TWI239525B

TWI239525B - Master plate and method for manufacturing optical information storage medium

Info

Publication number: TWI239525B
Application number: TW93111527A
Authority: TW
Inventors: Yu-Chang Sui; Chao-Ping Lai
Original assignee: Prodisc Technology Inc
Priority date: 2004-04-23
Filing date: 2004-04-23
Publication date: 2005-09-11
Also published as: TW200535833A

Abstract

A master plate is for manufacturing an optical information storage medium. The master plate includes a substrate, and an improved layer. In this case, the substrate has a plurality of grooves. The improved layer is disposed on the substrate. The invention also discloses a method for manufacturing the optical information storage medium.

Description

1239525 五、發明說明（1) ()、【發明所屬之技術領域】本發明係關於一種模版及光資訊儲存媒體之制法’尤其是一種具有改質声之握 ^ 衣k方造方法。、9之杈版及先貧訊儲存媒體之製 (二）、【先前技術】隨著資訊與多媒體世代的來臨，二的=密度及容量之需求也不斷地增：產；== i。目！4:兩，分別是磁記錄媒體與光記錄媒先碟（CD-ROM)、可寫一次型光碟（CD_R)、可重型光碟（CD-RW )、唯讀型數位影音光碟（dvd_r〇m ) ^可 f次型數位影音光碟（DVD_R )、可重覆讀寫式數位影 θ光碟（DVD-RW，DVD + RW)、以及動態隨機記憶數位光碟（DVD-RAM )等等。 ’、曰面對愈來愈魔大的影音資訊量，提高光碟的資料容里，一直疋產業界追求的目標。而DVD因為具有比⑶更大的資料儲存容量，因此已於光儲存媒體市場上佔有一定的比例。目前的DVD具有不同的外觀型式，從單面單層 (single side single layer)、雙面單層（dual side single layer)、單面雙層（single side dual layer) 到雙面雙層（dual side dual layer)，它們的儲存容量範圍也從4· 7GB到1 7GB不等。若只有單面儲存資料而另一面為空白片（dummy)，則1239525 V. Description of the invention (1) (), [Technical field to which the invention belongs] The present invention relates to a method for manufacturing a stencil and an optical information storage medium ', particularly a method for manufacturing a grip with a modified sound. , The version of 9 and the system of the first poor-sound storage media (2), [previous technology] With the advent of the information and multimedia generation, the demand for density and capacity has continued to increase: production; == i. Head! 4: Two, respectively, the magnetic recording medium and the optical recording medium (CD-ROM), the write-once optical disc (CD_R), the heavy-duty optical disc (CD-RW), and the read-only digital audio-visual disc (dvd_r〇m) ^ F-order digital video disc (DVD_R), repeatable read-write digital video disc θ disc (DVD-RW, DVD + RW), dynamic random access digital disc (DVD-RAM), etc. In the face of the increasing amount of video and audio information, improving the data capacity of optical discs has always been a goal pursued by the industry. DVD has a larger data storage capacity than CD, so it has a certain proportion in the optical storage media market. The current DVD has different appearance types, from single side single layer, dual side single layer, single side dual layer to dual side dual layer), and their storage capacity ranges from 4.7GB to 17GB. If only one side of the data is stored and the other side is a dummy, then

