TWI257979B - Dynamic bearing manufacturing method - Google Patents

Dynamic bearing manufacturing method Download PDF

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Publication number
TWI257979B
TWI257979B TW094128355A TW94128355A TWI257979B TW I257979 B TWI257979 B TW I257979B TW 094128355 A TW094128355 A TW 094128355A TW 94128355 A TW94128355 A TW 94128355A TW I257979 B TWI257979 B TW I257979B
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Taiwan
Prior art keywords
bearing
dynamic pressure
photoresist
wall
pressure bearing
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TW094128355A
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Chinese (zh)
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TW200708673A (en
Inventor
Lee-Long Chen
Chien-Hsiung Huang
Shih-Ming Huang
Wen-Shi Huang
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Delta Electronics Inc
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Priority to TW094128355A priority Critical patent/TWI257979B/en
Priority to US11/405,631 priority patent/US20070039185A1/en
Priority to JP2006186659A priority patent/JP2007051770A/en
Application granted granted Critical
Publication of TWI257979B publication Critical patent/TWI257979B/en
Publication of TW200708673A publication Critical patent/TW200708673A/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00—Sliding-contact bearings for exclusively rotary movement
    • F16C17/02—Sliding-contact bearings for exclusively rotary movement for radial load only
    • F16C17/026—Sliding-contact bearings for exclusively rotary movement for radial load only with helical grooves in the bearing surface to generate hydrodynamic pressure, e.g. herringbone grooves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/10—Construction relative to lubrication
    • F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/14—Special methods of manufacture; Running-in
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2220/00—Shaping
    • F16C2220/20—Shaping by sintering pulverised material, e.g. powder metallurgy
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2220/00—Shaping
    • F16C2220/60—Shaping by removing material, e.g. machining
    • F16C2220/62—Shaping by removing material, e.g. machining by turning, boring, drilling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2220/00—Shaping
    • F16C2220/80—Shaping by separating parts, e.g. by severing, cracking
    • F16C2220/82—Shaping by separating parts, e.g. by severing, cracking by cutting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2223/00—Surface treatments; Hardening; Coating
    • F16C2223/30—Coating surfaces
    • F16C2223/40—Coating surfaces by dipping in molten material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2223/00—Surface treatments; Hardening; Coating
    • F16C2223/30—Coating surfaces
    • F16C2223/42—Coating surfaces by spraying the coating material, e.g. plasma spraying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2223/00—Surface treatments; Hardening; Coating
    • F16C2223/30—Coating surfaces
    • F16C2223/44—Coating surfaces by casting molten material on the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49636—Process for making bearing or component thereof
    • Y10T29/49639—Fluid bearing

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Sliding-Contact Bearings (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

A metal bearing having a through hole is previously coated with a photoresist on the inner wall thereof, and then an ultraviolet lamp having pressure-generating grooves pattern thereon is inserted into the through hole to start an exposure process, which a part of the photoresist is irradiated by ultraviolet light through the pressure-generating grooves pattern, resulting in sensitization. After that, a developer is used to remove the sensitized part of the photoresist to expose a part of the inner wall of the bearing, and then the exposed inner wall is etched to the desired depth by an etching solution. Finally, a stripping solution is used to remove the remaining photoresist on the inner wall of the bearing to obtain the dynamic bearing with pressure-generating grooves.

Description

1257979 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種動壓軸承製作方法，特別係關於一種利 用微影技術形成動壓溝槽之動壓軸承製作方法。 【先前技術】 動壓軸承係指在一軸承之内孔壁具有微細之溝槽，而在該 溝槽内具有潤滑油；當馬達之轉軸旋轉時，溝槽内的潤滑油會 受到牽引而佈滿該轉軸，並建立起一動壓，將該轉軸支擇在中 央位置’避免該轉軸與軸承内壁產生磨擦，並可減少噪音。1257979 IX. Description of the Invention: [Technical Field] The present invention relates to a method for manufacturing a dynamic pressure bearing, and more particularly to a method for manufacturing a dynamic pressure bearing using a lithography technique to form a dynamic pressure groove. [Prior Art] A dynamic pressure bearing refers to a fine groove in a hole wall of a bearing, and has lubricating oil in the groove; when the rotating shaft of the motor rotates, the lubricating oil in the groove is pulled and clothed. Full of the rotating shaft, and establish a dynamic pressure, the rotating shaft is selected at the center position to avoid friction between the rotating shaft and the inner wall of the bearing, and reduce noise.

