TWI247928B - Tunable liquid crystal integrated optic device - Google Patents
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1247928 •五、發明說明(1) " " 【技術領域】 本發明係有關於一種可調式液晶積體光學元件,可應 用於濾波器、耦合器以及光補/取多工器,尤指一種以液 晶層作為主動覆層,並於該液晶層佈設呈脊狀延伸穿越之 具光柵之第一波導元件與一第二波導元件,一用以與該基 板相配a上下夾住該液晶層之隔離層,及兩個用以連接電 源以產生電壓之電極層,藉由外加電壓控制液晶晶體軸 向,使波導之等效折射率隨調變電場而變化,俾達到簡化 結構、容易製造,降低成本及可積體化之目的者。 【先前技術】 按光波長補取多工器(Optical Add-Drop Multiplexers,0ADM)是高密度波長多工系統(Dense Wavelength Division Multipl exe r, MDM)中不可或缺的 元件,可運用在網路節點上,處理多條經由該節點進行 上、下路的波長,以簡化網路設備的架構。 隨著未來上網人數持續增加的趨勢,在頻寬與路由的 速度上將有更高的需求,同時各種網路應用服務的導入, 也將帶動網路朝向更高的調度彈性發展。新一代網路除了 傳輸速度、距離的提升之外,還必須對各種信號具有通透 性,同時能夠提供頻寬的動態配置。基於這樣的 念,新一代網路需結合MM系統、可調式元件技體 技術等,以提供一個靈活、可靠、性能穩定的網路。為因 應DWDM系統之每一光纖中波長數增加,而使〇ΑΜ的設計 趨於複雜,且更加要求能夠容納更多的波長處理能力,因1247928 • V. INSTRUCTION DESCRIPTION (1) "" [Technical Field] The present invention relates to a tunable liquid crystal integrated optical component that can be applied to filters, couplers, and optical complement/multiplex multiplexers, especially A liquid crystal layer is used as an active coating, and a first waveguide element and a second waveguide element having a grating extending in a ridge shape are arranged on the liquid crystal layer, and a second waveguide element is arranged to match the substrate, and the liquid crystal layer is sandwiched up and down. An isolation layer, and two electrode layers for connecting a power source to generate a voltage, and controlling the axial direction of the liquid crystal by an applied voltage, so that the equivalent refractive index of the waveguide changes with a modulation electric field, thereby achieving a simplified structure and being easy to manufacture. Those who reduce costs and can be integrated. [Prior Art] Optical Add-Drop Multiplexers (0ADM) are indispensable components in the Dense Wavelength Division Multiplexe (MDM) and can be used in the network. On the node, multiple wavelengths of uplink and downlink via the node are processed to simplify the architecture of the network device. With the continuous increase in the number of Internet users in the future, there will be higher demand for bandwidth and routing speed, and the introduction of various network application services will also drive the network toward a higher scheduling flexibility. In addition to the increase in transmission speed and distance, the new generation network must also be transparent to various signals and provide dynamic configuration of bandwidth. Based on this concept, the next-generation network needs to combine MM system and adjustable component technology to provide a flexible, reliable and stable network. In order to increase the number of wavelengths in each fiber of the DWDM system, the design of the germanium tends to be complicated, and it is more required to accommodate more wavelength processing capabilities.
1247928 五、發明說明(2) 此可調式光補取多工器(Tunable OADM)的需求與實用性將 日益擴大。 至目前為止,已有很多的光波長補取多工技術被發 表’例如:Array Waveguide Grating(AWG)與光開關(TO Switches)組成的光補取多工器、馬克-詹德式干涉儀與光 纖光柵所組成的光補取多工器(bragg grating-assisted Mach-Zehnder Interferometer-based OADM)(參考文獻:!\£『(1〇忌311,1\人.81:^8861',肘.八· Milbrodt, E.J. Laskowski, C.H. Henry, G.E. Kohnke, '丨 Integrated-optical Mach-Zehnder odd-drop filter fabricated by a using UV-induced grating exposure, "Appl· Opt·,ν〇1·36,pp· 7838-7845,1 997·)、聲光可 調濾波器式光補取多工器 (Acoustic-Optic Tunable Filter OADM),及以布拉格 光纖光栅為基礎的光補取多工器(Fiber Bragg gratingOADM)(參考文獻:A· S· Kewitsch,G· Α· Rakuljic, P. A. ffillems, and A. Yariv, "All-fiber zero-insertion-loss add-drop filter for wavelength-division multiplexing,丨丨 Opt· Lett.,1247928 V. INSTRUCTIONS (2) The demand and practicality of this adjustable optical multiplexer (Tunable OADM) will be increasingly expanded. So far, many optical wavelength-compensation multiplex technologies have been published, such as Array Waveguide Grating (AWG) and optical switches (TO Switches), and the Marc-Zander interferometer. Bragg grating-assisted Mach-Zehnder Interferometer-based OADM (Reference: !\£『(1 jealous 311,1\人.81:^8861', elbow.八 Milbrodt, EJ Laskowski, CH Henry, GE Kohnke, '丨Integrated-optical Mach-Zehnder odd-drop filter fabricated by a using UV-induced grating exposure, "Appl· Opt·,ν〇1·36,pp· 7838-7845, 1 997·), Acoustic-Optic Tunable Filter (OADM), and Fiber Bragg OADM based on Bragg fiber grating (References: A·S·Kewitsch, G·Α·Rakuljic, PA ffillems, and A. Yariv, "All-fiber zero-insertion-loss add-drop filter for wavelength-division multiplexing,丨丨Opt· Lett. ,
Vol· 23,No· 2,pp· 1 06-1 08,Jan· 1 998·)。而以現今 市面上之可調式光波長補取多工器(tunable OADM )(參 考文獻:Ρ· Tang, 0· Eknoyan,and Η· F· Taylor, 丨丨 Rapidly tunable optical add-drop multiplexer (OADM) using a static-strain-induced grating inVol· 23, No. 2, pp·1 06-1 08, Jan·1 998·). The tunable OADM is available on the market today (references: Ρ· Tang, 0· Eknoyan, and Η·F· Taylor, 丨丨Rapidly tunable optical add-drop multiplexer (OADM) Using a static-strain-induced grating in
1247928 五、發明說明(3)1247928 V. Description of invention (3)
LiNb03,f丨 J· Lightwave Technol·,Vol· 21,No· 1LiNb03, f丨 J· Lightwave Technol·, Vol· 21, No· 1
Jan· 2003·)大多以項零組件實現,並需要加設電子迴路 (Circulator),整體結構上較為複雜,因而可能造成模組 或系統體積較大,且有價格昂貴等缺點。而光纖光树多工 器(fiber grating 0ADM)是以彈性伸縮或溫度變化調變光 柵週期’其調整時間長且調變速度慢;聲光可調遽波器气 光補取多工器(A0TF )則對偏振感度較低,E0TF雖^改^式 A0TF之感度問題,但擷取波長頻寬較大,卻同是a〇tf二 E0TF難以克服的缺點。 ” 【發明内容】 本發明之主要目的,在於提供一種結構簡化,容 造,低成本,可積體化之液晶式可調式積體光學元 / 應用於濾波器、耦合器以及光補/取多工器;其主 可 係包含有一基板,於基板上覆設一作為主動覆層的術 層,並於該液晶層佈設呈脊狀延伸穿越之具光柵二 導元件與-第二波導元件,—用以與該基板相配合:一波 住該液晶層之隔離層,及兩個用以連接電源以產 下夾 電極層,藉由外加電壓控制液晶晶體軸向,使波電壓之 折射率隨調變電場而變化。 等之等效 【實施方式】 請參看第一圖所示,本發明之液晶可調 學元件,可應用於濾波器、耦合器以及光補/取夕x體光 主要係包含有·· 夕工器, 一基板(10);Jan·2003·) is mostly implemented with item components, and requires the addition of an electronic circuit (Circulator). The overall structure is complicated, which may cause the module or system to be bulky and expensive. The fiber-optic multiplexer (fiber grating 0ADM) modulates the grating period by elastic expansion or temperature change, which has a long adjustment time and a slow modulation speed; the sound and light adjustable chopper gas-light compensation multiplexer (A0TF) ) The polarization sensitivity is low, although the E0TF changes the sensitivity of the A0TF, but the wavelength bandwidth is larger, but it is the disadvantage that the a〇tf II E0TF is difficult to overcome. SUMMARY OF THE INVENTION The main object of the present invention is to provide a liquid crystal type adjustable integrated optical element with simplified structure, capacity, low cost, and integration, which is applied to a filter, a coupler, and a light compensation/capture The main body may include a substrate, and a layer as an active coating is disposed on the substrate, and a grating diode element and a second waveguide element are arranged in the liquid crystal layer to extend through the ridge. For matching with the substrate: an isolation layer that bridges the liquid crystal layer, and two for connecting a power source to produce a sandwich electrode layer, and controlling the liquid crystal crystal axis by an applied voltage to adjust the refractive index of the wave voltage Variation in electric field. Equivalent [Embodiment] Please refer to the first figure, the liquid crystal adjustable element of the present invention can be applied to filters, couplers, and optical complement/occupation x body light main systems. Including a ceremonial device, a substrate (10);
第8頁 1247928 •五、發明說明(4) 一用以調變且作為主動覆層的液晶層(2 0 ); 一波導元件組(30),包含有第一波導元件(32)與一第 二波導元件(31),該第一波導元件(32)具有光柵(320 ), 且該第一波導元件(32)與該第二波導元(31)件呈脊狀 (ridge structure)延伸穿越該液晶層(20); 一隔離層(40) ’用以與該基板(1〇)相配合上下夾住該 液晶層(2 0 );及 兩個用以連接電源以產生電壓之電極層(5〇)(51),主 要分別設置該液晶層(20)外作為夾層或是該隔離層(4〇)與 該基板(1 0)外作為夾層。 本發明在實施時,該第二波導元件(31)亦可具有光柵 (310)。 本發明的一種較佳實施例中,該兩個用以連接電源以 產生電壓之電極層(50)(51),其一電極層(5〇)設在基板 (10)底面’另一電極層(51)設在該隔離層(4〇)頂面。 本發明的一種較佳實施例中,可在該隔離層(4〇)外侧 設有隔離子(60)Cspaeei〇。 本發明的一種較佳實施例中,該基板(1 0 )、隔離層 (40)與=一、第二波導元件(32)(31)可為半導體、無機晶 體、石英、金屬、玻璃、介電質或高分子材料(p〇lymerK 例如PMMA)等所製成。 本發明的一種較佳實施例中,該電極層(50)(51)可為 任一可形成電極之材料製成,例如氧化銦錫透明電極 (ITO)玻璃。Page 8 1247928 • V. Description of the Invention (4) A liquid crystal layer (2 0 ) for modulation and as an active cladding; a waveguide element group (30) including a first waveguide element (32) and a first a second waveguide element (31) having a grating (320), and the first waveguide element (32) and the second waveguide element (31) extend in a ridge structure a liquid crystal layer (20); an isolation layer (40) 'for clamping the liquid crystal layer (20) with the substrate (1); and two electrode layers for connecting a power source to generate a voltage (5) 〇) (51), mainly disposed outside the liquid crystal layer (20) as an interlayer or the isolation layer (4 〇) and the substrate (10) outside as an interlayer. In the implementation of the invention, the second waveguide element (31) may also have a grating (310). In a preferred embodiment of the present invention, the two electrode layers (50) (51) for connecting a power source to generate a voltage, an electrode layer (5 〇) is disposed on the bottom surface of the substrate (10) and the other electrode layer (51) is disposed on the top surface of the isolation layer (4〇). In a preferred embodiment of the invention, a spacer (60) Cspaeei can be provided outside the barrier layer (4〇). In a preferred embodiment of the present invention, the substrate (10), the isolation layer (40), and the second waveguide element (32) (31) may be a semiconductor, an inorganic crystal, a quartz, a metal, a glass, or a dielectric. It is made of an electric or high molecular material (p〇lymerK such as PMMA). In a preferred embodiment of the invention, the electrode layer (50) (51) can be made of any material that can form an electrode, such as indium tin oxide transparent electrode (ITO) glass.
第9頁 1247928Page 9 1247928
五、發明說明(5) 本發明的一種較佳實施例中,請配合參看附表一,其 為本發明元件的一種設計參數,即該基板(1〇)之厚度 (Thickness)為 15 //m,折射率(Refractive index)是 1.49 ’該第一波導元件(31)之厚度(Thickness)為4//m, 寬度(W i d t h )為 5 //m ’ 折射率(r e f r a c t i v e」n d e X)為 1.52,該第一波導元件(32)之厚度(Thickness)為4/zm, 寬度(Width)為3 //in ’ 折射率(Refractive index)為 1· 51,調頻(Index modulation )為 5·5χ 10-3 ;該隔離 層(40)之厚度(Thickness)為 1〇 ,折射率(Refractive index)為 1 · 3 〇 本發明之理論可因第一及第二波導元件之形狀、對稱 性以及光柵的位置而改變,本發.a月實施例在實務操作中, 對於光柵耦合器之分析,本發明採用D· Marcuse之較準 確模式耦合模態波導理論,而在實施例中所設計的結構, 只考慮耗合器在單一橫向電場transverse-electric(TE) 時的刖向及後向兩種模態。計算出在單一模態波導及光柵 波導的場型分佈,如第三圖所示。以第二條波導來說,即 光柵波導的電場為: cos^Aj-0,2)exp[-r,+ 5)], +5) '+^ + /¾)-^2], +s + h2)<x<-(hl+s) cos(0l2)exp[7#2+s + h2)]f x<-(hl+s + h2) 該第一、第二波導元件内之傳播光場可分解成前向 (forward)及後向(backward)兩種模態,其中第二波導元 件具有週期性折射率光柵(peri〇dic index grating),岭V. DESCRIPTION OF THE INVENTION (5) In a preferred embodiment of the present invention, please refer to Appendix I, which is a design parameter of the component of the present invention, that is, the thickness of the substrate (1〇) is 15 // m, refractive index (Refractive index) is 1.49 'The thickness of the first waveguide element (31) is 4//m, and the width (W idth ) is 5 //m 'refractive" (refractive" nde X) 1.52, the first waveguide element (32) has a thickness of 4/zm, a width of 3 //in 'refractive index of 1.51, and an index modulation of 5. 5χ. 10-3; the thickness of the spacer layer (40) is 1 〇, and the refractive index is 1 · 3 〇 The theory of the present invention may be due to the shape, symmetry, and grating of the first and second waveguide elements. The position of the present invention is changed. In the practical operation, for the analysis of the grating coupler, the present invention adopts the more accurate mode coupled modal waveguide theory of D·Marcuse, and the structure designed in the embodiment, Only consider the consumables in a single transverse electric field transverse-electri Both the slanting and backward modalities of c(TE). The field distribution of the single mode waveguide and the grating waveguide is calculated as shown in the third figure. In the case of the second waveguide, the electric field of the grating waveguide is: cos^Aj-0,2)exp[-r,+ 5)], +5) '+^ + /3⁄4)-^2], +s + h2) <x<-(hl+s) cos(0l2)exp[7#2+s + h2)]f x<-(hl+s + h2) propagation in the first and second waveguide elements The light field can be decomposed into two forward and backward modes, wherein the second waveguide element has a periodic index grating (peri〇dic grating)
第10頁 1247928 五、發明說明(6) 須考慮被向耦合;另第一波導元件則否。由此耦合器之 合方程式可表示為: = + 沉21 t(Ul)小2 + 1 哪(一’2AZ)々1 + 成21 [-办2 + A)Z]忍2 普= /[12exp[z(ft -+ +,·[12®Φ[-,(Α +Α)ζ】^ι + ίΧΐ2®Φ(-⑽22〇尽 ^ = -iKx, &φ {αβιζ)Αι - iK2l ©φ [ί{β2 + ft )ζ]Α2 - iKx ΧΒΧ - iK2X exp [- ι{β2 - ^ )z]^2 = -^i2€3φ[ι(Α + )52)z]4 -iK22 exp (ί2β2ζ)Α2 - ϊΧ12 exp[- ί(βχ - β2)ζ]^ -/a:22^2 以本發明的一較佳實施例說明,請參看第五圖所示, 設L為波導長度,起始條件為4⑻(1)=〇,第_、第 波導7L件(32)(31)上的模態分別為模態p及模態β , 合係數即為,它與擾動係數△ 有著密切的 係,耦合係數為 〜⑵=f £ Δεν〆⑶‘ (JC)办 本發明尚利用等效折射率之方法,可得二維與三 束傳播法模擬所得之等效折射率結果僅相差約0122%、“ ί爾後的模擬均採用二維光束傳播法進行之,若欲得較精 ,可將模擬所得之分光器長度乘上i.0012207的 校正參數即可。 液晶受到外加電場的作用時,便容易被極化 率變化,進而使耦合器波導之 以達到選擇波長可調之功能。 Η羊改變 1247928 五、發明說明(7) 第四圖為負型單光轴晶體折射率橢球示意圖,S為入 射光方向,假設因外加電場使液晶旋轉Θ角,形成之等效 折射率為 ne{e) —τ- yjn/co^e + nj1 sin2e , 指對於尋常光(ordinary ray)的折射率;Ile則是指 •對於非尋常光(extraordinary ray )的折射率。 請配合參看第五圖,為本發明實施例操作示意圖,經 分析得最佳參數如表1。當模態進入無光柵之第二波導元 件(31 )(WG Π )後,在長度L中的穿透強度為 Τ1 = 2·6798*10-3、Τ2 = 9·2569*1 0-5,而反射強度為 1Π=5·1598*10-2、R2 = 9.4562*10-1。元件在完全無偏壓‘ 下,即液晶折射率為1.485,其頻譜如第六圖,在波县 驗7⑽可於第-波.導元件(32)(WGI)取二圭在之皮強長 度,即R2 = 0.9471。當電壓控制液晶折射率為1 485 1497 時,仍有良好之強度,操作頻免控制為32 5 ± 8GHz。本 發明實施例之多工器設計之波長可調範圍在 1 549.15〜1551. l5nm之間。因此本發明之結構簡化,具有 裳作容易、便宜’且可積體化之功效。 明者’以上所述乃是本發明較佳具體的實施例, =本發=之構想所作之改變,其產生之功能作用,仍未 °出說明θ與圖不所涵蓋之精神時,均應在 内,合予陳明。 I /3之靶圍 綜上所述,本發明具有結構簡化,製作容易便宜可Page 10 1247928 V. INSTRUCTIONS (6) Consideration must be given to the coupled coupling; otherwise the first waveguide component is not. The equation of the coupler can be expressed as: = + sink 21 t (Ul) small 2 + 1 which (a '2AZ) 々 1 + into 21 [- do 2 + A) Z] forbear 2 Pu = / [12exp [z(ft -+ +,·[12®Φ[-,(Α +Α)ζ]^ι + ίΧΐ2®Φ(-(10)22〇^^ = -iKx, &φ {αβιζ)Αι - iK2l ©φ [ί{β2 + ft )ζ]Α2 - iKx ΧΒΧ - iK2X exp [- ι{β2 - ^ )z]^2 = -^i2€3φ[ι(Α + )52)z]4 -iK22 exp (ί2β2ζ Α2 - ϊΧ12 exp[- ί(βχ - β2)ζ]^ -/a: 22^2 is illustrated in a preferred embodiment of the present invention, as shown in the fifth figure, let L be the length of the waveguide, start The condition is 4(8)(1)=〇, and the modes on the 7th and 3L pieces (32)(31) are modal p and modal β respectively, and the combination coefficient is that it has a close relationship with the disturbance coefficient Δ. The coupling coefficient is ~(2)=f £ Δεν〆(3)' (JC) The method of the present invention still utilizes the equivalent refractive index, and the equivalent refractive index results obtained by the two-dimensional and three-beam propagation methods are only about 0122% different. "After the simulation, the two-dimensional beam propagation method is used. If you want to be more refined, you can multiply the length of the splitter obtained by the simulation by the calibration parameter of i.0012207. When the liquid crystal is subjected to an applied electric field, it is easily changed by the polarizability, and the coupler waveguide can be adjusted to achieve the selected wavelength. Η羊改1247928 V. Invention description (7) The fourth figure is a negative type Schematic diagram of the refractive index ellipsoid of a single optical axis crystal, S is the incident light direction, assuming that the liquid crystal is rotated by the applied electric field, the equivalent refractive index is ne{e) - τ - yjn / co ^ e + nj1 sin2e , For the refractive index of ordinary ray, Ile refers to the refractive index of extraordinary ray. Please refer to the fifth figure for a schematic diagram of the operation of the embodiment of the present invention. Table 1. When the modality enters the second waveguide element (31) (WG Π ) without grating, the penetration strength in length L is Τ1 = 2·6798*10-3, Τ2 = 9·2569*1 0 -5, and the reflection intensity is 1Π=5·1598*10-2, R2 = 9.4562*10-1. The component is completely unbiased, ie the refractive index of the liquid crystal is 1.485, and its spectrum is as shown in the sixth figure. County test 7 (10) can take the first strong wave length of the second wave in the first wave of the guide element (32) (WGI), that is, R2 = 0.9471. When the voltage is controlled When the refractive index of the liquid crystal is 1 485 1497, there is still good