TWI245138B - Mounting and alignment structures for optical components - Google Patents

Abstract

Mounting and alignment structures for optical components allow optical components to be connected to an optical bench and then subsequently aligned, i.e., either passively or actively, in a manufacturing or subsequent calibration or recalibration, alignment or realignment processes. The structures comprise quasi-extrusion portions. This portion is ""quasi-extrusion"" in the sense that it has a substantially constant cross section in a z-axis direction as would be yielded in an extrusion manufacturing process. The structures further comprise at least one base, having a laterally-extending base surface, and an optical component interface. At least one armature connects the optical component interface with the base. In the preferred embodiment, the base surface is securable to an optical bench.

Description

1245138 A7 —______ B7 __ V. Description of Invention (ί) 1 Related Applications] This application declares the benefit of US Provisional Application No. 60 / 165,431, filed on the filing date of November 15, 1999, and is based on its entirety Coupling is a reference. At the same time, this application also declares the benefit of US Provisional Application No. 60 / 186,925, filed on the filing date of March 3, 2000, and is hereby incorporated by reference as a whole. [Background of the Invention] For semiconductor and / or MEMS (micro-electro-mechanical systems) based on optical system processes, component calibration is extremely important. According to the basic nature of light, it is required that when components are generated, transmitted and modified according to light, they must be accurately positioned relative to each other, especially in the environment of free-space optical systems, in order to facilitate electron optics or Operates properly and efficiently within an all-optical system. The proportional characteristics of semiconductors and MEMS even require sub-micron calibration accuracy. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page). We will consider coupling semiconductor diode lasers such as pump lasers to a single-mode fiber. Specific examples of fiber cores. Only the power coupled to the core of the fiber can be used to optically pump a subsequent gain fiber, such as a rare earth-doped fiber or a normal fiber, according to the Raman pumping rule. The correlation between the coupling effectiveness and the correct calibration results of both the laser output surface and the core is extremely high. Misaligned calibration results may result in partial or complete loss of signals transmitted through the optical system. In addition, this optical system will require mechanically strong fixation and 3 P-scale scales to apply Zhongguanjia Standard (CNS) A4 specifications (21G X 297 public love) " 1245138 B7

Member of Intellectual Property Bureau, Ministry of Economic Affairs X

V. Description of the invention (i) 'Calibration configuration. During the manufacturing process, the system is exposed to a wide range of temperatures, and the buyer's specifications also specify periodic tests on temperature. After delivery, the system is exposed to long-term temperature cycling and mechanical shock. Welding and laser scorch are two common fixing techniques. We can achieve the soldering of optical components by using the method of performing the calibration operation between the calibration element to be added and the platform or substrate to which it will be attached. The weld is then cured to "lock" to the calibration result. In some cases, an additional displacement is intentionally added to the calibration position before the weld is cured to compensate for subsequent calibration displacements caused by the shrinkage of the weld. In the case of laser burn, for example, the optical fiber is held with a clamp, and then the semiconductor laser is aligned and burned there. The fiber can then be further burned in the clamp to obtain a calibration result along another axis. The second sintering is usually used to compensate the calibration displacement caused by the sintering itself, but like the welding system, it cannot be or absolutely compensated. In addition, there are two main types of calibration strategies: active and passive. Usually in the passive calibration of optical components, the registration or calibration features are directly made on the component or on the component carrier and on the platform on which the component is to be fixed. Then use the calibration function to fix and attach these components directly to the platform. In the active calibration operation, optical signals are transmitted to these components and detected. Calibration operations can be performed based on transmission characteristics to achieve the highest possible performance level of the system. [Invention note] 4 'degree applies to China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) Order-------- line — 0

II 1245138 A7 B7 V. Description of the invention (5) (Please read the notes on the back before filling this page) The basic problem of traditional fixing and calibration technology is that they are not compatible with the ability to consistently produce high-quality products High-speed production process. Passive calibration jobs can be performed quickly, but problems often arise when it comes to producing high-performance products. In contrast, active calibration operations can be optimized for time to produce these high-performance devices. However, these procedures are generally slow. For example, in the case of laser burn, the fiber holder must be burned first. In addition, let the burner cool down and check the calibration results next. However, it is still necessary to perform subsequent incineration operations, and then perform incineration cooling and re-inspection steps. -丨 In addition, it is really difficult to deploy these traditional technologies when making optical systems with complex shapes and higher levels of functionality. For example, laser sintering can be successfully used to align fiber end points to a single laser diode chip, such as in a module smaller than 5 cm. However, it is hoped that more features such as filtering, multiplexing, demultiplexing, and / or switching can be integrated into a module of a similar size. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economics The present invention relates to fixing and alignment structures for optical elements, and more particularly to micro-optical elements having a size generally smaller than a millimeter. These structures are preferably compatible with all-optical, electro-optical, and motor-optical devices / subsystems / systems. These structures are used to connect optical elements to an optical circuit board or an optical table. These optical components include, for example, lasers or other active devices that provide higher levels of functionality, such as 疋 integrated laser / MEMS, which can modulate Fabry-Perot active devices. Furthermore, in other implementations, these optical components can be passive devices, such as beam splitters, passive (such as thin film) filters, mirrors, and 5 paper standards are applicable to Chinese national standards (CNS ) A4 specification (210 X 297 mm) Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs 1245138 A7 _____B7_______ V. Description of the invention (iV) Birefringent material, polarizer, crystal, rubidium and / or diffractive element. More specifically, the present invention is a universal fixing system that can connect optical components to an optical bench, and then perform production or subsequent calibration or calibration, calibration or recalibration operations. During the calibration, the calibration is performed passively or actively. Generally speaking, according to an aspect, the present invention is characterized by a fixing and alignment structure for an optical element. This structure usually contains a quasi-projection. This part is called "quasi-protrusion" because in the extrusion process, the other will produce a section with a generally constant cross section in the z-axis direction. However, the present invention is not limited to constructing the structure by such a burst operation. For example, in a preferred embodiment, the structures are fabricated using photolithography and metallization operations such as metal plating. According to the present invention, the quasi-projection portion includes at least one pedestal, which has a laterally pedestal surface, and an optical element interface. At least one tab will connect the optical element interface to the base. In a preferred embodiment, the surface of the base can be connected to an optical table. In another preferred embodiment, the surface of the base is welded, such as by welding at 80/20 gold / tin ratio or other fused gold ratio, thereby attaching to an optical table. However, in other embodiments, such as laser sintering, resin bonding, ultrasonic sintering, or other adhesion / casting methods may be used. In one embodiment, the surface of the base may further include calibration features adapted to match the alignment characteristics of the optical table. This passive calibration technology can be used to assist the initial positioning of the calibration structure on the optical table 6 -------! F 丨 (Please read the precautions on the back before filling this page) Order:-· Line · Meaning Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 1245138 A7 B7 V. Description of the invention (<) ° In the preferred embodiment, the optically detectable calibration feature or label is used to work. Structural positioning operations are performed on the stage. Depending on the implementation, one or two pedestals can be provided. In the double-pedestal configuration, the middle 'are usually located on each side of the shaft in the structure. In the preferred embodiment, the interface includes a frame for transmitting optical signals through the quasi-projection portion #. This can be used as an optical access feature to an optical component mounted on the interface of the optical component. In some embodiments, the 'optical signal is reflected from the optical element and transmitted back through the port. In other embodiments, the optical signal passes through the optical element such as a lens. In other embodiments, the interface configuration is set to an open jaw or U-lock valve. This configuration is suitable for fixing optical components such as optical fibers on a workbench. It is better to provide a grip to facilitate grasping and manipulating the calibration structure. In one embodiment, the grip is integrated on the optical element interface. In other embodiments, the provided grip is integrated at the connecting piece and / or integrated at the base. In the preferred embodiment, the tab contains at least one bend. Bend is usually a range of tabs with less constant cross section. It may be appropriate to provide at least two bends along the web. The bends are preferably separated by transverse sections of the web. The other bends of the structure are preferably separated by a plurality of vertical sections. The horizontal and vertical sections are provided to facilitate manipulation, and thus to facilitate subsequent follow-up of the two-dimensional xy plane with calibration along the X-axis and calibration along the y-axis. A4 specification (210 X 297 mm) (Please read the notes on the back before filling out this page); 0 Order --------- Line 丨 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1245138

V. Description of the invention (^) The structure of the structure depends on the structure i: the optical element depends on the lungs_quasi-operation. However, it is not necessary to use discrete bending. In other embodiments, the bending is configured in such a way that a piece bends across a range on the tab, and in fact, the tab itself can be used as a distributed bending. Generally speaking, according to another viewpoint, the present invention is also characterized by a cross section which is approximately constant on the xy-axis plane for fixing and calibrating the optical element. The sturdiness is much stronger than those in the Z axis direction. The structure contains at least one pedestal with a traverse base surface and an optical element interface. In the following, reference is made to the accompanying drawings to describe in detail the features of the present disclosure and other novel structural details and combinations of many parts, as well as other advantages, and to indicate them in the scope of patent applications. It should be understood that the specific methods and apparatus used to implement the invention are illustrative and not limiting of the invention. The principles and features of the present invention can be implemented in various forms and many embodiments without departing from the scope of the present invention. [Brief description of the drawings] In the accompanying drawings, the reference numbers refer to the same parts throughout the drawings. These drawings are not necessarily to scale, and their emphasis is on explaining the principles of the present invention. According to the drawings: FIG. 1 is a perspective view of the first embodiment of the fixing and calibration structure according to the present invention; FIG. 2 is a front view of the first embodiment of the fixing and calibration structure according to the present invention; Second embodiment of the calibration structure 8 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) 0 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 1: 0, · ^ 1 ϋ i ^ ii ^ in-^ 1 II m ϋ— I an ϋ in lnin in d i.— an nn ϋ in ϋ 45 1245138 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 3, a perspective view of the invention; FIG. 3B is a front view showing the structural dimensions of the second embodiment; FIG. 4 is a perspective view of the third embodiment of the fixing and calibration structure according to the present invention; FIG. 5B is a perspective view of a related embodiment of the fixing and calibration structure of the present invention. FIG. 6 is a front view of the fifth embodiment of the fixing and calibration structure of the present invention. FIG. 7 is a fixing and calibration structure according to the present invention. Example front view of a six embodiment, and FIG. 8 is fixed alignment structure before the seventh embodiment of the present invention, the view; Figs. 9 and 10 of the present invention is fixed alignment structure of Formula VIII to the ninth embodiment of FIG. FIG. 11 is a front view of a tenth embodiment of the fixing and calibration structure of the present invention, in which individual structures are integrated into a single base according to the present invention; FIG. 12 is a plan view of the eleventh embodiment of the fixing and calibration structure according to the present invention; 13 is a plan view of the twelfth embodiment of the present invention; FIG. 14 is a plan view of the thirteenth embodiment of the fixing and calibration structure for passive component calibration of the present invention; FIGS. 15A and 15B are plan views of the fourteenth embodiment of the fixing and calibration structure, A deployment method for fixing a second optical element near another optical element; 9 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling (This page) ------- Order --------- Line. 245138 A7 B7 V. Description of the invention () Figures 16A, 16B, and 16C are used to make the fixing and calibration structure according to the present invention. Cross-sectional views of electroplating and photolithographic processing; Figures 17A-17F | Weiming manufactures a procedure for fixing and calibrating a structure with a very solid cross-section section along the z-axis direction of parts of the ghai structure; Figures 18A and 18B illustrate About Will Optics Figure 3 is a perspective view of processing steps for mounting the fixing and calibration structure on the fixing and calibration structure, and mounting the fixing and calibration structure on the optical table. A perspective view of a laser optical signal source in a holding optical fiber; FIG. 20 is a flowchart of an active calibration procedure of the optical system according to the present invention; FIG. 21 is a deformation and calibration structure of the structure during a calibration operation; Three-dimensional top view of the calibrator tooth grip processed by the grip; Figure 22 is a function of the displacement or deformation on the horizontal axis of the calibration procedure according to the present invention, and the force and the optical response on the vertical axis are plotted; Figure 23 The output force is selected as a function of the limited displacement ，, and the force pattern along the y-axis is shown. Figure 24 is a perspective view showing the fifteenth, combined structure embodiment of the present invention. Figure 25 is a sixteenth, dual-material embodiment of the present invention. Schematic perspective view; Figure 26 is a schematic diagram illustrating an optical system production line according to the present invention; and Figures 27A, 27B, and 27C are 10 sheets of paper showing three different calibration channel configurations Standards are applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) (Please read the precautions on the back before filling out this page) Printed Agriculture by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-— — III — — 0 | * «— — — — — — — It — — — — — — — — — — — — — — — — — — — — 1245138 A7 B7 V. Description of the invention (^!) / Fixed and calibrated structure Partial plan view. [Explanation of component symbols] Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 100 Calibration structure 100-1 Calibration structure 100-2 Calibration structure 110 Base 112 Optical element interface 113 Structural component calibration feature 114Α Left tab 114Β Right tab 116 Horizontal Extending the base surface 118 Slot type calibration channel 120 U-shaped lock valve area 121A Wing-shaped part 121B Wing-shaped part 122A Vertical section 122B Vertical section 124A Flat section 124B Flat section 126A Bend 126B Bend 128A Bend 128B Bend 11 (Please read the precautions on the back before filling this page) Order --------- Line 丨 β This paper size applies to China National Standard (CNS) A4 (210 X 297) 1245138 A7 V. Description of the invention 130 132 V, 134 136 152 154A 154B 155A 155B 158A 158B 159 210 212A 212B 214A 214B 310 410 412 412 414 420 422 424 Partially flattened Partially flattened part Linked part Linked part arrow V-shaped calibration feature Pair extension section Pair extension section Pair extension section Source / Release Layer Thick PMMA Resistive Layer Photoresist Layer Part of the front photoresist layer (Please read the precautions on the back before filling out this page) National Standard (CNS) A4 specification (210 X 297 mm) 245138 A7 B7 V. Description of the invention (Printed clothing of employee consumer cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 428 Bend 452 Structure-workstation fixed 470 Front lens 472 MEMS device 610 Laser source system 612 Wafer 614 Hybrid substrate 616 Detector 618 Front end face 620 Calibration feature 622 Packaging substrate 710A Tooth clamp 710B Tooth clamp 2010 Calibration structure supplier 2012 Optical element supplier 2014 Selection machine 2016 Selection machine 2020 Calibration system 2022 Optical signal 2024 Detector 2026 Cover [Detailed description of the preferred embodiment] Fixing and calibration structure configuration 13 This paper size applies to China National Standard (CNS) A4 (210x297 mm) (Please read the precautions on the back first (Fill in this page again) · nnn ϋ nnn J, JI II ϋ ϋ n ϋ ϋ II = mouth system

A 1245138 A7 _ B7 V. Description of the Invention (γ) 'FIG. 1 is an exemplary fixing and calibration structure diagram constructed according to the principles of the present invention. Generally speaking, the calibration structure 100 includes a base, an optical element interface 112, and left and right tabs 114A, 114B, and they can directly or indirectly connect the base 110 to the interface 112. The base 11Q includes a transverse base surface 116. In this example, the 'shai base surface 116 extends approximately on the plane of the X and Z axes. The base / base surface contains calibration features. In some embodiments, these features can be adapted to match the better alignment characteristics of the optical bench. In this particular implementation, the calibration feature is utilized by mechanical vision to conform to a calibration mark or a bench feature. In particular, the calibration feature includes a horizontally widened v-shaped lock valve region 120. Three master calibration channels can be further provided, which extend along the depth of the entire structure in the direction of the Z axis. The U-shaped lock valve area 120 has the advantage of minimizing the contact area and thus can be emphasized in the interface between the structure and the workbench or other surface attached. In this implementation, each tab 114A, 114B includes two sections 122 and 124. In detail, for example, the tab 114B includes two sections 122B and 124B.