然而’軸承内孔中動壓溝槽的加工相當因難，原因在於其 溝槽之寬度及深度非常小，其精度的掌握不易，雖然已有數種 加工方式的提出，例如刀具加工方式、滾乳加工方式、塑膠射 出方式、腐蝕方式、組合方式、鍍層後加工方式等，但最後的 成品皆屬於高成本的型態；部份原因即在於這些加工方式需要 =用特殊的加工器具及技巧，而且均涉及各家廠商之商業機 始、。除此之外，傳統利用刀具加工出的動壓溝槽常會有溝槽 ^處不連續，溝槽深度與寬度不—致；另外加工的機器設備昂 :’加工刀具易損壞，無法大量快速生產，加工的環境不可產 =需要經過特殊訓練人員…等，都是傳統製作動塵軸承 【發明内容】 本發明乃為解決上M & ^ 壓軸承製作方法，種利賴影技術之動 槽加工的因難度。、。μ絲絲承之内孔壁巾，細微溝 或粉末燒結成所作方法，係先將金屬車削 壁表面佈滿光阻劑；同時穿：軸=將該軸承之内孔 源的燈管表面貼附—含 穿過錢承内孔之含紫外線光 軸承内孔進行立體暖# , a圖案之母片’ ·將該燈管置入該 體曝i使該光阻财對應該母片可透光部分 1257979 產生感光作用；將該燈管移出，利用顯影劑將該光阻劑感光部 分清洗掉；利用蝕刻液將未受光阻劑保護之孔壁進行蝕刻至所 欲深度；再利用去膜劑將餘留在内孔壁的光阻劑去除；最後利 用清水洗淨該軸承，即完成具溝槽之動壓軸承。 根據上述構想，該軸承之金屬材質較佳為銅。 根據上述構想，塗佈該光阻劑於該内孔壁之方法較佳係喷 塗、浸泡或離心式塗佈。 、 根據上述構想，塗佈光阻劑後，較佳係經過一烘烤程序， 以固化該光阻劑。 根據上述構想，該含紫外線光源之燈管較佳係冷陰極燈管 (CCFL)或光纖發光體。 根據上述構想，該母片中具有溝槽圖案之處為可透光，盆 餘部分為不可透光。 、 根據上述構想，該母片不只具有溝槽圖案，亦可設計具有 儲油槽圖案’故可同時在軸承内孔壁形成溝槽與儲油槽。’、 利用本發明製作動壓軸承的技術，不但機台設備成本較 低、可同時間大量生產.、可導入自動化或半自動化作業， 溝槽尺寸一致’任何形狀之溝槽均可輕易形成， 業貝即可輕易操作製造；由於可大幅降低成本，依本發明 出的動壓軸承可用來取代中小型滾珠軸承以及自潤軸承等。 懂，ίίΠϊ和其他目的、特徵、和優點能更明顯易 ^下文特舉-較佳實施例，並配合所附圖式，作詳細說明如 【實施方式】 本發明之動壓軸承製作方法首先係 .=之::形狀及其内孔…圖為金屬== 做說日; f作為軸承之金屬材f為銅，本實施也以銅 接著在該軸承之内孔壁（10)表面佈滿光阻劑（20)，如第2 1257979 圖所不，塗^布該光阻劑（20)於該軸承内孔壁（丨〇)之方法可以係利 用噴塗、/文泡或離心式塗佈，主要係使該光阻劑（2〇)能均勻地 ，滿於4内孔J ( 1 Q)表面。此外，光阻劑（2Q)的種類並無特別限 疋了以為感光性離子聚醢亞胺型光阻劑、偶氮鹽系光阻劑戋 • 磺醯胺氯光阻劑等，本實例係使用「易力高PRP-200」之正光 阻劑作說明。 為了使光阻劑（20)能與該軸承内孔壁（10)能緊密附著，將該 光阻劑（20)進行烘烤，使其與該内孔壁（1〇)之接觸面能完全乾 固。 馨 另方面，準備一可穿過該軸承内孔並可產生紫外線光源 之燈官（30)，在該燈管表面貼附一含動壓溝槽圖案（4〇1)與儲油 槽圖案（402)之母片（4〇)，如第3圖所示，而該燈管能產生波長 350〜450奈米之紫外光。由於本實施係採用正光阻劑，故該母 片（40)中具有溝槽圖案（4〇1)與儲油槽圖案（4〇2)之處為透明可 透光，其餘部分為黑色不可透光。此外，該可產生紫外線光源 之燈管（30)較佳係冷陰極燈管（CCFL)或光纖發光體。本實施 母片（40)溝槽形狀為V字形。 將該貼附母片（40)之燈管（30)置入該經過烘烤作業的軸承 内孔中，並通上電源產生紫外光以進行立體曝光，使該光阻劑 矚 （20)中對應該母片（40)可透光之處產生感光作用，如第4圖所 示。 曝光完成後將該燈管（30)移出，利用顯影劑將該光阻劑（2〇) 感光部为清洗掉而露出内孔壁（10)的金屬銅，如第5圖所示· 其中該顯影劑的成份與濃度係依所使用之光阻劑而定，並不特 別限定，本實施例係使用氫氧化鈉溶液。 接者使用清水洗淨後利用#刻液將未受光阻劑（2〇)保護之 内孔壁（10)進行蝕刻以形成所希望大小與深度之溝槽（12)與儲 油槽（13)。而該蝕刻液可以係任何不破壞光阻劑之韻銅液，例 如氯化鐵溶液、氯化銅溶液、或硫化亞摩尼亞溶液等。 7 !257979 、>接著使用清水洗淨後利用去膜劑將餘留在該内孔壁（1 〇)之 光阻y (20)去除，本實施例係利用乙醇將未感光之光阻劑去除。 最後利用清水將所有的藥液清除乾淨，而完成之動壓軸、 的製作’如第6圖所示。 惟應注意的是，本發明的重點在於利用立體的微影技 車，孔壁上加工出動壓溝槽，用以實施本發明的任何藥劑並 沒有特別限^，習知的微影藥劑亦可運用在本發明；當 内孔壁之溝槽形狀也不需限定，&了 V字形外、也可以是身典 形、人字形、斜紋或直條紋等。 ”、月 用來為本發明之較佳實施例而已，上述實施例僅係 係由以下之中請專利範圍所界定。凡 作”跑與修飾，皆應屬本發明之涵蓋專利-圍所 【圖式簡單說明】 第1圖為金屬成型後之軸承剖面示意圖。 第2圖為在第丨圖之軸承内孔壁 筮2★丄 主工文师先阻劑之示意圖。 弟3圖為本發明所使用之曝光用燈管示意圖。 第4圖為本發明之曝光作業示意圖。 第5圖為本發明經過顯影作業後之軸承示意圖。 第6圖為本發明經過蝕刻、去膜章 / 1 〇 :内孔壁 13 ·儲油槽 30 :燈管 401 :溝槽圖案 【主要元件符號說明】 、 承元成示意圖。 勺：?丨辟 12 :溝槽 20 :光阻劑 40 ·•母片 402 ··儲油槽圖案However, the processing of the dynamic pressure groove in the inner bore of the bearing is quite difficult because the width and depth of the groove are very small, and the accuracy of the groove is difficult to grasp. Although several processing methods have been proposed, such as tool processing and rolling Processing methods, plastic injection methods, corrosion methods, combination methods, post-coating processing methods, etc., but the final products are of high cost; part of the reason is that these processing methods need to use special processing equipment