TWI256733B - Display panel with polysilicon layer and method of fabricating the same - Google Patents
Display panel with polysilicon layer and method of fabricating the sameInfo
- Publication number
- TWI256733B TWI256733B TW94135278A TW94135278A TWI256733B TW I256733 B TWI256733 B TW I256733B TW 94135278 A TW94135278 A TW 94135278A TW 94135278 A TW94135278 A TW 94135278A TW I256733 B TWI256733 B TW I256733B
- Authority
- TW
- Taiwan
- Prior art keywords
- display panel
- poly
- fabricating
- substrate
- layer
- Prior art date
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title abstract 5
- 229920005591 polysilicon Polymers 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 3
- 238000002425 crystallisation Methods 0.000 abstract 2
- 230000008025 crystallization Effects 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 1
- 239000007790 solid phase Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Abstract
A display panel comprises a substrate and a plurality of thin film transistors (TFTs) formed on the substrate. The substrate has a displaying region and a circuit driving region. These TFTs includes a first TFT set positioned at the circuit driving region, and a second TFT set positioned at the displaying region. The first TFT set comprises a first polysilicon (Poly-Si) layer crystallized by metal induced lateral crystallization (MILC). The second TFT set comprises a second Poly-Si layer, and a portion of the second Poly-Si layer is crystallized by MILC while the others by solid phase crystallization (SPC).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94135278A TWI256733B (en) | 2005-10-07 | 2005-10-07 | Display panel with polysilicon layer and method of fabricating the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94135278A TWI256733B (en) | 2005-10-07 | 2005-10-07 | Display panel with polysilicon layer and method of fabricating the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI256733B true TWI256733B (en) | 2006-06-11 |
TW200715560A TW200715560A (en) | 2007-04-16 |
Family
ID=37614764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94135278A TWI256733B (en) | 2005-10-07 | 2005-10-07 | Display panel with polysilicon layer and method of fabricating the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI256733B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI381451B (en) * | 2007-05-31 | 2013-01-01 | Samsung Display Co Ltd | Method of fabricating polycrystalline silicon layer, tft fabricated using the same, method of fabricating tft, and organic light emitting diode display device having the same |
-
2005
- 2005-10-07 TW TW94135278A patent/TWI256733B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI381451B (en) * | 2007-05-31 | 2013-01-01 | Samsung Display Co Ltd | Method of fabricating polycrystalline silicon layer, tft fabricated using the same, method of fabricating tft, and organic light emitting diode display device having the same |
Also Published As
Publication number | Publication date |
---|---|
TW200715560A (en) | 2007-04-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |