l26〇42〇 九、發明說明： 【發明所屬之技術領域】 本發明係《於-種單以球格_板檢顯 =^法’ _是指-種利用可以同時控制影像操取 ς 里之方式來補正定位球格陣列板以利於檢測之 種早片式球格陣列板檢測機之補正定位方法。 【先前技術】 饮仗很夕興我們日常生活 1 逐漸的微小化，在這㈣子化的產品巾所使用的μ 凡牛’均叫導體縣為主流，使得該電子元件 ^ 電，。然而封裝結果的好侧^ 及可靠度’因此許多高密度、高效能之半 ίΓίί、體技術的快速發展，使很多與我們日常生活相關之 電子 幅關 凌電 之主 ，如球格陣職„ grid arra-二 以錫球代部以陣列的方式佈置許多錫球， ”封F;上先以金屬導線架在周圍做引腳的方式。此種巧 ；ί：ΐ：^ ^ 其具有的良好電氣、散埶性當 小封裝體面積的雜 t 及可有效縮 裝方式。 而求成長率遇尚於其他型態的封 或者=:::二每:，伽 課題。由於習用η 常的檢測也就成為—重要的 利用吸取襄置將測球格陣列板之電性的時候，係 、放置在載&(earrier bQard)上之球格陣列 Ϊ260420 板取出然後再將該球格陣列板置入於一承载 承載機構之導邊使該球格陣列板滑到定位， =由該 可以接觸該球格陣列上之錫球以偵測電性。缺 十陣列 球格陣列裝置之載盤本身之加工公差、球格陣柄=承載 之公差、球格陣列板輪送時因震動造成之些微 具有 ===差的多重影響下，導致當承載機二 u車列板時會產生χ方向、¥方向以及0 戰。亥球 該探針陣列無法準確對到該錫球而產生檢測誤判。夕，使得 以及Γί 需一種單片式球格陣列板檢測機之補正定位f置 及方法，來解決習用技術所產生之問題。 衣置 【發明内容】 本發明的主要目的是提供一種單片式球 及方法’其係利用影像擷取元 ❿ 準確性之=仃補正球格陣列板之位置，達到提升檢挪 本考5明的次要目的是提供一稽i 正定位裝置以及方法，^仏陣列板檢測機之補 影像操取树调，同步控制 升檢測機台制翻之目的韻不同尺奴球_列板以提 為了達到上述之目的，本發明. 檢測機之補正定位裝置，該檢# /、種早片式球格陣列板 板之承載台以及可以檢測線可承載娜 特徵在於：具有可擷取該球格陣列二憐列真該補正定位裝置其 操取部，其係包括：—螺桿 反之—側故區域影像之-影像 /、係具有一第一方向螺紋體以及 6 1260420 動力輸人部，其係與該螺桿部相連接， 一第一方向螺紋體； 一=螺紋體以及該第二方向螺紋體接、對=別與該第 一支架部可於該螺桿部轉動時沿—第—方部其中之 __1二方向進行運動；以及—對影r—支 與該對支架部相連接。 了〜像蝻取體，其係分別 板檢測機之補正種單片式球格陣列 /)提供—球格陣列板檢測機，該‘係包括有一承載 顺，影細取部，該承載台财承載該球格陣 ^ 、構顺、可檢測該球格_板之線路，該 係可揭取該球格陣列板之一側邊之影像； " (b)使該承載台承載該球格陣列板，· 像；（〇使該影像齡部掏取該球格陣列板—側邊之兩區域影 ⑷於該兩區域之影像各尋找—特徵點，以絲出—直 (e)將該錄與—鮮軌較， 。’ —軸偏差以及-第二軸偏差；叹 (0進行一補正動作。 2蚊’·正_係皱跡載料㈣正該偏 之轴正該第 一軸偏差之一弟二轴運動。 較佳的是，_正_係為使娜針_進行補正該偏差角 1260420 第二軸=運動—娜之纖以及補正該 •之一第 •車由運動。 【實施方式】 為使貴審查委員能對本發明 步的認知與瞭解，下文特 文目白及功月“更進- 計的理念原由進行說明，===物1細部結構以及設 點，詳細說明陳述如下：仔♦查委貝可以了解本發明之特 佳實圖係為本發明之影像擷取裝置第—較 機晋。if明係提供一種單片式球格陣列板檢測 板之承載台=檢 ;寺彳1=有可~陣列板側邊區 了如像娜體24a、24b。該螺桿部2卜其係呈有一第 ::=:=2广?及一第二方向螺紋體212,在本實施例中該第 °以、—11係為一右旋螺紋’該第二方向螺紋體212係為 -左《紋。該動力輸人部22，其係與該螺桿部21相連接，可以 =供動力f綱桿部21騎轉動，在本實闕中，_力輸入部 22可以為—旋扭’可以藉由操作者旋轉該旋扭而使該螺桿部21 進行轉動。 亥對支m3a、23b ’其係分別與該第一方向螺紋體211以 及口亥第一方向螺紋體212相連接，該對支架部23a、咖其中之一 支架部23a可於該螺桿部轉動時沿一第一方向似進行運動，而另 -支架部23b則沿-第二方向95進行運動，由於在本實施例中， 1260420 ===:二21;係與該第二方向螺紋體212之螺紋方向相 /、干口 進行轉動時，該第一方向94以及該第一 =為相反之方向。該對影像娜體 = 该對支架部23a、23b相連接，藉由 j刀別與 時控制該對影像獅二”之轉動可以同 α取體24a、24b進行移動，達到配合不同尺寸 球格陣列板而同時調整該對影像擷取體24a、24b之間距，你 仏亥對=像擷取體2½、24b可以娜該球格陣列體之侧邊影 以減少操作時間之浪費。該對影像操取體施、係可選 偶合元件（Charge-Coupled Device, CCD)。 …請，續參酬-B所示，制係為本發明之影像擷取裝置第 父佳貫施例俯視示意圖。在本實施例中主要是改變該動力輸入 部之貫施方式，為了配合自動化的控制，該動力輸入部25係包括 有一皮帶輪253、一皮帶252以及一旋轉動力體251，該皮帶輪253 係與該螺桿部21之一端相連接，該皮帶252係連接於該皮帶輪253 以及泫旋轉動力體251。其中該旋轉動力體251係可選擇為一步進 馬達以及一伺服馬達其中之一者。藉由本實施例之設計，可二針 對不同球格陣列體之尺寸大小由程式自動控制該旋轉動力體25之 轉動角度，進而調整該對影像擷取體24a、24b之間距，使該對影 像操取體24a、24b可以搁取該球格陣列板之側邊區域影像。、 清纟貝茶閱圖^一 A所不’该圖係為本發明之支架部第一較佳 實施例俯視示意圖。該支架部23a係包括有一軌體231、一托體 233以及一滑動體232。該軌體23卜其係固設於該檢測機上。該 托體233之一侧係以一固定架234與該影像擷取體24a相連接， 在本實施例中，該側係具有一斜面235使該影像擷取體24a可以 呈一斜角以順利擷取球格陣列板侧邊影像，該托體233之另一側 係與該螺桿部（圖中未示）相連接。該滑動體232，其係與該把體 1260420 232鱗勒驶"滑動體^32可於該軌體231上滑動。其中該滑動體 導軌組豆^組合實施方式係為可選擇一滾珠導軌組以及線性 部第者。請參觸二β所示，該圖係為本發明之支架 體，例俯視示意圖。在圖示中該滑動體232a係為一輪 ^之糖叙:她體231&上進行滾動。該支架部之設計係為將該螺桿 圍比、為紐位移運動，因此任何在紐念之設計實施範 圍白在本發明精神之涵蓋範圍。 A、圖^1來將針對本發明之補正雜方法進行解述，請參閱圖三 、、^m ^及圖四所不，其中圖三A係為本發明之補正定位方法 日’日圖三β係、為本發明之補正植裝置侧視示意圖，圖四係 圖四^所之二像擷取裝置擷取球格陣列板之影像俯視示意圖。如 二^、+不，該球格陣列板8係被置放於一載盤上7，以利檢側進 订補正定位方法係包括下列步驟： 步驟31-提供一球格陣列板檢測機，該檢測機係包括有一承 載台11、一探針陣列12以及一影像擷取部2，該承 載台11係可承載一球格陣列板8，該探針陣列12係 可檢蜊該球格陣列板8之線路，該影像擷取部2係可 梅取該球格陣列板8之一側邊之影像； 步驟32〜使該承載台11承載該球格陣列板8 ; 乂驟33〜使該影像擷取部2擷取該球格陣列板8 —侧邊之兩 區域影像； 步驟34-於該兩區域之影像各尋找一特徵點，以定義出一直 線； 步驟35-將該直線與一標準線比較，以計算出一偏差角度、 1260420 1-軸偏差以及一第二軸偏差 ，驟36、進行—補正動作。 多二：定位裝置係如前述所說明之結構，在此並不 步驟卿，相軸麵_。於該 該步驟3^=影像4i、42係為該球格陣顺之角落區域。 之知'谜點係可於該端點區域^之 令該特徵點4Π、421係^ ’在本實施例 何可以當作特徵點W點’除此之外，任 發明所謂之特trr ’例如球格陣顺之端點角都可以為本 一 U，將5亥兩特徵點411、421連成—直綾％。