TWI244547B - Structure for assembling the probe of an atomic force microscope (AFM) - Google Patents

Abstract

A structure for assembling the probe of an atomic force microscope (AFM) is disclosed. The structure is especially for assembling the probe onto an AFM. The structure comprises a probe base, a probe module, a flexible unit, and an abutting rod. There is a connect unit on the probe base. There are a connect unit, a cantilever, and a probe on the probe module. The probe is on the cantilever. The cantilever is on the connect unit. One side of the flexible unit is fixed on the probe base. The other side of the flexible unit firmly clamps the probe module onto the connect unit of the probe base. The abutting rod is on the probe base. One end of the abutting rod contacts the flexible unit. The other end of the abutting rod is extended out of the probe base. The abutting rod can move the flexible unit, so the probe module clamped between the flexible unit and the probe base can be easily exchanged.

Description

1244547 V. Description of the invention (1) [Technical field to which the invention belongs], the "structure with an atomic force microscope probe" is particularly deducted from the structure of an atomic force microscope probe. [Previous technology] The probe module currently used in AFM! For example, if you do n’t use special micro-machining or crystal growth, the square pin probe module 1 is equipped with a receiving area 112 with a large area: this ΐΐ! = 2 points have-hanging men u, and The probe u is usually cantilevered here. Please refer to the second picture for the tip. 'It is an atomic force microscope as shown in the picture.' The atomic force microscope is used to detect the surface condition. = Tulong By using the extremely small probe, the probe is very close to the surface of the sample to be measured. Atoms on the surface of the sample 12 to be tested will be formed—when there is watt force, knowing that the watt force will cause a very slight degree of bending of the probe 11, it can be known that the distance between the probe u and the sample 12 to be measured is: Move to 丨 $ using extremely small displacement actuator 13 (such as x, γ, and 2-axis actuators) Πί :: two test. Points, after scanning the test area, the scan surface of the sample m 1 2 to be scanned is displayed. High and low distribution. The light ηΓ hits IS t The laser light isi emitted by the laser light source U is received by the laser reflected from the back of the probe 11 and the shift detector 15 receives the light displacement detector 15. == After processing, the probe displacement is displayed, and the displacement in the vertical direction and the lateral displacement can be judged. At present, most of them are used in atomic force microscopes, and the probe n 1244547 installed in it is revised. No. 9R1f ^ n7zl V. Description of the Invention The adhesion gradually becomes late_ As soon as the probe 11 has to be replaced to restore this atomic force _ ^ high-quality measurement ability; In addition, if it is to wait also @ ^ # 新 nature of the sample to be tested is different from the previous sample It is also necessary to change the probe η that is suitable for the sample 12 to be measured. It is shown in the three figures: As shown in the figure, in the conventional method of producing materials, the receiving part of the probe 11 is provided at the front end. 112 is fixed on a ^ You = 117, however, the probe 11 is usually very small and fragile. —The receiving part 丨 2 is fixed on the probe base 丨 7 by gluing. ^ The glue 11 3 must first be coated on the probe base 丨 7 or coated on the receiving 'If the glue 1 1 3 is coated on the receiving section 丨 2, it is easy to shell in the coating process Second: 11; and whether it is coated on the receiving part 112 or the probe base U, after installing the probe 1 1, you must wait for the glue 11 3 to dry before using it. And use the glue to fix the probe 丨 丨It is easier to cause the entire probe due to poor selection or uneven coating. 丨 丨 Tested ^ 2 In addition: When replacing a new probe ⑽, it must be cleaned. Originally :::: The new probe can only be placed after the gel on the needle base 17 or the receiving part 1 i 2, which will increase the time and operation difficulty of replacing the probe 1. In summary, Due to the high cost and lack of the aforementioned fixed probe technology: the convenience of changing needle f2, alas, for the overall industry of probe scanning, 'the aforementioned fixed probe technology should be familiar with the technology Must pay attention to and improve.

