1254129 玖、發明說明： 【發明所屬之技術領域】 本發明是有關於一種光學波導檢測裝置及其檢測方 法，特別是指一種用於檢測化學變化程度之光學波導化學 檢測裝置及其檢測方法。 子 【先前技術】 、於見5自動化監測及运距遙測系統大幅應用於各 個領域，不僅擴展了人類活動之範圍，更加速提昇了各科 技項域的進步。而其中，各式感測裝置的研發與生產扮演 著關鍵性的重要角色。 、 傳統的電子式感測裝置主要以電磁學之原理，利用量 、’J元件之電性文環境影響變化，如電壓及電阻的改變，來 偵=该感測農置所在環境之物理或化學參數，例如溫度感 測裝置，是利用金屬導體於不同溫度之電阻值變化，藉由 量測電阻或電壓值以判讀對應之溫度參數。而離子感；裝 =則是以待測物之導電度進行離子濃度之量測。又例如應 、又感測裝置，則是利用電阻線長度變化引起電阻值改變， 進而里測出所對應出之應變量變化。但是由於電子電路會 與外在電磁場產生相互干擾，本身亦因此易造成過多雜訊 及心虎失真等問題。並且由於金屬導體容易因為潮溼而腐 蝕党損，因此使用壽限短，特別是使用於埋設式的感測裝 例如應用於土木結構物檢測，大地工程及河海工程於 、寸由於無法替換，使得應用受到相當多之限制。 因此，便有許多非電子式之感測裝置研發產生，特別 1254129 是以光學原理製成之光學元件’由於具有寬頻帶、低損 失、高絕緣性、防電磁干擾、耐腐#，以及光訊號處理頻 率較電訊號傳導快速且精確等特性，因此成為目前研發之 主要趨勢。 5 光學兀件可概分為光學主動元件與光學被動元件，而 目前應用於光學感測器領域之光學元件主要還是以屬於 光學被動元件之光學波導為主，光學波導可分為一般簡稱 為光纖的光纖波導，及以半導體製程製作之平面光波導兩 大類。其中，以光纖波導製成之光纖感測裝置的主要原 10 理’可區分為光強度調變原理、光相位調變原理，以及光 波長調變原理。而現今常見的光纖感測裝置則有光纖光柵 感測器（Fiber Bragg Grating sensor，FBG)、非本質式 法布立-拍若干涉式感測器（Extrinsic Fabry-Perot Interferometric sensor, EFPI)，以及布里光時域反射 15 感測器（Brillouin Optical Time Domain Reflector sensor， BOTDR)等。 如圖1至圖3所示，一光纖光柵感測器81，具有一光 纖811，該光纖811具有一核心812、一具有一相對折射 率較該核心812小之外殼813，以及一套設於該外殼813 20 外圍提供適當保護之外套814，該核心812形成有一光柵 815，當由一輸入端816進入該核心812之寬頻光訊號通 過該光柵815時，除了滿足該光柵815布拉格條件（Bragg condition)的特定波長90能反射外’其餘範圍的波長均 會相位差相消，因此由該輸入端816能得到如圖2所示滿 1254129 :光栅815條件之反射頻譜，而於一相反於該輸入端81 β 之輸出埏817得到如圖3所示濾除滿足布拉格條件之波長 9〇的穿透頻譜。因此藉由該光纖811受環境擾動時該光柵 ^門隔改又，使光訊號之波長90產生飄移，進而測讀該 感測為81所承受如應力及應變等之物理參數。 如圖4所示，一法布立-拍若干涉式感測器82具有一 中空石夕晶官821、一穿設於該石夕晶f 821中之單模光纖 822，以及一同樣穿設於該矽晶管821中並與該單模光纖 822間隔一適當距離d之多模光纖823，該單模光纖822 φ 10 具有一第一斷面824，該多模光纖823具有一與該第一斷 面824相對並間隔距離d之第二斷面825，當光訊號由該 單杈光纖822射入時，會在第一斷面824及第二斷面825 分別產生約4%的弗雷斯涅耳（Fresnel)反射^及R2，由於 %境擾動會使得該第一斷面824與該第二斷面825之距離 15 d改變，進而造成該兩反射Ri及R2之光程變化，藉由量測 該兩反射1及R2所產生之干涉即能得到該第一斷面824 與該第二斷面8 2 5之間距離d的變化量。 Φ 如圖5所示，一布里光時域反射感測器83具有一玻 璃光纖831，以及一以螺旋線方式纏繞於該玻璃光纖831 20 上並具有與該玻璃光纖831不同之布里散射常數的塑膠光 纖8 3 2 ’ ^ 4感測器8 3受到壓力壓迫時，位於該玻璃光纖 831内之光訊號會折射進入該塑膠光纖832内，藉由該光 * 訊號之反射時間差能測讀應力施加於該感測器之位 置，而由光訊號強度之衰減即能量測出該感測器83之應 6 1254129 變量。 ;以平面光波導製作之感測器，則有如中華民國專 =申y虎帛〇9〇118488 ?虎案所揭露的，一種以絕緣層上石夕 曰曰，V _合ϋ與絕緣層上㊉晶波導布拉格光柵結合之麥 克森干涉式溫度感測器，其利用矽晶較一般光纖大之膨脹 '、特丨生以形成於其上之光柵進行溫度量測，提供高精 確度之溫度監測。 由上述可知，目前現有之光學波導感測裝置多以量測 物理里之變化為主，甚少應用於化學變化方面之量測，然 而叉限於傳統的電子式感㈣置應用於化學變化之檢測 所具，之先天缺點，以及其僅能進行『點』量測之限制， 特別是應用在如高H線及地τ(水）管道等呈長距離線型 分布之待測標的上時，不僅效果不佳，其成本更將高得驚 人。因此，本案發明人針對材料之物性與化性，以及光學 皮V之特f生及技術，詳思細索，並累積多年從事檢測器整 合開發之經驗，幾經試驗，終有本發明之產生。 【發明内容】 本么月之主要目的疋在提供一種用於檢測化學反應 程度之光學波導化學檢測裝置及其檢測方法。 本叙明之另一目的是在提供一種能長距離多點及線 型佈設之光學波導化學檢測裝置及其檢測方法。 本I月光本波導化學檢測裝置是用於檢測盥一化學 物質之化學變化程度，該光學波導化學檢測裝置包括兩彼 此間隔-距離之定位件、-具有兩分別定位於各該定位件 1254129 之疋位點及一位於該兩定位點間之感測段的光學波導、一 兩端分別連接於各該定位件上之預力件、一兩端分別連接 於各該定位件上之檢測件。該預力件傾向使該等定位件之 相對位置改變。該檢測件傾向維持該等定位件之相對位置 5 ，且該檢測件能與該化學物質發生化學反應並使本身 斷面發生改變，此時該預力件驅使該等定位件之相對位置 改’並藉由该感測段判斷該化學反應之程度。 而應用上述光學波導化學檢測裝置判斷化學反應之 程度的方法則包括下列步驟： 10 a)將上述光學波導化學檢測裝置設置於存在一化學 物質之環境中； b) 以一經過該感測段之光訊號量測該感測段之軸向 變形的量測值；及 c) 以該感測段之軸向變形的量測值判斷化學反應之 15 程度。 本發明之功效在於能以光學波導進行化學反應程度 之檢測’並充分發揮其寬頻帶、低損失、無相互干涉性、 高絕緣性及耐腐蝕等特性，使得本發明之光學波導化學檢 測裝置擁有使用壽命長及適用環境多樣等特性，並具備長 20 時間、長距離、多點或線型佈設等之監測與檢測功能，以 及低成本與維修容易等優點。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之四較佳實施例的詳細說明中，將可清 1254129 疋的明白。在提出詳細說明之前，要注意的是，在以下的 敘述中，類似的元件是以相同的編號來表示。 如圖6、圖7及圖8所示，本發明光學波導化學檢測 5 衣置1及其檢測方法的第一較佳實施例是用於檢測與一化 予物貝之化學變化程度，在本實施例中該化學物質為氣離 子’而该光學波導化學檢測裝置1是吊掛於一鄰海之高架 同壓輸電纜線（圖未示）的支承鋼索線（圖未示）上。該光學 波V化學檢測裝置1包括兩彼此間隔一距離之定位件丄丄、 一設置於該等定位件11上之光學波導12、兩設置於該等 1〇 疋位件11間之預力件13,以及兩設置於該等定位件u間 之檢測件14。在本實施例中，該光學波導12為一光纖。 各該定位件11具有一柱狀座體m、一形成於該座體 ill之中央位置並供該光學波導12穿設之通道ιι〇，以及 一填充於該通道11〇内使該光學波導12與該座體ηι彼 15 此固接之填充劑1丨2。在本實施例中，該通道11〇鄰近該 座體ill表面之孔徑小於其形成於該座體ln内部之孔 徑，使該通道110實際上於該座體lu内形成一近似球形 之空間，而該填充劑112是一黏劑，而各該定位座u更 於该座體111上形成有一自其側邊與該通道丨丨〇連通，以 20 供該填充劑112灌入之注入口 113。 該光學波導12可定義出兩分別定位於各該定位件u 之定位點m、-位於該兩定位點121間之感測段122， 以及一設置於該感測段122上之量測元件123。在本實施 例中，該量測元件123是-光柵，因此使得該感測段122 5 10 15 20 1254129 形成一光纖光栅感測器。 之目66 ^ 由於在本發明中，該感測段122 … 能量測該等定位點121間相對位移之變化， 故熟習此項技藝者當能輕易推想，當該光學波導12如本 實施例為—光_ # 子波V 12如本 …先、義…亥感測段122亦能形成為-非本質式 法布立-拍若干涉式感測器， 、 笙π A. . ^不里先0宁域反射感測器 二二以❹測該等定位點⑵間相對位移之變化者， 均月b應用於本發明中。 ;各該預力件13之兩端分別連接於各該定位件n上， 各該預力件13存在傾向使該等定位件^之相對位置改變 的預力。在本實施财，各該預力件13具有— 行該光學波導12軸向之方向延伸且其兩端分別固接於各 該定位件u之座n⑴的金屬桿體131，各該金屬桿體 131是由不鏽鋼材質製成，並具一方形斷面，及傾向使該 等定位件11彼此相對遠離之預力，但本發明之預力件Η 並非以此為限，事實上’上述預力件13之數目、設計種 類、設置位置、預力大小與方向’及預力產生方式等均有 多種選擇，至於相關的設計選擇及限制條件容後再敛。但 就本實施例而言，為求使該等定位件U受該等預力件Η 驅動時，僅發生相對移動而無相對轉動，以使該光學波導 12之感測段122能精確感測該等定位件η間之相對移 動，因此該等金屬桿體131是以該光學波導12之位置為 中心對稱地設置於該座體111上。 該等檢測件14之兩端分別連接於各該定位件u上， 且傾向維持該等定位件11之相對位置固定。各該檢測件 10 1254129 14具有-沿實質平行該光學波導12軸向之方向延伸且其 兩端分別固接於各該定位件u之座冑⑴的金屬桿體 141 ’及兩道形成於該金屬桿體141上之細縫140。各該金 屬桿體141具有—矩形斷面’而其在形成有該細縫處 之斷面積則小於該矩形斷面之面積。上述金屬桿體⑷盘 細縫140之數目與規格並非以此為限，同樣地，上述檢測 件14之設計種類、設置位置，及侷限該等預力件13之方 式也具有/種選擇。為提供均衡之拘束，使得該等定位件 11文该等預力件13驅動時，僅發生相對移動而無相對轉 動，因此該等金屬桿體14ι同樣是以該光學波導12之位 置為中心對稱地設置於該座體1 1 1上。 由於該等檢測件14須能與該化學物質發生化學反 應，並使本身斷面發生改變，考量在本實施例中，該2學 物質為氣離子，故各該檢測件14之金屬桿體141是由含 有鐵質之晴製成，由於齡具有氯離子的含水環境下會 有下列的電化學反應： 1¼ 極反應· Fe+2C 1 FeC 12—> Fe2++2C 1 +2e 陰極反應：l/2〇2+H2〇+2e-—2(OH)- 因此當該等檢測件14接觸到氯離子時，會使得該等 金屬桿體141受到侵蝕而由外表面逐漸剝落，造成其鄰近 該細縫140處之斷面縮減，導致抵抗該等檢測件14侷限 該等定位件11相互位置固定之能力降低，進而使得該等 定位件11受該等預力件13之推頂而相互遠離，由於該光 學波導12之該等定位點121是分別固定於各該定位件u 1254129 ^ ’因此便受該等相互遠離之定位件u拉伸而產生伸長 量，此時藉由如圖9所示之一通過該感測段122之光訊號 反射波長91的飄移量s，量測該感測段122軸向長度之伸° 長里，便能反算出該等檢測件14斷面變化之程度，進而 5 €得上述受氯離子侵姓之化學反應的程度，當然，由於是 以輸入該光學波導12之光訊號進行量測，因此不僅具有 極高之精確度，若是當該光學波導化學感測裝置丨是設計 在化學反應後，該等定位件n相互迫近時，該光學波導 12之感測段122在軸向長度上更能伯測出微小的軸向麼縮 _ 1〇 量，此外，如果對於該光學波導預先施加一張力而產生一 預先伸長量後，才將其定位於該定位# U上則更能增 加對該等定位件11相互迫近時之量測範圍。 曰 很明顯地，本發明能輕易地藉由調整改變該等檢測件 Η的材質、數目、厚度及長度範圍等，而製成不同規格之 15 料波導化學檢職置卜以適詩各種不狀化學物質 與待測環境。故該檢測件14所含材質並不限定為鐵，舉 例來說，其他如鉛、錫、銅、鋁、鎳，及銀等金屬，或包 # 含該等金屬之合金，甚至其他能與待檢測之化學物質發生 化學變化之非金屬材質，也都適用於本發明之中。 20 事實上在本實施例中’該等定位件11之座體ln與 該等檢測件14之金屬桿體141是以相同之鋼材—體成# - 所製成之矩形框架結構。正因如此，在本實施例中該等預 · 力件13之預力施加方式便是先將該由該等定位件丨丨及該 等檢測件14所形成之矩形框架結構加熱到2〇(rc至3〇〇艽 12 1254129 後’將該等在室溫（20。〇時長度大於該等定位之間隔 的預力件13置人該矩形框架結構内，待該等座體⑴I 該等金屬桿體141冷卻後，該等座體⑴便壓縮該等預力、 件13,使其因形變而儲存一頂抵該等座冑⑴相互遠離之 預力。 〜由上述可知，當欲使得該等預力件13是傾向使該等 疋位件11彼此相對靠近時，則將該等預力件13之金屬桿 體131與該等定位件u之座體lu以不鏽鋼一體成形製 成矩形框架結構，加熱使其膨脹後，在置人該等長度較& _ 之k測件14並待其冷卻後，便能使該等金屬桿體lu存 在趨向使該等座體U1彼此相對靠近之預力。當然，該等 定位件11並非限定須與該等預力件13或該等檢測件14 〆成矩开/框杀，配合该荨預力件1 3或該等檢測件1 4設置 之數目，其也可以形成橫躺之『U』型或『H』型結構，而 利用上述熱脹冷縮之方式完成該等預力件13與該等檢測 件14之設置。 