1262133 九、發明說明： 【發明所屬之技術領域】 本發明是關於—種壓電致_及其製造方法，特別是關 於-種可提高位移量之壓電致動器及其製造方法。 【先前技術】 微致動器（mi⑽actuatQr)係為將能量供給（p赃 卿办）轉化為位移以控财_構成要素的賴元件。致動器 主要的驅動方式可分為溫度驅動、壓電式和靜電式等，目前應 用於電腦週邊設備的喷墨頭之主要技術為壓電式，壓電致動器 係利用壓電陶纽加電壓產生形變之機制，擠壓液體產生祕 而將液體喷出。由於壓電陶竟具有反應速度快且容易控制液滴 之大小等優點，可提升列印速度和品質。 ▲壓電致動器乃是透過施加電壓驅使振動片產生位移，以 改變墨腔中之容積，以自噴孔中噴出墨水。因此當位移量提高 時，墨腔之容積的改變量也就變得較大。一般的壓電致動器係 由壓電致動元件再加上振動板所組成，其中，振動板的部:需 提供壓電致動器之整體結構強度，因此需要-定的厚度來維持 、_強度。但是振動板的厚度增加會影響壓電致動器的位移 量’而影響到壓電式噴墨頭的應用。振動板厚度對於壓 型變所導致的致動器位移量有相對的關係，當振動板厚度^ 時，將會使得致動器位移量不足，甚至無法達到將液滴= 壓力，以致於影響列印品質，但是振動板厚度太薄時，其結:BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric device and a method of manufacturing the same, and, in particular, to a piezoelectric actuator capable of increasing a displacement amount and a method of manufacturing the same. [Prior Art] The microactuator (mi(10) actuatQr) is a component that converts the energy supply into a displacement to control the components. The main driving methods of actuators can be divided into temperature driving, piezoelectric type and electrostatic type. The main technology of inkjet heads used in computer peripheral equipment is piezoelectric type, and piezoelectric actuators use piezoelectric ceramics. The application of a voltage creates a mechanism of deformation, which squeezes the liquid to create a secret and ejects the liquid. Since the piezoelectric ceramics have the advantages of fast reaction speed and easy control of the size of the droplets, the printing speed and quality can be improved. ▲ Piezoelectric actuators are designed to drive the diaphragm to shift by applying a voltage to change the volume in the ink chamber to eject ink from the nozzle. Therefore, as the amount of displacement increases, the amount of change in the volume of the ink chamber becomes larger. A general piezoelectric actuator is composed of a piezoelectric actuator and a vibrating plate. The portion of the vibrating plate needs to provide the overall structural strength of the piezoelectric actuator, and therefore requires a constant thickness to maintain, _strength. However, an increase in the thickness of the vibrating plate affects the displacement amount of the piezoelectric actuator, which affects the application of the piezoelectric ink jet head. The thickness of the vibrating plate has a relative relationship with the displacement of the actuator caused by the deformation. When the thickness of the vibrating plate is ^, the displacement of the actuator will be insufficient, and even the droplet = pressure will be reached, so that the column is affected. Print quality, but when the thickness of the vibrating plate is too thin, its knot:
1262133 強度又不足。 利荦所、=兼顧致動里和結_度’域國第_G785號專 )=綱腔内製作厚部和薄部，在振動的過程中，振動 月會先向厚部施壓，使厚部& F向y腔内側移動，以在墨腔中產生 壓力使墨水由厚部向__並從纽知，厚部係盘 涛部相連接⑽於會__齡趣度 Γ的同時’薄部並不會—同動作，反而是在墨水被喷出後， —致堡力產生财_力快速下降，才使薄部向勤產生腔内 侧移動。 ;、、、:而’致動量主要仍取決於麈電致動器之振動板所產生的 =移量’因此如何使振動板維持其結構強度同時能增加其致動 畺，成為當前亟需研發的重要課題。 【發明内容】 本發明提供—顧錢絲及其製造方法，藉由振動板的 凹才曰、、”構。又σ十來增加壓電致動量。並且利用凹槽設計使振動板 保持疋的厚度，以維持壓電致動器之整體結構強度。 本叙明係包含一種壓電振動板，係應用於噴墨頭之壓電致 動器，以對於噴墨頭之墨腔產生機械力，墨腔設有一喷孔，且 壓電振動片為墨腔的一面，一個以上的致動元件相對壓電振動 板没置於墨腔外部，其壓電振動板之特徵在於：壓電振動板面 向墨水腔之表面，紗—個以上之凹槽，以使壓電振動板振動 提高位移量，改變墨腔噴墨之容積。 1262133 而本發明所揭露之壓電致動器，係於振動板下表面具有一 個以上的凹槽，於振動板之上表面係形成下電極層，於下電極 層表面則具有壓電層，壓電層係於接受賴之後產生形變以提 供振動板機械力，壓電層表面則堆疊有上電極層即形成壓電致 動器。