用範圍很廣,包含需使奸體= 進行反應之概晶狀實驗室晶片⑽奮㈣ιρ)_,制曰 在實驗流體需錄的反麟間之時,能林花費人力和= 力的情形下完成實驗。 【圖式簡單說明】 第1圖為本發明第1實施例之流體元件結構圖; 附件1為本發明第1實施例之架構實體圖; 附件2A為本發明第2實施例之架構實體圖,· 附件2B為本發明第2實施例於實驗持續3〇分鐘之實體圖 附件3A為對照組之架構實體圖;及 回 附件3B為對照組實驗持續3分鐘之實體圖。 【圖式符號說明】 10 基材 11 渠道 10 1262254 12 漸變段 13 氣流入口1262254 IX. DESCRIPTION OF THE INVENTION: Scope of the Invention The present invention relates to a fluid handling device and method thereof, and more particularly to a gravity-compensated fluid handling device and method therefor. [Background of the Invention] Fluid handling can be widely used in various fields, and its application range includes biochemical synthesis of spear knives, thermal components, and manipulation of solid components (s〇Hd components). With the rapid advancement of micromachining technology (micr〇faj3r][ca^〇n), a fluid analysis system that integrates a large number of fluid components is produced. The use of fluids in three-dimensional structures: channels and systems for transmission, mixing, convection or drive, etc., to meet the needs of different technical needs. For example, a pneumatic microfluid in a microfluidic wafer drives a 7L piece of material, and the means of transferring it to the fluid in W can not only perform complex and diverse actions, but also avoid cross-contamination that may occur clinically. In order to verify the speedy position of the body in the pipeline, the various crane methods were developed, including the Gu-style pump and the pneumatic air-assisted penetration. -. Shout ic) and so on. In the _analysis system, the fluid in the three-dimensional 7 is subjected to two driving forces of the Jewish to control the movement of the fluid back and forth. However, no matter what kind of driving method is reported, it is difficult to make the two driving forces completely equal. After the 4 processes between the work and the (four), the fluid will gradually be biased toward the end of the pipe even away from the designed pipe. Therefore, it is often necessary to use the human supervision (4) method to correct the drinking of the fluid before the fluid is discharged. In addition, there are also some records _ she butterflies her (four), such as the United States number 1262254. The type of ϋ ϋ 系 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用_, should be the concept of j system with the active components, in the actual production will be used to improve the use of the material and the use of the ammunition, the effective analysis of the body, the ability to control and the purchase method = the mind Focus; understanding of fluid lines, X ^ integrity 'to the design and production of fluid systems, to achieve better results and better efficiency. [Objective and summary of the invention] Control device and J1 ancient, technical problems 'The present invention provides a gravity compensation type of gymnastics doorway 10 ~ / Department H Takizaki planes outside the road, it is only in the opening of the pipeline Straight to the parallel gravity direction of the straight legion, #^ in the pipeline of 1 day, ~ ... upright 4 (four). The body gradually leans toward the liquid inside the 迢 straight bureaucracy will provide the power to counterbalance, using the self, ,, ', the boundary has both _ force _ fluid to pick up the fluid will not lion __, - she made two ff The compensating fluid control device is composed of a driving force of a driving device and a fluid element, and is provided with an open end of the passage to provide a reciprocating flow to the peak end of the fluid passage, and is provided with a standing passage. One of the fluid passages has a different driving force in the back and forth, and is gradually biased toward the end of the fluid passage 1262254 ^ 'The fluid flowing to the vertical pipe will generate a counterbalance due to gravity. Through such a passive design, the present invention can maintain the fluid in the fluid element without leaving the fluid passage in a simple manner, that is, when the fluid is gradually biased toward one end of the passage due to the different driving forces of the back and forth, The fluid flowing to the upright pipe creates a counterbalancing force due to gravity, causing the fluid biased toward one end to be pressurized while