and techniques, and Both involve the commercial start of each manufacturer. In addition, the dynamic pressure grooves that are traditionally processed by tools often have discontinuities in the grooves, and the depth and width of the grooves are not uniform. In addition, the machine tools are processed: 'The machining tools are easily damaged and cannot be mass-produced quickly. , the processing environment can not be produced = need to go through special training personnel ... etc., are traditionally produced dynamic dust bearings [invention] The present invention is to solve the upper M & ^ pressure bearing manufacturing method, the kind of processing technology Due to the difficulty. ,. The inner wall of the microfilament, the fine groove or the powder is sintered into the method, the surface of the metal turning wall is filled with the photoresist; at the same time: the shaft = the surface of the tube of the inner hole of the bearing is attached - containing the inner hole of the ultraviolet light bearing through the inner hole of the money bearing to carry out the three-dimensional warm #, a pattern of the mother piece ' · put the tube into the body exposure i so that the light block corresponds to the mother piece permeable portion 1257979 produces a photosensitive effect; the lamp tube is removed, the photosensitive portion of the photoresist is washed away by a developer; the wall of the hole not protected by the photoresist is etched to a desired depth by an etching solution; and the removing agent is used again The photoresist left in the inner hole wall is removed; finally, the bearing is washed with clean water to complete the dynamic pressure bearing with grooves. According to the above concept, the metal material of the bearing is preferably copper. According to the above concept, the method of applying the photoresist to the inner cell wall is preferably spray coating, dipping or centrifuging. According to the above concept, after the photoresist is applied, it is preferably subjected to a baking process to cure the photoresist. According to the above concept, the lamp comprising the ultraviolet light source is preferably a cold cathode lamp (CCFL) or a fiber illuminator. According to the above concept, the mother sheet has a groove pattern in which light is permeable, and the remaining portion of the mother sheet is opaque. According to the above concept, the mother piece not only has a groove pattern, but also has an oil reservoir pattern so that a groove and an oil reservoir can be formed in the inner wall of the bearing at the same time. 'The technology of making dynamic pressure bearing by using the invention not only has low cost of machine equipment, but also can be mass-produced at the same time. It can be imported into automation or semi-automatic work, and the groove size is consistent. 