社灸 閱圖二D所示，該圖係為偏差值示 明> 線，直線96係為該直線 為H ^ 97係為該標準 偏差，~係為該第：_差。度，ΛΧ係為該第一軸 標準檢測位置"^線97係為該球格陣列板於 松置日社述之兩特徵點4U、421之連線。 雜驟36之補正動作可以有以下之實 ρ =:圖係為本發明•方式第 動 1==Γ=針陣仙妨齡祕❹度之―旋轉運 差之έ 軸運動91以及補正該第二軸偏 Γ2了―^動92，_本方式，當制完料，簡針陣列 12可以回㈣齡位置前之原點，叫下—片之 _ :片⑽陶點w，術—㈣= 的方式來進行。除了上述之方法，也可《㈣u所示，該圖係 1260420 ，、、- 補方式第二較佳實施例示意圖。其中兮補正私I, 為使該承載台n進杆插-補正動作係 進仃補正戎偏差角度之一旋轉運動93 一轴偏差㈣正料二贿 = 動92。參閱圖三Β所示 乐—軸運 、 私该承載邊球格陣列板之載盤具有載 n 1 ’為了避免在補正動作的時候與該載盤侧壁71干涉 此該承載台11會將該球格陣列板8，舉起超過該載盤侧壁：之言 度。虽檢測完畢之後，如果該承載台u直接將該球格陣列板8放 ===格陣列板8會因為先前之補正動作的關係而無法被 f到錢盤7上，因此該承載台η會先恢復補正前之位置，然 葡使得該承載台上之球格陣列板8可以順利被放回到 错由上权補正方式’可以減少因為加工公差所造成之對 =過程式計算偏差，由控制該承載台或者是探針陣 :來進行補正，如此不管是什麼情況之偏差都可以進行補正，以 勿該探針陣顺該雜_板之錫翁誤接觸之動作。 唯以上所述者，僅為本發明之較佳實施丫列 、 务月之要義所在，亦不脫離本發明之於神和I々門 故都應視為本發_進—步實雜況。 粑圍’ 易之ΖΓϋ’本發軸於具有_容易、製造簡單以及裝配容 in、1可以滿足#界之f求’進吨高該產業之競爭力， 明專利法所規定申請發明所f具備之要件，故麦依法 明專利之申請，謹請貴審查委 賜準專利為禱。 才间心亍番視，亚 1260420 【圖式簡單說明】 圖- A係為本發日狀影_取裝置第—較掃視示意 圖。 、 圖-B係為本發日狀影_取裝置第二紐實細俯視 圖。 圖:A係為本發明之支架部第—較佳實施例俯視示意圖。 圖二B係為本發明之支架部第二較佳實施例俯視示意圖。 • 圖三A係為本發明之補正定位方法流程圖。 圖^係為本發明之補正定位裝置側視示意圖。 Η二C係為影像擷取示意圖。 圖二D係為偏差值示意圖。 圖四係為本發明之影像掏取裳置擷取球格陣列板之影像俯視 . 示意圖。 圖五Α係為本發明之補正方式第—較佳實施例示意圖。 圖五B係為本發明之補正方式第二較佳實施例示意圖。 圖號說明： ⑩ 1-檢測機 1卜承載台 12-探針陣列 2-影像擷取裴置 21 -螺桿部 21卜第一方向螺紋 212-第二方向螺紋 22-動力輸入部 23a、23b-支架部 1260420 231、 231a-執體 232、 232b-滑動體 233- 托體 234- 固定架 235- 斜面 24a、24b-影像擷取體 25-動力輸入部 251- 旋轉動力體 252- 皮帶 ’ 253—皮帶輪 41、42-區域影像 411、421-特徵點 91- 旋轉運動 92- 第一軸運動 93- 第二軸運動 94- 第一方向 95- 第二方向 馨 96-直線 97-標準線 7- 載盤 71-載盤側壁 8- 球格陣列板 14L26〇42〇9, invention description: [Technical field of invention] The present invention is a "single-type single-segment_board inspection=^ method" _ means that the utilization can simultaneously control the image manipulation operation The method is to correct the positioning method of the positioning grid array plate to facilitate detection of the early patch type grid array board detector. [Prior Art] Drinking is very good in our daily life 1 Gradually miniaturized, the μ 凡牛 used in this (four) sub-product towel is called the conductor county as the mainstream, making the electronic component ^ electric. However, the good side of the packaging results and the reliability', therefore, many high-density, high-efficiency, and rapid development of the body technology, so that many of the electronic amplitude related to our daily life, such as the ball grid „ The grid arra-two sets a number of solder balls in an array in the form of an array of solder balls, "F; the first way to make pins around the metal lead frame. This kind of cleverness; ί:ΐ:^ ^ It has good electrical and divergent properties when the small package area is miscellaneous and can be effectively reduced. And the growth rate is still in other types of seals or =::: two each:, gamma subject. Since the conventional detection of η is also the most important time to use the suction device to measure the electrical properties of the ball grid array board, the frame, placed on the load & (earrier bQard), the array of Ϊ 260420 is taken out and then The ball grid array plate is placed on the leading edge of a carrying carrier mechanism to slide the ball grid array plate to the position, and the solder ball on the ball grid array can be contacted to detect electrical properties. The processing tolerance of the carrier disk itself of the ten-array grid array device, the tolerance of the ball grid handle = the tolerance of the carrier, and the multiple effects of the vibration of the ball grid array plate due to the vibration caused by the vibration, resulting in the carrier When the second car is stacked, it will produce the χ direction, the ¥ direction, and the 0 battle. Hail Ball This probe array cannot accurately detect the misjudgment of the solder ball. In the evening, and Γί need a correction method for the correction of the single-piece grid array board detector to solve the problems caused by the conventional technology.