maintaining the proper alignment of the n-body passage. The step of the gravity-compensated fluid control method includes: first providing a fluid element having a fluid passage, and providing a fluid conduit standing in the fluid passage before the open end of the fluid passage; and providing a reciprocating driving force, The fluid is caused to move back and forth in the fluid passage; then, the fluid flows to the fluid conduit standing in the fluid passage to generate gravity, and when the fluid is gradually biased toward the end of the fluid passage due to the reciprocating driving force difference, the gravity becomes The counterforce prevents the fluid from being detached from the fluid element by the open end of the fluid passage. In order to further understand the object, structural features and functions of the present invention, the following detailed description will be given with reference to the accompanying drawings: [Description of Embodiments] The embodiments of the present invention are composed of a driving device and a fluid component, please refer to the drawings. It is a structural diagram of a fluid element according to a first embodiment of the present invention, which is attached to a p〇lymethyl methaerylai:e (pMMA) substrate and engraved with a bend_channel 11, The depth of money is two filaments, and the two ends are slightly dug as a gradient section 12. Joining two identical PMMA substrates, interconnecting the channel rafts into a fluid passage with only π at both ends, and then slightly digging the openings at both ends to serve as a gas 1262254 flow inlet 13 〇 for further steps. Please refer to _, which is the first embodiment of the present invention. The first implementation of the thorn touches the ends of the thin glass tube =! Γ of the two materials and fixes them so as to be parallel to the direction of gravity; and then uses the two-phase connection portion (four) to stop _. And (4) the fluid generated by the fluid is intimidated and connected to the fluid element through the t-line. The invention can make the fluid in the fluid element in the experiment not leave the fluid i road firstly 'starting the pneumatic pump to provide the reciprocating driving force, and adjusting the flow rate to make the fluid move back and forth in the bribe; the fluid is not driven by the driving force The same 'will gradually bias the end of the fluid path; however, when the fluid flows to the open thin tube, gravity will be formed to prevent the fluid from being separated from the fluid element by the open end of the fluid path; after gravity balance, the fluid That is, the back and forth movement of the fluid passage. Furthermore, 'the fluid element of the first embodiment can be immediately vertical so that part of the conduit of the fluid passage is parallel to the direction of gravity, so that it is not necessary to provide a thin glass tube at both ends of the fluid tree, and the fluid S member has a standing fluid. The fluid conduit of the passage, and then the pneumatic pump is connected to the end of the fluid element through the official line to constitute the structure of the second embodiment of the present invention. Please refer to Appendix 2A, which is an architectural entity diagram of the second embodiment of the present invention. In order to prove the efficacy of the present invention, a control group was provided to compare the experimental results. The control group placed the fluid components of the second embodiment horizontally, as in the general test state, and the remaining experimental conditions and fluid component structures. The pneumatic pump 1262254 and its driving fluid are all identical. Please refer to the attached side, which is the structural entity diagram of the control group. Firstly, after observing the experimental situation of the second embodiment, after starting the pneumatic pump to provide the reciprocating driving force, the flow needs to be adjusted to cause the fluid to move back and forth in the fluid passage. The fluid will gradually bias due to the different driving forces of the back and forth. At the end of the fluid passage; however, since the fluid passage of the fluid element has a parallel (four) force direction of