'The groove of any shape can be easily formed. The industry can be easily manufactured and manufactured; the dynamic pressure bearing according to the invention can be used to replace the small and medium-sized ball bearing and the self-lubricating bearing, etc., because the cost can be greatly reduced. OBJECTS, OBJECTS, AND EMBODIMENT OF THE INVENTION The following is a description of the preferred embodiment of the present invention. .=:: shape and its inner hole... The picture shows metal == say the day; f as the metal material of the bearing f is copper, this embodiment also uses copper and then the surface of the inner wall (10) of the bearing is filled with light. The resist (20), as shown in the 2,257,979, figure, the method of coating the photoresist (20) on the inner wall of the bearing may be by spraying, foaming or centrifugal coating. Mainly to make the photoresist (2 〇) evenly, full of 4 inner hole J ( 1 Q) surface. In addition, the type of the photoresist (2Q) is not particularly limited to a photosensitive ion-polyimine-based photoresist, an azo salt-based photoresist, a sulfonamide-chloride-based photoresist, and the like. Use the positive photoresist of EASY PRP-200 as an illustration. In order to enable the photoresist (20) to be closely adhered to the inner wall (10) of the bearing, the photoresist (20) is baked so that the contact surface with the inner wall (1〇) can be completely Dry solid. In another aspect, a lamp holder (30) is provided which can pass through the inner hole of the bearing and can generate an ultraviolet light source, and a dynamic pressure groove pattern (4〇1) and an oil reservoir pattern (402) are attached to the surface of the lamp tube. The mother piece (4〇), as shown in Figure 3, and the lamp can produce ultraviolet light with a wavelength of 350~450 nm. Since the present embodiment uses a positive photoresist, the master pattern (40) has a groove pattern (4〇1) and an oil reservoir pattern (4〇2) where it is transparent and transparent, and the rest is black and opaque. . Further, the lamp tube (30) which produces an ultraviolet light source is preferably a cold cathode lamp tube (CCFL) or a fiber optic illuminator. In the present embodiment, the mother sheet (40) has a groove shape of a V shape. Putting the lamp tube (30) attached to the mother piece (40) into the bearing inner hole of the baking operation, and applying a power source to generate ultraviolet light for stereo exposure, so that the photoresist agent (20) is Photosensitive effect is produced corresponding to the opacity of the mother sheet (40), as shown in Fig. 4. After the exposure is completed, the lamp tube (30) is removed, and the photoresist (2〇) photosensitive portion is cleaned by the developer to expose the metal copper of the inner hole wall (10), as shown in FIG. The composition and concentration of the developer are not particularly limited depending on the photoresist to be used, and in this embodiment, a sodium hydroxide solution is used. After cleaning with water, the inner wall (10) not protected by the photoresist (2 〇) is etched using #刻液 to form a groove (12) and a reservoir (13) of a desired size and depth. The etching solution may be any copper liquid which does not damage the photoresist, such as a ferric chloride solution, a copper chloride solution, or a vulcanized amonia solution. 