strength, and the operation frequency control is 32 5 ± 8 GHz. The wavelength of the multiplexer of the embodiment of the present invention can be adjusted between 1 549.15 and 1551. Therefore, the structure of the present invention is simplified, and it has the effect of being easy to carry out, inexpensive, and integrable. The above description is a preferred embodiment of the present invention, and the change in the concept of the present invention is not affected by the function of θ and the spirit not covered by the figure. Within, it is given to Chen Ming. The target circumference of I / 3 In summary, the invention has a simplified structure and is easy to manufacture.
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第13頁 1247928 圖式簡單說明 ------ (一)圖式部份: 第一圖係本發明結構截面示圖 第二圖係本發明實施例結構分解斷面示意圖。 第三圖係本發明實施例之模態示意圖。 第四圖係本發明折射率橢球示意圖。 第五圖係本發明實施例操作及參數示意圖。 第六圖係本發明實施例液晶折射率為丨.485所測得之頻譜 種實施例之設計參數值 π件 表一:為本發明 (二)圖號部份 (ίο)基板 (30)波導元件組 (3 1 0 )(320 )光柵 (50)(51)電極層 (2 0 )液晶層 (31)(32)波導_ (40)隔離層 (60)隔離子Page 13 1247928 Brief Description of the Drawings ------ (1) Schematic Part: The first drawing is a sectional view of the structure of the present invention. The second drawing is a schematic sectional view of the structure of the embodiment of the present invention. The third figure is a schematic diagram of a modality of an embodiment of the present invention. The fourth figure is a schematic diagram of the refractive index ellipsoid of the present invention. The fifth figure is a schematic diagram of the operation and parameters of the embodiment of the present invention. The sixth figure is a design parameter value of the embodiment of the spectrum of the liquid crystal having the refractive index of the liquid crystal of 实施.485 according to the embodiment of the present invention. π. Table 1 is a waveguide of the substrate (30) of the invention (2) Component group (3 1 0 ) (320) grating (50) (51) electrode layer (20) liquid crystal layer (31) (32) waveguide _ (40) isolation layer (60) spacer
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US9791696B2 (en) | 2015-11-10 | 2017-10-17 | Microsoft Technology Licensing, Llc | Waveguide gratings to improve intensity distributions |
US9915825B2 (en) | 2015-11-10 | 2018-03-13 | Microsoft Technology Licensing, Llc | Waveguides with embedded components to improve intensity distributions |
US10359627B2 (en) | 2015-11-10 | 2019-07-23 | Microsoft Technology Licensing, Llc | Waveguide coatings or substrates to improve intensity distributions having adjacent planar optical component separate from an input, output, or intermediate coupler |
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US9791696B2 (en) | 2015-11-10 | 2017-10-17 | Microsoft Technology Licensing, Llc | Waveguide gratings to improve intensity distributions |
US9915825B2 (en) | 2015-11-10 | 2018-03-13 | Microsoft Technology Licensing, Llc | Waveguides with embedded components to improve intensity distributions |
US10359627B2 (en) | 2015-11-10 | 2019-07-23 | Microsoft Technology Licensing, Llc | Waveguide coatings or substrates to improve intensity distributions having adjacent planar optical component separate from an input, output, or intermediate coupler |
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