I257^3^twf>doc/r 九、發明說明： 【發明所屬之技術領域】 =明是有關於-種清理用裝置，且特別是有關於 種4理盒以及用這種清理盒清理管路的方法。 、 【先前技術】 半=韻中的某些工作機台如金屬_機㈣_ 寸•'生，需利用加熱套(heater jacket)對真空營推一 防止真空管管路有聚合物(pQlymer)等廢物附著。不== 未包覆加熱套的真空管部份，則需要排定時間進行;2理 圖1麟示為習知的半導體裝置之連_係= =^1為^清&作機台之心料 明苓知、圖1，T先介紹在一半導體製造系统 機台100、真空栗106及排氣裝置 門鱼乍 :;工作機台⑽的真空⑽過連;ί:= 氣口 1〇8。真空請的出氣 至 :::置;，氣管114。工作機台1〇 真空管脱的一部份包覆有加熱套 心工g 102’以避免廢物黏附在真空f 1()2 辟 直空;2,在對圖1中工作機台二的 及出氣口 1Η)=，，百先會卸除用以連接真空管102 加埶套116的直;丨接官^。接著’—作業人員在未包覆 廢物=ΐ; 附於真空管102管壁的 處以询業人員在真空* 102的開。 衣20封住開口，以承接掉落的廢物118。 备twf.doc/r 然而，以塑膠袋120承接廢物的方式，因為塑膠袋12〇 容易破裂，會造成廢物118掉落於塑膠袋12〇外，而產生 廢物118外洩的危安事件。 此外，塑膠袋120的密封性不佳，廢物118容易從塑 膠袋120與真孔管102的接縫處洩漏，而影響作業人員的 健康。 /' 、 另一方面，若是粉紐塑膠袋120與真孔f 1〇2的接I257^3^twf>doc/r IX. Description of the invention: [Technical field to which the invention pertains] = There is a device for cleaning, and in particular, there is a case for cleaning a tube and cleaning the tube with the cleaning cartridge Methods. [Prior Art] Half of the work machine in the rhyme, such as metal _ machine (four) _ inch • 'birth, need to use a heat jacket (heater jacket) to push the vacuum to prevent the vacuum tube line from polymer (pQlymer) and other waste Attached. Not == The part of the vacuum tube that is not covered with the heating sleeve needs to be scheduled; 2 Figure 1 shows the connection of the conventional semiconductor device _ system = = ^ 1 is ^ Qing & It is noted that, in Fig. 1, T first introduces a semiconductor manufacturing system machine 100, a vacuum pump 106 and an exhaust device door fish: the vacuum (10) of the working machine (10) is connected; ί: = port 1〇8. The vacuum is vented to :::; the trachea 114. A part of the working machine 1 〇 vacuum tube is covered with a heating sleeve p-100' to prevent the waste from adhering to the vacuum f 1 () 2 straightening; 2, in the working machine 2 of Figure 1 The port 1Η)=,, the first will remove the straight line for connecting the vacuum tube 102 and the sleeve 116; Then, the operator is in the uncovered waste = ΐ; attached to the wall of the vacuum tube 102 at the vacuum* 102. The garment 20 encloses the opening to receive the discarded waste 118. TWf.doc/r However, in the way that the plastic bag 120 takes over the waste, the plastic bag 12 is easily broken, which causes the waste 118 to fall outside the plastic bag 12, causing a dangerous incident in which the waste 118 is leaked. In addition, the plastic bag 120 has poor sealing properties, and the waste 118 easily leaks from the joint of the plastic bag 120 and the genuine hole tube 102, thereby affecting the health of the worker. /' On the other hand, if the powder plastic bag 120 is connected with the true hole f 1〇2
縫處茂漏，會造成煙塵警報器的感應點上升而啟動煙塵藝 報器，產生不必要的虛驚。 ° 【發明内容】 有鑑於此，本發明的目的就是在提供一種清理盒， 容納管路中的廢物，並避免廢物外洩。 、本f明的再—目的是提供—種管路的清理方法，能有 效清理官路t的廢物，且能防止廢物外洩。 &本發明提出-種清理盒，適於承接來自工作機Leakage at the seam will cause the sensing point of the smoke alarm to rise and activate the smoke artifact, creating an unnecessary false alarm. [Invention] In view of the above, it is an object of the present invention to provide a cleaning box that accommodates waste in a pipeline and avoids waste leakage. The purpose of this is to provide a method for cleaning the pipeline, which can effectively clean the waste of the official road and prevent the waste from leaking. &The present invention proposes a cleaning box suitable for taking work from a working machine