7 !257979 , > Then, after washing with water, the photoresist y (20) remaining in the inner wall (1 〇) is removed by using a stripping agent. In this embodiment, the unsensitized photoresist is treated with ethanol. Remove. Finally, all the liquid medicines are removed by using clean water, and the production of the dynamic pressure shaft is completed as shown in Fig. 6. It should be noted that the focus of the present invention is to use a three-dimensional lithography technology vehicle to process dynamic pressure grooves on the wall of the hole, and there is no particular limitation on the implementation of any of the medicaments of the present invention. It is used in the present invention; when the shape of the groove of the inner hole wall is not limited, & V-shaped, it can also be a body shape, a chevron shape, a twill pattern or a straight stripe shape. The monthly embodiment is intended to be a preferred embodiment of the present invention, and the above-described embodiments are only defined by the scope of the following patents. All of the "running and modifying" should belong to the patent-enclosed patent of the present invention. Brief description of the model] Figure 1 is a schematic view of the bearing profile after metal forming. Figure 2 is a schematic diagram of the inner wall of the bearing in the bearing of the figure 筮2★丄. Figure 3 is a schematic view of a lamp for exposure used in the present invention. Figure 4 is a schematic view of the exposure operation of the present invention. Figure 5 is a schematic view of the bearing after the development operation of the present invention. Figure 6 is an etched, stripped chapter of the present invention / 1 〇 : inner wall 13 · oil reservoir 30: tube 401: groove pattern [main symbol description], schematic diagram of Cheng Yuan. Spoon: 丨 12 12 : Trench 20 : Photoresist 40 · • Master 402 · · Oil sump pattern

Claims (1)

1257979 十、申請專利範圍： 1.-種動壓軸承製作方法，其 提供一具内孔之軸承； 在該軸承之該内孔壁表面佈滿一光阻劑； 壁^及用顯影劑將該光阻劑感光部分清洗掉而露出該内孔 成溝槽利用_液將未受光阻劑保護之該内孔壁進行餘刻以形 二如申請專利範圍第1項所述之動壓軸 =官表面之該溝槽圖㈣形献—貼附在該燈管表面= 申Λ專利範圍第2項所述之動壓軸承製作方法]中 σ亥母片更具有一儲油槽圖案。 /、 上、4·如申請專利範圍第丨項所述之動壓軸承製 H圖由案形狀為ν字形、魚骨形、人字形、斜紋或直條^文。 5.如申請專利範圍第i項所述之動壓轴承製 條直 在該軸承之該内孔壁表面佈滿光阻劑後進行烘烤作/。，八中 6_如申請專利範圍第丨項所述之動壓二、 該軸承及該内孔係由車削所形成。 方法，其中 二7.如申請專利範圍第丨項所述之動壓軸承製 该軸承及該内孔係由粉末燒結所形成。 / ，/、中 ^如申請專利範圍第丨項所述之動壓軸承製 在该軸承之該内孔壁表面佈滿該光阻劑的 4八 泡或離心式塗佈。 式了以係噴塗、浸 ▲ 9、如申請專利範圍帛"貝所述之動壓轴承 该燈管係為冷陰極燈管或光纖發光體。 ’ /、中 10·如申請專利範圍第丨項所述之動壓輛承製作方法，其中 1257979 在f顯影劑將該光阻劑感光部分清洗掉而露出該内孔壁後，利 水清洗該軸承之該内孔壁。 ^ 如申凊專利範圍第1項所述之動壓軸承製作方法，其中 在忒蝕刻液將未受光阻劑保護之該内孔壁進行蝕刻後，利用 水清洗該軸承之該内孔壁。 、i2·如申請專利範圍第11項所述之動壓軸承製作方法，其中 tπ水凊洗該軸承之該内孔壁後，利用去膜劑將餘留在該 壁之光阻劑去除。 具中 13·如申請專利範圍第丨項所述之動壓軸承製 該金屬軸承之材質係為銅或金屬。 14·如申請專利範圍第13項所述之動壓軸承製 該光阻劑係為正光_。 Η万法其中 > b·如申請專利範圍第14項所述之動壓軸承製作方法，其中 ti::係為感光性離子聚醯亞胺型光阻劑、偶氮鹽系光阻劑 或石頁醯胺氣光阻劑。 N 二如申請專利範圍第14項所述之動壓軸承製作方法 s亥溝槽圖案係為透明可透光，其餘部分為不可透光。/、 今,Ft °月專利範圍第16項所述之動壓軸承製作方法，其中 Μ絚g係此產生波長350〜450奈米之紫外光。 申請專利範圍第17項所述之動壓軸承製作方法，其中 "亥”、、員衫悧係為氫氧化鈉溶液。 ’、 二二：請專利範圍第18項所述之動壓軸承製作方法，其中 Μ 2〇ΧΤΓ、ί氣化f溶液、氯化銅溶液、或硫化亞摩尼亞溶液。 在，^、/#專利範圍帛19$所述之動壓軸承製作方法，立中 未受光阻劑保護之該内孔壁進行_後，#_ 乙醇將餘留在該内孔壁之光阻劑去*係利用 21. —種動廢軸承製作方法，包括下列步驟： 準備一具有内孔之軸承； 在该軸承之該内孔壁表面佈滿一光阻劑； 1257979 準傷-可穿過該軸承内孔並可產生紫外線光源之燈管； 片；在該燈管表面貼附一含動麼溝槽圖案與儲油槽圖案之母 將貼附該母片之該燈管置入該軸承之該内孔中，並產生紫 =進行立體曝光，使該光_中對應該母片之該動壓溝槽 闺累與儲油槽圖案之處產生感光作用； 作用2該燈管移出該内孔，並利用顯影劑將該光阻劑產生感光 1下用的部分清洗掉； 溝槽m㈣Λ未受綠劑㈣之内孔壁進行㈣以形成 利用去膜劑將餘留在該内孔壁之光阻劑去除。 ,、、Γ禅=請專利範圍第21項所述之㈣軸承製作方法，其中 1槽=形狀為V字形、魚骨形、人字形、斜紋或直條紋。 在二利範圍第21項所述之動壓轴承製作方法，其中 1承之_孔壁表面佈滿該光阻劑的方式可 /包或離心式塗佈。 8 土 /又 在中請專利範圍第21項所述之動壓轴承製作方法，豆中 在该軸承之該内孔壁表面佈滿光阻劑後進行烘烤㈣。- 25.如申請專利範圍第24項所述之動壓軸承 將該光阻劑感光部分清洗掉而露 I、： 用清水清洗該軸承之該内孔壁。 札土後利 26·如申請專利範圍第乃項所述之動壓軸承製 $㈣液將未受光阻劑保護之_孔壁 ’用 水清洗該轴承之該内孔壁。 錢利用清 27·如申請專利範圍第26項所述之動壓軸承製 在去膜劑將餘留在該内孔壁之光阻劑去除 I 該軸承之該内孔壁。 丹扪用α水清洗 28·如申請專利範圍第21項所述之動壓 該軸承之材質係為銅或金屬。 ❹作方法，其中 11 1257979 平田不褽作方法，其中 29.如申請專利範圍第28項所述之動 該光阻劑係為正光阻劑。 二30·如申請專利範圍第29項所述之動壓軸承製作方法，其中 該光阻劑係為感光性離子聚醯亞胺型光阻劑、偶氮鹽系光^ 或磺醯胺氣光阻劑。 背 上31，·如申請專利範圍第29項所述之動壓軸承製作方法，其中 該燈管係能產生波長350〜450奈米之紫外光。 /、 > 32^如申請專利範圍第31項所述之動壓軸承製作方法，其中 该燈官係為冷陰極燈管或光纖發光體。 >、33·如申請專利範圍第32項所述之動壓軸承製作方法，其 3槽圖案與該儲油槽圖案係為透明可透光，其餘部分為不可 34. 如申請專利範圍第33項所述之動壓由 該顯影_為氫氧仙溶液。 ㈣μ其中 35. 如申請專利範圍第34項所述之動壓軸 該化鐵溶液、氣化銅溶液、或硫化亞= 該去膜劑範圍第35項所咖 121257979 X. Patent application scope: 1. - A method for manufacturing dynamic pressure bearing, which provides a bearing with an inner hole; a surface of the inner wall of the bearing is covered with a photoresist; the wall ^ and the developer The photoreceptor portion of the photoresist is washed away to expose the inner hole into a groove. The inner hole wall not protected by the photoresist is left by the liquid to be shaped as the dynamic pressure axis as described in claim 1 of the patent scope. The groove pattern (4) is attached to the surface of the lamp tube = the method for manufacturing the dynamic pressure bearing described in the second paragraph of the patent application scope], wherein the σHai master piece has an oil reservoir pattern. /, 上, 4 · The dynamic pressure bearing system described in the scope of application of the patent scope H is based on the shape of the figure ν-shaped, fishbone, herringbone, twill or straight. 5. The dynamic pressure bearing strip as described in claim i is to be baked after the surface of the inner wall of the bearing is filled with a photoresist. , Bazhong 6_ as described in the scope of application of the scope of the second paragraph, the bearing and the inner hole is formed by turning. The method, wherein the magnetic bearing is described in the above-mentioned patent application, the bearing and the inner hole are formed by powder sintering. / , /, 中 ^ As in the dynamic range bearing described in the scope of the patent application, the surface of the inner