衣置 [Summary of the Invention] The main object of the present invention is to provide a one-piece ball and method 'the use of image capture element 准确性 accuracy = 仃 correct the position of the grid array plate, to improve the detection of the test The secondary purpose is to provide a positive positioning device and method, ^ 仏 array plate detector to complement the image manipulation tree adjustment, synchronous control of the detection machine to turn the purpose of the rhyme different 尺 slave ball _ column to promote To achieve the above object, the present invention. The correction positioning device of the detecting machine, the detecting table of the detecting type /, the early type of the ball grid array board, and the detectable line can carry the nano characteristic: having the array of the ball grid The second pity column should correct the operation part of the positioning device, which includes: - the screw is reversed - the side is the image of the area - the image / has a first direction thread body and the 6 1260420 power input part, which is The screw portion is connected, a first direction threaded body; a = thread body and the second direction thread body connection, pair = and the first bracket portion can be rotated when the screw portion is along - the first portion of the _1 exercise in two directions And - Movies r- branched and connected to the pair of bracket portions. ~ 蝻 蝻 , , , , , , 板 板 板 板 板 板 板 板 板 板 板 板 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球 球Carrying the grid array, constructing, and detecting the line of the grid_board, the system may extract an image of one side of the grid array panel; " (b) causing the carrying platform to carry the grid Array plate, · image; (〇 causes the image age to capture the grid array plate - the two sides of the image (4) in the two regions of the image to find - feature points, to silk out - straight (e) Recording and - fresh track comparison, '-axis deviation and - second axis deviation; sigh (0 for a corrective action. 2 mosquito '· positive _ wrinkle load (four) is the axis of the deviation is the first axis deviation One of the two axes of motion. Preferably, the _ positive _ system is used to correct the angle of the needle 12 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Means] In order to enable your review committee to understand and understand the steps of the present invention, the following is a brief introduction to the concept of "more progress". Ming, === Item 1 detailed structure and set point, the detailed description is as follows: Aberdeen ♦ Check the committee can understand that the special best picture of the present invention is the image capturing device of the present invention - the machine Jin. A single-piece ball grid array board is provided for the bearing table=check; the temple 1=there is a side panel of the