另再於振動板的下表面結合墨腔與喷孔片以形成壓電式 喷墨頭。 本發明更包含壓電致、的製造方法，其步驟包含有：提 供-振動板；於振動板上表面軸下電極層；於下電極層表面 形成壓電層；於壓電層表面形成上電極層；於振動板之^表面 衣作-個以上的凹槽。藉由振動板之下表面所製作之凹槽結 構，其基板的部分厚度可有效降低而增加壓電致動量，並且不 影響整體的結構強度。振動板的材質可為氧化锆、氧化紹等陶 莞材料’或是石夕、氧化石夕、氮化石夕等石夕晶材料。此外，上述步 ^中，更包含減薄基板的步驟，係將基板的整體厚度以餘刻或 疋研磨等方式減薄至所需尺寸，再行製作凹槽結構。 為使對本發_目的、構造職及其魏有進一步的瞭 解，鉍配合圖示詳細說明如下·· 、 【實施方式】 本發明所揭露之屢電致動器及其製造方法，藉由振動板的 凹槽結構設計’來減少振動板厚度對於致_位移量的影塑， 使其在不影響結構厚朗情況下增加振動板之位移量。 本發明之塵電致動器，係於振動板下表面具有一個以上的 1262133 凹槽’於振動板之上表面係形成下電極層，於下電極層表面則 具有壓電層’壓電層表關堆疊有上電極層即形成壓電致動 益。另再於振動板的下表面結合墨腔與喷孔片以形成壓電式喷 墨頭。 请參考第1圖，其為本發明第一實施例的示意圖，首先於 振動板100之上表面堆疊上電極層112、壓電層113和下電極 f 111以組成壓電致動結構，於振動板謂下表面係具有剖面 • 為長方形之複數個凹槽120,凹槽120之間係具有固定的間 隔。其中，其凹槽120的寬度係為100微米（卵）、長度為棚 微米以及其深度為1微米至95微米，而凹槽120之間所間隔 的基板部分係為別微米。同時其凹槽深度和振動板厚度之比 值的較佳值為WOO至95觸（凹槽深度/振動板厚度）。 而在以相同厚度的振動板作實驗，可得本發明第-實施例 鲁 ^致動位移量較一般平板壓電致動器之致動位移量約提高h4 倍旦其分析結果表示具有凹槽結構之振動板可以有效使致動位 大所以貫驗S登明具有凹槽設計之振動板確可增加致動 器的位移量。 其中’凹槽可根據製作方式或需求製作為不同形狀。請參 第2圖其為本發明第二實施例的示意圖，首先於振動板 、j表面堆登上電極層112、壓電層⑴和下電極層⑴ 以组賴電致麟構，於鶴請下表面係具有剖面為倒梯 1262133 形之複數個凹槽121。 本發明更包含上述之壓f致動H的製造方法，請參考第3 圖’其為本發明帛一實施例之製作流程圖。其步驟包含有··提 供-振動板(步驟310);於振動板上表面形成下電極層並加以 燒結（步驟再於下電極層表面形缝電層，並燒結成型 此壓電層（步驟咖）；於壓電層表面形紅電極層並加以燒結 (步驟340);以光微影方式於振動板的下表面細出複數個凹 槽（步驟35G)。另夕卜’再於振動板的下表面結合墨腔跟嘴孔片 即形成壓電喷墨頭結構。 其中’電極層可為銀、銀/纪、金或翻等導電材料，壓電 層則可為任意壓電材料所調製之槳料所形成，如氧化辞 (ZnO)、鈦酸鉛（PbTi〇3)或鍅鈦酸鉛pa) 等，電極層與壓電層的厚度依照不同需要加以調整，並以網 印、薄帶、娜和電妓解方法形成。振峡的鄉可為氧 化鍅、氧傾材料，、氧切、氮化料⑪晶材料。 此外，上述步驟中，更包含減薄基板的步驟，係將基板的整體 厚度以_或研磨方式先減薄至所需尺寸，再形相槽；以有 效降低壓電層下方的基板厚度而增加壓電致動量，並且不影響 整體的結構強度。 θ 為更詳細說明本發明，請參考第4圖，其為本發明應用例 之剖面結構示意圖，係將第一實施例之壓電致動器與包含墨腔 1262133 和噴孔片之流體結構結合以形成壓電喷墨頭。流體結構200包 含有墨腔220與具有喷孔211之喷孔片210，喷孔211係連接 於墨腔220,使流體進入墨腔220並經由振動板100施予壓力， 然後由噴孔211流出。壓電式致動器之振動板1〇〇係與流體結 構200結合，以對流入墨腔220之流體施壓，使其由噴孔211 流出。其中，壓電式致動器之振動板1〇〇，其下表面具有一個 以上的凹槽110。於此應用例中，係藉由壓電層113所產生之 機械形變，進而推動振動板1〇〇產生機械力以施壓於流入墨腔 22〇之流體。 雖然本發日狀較佳實施_露如上所述，财並非用以限 疋本Ί任何_習相關技藝者，在不脫離本發明之精神和範 圍内，當可作些許之更動與潤飾，因此本發明之專利保護範圍& 須視本說明書所附之申請專利範圍所界定者為準。 【圖式簡單說明】 第1圖為本發明第一實施例的示意圖； 第2圖為本發明第二實施例的示意圖； 第3圖為本發明第一實施例之製作流程圖；及 第4圖為本發明應用例之剖面結構示意圖。 【主要元件符號說明】 100 振動板 111 下電極層 1262133 112 上電極層 113 壓電層 120 凹槽 121 凹槽 200 流體結構 210 喷孔片 211 喷孔 220 墨腔 步驟310 提供一振動板 步驟320 於振動板上表面形成下電極層並加以燒結 步驟330 於下電極層表面形成壓電層，並燒結成型此壓電層 步驟340 於壓電層表面形成上電極層並加以燒結 步驟350 以光微影方式於振動板的下表面蝕刻出複數個凹槽1262133 Insufficient strength. Lisho, = both actuating and knotting _ degree 'domain country _G785 special) = making thick and thin parts in the cavity, in the process of vibration, the vibration month will first apply pressure to the thick part, so that The thick portion & F moves toward the inside of the y cavity to generate pressure in the ink chamber so that the ink is thickened from the thick portion to the __ and the thick portion is connected to the disk portion (10) while the __ age is at the same time 'The thin part does not--the same action, but after the ink is ejected, the Fortune force produces a wealthy _ force drops rapidly, so that the thin part moves to the inner side of the cavity. ;,,,: and 'actuation is mainly determined by the amount of shift generated by the vibrating plate of the electric actuator. So how to make the vibrating plate maintain its structural strength and increase its actuation enthalpy, which is urgently needed for research and development. Important topic. SUMMARY OF THE INVENTION The present invention