TWI247928B - Tunable liquid crystal integrated optic device - Google Patents

Tunable liquid crystal integrated optic device Download PDF

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TWI247928B
TWI247928B TW93103136A TW93103136A TWI247928B TW I247928 B TWI247928 B TW I247928B TW 93103136 A TW93103136 A TW 93103136A TW 93103136 A TW93103136 A TW 93103136A TW I247928 B TWI247928 B TW I247928B
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liquid crystal
integrated optical
waveguide
rti
layer
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TW93103136A
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Chinese (zh)
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TW200527036A (en
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Wei-Ching Chuang
Ruey-Fang Shyu
Hsiao-Ping Liang
Shi-Hang Yang
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Univ Nat Formosa
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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The present invention relates to a tunable liquid crystal integrated optic device, which can be used in filter, coupler and optic add-drop multiplexer, which comprises a liquid crystal layer serving as an active covering layer, first and second waveguide elements containing optic grating and distributed in a ridge like fashion through the liquid crystal layer, an isolation layer that cooperates with a substrate to interposed the liquid crystal layer from upper and lower sides thereof, and two electrode layers connected to a power source to induce a potential, whereby by applying an external potential to control the axial direction of the liquid crystal, the equivalent refractivity of the waveguides can be tuned in accordance with the variation of the electrical field to realize simple structure, easy manufacturing, low costs, and integratability.

Description

1247928 •五、發明說明(1) " " 【技術領域】 本發明係有關於一種可調式液晶積體光學元件,可應 用於濾波器、耦合器以及光補/取多工器,尤指一種以液 晶層作為主動覆層,並於該液晶層佈設呈脊狀延伸穿越之 具光柵之第一波導元件與一第二波導元件,一用以與該基 板相配a上下夾住該液晶層之隔離層,及兩個用以連接電 源以產生電壓之電極層,藉由外加電壓控制液晶晶體軸 向,使波導之等效折射率隨調變電場而變化,俾達到簡化 結構、容易製造,降低成本及可積體化之目的者。 【先前技術】 按光波長補取多工器(Optical Add-Drop Multiplexers,0ADM)是高密度波長多工系統(Dense Wavelength Division Multipl exe r, MDM)中不可或缺的 元件,可運用在網路節點上,處理多條經由該節點進行 上、下路的波長,以簡化網路設備的架構。 隨著未來上網人數持續增加的趨勢,在頻寬與路由的 速度上將有更高的需求,同時各種網路應用服務的導入, 也將帶動網路朝向更高的調度彈性發展。新一代網路除了 傳輸速度、距離的提升之外,還必須對各種信號具有通透 性,同時能夠提供頻寬的動態配置。基於這樣的 念,新一代網路需結合MM系統、可調式元件技體 技術等,以提供一個靈活、可靠、性能穩定的網路。為因 應DWDM系統之每一光纖中波長數增加,而使〇ΑΜ的設計 趨於複雜,且更加要求能夠容納更多的波長處理能力,因1247928 • V. INSTRUCTION DESCRIPTION (1) "" [Technical Field] The present invention relates to a tunable liquid crystal integrated optical component that can be applied to filters, couplers, and optical complement/multiplex multiplexers, especially A liquid crystal layer is used as an active coating, and a first waveguide element and a second waveguide element having a grating extending in a ridge shape are arranged on the liquid crystal layer, and a second waveguide element is arranged to match the substrate, and the liquid crystal layer is sandwiched up and down. An isolation layer, and two electrode layers for connecting a power source to generate a voltage, and controlling the axial direction of the liquid crystal by an applied voltage, so that the equivalent refractive index of the waveguide changes with a modulation electric field, thereby achieving a simplified structure and being easy to manufacture. Those who reduce costs and can be integrated. [Prior Art] Optical Add-Drop Multiplexers (0ADM) are indispensable components in the Dense Wavelength Division Multiplexe (MDM) and can be used in the network. On the node, multiple wavelengths of uplink and downlink via the node are processed to simplify the architecture of the network device. With the continuous increase in the number of Internet users in the future, there will be higher demand for bandwidth and routing speed, and the introduction of various network application services will also drive the network toward a higher scheduling flexibility. In addition to the increase in transmission speed and distance, the new generation network must also be transparent to various signals and provide dynamic configuration of bandwidth. Based on this concept, the next-generation network needs to combine MM system and adjustable component technology to provide a flexible, reliable and stable network. In order to increase the number of wavelengths in each fiber of the DWDM system, the design of the germanium tends to be complicated, and it is more required to accommodate more wavelength processing capabilities.

1247928 五、發明說明(2) 此可調式光補取多工器(Tunable OADM)的需求與實用性將 日益擴大。 至目前為止,已有很多的光波長補取多工技術被發 表’例如:Array Waveguide Grating(AWG)與光開關(TO Switches)組成的光補取多工器、馬克-詹德式干涉儀與光 纖光柵所組成的光補取多工器(bragg grating-assisted Mach-Zehnder Interferometer-based OADM)(參考文獻:!\£『(1〇忌311,1\人.81:^8861',肘.八· Milbrodt, E.J. Laskowski, C.H. Henry, G.E. Kohnke, '丨 Integrated-optical Mach-Zehnder odd-drop filter fabricated by a using UV-induced grating exposure, "Appl· Opt·,ν〇1·36,pp· 7838-7845,1 997·)、聲光可 調濾波器式光補取多工器 (Acoustic-Optic Tunable Filter OADM),及以布拉格 光纖光栅為基礎的光補取多工器(Fiber Bragg gratingOADM)(參考文獻:A· S· Kewitsch,G· Α· Rakuljic, P. A. ffillems, and A. Yariv, "All-fiber zero-insertion-loss add-drop filter for wavelength-division multiplexing,丨丨 Opt· Lett.,1247928 V. INSTRUCTIONS (2) The demand and practicality of this adjustable optical multiplexer (Tunable OADM) will be increasingly expanded. So far, many optical wavelength-compensation multiplex technologies have been published, such as Array Waveguide Grating (AWG) and optical switches (TO Switches), and the Marc-Zander interferometer. Bragg grating-assisted Mach-Zehnder Interferometer-based OADM (Reference: !\£『(1 jealous 311,1\人.81:^8861', elbow.八 Milbrodt, EJ Laskowski, CH Henry, GE Kohnke, '丨Integrated-optical Mach-Zehnder odd-drop filter fabricated by a using UV-induced grating exposure, "Appl· Opt·,ν〇1·36,pp· 7838-7845, 1 997·), Acoustic-Optic Tunable Filter (OADM), and Fiber Bragg OADM based on Bragg fiber grating (References: A·S·Kewitsch, G·Α·Rakuljic, PA ffillems, and A. Yariv, "All-fiber zero-insertion-loss add-drop filter for wavelength-division multiplexing,丨丨Opt· Lett. ,

Vol· 23,No· 2,pp· 1 06-1 08,Jan· 1 998·)。而以現今 市面上之可調式光波長補取多工器(tunable OADM )(參 考文獻:Ρ· Tang, 0· Eknoyan,and Η· F· Taylor, 丨丨 Rapidly tunable optical add-drop multiplexer (OADM) using a static-strain-induced grating inVol· 23, No. 2, pp·1 06-1 08, Jan·1 998·). The tunable OADM is available on the market today (references: Ρ· Tang, 0· Eknoyan, and Η·F· Taylor, 丨丨Rapidly tunable optical add-drop multiplexer (OADM) Using a static-strain-induced grating in

1247928 五、發明說明(3)1247928 V. Description of invention (3)

LiNb03,f丨 J· Lightwave Technol·,Vol· 21,No· 1LiNb03, f丨 J· Lightwave Technol·, Vol· 21, No· 1

Jan· 2003·)大多以項零組件實現,並需要加設電子迴路 (Circulator),整體結構上較為複雜,因而可能造成模組 或系統體積較大,且有價格昂貴等缺點。而光纖光树多工 器(fiber grating 0ADM)是以彈性伸縮或溫度變化調變光 柵週期’其調整時間長且調變速度慢;聲光可調遽波器气 光補取多工器(A0TF )則對偏振感度較低,E0TF雖^改^式 A0TF之感度問題,但擷取波長頻寬較大,卻同是a〇tf二 E0TF難以克服的缺點。 ” 【發明内容】 本發明之主要目的,在於提供一種結構簡化,容 造,低成本,可積體化之液晶式可調式積體光學元 / 應用於濾波器、耦合器以及光補/取多工器;其主 可 係包含有一基板,於基板上覆設一作為主動覆層的術 層,並於該液晶層佈設呈脊狀延伸穿越之具光柵二 導元件與-第二波導元件,—用以與該基板相配合:一波 住該液晶層之隔離層,及兩個用以連接電源以產 下夾 電極層,藉由外加電壓控制液晶晶體軸向,使波電壓之 折射率隨調變電場而變化。 等之等效 【實施方式】 請參看第一圖所示,本發明之液晶可調 學元件,可應用於濾波器、耦合器以及光補/取夕x體光 主要係包含有·· 夕工器, 一基板(10);Jan·2003·) is mostly implemented with item components, and requires the addition of an electronic circuit (Circulator). The overall structure is complicated, which may cause the module or system to be bulky and expensive. The fiber-optic multiplexer (fiber grating 0ADM) modulates the grating period by elastic expansion or temperature change, which has a long adjustment time and a slow modulation speed; the sound and light adjustable chopper gas-light compensation multiplexer (A0TF) ) The polarization sensitivity is low, although the E0TF changes the sensitivity of the A0TF, but the wavelength bandwidth is larger, but it is the disadvantage that the a〇tf II E0TF is difficult to overcome. SUMMARY OF THE INVENTION The main object of the present invention is to provide a liquid crystal type adjustable integrated optical element with simplified structure, capacity, low cost, and integration, which is applied to a filter, a coupler, and a light compensation/capture The main body may include a substrate, and a layer as an active coating is disposed on the substrate, and a grating diode element and a second waveguide element are arranged in the liquid crystal layer to extend through the ridge. For matching with the substrate: an isolation layer that bridges the liquid crystal layer, and two for connecting a power source to produce a sandwich electrode layer, and controlling the liquid crystal crystal axis by an applied voltage to adjust the refractive index of the wave voltage Variation in electric field. Equivalent [Embodiment] Please refer to the first figure, the liquid crystal adjustable element of the present invention can be applied to filters, couplers, and optical complement/occupation x body light main systems. Including a ceremonial device, a substrate (10);

第8頁 1247928 •五、發明說明(4) 一用以調變且作為主動覆層的液晶層(2 0 ); 一波導元件組(30),包含有第一波導元件(32)與一第 二波導元件(31),該第一波導元件(32)具有光柵(320 ), 且該第一波導元件(32)與該第二波導元(31)件呈脊狀 (ridge structure)延伸穿越該液晶層(20); 一隔離層(40) ’用以與該基板(1〇)相配合上下夾住該 液晶層(2 0 );及 兩個用以連接電源以產生電壓之電極層(5〇)(51),主 要分別設置該液晶層(20)外作為夾層或是該隔離層(4〇)與 該基板(1 0)外作為夾層。 本發明在實施時,該第二波導元件(31)亦可具有光柵 (310)。 本發明的一種較佳實施例中,該兩個用以連接電源以 產生電壓之電極層(50)(51),其一電極層(5〇)設在基板 (10)底面’另一電極層(51)設在該隔離層(4〇)頂面。 本發明的一種較佳實施例中,可在該隔離層(4〇)外侧 設有隔離子(60)Cspaeei〇。 本發明的一種較佳實施例中,該基板(1 0 )、隔離層 (40)與=一、第二波導元件(32)(31)可為半導體、無機晶 體、石英、金屬、玻璃、介電質或高分子材料(p〇lymerK 例如PMMA)等所製成。 本發明的一種較佳實施例中,該電極層(50)(51)可為 任一可形成電極之材料製成,例如氧化銦錫透明電極 (ITO)玻璃。Page 8 1247928 • V. Description of the Invention (4) A liquid crystal layer (2 0 ) for modulation and as an active cladding; a waveguide element group (30) including a first waveguide element (32) and a first a second waveguide element (31) having a grating (320), and the first waveguide element (32) and the second waveguide element (31) extend in a ridge structure a liquid crystal layer (20); an isolation layer (40) 'for clamping the liquid crystal layer (20) with the substrate (1); and two electrode layers for connecting a power source to generate a voltage (5) 〇) (51), mainly disposed outside the liquid crystal layer (20) as an interlayer or the isolation layer (4 〇) and the substrate (10) outside as an interlayer. In the implementation of the invention, the second waveguide element (31) may also have a grating (310). In a preferred embodiment of the present invention, the two electrode layers (50) (51) for connecting a power source to generate a voltage, an electrode layer (5 〇) is disposed on the bottom surface of the substrate (10) and the other electrode layer (51) is disposed on the top surface of the isolation layer (4〇). In a preferred embodiment of the invention, a spacer (60) Cspaeei can be provided outside the barrier layer (4〇). In a preferred embodiment of the present invention, the substrate (10), the isolation layer (40), and the second waveguide element (32) (31) may be a semiconductor, an inorganic crystal, a quartz, a metal, a glass, or a dielectric. It is made of an electric or high molecular material (p〇lymerK such as PMMA). In a preferred embodiment of the invention, the electrode layer (50) (51) can be made of any material that can form an electrode, such as indium tin oxide transparent electrode (ITO) glass.

第9頁 1247928Page 9 1247928

五、發明說明(5) 本發明的一種較佳實施例中,請配合參看附表一,其 為本發明元件的一種設計參數,即該基板(1〇)之厚度 (Thickness)為 15 //m,折射率(Refractive index)是 1.49 ’該第一波導元件(31)之厚度(Thickness)為4//m, 寬度(W i d t h )為 5 //m ’ 折射率(r e f r a c t i v e」n d e X)為 1.52,該第一波導元件(32)之厚度(Thickness)為4/zm, 寬度(Width)為3 //in ’ 折射率(Refractive index)為 1· 51,調頻(Index modulation )為 5·5χ 10-3 ;該隔離 層(40)之厚度(Thickness)為 1〇 ,折射率(Refractive index)為 1 · 3 〇 本發明之理論可因第一及第二波導元件之形狀、對稱 性以及光柵的位置而改變,本發.a月實施例在實務操作中, 對於光柵耦合器之分析,本發明採用D· Marcuse之較準 確模式耦合模態波導理論,而在實施例中所設計的結構, 只考慮耗合器在單一橫向電場transverse-electric(TE) 時的刖向及後向兩種模態。計算出在單一模態波導及光柵 波導的場型分佈,如第三圖所示。以第二條波導來說,即 光柵波導的電場為: cos^Aj-0,2)exp[-r,+ 5)], +5) '+^ + /¾)-^2], +s + h2)<x<-(hl+s) cos(0l2)exp[7#2+s + h2)]f x<-(hl+s + h2) 該第一、第二波導元件内之傳播光場可分解成前向 (forward)及後向(backward)兩種模態,其中第二波導元 件具有週期性折射率光柵(peri〇dic index grating),岭V. DESCRIPTION OF THE INVENTION (5) In a preferred embodiment of the present invention, please refer to Appendix I, which is a design parameter of the component of the present invention, that is, the thickness of the substrate (1〇) is 15 // m, refractive index (Refractive index) is 1.49 'The thickness of the first waveguide element (31) is 4//m, and the width (W idth ) is 5 //m 'refractive" (refractive" nde X) 1.52, the first waveguide element (32) has a thickness of 4/zm, a width of 3 //in 'refractive index of 1.51, and an index modulation of 5. 5χ. 10-3; the thickness of the spacer layer (40) is 1 〇, and the refractive index is 1 · 3 〇 The theory of the present invention may be due to the shape, symmetry, and grating of the first and second waveguide elements. The position of the present invention is changed. In the practical operation, for the analysis of the grating coupler, the present invention adopts the more accurate mode coupled modal waveguide theory of D·Marcuse, and the structure designed in the embodiment, Only consider the consumables in a single transverse electric field transverse-electri Both the slanting and backward modalities of c(TE). The field distribution of the single mode waveguide and the grating waveguide is calculated as shown in the third figure. In the case of the second waveguide, the electric field of the grating waveguide is: cos^Aj-0,2)exp[-r,+ 5)], +5) '+^ + /3⁄4)-^2], +s + h2) <x<-(hl+s) cos(0l2)exp[7#2+s + h2)]f x<-(hl+s + h2) propagation in the first and second waveguide elements The light field can be decomposed into two forward and backward modes, wherein the second waveguide element has a periodic index grating (peri〇dic grating)

