TWI246141B - Wafer package and test method - Google Patents

Wafer package and test method Download PDF

Info

Publication number
TWI246141B
TWI246141B TW93124244A TW93124244A TWI246141B TW I246141 B TWI246141 B TW I246141B TW 93124244 A TW93124244 A TW 93124244A TW 93124244 A TW93124244 A TW 93124244A TW I246141 B TWI246141 B TW I246141B
Authority
TW
Taiwan
Prior art keywords
equipment
transistors
testing
lead frame
cutting
Prior art date
Application number
TW93124244A
Other languages
Chinese (zh)
Other versions
TW200425375A (en
Inventor
Jung-Shing Tz
Shr-Yi Jang
Original Assignee
Domintech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Domintech Co Ltd filed Critical Domintech Co Ltd
Priority to TW93124244A priority Critical patent/TWI246141B/en
Publication of TW200425375A publication Critical patent/TW200425375A/en
Application granted granted Critical
Publication of TWI246141B publication Critical patent/TWI246141B/en

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A wafer package and test method is provided. The procedures include: (A) Package: fix plural diced chips on an un-split lead frame and then execute the wire bonding and package glue covering steps to make plural transistors connecting each other. (B) Pre-cut: remove the conduction part or redundant portion of the lead frame to let the transistor able to be inspected without individual split. (C) Test: send all un-split transistors to the inspection equipment to execute testing and inspection and find defect transistors. (D) Generation of test file: automatically (by inspection equipment) or manually record the quality and performance of each transistor. (E) Mark: mark product codes, brand and production site on the said package body surface. (F) Cut: use cutter to split the lead frame to let the transistors be individual state. Pick the defect or poor quality finished goods to achieve increasing of QC rate, cost down and gain of in time adjustment of the package equipment to reduce the defect rate.

Description

1246141 五、發明說明(1) 【發明所屬之技術領域】 本發明係有關一種晶圓封 晶圓封裝完成 晶體進行檢測 【先前技術】 按習知的 打線、封 後可簡易實施自 之晶圓封裝測試 曰曰 成可供使用之 程可見,其在 晶體之封膠體 良等情形,其 費。其次,習 架切割分離後 電晶體已成散 以人工作業抽 之產品;反之 狀態,勢必浪 對於檢測速率 上述習知的抽 此只能發現該 確的測知未切 有效的對其封 ,將在無預知 本案創作 晶圓封裝 膠、印字 電晶體或 進行電晶 表面,因 所淘汰之 知的檢測 (即切單) 狀顆粒’ 樣檢測該 ,如欲對 費許多時 之提升及 樣檢測作 批電晶體 單前的那 裝設備、 的情況下 人鑑於上 製程, 、切單 微處理 體之品 此如檢 電晶體 程序, ,才針 因此很 電晶體 每一顆 間在拿 品管成 業,僅 成品之 幾顆電 模具或 生產許 述習知 裝測試 動化檢 方法設 依序係 及檢測 器,惟 質檢測 測後發 成品’ 係在將 對各電 難 ,若此 電晶體 取及置 本降低 對散離 製程有 晶體經 程序進 多瑕疵 晶圓封 方法,特別係有關於 測,並可全面對各電 計0 包括 等主 由上 前, 現有 將使 連接 晶體 進行 不易 檢測 放之 ,究 的數 瑕疵 常發 行調 產品 裝檢 有晶圓 要步驟 揭的習 已預先 瑕疵;品 印字程 各電晶 進行檢 檢測工 挑出真 ,因其 人工作 屬不利 電晶體 問題, 生瑕疵 校、修 切割 ,藉 知封 印字 或品 序顯 體之 測, 作, 正有 已呈 業動 。另 抽取 並不 ,故 正或 、焊 此製 裝製 於各 質不 得浪 導線 由於 僅能 瑕疵 散離 作, 者, ,因 能精 無法 更換 測製程所衍生的1246141 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a wafer sealing wafer packaging completed crystal inspection [prior art] Wafer packaging can be easily implemented after wiring and sealing according to the conventional It can be seen that the test is ready for use, and its cost is good in the case of good sealing colloid of the crystal. Secondly, after the cutting and cutting of the truss frame, the transistor has been scattered into the product drawn by manual operation; otherwise, it is bound to detect the rate of the above-mentioned conventional pumping, which can only find that the actual measurement has not been effectively sealed. In the case of unpredictable creation of wafer packaging adhesives, printing transistors or the surface of the transistor, due to the elimination of known testing (ie, cutting of single-shaped particles), this kind of testing should be performed. If you want to take a lot of time to improve and sample testing In the case of the equipment installed before the batch of transistor, in view of the above process, the product of cutting a single micro-processor is like the procedure of the transistor inspection, so it is very important that every transistor is held in quality control. Only a few electric molds of the finished product or the production and testing method are equipped with sequential systems and detectors, but the finished product is sent after quality inspection and testing. It is difficult for all electricians. The method of reducing the wafer sealing process with multiple defects in the dispersion process is especially related to the measurement, and it can comprehensively test all electric meters. Including the main cause, the existing will make the connection crystal It is not easy to detect and put it into practice. The few defects that are often researched and released are the defects that have to be removed in the process of product inspection and inspection. The defects have been pre-determined; the transistors on the product printing process have checked the truth, because their work is unfavorable. Crystal problems, flaws correction, cutting and cutting, by knowing the seal or the character sequence of the display test, it is already working. In addition, the extraction is not. Therefore, this system is manufactured by using OR or welding. The wires can only be scattered due to defects.