the fluid conduit, the fluid rises to a certain height in its fluid conduit, and its height is balanced with the difference in driving force. Causing the fluid to continue in the fluid path for a stable back and forth movement and preventing the fluid from being displaced from the open sigma end of the fluid passage. Please refer to Annex 2β, which is the (4) second implementation of the lining experiment, which touches 3G minutes, that is, the silk fluid can continue to flow back and forth in the fluid path for a long time. Then observe the experimental situation of the control group. After the reciprocating driving force is provided, the flow rate is required to make the fluid flow path produce the material; the fluid has different driving forces due to the back and forth, and will gradually bias toward the end of the passage. Finally, the open π end of the fluid path is completely separated from the fluid element. Please refer to the attached detail, which is a solid figure of the control experiment for 3 minutes, which means that the fluid is within 3 minutes due to the shadow of the back and forth force. Out of the fluid path, continuous human monitoring is required throughout the experiment, which is a waste of manpower. Further, the driving device used in the present invention is selected from the group consisting of a pneumatic pump, a mechanical pump, and an electric pump. The fluid path can be composed of a plurality of planar pipes and upright pipes due to their design differences. Moreover, it provides a gravity-balanced fluid piping that stands in front of the open end of the fluid passage in parallel or nearly parallel to the direction of gravity. 1262254 The present invention is not limited to the spirit and scope of the present invention, and may be made by those skilled in the art without departing from the spirit and scope of the present invention. The scope of the patent application scope attached to this manual shall prevail. [Effect of the Invention] The present invention discloses a t-force compensating fluid control device and a method thereof, which can achieve the purpose of liquid control by a structural design which is simple in construction, easy in process, and low in cost. And there is no need to add any components such as fingers and _ secrets, and also reduce problems such as possible failures. At the same time, it has a wide range of applications, including the need to make the corpus = reaction to the crystalline laboratory wafer (10) Fen (four) ιρ) _, when the experimental fluid needs to be recorded between the anti-forest, can spend manpower and = force The experiment was completed under the circumstances. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a structural diagram of a fluid element according to a first embodiment of the present invention; FIG. 1 is an architectural entity diagram of a first embodiment of the present invention; and FIG. 2A is an architectural entity diagram of a second embodiment of the present invention. · Annex 2B is a physical diagram of the control group in the second embodiment of the present invention for 3 minutes in the experiment. Annex 3A is a physical diagram of the control group; and Annex 3B is a physical diagram of the control experiment for 3 minutes. [Description of Symbols] 10 Substrate 11 Channel 10 1262254 12 Transition Section 13 Airflow Entrance

Claims (1)

十、申請專利範圍: L ·一種重力補償式流體操控裝置,其包含有: 、·鴨衣置’係提供往復式的驅動力,以控制流體的來回 一流體元件,係由含有渠道之基材域,絲材之渠道係 互伽形成—流體通路,其兩端如孔徑增大以作為氣流入口, 接口之孔徑卿成義增加之織段,該流體通路的開 口端係連接於該驅動裝置,並以該_錢控_流體通路之流 虹的來回運動’且於該流體通路_口端之前係設有立於該流體 通路且平行或接近平行_重力方向之—越管道,流體係由其 流至該流鮮細流體高度產生—重力,錢體由於該驅動裝置 來回的驅動力不盡相同,而逐漸偏向於該流體觀的—端時,該 重力即成為抗衡力以阻止流體由該_通路的開口端脫離該流體 元件。 2·如申睛專利範圍第1項所述之重力補償式流體操控裝i 籲 ,其中該流體元件係為核酸晶片。 3·如申睛專利範圍第i項所述之重力補償式流體操控裳置 ,其中該流體元件係為實驗室晶片。 4·如申請專利範圍第1項所述之重力補償式流體操控裝置 ’其中該驅動裝置係選自氣動幫浦、機械式幫浦及電動 式幫浦所組成的族群。 5·如申請專利範圍第1項所述之重力補償式流體操控裝置,其中該 12 1262254 胤體tl件係由兩塊包含有渠道之相同紐所接合而成。 6·如申睛專利範圍织項所述之重力補償式流體操控裝置 ,其中該流體通路係包含有複數個平面管道。 7· 一種重力補償式流體操控方法,其步驟包含有: 且於该流體通路的 提供一流體元件,其具有一流體通路, 開口端之前係設有立於該流體通路之—流體管道; 動;及 提供-在復式的驅動力,使流體於該流體通路產生來回運 流體; 流至立於該流體通路之該流體管道產生一重力法 =㈣往復式_力不_,而__流體通路^ ㈣’該重力即成為抗衡力以阻止流體由該流 脫離該流體元件。 J而 8·如申請專利範圍第7項所述之重力補償式流_控方法 ,其中该流體元件係為核酸晶片。 龜 9.如^利軸7項所述之重力補編體操控方法 ’其中該流體元件係為實驗室晶片。 1◦.如=專利範園第7項所述之重力補償式流體操控方法 幫浦==_力係由選1氣動幫浦、機械式 彳’動式$浦所組成的族群所提供。 