須加以說明的是，雖在上述實施例中，該光學波導12 · 為一光纖，而使得該光學波導化學檢測裝置丨之整體尺寸 得以涵盍公尺（m)等級至釐米（mm)等級；當然，該光學波 導12並非以光纖為限，其也能以一平面光波導加以取代， 同時若配合如微機電系統（Micro-Electro-Mechanical ·BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to an optical waveguide detecting apparatus and a detecting method thereof, and more particularly to an optical waveguide chemical detecting apparatus for detecting a degree of chemical change and a detecting method thereof. [Prior Art], see 5 Automatic monitoring and distance telemetry systems are widely used in various fields, which not only expands the scope of human activities, but also accelerates the progress of various technical fields. Among them, the development and production of various sensing devices play a key role. The traditional electronic sensing device mainly uses the principle of electromagnetism, the amount of utilization, the influence of the electrical environment of the 'J component, such as the change of voltage and resistance, to detect the physical or chemical environment of the environment in which the farm is located. Parameters, such as temperature sensing devices, utilize metal component changes in resistance at different temperatures to determine the corresponding temperature parameter by measuring the resistance or voltage value. The ion sensation; loading = is measured by the conductivity of the analyte. For example, if the sensing device is used, the resistance value is changed by the change of the length of the resistance wire, and then the corresponding variation of the strain is measured. However, since the electronic circuit interferes with the external electromagnetic field, it is easy to cause problems such as excessive noise and distortion. Moreover, since the metal conductor is liable to corrode the party damage due to moisture, the service life is short, especially for the embedded sensing device, for example, for the detection of civil structures, the earth engineering and the river engineering, and the inch cannot be replaced. Applications are subject to considerable restrictions. Therefore, there are many non-electronic sensing devices developed, especially 1254129 is an optical component made of optical principle 'because of broadband, low loss, high insulation, anti-electromagnetic interference, corrosion resistance #, and optical signal The processing frequency is faster and more accurate than the transmission of electrical signals, so it has become the main trend of current research and development. 5 Optical components can be divided into optical active components and optical passive components. Currently, optical components used in the field of optical sensors are mainly optical waveguides belonging to optical passive components. Optical waveguides can be generally referred to as optical fibers. Fiber waveguides, and planar optical waveguides fabricated in semiconductor processes. Among them, the main principle of the optical fiber sensing device made of the fiber waveguide can be divided into the principle of light intensity modulation, the principle of optical phase modulation, and the principle of optical wavelength modulation. The fiber optic sensing devices commonly used today include a Fiber Bragg Grating sensor (FBG), an Extrinsic Fabry-Perot Interferometric Sensor (EFPI), and Brillouin Optical Time Domain Reflector sensor (BOTDR) and the like. As shown in FIG. 1 to FIG. 3, a fiber grating sensor 81 has an optical fiber 811 having a core 812, a casing 813 having a relative refractive index smaller than the core 812, and a set of The outer periphery of the outer casing 813 20 provides a suitable protective outer sleeve 814. The core 812 is formed with a grating 815. When the wide-band optical signal entering the core 812 from an input terminal 816 passes through the grating 815, the Bragg condition is satisfied except the grating 815. The specific wavelength 90 can reflect outside the 'other wavelengths of the range will cancel the phase difference, so the input end 816 can get the reflection spectrum of the full 1254129: grating 815 condition shown in Figure 2, and the opposite of the input The output 埏 817 of the terminal 81 β is obtained by filtering out the penetration spectrum of the wavelength 9 满足 satisfying the Bragg condition as shown in FIG. 3 . Therefore, when the optical fiber 811 is disturbed by the environment, the grating is separated, and the wavelength 90 of the optical signal is caused to drift, and then the physical parameter such as stress and strain that the sensing is 81 is measured. As shown in FIG. 4, a method of interfering sensor 82 has a hollow fiber 821, a single mode fiber 822 that is inserted in the stone 821, and a similar device. The multimode fiber 823 is disposed in the transistor 821 and spaced apart from the single mode fiber 822 by an appropriate distance d. The single mode fiber 822 φ 10 has a first section 824, and the multimode fiber 823 has a first A second section 825 of a section 824 opposite and spaced apart by a distance d, when the optical signal is incident by the single-twist fiber 822, produces approximately 4% of Frey in the first section 824 and the second section 825, respectively. The Fresnel reflection ^ and R2, because the % environment disturbance will change the distance 15 d between the first section 824 and the second section 825, thereby causing the optical path change of the two reflections Ri and R2, The amount of change in the distance d between the first section 824 and the second section 825 can be obtained by measuring the interference generated by the two reflections 1 and R2. Φ As shown in FIG. 5, a Briller optical time domain reflectance sensor 83 has a glass fiber 831, and a spiral wound on the glass fiber 831 20 and has a different Brill scattering from the glass fiber 831. When the constant plastic optical fiber 8 3 2 ' ^ 4 sensor 8 3 is under pressure, the optical signal located in the glass optical fiber 831 is refracted into the plastic optical fiber 832, and the reflection time difference of the optical* signal can be read. The stress is applied to the position of the sensor, and the energy of the optical signal is measured as the energy of the sensor 83 to determine the 6 1254129 variable. The sensor made by the planar optical waveguide is as disclosed in the case of the Republic of China, the 中 y 帛〇 帛〇 〇 〇 488 488 488 488 488 488 488 488 488 488 488 488 488 488 488 488 488 488 488 488 488 488 488 488 虎 虎 虎 虎 虎 虎 虎 虎 虎 488 488 488 488 A ten-crystal waveguide Bragg grating combined with a McKesson interferometric temperature sensor, which utilizes a large crystal expansion of a twin crystal, and a special grating to measure the temperature of the grating formed thereon to provide high-accuracy temperature monitoring. . It can be seen from the above that the existing optical waveguide sensing devices are mainly based on the measurement of physical changes, and are rarely used for measurement of chemical changes, but the fork is limited to the traditional electronic sense (four) for the detection of chemical changes. The innate shortcomings, as well as the limitations of the "point" measurement, especially when applied to long-distance