wall of the bearing is covered with the photoresist or centrifugal coating of the photoresist. The type of the dynamic pressure bearing described in the patent application scope is a cold cathode lamp or a fiber optic illuminator. ' /, 中10 · The method of manufacturing the dynamic pressure bearing according to the scope of the patent application, wherein 1257979 cleans the bearing after the photosensitive portion of the photoresist is washed off by the developer to expose the inner wall of the hole The inner bore wall. The method of manufacturing the dynamic pressure bearing according to claim 1, wherein the inner wall of the bearing is cleaned with water after the etching liquid etches the inner hole wall not protected by the photoresist. The method of manufacturing the dynamic pressure bearing according to claim 11, wherein after tπ water is used to wash the inner wall of the bearing, the photoresist remaining in the wall is removed by using a stripping agent. In the case of the dynamic bearing described in the scope of the patent application, the material of the metal bearing is copper or metal. 14. The dynamic pressure bearing system described in claim 13 is the positive light _. The method for producing a dynamic pressure bearing according to claim 14, wherein the ti:: is a photosensitive ion-polyimine type photoresist, an azo salt-based photoresist or A sulphate gas resist. N. The method for manufacturing a dynamic pressure bearing as described in claim 14 of the patent application s. The groove pattern is transparent and transparent, and the rest is opaque. /, Now, the method for manufacturing a dynamic pressure bearing according to Item 16 of the Ft ° patent range, wherein Μ絚g is a UV light having a wavelength of 350 to 450 nm. The method for manufacturing the dynamic pressure bearing described in claim 17 wherein the "Hai" and the shackle are sodium hydroxide solution. ', 22: Please apply the dynamic pressure bearing described in the 18th patent range The method, wherein the Μ 2〇ΧΤΓ, ί gasification f solution, the copper chloride solution, or the vulcanized amonia solution. The method of manufacturing the dynamic pressure bearing described in the patent range 帛19$, Lizhong After the inner wall of the hole protected by the photoresist is carried out, #_ ethanol will remain in the inner wall of the inner wall of the photoresist, and the method of making the movable bearing, including the following steps: a bearing of the hole; a surface of the inner wall of the bearing is covered with a photoresist; 1257979 a scratch-a lamp that can pass through the inner hole of the bearing and can generate an ultraviolet light source; a sheet; a surface attached to the surface of the tube The mother tube with the groove pattern and the oil sump pattern is placed in the inner hole of the bearing, and the purple light is generated for stereo exposure, so that the light _ corresponds to the mother piece The dynamic pressure