11 ·如申請專利範圍第7 ,豆中斯辦1 補償式流體操控方法 IL牛係由兩塊包含有渠道之相同基材所 13 1262254 接合而成,該基材之渠道係互通以形成該流體通路, 其兩端開口孔徑增大以作為氣流入口,接近氣流入口 之孔徑則形成逐漸增加之漸變段。 12. 如申請專利範圍第7項所述之重力補償式流體操控方法 ,其中該流體通路係包含有複數個平面管道。 13. 如申請專利範圍第7項所述之重力補償式流體操控方法 ,其中該流體管道係平行於該重力方向立於該流體通 路的開口端之前。 14. 如申請專利範圍第7項所述之重力補償式流體操控方法 ,其中該流體管道係接近平行於該重力方向以適當角 度立於該流體通路的開口端之前。X. The scope of application for patents: L · A gravity-compensated fluid handling device, comprising: ························································ The channel of the wire material is formed by mutual gamma-fluid passage, the two ends of which are increased in diameter as the airflow inlet, and the aperture of the interface is increased by the weaving section, and the open end of the fluid passage is connected to the driving device, and With the flow back and forth of the flow path of the fluid passage, and before the end of the fluid passage, there is a pipeline standing in the fluid passage and parallel or nearly parallel_gravity direction, and the flow system flows therefrom. When the flow of the fresh fluid is high-gravity, the weight of the body is different from the driving force of the driving device, and when it is gradually biased toward the end of the fluid, the gravity becomes a counter force to prevent the fluid from passing through the channel. The open end is detached from the fluid element. 2. The gravity-compensated fluid handling device of claim 1, wherein the fluid component is a nucleic acid wafer. 3. A gravity-compensated fluid-controlled skirt as described in claim i of the scope of the patent application, wherein the fluid component is a laboratory wafer. 4. The gravity-compensated fluid handling device of claim 1, wherein the driving device is selected from the group consisting of a pneumatic pump, a mechanical pump, and an electric pump. 5. The gravity-compensated fluid handling device of claim 1, wherein the 12 1262254 body tl piece is joined by two identical buttons comprising channels. 6. The gravity-compensated fluid handling device of claim 1, wherein the fluid pathway comprises a plurality of planar conduits. 7. A gravity-compensated fluid handling method, the method comprising: providing a fluid element in the fluid passage having a fluid passage, and the open end is preceded by a fluid conduit standing on the fluid passage; And providing - in the compound driving force, causing the fluid to generate a returning fluid in the fluid passage; flowing to the fluid conduit standing in the fluid passage to generate a gravity method = (four) reciprocating _ force not _, and __ fluid passage ^ (d) 'The gravity becomes a counterforce to prevent fluid from escaping from the fluid element. The gravity compensation flow control method according to claim 7, wherein the fluid component is a nucleic acid wafer. Turtle 9. The method of gravity complement manipulation as described in item 7 of the axis, wherein the fluid element is a laboratory wafer. 1◦. For example, the gravity-compensated fluid control method described in Item 7 of the Patent Fan Park is provided by the ethnic group consisting of the selected 1 pneumatic pump and the mechanical 彳 'moving. 11 · If the patent scope is 7th, the bean-based 1 compensation fluid control method IL cattle is made up of two identical substrates 13 1262254 containing channels, the channels of the substrate are interconnected to form the fluid In the passage, the opening aperture at both ends is increased to serve as an airflow inlet, and the aperture close to the airflow inlet forms a gradually increasing gradient. 12. The gravity-compensated fluid handling method of claim 7, wherein the fluid pathway comprises a plurality of planar conduits. 13. The gravity-compensated fluid handling method of claim 7, wherein the fluid conduit is positioned parallel to the direction of gravity prior to the open end of the fluid passage. 14. The gravity-compensated fluid handling method of claim 7, wherein the fluid conduit is disposed adjacent to the open end of the fluid passage at an appropriate angle in parallel with the direction of gravity.
TW91125292A 2002-10-25 2002-10-25 Gravity compensation type fluid manipulation device and method TWI262254B (en)

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