array board such as the body body 24a, 24b. The screw part 2 has a number: =:=2 wide and a second direction threaded body 212. In the present embodiment, the first angle is -11 is a right-handed thread 'the second-direction threaded body 212 is -left". The input portion 22 is connected to the screw portion 21, and can be rotated by the power supply member. In the present embodiment, the force input portion 22 can be - the twist can be rotated by the operator. The screw portion 21 rotates the screw portion 21. The pair of legs m3a, 23b' are respectively connected to the first direction threaded body 211 and the first direction threaded body 212, and the pair of bracket portions 23a One of the bracket portions 23a can move in a first direction when the screw portion rotates, and the other-bracket portion 23b moves in the second direction 95. In the present embodiment, 1260420 ===: two 21; when the dry direction is rotated with the thread direction of the second direction thread body 212, the first direction 94 and the first direction are opposite directions. The pair of image bodies = the pair of bracket portions 23a, 23b are connected, and the rotation of the pair of images lions 2" can be controlled by the j-knife and the time to move with the alpha-collecting bodies 24a, 24b to match the different size of the ball The array plate simultaneously adjusts the distance between the pair of image capturing bodies 24a, 24b, and the pair of capturing bodies 21⁄2, 24b can be used to reduce the side time of the ball grid array body to reduce the waste of operation time. Handle the body, select the optional coupling element (Charge-Coupled Device, CCD). ...please, continue to participate in the reward-B, the system is a top view of the first embodiment of the image capture device of the present invention. In the embodiment, the power input unit is mainly changed. In order to cooperate with the automatic control, the power input unit 25 includes a pulley 253, a belt 252 and a rotating power body 251. One end of the screw portion 21 is connected, and the belt 252 is coupled to the pulley 253 and the cymbal rotary power body 251. The rotary power body 251 can be selected as one of a stepping motor and a servo motor. According to the design of the embodiment, the rotation angle of the rotating power body 25 can be automatically controlled by the program for the size of the different ball grid array body, thereby adjusting the distance between the pair of image capturing bodies 24a and 24b, so that the pair of images can be manipulated. The take-up bodies 24a, 24b can take an image of the side regions of the ball grid array board. The present invention is a top view of the first preferred embodiment of the stent portion of the present invention. The bracket portion 23a includes a rail body 231, a bracket body 233, and a sliding body 232. The rail body 23 is fixed to the detector. One side of the body 233 is connected to the image capturing body 24a by a fixing frame 234. In this embodiment, the side body has a slope 235, so that the image capturing body 24a can be inclined at an angle. The side image of the ball grid array plate is captured, and the other side of the tray body 233 is connected to the screw portion (not shown). The sliding body 232 is slidable with the body 1260420 232. The sliding body 32 is slidable on the rail