linear distributions such as high-H lines and ground-t (water) pipes, not only the effect Poor, its cost will be even higher. Therefore, the inventors of the present invention have focused on the physical properties and chemical properties of materials, as well as the specialties and techniques of optical skin V, and have accumulated years of experience in the development of detector integration. After several experiments, the invention has finally emerged. SUMMARY OF THE INVENTION The main purpose of this month is to provide an optical waveguide chemical detecting device for detecting the degree of chemical reaction and a detecting method thereof. Another object of the present invention is to provide an optical waveguide chemical detecting device capable of long-distance multi-point and line layout and a detecting method thereof. The I month optical waveguide chemical detection device is used for detecting the degree of chemical change of the first chemical substance, and the optical waveguide chemical detection device comprises two positioning members spaced apart from each other, and having two positions respectively positioned on each of the positioning members 1254129. An optical waveguide having a sensing point in the sensing point between the two positioning points, a pre-stressing member respectively connected to each of the positioning members, and a detecting member respectively connected to each of the positioning members. The preload member tends to change the relative position of the positioning members. The detecting member tends to maintain the relative position 5 of the positioning members, and the detecting member can chemically react with the chemical substance and change the cross section of the detecting member. At this time, the pre-stressing member drives the relative position of the positioning members to change. And determining the degree of the chemical reaction by the sensing segment. The method for determining the degree of chemical reaction by using the above optical waveguide chemical detecting device comprises the following steps: 10 a) placing the optical waveguide chemical detecting device in an environment where a chemical substance exists; b) using an optical signal passing through the sensing portion Measuring the measured value of the axial deformation of the sensing segment; and c) determining the degree of the chemical reaction by the measured value of the axial deformation of the sensing segment. The invention has the advantages of being able to detect the degree of chemical reaction by an optical waveguide and fully exerting its characteristics of wide frequency band, low loss, no mutual interference, high insulation and corrosion resistance, so that the optical waveguide chemical detecting device of the present invention has Features such as long service life and diverse application environments, as well as monitoring and detection functions such as long time, long distance, multi-point or line layout, as well as low cost and easy maintenance. [Embodiment] The foregoing and other technical contents, features, and advantages of the present invention will become apparent from the following detailed description of the preferred embodiment of FIG. Before the detailed description is made, it is noted that in the following description, similar elements are denoted by the same reference numerals. As shown in FIG. 6, FIG. 7, and FIG. 8, the first preferred embodiment of the optical waveguide chemical detection 5 device 1 and the detection method thereof is used for detecting the degree of chemical change of the compound and the object, and In the embodiment, the chemical substance is a gas ion', and the optical waveguide chemical detecting device 1 is hung on a support cable wire (not shown) of an overhead transmission line (not shown) of an adjacent sea. The optical wave V chemical detecting device 1 includes two positioning members 间隔 spaced apart from each other, an optical waveguide 12 disposed on the positioning members 11 , and two pre-force members disposed between the 1 clamping members 11 . 13, and two detecting members 14 disposed between the positioning members u. In this embodiment, the optical waveguide 12 is an optical fiber. Each of the positioning members 11 has a columnar base m, a channel formed at a central position of the base ill and disposed for the optical waveguide 12, and a channel 〇 in the channel 11 to make the optical waveguide 12 The filler 1 丨 2 is fixed to the body ηι。15. In this embodiment, the aperture of the channel 11 〇 adjacent to the surface of the pedestal ill is smaller than the aperture formed in the interior of the pedestal ln, so that the channel 110 actually forms an approximately spherical space in the pedestal lu. The filler 112 is an adhesive, and each of the positioning bases u is formed on the base body 111 to communicate with the passages from the side thereof to the inlet port 113 for filling the filler 112. The optical waveguide 12 defines two positioning points m respectively positioned between the positioning members u, a sensing section 122 located between the two positioning points 121, and a measuring component 123 disposed on the sensing section 122. . In the present embodiment, the measuring element 123 is a grating, thus causing the sensing section 122 5 10 15 20 1254129 to form a fiber grating sensor. The object 66 ^ ^ In the present invention, the sensing segment 122 ... energy measures the change in relative displacement between the positioning points 121, so those skilled in the art can easily imagine that when the optical waveguide 12 is as in this embodiment For the light _ # wavelet V 12 as the first... meaning, the sensible segment 122 can also be formed as a non-essential method, the arbitrarily interferometric sensor, 笙π A. . The first N-domain reflection sensor 22 is used to detect changes in the relative displacement between the positioning points (2), and the average monthly b is applied to the present invention. The two ends of the pre-stressing members 13 are respectively connected to the positioning members n, and each of the pre-stressing members 13 has a pre-stress which tends to change the relative positions of the positioning members. In the present embodiment, each of the pre-stress members 13 has a metal rod body 131 extending in the axial direction of the optical waveguide 12 and fixed at both ends thereof to the seat n (1) of each of the positioning members u, each of the metal rod bodies. 