200525138 玫、發明說明： 【發明所屬之技術領域】 本發明是有關於一種光學波導檢測裝置及其檢測方 法，特別是指一種用於檢測化學變化程度之光學波導化學 檢測裝置及其檢測方法。 【先前技術】 由於現今自動化監測及遠距遙測系統大幅應用於各 個領域，不僅擴展了人類活動之範圍，更加速提昇了各科 技領域的進步。而其中，各式感測裝置的研發與生產扮演 著關鍵性的重要角色。200525138 Description of the invention: [Technical field to which the invention belongs] The present invention relates to an optical waveguide detection device and a detection method thereof, and particularly to an optical waveguide chemical detection device and a detection method thereof for detecting a degree of chemical change. [Previous technology] As today's automated monitoring and remote telemetry systems are widely used in various fields, it not only expands the scope of human activities, but also accelerates the advancement of various scientific and technological fields. Among them, the development and production of various sensing devices play a key and important role.
傳統的電子式感測裝置主要以電磁學之原理，利用量 測7L件之電性受環境影響變化，如電壓及電阻的改變，來 偵測該感測裝置所在環境之物理或化學參數，例如溫度感 測裝置，是利用金屬導體於不同溫度之電阻值變化，藉由 置測電阻或電壓值以判讀對應之溫度參數。而離子感測裴 置則是以待測物之導電度進行離子濃度之量測。又例如應 變感測裝置，則是利用電阻線長度變化引起電阻值改變， 進而里測出所對應出之應變量變化。但是由於電子電路合 與外在電磁場產生相互干擾，本身亦因此易造成過多雜訊 及Λ號失真等問題。並且由於金屬導體容易因為潮渔而腐 殳損因此使用哥限短，特別是使用於埋設式的感測枣 置例如應用於土木結構物檢測，大地工程及河海工程龄 測時，由於無法替換，使得應用受到相當多之限制。壬I 因此，便有許多非電子式之感測裝置研發產生，特別 200525138 疋以光學原理製成之光學元件，由於具有寬頻帶、低損 失、向絕緣性、防電磁干擾、耐腐蚀，以及光訊號處理頻 率較電訊號傳導快速且精確等特性，因此成為目前研發之 主要趨勢。 光學元件可概分為光學主動元件與光學被動元件，而 目前應用於光學感測器領域之光學元件主要還是以屬於 光學被動元件之光學波導為主，光學波導可分為一般簡稱 為光纖的光纖波導，及以半導體製程製作之平面光波導兩 大類。其中，以光纖波導製成之光纖感測裝置的主要原 理’可區分為光強度調變原理、光相位調變原理，以及光 波長調變原理。而現今常見的光纖感測裝置則有光纖光柵 感測器（Fiber Bragg Grating sensor，FBG)、非本質式 法布立-拍若干涉式感測器（Extrinsic Fabry-Perot Interferometric sensor，EFPI)，以及布里光時域反射 感測器（Brillouin Optical Time Domain Reflector sensor， BOTDR)等。 如圖1至圖3所示，一光纖光柵感測器81，具有一光 纖811，該光纖811具有一核心812、一具有一相對折射 率較該核心812小之外殼813，以及一套設於該外殼813 外圍提供適當保護之外套814，該核心812形成有一光栅 815，當由一輸入端816進入該核心812之寬頻光訊號通 過或光棚 815時’除了滿足該光拇815布拉格條件（Bragg condition)的特定波長90能反射外，其餘範圍的波長均 會相位差相消，因此由該輸入端816能得到如圖2所示滿 200525138 足該光栅815條件之反射頻譜，而於一相反於該輸入端816 之輸出端817得到如圖3所示濾除滿足布拉格條件之波長 90的穿透頻譜。因此藉由該光纖811受環境擾動時該光栅 815間隔改變，使光訊號之波長9〇產生飄移，進而測讀該 5 感測裔81所承受如應力及應變等之物理參數。 如圖4所示，一法布立—拍若干涉式感測器具有一 中空矽晶管821、一穿設於該矽晶管821中之單模光纖 822,以及一同樣穿設於該矽晶管821中並與該單模光纖 822間隔一適當距離d之多模光纖823，該單模光纖822 10 具有一第一斷面824，該多模光纖823具有一與該第一斷 面824相對並間隔距離d之第二斷面825，當光訊號由該 單模光纖822射入時，會在第一斷面824及第二斷面825 分別產生約4%的弗雷斯涅耳（Fresnel)反射匕及R2，由於 環境擾動會使得該第一斷面824與該第二斷面825之距離 15 d改變，進而造成該兩反射Ri及b之光程變化，藉由量測 該兩反射1及R2所產生之干涉即能得到該第一斷面824 與該第二斷面825之間距離d的變化量。 如圖5所示，一布里光時域反射感測器83具有一玻 璃光纖831，以及一以螺旋線方式纏繞於該玻璃光纖831 20 上並具有與该玻璃光纖831不同之布里散射常數的塑膠光 纖8 3 2 ’當該感測裔8 3受到壓力壓迫時，位於該玻璃光纖 831内之光訊號會折射進入該塑膠光纖832内，藉由該光 訊號之反射時間差能測讀應力施加於該感測器83之位 置，而由光訊號強度之衰減即能量測出該感測器83之應 200525138 變量。 5 10 15 至於以平面光波導製作之感測器，則有如中華民國專 利申請號第刪18488號案所揭露的，一種以絕緣層上石夕 晶波導輕合器與絕緣層切晶波導布拉格光栅結合之麥 克森干涉式溫度感測H，其利詩晶較—般光纖大之膨服 係數特性，⑽成於其上之光栅騎溫度_，提供高精 確度之溫度監測。 由上述可知，目前現有之光學波導感測裝置多以量測 物理！之變化為主’甚少應用於化學變化方面之量測，然 而受限於傳統的電子式感測裝置應用於化學變化之檢測 所具有之先天缺點，以及其僅能進行『點』量測之限制， 特別是應用在如高㈣線及地下（水）㈣等呈長距離線型 分布之待測標的上時，不僅效果不佳，其成本更將高得驚 人。因此’本案發明人針對材料之物性與化性，以及光學 波導之特性及技術；詳思細索’並累積多年從事檢測器整 合開發之經驗，幾經試驗，終有本發明之產生。 【發明内容】 本發明之主要目的是在提供一種用於檢測化學反應 程度之光學波導化學檢測裝置及其檢測方法。 本發明之另-目的是在提供_種能長距離多點及線 型佈設之光學波導化學檢測裝置及其檢測方法。 本發明光學料化學檢測裝置是用於檢測與一化學 物質之化學變化程度’該光學波導化學檢測裝置包括兩彼 此間隔-距離之定位件、一具有兩分別定位於各該定位件 20 200525138 之疋位點及-位於該兩定位點間之感測段的光學波導、一 兩端分別連接於各該定位件上之預力件、一兩端分別連接 於各该定位件上之檢測件。該預力件傾向使該等定位件之 彳目對位置改.$。雜;料傾向維持該等定位件之相對位置 固定，且該檢測件能與該化學物質發生化學反應並使本身 斷面發生改變，此時該預力件驅使該等定位件之相對位置 改變，並藉由該感測段判斷該化學反應之程度。 而應用上述光¥波導化學檢測裝置判斷化學反應之 程度的方法則包括下列步驟：… 1〇 a)將上述光學波導化學檢測裝置設置於存在-化學 物質之環境中； 干 b) 以’經過。亥感測段之光訊號量測該感測段之軸向 變形的量測值；及 c) 以孩感測段之軸向變形的量測值判斷化學反應之 15 程度。 ~ 本發明之功效在於能以光學波導進行化學反應程度 之檢測，並充分發揮其寬頻帶、低損失、無相互干涉性: 尚絕緣性及耐腐蝕等特性，使得本發明之光學波導化學檢 測裝置擁有使用壽命長及適用環境多樣等特性，並具備長 20 時間、長距離、多點或線型佈設等之監測與檢測功能，以 及低成本與維修容易等優點。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之四較佳實施例的詳細說明中，將可清 200525138 勺月白。在提出詳細說明之前，要注意的是，在以下的 中，類似的元件是以相同的編號來表示。 如圖6、圖7芬固 〇 及圖8所示，本發明光學波導化學檢測 2 1及其I則方法的第—較佳實施例是用於檢測與一化 子物貝之化學變化程度，在本實施例中該化學物質為氣離 :·而4光學波導化學檢測裝置丨是吊掛於_鄰海之高架 、、[輸電、4線（圖未不）的支承鋼索線（圖未示）上。該光學 波導化學檢測裝置1包括兩彼此間隔一距離之定位件u、 :設置於該等定位件11上之光學波導12、兩設置於該等 1〇 疋位件11間之預力件13，以及兩設置於該等定位件11間 之k測件14。在本實施例中，該光學波導12為一光纖。 各該定位件11具有一柱狀座體m、一形成於該座體 ill之中央位置並供該光學波導12穿設之通道，以及 一填充於該通道11〇内使該光學波導12與該座體lu彼 15 此固接之填充劑112。在本實施例中，該通道110鄰近該 座體111表面之孔徑小於其形成於該座體丨丨丨内部之孔 徑，使該通道110實際上於該座體U1内形成一近似球形 之空間，而该填充劑112是一黏劑，而各該定位座11更 於該座體111上形成有一自其側邊與該通道丨丨〇連通，以 0 供該填充劑112灌入之注入口 ι13。 遠光學波導12可定義出兩分別定位於各該定位件u 之定位點121、一位於該兩定位點121間之感測段122， 以及一設置於該感測段122上之量測元件123。在本實施 例中，該量測元件123是一光栅，因此使得該感測段122 200525138 形成-，纖光柵感測器。由於在本發明中，該感測段i22 之目的疋為了施篁測該等定位點⑵μ相對位移之變化， 故沾白此項技藝者當能輕易推想，當該光學波導“如本 5 10 15 實施例為一光纖時，該感測段122亦能形成為一非本質式 =布立-拍若干涉式感測器，或—布里光時域反射感測器 荨，凡能達到量測該等定位點121間相對位移之變化者， 均能應用於本發明中。 各該預力件13之兩端分別連接於各該定位件u上， 各該預力件13存在傾向使該等定位件u之相對位置改變 的預力。在本實施例中’各該預力件13具有一沿實質平 =光學波導12抽向之方向延伸且其兩端分別固接於各 Ι3Γ: Γ U之座體111的金屬桿體13卜各該金屬桿體 =疋由不鏽鋼材質製成，並具一方形斷面，及傾向使該 專疋位件u彼此相對遠離之預力，但本發明之預力件 並非:此為限，事實上，上述預力件13之數目、設計種 ，^置位置、預力大小與方向’及預力產生方式等均有 夕種選擇，至於相關的設計選擇及限制條件容後再敘。作 就本實施例而言，為求使該等^位件n受該等預力件Μ 驅動時’僅發生相對移動而無相對轉動，以使該光學波導 12之感測段122能精喊感測該等定位件n間之相對 動：因此該等金屬桿體131是以該光學波導12之位置為夕 中心對稱地設置於該座體丨丨丨上。 … 該等檢測件14之兩端分別連接於各該定位件^上， 且傾向維持該等定位件11之相對位置固定。各該檢測件 20 200525138 14具有-沿實質平行該光學波導12轴向之方向延伸且其 兩端分別固接於各敎位件u之座冑1U的金屬桿體 141，及兩道形成於該金屬桿體141上之細縫14〇。各該金 屬桿體141具有一矩形斷面，而其在形成有該細縫刚處 之斷面積則小於該矩形斷面之面積。上述金屬桿體i4i與 細縫140之數目與規格並非以此為限，同樣地，上述檢測 件14之設計種類、設置位置，及侷限該等預力件13之方 式也具有多種選擇。為提供均衡之拘束，使得該等定位件 11丈该等預力件13驅動時，僅發生相對移動而無相對轉 動，因此該等金屬桿體141同樣是以該光學波導12之位 置為中心對稱地設置於該座體1丨丨上。 由於該等檢測件14須能與該化學物質發生化學反 應，並使本身斷面發生改變，考量在本實施例中，該化學 物質為氣離子，故各該檢測件14之金屬桿體141是由含 有鐵貝之鋼材裝成，由於鐵在具有氯離子的含水環境下會 有下列的電化學反應·· 陽極反應：Fe+2Cr—FeCl24Fe2++2Cr+2e-陰極反應· 1/202+1^0+26 ^^ 2(OH)-因此當該等檢測件14接觸到氯離子時，會使得該等 金屬桿體141受到侵蝕而由外表面逐漸剝落，造成其鄰近 該細縫140處之斷面縮減，導致抵抗該等檢測件]4侷限 該等定位件11相互位置固定之能力降低，進而使得該等 定位件11受該等預力件13之推頂而相互遠離，由於該光 车波‘ 12之該等定位點121是分別固定於各該定位件玉工 200525138 上，因此便受該等相互遠離之定位件u拉伸而產生伸長 * ’此時藉由如圖9所示之-通過該感測段122之光訊號 反射波長91的飄移量s，量測該感測段m轴向長度之伸 長置，便能反异出該等檢測件14斷面變化之程度，進而 5 €得上述受氣離子侵狀化學反應的程度，當然，由於是 以輸入該光學波導12之光訊號進行量測，因此不僅具有 極高之精確度，若是當該光學波導化學感測裝置i是設計 在化學反應後，該等定位件u相互迫近時，該光學波導 12之感測段122在軸向長度上更能㈣出微小的軸向壓縮 1〇 1，此外，如果對於該光學波導預先施加-張力而產生一 預先伸長量後，才將其定位於該定位件n上，則更能增 加對該等定位件11相互迫近時之量測範圍。 曰 很明顯地，本發明能輕易地藉由調整改變該等檢測件 14的材質、數目、厚度及長度範圍等，而製成不同規格之 15 《學波導化學檢測裝置卜以適用於各種不同之化學物質 舁待測％境。故該檢測件所含材質並不限定為鐵，舉 例來說，其他如船、錫、銅、銘、鎳，及銀等金屬，或包 含該等金屬之合金，甚至其他能與待檢測之化學物質發生 化學變化之非金屬材質，也都適用於本發明之中。 