body 231. Wherein the sliding body guide group combination embodiment is selected from the group of ball guides and the linear portion. Please refer to the second β shown in the figure, which is a schematic view of the stent body of the present invention. In the illustration, the sliding body 232a is a round of sugar: the body 231 & scrolls. The design of the bracket portion is to move the screw ratio and the displacement of the screw. Therefore, any design implementation in Newton is white in the spirit of the present invention. A, Fig. 1 to explain the method of correcting the hybrid method of the present invention, please refer to Fig. 3, ^m ^ and Fig. 4, wherein Fig. 3A is the correction positioning method of the present invention. The β system is a side view of the correcting planting device of the present invention, and FIG. 4 is a schematic top view of the image of the ball grid array plate taken by the two image capturing device of FIG. If the two grids are not placed, the grid array board 8 is placed on a carrier tray 7 to facilitate the inspection side alignment correction positioning method comprising the following steps: Step 31 - providing a ball grid array board inspection machine, The detecting machine includes a carrying platform 11, a probe array 12 and an image capturing unit 2, which can carry a ball grid array board 8, and the probe array 12 can detect the ball grid array. In the circuit of the board 8, the image capturing unit 2 can capture the image of one side of the ball grid array board 8; Step 32~ enable the carrier 11 to carry the ball grid array board 8; Step 33~ The image capturing unit 2 captures the image of the two regions of the side of the ball grid array board 8; Step 34 - Find a feature point for each of the images of the two regions to define a straight line; Step 35 - The line and a standard Line comparison, to calculate a deviation angle, 1260420 1-axis deviation and a second axis deviation, step 36, to perform - correction action. More than two: the positioning device is as described above, and is not stepped here, the phase axis _. In this step, the 3^=images 4i and 42 are the corner regions of the ball grid. It is known that the 'mystery' can be in the end point area of the feature point 4Π, 421 system ^ 'what can be regarded as the feature point W point in this embodiment', in addition to the invention, the so-called special trr ' The end angle of the spherical array can be a U, and the two feature points 411 and 421 are connected to each other. The moxibustion is shown in Figure 2D. This figure shows the deviation value. The line 96 is the line. The line is H ^ 97 for the standard deviation, and ~ is the number: _ difference. The degree is that the first axis standard detection position "^ line 97 is the connection of the two feature points 4U, 421 of the ball grid array board. The correction action of the miscellaneous 36 can have the following real ρ =: the diagram is the invention • the method of the first movement 1 == Γ = needle array 妨 妨 ❹ ❹ ― ― ― ― 旋转 旋转 旋转 轴 轴 轴 轴 轴 轴 轴 轴 轴 轴 轴 轴 轴Two-axis hemiplegia 2 - ^ move 92, _ this way, when the material is finished, the simple needle array 12 can return to the origin of the (four) age position, called the next - slice _: film (10) pottery point w, surgery - (four) = The way to proceed. In addition to the above method, it can also be shown in (4)u, which is a schematic diagram of a second preferred embodiment of the 1260420, and the complementary mode. In order to make the carrying platform n into the rod insertion-correction action system, the correction angle is one of the deviation angles of the rotation movement 93. One-axis deviation (four) is expected to be bribe = 92. Referring to Figure 3, the carrier of the card-array panel of the load-bearing side has a load n 1 ' in order to avoid interference with the side wall 71 of the carrier during the correcting action, the carrier 11 will The grid array panel 8 lifts beyond the side wall of the carrier. After the detection, if the carrier u directly puts the grid array board 8 === the grid array board 8 will not be able to be f to the money tray 7 due to the previous corrective action, the carrier η will Firstly, the position before the correction is restored, and then the ball grid array plate 8 on the loading platform can be smoothly put back into the wrong manner by the right compensation method, which can reduce the deviation due to the machining tolerance, the procedural calculation deviation, and the control The carrier or the probe array: to correct, so that no matter what the deviation of the situation can be corrected, so that the probe array does not interfere with the action of the miscellaneous plate. Only the above-mentioned ones are only the preferred embodiment of the present invention, and the meaning of the moon is not deviated from the present invention.粑 ' ' 易 ΖΓϋ 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本The requirements, therefore, the application of the law of the law, I would like to ask the review committee to grant the patent as a prayer.才 亍 , , 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚 亚Figure-B is the top view of the second line of the hair-shaping device. Figure: A is a top plan view of a preferred embodiment of the stent portion of the present invention. 2B is a top plan view showing a second preferred embodiment of the bracket portion of the present invention. • Figure 3A is a flow chart of the method of correct positioning for the present invention. Figure 2 is a side elevational view of the correction positioning device of the present invention. Η二C is a schematic diagram of image capture. Figure 2D is a schematic diagram of the deviation value. Figure 4 is a top view of the image of the image capture panel of the image capture device of the present invention. Figure 5 is a schematic view of a preferred embodiment of the present invention. Figure 5B is a schematic view of a second preferred embodiment of the correction mode of the present invention. Description of the drawings: 10 1-Detector 1 Bu carrier 12 - Probe array 2 - Image capture device 21 - Screw portion 21 - First direction thread 212 - Second direction thread 22 - Power input portion 23a, 23b - Bracket portion 1260420 231, 231a - body 232, 232b - sliding body 233 - body 234 - fixing frame 235 - inclined surface 24a, 24b - image capturing body 25 - power input portion 251 - rotating power body 252 - belt ' 253 - Pulley 41, 42-area image 411, 421 - feature point 91 - rotary motion 92 - first axis motion 93 - second axis motion 94 - first direction 95 - second direction xin 96 - straight line 97 - standard line 7 - load Disk 71 - Carrier Side Wall 8 - Ball Array Plate 14