For a reason, when the atomic force microscope with a needle is used more and more, 'to force the current stage to develop into an operator who can operate and use the atomic force microscope more quickly' or even automatically expand it to no I page 6 1244547 ti_i3l. 8074 V. Description of the invention (3) The author intervened, the origin and development of the original element, TS Μ tried his best to respond to the above-mentioned customary innovation and improvement, and finally successfully developed the structure. σ piece π points, intensive research to improve the efficiency of the invention # "The knot with the atomic force microscope probe [Objective of the invention] The main purpose of this month is to provide a fixed structure of a needle. The secondary purpose of the invention is to provide a fixed structure of the needle. Another objective of the invention is to provide a fixed structure. 4 jt easy-to-replace probe [ SUMMARY OF THE INVENTION [Embodiments of the present invention] [Please refer to the fourth embodiment of the present invention as shown in the figure. The probe module 2 3 base 24 is attached to the receiving part 232 and the cantilever 233 for the above purpose and comparison. The embodiment] provides a "five, six, and seven of the atomic force microscope, probe base 2 4 Figure 7 and 8 of the installed probe mold, cantilever 2 3 3 and probe and cantilever 2 3 3 are their structures The functional and functional characteristics will be explained based on the structure of the atomic force microscope probe ". The diagram 'is a preferred embodiment of the present invention. The mirror 2 includes a measuring head 21, a base 22, an elastomer 25, and The ejector rods 26 and 6, after the probe set 23, are installed in the measuring head 21 again. As shown in the figure, the probe module 2 3 includes a needle 231, and the probe 231 is disposed on the receiving portion 2 3 2.

Page 7 £ S_i3108074 V. Description of the invention (4) One side: ί 探 Probe 5 pins ί ::: lock element 251 The dense clamping of this elastomer 25 in the probe =; ===, = Γ 固 Τ: ; Locked by the screw lock element 251, the body 25: = ^ ^ side due to the characteristics of the material of the elastic body 25 generates a large force ^, through this elastic force can not only Γ: ΐ ;; base 24 The receiving part 241 generates -tightness = = = generates a restoring force to restore the original state. Bullet 2: Γ; coincidentally on the probe base 24, and its-side abuts against the bullet body and the other side protrudes from the probe base 24; in detail, dictionary: 2 round 6: ί 于ϊίϊ2 !, and the longitudinal section of the ejector rod 26 is approximately -τ, and the side with a larger diameter is abutted against the table 242 below the elastic body 25, and on the mu24 and below the elastic body 25 A through-hole recessed hole 242 a is provided and the right one can just accommodate the large-diameter side 242 b of the ejector pin 26. And has a concave hole a that can accommodate the smaller diameter side of the ejector rod 26. When assembling, the ejector rod 26 is set in the through hole 242 of the probe base 24. ί: one of the 251f elastomer 25 The side screw is fixed on the probe base, so that the top cup 26 is pressed against the seat 24 I between the elastic body 25 and the probe base 24, and the probe module 23 is tightly clamped to the elastic body. 25 and the probe base needle are beautifully read, as shown in the figure. When the probe module 23 is to be removed from the probe and the elastic body 25 to replace the new probe mold, only the needle is required. The module 23 has one of the ejector pins 26 protruding downwards and placed on face 2. By pressing the edge of the probe base 24, the table top 27 is forced to push the ejector rod 26 toward 1244547.

On the top, when the ejector rod 26 applies pressure to the elastic body 25, the elastic body 25 will be separated from the probe base 24, even at this time? The tweezers move the probe module 23 with the probe 231 with the tip facing upwards. On the contrary, when the pressure on the edge of the probe base 2 is relaxed to release the elasticity of 25, the elasticity of the body 25 is restored. The force will force the ejector pin ^ to return to the original state. At this time, the probe module 23 is tightly clamped between the elastic body 25 and the needle base 24. At this time, after reversing the probe base 24 by 180 degrees, it can be placed on the bump 211 provided inside the measuring head 21 of the atomic force microscope 2 so that the joint portion 243 and measuring of the probe base 24 are measured. The bumps 211 of the head 21 are connected together. Please refer to the fifth and sixth figures together. As shown in the figure, the base 22 arranged below the measuring head 21 is pivotally connected with a clamping member 212, and one end of the clamping member 2 1 2 is provided. A rectangular push block 2 丨 2a, and the lower end of one surface 21 2c of the push block 212a abuts the adjusting element 2m screwed on the base 22 ', and the push block 2 1 2 a is opposite to the surface 2 1 The lower end of the surface of 2 c is in contact with an elastic element 2 1 2 d; the other end of the clamping member 2 1 2 is provided with a linking block 2 1 2 e, and one of the linking blocks 2 1 2 e is provided on the side A pressing portion 2 1 2 f is provided, and clamping rods 2 1 2 g are provided on both sides of the pressing portion 2 1 2 f. During operation, the operator can gradually rotate the adjustment element 2 1 2b counterclockwise to obtain the adjustment element 2 12b that originally abuts against the lower end of the push block 2 12a. The adjustment element 2 12b is gradually rotated out. The lower end of the push block 2 12a abuts against 4 so that the clamping piece 2 1 2 pivotally connected to the inside of the measuring head 2 1 is rotated clockwise and the clamping rod 2 1 2 g is upward at the same time as the measuring head 2 1 The projections 2 and 11 are separated, thereby allowing the operator to smoothly remove the probe base 2 4; on the contrary, when the operator rotates the adjustment element 2 1 2b clockwise to push against the pushing block 21 2a

Page 9 No. 1 9310Sf) 7i 1244547

V. Description of the invention (6) The adjusting element 2 12b at the end is gradually screwed in, and then the lower end of the block 2 1 2a is pushed back by the adjusting element 2m, so that the clamping 212 pivoted inside the measuring head 21 1 is counterclockwise. Rotate and make the clamping rod 21 2g downward and closer to the measuring head 21 convex block 2 11 at the same time, so that the operator can clamp the probe base 2 4 to the measuring head 2 1 internal. Therefore, from the foregoing, the present case has the following characteristics ... 1 · With the design of the aforementioned structure, the operator can achieve the design of the square mechanism of the atomic force microscope probe needle easily under the conditions, The user can replace the stinger without using an adhesive method, and because no glue is used to fix it, there is no need to pre-treat the probe base or accept the gel when replacing, so the overall time for replacing the probe is shortened. —3 on the residual edge 3. By the design of this mechanism, the user can replace the probe 'and because the glue is not used to fix it ^ We need to worry about the glue used is not strong, so the probe is dropped during the test 4 and The design of the locking mechanism of the probe base can also be prepared in advance. The user can prepare several types of probes i τ in advance, so that the user can easily complete the change of the probe and place it in the measuring head. Locking. In summary, the "needle structure" provided by the present invention is indeed in line with the patent-approved atomic force microscope request. It is really a prayer to grant the patent. Niu'mei filed a better and feasible embodiment of the patent application according to law and page 10 1244547 _ case number 93108074 _ year month day _ charm _ V. Description of the invention (7) Already mentioned the use of the method, shape, structure, All changes made by the device should be included in the scope of rights in this case. [Illustration of drawing number] 1 • • • Probe module 11 • • • Probe 111 — • Cantilever 112 • • • Receiver 113 • • • Glue 12 • • • Sample to be tested 13 • • • Displacement actuation Device 14 • • • Laser source 141 • • • Laser light 15 • • • Optical displacement detector 151 • • • Laser light 17 • • • Probe base 2 • • • Atomic force microscope 21 • • • Measuring head 211 · · · Bump 212 · · · Clamping piece 212a · · · Push block 212b · · · Adjustment element 212c · · · Surface 212d · • • Elastic element 212e • • Clamping lever 22 • • • Base 23 • • • Probe module 231 • • • Probe 232 • • • Receiving section 233 • • • Cantilever 24 • • • Probe base 241 • • • Receiving section 242 · · • Through hole 242a • • • Recessed hole 242b • • • Recessed hole 243 • • • Joint 25 • • • Elastomer 251 • • • Screw lock element 2 6 · · • Ejector 27 · • • Desk

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1244547 Case No. 93108074 Revised diagram for a brief description The first diagram is a schematic diagram of the structure of a probe module; the second diagram is a schematic diagram of the operation principle of an atomic force microscope; the third diagram is a schematic diagram of a conventional method for fixing a probe by an adhesive method; The fourth figure is a three-dimensional schematic view of the atomic force microscope of the present invention; the fifth figure is a three-dimensional schematic view of the atomic force microscope measuring head of the present invention; the sixth figure is the three-dimensional decomposition of the atomic force microscope measuring head and the probe base of the present invention. FIG. Is a schematic perspective view of the AFM probe base of the present invention; FIG. 8 is a schematic sectional view of the AFM probe module of the present invention.

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Claims (1)

^ 244547 9310 «〇7 / | The scope of the patent application for amendments is to explore 4+ ^, the structure of the force microscope probe: i: the main I spoon, the right side. The rest of the needle base, the probe base is mainly composed of 3 Yes. —Probe module, continued pf 3 and receiving parts; where the probe is set; ， Needle, "human ρ is again on the receiving part of the cypress needle base; :: rod'The ejector rod is set on the probe base, and one side of the ejector rod is pressed against the ejector rod, which can elasticize The body is opened up, so that the probe module sandwiched between the elastic body and the probe base can be easily replaced. 2. The structure of the atomic force microscope probe according to item 1 of the scope of the patent application, wherein the elastic system is locked on the probe base with a screw lock element. ~ Page 13