provides a Guchen silk and a manufacturing method thereof, which increase the piezoelectric actuator by the concave shape of the vibrating plate, and increase the piezoelectric actuator amount by using the groove design. The thickness is to maintain the overall structural strength of the piezoelectric actuator. The present invention includes a piezoelectric vibration plate applied to a piezoelectric actuator of an inkjet head to generate mechanical force for the ink chamber of the inkjet head. The ink cavity is provided with a spray hole, and the piezoelectric vibrating piece is one side of the ink cavity, and one or more actuating elements are not placed outside the ink cavity relative to the piezoelectric vibrating plate, and the piezoelectric vibrating plate is characterized in that the piezoelectric vibrating plate faces The surface of the ink chamber, the yarn is more than one groove, so that the piezoelectric vibration plate vibrates to increase the displacement amount, and the volume of the ink chamber is changed. 1262133 The piezoelectric actuator disclosed in the present invention is under the vibration plate. The surface has more than one groove, the lower electrode layer is formed on the upper surface of the vibrating plate, and the piezoelectric layer is formed on the surface of the lower electrode layer, and the piezoelectric layer is deformed to receive the mechanical force of the vibrating plate. The surface of the layer is stacked The electrode layer forms a piezoelectric actuator. The ink chamber and the orifice sheet are combined on the lower surface of the vibrating plate to form a piezoelectric inkjet head. The invention further comprises a piezoelectric manufacturing method, the steps of which include Providing a vibrating plate; forming a piezoelectric layer on the surface of the vibrating plate; forming a piezoelectric layer on the surface of the lower electrode layer; forming an upper electrode layer on the surface of the piezoelectric layer; and making more than one groove on the surface of the vibrating plate By the groove structure made by the lower surface of the vibrating plate, the partial thickness of the substrate can be effectively reduced to increase the piezoelectric actuation amount, and the overall structural strength is not affected. The material of the vibration plate can be zirconia, oxidized, etc. "Taowan material" or Shi Xi, oxidized stone eve, nitrite eve, etc. In addition, the above step further includes the step of thinning the substrate, the entire thickness of the substrate is polished by rubbing or rubbing, etc. The method is thinned to the required size, and the groove structure is further formed. In order to further understand the present invention, the structure, and the Wei, the following is a detailed description of the following: (Embodiment) The present invention discloses Repeated electricity The device and the manufacturing method thereof reduce the thickness of the vibrating plate by the groove structure design of the vibrating plate to increase the displacement of the vibrating plate without affecting the structural thickness. The dust electric actuator has more than one 1262133 groove on the lower surface of the