1239525 五、發明說明（2) 其儲存容量約為4· 7GB，即為 ^ 光碟，又稱為DVD-5 ;若/ : 曰之唯讀型數位影音令，故實F所萨杜六次工4及連接兩層資料的指料的容量較單面容量的兩倍少二其儲存容量約為8.5GB。若Λ位Γ面曰雔光展碟，又稱_-9，容量可擴增為U.2GB，/即二層），或是儲存容量擴掸A17gr (早面早層加早面雙里L曰為1 7GB，亦即_-18(雙面雙每）。其中，在DVD光碟片市場上接受产厣交旦丸牧又度季乂同的，為早面單曰谷里為DVD-5以及DVD-9兩種碟片，係因片在被存取時，均省去了 "翱而"认^ 兩種規格的碟囑喜愛。 _ 了翻面的麻煩，故較為消費者所具有8.5GB容量之單面雙層DVD_R，由於容量大，再加 ^可寫一次的結構，也愈來愈受到市場重視。如圖工所不，習知的單面雙層DVD_R碟片1〇，係依序板11、：第-有機染料層12、一半反射層13、一間弟隔層土 14、一第二有機染料層15、一反射層^、一第二基板、及一接合層1 9。習知技術中，對於單面雙層DVD-R碟片1〇而言，2ρ製程（Photo-P〇lymerizati〇n process)係為常制儀之-，以下便針對2P製程作一簡單介紹：吊用之衣… ^請參照圖2，其係於一具有預刻溝槽（pre-grooved)之第一基板11上，依次形成第一有機染料層12、半反射層 13、及光固膠層14，。接著，將一具有預刻溝槽之模版θ1239525 V. Description of the invention (2) Its storage capacity is about 4 · 7GB, which is a ^ disc, also known as DVD-5; if /: a read-only digital video and audio command, so F Sadu six times of work 4 And the capacity of the finger that connects the two layers of data is less than twice the capacity of the single side. Its storage capacity is about 8.5GB. If the Λ-position Γ surface is called a light exhibition disc, also known as _-9, the capacity can be expanded to U.2GB, or two layers, or the storage capacity can be expanded to A17gr (early layer, early layer, and double layer L in the early surface). It is 1 7GB, which is _-18 (double-sided, double-sided). Among them, the one that received production in the DVD disc market is the same as the one in the past. As well as DVD-9 discs, "quote" has been omitted from the two specifications of the discs when they are accessed. _ The two specifications of the disc are loved. The single-sided double-layer DVD_R with a capacity of 8.5GB, due to its large capacity, plus the structure that can be written once, has been more and more valued by the market. As shown in the workshop, the conventional single-sided double-layer DVD_R disc 1 〇 Sequential plate 11, sequential-first organic dye layer 12, semi-reflective layer 13, interlayer soil 14, a second organic dye layer 15, a reflective layer ^, a second substrate, and a bonding layer 1 9. In the conventional technology, for a single-sided double-layer DVD-R disc 10, the 2ρ process (Photo-Polimerization process) is a conventional system-, the following will be made for the 2P process a brief introdction: Clothing ... ^ Please refer to FIG. 2, which is formed on a first substrate 11 having a pre-grooved groove, and a first organic dye layer 12, a semi-reflective layer 13, and a photo-curing layer are formed in this order. 14. Next, a stencil with a pre-etched groove θ

1239525 五、發明說明（3) (：mastei〇 18，壓合射，以固化膠體，升4^層14上，並經過紫外光照溝槽之間隔> i 4 乂 θ1隔層1 4。剝除模版1 8後，於形成 1 6。最後，脾楚一*上成弟二有機染料層1 5及反射層 16接合，再細本㈤儿# ^塗佈一接合膠19,後，與反射層層DVD-R碟片1〇之製作。形成一接合層19，即完成單面雙然而，在模版1 8剝除眭，山# L 的黏著力強，兩i # 于、日寸由於模版18與間隔層14之間分離。但是，筮一士 P 強的拉力來使間隔層1 4與模版1 8 ^ 有機染料坐對上較弱，無法承受強：寸二：？及+反射層13之接著力相步驟時，則易發生間隔厚^力。因Λ，進行剝除模版的示）、或是導致第—曰14破碎剥落（如圖2D虛線處所板11分離的現象料層12及半反射層13與第-基成碟片之良率偏低、存取之行進路徑，進而造有鑑於上述問題，成，以解決習知單面雙層本案\明人^因於此，亟思一種可層之接著力太強問題，碟片剝除杈版時，模版與間隔之「模版及光資訊儲# ^解決碟片製程良率偏低等問題储存媒體之製造方法」。 (三）、【發明内容】本發明之一目的炎拉體之製造，模版係且右，、一種杈版，用於光資訊儲存媒粗糙度變小。 <、有一改質層，以使模版之表面張力或本發明之另一目1239525 V. Description of the invention (3) (: mastei〇18, compression shot, to cure the colloid, rise on the 4 ^ layer 14 and pass through the interval of the ultraviolet light groove > i 4 乂 θ1 the spacer layer 1 4. Peel off After the stencil 18 is formed, 16 is formed. Finally, the spleen 1 * is bonded to the organic dye layer 15 and the reflective layer 16, and then the adhesive # 19 is coated, and then the reflective layer is applied. The production of a layer of DVD-R disc 10. Forming a bonding layer 19, the single-sided double-sided is completed. However, in the stencil 18 peeling off, the ## strong adhesion force, the two i # Yu, Ri inch due to the stencil 18 It is separated from the spacer layer 14. However, the strong pulling force of P1 makes the spacer layer 1 4 and the stencil 1 8 ^ The organic dye sits weakly on the pair and cannot withstand the strong: inch 2:? And + reflective layer 13 When the force phase step is followed, a thick gap is easy to occur. Due to Λ, the peeling of the template is shown), or it causes the 14th to be broken and peeled off (as shown in the dotted line in Figure 2D, the plate 11 is separated from the material layer 12 and half). The reflective layer 13 and the first-based disk have a low yield and a path of access, which is further in view of the above problems, and is designed to solve the conventional single-sided double-layered film. \ 明人 ^ Because of this, I am thinking about a problem that the layer adhesion is too strong. When the disc is stripped, the template and the space "template and optical information storage # ^ solve the problem of low yield of the disc manufacturing process and so on" Manufacturing method of storage medium ". (3) [Summary of the Invention] The manufacture of Yanlati, one of the objects of the present invention, is a stencil with a right side, and a branched plate for reducing the roughness of optical information storage media. &Lt;, A modification layer to give the surface tension of the stencil or another aspect of the present invention