groove is sensitized to the sump pattern; the action 2 is the tube Dissipating the inner hole, and cleaning the portion of the photoresist for photoreceptor 1 by using a developer; the groove m(4) is not subjected to the inner wall of the green agent (4) to form (4) to form a residual agent therein by using a stripping agent. The photoresist of the hole wall is removed. , , , Γ = = please refer to the (4) bearing manufacturing method described in the scope of the patent, in which 1 slot = shape is V-shaped, fishbone, chevron, twill or straight stripe. The method for manufacturing a dynamic pressure bearing according to Item 21 of the second aspect, wherein the surface of the hole wall is filled with the photoresist can be packaged or centrifugally coated. 8 Soil / in the patent scope The method for manufacturing a dynamic pressure bearing according to claim 21, wherein the surface of the inner wall of the bearing is filled with a photoresist and then baked (4). - 25. The dynamic pressure bearing according to claim 24 of the patent application scope The photosensitive portion of the photoresist is washed away to expose I, and the inner wall of the bearing is cleaned with water. The soil pressure bearing system of the dynamic pressure bearing system described in the above-mentioned patent scope is not received by the light. Resist protection _ hole wall 'wash the inner hole wall of the bearing with water. The dynamic pressure bearing according to item 26 of the scope is prepared by removing the photoresist on the inner wall of the inner wall of the inner wall of the bearing. The tantalum is washed with α water. The dynamic pressure of the bearing described in Item 21 is copper or metal. The method of making, wherein 11 1257979 is the method of the method, wherein the actuating agent is as described in claim 28 The method of manufacturing a dynamic pressure bearing according to claim 29, wherein the photoresist is a photosensitive ion-polyimine type photoresist, an azo salt type light or The method of producing a dynamic pressure bearing according to claim 29, wherein the lamp tube is capable of generating ultraviolet light having a wavelength of 350 to 450 nm. The method of manufacturing a dynamic pressure bearing according to claim 31, wherein the lamp is a cold cathode lamp or a fiber illuminator. >, 33. The method for manufacturing a dynamic pressure bearing according to claim 32, wherein the 3-slot pattern and the oil sump pattern are transparent and permeable, and the rest is not. 34. The dynamic pressure is determined by the development of the oxyhydrogen solution. (4) μ where 35. The dynamic pressure shaft as described in claim 34 of the patent scope, the iron solution, the vaporized copper solution, or the vulcanization sub = the 35th item of the degreasing agent
TW094128355A 2005-08-19 2005-08-19 Dynamic bearing manufacturing method TWI257979B (en)

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