vibration plate to form a lower electrode layer on the upper surface of the vibration plate, and a piezoelectric layer on the surface of the lower electrode layer. The piezoelectric layer is stacked on the surface. The upper electrode layer forms a piezoelectric actuator. The ink chamber and the orifice sheet are combined on the lower surface of the diaphragm to form a piezoelectric inkjet head. Referring to FIG. 1, it is a first embodiment of the present invention. In the first embodiment, the upper electrode layer 112, the piezoelectric layer 113 and the lower electrode f 111 are stacked on the upper surface of the vibrating plate 100 to form a piezoelectric actuating structure, and the vibrating plate has a cross section on the lower surface. 120, the grooves 120 have a fixed interval therebetween. Wherein, the groove 120 has a width of 100 micrometers (egg), a length of shed micrometers, and a depth of 1 micrometer to 95 micrometers, and the portion of the substrate spaced between the grooves 120 is other micrometers. At the same time, the preferred ratio of the groove depth to the thickness of the vibrating plate is from 0OO to 95 (groove depth/vibration plate thickness). In the experiment with the vibration plate of the same thickness, the actuation displacement of the first embodiment of the present invention is improved by about 4 times than that of the general flat piezoelectric actuator. The analysis result indicates that the displacement has a groove. The vibrating plate of the structure can effectively make the actuating position large, so that the vibrating plate with the groove design can increase the displacement of the actuator. The 'grooves' can be made into different shapes depending on the manufacturing method or requirements. 2 is a schematic view of a second embodiment of the present invention. First, the electrode layer 112, the piezoelectric layer (1) and the lower electrode layer (1) are stacked on the vibrating plate and the j surface to form an electric lining structure. The surface has a plurality of grooves 121 having a shape of an inverted step 1262133. The present invention further includes the above-described manufacturing method of the pressure f actuation H. Please refer to FIG. 3, which is a flow chart for the production of the first embodiment of the present invention. The step comprises: providing a vibration plate (step 310); forming a lower electrode layer on the surface of the vibration plate and sintering (stepping on the surface of the lower electrode layer to form an electrical layer, and sintering the piezoelectric layer (step coffee) a red electrode layer is formed on the surface of the piezoelectric layer and sintered (step 340); a plurality of grooves are formed on the lower surface of the vibrating plate by photolithography (step 35G). Further, the vibration plate is further The lower surface is combined with the ink cavity and the orifice plate to form a piezoelectric inkjet head structure. The 'electrode layer can be silver, silver/ki, gold or turn conductive materials, and the piezoelectric layer can be modulated by any piezoelectric material. Formed by a slurry, such as oxidized (ZnO), lead titanate (PbTi〇3) or lead lanthanum titanate (Pa), etc., the thickness of the electrode layer and the piezoelectric layer are adjusted according to different needs, and screen printing, thin strip , Na and electric sputum methods are formed. Zhenxia's township can be oxidized bismuth, oxygen-dipping material, oxygen-cutting, nitride material 11 crystal material. In addition, in the above steps, the step of thinning the substrate further comprises: firstly thinning the overall thickness of the substrate to a desired size by _ or grinding, and then forming a phase groove; thereby increasing the thickness of the substrate under the piezoelectric layer to increase the pressure. The amount of electrical actuation does not affect the overall structural strength. θ is a more detailed description of the present invention, please refer to FIG. 4, which is a cross-sectional structural view of an application example of the present invention, which combines the piezoelectric actuator of the first embodiment with a fluid structure including an ink chamber 1262133 and a orifice sheet. To form a piezoelectric inkjet head. The fluid structure 200 includes an ink chamber 220 and a spray orifice 210 having a spray hole 211. The spray hole 211 is connected to the ink chamber 220 to allow fluid to enter the ink chamber 220 and apply pressure through the vibration plate 100, and then flow out through the spray hole 211. . The vibrating plate 1 of the piezoelectric actuator is coupled to the fluid structure 200 to pressurize the fluid flowing into the ink chamber 220 to flow out through the orifice 211. Among them, the piezoelectric actuator has a diaphragm 1 having a groove 110 on its lower surface. In this application example, the mechanical deformation caused by the piezoelectric layer 113 causes the vibrating plate 1 to generate a mechanical force to apply pressure to the fluid flowing into the ink chamber 22 . Although the present invention is preferably implemented as described above, it is not intended to limit the scope of the present invention, and it is possible to make some changes and refinements without departing from the spirit and scope of the present invention. The patentable scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a first embodiment of the present invention; FIG. 2 is a schematic view of a second embodiment of the present invention; FIG. 3 is a flow chart of the first embodiment of the present invention; The figure is a schematic cross-sectional structure of an application example of the present invention. [Main component symbol description] 100 vibrating plate 111 lower electrode layer 1262133 112 upper electrode layer 113 piezoelectric layer 120 groove 121 groove 200 fluid structure 210 orifice sheet 211 nozzle hole 220 ink chamber step 310 provides a vibrating plate step 320 Forming a lower electrode layer on the surface of the vibrating plate and performing a sintering step 330 to form a piezoelectric layer on the surface of the lower electrode layer, and sintering the piezoelectric layer step 340 to form an upper electrode layer on the surface of the piezoelectric layer and performing a sintering step 350 to lithography a method of etching a plurality of grooves on the lower surface of the vibrating plate