第5頁 1246141 五、發明說明(2) 各項問題及 詣潛心研究 法。 【發明内容 本發明 惟指有關於 達成實施自 成本,並可 統計檢測貢 封裝設備進 依上述 有下列步驟 割分離之導 裝程序,以 架的導電部 且可進行檢 送於檢測設 D)產生測試 體之品質及 品形號、品 線架切開, 窥或品質不 ,並可及時 【實施方式 不足,乃亟思加以改良創新,並經多年苦心孤 後,終於成功研發完成本發明晶圓封裝測試方 主要目的,係在提供一種晶圓封裝測試方法, 晶圓封裝完成後之檢測作業程序設計,藉此可 動化檢測作業,以提升其品管速率,降低品管 全面的對各電晶體進行檢測,以擷取、儲存及 料,進而獲致可發見瑕疵發生源之效果,以對 行維護,將低產品瑕疵發生率。 目的,本發明之封裝製造方法實施内容係包括 :(A)封裝:將切割的數晶片分別固設於未切 線架上,並實施有打線及外圍封膠體包覆之封 形成數電晶體相連接狀態;(B)預切:將導線 分或多餘部分切除,形成各電晶體未獨立分離 測狀態;(C)測試:將全部未分離之電晶體輸 備進行測試及檢驗,以發見瑕疵的電晶體;( 檔案:由檢測設備自動記錄或人工記錄各電晶 效能;(E )印字:於上述封膠體表面印設有產 牌及產地等字樣;(F)切單:利用切割機將導 使各電晶體形成獨立狀態,並於切割時抽出瑕 良之成品;藉此達成品管速率提升、成本降低 調校封裝設備以降低瑕疵發生率之效益。 ]Page 5 1246141 V. Description of the invention (2) Various issues and research methods. [Summary of the invention The present invention only refers to the implementation of self-cost, and can statistically test the packaging equipment into the guide assembly procedure described below with the following steps, using the conductive part of the rack and can be sent to the detection device D) The quality of the test body, the shape number, the product line frame are cut open, the quality is not good, and it can be timely. [The implementation is insufficient, but it is anxious to improve and innovate. After years of hard work, it has finally successfully developed the wafer package of the present invention. The main purpose of the tester is to provide a wafer packaging test method. After the wafer packaging is completed, the inspection operation program is designed to mobilize the inspection operation to increase the quality control rate and reduce the quality control of all transistors. Inspection to capture, store and material, and then obtain the effect of the source of the visible defects, to maintain the line, and to reduce the incidence of product defects. Purpose, the implementation content of the package manufacturing method of the present invention includes: (A) Packaging: The cut digital chips are respectively fixed on an uncut wire frame, and a digital transistor is connected with a wire and a peripheral encapsulation to form a digital transistor connection. State; (B) pre-cut: cut off the wires or extra parts to form a state where the transistors are not separated and tested; (C) test: test and inspect all unseparated transistor devices to detect defects Transistor; (File: Automatic recording or manual recording of the effectiveness of each transistor by testing equipment; (E) Printing: printed on the surface of the above-mentioned sealing colloid with the production brand and origin; etc .; (F) cutting: using a cutting machine to guide Make each transistor into an independent state, and draw out the flawed finished product during cutting; thereby achieving the benefit of increasing the quality control rate and reducing the cost of adjusting packaging equipment to reduce the incidence of defects.]

第6頁 1246141 五、發明說明(3) · 茲依附圖實施例將本發明之製造方法、步驟特徵及其 他之作用、目的詳細說明如下·· 請參考第一圖所示,本發明所為『晶圓封裝測試方法 』,係包括下列步驟: (A) 封裝:請參考第二圖所示,係為將切割後的複數 晶片1分別固設於未切割分離之導線架2上(該導線架2 為習知物品,詳細結構不另贅述),並實施有數金屬線3 分別連接於晶片1其訊號接點及導線架2之各引腳2 1間( 打線作業),且於晶片1外圍或該複數金屬線3設置部位 設有封膠體4包覆之封裝程序,藉以形成數電晶體1 0以導# 線架2整齊相連接狀態; (B) 預切:請參考第三圖所示,係以自動化輸送設備 3 0或人工方式,將全部未分離之電晶體1 0集體輸送於切割 設備或衝剪設備處,藉此將導線架2的特定導電部分(例 如選定之某幾支引腳2 1 )或多餘的材料部分2 2切除,以形 成各電晶體1 0仍藉該導線架2相連,而呈未獨立分離且可 進行檢測狀態;其中,該自動化輸送設備3 0可為輸送帶裝 置或機械手臂裝置等; (C )測試:以自動化輸送設備3 0或人工方式,將全部 未分離之電晶體1 0集體輸送於檢測設備處進行檢驗及測 ® 試,以發見並區別瑕疵的、品質不良的或效率較低的電晶 體;其中,該自動化輸送設備30亦可為輸送帶裝置或機械 手臂裝置等;而該檢測設備,可包含探針測試儀器以測試 使用效果、X光檢驗機以檢視封膠體4内部之金屬線3連Page 61246141 V. Description of the invention (3) · The manufacturing method, step features, and other functions and purposes of the present invention are described in detail below according to the embodiments of the drawings. Please refer to the first figure. "Circular package test method" includes the following steps: (A) Packaging: Please refer to the second figure, which is to fix the cut multiple wafers 1 to the uncut and separated lead frame 2 (the lead frame 2 For the sake of acquaintance, the detailed structure is not repeated), and several metal wires 3 are connected to the signal contacts of the chip 1 and the pins 21 of the lead frame 2 (wiring operation), and are located on the periphery of the chip 1 or the A plurality of metal wires 3 are provided with an encapsulation procedure covered by a sealing compound 4 to form a digital transistor 10 to guide # the wire frame 2 neatly connected; (B) Pre-cutting: please refer to the third figure. All the untransformed transistors 10 are collectively transported to the cutting equipment or punching and shearing equipment by automated conveying equipment 30 or manually, so as to transfer specific conductive parts of the lead frame 2 (such as selected pins 2) 1) or excess material part 2 2 In addition, in order to form each transistor 10, it is still connected by the lead frame 2, but it is not independently separated and can be detected; wherein the automatic conveying device 30 can be a conveyor belt device or a robot arm device, etc .; (C) Testing: Collect all unseparated transistors 10 collectively by automated conveying equipment 30 or manually at the testing facility for inspection and testing ® to discover and distinguish defects, poor quality, or low efficiency Transistor; among them, the automatic conveying device 30 may also be a conveyor belt device or a robot arm device; and the detection device may include a probe tester to test the use effect, an X-ray inspection machine to inspect the metal inside the sealing compound 4 3 lines

第7頁 1246141Page 7 1246141

接效果,以及其他如超音波掃瞄器、電子顯微鏡、溫度循 環裝置及壓力鍋等; (D)產生測試檔案··由上揭檢測設備自動記錄或人工 記錄各電晶體1〇之封裝品質及使用效能;且其中該自動記 錄包括可為預存的軟體進行數位化資料比對及儲存、磁帶 !存或、、’氏:印製儲存等方式達成;而該人工記錄係可為品 管作業人員操作將檢測資料轉成數位化檔案、磁帶儲 案或紙卡檔案等; @ (E)印字:以自動化輸送設備3〇或人工方式,將全部 未分離之電晶體1 〇集體輸送於印字設備處,並於上述封膠 體4之表面印設有產品形號、品牌及產地等字樣之標示〔 其中,f自動化輸送設備3〇亦係可為輸送帶裝置或機械手 臂I置等,而該印字設備,包含可為已知的印刷式設備、 轉印式設備或雷射刻印設備等; (F )切單:以自動化輸送設備3 〇或人工方式,將全部 未分離之電晶體1 〇再輸送至切割設備或衝剪設備處,利用 該切割設備或衝剪設備將各導線架2切開,使各電晶體】〇 形成獨立單顆狀態,並於切割時依據上述檢測設備=檢測 資料抽出瑕疲或品質不良之電晶體,藉此保留封裝良好、 品質效果較佳的電晶體成品; 藉本發明晶圓封裝測試方法之上述實施程序、步驟及 方式,因係具有預切程序(B),故可保留數電晶體1〇形成 未散離成單顆狀態,以供方便以自動化輸送設備3 〇或人工 方式輸送’並以其他上揭設備進行後續之檢測程序(C)及And other effects such as ultrasonic scanners, electron microscopes, temperature cycling devices, pressure cookers, etc .; (D) Generate test files. · Automatically record or manually record the packaging quality and use of each transistor 10 by the test equipment. Performance; and where the automatic recording includes digital data comparison and storage for pre-stored software, tape! Storage or storage, '': printed storage, etc .; and the manual recording can be operated by quality control operators Transform the test data into digital files, tape storage or paper card files, etc .; @ (E) Printing: collectively transport all unseparated transistors 10 to the printing equipment by automated conveying equipment 30 or manually, The surface of the above-mentioned sealing compound 4 is printed with the product shape number, brand, and place of origin. [Among them, the f automatic conveying equipment 30 can also be a conveyor belt device or a robot arm, etc., and the printing equipment, Contains the known printing equipment, transfer equipment or laser marking equipment, etc .; (F) Cut order: Automated conveying equipment 30 or manual, all unseparated The crystal 1 〇 is then transported to the cutting equipment or punching and shearing equipment, using this cutting equipment or punching and shearing equipment to cut each lead frame 2 so that each transistor] 〇 form an independent single state, and when cutting according to the above detection equipment = Defective or poor quality transistors are extracted from the test data, so that the finished transistor with good packaging and better quality is retained; the above-mentioned implementation procedures, steps and methods of the wafer packaging test method of the present invention have pre-cutting procedures (B), so the digital transistor 10 can be kept in a non-scattered single state for convenient transportation by automated conveying equipment 30 or manually, and follow-up testing procedures with other open equipment (C) and

1246141 五、發明說明(5) ------ -- 印卞耘序(E ),故可獲致輸送移動快速、可方便全面檢測 及方便2字等效果,以降低其封裝檢測之成本。 其_人’因本發明係在該檢測程序(c )之後再進行印字 私序(E)、,因此該等印字設備係可依據檢測程序(C)後所產 生,測j杧案紅序(]))之資料,僅選定於良品的電晶體上 進仃印字,或依據不同品質印設不同形號,藉此排除印設 其中瑕疵而預計將淘汰的電晶體,故能夠藉此提升實際印 字速率’防止不必要的印字時間及材料浪費。1246141 V. Description of the invention (5) -------The printing order (E) is printed, so it can achieve the effects of fast conveying movement, convenient comprehensive inspection, and convenient 2 characters to reduce the cost of packaging inspection. Its _person 'is because the present invention performs the private printing sequence (E) after the detection procedure (c), so the printing equipment can be generated according to the detection procedure (C), and the red sequence ( ])) Data, only selected to print on good quality transistors, or to print different shapes according to different qualities, thereby eliminating the defects in the printing and expected to be eliminated, so it can improve the actual printing Speed 'prevents unnecessary printing time and material waste.

另者,由於本發明晶圓封裝測試方法,係以該預切程 序(B)保留數電晶體1 0呈未散離為單顆狀態,因此在檢測 程序(C)之後,係可依據產生測試檔案程序(D)之比對資料 或統計資料等,及時發現封裝設備或預切設備(可為與切 單設備相同)造成那些區域或那幾顆電晶體經常發生封裝 瑕症或切割瑕滅’故此依據該等資料找出產品不良原因, 針對封裝設備戒預切設備進行調整、維護或更換,以改善 其封裝製程,益藉此達成知1南良品率之效益。In addition, since the wafer packaging test method of the present invention uses the pre-cutting procedure (B) to keep the number of transistors 10 in a single state, so after the inspection procedure (C), the test file can be generated according to Procedure (D) comparison data or statistical data, etc., timely found that packaging equipment or pre-cut equipment (which can be the same as the single-cut equipment) caused those areas or those transistors often have packaging defects or cutting defects. Find out the cause of the product defect based on these data, and adjust, maintain or replace the packaging equipment or pre-cut equipment to improve its packaging process, so as to achieve the benefits of knowing the quality of the product.

綜上所述,本發明『晶圓封裝測試方法』,已確呈杏 用性與創作性,手段之運用亦出於新穎無M,且功效:二 計目的誠然符合,已稱合理進步至明。為在匕,依法提出、: 明專利申請,惟懇請釣局惠予詳審,並賜准專利為禱, 至感德便。 、To sum up, the "wafer package test method" of the present invention has indeed been applied and creative, and the use of the method is also novel and free of M, and the effect: the two purposes are indeed consistent, and it has been said that the progress has been reasonable to . In order to make a dagger, according to the law, a patent application is filed, but I would like to ask the Diaoyu Bureau for detailed review and grant the patent as a prayer. ,

1246141 圖式簡單說明 【圖式簡單說明】 第一圖為本發明晶圓封裝測試方法之實施例系統圖 第二圖為本發明晶圓封裝完成狀態之示意圖。 第三圖為本發明電晶體集體輸送之示意圖。 【主要元件符號說明】 (A) 封裝 (B) 預切 (C) 測試 (D) 產生測試檔案 (E) 印字; (F) 切單; 電晶體 10 晶片 1 導線架 2 引腳 21 材料部分2 2 金屬線 3 封膠體 4 輸送設備3 01246141 Brief description of the drawings [Simplified description of the drawings] The first diagram is a system diagram of an embodiment of a wafer packaging test method of the present invention. The second diagram is a schematic diagram of a wafer packaging completion state of the present invention. The third figure is a schematic diagram of collective transportation of transistors according to the present invention. [Description of main component symbols] (A) Package (B) Precut (C) Test (D) Generate test file (E) Print; (F) Cut order; Transistor 10 Chip 1 Lead frame 2 Pin 21 Material part 2 2 Metal wire 3 Sealing gel 4 Conveying equipment 3 0

第10頁Page 10

Claims (1)