第10頁 1247928 五、發明說明(6) 須考慮被向耦合;另第一波導元件則否。由此耦合器之 合方程式可表示為: = + 沉21 t(Ul)小2 + 1 哪(一’2AZ)々1 + 成21 [-办2 + A)Z]忍2 普= /[12exp[z(ft -+ +,·[12®Φ[-,(Α +Α)ζ】^ι + ίΧΐ2®Φ(-⑽22〇尽 ^ = -iKx, &φ {αβιζ)Αι - iK2l ©φ [ί{β2 + ft )ζ]Α2 - iKx ΧΒΧ - iK2X exp [- ι{β2 - ^ )z]^2 = -^i2€3φ[ι(Α + )52)z]4 -iK22 exp (ί2β2ζ)Α2 - ϊΧ12 exp[- ί(βχ - β2)ζ]^ -/a:22^2 以本發明的一較佳實施例說明,請參看第五圖所示, 設L為波導長度,起始條件為4⑻(1)=〇,第_、第 波導7L件(32)(31)上的模態分別為模態p及模態β , 合係數即為,它與擾動係數△ 有著密切的 係,耦合係數為 〜⑵=f £ Δεν〆⑶‘ (JC)办 本發明尚利用等效折射率之方法,可得二維與三 束傳播法模擬所得之等效折射率結果僅相差約0122%、“ ί爾後的模擬均採用二維光束傳播法進行之,若欲得較精 ,可將模擬所得之分光器長度乘上i.0012207的 校正參數即可。 液晶受到外加電場的作用時,便容易被極化 率變化,進而使耦合器波導之 以達到選擇波長可調之功能。 Η羊改變 1247928 五、發明說明(7) 第四圖為負型單光轴晶體折射率橢球示意圖,S為入 射光方向,假設因外加電場使液晶旋轉Θ角,形成之等效 折射率為 ne{e) —τ- yjn/co^e + nj1 sin2e , 指對於尋常光(ordinary ray)的折射率;Ile則是指 •對於非尋常光(extraordinary ray )的折射率。 請配合參看第五圖,為本發明實施例操作示意圖,經 分析得最佳參數如表1。當模態進入無光柵之第二波導元 件(31 )(WG Π )後,在長度L中的穿透強度為 Τ1 = 2·6798*10-3、Τ2 = 9·2569*1 0-5,而反射強度為 1Π=5·1598*10-2、R2 = 9.4562*10-1。元件在完全無偏壓‘ 下,即液晶折射率為1.485,其頻譜如第六圖,在波县 驗7⑽可於第-波.導元件(32)(WGI)取二圭在之皮強長 度,即R2 = 0.9471。當電壓控制液晶折射率為1 485 1497 時,仍有良好之強度,操作頻免控制為32 5 ± 8GHz。本 發明實施例之多工器設計之波長可調範圍在 1 549.15〜1551. l5nm之間。因此本發明之結構簡化,具有 裳作容易、便宜’且可積體化之功效。 明者’以上所述乃是本發明較佳具體的實施例, =本發=之構想所作之改變,其產生之功能作用,仍未 °出說明θ與圖不所涵蓋之精神時,均應在 内,合予陳明。 I /3之靶圍 綜上所述,本發明具有結構簡化,製作容易便宜可Page 10 1247928 V. INSTRUCTIONS (6) Consideration must be given to the coupled coupling; otherwise the first waveguide component is not. The equation of the coupler can be expressed as: = + sink 21 t (Ul) small 2 + 1 which (a '2AZ) 々 1 + into 21 [- do 2 + A) Z] forbear 2 Pu = / [12exp [z(ft -+ +,·[12®Φ[-,(Α +Α)ζ]^ι + ίΧΐ2®Φ(-(10)22〇^^ = -iKx, &φ {αβιζ)Αι - iK2l ©φ [ί{β2 + ft )ζ]Α2 - iKx ΧΒΧ - iK2X exp [- ι{β2 - ^ )z]^2 = -^i2€3φ[ι(Α + )52)z]4 -iK22 exp (ί2β2ζ Α2 - ϊΧ12 exp[- ί(βχ - β2)ζ]^ -/a: 22^2 is illustrated in a preferred embodiment of the present invention, as shown in the fifth figure, let L be the length of the waveguide, start The condition is 4(8)(1)=〇, and the modes on the 7th and 3L pieces (32)(31) are modal p and modal β respectively, and the combination coefficient is that it has a close relationship with the disturbance coefficient Δ. The coupling coefficient is ~(2)=f £ Δεν〆(3)' (JC) The method of the present invention still utilizes the equivalent refractive index, and the equivalent refractive index results obtained by the two-dimensional and three-beam propagation methods are only about 0122% different. "After the simulation, the two-dimensional beam propagation method is used. If you want to be more refined, you can multiply the length of the splitter obtained by the simulation by the calibration parameter of i.0012207. When the liquid crystal is subjected to an applied electric field, it is easily changed by the polarizability, and the coupler waveguide can be adjusted to achieve the selected wavelength. Η羊改1247928 V. Invention description (7) The fourth figure is a negative type Schematic diagram of the refractive index ellipsoid of a single optical axis crystal, S is the incident light direction, assuming that the liquid crystal is rotated by the applied electric field, the equivalent refractive index is ne{e) - τ - yjn / co ^ e + nj1 sin2e , For the refractive index of ordinary ray, Ile refers to the refractive index of extraordinary ray. Please refer to the fifth figure for a schematic diagram of the operation of the embodiment of the present invention. Table 1. When the modality enters the second waveguide element (31) (WG Π ) without grating, the penetration strength in length L is Τ1 = 2·6798*10-3, Τ2 = 9·2569*1 0 -5, and the reflection intensity is 1Π=5·1598*10-2, R2 = 9.4562*10-1. The component is completely unbiased, ie the refractive index of the liquid crystal is 1.485, and its spectrum is as shown in the sixth figure. County test 7 (10) can take the first strong wave length of the second wave in the first wave of the guide element (32) (WGI), that is, R2 = 0.9471. When the voltage is controlled When the refractive index of the liquid crystal is 1 485 1497, there is still good strength, and the operation frequency control is 32 5 ± 8 GHz. The wavelength of the multiplexer of the embodiment of the present invention can be adjusted between 1 549.15 and 1551. Therefore, the structure of the present invention is simplified, and it has the effect of being easy to carry out, inexpensive, and integrable. The above description is a preferred embodiment of the present invention, and the change in the concept of the present invention is not affected by the function of θ and the spirit not covered by the figure. Within, it is given to Chen Ming. The target circumference of I / 3 In summary, the invention has a simplified structure and is easy to manufacture.

12479281247928

第13頁 1247928 圖式簡單說明 ------ (一)圖式部份: 第一圖係本發明結構截面示圖 第二圖係本發明實施例結構分解斷面示意圖。 第三圖係本發明實施例之模態示意圖。 第四圖係本發明折射率橢球示意圖。 第五圖係本發明實施例操作及參數示意圖。 第六圖係本發明實施例液晶折射率為丨.485所測得之頻譜 種實施例之設計參數值 π件 表一:為本發明 (二)圖號部份 (ίο)基板 (30)波導元件組 (3 1 0 )(320 )光柵 (50)(51)電極層 (2 0 )液晶層 (31)(32)波導_ (40)隔離層 (60)隔離子Page 13 1247928 Brief Description of the Drawings ------ (1) Schematic Part: The first drawing is a sectional view of the structure of the present invention. The second drawing is a schematic sectional view of the structure of the embodiment of the present invention. The third figure is a schematic diagram of a modality of an embodiment of the present invention. The fourth figure is a schematic diagram of the refractive index ellipsoid of the present invention. The fifth figure is a schematic diagram of the operation and parameters of the embodiment of the present invention. The sixth figure is a design parameter value of the embodiment of the spectrum of the liquid crystal having the refractive index of the liquid crystal of 实施.485 according to the embodiment of the present invention. π. Table 1 is a waveguide of the substrate (30) of the invention (2) Component group (3 1 0 ) (320) grating (50) (51) electrode layer (20) liquid crystal layer (31) (32) waveguide _ (40) isolation layer (60) spacer

Claims (1)

♦(· UJ, ^ 1封7§28日修沒)正本 直正 - — 案號船ΙΟ,Τ I-六、申請專利範圍 1 · 一種可調式液晶積體光學元件,可應用於濾波器、 耦合器以及光補/取多工器,其係包含有: 一基板; 一用以調變作為主動覆層的液晶層; 一波導元件組,包含有第一波導元件與一第二波導元 件,該第一波導元件具有光柵,且該第一波導元件與該第 二波導元件呈脊狀延伸穿越該液晶層; 一隔離層,用以與該基板相配合上下夾住該液晶#· 及 曰曰θ ’ φ 兩個用以連接電源以產生電壓之電極層,主要分別設 置該液晶層外作為夾層或是該隔離層與該基板外作為失 層。 一 2·如申請專利範圍第1項所述之可調式液晶積體光學 疋件’其中,該第二波導元件具有光柵。 子 一 3·如申請專利範圍第1項所述之可調式液晶積體光學 疋=,其中,該兩個用以連接電源以產生電壓之電極層, ^。電極層設在基板底面,另一電極層設在該隔離層頂 亓杜4. t申請專利範圍第1項所述之可調式液晶積體光學 件,其中,該隔離層外側設有隔離子(spacer)。 元件5· ΐ I清專利範圍第1項所述之可調式液晶積體光學 疋件’其中,該基板可為半導體。 元件6: ΐ!請專利範圍第1項所述之可調式液晶積體光學 疋件,其中,該基板可為金屬。 第15頁 1247928 t 號 93103136 Λ_η 曰 ,六、申請專利範圍 ---- 元件7,.;申中圍第1項所述之可調式液晶積體光學 再中,該基板可為無機晶體。 元件8,二請:=圍第1項所述之可調式液晶積體光學 具中,該基板可為石英。 元件9,m:範圍第1項所述之可調式液晶積體光學 几什,其中,該基板可為玻璃。 元件10·Λ申\專其利把範圍第1項所述之可調式液晶積體光學 Π I由^板可為高分子材料(Polymer)製成。 元件,盆°由^專★利乾圍第1項所述之可調式液晶積體光學 八 ”玄第一、第二波導元件可為半導體製成。 元件Λ申請專利範圍第1項所述之可調式液晶積體光學 八 忒第一、第二波導兀件可為金屬製成。 元株,甘Υ ^專利範圍第1項所述之可調式液晶積體光學 1 4 ,忒第一、第二波導元件可為無機晶體製成。 开杜Λ請專利範圍第1項所述之可調式液晶積體光學 ,八中,該第一、第二波導元件可為介電質製成。 15·如中請專利範圍第丨項所述之可調式液晶積體光學 广^ 、中,該第一、第二波導元件可為高分子材料 (polymer)製成。 16·如申請專利範圍第丨項所述之可調式積體光學元 件’其中’該電極層為可形成電極之材料製成。 1 7·如申請專利範圍第1 6項所述之可調式積體光學元 件’其中’該電極層由氧化銦錫透明電極(IT〇)玻璃製 成0♦(·································································································· And a light complementing/taking multiplexer comprising: a substrate; a liquid crystal layer for modulating the active cladding; a waveguide element group including the first waveguide component and a second waveguide component, The first waveguide element has a grating, and the first waveguide element and the second waveguide element extend in a ridge shape through the liquid crystal layer; an isolation layer is configured to cooperate with the substrate to sandwich the liquid crystal #· and 曰曰θ ' φ Two electrode layers for connecting a power source to generate a voltage, which are mainly disposed outside the liquid crystal layer as an interlayer or the isolation layer and the substrate as a loss layer. A tunable liquid crystal integrated optical element as described in claim 1, wherein the second waveguide element has a grating. The tunable liquid crystal integrated optical body 疋=, wherein the two electrode layers for connecting a power source to generate a voltage, ^. The electrode layer is disposed on the bottom surface of the substrate, and the other electrode layer is disposed on the side of the isolation layer. The adjustable liquid crystal integrated optical component described in claim 1 is provided with a spacer outside the isolation layer ( Spacer). </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; Page 15 1247928 t No. 93103136 Λ_η 曰 , VI. Patent scope ---- Element 7,.; Adjustable liquid crystal integrated optical as described in Item 1 of Shen Zhongwei. Further, the substrate may be an inorganic crystal. Element 8, two please: = In the adjustable liquid crystal integrated optical device according to Item 1, the substrate may be quartz. Element 9, m: The tunable liquid crystal integrated optical device of the above item 1, wherein the substrate is glass. Element 10·Λ申\Special use of the adjustable liquid crystal integrated optical body described in the first item can be made of polymer material (Polymer). The component, the basin is made of a tunable liquid crystal integrated optical body as described in Item 1 of the above-mentioned article. The second and second waveguide elements can be made of a semiconductor. The adjustable liquid crystal integrated optical gossip first and second waveguide elements can be made of metal. Yuanzhu, Ganzi ^ The adjustable liquid crystal integrated optical body described in the first item of the patent range 1 4 , 忒 first, The two waveguide elements may be made of an inorganic crystal. The tunable liquid crystal integrated optics described in the first item of the patent scope, in the eighth, the first and second waveguide elements may be made of a dielectric material. The first and second waveguide elements may be made of a polymer material, as described in the above-mentioned patent scope. The first and second waveguide elements may be made of a polymer material. The adjustable integrated optical element 'where the electrode layer is made of a material capable of forming an electrode. 1 7 · The adjustable integrated optical element 'in the electrode layer' as described in claim 16 Made of indium tin oxide transparent electrode (IT〇) glass 1247928 案號 9310313R •六、申請專利範圍 曰 修正 1 8 ·如申請專利範圍第1項所述一 其中,該隔離層可由半導體製成Μ式積體先學兀 中如ϋ利範圍第1項所述之可調式積體光學元 、’違隔離層可由無機晶體製成。 =·如申請專利範圍第1項所述之可調式積體光學元 /、中’該隔離層可由介電質製成。 1·如申请專利範圍第1項所述之可調式積體光學元 22中,該隔離層可由高分子材料(polymer)製成。 其·如申請專利範圍第1項所述之可調式積體光學元 • \中”亥基板之厚度為15 /zm,折射率(Refractive index疋ι·49 ;該第一波導元件之厚度為* ,寬度為 3 “111 ’ 折射率(Refractive index)為1· 51,調頻(Index modulation )為5·5χ 10-3 ;該第二波導元件之厚度為 4 //m ’ 寬度為5 /zm,折射率(Refractive index)為1.52 ; 該隔離層之厚度為10 //m,折射率為1.3。 件 件 件 件 件1247928 Case No. 9310313R • VI. Scope of Application for Patent 曰 Amendment 1 8 • As described in item 1 of the scope of application for patents, the isolation layer can be made of semiconductors and can be learned first. The adjustable integrated optical element, the 'isolation layer' can be made of inorganic crystal. = The tunable integrated optical element /, wherein the isolation layer is made of a dielectric material as described in claim 1. 1. In the tunable integrated optical element 22 of claim 1, the spacer layer may be made of a polymer material. The adjustable integrated optical element as described in claim 1 of the patent application scope has a thickness of 15 /zm and a refractive index (Refractive index 疋ι·49; the thickness of the first waveguide element is * The width is 3 "111', the refractive index is 1.51, the index modulation is 5·5χ 10-3; the thickness of the second waveguide element is 4 //m 'the width is 5 /zm, The refractive index is 1.52; the thickness of the spacer is 10 //m and the refractive index is 1.3. 第17頁Page 17
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US9791696B2 (en) 2015-11-10 2017-10-17 Microsoft Technology Licensing, Llc Waveguide gratings to improve intensity distributions
US9915825B2 (en) 2015-11-10 2018-03-13 Microsoft Technology Licensing, Llc Waveguides with embedded components to improve intensity distributions
US10359627B2 (en) 2015-11-10 2019-07-23 Microsoft Technology Licensing, Llc Waveguide coatings or substrates to improve intensity distributions having adjacent planar optical component separate from an input, output, or intermediate coupler

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Publication number Priority date Publication date Assignee Title
US9791696B2 (en) 2015-11-10 2017-10-17 Microsoft Technology Licensing, Llc Waveguide gratings to improve intensity distributions
US9915825B2 (en) 2015-11-10 2018-03-13 Microsoft Technology Licensing, Llc Waveguides with embedded components to improve intensity distributions
US10359627B2 (en) 2015-11-10 2019-07-23 Microsoft Technology Licensing, Llc Waveguide coatings or substrates to improve intensity distributions having adjacent planar optical component separate from an input, output, or intermediate coupler

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