131 is made of stainless steel material and has a square cross section, and a pre-stress that tends to keep the positioning members 11 away from each other, but the pre-force member 本 of the present invention is not limited thereto, in fact, the above-mentioned pre-force There are a variety of options for the number of pieces 13, the type of design, the position of the set, the size and direction of the pre-force, and the pre-force generation method. As for the relevant design choices and restrictions, the content is adjusted. However, in the present embodiment, in order to drive the positioning members U to be driven by the pre-force members ,, only relative movement occurs without relative rotation, so that the sensing segments 122 of the optical waveguide 12 can be accurately sensed. The relative movement between the positioning members η is such that the metal rod bodies 131 are symmetrically disposed on the base body 111 centering on the position of the optical waveguide 12. The two ends of the detecting members 14 are respectively connected to the positioning members u, and tend to maintain the relative positions of the positioning members 11 fixed. Each of the detecting members 10 1254129 14 has a metal rod body 141 ′ extending in a direction substantially parallel to the axial direction of the optical waveguide 12 and having two ends fixed to the seat 胄 (1) of each of the positioning members u, and two paths formed thereon A slit 140 on the metal rod 141. Each of the metal rod bodies 141 has a rectangular cross section and the sectional area at which the slit is formed is smaller than the area of the rectangular cross section. The number and specifications of the slits 140 of the metal rod body (4) are not limited thereto. Similarly, the design type, the installation position of the detecting member 14, and the manner of limiting the pre-force members 13 are also selected. In order to provide equalization, when the positioning members 11 are driven by the pre-stress members 13, only relative movement occurs without relative rotation, and therefore the metal rods 141 are also symmetric about the position of the optical waveguide 12. The ground is disposed on the seat body 1 1 1 . Since the detecting member 14 is capable of chemically reacting with the chemical substance and changing its own cross section, it is considered that in the present embodiment, the two materials are gas ions, so the metal rod body 141 of each detecting member 14 is It is made of iron-containing fine, and has the following electrochemical reactions in an aqueous environment with chloride ions: 11⁄4 pole reaction · Fe+2C 1 FeC 12—> Fe2++2C 1 +2e Cathodic reaction: l/2〇2+H2〇+2e--2(OH)- Therefore, when the detecting members 14 are exposed to chloride ions, the metal rods 141 are eroded and gradually peeled off from the outer surface, causing them to be adjacent thereto. The reduction of the cross-section of the slits 140 causes the resistance of the detecting members 14 to limit the mutual positioning of the positioning members 11 to each other, thereby causing the positioning members 11 to be pushed away from each other by the pre-stressing members 13 Since the positioning points 121 of the optical waveguide 12 are respectively fixed to the positioning members u 1254129 ^ ', they are stretched by the positioning members u which are apart from each other to generate an elongation amount, by using FIG. 9 One of the light passing through the sensing segment 122 reflects the drift amount s of the wavelength 91, Measuring the extension of the axial length of the sensing section 122, the degree of change of the cross-section of the detecting member 14 can be inversely calculated, and the degree of chemical reaction of the above-mentioned chloride ion invading the surname is 5 €, of course, The optical signal input to the optical waveguide 12 is measured, so that it has not only extremely high precision, but when the optical waveguide chemical sensing device is designed to be in a chemical reaction, the positioning members n are close to each other, the optical The sensing section 122 of the waveguide 12 is more capable of measuring a slight axial amount in the axial length. Further, if a pre-elongation amount is generated by applying a force to the optical waveguide in advance, Positioning on the positioning #U can further increase the measurement range when the positioning members 11 are close to each other.曰 Obviously, the present invention can be easily adjusted to change the material, number, thickness and length range of the test pieces, and the chemical inspection of the 15 kinds of waveguides can be made to suit various poems. Chemical substances and the environment to be tested. Therefore, the material contained in the detecting member 14 is not limited to iron. For example, other metals such as lead, tin, copper, aluminum, nickel, and silver, or an alloy containing the metal, or even others can be treated. Non-metallic materials in which the chemical substances detected are chemically changed are also suitable for use in the present invention. In fact, in the present embodiment, the seat body ln of the positioning members 11 and the metal rod body 141 of the detecting members 14 are in the same rectangular structure as the steel body. For this reason, in the present embodiment, the pre-force application manner of the pre-stress members 13 is to first heat the rectangular frame structure formed by the positioning members 该 and the detecting members 14 to 2 〇 ( Rc to 3〇〇艽12 1254129 after 'these are at room temperature (20. The length of the pre-stressed member 13 whose length is greater than the interval of the positioning is placed in the rectangular frame structure, to be the metal of the seat (1) I After the rod body 141 is cooled, the seats (1) compress the pre-stressing members 13 to store a pre-stress against the mutual movement of the seat pockets (1) due to the deformation. When the pre-stressing members 13 tend to bring the clamping members 11 closer to each other, the metal rod body 131 of the pre-stressing members 13 and the seat body lu of the positioning members u are integrally formed of stainless steel into a rectangular frame. After the structure is heated and expanded, after the lengths of the measuring members 14 of the lengths are set and cooled, the metal rods lu can be made to have the seats U1 relatively close to each other. Precautions. Of course, the positioning members 11 are not limited to being momentarily opened with the pre-stress members 13 or the detecting members 14 The frame killing, in combination with the number of the pre-stressing members 13 or the detecting members 14 can also form a "U" type or "H" type structure lying horizontally, and is completed by the above-mentioned thermal expansion and contraction method. The pre-stress members 13 and the detecting members 14 are disposed. It should be noted that, in the above embodiment, the optical waveguide 12 is an optical fiber, so that the overall size of the optical waveguide chemical detecting device is The metric range is from m (m) to centimeter (mm); of course, the optical waveguide 12 is not limited to an optical fiber, and it can also be replaced by a planar optical waveguide, and if it is combined with a micro-electro-mechanical system (Micro-Electro- Mechanical ·
System，MEMS)、微機光系統（Micr〇-〇ptic- Mechanical ，System, MEMS), Microcomputer Optical System (Micr〇-〇ptic- Mechanical,
System，MOMS) ’ 以及微光機電系統（Micjro-Electro-Mecha -Optical System，MEMOS)等微系統技術，則更能將該光學 13 1254129 波導化學檢測裝置1之整體尺寸縮減至釐米（mm)等級到微 米（//m)等級之範圍内。 如圖10所示，以下藉由增設一與該光學波導12連通 之光訊號產生器2、一與該光學波導12連通之光訊號接收 器3 ’以及一與該光訊號接收器3連接之光訊號分析器4 ; 使該光學波導化學檢測裝置丨成為一完整之檢測系統，來 說明該光學波導化學檢測裝置1之檢測方法。如圖11所 示，以上述光學波導化學檢測裝置1檢測一化學物質之化 學變化程度的方法包含下列步驟： 步驟200，如圖8及圖1〇所示，將上述光學波導化學 檢測裝置1設置於使該等檢測件14暴露在一化學物質之 環境中’如前所述，在本實施例中，該光學波導化學檢測 裝置1是吊掛於一鄰海之高架高壓輸電纜線的支承鋼索線 上。 步驟202，以該光訊號產生器2發射光訊號進入該光 學波導12。 步驟204，以該光訊號接收器3接收經由該光學波導 12之感測段122的光訊號，在本實施例中是接收經由該形 成光柵之量測元件123所反射之反射訊號。而誠如熟悉此 項技藝者所了解，其亦能接收通過該量測元件i 之透射 訊號。 步驟206，以該光訊號分析器4分析經過該感測段j 22 之光訊號的變化值，以獲得該感測段122之軸向變形的量 測值。在本實施例中，該光訊號分析器4是以如圖9所示 1254129 ==Γ則兀件123之光訊號的反射波長偏移量s量測該 5 10 15 20 仆與二Γ⑽μ感測段122之向變形的量測值判斷 开 度。在本實施财便是㈣❹ 1段122之軸 =:來判斷該等檢測件"在受含氯離子濃度較高 之賴^下受慮、離子侵㈣程動。其可以是以該感測段 ^之总轴向變形的直接量測值來判斷該等檢測件丨4受侵姓 二匕學反應程度；其也可以是以該感測請之軸向變形 =值之變化量，來判斷該等檢測件14受侵蚀的化學 虚::度Α在此便是以該感測段122之軸向變形的量測值 段122之抽向變形的初始值進行比較，得到該感 測& 122之軸向變形的量測值之變化量。 圖Ϊ2所ητ，本發明光學波導化學檢測裝置1及其 檢測方法的第二較佳實施例與上述第一較佳實施例大致 相同’同樣是應用於是檢測受氣離子料的化學變化程 度，其不同處在於該光學波導化學檢測裝置ι是所設於一 鄰海之高壓電塔7上。該光學波導化學檢測装置i包括兩 彼此間隔-距離之定位件u、一設置於該等定位件η上 之光學波導12、-設置於該等定位件u間之預力件13、 -設置於該等定位件u間之檢測件14，以及一與該等定 位件11固接之設置座15。 各該定位件η及該光學波導12之型態和設置關係愈 上述第-較佳實施例所述相同，該預力件13之兩端分別 連接於各該定位件u上，且存在傾向使該等定位件η之 15 10 15 20 1254129 =置=預力。在本實施例中，該預力件i3同樣 貫質平行該光學波導12轴向之方向延伸且其 兩立而刀別固接於各該座體U1上的不矯鋼金屬桿體⑶. 較佳實施例之差異處在於該等金屬桿體i3i 僅汉置於该光學波導12之一側。 /榀測件14之兩端亦分別連接於各該定位件I〗上， ;傾=亥等定位件11之相對位置固定。在本實施例 12軸/^麟14同樣地具有—沿實質平行該光學波導 ㈣之方向延伸且其兩端分別固接於各該之 含鐵金屬桿體⑷，及—形成於該金屬桿體i4i ^ ⑷；然與上述第-較佳實施例之差異處則在於該等全屬 桿體⑷僅設置於該預力件13遠離該光學波導12之一側。 /亥設置座15則位於該光學波導12遠離該預力件13 $。亥U彳件14之另—側，且其兩端分別連接於各該座體 111上’同時形成有複數螺孔7()以供所設於該高屢電塔？ ^因广當該檢測件14接觸到氯離子使得該金屬桿體141 又到知姓’而造成其鄰近該細縫14〇處之斷面縮減，進而 使得該等定位件11受該預力件！3之推頂而相互遠離，並 牵動該光學波導12而使該感測段122產生伸長量，進而 抑以反’出。亥才欢測件j 4斷面變化之程度’而獲得上述受 氯離子侵蝕之化學反應的程度。 雖在本實施例中，該設置座15是同時連接於該等座 體⑴上，因而會造成對於該等定位件11相對位移之限 制’然而由於各料位件U仍會以與該設置座15連結處 16 1254129 為支點’在$該預力件13推頂時產生旋轉’因此仍能偵 :出該檢測件14受氯離子受侵钱後之反應。實際上在本 貫施例中，該定位件u之座體⑴、該等檢測件14之金 屬桿體14卜以及該設置座15是以相同之鋼材一體成形所 製成之矩形框架結構。 如圖13及圖14所示，本發明光學波導化學檢測裝置 及/、k測方法的第三較佳實施例也是用於檢測與一化學 =之化學變化程度’且同樣地是檢測受氯離子侵姓的化 學變化程度。該光學波導化學檢測裝置i包括兩彼此間隔鲁 距離之定位件1 1、一設置於該等定位件丨丨上之光纜 W、兩設置於該等定位件n間之預力件13，以及兩設置 於該等定位件11間之檢測件14。 各該定位件11具有一柱狀座體m、一形成於該座體 U1之中央位置並供該光纜16穿設之通道11〇、一填充於 X通道11 0内使该光繞1 β與該座體111彼此固接之填充 劑112,以及兩夾持該光纜16並固接於該座體1U上之預 力鋼鎖片114。在本實施例中，而該通道11 〇鄰近該座體鲁 111表面之孔徑小於其形成於該座體丨丨丨内部之孔徑，使 忒通道110實際上於該座體ιη内形成一近似球形之空 間’而該填充劑112是一熔點低於該等座體U1之熔點的 〇金，而各該定位座1丨更於該座體丨丨丨上形成有一自其 側邊與該通道110連通，以供該填充劑112灌入之注入口 _ 113。而該等預力鋼鎖片114是用於提供較大的之承力， 以支撐該光纜16。 17 1254129 曾該光規16包含-形成光纖的光學波導12，該光學波 導12可定義出兩分別定位於各該定位件11之通道110處 的定位點121 一位於該衫位點121間之感測段122， 以=設置於該感測段122上之量測元件123(見圖卟在 本貝施例中’該量測元件123是一光柵，而使得該感測段 122形成一光纖光柵感測器。 ，在本實施例中，各該預力件13具有_沿實質平行該 光學波導12軸向之方向延伸且兩端分別錫定於各該定位 件11之座體111上的鋼索繞線132。各該鋼索纔線132藉· 由累鎖之方式，使其存在傾向使該等定位件U彼此相對 =近之預力，且為使該等定位件n受該等預力件13驅動 ^僅發生相對移動而無相對轉動，該等鋼索纜線⑶是 、/光龙16之位置為中心對稱地設置於該座體111上。 該等檢測件14之兩端分別連接於各該定位件u上， 且傾向維持該等定位件U之相對位置固定。各該檢測件 14具有一沿實質平行該光學波導12轴向之方向延伸且其 ^端分別固接於各該定位件^之座體lu的含鐵金屬桿· 體14卜及兩道形成於該金屬桿體141上之細縫⑽。各 該金屬桿體141具有一矩形斷面’而其在形成有該細縫"。 處之斷面積小於該矩形斷面。 _因此當該等檢測件14接觸到氯離子使得該等金屬桿 體"1受到侵蝕而由外表面逐漸剝落，造成其鄰近該細： 处之辦面纟侣減，導致抵抗該寺檢測件14偈限該等定位 牛11相互位置固疋之能力降低，進而使得該等定位件11 18 1254129 5 10 之該等ST 13 ^推擠而相互靠近，由於該光學波導12 立點121是分別定位於各該定位件11上，而受 ^ = 1㈣變’量測該感測段122車由向長度之變形 二’便=算出該等檢測件14斷面變化之程度，進而獲 仔上述又虱離子侵蝕之化學反應的程度；當然也可以 光纔16及該形成光纖之光學波導12預先施加_張力^ 其產生預先之伸長量後才將其定位於該定位件u上。 如圖15及圖16所示，本發明光學波導化學檢測裝置 1及其^測方法的第四較佳實施例也是用於檢測與一化學 物質之化學變化程度。該光學波導化學檢測裝置1包括兩 彼此間隔:距離之定位件u、一定位於該等定位件^上 之光予波‘ 12、兩設置於該等定位件i i間之預力件i 3、 兩分別設置於各該預力件13上之預力限位組件17，以及 兩设置於該等定位件u間之檢測件14。System, MOMS) ' and Microsystems (Micjro-Electro-Mecha-Optical System, MEMOS) and other micro-system technologies can reduce the overall size of the optical 13 1254129 waveguide chemical detection device 1 to the centimeter (mm) level. To the micrometer (//m) level. As shown in FIG. 10, an optical signal generator 2 connected to the optical waveguide 12, an optical signal receiver 3' communicating with the optical waveguide 12, and a light connected to the optical signal receiver 3 are added. The signal analyzer 4; the optical waveguide chemical detecting device is used as a complete detecting system to describe the detecting method of the optical waveguide chemical detecting device 1. As shown in FIG. 11, the method for detecting the degree of chemical change of a chemical substance by the optical waveguide chemical detecting device 1 includes the following steps: Step 200, as shown in FIG. 8 and FIG. 1A, the optical waveguide chemical detecting device 1 is set. In order to expose the detecting member 14 to a chemical substance environment, as described above, in the present embodiment, the optical waveguide chemical detecting device 1 is a supporting steel cable suspended from an overhead high voltage transmission cable line adjacent to the sea. on-line. Step 202, the optical signal generator 2 emits an optical signal to enter the optical waveguide 12. Step 204: The optical signal receiver 3 receives the optical signal passing through the sensing segment 122 of the optical waveguide 12. In this embodiment, the reflected signal reflected by the measuring component 123 forming the grating is received. As will be appreciated by those skilled in the art, it can also receive transmission signals through the measuring component i. In step 206, the optical signal analyzer 4 analyzes the change value of the optical signal passing through the sensing segment j 22 to obtain the measured value of the axial deformation of the sensing segment 122. In this embodiment, the optical signal analyzer 4 measures the reflected wavelength offset s of the optical signal of the element 123 as shown in FIG. 9 to measure the 5 10 15 20 servant and the second (10) μ sensing. The measured value of the deformation of the segment 122 determines the opening. In this implementation, the axis of (4) ❹ 1 segment 122 =: to determine the detection of these detectors " under the influence of high chloride ion concentration, ion intrusion (four) process. It may be that the direct measurement value of the total axial deformation of the sensing segment ^ is used to determine the degree of the secondary school drop response of the detecting member ;4; or it may be the axial deformation of the sensing. The amount of change in the value is used to determine the chemical imaginary of the test piece 14 to be eroded: the degree Α is compared here by the initial value of the slanting deformation of the measured value segment 122 of the axial deformation of the sensing segment 122. The amount of change in the measured value of the axial deformation of the sense & 122 is obtained. The ητ of Fig. 2, the second preferred embodiment of the optical waveguide chemical detecting device 1 of the present invention and the detecting method thereof are substantially the same as those of the first preferred embodiment described above, and the same applies to detecting the degree of chemical change of the gas ionized material, which is different. The optical waveguide chemical detecting device ι is disposed on a high voltage electric tower 7 adjacent to the sea. The optical waveguide chemical detecting device i includes two positioning members u spaced apart from each other, an optical waveguide 12 disposed on the positioning members η, a pre-stress member 13 disposed between the positioning members u, The detecting member 14 between the positioning members u and a setting seat 15 fixed to the positioning members 11. The relationship between the positioning member η and the optical waveguide 12 is the same as that of the above-described first embodiment. The two ends of the pre-stressing member 13 are respectively connected to the positioning members u, and there is a tendency to make 15 10 15 20 1254129 of the positioning members η = set = pre-force. In this embodiment, the pre-force member i3 is also parallel to the axial direction of the optical waveguide 12 and is fixed to the unsteered metal rod body (3) of each of the seat bodies U1. The difference between the preferred embodiments is that the metal rods i3i are placed only on one side of the optical waveguide 12. The two ends of the detecting member 14 are also respectively connected to the positioning members I, and the relative positions of the positioning members 11 such as the tilting position are fixed. In the present embodiment, the axis 12/^ Lin 14 likewise has a direction extending substantially parallel to the optical waveguide (four) and two ends of which are respectively fixed to the respective ferrous metal rods (4), and formed on the metal rod body. I4i ^ (4); however, the difference from the above-described first preferred embodiment is that the all-bar members (4) are disposed only on one side of the pre-force member 13 away from the optical waveguide 12. The /black mount 15 is located at the optical waveguide 12 away from the pre-stress member 13 $. The other side of the U-shaped member 14 and the two ends thereof are respectively connected to the respective seats 111. At the same time, a plurality of screw holes 7 () are formed for the high-voltage electric tower. ^ Because the detecting member 14 is exposed to chloride ions, the metal rod body 141 is again known to cause a decrease in the section adjacent to the slit 14 进而, so that the positioning members 11 are subjected to the pre-force member. ! The tops of the three are pushed away from each other, and the optical waveguide 12 is pulled to cause the sensing section 122 to generate an elongation amount, thereby suppressing the output. The degree of change in the cross-section of the j 4 section was measured by the degree of the change in the chemical reaction of the chloride ion. Although in the present embodiment, the mounting seat 15 is simultaneously connected to the seats (1), it may cause a restriction on the relative displacement of the positioning members 11. However, since the respective material members U will still be in the same position. The 15 joint 16 1254129 is the fulcrum 'rotation when the pre-force 13 is pushed up' so that it can still detect the reaction of the detection element 14 after the chloride ions are invaded. In fact, in the present embodiment, the seat body (1) of the positioning member u, the metal rod body 14 of the detecting members 14, and the mounting seat 15 are rectangular frame structures integrally formed by the same steel material. As shown in FIG. 13 and FIG. 14, the third preferred embodiment of the optical waveguide chemical detecting device and/or the k measuring method of the present invention is also used for detecting the degree of chemical change with a chemical = and similarly detecting the chloride ion. The degree of chemical change in the surviving family. The optical waveguide chemical detecting device i includes two positioning members 11 separated from each other by a distance, an optical cable W disposed on the positioning members, two pre-force members 13 disposed between the positioning members n, and two The detecting member 14 is disposed between the positioning members 11. Each of the positioning members 11 has a columnar base m, a passage 11 formed at a central position of the base U1 and for the cable 16 to pass through, and a filling in the X channel 110 to make the light around 1 β and The filler body 112 is fixed to each other by the filler 112, and the pre-forced steel locking pieces 114 for clamping the optical cable 16 and being fixed to the base body 1U. In this embodiment, the aperture of the channel 11 〇 adjacent to the surface of the body 111 is smaller than the aperture formed in the interior of the body, so that the channel 110 actually forms an approximately spherical shape in the body The space 112 is a sheet metal having a melting point lower than the melting point of the seats U1, and each of the positioning blocks 1 is formed on the seat body from the side thereof and the channel 110 Connected to the inlet _113 into which the filler 112 is poured. The pre-stressed steel locking tabs 114 are used to provide a greater load to support the cable 16. 17 1254129 The optical gauge 16 includes an optical waveguide 12 forming an optical fiber, and the optical waveguide 12 defines two locating points 121 respectively positioned at the channels 110 of the positioning members 11 and a sense of being located between the shirt points 121. The measuring section 122, with the measuring component 123 disposed on the sensing section 122 (see FIG. 卟 in the present embodiment), the measuring component 123 is a grating, so that the sensing section 122 forms a fiber grating. In the present embodiment, each of the pre-stress members 13 has a steel cable extending in a direction substantially parallel to the axial direction of the optical waveguide 12 and having both ends tinned on the seat body 111 of each of the positioning members 11 respectively. Winding 132. Each of the cable wires 132 is borrowed and locked by a manner such that the positioning members U are relatively close to each other and the pre-forces are received by the positioning members n. 13 drive ^ only relative movement occurs without relative rotation, and the cable cables (3) are symmetrically disposed on the base body 111 at the position of the / light dragon 16. The two ends of the detecting members 14 are respectively connected to the respective The positioning member u is inclined to maintain the relative positions of the positioning members U. The detecting members 14 are fixed. An iron-containing metal rod body 14 extending in a direction substantially parallel to the axial direction of the optical waveguide 12 and fixed to the seat body lu of each of the positioning members is formed on the metal rod body 141. The slit (10). Each of the metal rod bodies 141 has a rectangular cross section 'and the fracture area at which the slit is formed is smaller than the rectangular cross section. _ Therefore when the detecting members 14 are exposed to chloride ions The metal rods "1 are eroded and gradually peeled off from the outer surface, causing them to be adjacent to the thin: the face of the monk is reduced, resulting in resistance to the detection of the temple 14 and the positioning of the cattle 11 mutual position The ability of the locating members 11 18 1254129 5 10 is pushed and brought closer to each other, since the optical waveguide 12 vertices 121 are respectively positioned on the locating members 11, respectively, 1 (four) change 'measurement of the sensing section 122 by the deformation of the length of the two's = the extent of the change of the cross-section of the test piece 14 is calculated, and then the degree of chemical reaction of the above-mentioned cesium ion erosion is obtained; Only 16 and the optical waveguide 12 forming the optical fiber are pre-applied ^ It is positioned on the positioning member u after it has been generated in advance. As shown in Fig. 15 and Fig. 16, the optical waveguide chemical detecting device 1 of the present invention and the fourth preferred embodiment thereof are also used. For detecting the degree of chemical change with a chemical substance, the optical waveguide chemical detecting device 1 comprises two spaced apart from each other: a distance positioning member u, a light pre-wave '12 which is located on the positioning member ^, and two are disposed at the positioning The pre-stressing member i 3 between the pieces ii and the two pre-force limiting members 17 respectively disposed on the pre-stressing members 13 and the detecting members 14 disposed between the positioning members u.
15 20 在本實施例中，各該定位件11具有一座體m，各該 座體111具有—柱狀座部115，及一由該座部115呈一角 度往另一座體111延伸之臂部116，使得各該定位件u整 體外觀概呈『U』型，各該定位件n更具有—形成於該座 部1151中央供該光學波導12穿設之通道11〇 ’以及一填 充於該通道110内使該光學波導12與該座體U1固接之 填充劑112。該等相對之臂部i丨6間隔距離遠小於該等座 部115彼此間之距離。In this embodiment, each of the positioning members 11 has a body m, and each of the bases 111 has a columnar seat portion 115 and an arm portion extending from the seat portion 115 at an angle to the other body 111. 116, such that the overall appearance of each of the positioning members u is generally "U" type, each of the positioning members n further has a channel 11〇' formed in the center of the seat portion 1151 for the optical waveguide 12 to be pierced and a channel is filled in the channel A filler 112 for fixing the optical waveguide 12 to the base U1 in the 110. The opposing arm portions i 丨 6 are spaced apart by a distance that is substantially smaller than the distance between the seats 115 .
該光學波導12具有兩分別定位於各該座部丨丨5之定 位點121、一位於該兩定位點 121間之感測段122，以及 19 1254129 5 10 15 -設置於該感測段122上之量測元件i23(見圓8)。 在本實施财，該預力件13具有—兩端分別接觸各 叙位件η之螺旋彈簧133,各該彈簧133分別頂抵於各 該座部115上並傾向使該等定位件η之相對位置遠離。 當然，各該螺旋彈簧133對於該等定位件u之施力方向 亚非以此為限，僅調整上述彈菁133之變形方向 易地變更為使該等定位件相互靠近之設計。該光學波工 導化學檢測裝置i更增設有該等預力限位組件η，各該預 力限位組件17具有—套設於該預力件13之螺旋彈善⑶ 外的管體m’以及一穿設於該彈簧133内之直桿172。 以侷限所對應之預力件13僅能沿實質平行料學波導a 軸向之方向發生形變，確保各該螺旋彈簧⑶是沿平行該 光學波導12軸向之方向施力於各該定位件u上。該料 力限位組件π均可相對於該等定位件心該光學波導Μ 軸向方向活動’而避免因干涉影響該等預力件13之預定 例如在本實施例中，各該座部115便形成有兩供該 4直桿172可活動地穿設之凹槽117。The optical waveguide 12 has two positioning points 121 respectively positioned on the respective seat portions 、5, a sensing section 122 located between the two positioning points 121, and 19 1254129 5 10 15 - disposed on the sensing section 122. Measuring component i23 (see circle 8). In the implementation of the present invention, the pre-stressing member 13 has a coil spring 133 which contacts the respective retaining members η at both ends, and each of the springs 133 abuts against each of the seat portions 115 and tends to position the relative positions of the positioning members η. keep away. Of course, the direction of the biasing force of the coil springs 133 for the positioning members u is limited thereto, and only the deformation direction of the elastic phthalocyanines 133 is easily changed to a design in which the positioning members are brought close to each other. The optical wave-guided chemical detection device i further includes the pre-force limit assemblies η, and each of the pre-force limit assemblies 17 has a tube body m' disposed outside the spiral springs (3) of the pre-force members 13 And a straight rod 172 disposed in the spring 133. The pre-stressed member 13 corresponding to the limitation can only be deformed in the direction parallel to the axial direction of the substantially parallel learning waveguide a, ensuring that each of the coil springs (3) is biased in the direction parallel to the axial direction of the optical waveguide 12 to each of the positioning members u. on. The material force limiting component π can be moved in the axial direction of the optical waveguide with respect to the positioning member cores to avoid the influence of the pre-stressing members 13 by interference. For example, in the embodiment, each of the seat portions 115 There are formed two recesses 117 for the 4 straight rods 172 to be movably disposed.