1246141 六、申請專利範圍 1 、一種晶圓封裝測試方法,係包括: (A) 封裝:將切割的數晶片分別固設於未切割分 離之導線架上,並實施有打線及外圍封膠體包覆之封 裝程序,以形成數電晶體集體相連接狀態; (B) 預切:將未分離之數電晶體集體輸送於切割 設備或衝剪設備處,將導線架的特定部分切除,以形 成各電晶體仍藉導線架相連呈未獨立分離且可進行檢 測狀態; (C) 測試·將未分離之數電晶體集體輸送於檢測 設備處進行檢驗及測試,發見瑕疵的電晶體; (D) 產生測試檔案:經由檢測設備記錄各電晶體 之品質, (E) 印字:將未分離之數電晶體集體輸送於印字 設備處,於封膠體表面印設有標示; (F) 切單:將未分離之電晶體集體再輸送至切割 設備或衝剪設備處,將各導線架切開使各電晶體形成 獨立單顆狀態,並於切割時抽出瑕疵不良之電晶體。 2 、如申請專利範圍第1項所述之晶圓封裝測試方法,其 中,該數電晶體集體輸送方式可為自動化輸送設備或 人工方式;且自動化輸送設備包含輸送帶裝置或機械 手臂裝置。 3 、如申請專利範圍第1項所述之晶圓封裝測試方法,其 中,該檢測設備包含探針測試儀器、X光檢驗機,以 及其他如超音波掃瞄器、電子顯微鏡、溫度循環裝置1246141 VI. Application for Patent Scope 1. A method for testing wafer packaging, including: (A) Packaging: The cut wafers are respectively fixed on uncut and separated lead frames, and wire bonding and peripheral encapsulation are used for encapsulation. Packaging process to form a collective connection state of digital transistors; (B) Pre-cutting: transporting unseparated digital transistors to cutting equipment or punching and shearing equipment collectively, cutting off a specific part of the lead frame to form the individual transistors The crystals are still connected by a lead frame and are not separated independently and can be tested; (C) Testing · The unseparated transistors are collectively transported to the testing equipment for inspection and testing. Defective transistors are found; (D) Generated Test file: Record the quality of each transistor through the testing equipment, (E) Printing: collectively transport the unseparated number of transistors to the printing equipment, and print a mark on the surface of the sealing colloid; (F) Cut: separate the unseparated The transistors are collectively transported to the cutting equipment or punching and shearing equipment, and each lead frame is cut to make each transistor form an independent single state, and the defective transistors are extracted during cutting. body. 2. The wafer packaging test method as described in item 1 of the scope of patent application, wherein the collective transportation of the digital transistors can be automated or manual; and the automated conveying equipment includes a conveyor belt device or a robot arm device. 3. The wafer packaging test method described in item 1 of the scope of patent application, wherein the testing equipment includes a probe tester, an X-ray inspection machine, and other devices such as an ultrasonic scanner, an electron microscope, and a temperature cycling device 第11頁 1246141 六 4 申請專利範圍 及壓力鍋其中至少一種。 、如申請專利範圍第1項所述之晶圓封裝測試方法,其 中,該檢測設備記錄包括自動記錄及人工記錄方式。 、如申請專利範圍第1項所述之晶圓封裝測試方法,其 中,該印字設備包含可為印刷式設備、轉印式設備或 雷射刻印設備。 #Page 11 1246141 Six 4 At least one of the scope of patent application and pressure cooker. The wafer packaging test method as described in item 1 of the scope of patent application, wherein the inspection equipment records include automatic recording and manual recording. The wafer packaging test method according to item 1 of the scope of patent application, wherein the printing equipment includes a printing equipment, a transfer equipment or a laser marking equipment. # 第12頁Page 12
TW93124244A 2004-08-12 2004-08-12 Wafer package and test method TWI246141B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93124244A TWI246141B (en) 2004-08-12 2004-08-12 Wafer package and test method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93124244A TWI246141B (en) 2004-08-12 2004-08-12 Wafer package and test method

Publications (2)

Publication Number Publication Date
TW200425375A TW200425375A (en) 2004-11-16
TWI246141B true TWI246141B (en) 2005-12-21

Family

ID=37191333

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93124244A TWI246141B (en) 2004-08-12 2004-08-12 Wafer package and test method

Country Status (1)

Country Link
TW (1) TWI246141B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103311143B (en) * 2012-03-06 2016-04-13 深圳赛意法微电子有限公司 The lead frame of chip package testing apparatus and use thereof

Also Published As

Publication number Publication date
TW200425375A (en) 2004-11-16

Similar Documents

Publication Publication Date Title
TW200817701A (en) Method and apparatus for inspection of wafer and semiconductor device
JP2003258067A (en) Dicing method, inspecting method for integrated circuit chip, and substrate-retaining apparatus
CN104752252A (en) Crystal back defect representation method
JP4830772B2 (en) Inspection method of semiconductor chip
TWI264076B (en) Method for processing multiple semiconductor devices for test
JP5169509B2 (en) Defect detection method, defect detection system, and light emitting device manufacturing method
TW201725390A (en) Defect inspection apparatus
CN102683166B (en) Packaged-chip detecting and classifying device
TWI246141B (en) Wafer package and test method
CN105510523B (en) A kind of failure analysis method of transistor
US6448801B2 (en) Method and device for supporting flip chip circuitry in analysis
CN104966680A (en) TM-structured wafer semi-cut test method
CN108231619B (en) Detection method for power semiconductor chip
CN103700608B (en) Method and device for generating unqualified product map of semiconductor package
TW201926500A (en) Semiconductor die sorting and test handler system and method therefor
CN104297037A (en) Preparation method of TEM sample
TWM377691U (en) Wafer cleavage detection device
JP2668734B2 (en) Wire bonding method
TWI225675B (en) Apparatus and method of inspecting and sorting dies
CN104505337A (en) Irregular wafer thinning method
CN105448828B (en) Semiconductor process
CN115524260A (en) Method and device for testing packaging performance of IC (integrated circuit) card carrier tape and operation method
CN107895715A (en) Characterization processes after a kind of silicon chip Wafer Dicing
CN1175484C (en) Tester of chip without package
CN108091605A (en) A kind of method for reducing wafer and removing by mistake

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees