TWI256941B - A micro electro mechanical system display cell and method for fabricating thereof - Google Patents

A micro electro mechanical system display cell and method for fabricating thereof

Info

Publication number
TWI256941B
TWI256941B TW093103981A TW93103981A TWI256941B TW I256941 B TWI256941 B TW I256941B TW 093103981 A TW093103981 A TW 093103981A TW 93103981 A TW93103981 A TW 93103981A TW I256941 B TWI256941 B TW I256941B
Authority
TW
Taiwan
Prior art keywords
mechanical system
electrode
display cell
electro mechanical
micro electro
Prior art date
Application number
TW093103981A
Other languages
English (en)
Other versions
TW200528388A (en
Inventor
Hsiung-Kuang Tsai
Wen-Jian Lin
Original Assignee
Qualcomm Mems Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies Inc filed Critical Qualcomm Mems Technologies Inc
Priority to TW093103981A priority Critical patent/TWI256941B/zh
Priority to US10/812,257 priority patent/US6882461B1/en
Priority to JP2004104188A priority patent/JP2005234515A/ja
Priority to KR1020040025016A priority patent/KR100653342B1/ko
Publication of TW200528388A publication Critical patent/TW200528388A/zh
Application granted granted Critical
Publication of TWI256941B publication Critical patent/TWI256941B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47G—HOUSEHOLD OR TABLE EQUIPMENT
    • A47G29/00—Supports, holders, or containers for household use, not provided for in groups A47G1/00-A47G27/00 or A47G33/00 
    • A47G29/087—Devices for fastening household utensils, or the like, to tables, walls, or the like
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47K—SANITARY EQUIPMENT NOT OTHERWISE PROVIDED FOR; TOILET ACCESSORIES
    • A47K10/00—Body-drying implements; Toilet paper; Holders therefor
    • A47K10/04—Towel racks; Towel rails; Towel rods; Towel rolls, e.g. rotatable
    • A47K10/10—Towel racks; Towel rails; Towel rods; Towel rolls, e.g. rotatable characterised by being mounted on cabinets, walls, doors, or the like
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47K—SANITARY EQUIPMENT NOT OTHERWISE PROVIDED FOR; TOILET ACCESSORIES
    • A47K5/00—Holders or dispensers for soap, toothpaste, or the like
    • A47K5/18—Holders or dispensers for soap, toothpaste, or the like for both soap and toothpaste or the like; in combination with holders for drinking glasses, toothbrushes, or the like ; Toothpaste dispensers; Dental care centers
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
    • E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
    • E03C1/02—Plumbing installations for fresh water
    • E03C1/06—Devices for suspending or supporting the supply pipe or supply hose of a shower-bath

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Dentistry (AREA)
  • Engineering & Computer Science (AREA)
  • Hydrology & Water Resources (AREA)
  • Water Supply & Treatment (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Micromachines (AREA)
TW093103981A 2004-02-18 2004-02-18 A micro electro mechanical system display cell and method for fabricating thereof TWI256941B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW093103981A TWI256941B (en) 2004-02-18 2004-02-18 A micro electro mechanical system display cell and method for fabricating thereof
US10/812,257 US6882461B1 (en) 2004-02-18 2004-03-29 Micro electro mechanical system display cell and method for fabricating thereof
JP2004104188A JP2005234515A (ja) 2004-02-18 2004-03-31 微小電子機械システムディスプレイセルおよびその形成方法
KR1020040025016A KR100653342B1 (ko) 2004-02-18 2004-04-12 미소 기전 시스템 디스플레이 셀 및 그 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW093103981A TWI256941B (en) 2004-02-18 2004-02-18 A micro electro mechanical system display cell and method for fabricating thereof

Publications (2)

Publication Number Publication Date
TW200528388A TW200528388A (en) 2005-09-01
TWI256941B true TWI256941B (en) 2006-06-21

Family

ID=34434161

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093103981A TWI256941B (en) 2004-02-18 2004-02-18 A micro electro mechanical system display cell and method for fabricating thereof

Country Status (4)

Country Link
US (1) US6882461B1 (zh)
JP (1) JP2005234515A (zh)
KR (1) KR100653342B1 (zh)
TW (1) TWI256941B (zh)

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US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
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TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
TWI231865B (en) * 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
TW593126B (en) * 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7085059B2 (en) * 2004-03-24 2006-08-01 Silicon Light Machines Corporation Spatial light modulator with robust mirror substrate condition
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7349141B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and post structures for interferometric modulation
US20060066586A1 (en) * 2004-09-27 2006-03-30 Gally Brian J Touchscreens for displays
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7310179B2 (en) * 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7369296B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7561323B2 (en) 2004-09-27 2009-07-14 Idc, Llc Optical films for directing light towards active areas of displays
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7564612B2 (en) * 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7612932B2 (en) * 2004-09-27 2009-11-03 Idc, Llc Microelectromechanical device with optical function separated from mechanical and electrical function
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US20060132383A1 (en) * 2004-09-27 2006-06-22 Idc, Llc System and method for illuminating interferometric modulator display
US7446926B2 (en) * 2004-09-27 2008-11-04 Idc, Llc System and method of providing a regenerating protective coating in a MEMS device
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US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
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US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
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US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7807488B2 (en) * 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7750886B2 (en) 2004-09-27 2010-07-06 Qualcomm Mems Technologies, Inc. Methods and devices for lighting displays
US7302157B2 (en) * 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
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US7929195B2 (en) * 2004-11-19 2011-04-19 Trustees Of Boston University MEMS based retroreflector
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US7460292B2 (en) 2005-06-03 2008-12-02 Qualcomm Mems Technologies, Inc. Interferometric modulator with internal polarization and drive method
US20070126673A1 (en) * 2005-12-07 2007-06-07 Kostadin Djordjev Method and system for writing data to MEMS display elements
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
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US7603001B2 (en) * 2006-02-17 2009-10-13 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in an interferometric modulator display device
US7550810B2 (en) * 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7417784B2 (en) * 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7471442B2 (en) * 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7766498B2 (en) 2006-06-21 2010-08-03 Qualcomm Mems Technologies, Inc. Linear solid state illuminator
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US7916378B2 (en) * 2007-03-08 2011-03-29 Qualcomm Mems Technologies, Inc. Method and apparatus for providing a light absorbing mask in an interferometric modulator display
US7742220B2 (en) * 2007-03-28 2010-06-22 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing conducting layers separated by stops
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Also Published As

Publication number Publication date
KR100653342B1 (ko) 2006-12-06
JP2005234515A (ja) 2005-09-02
US6882461B1 (en) 2005-04-19
TW200528388A (en) 2005-09-01
KR20050082410A (ko) 2005-08-23

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