20 〜該等檢測件14之兩端分別連接於各蚊位件u上， ^旱與各該定位件11固接後，形成-相對位置固定之框 卞、。。構各5亥檢測件14具有一沿實質平行該光學波導12 轴向之方向延伸，且兩端分別固接於各該相鄰之臂部116 ㈣屬桿體14卜各該金屬桿體141具有—矩形斷面，且 其所固接之各該臂部116所具有之斷面積，因此， 田X等預力件13頂抵並驅動各該座體⑴彼此遠離時， 20 1254129 雖各該臂部116平行於使其相互遠離之受力方向，作由於 弱面效應將使得該等定位件Π t力平衡位置，主要仍受 騎^# 14之影響，從*使得該光學波導化學檢測裝 置1維持高度精確’並使得該光學波導化學檢測裝置丄能 藉由調整變更上述檢測件14之設計達到更多樣之檢測。此 综上所述，本發明光學波導化學檢測裝置i及其檢測 =法不僅能進行化學反應程度之檢測，使得光學量測技術 付以應用於化學變化之檢測’其更能利用光學波導之寬頻 ίο 15 20 帶、低損失、無相互干涉性、高絕緣性及耐聽等特性，、 使得該光學料化學檢測裝置丨擁有制壽命長及適用環 境多樣等特性，從而能進行長時間、長距離、多點或線型 佈設等之監測與檢測’同時由於該光學波導化學檢測襄置 1構造簡單，故更具有成本較低與維修容易等優點，特別 有利於如高架纜線、瓦斯管線及地下（水）管道等呈長距離 線型分布之公共系統之監測與檢測，並確實達到本發明之 目的。 x 惟以上所述者，僅為本發明之四較佳實施例而已，當 不能以此限定本發明實施之範圍，即大凡依本發明申請專 利範圍及發明說明書内容所作之簡單的等效變化與修 飾，皆應仍屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是習知一光纖光栅感測器的一側面剖視圖； 圖2是該光纖光栅感測器的一反射頻譜示意圖； 圖3是該光纖光柵感測器的一穿透頻譜示意圖； 21 1254129 圖4是習知-法布立—拍若干涉式感測器的側面剖視 圖； 圖5疋¥矣布里光時域反射感測器的一示意圖； 圖6是本發明光學波導化學檢測裝置的第一較佳實施 ^ 例的一平面俯視圖； 圖7是沿圖6中之線VII-VII的一剖面圖； 圖8是該第一較佳實施例之一局部剖面圖，說明一光 學波導之一感測段及一量測元件； 圖9是該第一較佳實施例的一反射頻譜示意圖； 10 圖1 〇疋忒第一較佳實施例之一示意圖，說明一光訊 號產生器、一光訊號接收器，及一光訊號分析器之配置關 係； 圖Π是該第一較佳實施例之一流程圖； 圖12是本發明光學波導化學檢測裝置的第二較佳實 15 施例的一平面側視圖； 圖13是本發明光學波導化學檢測裝置的第三較佳實 施例的一平面俯視圖； 圖14是沿圖π中之線χΐν_χΐν的一剖面圖； 圖15是本發明光學波導化學檢測裝置的第四較佳實 20 施例的一平面俯視圖；及 圖16是沿圖15中之線xvi-XVI的一剖面圖。 22 1254129 【圖式之主要元件代表符號說明】 I 光學波導化學檢測裝置 II 定位件 110通道 111座體 112填充劑 113注入口 114預力鋼鎖片 115座部 116臂部 117凹槽 12 光學波導 121定位點 122感測段 123量測元件 13 預力件 131桿體 132纜線 133彈簧 14 檢測件 140細縫 141桿體 15 設置座 16 光纜 預力限位組件 管體 直桿 光訊號產生器 光訊號接收器 光訊號分析器 高壓電塔 螺孔 _ 光纖光栅感測器 光纖 核心 外殼 外套 光柵 輸入端 干涉式感測器 · 石夕晶管 單模光纖 多模光纖 第一斷面 第二斷面 光時域反射感測器 玻璃光纖 23 1254129 832塑膠光纖 91 反射波長 90 波長 200.202.204.206.208.步驟20~ The two ends of the detecting members 14 are respectively connected to the mosquito parts u, and after the fixing is fixed to each of the positioning members 11, a frame 固定 with a relative position is formed. . Each of the 5H detecting members 14 has a direction extending substantially parallel to the axial direction of the optical waveguide 12, and both ends are respectively fixed to the adjacent arm portions 116 (4) belonging to the rod body 14 and each of the metal rod bodies 141 has a rectangular cross section, and each of the arm portions 116 to which the arm portion 116 is fixed has a sectional area. Therefore, when the pre-stress member 13 such as the field X abuts and drives each of the seat bodies (1) away from each other, 20 1254129 The portion 116 is parallel to the direction of the force that is moved away from each other, and the position of the positioning member is balanced due to the weak surface effect, which is mainly affected by the ride, and the optical waveguide chemical detecting device 1 is caused by * Maintaining a high degree of accuracy' and enabling the optical waveguide chemical detection device to achieve a greater variety of inspections by adjusting the design of the detector 14 described above. In summary, the optical waveguide chemical detection device i of the present invention and the detection method thereof can not only detect the degree of chemical reaction, but also enable the optical measurement technology to be applied to the detection of chemical changes, which can utilize the broadband of the optical waveguide. Ίο 15 20 belt, low loss, no mutual interference, high insulation and hearing resistance, so that the optical material chemical detection device has long life and diverse environment, so that it can be used for long time and long distance. Monitoring and detection of multi-point or line layout, etc. At the same time, because the optical waveguide chemical detection device 1 has a simple structure, it has the advantages of low cost and easy maintenance, and is particularly advantageous for, for example, overhead cables, gas pipelines and underground ( The monitoring and detection of public systems such as water pipes, which are distributed over long distances, does achieve the object of the present invention. The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent change of the patent application scope and the description of the invention is Modifications are still within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a side cross-sectional view of a conventional fiber grating sensor; FIG. 2 is a schematic diagram of a reflection spectrum of the fiber grating sensor; FIG. 3 is a penetration of the fiber grating sensor FIG. 4 is a side cross-sectional view of a conventional-Fabli-shooting interferometric sensor; FIG. 5 is a schematic view of a 时Bühler optical time domain reflectance sensor; FIG. 6 is an optical view of the present invention; A plan view of a first preferred embodiment of the waveguide chemical detection device; FIG. 7 is a cross-sectional view taken along line VII-VII of FIG. 6; FIG. 8 is a partial cross-sectional view of the first preferred embodiment. A sensing section and a measuring component of an optical waveguide are illustrated; FIG. 9 is a schematic diagram of a reflection spectrum of the first preferred embodiment; FIG. 1 is a schematic diagram of a first preferred embodiment illustrating a light The configuration of the signal generator, an optical signal receiver, and an optical signal analyzer; FIG. 12 is a flow chart of the first preferred embodiment; FIG. 12 is a second preferred embodiment of the optical waveguide chemical detecting device of the present invention. a plane side view of the embodiment 15; Figure 13 is the hair A plan view of a third preferred embodiment of the optical waveguide chemical detecting device; FIG. 14 is a cross-sectional view taken along line πνχΐν of FIG. π; FIG. 15 is a fourth preferred embodiment of the optical waveguide chemical detecting device of the present invention. A plan top view of an example; and Fig. 16 is a cross-sectional view taken along line xvi-XVI of Fig. 15. 22 1254129 [Description of main components of the diagram] I optical waveguide chemical detection device II Locator 110 channel 111 body 112 filler 113 injection port 114 pre-force steel locking piece 115 seat 116 arm 117 groove 12 optical waveguide 121 positioning point 122 sensing section 123 measuring component 13 pre-stressing member 131 rod 132 cable 133 spring 14 detecting member 140 slit 141 rod 15 setting seat 16 cable pre-limit limit assembly tube straight rod optical signal generator Optical signal receiver optical signal analyzer high voltage electric tower screw hole _ fiber grating sensor fiber core shell jacket grating input end interferometric sensor · Shi Xijing tube single mode fiber multimode fiber first section second break Face light time domain reflection sensor glass fiber 23 1254129 832 plastic fiber 91 reflection wavelength 90 wavelength 200.202.204.206.208.
24twenty four