=的^物’其特徵在於該清理盒具有承接口及出氣口了 於碎機台的真空管，出氣叫連接於拆氣装 的—料實施細述，在上述之清 τ吏^括透視板，用以觀察清理盒内部。 發明的一較佳實施例所述，在上述之清理各 的抽氣=輸送管，⑽連接清理盒的域口及排氣裝^ 依照本發明的一 較佳實施例所述 在上述之清理盒 1257谓 twf.doc/r 中，輸送管包括軟管。 依照本發明的—.— 中，清^盒的材質包括不鏽=例所迷，在上述之清理盒 依，本發明的一較佳實施例所述，/ 、、 中，出氣口位於清理盒的頂面。 在上述之清理盒 本發明再提出° 工作機台的真空管之管 ^^方^ ’適用於清理位於 接於真空泵的進氣口，直办管藉由連接管連 置的抽氣管。管路的清理=的c 口連接於排氣震 提供清理I，清理 #錢卸除連接管。接著， 由承接口連接。然後，藉 f!妾於排氣裝置的抽氣管。之後，使真二:-出氣σ 洛在清理盒中，並使利用排氣I置的:—官壁上的廢 中由廢物所產生的廢氣。…彳乳官抽出清理盒 理方二本明的一較佳實施例所述，在上述之管路 包括敲•:真ίί空管之管壁上的廢物落在㈣^ 理方ίΐ本發明的一較佳實施例所述，在上述之管路白VI 里方法^第二出氣口的位於清理盒的頂面。路的 >月 =本發日㈣—較佳實關所述，在上述之 里方去=，更包括透視板，用以觀察該清理盒内部。L月 理方t本發明的一較佳實施例所述’在上述之管路的产 氣褒置的:ί括輸送管，用以連接清理盒的出氣口及i 1257¾¾ wf.doc/r m明的較佳實施例所述 理方法中，輸送管包括軟管。 （之吕路^ 依照本發明的一較佳實施例所述 理方法中、，、清理盒的材質包括不鑛鋼。、之吕路的/月 Α η ί上述可知本發明的清理盒剛性較強且抗雜，能避 免因、;月理盒受到破裂而造成廢物外如 ^ 盒^有—透明板，可清楚地觀察清理盒承t 物的I·月况。另外，清理盒的出氣口位於清理 避免廢物阻塞排氣裝置的抽氣管。 1 、，可 方面，在本翻之管路的清理方法中，排氣 二：:ΐΐ中由廢物所產生的粉塵吸到製造系統外，能避 flif，。另外，管路間採管接頭的方式連接，可防止 廢物攸官路的接縫處外戌所造成的危安事件。 易懂了ίΐί:二其他目的、特徵和優點能更明顯 明如下。車“並配合所附圖式’作詳細說 【實施方式】 作機料之管路料财法，適麟清理位於工 :ί: ίΓ之管壁上的廢物。上述的廢物例姆 導 =包覆的真空管之管壁上。以下，將以清理 、主的管路中的廢物為例’說明本發明的 /月理益及管路的清理方法。 請茶照圖1，在此半導體製造系統中，工作 利用真空栗106製造真空的操作環境，而由真空泵L所 itwf.doc/r 抽出的氣體經由排氧获w n ?姚ψ +、* 工作機請例^體製繼外部。 石應m 屬 0。工作機台1〇〇、真空 ^文m三者之間的連接關係及相關構件已 於刖文及圖1中進行說明，於此不再贅述。 圖。圖3鱗示為本發明清理卫作^之真空管的示意 請同時參照圖1及圖3，首先卸除連接管刚。The object of the product is characterized in that the cleaning box has a vacuum tube with a socket and an air outlet at the crushing machine, and the air outlet is connected to the material of the air-removal device, and is described in detail. Used to observe the inside of the cleaning box. According to a preferred embodiment of the invention, in the cleaning of each of the pumping = conveying pipes, (10) connecting the cleaning port to the domain port and the exhausting device according to a preferred embodiment of the present invention 1257 says twf.doc/r, the duct consists of a hose. According to the invention, the material of the cleaning box includes stainless steel. In the above cleaning cartridge, according to a preferred embodiment of the present invention, the air outlet is located in the cleaning box. The top surface. In the above cleaning box, the present invention further proposes that the tube of the vacuum tube of the working machine is adapted to clean the air inlet port connected to the vacuum pump, and the straight pipe is connected by the connecting pipe. Pipeline cleaning = c port is connected to the exhaust gas to provide cleaning I, cleaning #钱卸接接管. Then, it is connected by the socket. Then, borrow f! to the exhaust pipe of the exhaust unit. After that, let the true two: - the gas σ is in the cleaning box, and the exhaust gas I is used: - the waste gas generated by the waste in the waste on the official wall.彳 彳 官 抽 抽 彳 彳 彳 彳 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 一 : : : : : : : : : : : : : : : : : : : : : : In a preferred embodiment, in the above-described pipe white VI, the second air outlet is located on the top surface of the cleaning box. > month = this day (four) - better than the actual said, in the above, go to =, more includes a see-through board to observe the inside of the cleaning box. According to a preferred embodiment of the present invention, the gas generating device of the above-mentioned pipeline includes: a conveying pipe for connecting the air outlet of the cleaning box and i 12573⁄43⁄4 wf.doc/rm In a preferred embodiment of the method, the delivery tube comprises a hose. According to a preferred embodiment of the present invention, the material of the cleaning box includes non-mineral steel. Strong and anti-hetery, can avoid the cause; the moon box is broken and the waste is caused by the outside of the box. There is a transparent plate, which can clearly observe the I·month condition of the cleaning box. In addition, the air outlet of the cleaning box is cleaned. The air suction pipe is located in the cleaning and avoiding the waste clogging exhaust device. 