In this example, the vertical sections 122A, 122B, that is, at least some parts extend in the y-axis direction, and have two bends 6A, 126B along their length. These bends are the area of the lower cross-sectional area of the section, which extends in the z-axis direction. These vertical sections I22 facilitate the positioning of the optical components mounted on the interface 112 along the X axis; and these bends 126A 14 This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) ) (Please read the notes on the back before filling out this page) · Line · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1245138 A7 B7 V. Description of the invention (4) and 126B help on the X and y planes The sections 122A, 122B are guided. The purpose of these bends is to isolate areas of subtle structural change, such as those that occur in plastic deformation, thereby making the output force predictable. At the same time, these bends will localize the deformation on the tab, and thus reduce the amount of force / movement required by the optical component before plastic deformation occurs at the tab. In this example, the flattened sections (that is, those extending in the X-axis direction) 124A and 124B each include two bends 128A and 128B. These bends also belong to the lower cross-sectional area of each section, and the bends extend in the z-axis direction. The flattened sections 124A, 124B can be used for positioning the optical elements mounted on the optical element interface 112, and are usually perpendicular to the y-axis direction. Deformation features of the tabs can be provided by each bend 128A, 128B. In an implementation, the optical element is attached to the optical element interface 112, and is attached to the surface 132 in detail. This type of attachment can be achieved by using a polyester adhesive or a more suitable soldering method. In other implementations, thermal compression attachment, laser scorch, reaction is attachment, or other attachment methods may be used. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (Please read the > i Notice on the back before filling out this page} In this embodiment, the component interface 尙 includes the structural component calibration feature 113. In this embodiment, the The structural component calibration feature includes a slot extending from the component attachment surface 132 in the z-axis direction. Therefore, the corresponding male protrusion of the optical component is inserted into the slot 113 so as to pass through the optical port 134 and along the X axis Position and calibrate the optical element with the y-axis direction. In some implementations, the interface of the optical element contains an optical signal that allows 15 optical paper sizes. Applicable to China National Standard (CNS) A4 (210 X 297 mm) A7 1245138 B7__ 5. Description of the invention (A) '' 134 communicated to the structure. This can provide access to the optical element by allowing optical signals to be transmitted to and / or away from the element. In order to facilitate grasping and The placement structure 100 is preferably provided with a grip I36 on the structure. In this embodiment, the grip 136 includes two V-shaped or U-shaped edges near the top edge of the structure. Lock the valve area. They are integrated into the optical element interface 112. When attached to the workbench 10, the grip 136 is available for controlling the structure 100. In detail, for example, the right-side lock valve is used to move the structure The structure is to the left. If you want to move the structure vertically or in the y-axis direction, you can activate two lock valves and let the structure be pushed down or pulled away from the platform. To further It can be grasped and installed on the workbench, and wing-shaped parts 121A, 121B can be provided at each connection piece. These are used for heating the vacuum neck post to control the structure, and welding and attaching operations due to heating. The short and close distance between the wings 121 and the base surface 116 contributes to good heat conduction. Figure 2 is a front view of the first embodiment of the fixing and calibration structure 100 as depicted in Figure 1. This view illustrates the left and right end tabs 114A , 114B, and in particular how to construct the tabs from the individual flat sections 124 and vertical sections 122. The figure also depicts the extension of the attachment surface 132. Generally, first, Welding material is applied to the surface 132. Next, The components and / or structures are heated and placed in contact with each other, and the welding and attaching operations are performed according to this. In other embodiments, a resin adhesive treatment may be adopted, in which the resin is first applied to the surface 132. 16 This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

'ϋ ϋ I n ϋ I 1: ° JI ϋ I nt I n I · 1 nn ϋ ϋ ϋ ϋ--ϋ ϋ II ϋ ϋ i I n ϋ n ϋ I 1245138 Α7 Β7 Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Consumption Cooperatives Fifth, the description of the invention (5) 'FIG. 3A is a diagram of a second embodiment of the fixing and calibration structure. This embodiment follows many similarities to the first embodiment shown in Figs. In particular, the fixed surface Π6 has a slot-type calibration channel 118 for visual calibration. The connecting pieces IMA and IMB can provide the vertical portions 122A and 122B in a similar manner. However, two flattened portions 154, 155 are provided at each tab on each side of the fixing and alignment structure 100. In detail, the tab 114B includes two flattened sections 154B, 155B, and they usually extend from the vertical section 122B to the optical element interface 112. In particular, the link portion 158B connects the distal ends of both the flat portions 154 and 155 to the vertical portion 122B of the tab 114B. The second embodiment shown in Fig. 3A illustrates a further configuration of the optical element interface 112. More specifically, the optical element interface II2 of the second embodiment includes a V or ϋ-type lock valve region or slot 152 extending in the z-axis direction through the fixing and calibration structure 100. This open slot configuration allows the optical fiber, as indicated by F, to be mounted vertically in the direction of arrow 159 into the slot 152. In a normal implementation, the fiber F is then attached to a surface 132 at the bottom of the slot. It is best to use welding, but other methods such as resin glue can also be used. In a preferred embodiment, the depth of the slot relative to the location of the attachment point of the tab is designed to resist any shaking in response to the structure exerted by the z-axis force of the fiber. In detail, some actions in response to z-axis strength are indeed unavoidable. However, the slot depth can be controlled so that the fiber shaft does not move due to these external forces. π This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) Order:-丨 line.  1245138 A7 B7 V. Description of the invention (>) In other embodiments, the grip 136 will be used and follow the arrow (please read the precautions on the back before filling this page) The U-shaped slot is used to protect optical components such as optical fibers. FIG. 3B is an exemplary size of the third embodiment. In particular, the h of the illustrated embodiment is 1.1 mm (mm). Usually the structure will have greater than 0.  5 mm height for easy handling. In order to provide proper headroom in standard packaging, these structures are generally designed to be less than 2. 0 mm height. The width w of the structure is 1. 9 mm. Here again, the width is preferably greater than 0. 5 mm height for smooth installation on the bench. In order to provide acceptable component packaging density and headroom among many components, the width w is usually less than 4 mm. Fig. 4 shows a third embodiment of the fixing and calibration structure 100, which shares many similarities with the structure described in Figs. 1-3. The other has a pedestal 110 and a traverse base surface 116. In addition, the third described embodiment would have an optical element interface 112 with an optical chirp 152. In this example, the grip 136 will be more emphasized, and the person extends vertically upward from the interface 112. A V-shaped calibration feature 210 is provided on the surface of the base to facilitate engagement with a complementary V-shaped calibration slot on the workbench. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. One of the more prominent features is the film 114A and 114B. Rather than having two sections extending parallel to the X and y axis directions, each tab includes two opposing sections 212, 214, which intersect at a substantially right angle to each other. In addition, these tabs do not have a decentralized bending system, but rather have fairly constant cross-section sections along the length of the tabs. In addition, the optical element interface 112 contains relatively closed trough-shaped light. 18 This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) 1245138 A7 B7. 5. Description of the invention (Λ) (Please read the back first (Notes on this page, please fill in this page again)-Fixed slot 152 between students. In one embodiment, the optical fiber is inserted into the slot 152, and then the slot is closed to protect the optical fiber therein. In addition, a grip 136 vertically extending from the optical element interface 112 may be provided. In this example, the grip 136 has right and left ends extending on one side of the slot I52. Fig. 4 shows another difference with respect to the third embodiment from the previous one, which uses the z-axis bending. In detail, the 'base 11' includes a front sheet portion 422 and a rear sheet portion (not shown in the figure). In this way, the base 11 becomes a hollow box configuration. The use of z-axis tabs allows controlled bending to be pulled in rotation around the X-axis or anti-direction when stressed. • Line-FIG. 5A is an example in which the base is divided into two different base parts 110A, 110B in order to provide a stable structure-workbench interface while minimizing the contact surface subject to thermal expansion tension Into. In order to make the device stronger in the structure manufacturing process and in the process of installing to the optical table, the spring-type connection element 310 can connect the two lock valves of the bases 110A and 110B. This element is clamped or deliberately compressed prior to installation. Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Figure 5B is a related example with similar reference numbers representing similar ministries. What is noticeable in this embodiment is that the angle between the vertical section 126 and the flat section 124 constitutes an obtuse angle. In some applications, this configuration can facilitate calibration operations. The fifth embodiment shown in Fig. 6 is very relevant to the fourth embodiment of Fig. 5. In the sub-interface, the optical element interface includes two separate, cut sections 1ΠA, ΙΠΒ. In this embodiment, an optical element, such as an optical fiber f 19 ^ paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 public love) 1245138 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Description of the invention (d) 'is within the volume measurement range between the two lock valves 112A and U2B inserted into the interface. These two lock valves Π2A and 112B will be closed around the optical fiber f. FIG. 7 is a sixth embodiment of the fixing and calibration structure. Compared with the previously disclosed examples, this embodiment notices that the tabs 114A, 114B have continuous bends distributed over the entire length of the tabs. These bends are not located at specific bend points as in some of the foregoing embodiments. In this embodiment, these tabs are used as distributed bending elements that are affected by plastic deformation. FIG. 8 shows a seventh embodiment of the fixing and calibration structure. In this embodiment, it should be noted that the tabs 4A, 114B are quite rigid, so that they can resist any bending or plastic deformation. In detail, these tabs Π4A, 114B do not have the distributed bending as shown in FIG. 1 above, nor do they have the continuous bending system as shown in the aforementioned FIG. 7 by the corresponding thickness of the tabs. Therefore, the embodiment in FIG. 8 is generally used to fix the optical fibers passing through the optical fiber feedthrough outside the module or the package. This seventh embodiment can resist any tensile force applied to the optical fiber F such as being held in the interface 112. Generally, this seventh embodiment is used in conjunction with a second fixing and calibration structure. The first fixing and aligning structure is close to the fiber end, and the fiber end is aligned on the X, y plane. The calibration structure of the seventh embodiment can be used to minimize the tensile force transmitted to the structure through the optical fiber for calibration of the fiber end. Fig. 9 shows an eighth embodiment of continuous bending tabs 114A, 114B and an optical interface 112, which is suitable for optical components other than optical fibers. In detail, a reflector or a lens is fixed to the optical interface 112 by a method such as welding or resin bonding. The port 134 can provide access to the 20 paper sizes applicable to China National Standard (CNS) A4 specifications (210 X 297 public love) — ------- !? 丨 (Please read the precautions on the back before filling in this Pages) Order:. Line-1245138 A7 B7 V. Description of the invention (d) The optical access feature of the element, in which the optical signal will be reflected by the optical element or transmitted through the element, and thus pass through the port 134. Fig. 10 is a ninth embodiment in which the base 110 is a relatively wide one-piece base. FIG. 11 shows another embodiment, in which four structures 100A-100D are integrated on a common base 110. This system is suitable for holding the optical fiber of an optical element like four physical parallel optical channels or paths. According to the present invention, each optical fiber is individually calibrated according to the individual calibration characteristics of the architectures. However, the common base can provide multiple, simultaneous structure / fiber passive calibration features in a single selection and placement step. Fig. 12 is a non-transverse symmetry fixing and calibration structure according to the eleventh embodiment. The other includes a base 110 and a tab 114 extending perpendicularly from the base. The tab includes a vertical section 122 and a flat section 124. The flattening section 124 ends at a device interface 112. The grip 136 may extend vertically from the interface. Fig. 13 shows a non-transverse symmetrical fixing and calibration structure according to a twelfth embodiment of the present invention. Here, the base 110 is extended in a vertical, y-axis direction so that it can be attached to a module or other fixed and calibrated structure side wall. The person may further have a flattening section 114, and a component interface 112 adapted to hold the optical fiber in a centered or leaning manner against the optical fiber to improve its calibration result. Fig. 14 is a plan view of a fixing structure for passively fixing an optical element. In detail, the thirteenth embodiment has a base 112 and an integrated optical element interface 112. And this one has a port 134 so that 21 paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (21 × 297 mm) -----:! # · 11 (Please read the notes on the back before filling (This page) _-Line · Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1245138 A7 B7 5. Description of the invention (/) 'Access to the optical components. This embodiment is not provided with a tab ' and is therefore only suitable for finely calibrating displacements. This is mostly used for holding them when the horizontal or vertical positioning of the components is not critical, which is like a folding mirror in some system designs. Fig. 15A is a fixing and calibration structure for a relatively large-scale MEMS filter device, a practical implementation method. In detail, the fourteenth embodiment has a divided base 110A, 110B. The individual tabs 114A, 114B extend from each base. Each of these tabs includes a vertical portion 122A, 122B, and a flat portion 124A, 124B. The optical element interface 112 is relatively large and is designed to hold an optical element that is both mounted on, for example, the fixed surface 132, for example. In this embodiment, the grip 136 is integrated on the interface. Fig. 15B illustrates a deployment diagram of the calibration structure 100B of the fourteenth embodiment together with one of the previously disclosed calibration structures 100A. In a general installation and calibration operation, the fixing and calibration structure 100A is first mounted on an optical table 10. Then, for example, in the active calibration process, the shape of the calibration structure is changed, and the optical element can be properly positioned relative to the optical path. Therefore, after the optical element held by the fixing and calibration structure 100A is calibrated, the calibration structure 100B can be installed according to its own optical element. Next, for example, in an active calibration process, the second calibration structure 100B is adjusted so that the second optical lift element can be properly positioned on the optical path. The relative dimensional difference between the calibration structures iOOA and 100B allows them to perform ~ series of calibration operations on their individual optical elements' even if these optical elements are closely adjacent to each other and 22 paper standards are applicable to Chinese National Standards (CNS) A4 size (210 X 297 mm) (Please read the notes on the back before filling out this page) ------- Order --------- * ^ 1 -n ϋ n Intellectual property of the Ministry of Economic Affairs Printed by the Bureau's Consumer Cooperatives 1245138 Α7 Β7 V. Description of Invention (M) 'Fixed to the workbench 10'. Fabrication of Fixed Structures Figures 16A-16C are cross-sectional views of the fixed and calibrated structure 100 during the manufacturing process. In detail, as shown in FIG. 16A, the thick PMMA resistive layer 414 is a seed / release layer 412 attached to the substrate 410. The thickness d of the PMMA resistance layer 414 may determine the maximum thickness of the quasi-projection portion of the fixing and calibration structure to be manufactured later. Therefore, the depth may determine the robustness of the fixing and calibration structure 100 to the force along the z-axis. In a preferred embodiment, the depth and the z-axis thickness of the fixing and calibration structure are in the range of 500-1000 microns. Thicker structures are typically used in tension-releasing structures & according to the procedure of the invention, the structure and therefore the depth of the PMMA layer is 2000 microns to produce a structure of the same thickness. FIG. 16B is the next manufacturing step of the fixing and calibration structure 100. In detail, the thick PMMA impedance layer 414 is exposed to X-ray sight for model processing. In detail, the mask 416, which can be a positive or negative mask having a desired structural model, is placed between an X light source such as a synchrotron and the PMMA impedance layer 4 '. Next, the Yanhai PMMA impedance layer 414 is made into a model layer 4MA, as shown in FIG. 1βB. FIG. 16C shows the structure of the 100 quasi-projection portion of the fixing and calibration structure. In detail, in a preferred embodiment, the quasi-projection portion can be constructed by electroplating. According to the present invention, the preferred electroplated metal is nickel. And in the other 23 ------ 1 丨 Dream 丨 丨 丨 (Please read the notes on the back before filling this page) Order: -The size of the paper is applicable to China National Standard (CNS) A4 (210 X 297) (Centi) 1245138 A / _B7 5. Description of the Invention (/) 'In the alternative, a nickel alloy such as a nickel-iron alloy is used. In addition, rhenium may be made of gold or gold alloy in other embodiments. At present, alternative metals and alloys can include silver, silver alloys, copper bronzes, coppers, golds, and alloys filled with colloidal oxide particles to pinpoint the microstructure. Figure 1? A-PF is the procedure for making the z-axis bending 422 described in Figure 4 above. In detail, as shown in FIG. ΠA, after the quasi-projection portion of the fixing and calibration structure is constructed, the substrate 410 is then removed from the seed source layer 412. Then, an additional photoresist layer 420 is added, and the z-axis bent coating is modeled as shown in FIG. 17B. Then, a plating step is further performed to form a z-axis bend 422 coating on the existing constant solid cross-section section 100. In FIG. 17D, a second photoresist layer is constructed on the opposite sides of the structure 100 and the first PMMA layer 414 and then processed by a model. An etching operation can be performed through the seed layer 412. That is, as shown in FIG. 17E, another plating step is performed, and a second plating layer with a z-axis bend 428 is made. Next, as shown in FIG. 17F, the remaining photoresist layer 424, the seed source layer 412, and the PMMA layer 414 are removed, and the remaining hollow box structure is shown. The box-type structure may constitute the bottom base section 422 of the fixing and alignment structure as shown in FIG. 4. Fixed Structure-Optical Element Table Installation Figure 18A shows the procedure for installing optical elements on the optical table 10. The workbench is preferably constructed of materials that are mechanically strong, chemically stable and temperature stable, such as silicon, beryllia, aluminum nitride, silicon aluminum carbide, copper 24 210 X 297 mm) (Please read the notes on the back before filling out this page)-. .  丨 Line Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1245138 A7 B7 V. Invention Description (A) 'Beryllium and so on. This is usually a metal or a ceramic plated with, for example, gold or a gold alloy. In detail, at step 450, the optical element 20 is mounted on some first fixing and alignment structure 100-1. In detail, it is preferable that the optical element 20 is attached to the fixing and alignment structure 100-1. In a preferred embodiment, a soldering attachment method may be used, in which the surroundings of the optical element and / or the attachment surface 132 of the optical element interface Π2 are first welded. The optical element is then brought into contact with the attachment surface 132 of the optical element interface 112. It is then fused and cured. At the same time, in a preferred embodiment, the complementary calibration features of the optical element 20 and the interface 112 will facilitate calibration operations and proper seating processing between the element 20 and the structure 100-1. In detail, the calibration channel 113 (see Figs. 1 and 2) is formed on the interface of the structure. The mask or projection 45 on the optical element 20 will be connected to the slot 113 to ensure the reproducible installation method of the element 20 on the structure 100-1. In other embodiments, the component 20 may be attached to the structure by a resin adhesive or an adhesive technology using other adhesives. Then, in the structure-workbench fixing step 452, the structure 100-1 is brought into contact with the optical workbench 10 and attached to the workbench. In a preferred embodiment, a welding attachment method can be used, in which the workbench is held at a heated neck post on an optional machine, and the pre-heat treated structure is brought into contact with the Workbench. The heat is then removed to solidify the solder joint. That is, as shown in connection with the calibration structure 100-2, for other engineering components, this fixing step is reversed. In this example, step 25 is attached to the structure-workbench. The paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page). · Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and printed by 1245138 A7 ______B7 V. Description of the invention (: bucket) In step 454, the fixed and calibrated structure 10 () _ 2 will come into contact with and Attached to the station. The optical fiber is then seated in the U-shaped port 152 of the fixing and alignment structure 100-2. Next, the optical fiber may be attached to the interface attachment surface 132 'or the u-shaped socket may be folded and the optical fiber may be protected at the bottom of the U-shaped socket. In this way, the fiber end face EF will be protected on the optical table near engineering elements such as the membrane filter or mirror 20 held by the structure 100-1. FIG. 18B also illustrates a procedure for mounting a MEMS type optical element on the optical quantity 10. In detail, in this embodiment, first, in the first attaching step 474, the front-end mirror 470 is attached to the reflective film of the MEMS device 472. Then, in a second attaching step 476, the MEMS device 472 is attached to the calibration structure 100. Next, in the workbench-attachment step 478, the combined MEMS / structure is attached to the workload 10. Deformation of the fixed structure during the calibration operation Figure 19 is an external view of an optical fiber laser signal source system, which is indeed constructed in accordance with the principles of the present invention. In detail, the laser source system 610 is fixed on the hybrid substrate 614. Generally, the substrate can support electronic connections to the wafer 612, or it can include a thermoelectric cooler to maintain a certain operating temperature of the wafer 612. The hybrid substrate 614 is then mounted on the optical table portion 10 of the packaging substrate 622. The detector 616 is located behind the wafer 612 of the workbench 10 to detect the light on the rear end surface and thereby monitor the operation status of the laser 612. 26 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------ !!!. # ·! (Please read the notes on the back before filling this page). 'Line · 1245138 A7 B7 V. Description of the invention (4)' The light transmitted by the front end surface 618 of the wafer 612 will be collected by the optical fiber f and transmitted to the outside of the optical system 610. In an embodiment, the light transmitted in the optical fiber f is used to optically pump a gain fiber according to the Raman pumping rule, such as a rare earth element doped fiber or a normal fiber. In other embodiments, the laser chip 612 is modulated in response to the information signal to facilitate the optical fiber to transmit the optical information signal to the remote detector. In still other embodiments, the laser chip 612 can be controlled to perform CW mode and another modulator, such as a Mach-Zehner interferometer, can perform the modulation operation. According to the present invention, the optical element fixing and aligning structure 100 is mounted on the optical table portion 10 of the packaging substrate 622. That is, as mentioned above, the optical workbench has the calibration feature 62, which can be matched with the alignment calibration feature on the surface of the base of the fixing and calibration structure 100 as described in the previous illustration. That is, as described above, the g-fiber f is installed in the U-shaped 璋 1S2, which is part of the optical element interface U2 of the fixing and alignment structure 100. Figure 20 is § clarified in the production of the light as shown in _19, learned from the solution, can be used for active calibration of the deformable optical element fixed structure; ^ printed by the consumer property cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (Please read the notes on the back before filling this page).  Procedure diagram. In detail, at step 65, the laser mold 614 and the calibration structure 100 are fixed on the optical table 10 in the selection and attachment process. In detail, an optional robotic arm will place the search mode 614 and the f-quasi structure 100 on the optical table by passive calibration. It is best to use mechanical vision technology, and / or the optical table 10 and fix and calibrate the paper standard applicable Chinese National Standard (CNS) A4 specifications (210 X 297 1245138 A7 __B7 V. Description of the invention (4) 'Structure 100 , And the calibration characteristics of the mold 614 or significantly related to the defined coordinate system of the station 10 / module 622 to complete this calibration process (please read the notes on the back before filling this page). At step 652, once the laser hybrid 614 and the structure 100 are attached to the station 10, the laser hybrid will be attached by wire. Then at step 654, the laser 612 will be excited with energy. Decide whether the laser can operate normally. If the laser fails to operate normally, the optical system will be rejected and return to step 656. However, if it is determined at step 654 that the laser can be operated normally, the work station will be at At step 658, it is moved to a calibration fix of the production system. At step 660, the optical fiber f is inserted into and attached to the U-shaped port 152 of the optical element interface 112. In a preferred embodiment, the The fiber is soldered to the Attach the surface 132. At step 664, the calibration system will grab or insert the fixing and calibration structure 100 in response to the intensity or level of the signal transmitted by the optical fiber f from the laser 612, and the fixing and The calibration structure 100 is deformed. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, Figure 21 is a diagram of the socketing operation between the calibration system and the fixed and calibration structure 100 to calibrate the optical fiber f. 710A and 710B will bite the grip 136 of the fixing and aligning structure 100, and then move the fixing and aligning structure to facilitate the displacement operation of the optical fiber f on the xy plane, which is an axis orthogonal to the optical fiber f At the same time, the intensity of the signal transmitted by the optical fiber f will be monitored until the strongest signal is indeed detected at step 666 in Fig. 20. It should be noted that the right 28 of the grip 136 paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 1245138 A7 ____B7 V. Description of the invention (11) The end and left end lock valves can be used to complete the best calibration results, so that these tooth clamps of the calibration system can change the structure Pull away with Push to the station 1 0. Now return to Figure 20. Once the strongest signal is detected at step 666, the calibration system will further deform the fixing and calibration structure 100, and let the fixing and calibration structure be released when After that, he can flexibly jump back to the desired calibration position detected at step 666. In other words, the fixing and calibration structure will be deformed in a plastic way, so that when the tooth clamps 710A, 710B of the calibration system are released from The fixation and calibration structure will have a proper calibration result at 100. If the optical element, that is, the optical fiber, is subsequently determined at step 670, it is not located at the position with the highest coupling result, it will be executed again. This deformation step 668 is performed until it is within the acceptable tolerance range. Figure 22 is a diagram of the calibration procedure. In detail, the benefits or coupling benefits of inserting light into the fiber are plotted as a function of the fiber's displacement. In detail, when the fiber is in the best calibration position and falls on either side of the position, the coupling benefit will be maximized. Figure 22 also illustrates the function of pulling force or displacement during many calibration procedure steps. To indicate strength or tension. In detail, in the first step 710, a force is applied to the fixing and calibration structure so that they can be elastically deformed. Within this range, a roughly linear relationship exists between the applied force on the y-axis and the displacement 値 or pull force on the X-axis. However, once the output strength level is exceeded, the fixation and calibration structure 100 will undergo plastic deformation as described in step 720. This plastic deformation applies to the Chinese paper standard (CNS) A4 (210 X 297 mm) for 29 paper sizes (please read the precautions on the back before filling this page). -丨 Line Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 1245138 A7 ^ __ B7_ V. Description of the invention () 'The fixed and calibrated structure is permanently deformed. When the external force is removed, the fixing and calibration structure will have the elastic "jump back" as described in step 720. That is, when the force is removed, the structure produces some elastic movement. However, since the output strength level was indeed exceeded, the fixed and calibrated structure did have a permanent deformation of the distance indicated by A. Even with plastic deformation, the fiber is still not in its optimal alignment position. For this reason, the plastic deformation of another cycle begins. In detail, an external force is applied to cause the fixing and calibration structure to have an elastic deformation as indicated by the solid line 724. Once the new output strength level is exceeded again, the other will produce plastic deformation as indicated by the solid line 726. During the second calibration cycle, the output was indeed increased due to the increased work. Then remove the force, and the fixing and calibration structure will spring back as indicated by the solid line 728. Since the output force is indeed exceeded, this second plastic deformation step will result in a movement towards the best calibration position 4. However, to achieve the best calibration results, more plastic deformation operations are required. In detail, the elastic deformation is performed again at step 730 until the output strength is reached. Next, a small amount of plastic deformation is performed as described by the solid line 732. The force is then removed and the fixing and calibration structure will spring back to the optimal calibration position as indicated by the solid line 734. This illustration shows a graphic of the advantages during the calibration procedure. During the first plastic deformation cycle, the position will pass the best calibration position. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) --------- -------- (Please read the notes on the back before filling this page).  1245138 A7 B7 V. Description of the invention (called) (Please read the notes on the back before filling this page), but after removing the strength, the elastic jump will pull it away from the best calibration place. However, in the second cycle, when the velocity is removed, the calibration result can be improved. Finally, the third cycle brings the fiber into this optimal alignment position. Key Criteria for Design of Fixed Structures Figure 23 is a graph of the force FY as a function of the displacement 値, which can be used as a design tab for an application according to the present invention. The output strength is the strength when the structure begins to deform plastically on the elastic deformation range. The lower bound of FY (1200) printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is subject to environmental shocks such as acceleration, and Limited by the ability of a fixed structure to withstand it. Some specifications require the optical system to withstand a shock test of 5,000 grams. Usually for some optical components, it is generally required to exceed 0. 5 Newton's output strength. However, this number can be reduced by size and therefore the quality of the optical elements must be reduced. If there is no minimum output force limit, it includes the unavoidable forces such as manufacturing, heat treatment, plating, selection, calibration, packaging and other processing processes, which may cause plastic deformation at the bending joint. . More seriously, any impact on the calibration system may cause it to lose its accuracy, thus offsetting the purpose of the present invention. The FY (125) upper bound is affected by three factors. First, the strength of the plastic deformation that would cause the tabs or bending must not be too high, and weaken or damage the attachment between the fixed structure and the substrate. Secondly, the output force should not be too high and cause obvious elastic deformation in the micromanipulator that exerts the force. The 31st paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1245138 A7 B7 V. Description of the invention (π) ' The strength of the sheet or bending deformation should not be too high, and it will damage the other parts of the overall construction and fixed structure. In addition to limiting the strength of the splice output, it is also best to limit the amount of displacement required to reach the output point. First of all, the lower bound (solid line 1300) indicates the range of the solid structure. If there is indeed sufficient plastic deformation range to reach this calibration position, the fixed structure will only operate as needed. Normally, the calibration structure must be able to move or shift the optical element from 0 to 50 microns. A commonly used calibration algorithm will require a 4 to 5 micron optical element position shift to achieve plastic deformation of the calibration result. The second limit of minimum hardness is determined by the amount of "overload" that the calibration algorithm sets to be acceptable. If the structure is too elastic, in order to perform even only minor calibration adjustments, it is still necessary to depress a longer distance beyond the desired calibration point. The final limit is the maximum bending stiffness (solid line 1350). If the hardening of the work is not the focus, then there is no restriction on the maximum hardness (except, of course, for the material). However, nickel and nickel alloys are hardened. Therefore, the upper limit of hardness can be selected without exceeding the solid line of 1250, even if the work hardens during the subsequent plastic deformation cycle during the search for the correct calibration result. In a preferred embodiment, FY, y, that is, the output strength in the y-axis direction, will be less than 3 Newtons (N), and usually 0. Between 2 and 1 N. As for the output strength along the X axis, FY, X are similarly limited to less than 3 Newtons (N), and usually 0. Between 2 and 1 N. However, if a small optical element is used, an output strength lower than 0 · 2 N can be adopted. These lower limits will be related to the optical elements that the structure must hold and do not want to produce plastic deformation. 32 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) ------ !. #. ! (Please read the note on the back? Matters before filling this page) 丨 Online.  1245138 A7 B7 V. Description of the invention (M) 'The quality is related. In this way, a lower output strength can be applied to small components in the subsequent production process. In contrast, the output strength in the Z-axis direction, that is, FY, Z, or Pγ, θ ′, is a strong person to calibrate only the x-y plane. The FY, ZS Fy is preferably greater than 5 N or 10 N. In addition, this is especially true in the version of the calibration structure used to secure the fiber end to the stage. Thermal expansion can cause the resulting tension on the fiber to fail. The purpose is to design a structure that allows the tensile force to move the fiber end surface as low as possible. In particular, it is best to use the position where the selection tab is attached to the interface of the optical fiber component to balance the structure in order to avoid any shaking action as much as possible. Further Embodiment FIG. 24 shows another embodiment of the present invention, in which the structure 100 is a combination of the protrusion-like portion 101, which has a constant solid cross-section section along the z-axis, and two z-axis bending components 102, which can be used to control the movement around the X axis or the direction of the angle Θ, so as to determine the impedance of the component of the force along the z axis. The z-axis bending assembly 101 is preferably fabricated and attached to the base surface of the portion 101 individually. Adapter 'attaches the base surface of the components to the station. FIG. 25 is an example of a fixed structure provided by the present invention, in which two different materials are used in the fixed structure (herein designated as “A” and “B”) to thereby expand the optical axis position due to thermal expansion and / or Minimize any changes due to structural shrinkage. In one exemplary configuration, together with the design on the structural scope, 'the' A 'material is selected so as to expand upward due to temperature changes, and the' B 'material and its related fixed design features are selected for Because 33 paper sizes are in accordance with Chinese National Standard (CNS) A4 specifications (210 X 297 public love) (Please read the precautions on the back before filling out this page) · • Line · Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 1245138 A7 B7 V. Description of the invention (v7) 'The temperature has a tendency to expand downwards. These relative swelling tendencies will result in compensating actions to obtain stability over the structural geometry and position over the operating temperature range. Optical System Production Line FIG. 26 is a schematic diagram of an optical system manufacturing process according to the principles of the present invention. Generally speaking, the program includes accuracy selection to set the optical element to a certain accuracy better than 10 microns, which is set to 2 microns in the preferred embodiment, and then active calibration is performed. The position of the component is adjusted to an accuracy of about 1 micron, and preferably better than 1 micron. In detail, the calibration structure supplier 2010 may be provided, such as an adhesive seal or other mechanical vision compatible holder, together with an optical component supplier 2012 configured similar thereto. Each supplier will be picked up by Selection Machinery 2014. In detail, the selection mechanism places an optical element on a calibration structure and attaches the element. Generally, either the calibration structure and / or the optical element is a solder plating, or a welding method is used. The optional mechanism heats the calibration structure and the optical element, brings the two components into contact with each other, and then melts it by welding and then solidifies it. In this embodiment, the selection machine is a model FC-150 or FC-250 manufactured by Karl Siiss, France. These selection machines have a vacuum neck for selecting optical components, and a holder for gripping the calibration structure. The calibration structure with the fixed optical element will then be fed to another 34 (please read the precautions on the back before filling out this page). Order: Printed on the paper by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Standard (CNS) A4 specification (210 X 297 mm) 1245138 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention description (Vi) ¥ or the same optional machinery, the person can access a certain optical Workbench supplier 2018. In this second selection operation, the selection machine 2016 will hold the optical bench on a vacuum neck or a holder, and then use its vacuum neck to apply the calibration structure, together with the optical components, to the Place on the optical bench. Next, the workbench and the structure are heated for welding attachment. After that, by using the matching calibration features of the workbench and the calibration features of the fixed structure, placement accuracy of less than 5 microns can be achieved. In a preferred embodiment, these structures are located on a workbench in a production environment with an accuracy of better than 2-3 microns. In the preferred embodiment, the optical bench, along with the calibration structure fixed to it, is then sent to a calibration system. The calibration system 2020 has tooth clamps 710A, 710B, and they will snap into the grips of the calibration structure 100 for calibration operations. In the preferred embodiment, this calibration is an active calibration, in which the intensity of the optical signal 2022 is detected by the detector 2024. The calibration structure 100 can be manipulated and deformed until the optical signal 2022 detected by the detector 2024 is indeed maximized. It is best to use a calibration search strategy such as the “Deng Ling method” or “spiral scanning method”. In other cases, such as when the optical fiber is mounted on the workbench 10, the calibration structure is most suitable for installation. Fortunately, it is better not to attach the optical fiber to the selection machine 2016. Then at the calibration system, the optical fiber is fed through the optical fiber feedthrough in the module, and is attached to the calibration structure 100 by soldering. The calibration system then manipulates the structure for calibration operations. After the calibration is completed, the optical station and module will then be passed to a capping operation 2026, where you can perform operations such as capping and drying operations 35 (please read the precautions on the back before filling in (This page) · The size of the paper used for the paper is in accordance with the Chinese National Standard (CNS) A4 (210 X 297 mm) printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economy 1245138 A7 B7 V. Description of the invention (vv) 'Final production steps.

Figures 27A, 27B, and 27C illustrate three different calibration channel llS configurations, as shown in Figure 1. Figure 27A is a simplified design. However, when the surface of the base is pre-mineralized by welding or its I-attached medium, there are some shortcomings in the implementation of machine vision applications. Welding will fill the crease, making the channel edge flat, and the calibration method based on various features becomes inaccurate. Figures 27B and WC show channels with embedded cavities in the features, which can help identify the edge USA, even after welding plating. The resulting clear edge features can assist in calibration during bench installation, even after coating. Although the present invention is described in a specific way and explained with reference to its preferred embodiments, for those who are familiar with this technique, it is clear that he can adopt various types and changes in details, without departing from the following. The scope of inventions set by the patent application. 36 This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm). Please read Jiangyin 5 ^-on the back first.

Claims (1)

A8 B8 C8 D8 1245138 Scope of patent application 9 · If the structure of the scope of patent application item 8 is used, the port is a closed hole (please read the precautions on the back before filling this page) 10 · If the scope of patent application area 8 Structure, wherein the port is a generally U-shaped lock valve area. 11. The structure according to item 1 of the patent application scope, wherein the interface includes an open jaw to receive the optical element extending at least partially along the Z-axis direction. 12. The structure of claim 11 in which the optical element is an optical fiber. 13. The structure according to item 1 of the patent application scope, wherein the handle includes a lock valve area in the structure. I4. The structure according to item 13 of the scope of patent application, wherein the grip is integrated on the optical element interface. 15. For the structure of the scope of patent application item 1, wherein the tab contains a bend. 16. The structure of claim 15 in which the bend includes a tab range having fewer cross-sectional areas. Π · The structure as described in item 1 of the patent application range, wherein the bends are separated by the transverse sections of the tab. 18. The structure of claim 17 in the scope of the patent application, wherein the bends have a smaller cross-sectional area relative to the section. 19. The structure according to item 1 of the patent application range, wherein the bends are separated by the vertical sections of the web. 20 · For the structure of item 19 in the scope of patent application, the dimensions of these bending tools are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) A8B8C8D8 1245138 6. The scope of patent application is relative to this section Less cross-sectional area. (Please read the precautions on the back before filling out this page) 21. If the structure of the scope of patent application No.1, the tab contains three bends. 22. The structure according to item 21 of the patent application scope, wherein two bends are separated by the transverse sections of the tabs, and two bends are separated by the longitudinal sections of the tabs. 23. The structure according to item 22 of the scope of patent application, wherein the bends have a smaller cross-sectional area relative to the section. .24. The structure according to item 1 of the patent application range, wherein the tab includes a U-bend lock valve in the tab. 25. The structure according to item 1 of the patent application scope, wherein the structure includes two tabs extending symmetrically from each side of the interface. 26. A fixing and alignment structure for optical fiber, which is composed of a photolithographic method and electroplating, and the structure includes: a base having a transversely base surface; an optical element interface; and an optical element interface; The interface of the optical element is connected to a tab of the base, and the tab contains a bend, wherein the structure can respond to the force orthogonal to the optical path between 0 and 3 Newtons at the optical element. And plastic deformation occurs. 2 Into the structure as claimed in item 26 of the scope of patent application, wherein the structure can respond to a force orthogonal to the optical path between 0 and 1 Newton at the optical element to cause plastic deformation. 28. If the structure of the scope of patent application No. 26, which can be returned to 3 ^ paper size ^ China National Standard (CNS) A4 specifications (210, 297 mm)-1245138 § D8 VI. The scope of patent application should be in optical The element is plastically deformed at a force between 0.2 and 1 Newton orthogonal to the optical path. 29. If the structure of the scope of the patent application No. 26, the structure can be plastically deformed in response to a force between 0 and 1 Newton orthogonal to the optical path at the optical element. 30. For the structure of the scope of application for patent No. 26, the structure can respond to the force parallel to the optical path at the optical element and is higher than 5 Newtons to produce plastic deformation. .31. A fixing and alignment structure for an optical element, comprising a quasi-projection portion having a generally constant cross-section section in the z-axis direction, the quasi-projection portion being manufactured in a photolithographic manner, the quasi-projection The part includes: a base having a transversely-based base surface; an optical element interface; a tab capable of connecting the optical element interface to the base; and at least one bend in the tab. 32. The structure according to item 31 of the scope of patent application, wherein the bend includes a tab range having less cross-sectional area. 33. The structure according to item 31 of the scope of patent application, wherein the tab contains two bends. 34. The structure according to item 33 of the patent application, wherein the bends are separated by the transverse sections of the tab. 35. The structure of claim 34, wherein the bends have a smaller cross-sectional area relative to the section. 36. If the structure of the scope of the application for the item 33 of the patent 'wherein the bends are 4 $ Zhang scale suitable national national standard @NS) A4 specifications (210 X 297 public ϋ ii! ... ί — φ — (Please read first Note on the back, please fill in this page again.) Order 1245138 ^ C8 D8 VI. The scope of patent application is divided by the vertical section of the ..............-- ---- (Please read the notes on the back before writing this page) 37. If the structure of the 36th area of the patent application, the bends have less cross-sectional area than the section. 38 · For example, the structure of the scope of the patent application No. 31, where the tab contains three bends. 39. The structure of the scope of the patent application, No. 38, where the two bends are separated by the transverse section of the tab, and Two of the bends are separated by the vertical section of the tab. _ 40. The structure of the 39th scope of the patent application, wherein the bends have less cross-sectional area relative to the section. 41. An optical element mounting method includes: using a structure form including a base and an optical element interface, converting an impedance material to a photolithographic plate Model the model; construct the structure with the impedance material; install the optical component on the interface; install the structure on an optical table; and position the optical component on the optical path on the table. 42. If applying The method of item 41 of the patent, wherein the step of patterning the impedance material includes exposing and developing the resistance material. 43. The method of item 42 of the application, wherein the step of constructing the structure includes electroplating to form the The impedance material is included in the structure; and the impedance material is removed. 44. The method of item 41 in the scope of patent application, which further includes mounting the optical element on the interface before mounting the structure on the optical bench. The paper size applies the Chinese National Standard (CNS) A4 (210 x 297 mm) 1245138-C3 D8 6. The scope of patent application 45. If the method of the 41st scope of the patent application is applied, it also includes mounting the structure to the optical After being on the workbench, the optical element is mounted on the interface. 46. For example, the method in the 41st scope of the patent application, wherein the optical element is Optical fiber. 47. The method according to item 41 of the patent application, which further includes the use of optional machinery to install the structure on the workbench. 48. The method according to item 41, which also includes the use of welding attachments. Fix the structure on the work bench. 49. The method according to the scope of patent application No. 41, which includes the use of nickel to make the structure. 50. The method according to the scope of patent application No. 41, which also includes the use of nickel alloys. 51. The method of claim 41 in the scope of patent application, wherein the step of mounting the optical element on the interface includes attaching the optical element to the structure by soldering. 52_ The method of claim 41, wherein the positioning step of the optical element includes plastically deforming the structure to locate the position of the optical element on the optical path. 53. The method of claim 41, wherein the step of positioning the optical element further comprises activating an active device on the optical table to facilitate determining a position on the optical path. 54 · —A kind of active calibration method for optical system, including: 6 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------------------ Γί, _ ……, …… 丨 —Order ----------- …… ^ 0 (Please read the notes on the back before filling out this page) 338895 ABCD 1245138 VI. Apply for a patent to start the optics Optical link in the system; Detect optical signal after transmitting through the optical link; On the deformable structure, locate the position of the optical element relative to the optical link, which is orthogonal by the optical element Move the optical element on a plane of the optical signal broadcast direction, while maintaining the position of the optical element along an axis parallel to the optical signal broadcast direction; plastically deform the structure to calibrate the optical element relative to the optical link . .55. The method of claim 54 in which the step of activating the optical link includes energizing a laser device within the optical system. 56. The method of claim 54 wherein the step of activating the optical link includes connecting the optical system to an optical signal source. 57. The method of claim 54 in which the step of detecting an optical signal includes monitoring the output of a detector in the optical system. 58. The method of claim 54, wherein the step of detecting an optical signal includes inserting a temporary detector into the optical system to detect the output. 59. The method according to item 54 of the patent application, wherein the step of positioning the optical element includes socketing and applying a force to the structure by a mechanical arm to deform the structure. 60. The method of claim 59, wherein the step of locating the optical element further includes attaching the structure to the structure handle. 61. If the method of applying for the scope of the patent No. 59, the step of plastically deforming the structure, including the structure exceeding the desired position 7 paper size applies Chinese National Standard (CNS) A4 specifications (210 X 297 Mm> -----------------...... (Please read the notes on the back before writing this page)-738 A8 B8 C8 D8 1245138 Be deformed so that the structure moves elastically after the robotic arm is released from the structure. ------------- …… ίRead ...! (Please read the precautions on the back before filling this page) 62_—A method for actively calibrating an optical system, including: activating an optical link in the optical system; detecting an optical signal after transmitting through the optical link; and characterizing the optical element relative to the optical chain on a deformable structure The method is to detect the intensity of the optical signal broadcast on the optical link by moving the optical element relative to the optical link. After the position of the optical element is characterized, the structure is plastically deformed. 'Take this relative to the optical link Calibrate the optical element. 63. The method according to item 62 of the patent application, wherein the step of characterizing the position of the optical element includes socketing and using a mechanical arm to apply force to the structure, elastically and / or The structure can be plastically deformed and the intensity of the optical signal can be detected at the same time. 64. The method according to item 63 of the patent application, wherein the step of applying force to the structure includes attaching the structure grip 65. The method according to item 63 of the scope of patent application, wherein the step of plastically deforming the structure includes deforming the structure in a manner exceeding the desired position determined in the characterization step, so that The structure moves elastically after leaving the structure. 66. An optical system production line, including: an optical table supplier that can provide an optical table; a component supplier that can provide optical components; and an optical table that can receive optics The optional machinery of the workbench can be adapted to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) from this paper size. 1245138 i C8 D8 6. Application The scope of the patent is that the component supplier selects the optical component and places the optical component on the optical table that the optical component can access; and the optical system calibrator can characterize the position of the optical component on the optical table, and The relative position of the optical element is adjusted mechanically. 67. For example, the optical system production line with the scope of application for patent No. 66, where the optional machine can attach the optical element to the workbench by welding. 68. Such as The optical system production line with the scope of patent application No. 66, wherein the optical system calibrator can detect an optical signal after interacting with the optical element by activating an optical link of the optical system, and adjust the optical element to pass through the link. The optical signal transmission is optimized to characterize the position of the optical system. 69. For example, the optical system production line of the patent application No. 66, wherein the optical system calibrator can excite an active component of the optical system, and The optical element is adjusted to the optimal condition that the active optical element transmits the optical signal to the system. 70. For example, the optical system production line of the patent application No. 66, wherein the optical system calibrator excites an active component of the optical system, and adjusts the position of a passive optical component, so that the The optical signal can be optimally transmitted. 71. The optical system production line according to item 66 of the patent application scope, wherein the optical system calibrator excites the active components of the optical system and adjusts the positions of two passive optical components so that the optical signals transmitted between the passive components Teleportation is optimized. 9 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) --------------------.............. ... Order —....... (Please read the precautions on the back before filling out this page) A8859 ABCD 1245138 Application for patent scope 72 · If you apply for patent No. 66 of the optical system production line, the optional machinery , Is a flip chip type connector. (Please read the precautions on the back before filling out this page) 73. For example, the patent application scope of the 66th optical system production line, where the calibration system includes two tooth clamps to fit a fixed structure that can support the optical element, and The structure is moved relative to the station. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)