〇 事貫上在本實施例中，該等定位件11之座體11丨與The traditional electronic sensing device mainly uses the principle of electromagnetics to measure the electrical properties of 7L parts affected by environmental changes, such as changes in voltage and resistance, to detect physical or chemical parameters of the environment in which the sensing device is located, such as The temperature sensing device uses the resistance change of the metal conductor at different temperatures to determine the corresponding temperature parameter by measuring the resistance or voltage value. For ion sensing, the ion concentration is measured based on the conductivity of the object to be measured. For another example, a strain sensing device uses a change in resistance wire length to cause a change in resistance value, and further measures a corresponding change in a strain variable. However, due to the mutual interference between the electronic circuit and the external electromagnetic field, it is easy to cause problems such as excessive noise and Λ distortion. And because the metal conductor is easy to decay due to tide fishing, the use limit is short, especially for buried sensing jujube. For example, it is used in civil structure inspection, earth engineering and river and sea engineering age testing, because it cannot be replaced. , Making the application subject to considerable restrictions. Ren I Therefore, there are many non-electronic sensing devices developed, especially 200525138 疋 Optical elements made of optical principles, due to their wide frequency band, low loss, insulation, electromagnetic interference, corrosion resistance, and light Signal processing frequency is faster and more accurate than electrical signals, so it has become the main trend of current research and development. Optical components can be roughly divided into optical active components and optical passive components. Currently, the optical components used in the field of optical sensors are mainly optical waveguides that belong to optical passive components. Optical waveguides can be divided into optical fibers generally referred to as optical fibers. Waveguides, and planar optical waveguides made by semiconductor processes. Among them, the main principle of an optical fiber sensing device made of an optical fiber waveguide can be divided into a light intensity modulation principle, an optical phase modulation principle, and an optical wavelength modulation principle. Today's common fiber sensing devices include Fiber Bragg Grating sensor (FBG), non-essential Fabry-Perot Interferometric sensor (EFPI), and Brillouin Optical Time Domain Reflector Sensor (BOTDR), etc. As shown in FIG. 1 to FIG. 3, a fiber grating sensor 81 includes an optical fiber 811 having a core 812, a housing 813 having a relative refractive index smaller than that of the core 812, and a set of The outer periphery of the housing 813 provides an appropriate protective cover 814, and the core 812 is formed with a grating 815. When a broadband optical signal entering the core 812 through an input terminal 816 passes or the light booth 815 'except that the Bragg condition of the optical thumb 815 is satisfied (Bragg condition), the specific wavelength 90 can reflect, and the remaining range of wavelengths will cancel out the phase difference. Therefore, the input terminal 816 can obtain the reflection spectrum that is full in the condition of the grating 815 as shown in FIG. 2 in 200525138. The output terminal 817 of the input terminal 816 obtains the transmission spectrum of the wavelength 90 meeting the Bragg condition as shown in FIG. 3. Therefore, when the optical fiber 811 is disturbed by the environment, the interval of the grating 815 is changed, so that the wavelength of the optical signal is shifted by 90, and then the physical parameters such as stress and strain that the 5 sensor 81 is subjected to are read. As shown in FIG. 4, a Fabry-Perot interference sensor has a hollow silicon transistor 821, a single-mode optical fiber 822 passing through the silicon transistor 821, and a silicon fiber also passing through the silicon crystal. A multimode optical fiber 823 in the tube 821 and spaced an appropriate distance d from the single-mode optical fiber 822. The single-mode optical fiber 82210 has a first cross-section 824, and the multi-mode optical fiber 823 has an opposite surface to the first cross-section 824. The second section 825 separated by a distance d. When an optical signal is incident from the single-mode optical fiber 822, about 4% of Fresnel (Fresnel) is generated in the first section 824 and the second section 825, respectively. ) Reflection dagger and R2, due to environmental disturbances, the distance 15 d between the first section 824 and the second section 825 will be changed, which will cause the optical path of the two reflections Ri and b to change, by measuring the two reflections The interference caused by 1 and R2 can obtain the change amount of the distance d between the first section 824 and the second section 825. As shown in FIG. 5, a Brilliant Optical Time Domain Reflection Sensor 83 has a glass optical fiber 831 and a spiral winding on the glass optical fiber 831 20 and has a Brilliant scattering constant different from that of the glass optical fiber 831. Plastic optical fiber 8 3 2 'When the sensing fiber 8 3 is pressed by pressure, the optical signal located in the glass optical fiber 831 will be refracted into the plastic optical fiber 832, and the stress applied can be measured by the reflection time difference of the optical signal At the position of the sensor 83, the variable 200525138 of the sensor 83 is measured from the attenuation of the intensity of the optical signal, that is, the energy. 5 10 15 As for a sensor made of a planar optical waveguide, as disclosed in the Republic of China Patent Application No. Deletion No. 18488, a kind of Bragg grating with an insulating layer and a crystalline waveguide waveguide is used. Combined with Maxson's interference temperature sensing H, its Lishi crystal has a larger expansion coefficient than ordinary optical fibers, and the grating riding temperature is formed on it, providing highly accurate temperature monitoring. From the above, it is known that the existing optical waveguide sensing devices are mostly used to measure physics! 'Change-based' is rarely used for measurement of chemical changes, but it is limited by the inherent disadvantages of traditional electronic sensing devices for the detection of chemical changes, and it can only perform "point" measurement Limitations, especially when applied to targets to be measured that have long-distance linear distributions, such as the Gao Line and the underground (water) line, are not only ineffective, but their cost will be prohibitively high. Therefore, the inventor of the present case has focused on the physical properties and chemical properties of materials, and the characteristics and technology of optical waveguides; think about it carefully and accumulate years of experience in the integrated development of detectors. After several tests, the invention finally came into being. SUMMARY OF THE INVENTION The main object of the present invention is to provide an optical waveguide chemical detection device and a detection method for detecting the degree of a chemical reaction. Another object of the present invention is to provide an optical waveguide chemical detection device capable of long-distance multipoint and linear layout and a detection method thereof. The optical material chemical detection device of the present invention is used to detect the degree of chemical change with a chemical substance. The optical waveguide chemical detection device includes two positioning members spaced from each other and a distance, and one having two positioning members 20 200525138. Location and-The optical waveguide of the sensing section located between the two positioning points, one end of which is respectively connected to the prestressing member on each of the positioning members, and one end of which is connected to each of the detection members on each of the positioning members. The preload tends to change the position of the positioning members by. $. Miscellaneous materials tend to maintain the relative positions of these positioning members fixed, and the detection member can chemically react with the chemical substance and change its cross-section. At this time, the pre-force member drives the relative positions of these positioning members to change. And the degree of the chemical reaction is judged by the sensing section. The method for judging the degree of chemical reaction by using the above-mentioned optical waveguide chemical detection device includes the following steps: 1) a) The above-mentioned optical waveguide chemical detection device is set in an environment of the presence-chemical substance; dry b) passing by. The light signal of the Hai sensing section measures the measured axial deformation of the sensing section; and c) The 15 degree of chemical reaction is judged by the measured axial deformation of the sensing section. ~ The effect of the present invention is that it can detect the degree of chemical reaction with the optical waveguide, and give full play to its wide frequency band, low loss, and no mutual interference: insulation and corrosion resistance, etc., making the optical waveguide chemical detection device of the present invention It has the characteristics of long service life and various applicable environments, and has the monitoring and detection functions of long time, long distance, multi-point or linear layout, as well as the advantages of low cost and easy maintenance. [Embodiment] Regarding the foregoing and other technical contents, features, and effects of the present invention, in the following detailed description of the fourth preferred embodiment with reference to the drawings, the 200525138 spoon will be cleared. Before giving a detailed description, please note that in the following, similar elements are denoted by the same reference numerals. As shown in FIG. 6, FIG. 7 and FIG. 8, and FIG. 8, the first-best embodiment of the optical waveguide chemical detection method 21 and the first method of the present invention is for detecting the degree of chemical change with chemical compounds, In this embodiment, the chemical substance is gas ionization: · And the 4 optical waveguide chemical detection device 丨 is a supporting steel cable (not shown in the figure) which is hung on the elevated _ adjacent sea, [transmission, 4 line (not shown) )on. The optical waveguide chemical detection device 1 includes two positioning members u, spaced a distance apart from each other: an optical waveguide 12 provided on the positioning members 11, and two prestressing members 13 provided between the 10 positioners 11, And two k-test pieces 14 arranged between the positioning pieces 11. In this embodiment, the optical waveguide 12 is an optical fiber. Each of the positioning members 11 has a columnar base m, a channel formed in the central position of the base ill and for the optical waveguide 12 to pass therethrough, and a filler filled in the channel 11 to allow the optical waveguide 12 to communicate with the optical waveguide 12. The base body 15 is the fixed filler 112. In this embodiment, the hole diameter of the channel 110 adjacent to the surface of the base body 111 is smaller than the hole diameter formed inside the base body, so that the channel 110 actually forms an approximately spherical space in the base body U1. The filler 112 is an adhesive, and each of the positioning bases 11 is formed on the base body 111 to communicate with the channel from its side, and 0 is an injection port 13 for the filler 112 to be filled therein. . The far optical waveguide 12 can define two positioning points 121 positioned at each of the positioning members u, a sensing section 122 positioned between the two positioning points 121, and a measuring element 123 disposed on the sensing section 122. . In this embodiment, the measuring element 123 is a grating, so that the sensing section 122 200525138 is formed as a fiber grating sensor. Because in the present invention, the purpose of the sensing section i22 is to measure the changes in the relative displacement of these positioning points, so the artist can easily infer that when the optical waveguide is "as in this 5 10 15 When the embodiment is an optical fiber, the sensing section 122 can also be formed as a non-essential type = Brilliant-Pirro interference sensor, or-Brilliant time domain reflection sensor. Any change in the relative displacement between the positioning points 121 can be applied in the present invention. Both ends of each of the prestressing members 13 are connected to each of the positioning members u, respectively. The pre-force for changing the relative position of the positioning member u. In this embodiment, each of the pre-forces 13 has a substantially flat = optical waveguide 12 extending direction and its two ends are respectively fixed to each I3Γ: Γ U The metal rod body 13 of the seat body 111 is made of stainless steel and has a square cross-section, and the pretension tends to make the special position pieces u relatively far away from each other. The preload is not limited to this. In fact, the number, design type, and position of the above preload 13 There are various options for the magnitude and direction of the pre-force and the method of generating the pre-force. As for the related design choices and restrictions, we will revisit them later. For the purpose of this embodiment, in order to make the position n When the preload member M is driven, only relative movement occurs without relative rotation, so that the sensing section 122 of the optical waveguide 12 can shout to sense the relative movement between the positioning members n: therefore, the metal rod bodies 131 Based on the position of the optical waveguide 12 as the center, it is symmetrically arranged on the base body... The two ends of the detection members 14 are connected to the positioning members ^ respectively, and the positioning members 11 tend to be maintained. The relative position is fixed. Each of the detection members 20 200525138 14 has a metal rod body 141 extending in a direction substantially parallel to the axial direction of the optical waveguide 12 and having both ends thereof fixed to the seat 1U of each positioning member u, and Two fine slits 14 formed in the metal rod body 141. Each of the metal rod bodies 141 has a rectangular cross section, and the cross-sectional area at the place where the slit is formed is smaller than the area of the rectangular cross section. The number and specifications of the metal rod body i4i and the fine slit 140 are not based on this. In the same way, there are also many options for the design types, installation positions of the above-mentioned detection elements 14, and the way to limit these prestressing elements 13. In order to provide a balanced constraint, the positioning elements 11 are driven by the prestressing elements 13 At this time, only relative movement occurs without relative rotation, so the metal rod bodies 141 are also symmetrically arranged on the base body 1 with the position of the optical waveguide 12 as the center. Since the detection members 14 must be able to communicate with This chemical substance undergoes a chemical reaction and changes its cross section. Considering that in this embodiment, the chemical substance is gas ions, the metal rod body 141 of each of the detection members 14 is made of steel containing iron shells. Since iron has the following electrochemical reactions in an aqueous environment with chloride ions, the anode reaction: Fe + 2Cr—FeCl24Fe2 ++ 2Cr + 2e-cathode reaction. 1/202 + 1 ^ 0 + 26 ^^ 2 (OH )-Therefore, when the test pieces 14 come into contact with chloride ions, the metal rods 141 will be eroded and gradually peeled off from the outer surface, resulting in a reduction in the cross-section near the slit 140, resulting in resistance to the tests. Pieces] 4 Limitation of these positioning pieces 11 mutual position The fixing ability is reduced, which further causes the positioning members 11 to be pushed away from each other by the preload 13. Since the positioning points 121 of the light car wave '12 are respectively fixed to the positioning members Jade 200505138 Therefore, it is stretched by the mutually distant positioning members u to stretch * 'At this time, as shown in FIG. 9-the drift amount s of the reflection wavelength 91 of the optical signal through the sensing section 122 is measured, The extension of the m-axis length of the sensing section can reflect the extent of the change in the cross-section of these detection elements 14 and further obtain the above-mentioned degree of chemical reaction by gas ions. Of course, because the optical The optical signal of the waveguide 12 is measured, so it not only has extremely high accuracy. If the optical waveguide chemical sensing device i is designed after the chemical reaction, the positioning members u approach each other, the optical waveguide 12's The measuring section 122 can more easily extract a slight axial compression 101 in the axial length. In addition, if the optical waveguide is pre-applied with a tension to generate a pre-elongation, it will be positioned on the positioning member n. , It is more able to increase Measuring range of the positioning member 11 urged toward each other. It is obvious that the present invention can be easily made into different specifications by adjusting the material, number, thickness, length range, etc. of these detection elements 14 "The learning waveguide chemical detection device is applicable to a variety of different The chemical substance is under test. Therefore, the material contained in the test piece is not limited to iron. For example, other metals such as ships, tin, copper, Ming, nickel, and silver, or alloys containing these metals, and even other chemicals that can be tested Non-metallic materials whose substances undergo chemical changes are also suitable for use in the present invention. 〇 In the present embodiment, the base body 11 of the positioning members 11 and
/等彳欢測件14之金屬桿體141是以相同之鋼材一體成形 斤‘成之矩幵》框架結構。正因如此，在本實施例中該等預 力件13之預力施加方式便是先將該由該等定位件11及該 等檢測件U所形成之矩形框架結構加熱到200°C至300°C ]2 200525138 後’將該等在室溫(20t)時長度大於該等定位件^ 件u置人該矩形框架結構内，待該等㈣ 〜寺、屬杯體141冷卻後’該等座體更麼縮該等預力 5 10 15 20 件13,使其因形變而儲存一頂抵該等座體iu才目互遠 預力。 、由上述可知，當欲使得該等預力# 13是傾向使該等 定位件11彼此相對靠近時，則將該等預力件13之金屬桿 體131與該等定位件u之座體lu以不鏽鋼一體成形製 成矩形框架結構，加熱使其膨脹後，在置入該等長度較I φ 之檢測件14並待其冷卻後，便能使該等金屬桿體ΐ3ι ^ 在趨向使該等座體lu彼此相對靠近之預力。當然，該等 定位件11並非限定須與該等預力件13或該等檢測件14 形成矩形框架，配合該等預力件13或該等檢測件14設置 之數目，其也可以形成橫躺之『U』型或『H』型結構，而 利用上述熱脹冷縮之方式完成該等預力件i 3與該等檢測 件14之設置。 須加以說明的是，雖在上述實施例中，該光學波導i 2 _ 為一光纖，而使得該光學波導化學檢測裝置1之整體尺寸 得以涵蓋公尺（m)等級至釐米（mm)等級；當然，該光學波 導12並非以光纖為限，其也能以一平面光波導加以取代， 同時方配合如微機電糸統（Micro-Electro-Mechanical System，MEMS)、微機光系統（Micro-Optic- Mechanical System，MOMS)，以及微光機電系統（Micro-Electro_Mecha -Optical System，MEMOS)等微系統技術，則更能將該光學 13 200525138 波導化學檢測裝置1之整體尺寸縮減至釐米（mm)等級到微 米（// m)等級之範圍内。 如圖10所不’以下藉由增設一與該光學波導丨2連通 之光訊號產生器2、一與該光學波導12連通之光訊號接收 器3,以及一與該光訊號接收器3連接之光訊號分析器4 ; 使該光學波導化學檢測裝置丨成為一完整之檢測系統，來 說明該光學波導化學檢測裝置丨之檢測方法。如圖n所 示，以上述光學波導化學檢測裝置丨檢測一化學物質之化 學變化程度的方法包含下列步驟： 馨 步驟200，如圖8及圖1〇所示，將上述光學波導化學 檢測裝置1設置於使該等檢測件丨4暴露在一化學物質之 環埦中，如兩所述，在本實施例中，該光學波導化學檢測 裝置1是吊掛於一鄰海之高架高壓輸電纜線的支承鋼索線 上。 步驟202，以該光訊號產生器2發射光訊號進入該光 學波導12。 步驟204，以該光訊號接收器3接收經由該光學波導 籲 12之感測段122的光訊號，在本實施例中是接收經由該形 成光栅之量測元件123所反射之反射訊號。而誠如熟悉此 項技#者所了解，其亦能接收通過該量測元件丨之透射 訊號。 · 步驟2 0 6 ’以该光訊號分析器4分析經過該感測段12 2 之光訊號的變化值，以獲得該感測段122之軸向變形的量 測值。在本實施例中，該光訊號分析器4是以如圖9所示 14 200525138 經過該量測元件123之光訊號的反射波長偏移量3量測該 感測段122之軸向變形的量測值。 ίο 15 20 /驟208 ’以該感測段122之軸向變形的量測值判斷 化學反應之程度。在本實施例中便是以該感測段122之轴 向變形量，來判斷該等檢測件14在受含氣離子濃度較高 =每風吹襲下受慮離子侵㈣程動。其可以是以該感㈣ 122之軸向變形的直接量測值來判斷該等檢測件"受侵姓 的化學反應程度；其也可以是以該感測段122之轴向變形 的篁測值之變化量，來判斷該等檢測件14受侵姓的 :應程度：在此便是以該感測段122之軸向變形的量測值 舁。亥感測段122之軸向變形的初始值進行比較，得到該感 測段122之軸向變形的量測值之變化量。 心 如圖Π所示，本發明光學波導化學檢測装置}及里 : 叙測方法的第二較佳實施例與上述第一較佳實施例大致 目同’同樣是應詩是制受氣離子侵㈣化學變化程 度’其不同處在於該光學波導化學檢測裝置ι是所設於一 ;=厂堅電塔7上。該光學波導化學檢測裝置1包括兩 彼此間隔-距離之定位件u、一設置於該等定位件 =學波導12、—設置於該等定位件u間之預力件… -设置於該等定位件u間之檢測件14，以及— 位件II固接之設置座15。 亥寻疋 各該定位件n及該光學波導12之型態和設置關係虚 該預力件13之兩端分別 、q疋位件上，且存在傾向使該等定位件】〗之 15 200525138 相對位置改樣& ❹有預力。在本錢财，該預力件^同樣 :有/”貝平行該光學波導12軸向之方向延伸且其 兩端分別固接於各該座體111上的不_金屬桿體13/;、 5 2上述第一較佳實施例之差異處在於該等金屬桿體⑶ 设置於該光學波導12之一側。 10 15 20 °亥榀測件14之兩端亦分別連接於各該定位件1】上， :傾向維持該等定位件11《相對位置固定。在本實施例 ’各該檢測件14同樣地具有一沿實質平行該光學波導 12轴向之方向延伸且其兩端分別固接於各該之座體⑴的 “戴金屬桿體14卜及-形成於該金屬桿體141上之細縫 1曰4〇 ;然與上述第-較佳實施例之差異處則在於該等金屬 桿體141僅設置於該預力件13遠離該光學波導以一側。 二該設置座15則位於該光學波導12遠離該預力件13 和私測# 14之另—側’且其兩端分別連接於各該座體 111上同日守形成有複數螺孔7 0以供所設於該高壓電塔7 上。因此當該檢測件14接觸到氣離子使得該金屬桿體141 受到侵蝕，而造成其鄰近該細縫14〇處之斷面縮減，進而 使得該等定位件11受該預力件13之推頂而相互遠離，並 牽動該光學波導12而使該感測段丨22產生伸長量，進而 知以反算出該檢測件14斷面變化之程度，而獲得上述受 氣離子侵餘之化學反應的程度。The metal rod body 141 of the isochronous test piece 14 is integrally formed of the same steel material and has a frame structure of "the moment of achievement". Because of this, in this embodiment, the prestressing method of the prestressing members 13 is to first heat the rectangular frame structure formed by the positioning members 11 and the detecting members U to 200 ° C to 300 ° C. ° C] 2 200525138 after 'the length of these pieces at room temperature (20t) is longer than the positioning parts ^ pieces u into the rectangular frame structure, wait for the ㈣ ~ temple, after belonging to the cup body 141 cooling, etc. The seat body even shrinks these pre-forces 5 10 15 20 pieces 13 so that it can store a force against these seat bodies iu due to the deformation so that the pre-forces are far away from each other. From the above, it can be known that when the pretension # 13 is intended to make the positioning members 11 relatively close to each other, the metal rod 131 of the pretension members 13 and the seat lu of the positioning members u The rectangular frame structure is made of stainless steel integrally formed. After heating to expand it, after inserting the detection pieces 14 longer than I φ and waiting for them to cool, the metal rods ΐ3ι ^ tend to make these The preload of the base bodies lu relatively close to each other. Of course, the positioning members 11 are not limited to form a rectangular frame with the prestressing members 13 or the detection members 14, and they can also form a horizontal layup with the number of the prestressing members 13 or the detection members 14. "U" type or "H" type structure, and the above thermal expansion and contraction are used to complete the setting of the prestressing elements i 3 and the detecting elements 14. It should be noted that although in the above embodiment, the optical waveguide i 2 _ is an optical fiber, so that the overall size of the optical waveguide chemical detection device 1 can cover a meter (m) level to a centimeter (mm) level; Of course, the optical waveguide 12 is not limited to optical fibers, and it can also be replaced by a planar optical waveguide. At the same time, it can cooperate with such systems as Micro-Electro-Mechanical System (MEMS) and Micro-Optic- Mechanical system (MOMS), and micro-electromechanical system (Micro-Electro_Mecha-Optical System, MEMOS) and other micro-system technologies, can even reduce the overall size of this optical 13 200525138 waveguide chemical detection device 1 to the centimeter (mm) level to Micron (// m) range. As shown in FIG. 10, an optical signal generator 2 connected to the optical waveguide 2 is added, an optical signal receiver 3 connected to the optical waveguide 12 is connected, and an optical signal receiver 3 connected to the optical waveguide 12 is added. The optical signal analyzer 4 makes the optical waveguide chemical detection device 丨 a complete detection system to explain the detection method of the optical waveguide chemical detection device 丨. As shown in FIG. N, the method for detecting the degree of chemical change of a chemical substance by using the above-mentioned optical waveguide chemical detection device 丨 includes the following steps: Step 200, as shown in FIG. 8 and FIG. 10, the above-mentioned optical waveguide chemical detection device 1 It is arranged to expose the detection elements 4 to a ring of chemical substances. As described in the two, in this embodiment, the optical waveguide chemical detection device 1 is an overhead high-voltage power transmission cable hanging from an adjacent sea. Supporting wire rope. In step 202, an optical signal emitted by the optical signal generator 2 enters the optical waveguide 12. In step 204, the optical signal receiver 3 receives the optical signal passing through the sensing section 122 of the optical waveguide signal 12. In this embodiment, it receives the reflected signal reflected by the measuring element 123 forming the grating. And as anyone familiar with this technology knows, it can also receive transmission signals that pass through the measurement element. Step 2 6 ′ uses the optical signal analyzer 4 to analyze the change value of the optical signal passing through the sensing section 12 2 to obtain the measured value of the axial deformation of the sensing section 122. In this embodiment, the optical signal analyzer 4 measures the amount of axial deformation of the sensing section 122 with the reflected wavelength offset 3 of the optical signal passing through the measuring element 123 as shown in FIG. 9. Measured value. ίο 15 20 / step 208 ′ Use the measured value of the axial deformation of the sensing section 122 to judge the degree of the chemical reaction. In this embodiment, the amount of axial deformation of the sensing section 122 is used to determine that the detection elements 14 move at a high concentration of gas-containing ions = the affected ion invades under each wind blow. It can be based on the direct measurement of the axial deformation of the sensing section 122 to determine the extent of the chemical reaction of the test pieces " invaded surname; it can also be a hypothetical measurement of the axial deformation of the sensing section 122. The amount of change in the value is used to judge the surviving surname of the detection elements 14: the degree of response: here is the measured value of the axial deformation of the sensing section 122. The initial value of the axial deformation of the sensing section 122 is compared to obtain the change amount of the measured value of the axial deformation of the sensing section 122. As shown in Figure Π, the optical waveguide chemical detection device of the present invention} and the following: The second preferred embodiment of the measurement method is roughly the same as the first preferred embodiment described above. The degree of chemical change is different in that the optical waveguide chemical detection device ι is provided on a; The optical waveguide chemical detection device 1 comprises two positioning members u spaced apart from each other, a positioning member u disposed on the positioning members = a learning waveguide 12, a prestressing member disposed between the positioning members u ...-provided on the positioning The detection member 14 between the pieces u, and the setting seat 15 to which the position piece II is fixed. The shape and setting relationship of each of the positioning members n and the optical waveguide 12 is different from the two ends of the prestressing member 13 on the q member, and there is a tendency to make the positioning members] 15200525138 relative Position change & ❹ has preload. In terms of capital, the prestressing element is also the same: a non-metal rod body 13 / which extends in parallel to the axial direction of the optical waveguide 12 and whose two ends are respectively fixed to the base body 111; 2 The difference between the first preferred embodiment described above is that the metal rods ⑶ are disposed on one side of the optical waveguide 12. 10 15 20 ° Both ends of the measuring member 14 are also connected to each of the positioning members 1] Above: It is preferred to maintain the relative position of the positioning members 11 "relatively fixed. In this embodiment, each of the detecting members 14 also has a direction extending substantially parallel to the axial direction of the optical waveguide 12 and its two ends are fixed to each other. The seat body ⑴ "wears a metal rod body 14 and-the slit 1 formed on the metal rod body 141 is 40; however, the difference from the above-mentioned preferred embodiment lies in these metal rod bodies. 141 is only disposed on one side of the prestressing member 13 away from the optical waveguide. The setting seat 15 is located on the other side of the optical waveguide 12 away from the prestressing member 13 and the private test # 14, and its two ends are respectively connected to each of the seat bodies 111. A plurality of screw holes 70 are formed on the same day. Provided on the high-voltage electric tower 7. Therefore, when the detecting member 14 comes into contact with gas ions, the metal rod body 141 is eroded, resulting in a reduction in the section adjacent to the narrow slit 14, thereby causing the positioning members 11 to be pushed up by the prestressing member 13. When the optical waveguide 12 is moved away from each other and the sensing section 22 is stretched, it is further known that the extent of the change in the cross-section of the detection element 14 is calculated inversely to obtain the degree of the chemical reaction affected by gas ions.
雖在本貫施例中，該設置座15是同時連接於該等座 月豆111上，因而會造成對於該等定位件11相對位移之限 制，然而由於各該定位件11仍會以與該設置座15連結處 16 200525138 為支點，在χ該預力件13推頂時產生旋轉，因此仍能偵 測出泫檢測件14受氯離子受侵蝕後之反應。實際上在本 貫施例中，該定位件11之座體⑴、該等檢測件14之金 屬桿體141，以及該設置座15是以相同之鋼材一體成形所 製成之矩形框架結構。 如圖13及圖14所示，本發明光學波導化學檢測裝置 1及其檢測方法的第三較佳實施例也是用於檢測與一化學 物貝之化學變化程度，且同樣地是檢測受氣離子侵姓的化 學k:化程度。該光學波導化學檢測裝置i包括兩彼此間@ φ 一距離之定位件n、一設置於該等定位件11上之光纜 16、兩設置於該等定位件u間之預力件13，以及兩設置 於該等定位件11間之檢測件14。 各該定位件11具有—柱狀座體11卜-形成於該座體 111之中央位置並供該光纜〗6穿設之通道11〇、一填充於 =通道110内使該光€ 16與該座體⑴彼此固接之填充 W 112以及兩夹持该光缓16並固接於該座體111上之預 力鋼鎖片114。在本實施例中，而該通道11〇鄰近該座體、籲 ⑴表面之孔徑小於其形成於該座體⑴内部之孔徑使 該通道110實際上於該座豸⑴内形成_近似球形之空 2 ’而該填充劍112是一炫點低於該等座體⑴之炫點的 . 合金’而各該定位座n更於該座體⑴上形成有—自彡 . 側邊與該通道m連通，以供該填充劑112灌入之注入口' ⑴。而該等預力鋼鎖丨⑴是用於提供較大的之承力， 以支撐該光纜16。 17 200525138 該光境16包含-形成光纖的光學波導12，該光學波 導12可定義出兩分別定位於各該定位件u之通道削處 的定位點121、一位於該兩定位點121間之感測段122, 以及一設置於該感測段122上之量測元件123(見圖8)。在 本實施例中，該量測元件123是—光拇，而使得該感測段 122形成一光纖光栅感測器。 10 15 20 在本實施例中，各該預力件13具有一沿實質平行該 光學波導12軸向之方向延伸且兩端分別錯定於各該定^ 件11之座體m上的鋼索欖線132。各該鋼索變線132藉 ^累鎖之方式’使其存在傾向使料定位件u彼此㈣ 罪近之預力，且為使該等定位件u受該等預力件13驅動 時’僅發生相對移動而無相對轉動’該等鋼索纜線132是 以該光境16之位置為中心對稱地設置於該座體⑴上。 該等檢測件14之兩端分別連接於各該定位件u上， 向古維持該等定位件11之相對位置固定。各該檢測件 H、有-沿實質平行該光學波導12軸向之方向延伸且盆 二端分別D接於各該定位件Η之座體⑴的含鐵金屬桿 -⑷，及兩道形成於該金屬桿體141上之細縫“Ο =金屬桿體141具有一矩形斷面，而其在形成有該細縫⑷ 處之断面積小於該矩形斷面。 因此當該等_件14關料料使得料金 受到侵㈣由外表面逐漸剝落，造成其鄰近該細縫干 ⑽處之斷面縮減，導致抵抗該等檢挪件】4傷限該等定位 件Π相互位置固定之能力降低，達而使得該等定位件】】 18 5 10 15 20 200525138 又。亥寺預力件13之推擠而相互靠近，由於該光學波導 之=等疋位點121是分別定位於各該定位件^上而受 ,縮而產生形變’量測該感测段122 #向長度之變： 二，便能反算出該等檢測件14斷面變化之程度，進而獲 得上述受氣離子侵#之化學反應的程度；當然也可以^ 光境16及該形成t纖之光學波導12預纽加—張力，使 其產生預先之伸長量後才將其定位於該定位件Π上。 如圖15及圖16所示，本發明光學波導化學檢測裝置 1及其檢測方法的第四較佳實施例也是用於檢測與一化學 物質之化學變化程度。該光學波導化學檢測裝置i包括兩 彼此間隔-距離之定位件u、一定位於該等定位件u上 之光學波導12、兩設置於該等定位件u間之預力件13、 兩分別設置於各該預力件13上之預力限位組件17，以及 兩設置於該等定位件1丨間之檢測件14。 在本實施例中，各該定位件u具有一座體m，各該 座肢111具有一柱狀座部丨丨5，及一由該座部丨15呈一角 度往另一座體111延伸之臂部116，使得各該定位件n整 體外觀概呈『U』型，各該定位件n更具有—形成於該座 部1151中央供該光學波導12穿設之通道11〇，以及一填 充於該通道110内使該光學波導12與該座體1U固接之 填充劑112。该等相對之臂部116間隔距離遠小於該等座 部115彼此間之距離。 泫光學波導12具有兩分別定位於各該座部丨丨5之定 位點121、一位於該兩定位點121間之感測段122，以及Although in the present embodiment, the setting seat 15 is connected to the moon beans 111 at the same time, it will cause restrictions on the relative displacement of the positioning members 11, but each positioning member 11 will still The connection point 16 200525138 of the seat 15 is set as a fulcrum, and when the prestressing member 13 is pushed up, rotation is generated, so the reaction of the radon detecting member 14 after being eroded by chloride ions can still be detected. Actually, in the present embodiment, the seat body ⑴ of the positioning member 11, the metal rod body 141 of the detecting members 14, and the setting seat 15 are rectangular frame structures made by integrally forming the same steel. As shown in FIG. 13 and FIG. 14, the third preferred embodiment of the optical waveguide chemical detection device 1 and the detection method of the present invention is also used to detect the degree of chemical change with a chemical shell, and is also used to detect the invasion by gas ions. Chemical k: surname. The optical waveguide chemical detection device i includes two positioning members n at a distance of φ from each other, an optical cable 16 provided on the positioning members 11, two prestressing members 13 provided between the positioning members u, and two The detecting member 14 is disposed between the positioning members 11. Each of the positioning members 11 has a columnar base 11 and a channel 11 formed in the central position of the base 111 and provided for the optical cable. 6 A channel is filled in the channel 110 to make the light 16 and the The base body 填充 is fixedly filled with the filler W 112 and two pre-stressed steel lock pieces 114 which clamp the light buffer 16 and are fixed on the base body 111. In this embodiment, the diameter of the channel 110 is close to the base body, and the diameter of the surface is smaller than the diameter of the hole formed inside the base body, so that the channel 110 actually forms an approximately spherical hollow in the base body. 2 'The filling sword 112 is a dazzling point lower than the dazzling points of the base body. Alloy' and each of the positioning seats n is formed on the base body ⑴-self- 彡. The side and the channel m An injection port '⑴ which communicates with the filler 112. The prestressed steel locks are used to provide a large bearing force to support the optical cable 16. 17 200525138 The light environment 16 includes-an optical waveguide 12 forming an optical fiber, and the optical waveguide 12 can define two positioning points 121 respectively positioned at the channel cuts of the positioning members u, and one feeling between the two positioning points 121 The measuring section 122 and a measuring element 123 (see FIG. 8) disposed on the sensing section 122. In this embodiment, the measuring element 123 is a light thumb, so that the sensing section 122 forms a fiber grating sensor. 10 15 20 In this embodiment, each of the prestressing members 13 has a steel cable extending along a direction substantially parallel to the axial direction of the optical waveguide 12 and both ends of which are staggered on the base m of each of the fixing members 11 Line 132. Each of the steel cable changing lines 132 uses the method of “accumulating locks” to make it have a tendency to cause the positioning members u to be close to each other, and to cause the positioning members u to be driven by the pretension members 13 only occurs. Relative movement without relative rotation 'The steel cables 132 are symmetrically disposed on the base body 是以 with the position of the light environment 16 as the center. Two ends of the detecting members 14 are respectively connected to the positioning members u, and the relative positions of the positioning members 11 are kept fixed to the ancient times. Each of the detecting members H,-has a ferrous metal rod -⑷ extending in a direction substantially parallel to the axial direction of the optical waveguide 12 and two ends of the basin are respectively connected to the seat body ⑴ of the positioning member Η, and two are formed in The slit “0” on the metal rod body 141 has a rectangular cross-section, and its cross-sectional area at the position where the slit 形成 is formed is smaller than the rectangular cross-section. The material is subject to invasion and gradually peels off from the outer surface, resulting in a reduction in the section adjacent to the dry place of the slit, resulting in resistance to such inspection and removal parts. 4 Injury limit The ability of these positioning parts to be fixed to each other is reduced. And make these positioning parts]] 18 5 10 15 20 200525138 again. The Haisi prestressing element 13 is pushed closer to each other, because the optical waveguide = isocentric position 121 is positioned on each of the positioning parts ^ The deformation caused by the shrinkage will measure the change in the length of the sensing section 122 #. Second, the degree of change in the cross-section of the detection elements 14 can be calculated in reverse, and the degree of the chemical reaction of the above-mentioned gas ion invasion # can be obtained. ; Of course, it is also possible to ^ the light environment 16 and the optical waveguide 12 forming the t-fiber pre-Newcastle- Force to cause it to have a predetermined elongation before positioning it on the positioning member Π. As shown in FIG. 15 and FIG. 16, the fourth preferred embodiment of the optical waveguide chemical detection device 1 and the detection method of the present invention is also Used to detect the degree of chemical change with a chemical substance. The optical waveguide chemical detection device i includes two positioning members u spaced apart from each other, optical waveguides 12, which must be located on the positioning members u, and two positioning members provided on the positioning members. The prestressing members 13 between u, two prestressing limit assembly 17 respectively disposed on each of the prestressing members 13, and two detection members 14 disposed between the positioning members 1. In this embodiment, each The positioning member u has a body m, each of the seat limbs 111 has a columnar seat part 5 and an arm part 116 extending from the seat part 15 to the other seat body 111 at an angle, so that each of the positioning parts The overall appearance of the piece n is generally "U", and each of the positioning pieces n further has a passage 11 formed in the center of the seat portion 1151 for the optical waveguide 12 to pass through, and a filler filled in the passage 110 to make the optical waveguide 12 The filler 112 fixed to the base body 1U. The opposite arm portions 1 The separation distance of 16 is much smaller than the distance between the bases 115. 泫 The optical waveguide 12 has two positioning points 121 respectively positioned at each of the bases 丨 5 and a sensing section 122 positioned between the two positioning points 121. as well as
19 200525138 -設置於㈣測段122上之量測元件i23(見圖8)。 ίο 15 20 在本κ施例中，該預力件丨3具有一兩端分別接觸各 該定位件11之螺旋彈簧133,各該彈菁133分別頂抵於各 4座。P 115上並傾向使該等定位件U之相對位置遠離。 當然，各該螺旋彈簧133對於該等定位件u之施力方向 並非以此為限，僅調整上述彈簧133之變形方向，便能輕 易地變更為使該等定位件11相互靠近之設計。該光學波 導化學檢測裝置1更增設有該等預力限位組件17,各該預 力限位組件17具有-套設於該預力件13之_彈簧133 外的官體17卜以及__穿設於該彈簧133内之直桿⑺。 以偈限所對應之預力件13僅能沿實質平行該光學波導12 軸向之方向發生形變’確保各該螺旋彈簧⑶是沿平行該 光學波導12轴向之方向施力於各該定位件u上。該等預 位”且件17均可相對於該等定位件“沿該光學波導μ 軸向方向活動，而避免因干涉影響該等預力件13之預定 例如在本實施例中，各該座部⑴便形成有兩供該 專直扣172可活動地穿設之凹槽117。19 200525138-Measuring element i23 set on the measuring section 122 (see Figure 8). 15 20 In this embodiment, the prestressing element 3 has a coil spring 133 whose two ends respectively contact each of the positioning members 11, and each of the elastic members 133 abuts against each of the four seats. P 115 tends to keep the relative positions of these positioning members U away. Of course, the direction of the urging force of the coil springs 133 on the positioning members u is not limited to this. Just by adjusting the deformation direction of the spring 133, the design of bringing the positioning members 11 close to each other can be easily changed. The optical waveguide chemical detection device 1 is further provided with the pre-force limiting components 17, each of the pre-force limiting components 17 has an official body 17 that is set outside the _ spring 133 of the pre-force 13 and __ A straight rod 设 is inserted into the spring 133. The prestressing member 13 corresponding to the limit can only be deformed in a direction substantially parallel to the axial direction of the optical waveguide 12 'to ensure that each of the coil springs ⑶ applies force to each of the positioning members in a direction parallel to the axial direction of the optical waveguide 12 u on. The “pre-positions” and the pieces 17 can be “moved in the axial direction of the optical waveguide μ relative to the positioning pieces, so as to prevent the pre-stressing pieces 13 from being affected by interference. For example, in this embodiment, each of the seats The crotch is formed with two grooves 117 for the special straight buckle 172 to move through.
該等檢測件14之兩端分別連接於各該定位件n上， 各較位件11固接後，形成,位W 2構。各該制件14具有—沿實質平行該光學波導12 之方向延伸’且兩端分別固接於各該相鄰之臂部⑴ 屬桿體！4卜各該金屬桿體⑷具有一矩形斷面，且 :::::固接之各該臂部116所具有之斷面積，因此， 寺預力件13馳並_各該㈣111彼此遠離時， 20 200525138 5 10 雖各該臂部116平行於使其相互遠離之受力方向，㈣於 弱面效應將使得該等定位件11之力平衡位置，主要仍受 該等檢_ 14之影響’從而使得該光學波導化學檢測裝 置1維持高度精確’並使得該光學波導化學檢測裝置 藉由《變更上述檢測件14之設計達到更多樣之檢測 ，，不上所述，本發明光學波導化學檢㈣置丨及其檢測 去不僅月b進行化學反應程度之檢測，使得光學量測技術 付以應用於化學變化之檢測，其更能利用光學波導之寬頻 帶、低損失、無相互干涉性、高絕緣性及耐腐料特性，、 月&Two ends of the detecting members 14 are respectively connected to the positioning members n, and the positioning members 11 are fixed to form a W-shaped structure. Each of the pieces 14 has—extending in a direction substantially parallel to the optical waveguide 12 ’and the two ends are respectively fixed to each of the adjacent arms—a metal rod! 4. The metal rod body ⑷ has a rectangular cross-section, and ::::: the cross-sectional area of each of the arm portions 116 fixed. Therefore, the temple prestressing element 13 merges when each ㈣ 111 is away from each other. , 20 200525138 5 10 Although each of the arms 116 is parallel to the direction of the force that keeps them away from each other, the weak surface effect will make the position of the force balance of the positioning members 11 mainly affected by the inspection _ 14 ' As a result, the optical waveguide chemical detection device 1 maintains a high degree of accuracy, and the optical waveguide chemical detection device achieves a wider variety of detections by changing the design of the above-mentioned detection member 14. As mentioned above, the optical waveguide chemical detection of the present invention The instrumentation and its detection not only detect the degree of chemical reaction on month b, making the optical measurement technology applied to the detection of chemical changes, but also the use of the optical waveguide's wide frequency band, low loss, non-interference, high Insulation and anticorrosive properties, month &
15 使得該光學波導化學檢職置丨擁有制壽命長及適用環 境多樣等特性，從而能進行長時間、長距離、多點或線型 佈設等之監測與檢測，同時由於該光學波導化學檢測裝置 1構造簡單，故更具有成本較低與維修容易等優點，特別 有利於如尚架纜線、瓦斯管線及地下（水）管道等呈長距離 線型分布之公共系統之監測與檢測，並確實達到本發明之 目的。 20 惟以上所述者’僅為本發明之四較佳實施例而已，當 不能以此限定本發明實施之範圍，即大凡依本發明申請專 利範圍及發明說明書内容所作之簡單的等效變化與修 飾，皆應仍屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是習知一光纖光栅感測器的一側面剖視圖； 圖2是該光纖光栅感測器的一反射頻譜示意圖； 圖3是該光纖光柵感測器的一穿透頻譜示意圖； 21 200525138 圖4是習知—法布立一拍若干涉式感測器的側面别視 圖， 圖5是習知-布里光時域反射感測器的一示意圖； 圖6是本發明光學波導化學檢測裝置的第一較佳實施 5 例的一平面俯視圖； 圖7是沿圖6中之線V„_VII的一剖面圖； 圖8是該第-較佳實施例之一局部剖面圖，說明一光 學波導之一感測段及一量測元件； 圖9是該第一較佳實施例的-反射頻譜示意圖； · 10 ® 1〇是該第-較佳實施例之-示意圖，說明-光訊 號產生器、-光訊號接收器，及一光訊號分析器之配置關 係； 圖11是該第一較佳實施例之一流程圖； 圖12是本發明光學波導化學檢測裝置的第二較佳實 15 施例的一平面側視圖； $ 圖13疋本發明光學波導化學檢測裝置的第三較佳實 施例的一平面俯視圖； 汽 ^ 圖14是沿圖13中之線χιν_χιν的—剖面圖； 圖15是本發明光學波導化學檢測裝置的苐四較佳實 20 施例的一平面俯視圖；及 、 圖16是沿圖15中之線χνι·χνι的一剖面圖。 22 200525138 【圖式之主要元件代表符號說明】 1 光學波導化學檢測裝置 π 定位件 110 通道 111 座體 112 填充劑 113 注入口 114 預力鋼鎖片 115 座部 116 臂部 117 凹槽 12 光學波導 121 定位點 122 感測段 123 量測元件 13 預力件 131 桿體 132 纜線 133 彈簧 14 檢測件 140 細縫 141 桿體 15 設置座 16 光纜 預力限位組件 管體 直桿 光訊號產生器 光訊號接收器 光訊號分析器 高壓電塔 螺孔 · 光纖光柵感測器 光纖 核心 外殼 外套 光柵 輸入端 干涉式感測器 · 矽晶管 單模光纖 多模光纖 第一斷面 第二斷面 光時域反射感測器 玻璃光纖 23 200525138 832塑膠光纖 91 反射波長 90 波長 200.202.204.206.208.步驟15 makes the optical waveguide chemical inspection position 丨 has the characteristics of long manufacturing life and a variety of applicable environments, so that it can monitor and detect for a long time, long distance, multi-point or linear layout, and because of the optical waveguide chemical detection device 1 The structure is simple, so it has the advantages of lower cost and easy maintenance. It is particularly beneficial to the monitoring and detection of public systems with long-distance linear distribution such as overhead cables, gas pipelines, and underground (water) pipelines. The purpose of the invention. 20 However, the above-mentioned ones are only the four preferred embodiments of the present invention. When the scope of implementation of the present invention cannot be limited by this, that is, the simple equivalent changes made according to the scope of the patent application and the content of the invention specification of the present invention, and Modifications should still fall within the scope of the invention patent. [Brief description of the drawings] Figure 1 is a side cross-sectional view of a conventional fiber grating sensor; Figure 2 is a schematic diagram of a reflection spectrum of the fiber grating sensor; Figure 3 is a penetration of the fiber grating sensor Spectrum diagram; 21 200525138 Figure 4 is a side view of a conventional-Fabry-battery interferometric sensor, Figure 5 is a schematic diagram of a conventional-Berry optical time-domain reflection sensor; Figure 6 is a A plan view of the first preferred embodiment 5 of the invention of an optical waveguide chemical detection device; FIG. 7 is a cross-sectional view taken along the line V′_VII in FIG. 6; FIG. 8 is a partial cross-section of one of the first-best embodiments; Fig. Illustrates a sensing section and a measuring element of an optical waveguide; Fig. 9 is a schematic diagram of the reflection spectrum of the first preferred embodiment; 10 ® 10 is a schematic diagram of the-preferred embodiment, Explanation of the arrangement relationship of an optical signal generator, an optical signal receiver, and an optical signal analyzer; FIG. 11 is a flowchart of the first preferred embodiment; FIG. 12 is a first embodiment of the optical waveguide chemical detection device of the present invention; A plan side view of the second preferred embodiment 15; Figure 13 疋 本 发A plan view of a third preferred embodiment of the optical waveguide chemical detection device; FIG. 14 is a sectional view taken along the line χιν_χιν in FIG. 13; FIG. 15 is a twenty-fourth preferred embodiment of the optical waveguide chemical detection device of the present invention 20 A plan view of the embodiment; and, FIG. 16 is a cross-sectional view taken along the line χνι · χνι in Fig. 15. 22 200525138 [Description of the main symbols of the drawings] 1 Optical waveguide chemical detection device π positioning member 110 channel 111 Seat body 112 Filler 113 Injection port 114 Prestressing steel lock plate 115 Seat portion 116 Arm portion 117 Groove 12 Optical waveguide 121 Anchor point 122 Sensing section 123 Measuring element 13 Preload 131 Rod body 132 Cable 133 Spring 14 Test piece 140 Slit 141 Rod body 15 Setting seat 16 Cable pre-tension limiting component Tube body Straight rod Optical signal generator Optical signal receiver Optical signal analyzer High-voltage tower screw hole Fiber-optic grating sensor Fiber core housing Coated Grating Input Interferometric Sensor · Silicon Transistor Single-mode Fiber Multimode Fiber First Section Second Section Optical Time Domain Reflection Sensor Glass Light Fiber 23 200525138 832 Plastic Optical Fiber 91 Reflection Wavelength 90 Wavelength 200.202.204.206.208.
24twenty four