1. In terms of the cleaning method of the pipeline, the dust generated by the waste in the exhaust gas 2:: is sucked out of the manufacturing system, and can be avoided. Flif. In addition, the connection between the pipelines and the pipe joints can prevent the dangerous events caused by the external joints of the wastes on the official road. It is easy to understand ίΐί: The other objectives, characteristics and advantages can be more obvious. As follows: The car "and in conjunction with the drawing" is described in detail [Embodiment] As a pipeline material for the machine material, Shilin cleans the waste on the wall of the work: ί: 。 。. = covered on the wall of the vacuum tube. Below, will be cleaned, the main The waste in the pipeline is taken as an example to illustrate the cleaning method of the present invention and the cleaning method of the pipeline. Please refer to Fig. 1, in this semiconductor manufacturing system, work using vacuum pump 106 to create a vacuum operating environment, and by vacuum pump L is itwf.doc/r The gas extracted is obtained by venting oxygen? Yao Yao +, * Work machine, please example ^ system followed by external. Shi Ying m belongs to 0. Work machine 1 〇〇, vacuum ^ text m The connection relationship and related components have been described in the text and Fig. 1, and will not be described again. Fig. 3 is a schematic view of the vacuum tube of the cleaning and cleaning machine of the present invention. Please refer to Fig. 1 and Fig. 3 at the same time. First remove the connecting pipe.
』ηη ίΐ:提供—個清理盒m，適於承接來自工作機台 的真工官102的廢物118。清理念122連接工作機台 100 ^真空管102及排氣裝置112的抽氣管114。其中，利 用排氣裝置112的抽氣管114可將清理盒122中由廢物118 所產生之含有粉塵的廢氣吸到製造纟統外，能避免粉塵外 洩0Ηη ίΐ: Provides a cleaning box m suitable for receiving waste 118 from the work officer 102 of the work machine. The cleaning concept 122 connects the working machine 100 ^ vacuum tube 102 and the exhaust pipe 114 of the exhaust device 112. Wherein, the exhaust pipe 114 of the exhausting device 112 can suck the dust-containing exhaust gas generated by the waste 118 in the cleaning box 122 to the outside of the manufacturing system, thereby avoiding dust leakage.
/月理益122包括承接口 124及出氣口 126。清理盒122 的材質例如是不鏽鋼，可以防止廢物H8對清理盒122所 造成的腐餘。此外，可在清理盒122配置透明板128，能 夠清楚地觀察廢物118掉落到清理盒122内部的狀況。 清理盒122的承接口 124連接於工作機台1〇〇的真空 管102，作為廢物ι18落入清理盒122的入口。 /月理孟122的出氣口 126連接於排氣裝置112的抽氣 管114，且出氣口 126例如是位於清理盒122的頂面。如 此一來，可避免廢物118阻塞排氣裝置112的抽氣管114。 清理盒122的出氣口 126可透過輸送管130連接於排氣裝 置112的抽氣管114。輸送管130例如是軟管。 ⑧ 9 然後，使未被加熱套116所包覆的真空管1〇2之 ^的廢物m落在清理盒122中，並制㈣氣裝置η·； ，抽氣管114抽出廢氣。使真空管1〇2之管壁上的廢物118 洛在β理盒122中的方法例如是敲打真空管。The month/month benefit 122 includes a socket 124 and an air outlet 126. The material of the cleaning box 122 is, for example, stainless steel, which prevents the waste H8 from causing corrosion to the cleaning box 122. Further, the transparent plate 128 can be disposed in the cleaning box 122, and the condition in which the waste 118 is dropped into the inside of the cleaning box 122 can be clearly observed. The socket 124 of the cleaning box 122 is connected to the vacuum tube 102 of the working machine 1 and falls into the inlet of the cleaning box 122 as waste ι18. The gas outlet 126 of the Mooney 122 is connected to the suction pipe 114 of the exhaust unit 112, and the air outlet 126 is, for example, located on the top surface of the cleaning box 122. As such, the waste 118 can be prevented from clogging the exhaust pipe 114 of the exhaust unit 112. The air outlet 126 of the cleaning box 122 is connectable to the air exhaust pipe 114 of the exhaust unit 112 through the duct 130. The delivery tube 130 is, for example, a hose. 8 9 Then, the waste m of the vacuum tube 1〇2 which is not covered by the heating jacket 116 is dropped in the cleaning box 122, and the (four) gas device η· is formed, and the exhaust pipe 114 extracts the exhaust gas. The method of causing the waste 118 on the wall of the vacuum tube 1 to be in the beta box 122 is, for example, to tap the vacuum tube.
I257^gtwf>d〇c/r 、本毛明的π理盒122，在容納管路中的廢物118時， 因為清理1122的材質難較強且可抗舰，能防止因清 理盒122破裂而產生的廢物外茂。此外，另用本發明之管 =的清理方法進行管路的清理時，能有效清理管路中的廢 物118，且能避免廢物118夕卜茂所造成的危安事件。 綜上所述，本發明至少具有下列優點： 、本發明的清理盒剛性較強，能避免因清理盒破裂而 造成廢物外洩的問題。 2·在本每明的清理盒上具有一透明板，可清楚地觀察 廢物在清理盒中的情況。 3.本發明的清理盒為不鏽鋼材質，能減少廢物對清理 盒所造成的腐蝕。 4·在本發明的清理盒中，出氣口位置高於清理盒内之 廢物的頂面，可避免廢物阻塞排氣裝置的抽氣管。 _ 5·利用本發明之管路的清理彳法，冑由排氣裝置將清 理盒中由廢物所產生之含有粉塵的減吸到製造系統外， 忐避免粉塵外洩所造成的危安事件。 10 12 5 7^^tw£doc/r 6·在本發明之管路的相方 缝處為密封的狀能，可η 吕路間的連接之接 乃心、了防止廢物從接缝處外洩。 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍内，當可作些許之更動與潤飾，因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1所繪示為習知的半導體裝置之連接關係的示意 圖2所繪示為習知清理工作機台之真空管的示咅圖。 圖3所繪示為本發明清理工作機台之真空管^示音 圈。 【主要元件符號說明】 100 ： 工作機台 102 ： 真空管 104 ： 連接管 106 ： 真空泵 108 ： 進氣口 110、 126 :出氣口 112 ： 排氣裝置 114 ： 抽氣管 116 ： 加熱套 118 ： 廢物 120 ： 塑膠袋 itwf.doc/r 122 :清理盒 124 :承接口 128 :透明板 130 :輸送管I257^gtwf>d〇c/r, the π-box 122 of the present hair, when the waste 118 in the pipeline is accommodated, since the material of the cleaning 1122 is difficult and resistant to the ship, the cleaning of the cleaning box 122 can be prevented. The waste generated is exogenous. In addition, when the pipeline is cleaned by the cleaning method of the tube of the present invention, the waste 118 in the pipeline can be effectively cleaned, and the dangerous event caused by the waste 118 can be avoided. In summary, the present invention has at least the following advantages: The cleaning box of the present invention is rigid and can avoid the problem of waste leakage caused by the rupture of the cleaning box. 2. There is a transparent plate on each cleaning box to clearly observe the waste in the cleaning box. 3. The cleaning box of the present invention is made of stainless steel, which can reduce the corrosion caused by waste on the cleaning box. 4. In the cleaning cartridge of the present invention, the position of the air outlet is higher than the top surface of the waste in the cleaning box to prevent the waste from clogging the exhaust pipe of the exhaust device. _ 5·Using the cleaning method of the pipeline of the present invention, the dust-containing dust generated by the waste in the cleaning box is sucked out of the manufacturing system by the exhaust device, and the dangerous event caused by the dust leakage is avoided. 10 12 5 7^^tw£doc/r 6·In the phase seam of the pipeline of the present invention, it is a sealed shape energy, and the connection between the η Lu roads is good, and the waste is prevented from leaking from the joint. . While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a connection relationship of a conventional semiconductor device. FIG. 2 is a schematic view showing a vacuum tube of a conventional cleaning work machine. Fig. 3 is a view showing the vacuum tube of the cleaning machine of the present invention. [Main component symbol description] 100 : Working machine 102 : Vacuum tube 104 : Connecting pipe 106 : Vacuum pump 108 : Air inlet 110 , 126 : Air outlet 112 : Exhaust device 114 : Exhaust pipe 116 : Heating jacket 118 : Waste 120 : Plastic bag itwf.doc/r 122 : cleaning box 124 : bearing interface 128 : transparent plate 130 : conveying pipe