第7頁的為提供一種光資訊儲存媒體之製造 mu 1239525 〆---—^ --------- 彡、發明說明（4) ' 方法，尤其疋利用一表面張力或粗糙度較小之模版，來製造單面雙層DVD-R之光資訊儲存媒體之製造方法。本發明之模版 5 用於，— 光資含一基板及改質層〇其改質層係設置於基板上 Ο 存媒體製造方法 5 其係包含板之上形成 -— 第反射層 •— 改質層之一一模版塗佈板 ; 固化光固膠層 9 並剝除第二記錄層於間隔層上；形上 9 以及接合 - 第二基板於及光資訊儲存媒體之製造方習知技術相比 5 依本發明之方法由於改質層能降低模進而降低間隔層與模版之間所需之剝除力量較小 5 不黏著力過大 9 而使得間隔層第 —— 有機染料層或是第一反而與第基板分離的現之良率，進而也降低了生產緣疋’為達上述目的，依訊儲存媒體之製造，模版係包中’基板係具有複數預刻溝槽又，依本發明之光資訊儲形成一第一記錄層於一第一基於第一記錄層之上；形成具有光固膠層；壓合模版及第一基模版以形成一間隔層；形成一成一第二反射層於第二記錄層第二反射層上。承上所述，本發明之模版法’模版係具有一改質層。與模版及光資訊儲存媒體之製造版之表面粗糙度及表面張力，的黏著力。故於剝除模版時，發生因為間隔層與模版之間的破碎剝落的問題；也不易發生射層因為剝除模版的力量過大象。如此一來，即可提昇產品成本。Manufacture of an optical information storage medium on page 7 mu 1239525 〆 ---- ^ --------- 彡, description of the invention (4) 'Methods, especially using a surface tension or roughness comparison Small template for manufacturing single-layer double-layer DVD-R optical information storage media. The stencil 5 of the present invention is used for: — the light material includes a substrate and a reforming layer; 0. the reforming layer is provided on the substrate; 0; a storage medium manufacturing method 5; One of the layers is a stencil-coated plate; the photo-curing layer 9 is cured and the second recording layer is peeled off from the spacer layer; the shape 9 and the bonding-the second substrate is compared with the conventional technology of the optical information storage medium. In the method of the present invention, the modified layer can reduce the mold and thus the required peeling force between the spacer layer and the stencil is small. 5 The non-adhesive force is too large. The current yield of substrate separation has further reduced the production margin. In order to achieve the above-mentioned purpose, according to the manufacture of storage media, the template package includes a plurality of pre-etched grooves. According to the optical information storage of the present invention, Form a first The recording layer is on a first based on the first recording layer; formed with a light-curing adhesive layer; the stencil and the first base template are laminated to form a spacer layer; a second reflective layer is formed on the second recording layer to form a second reflection On the floor. As described above, the stencil method 'stencil of the present invention has a modified layer. The surface roughness and surface tension of the stencil and the manufacturing version of the optical information storage medium. Therefore, when peeling the stencil, the problem of peeling due to the breakage between the spacer layer and the stencil occurs; it is also not easy for the ejection layer to appear too strong because of the force of peeling the stencil. This can increase product costs.

第8頁 1239525 五、發明說明（5) 版及關圖*，說明依本發明較佳實施例之模版及先貝訊儲存媒體之製造方法。 ⑪妁心稞之數位⑨2 I本發明之光貧訊儲存媒體係為可寫-次式位衫音光碟（DVD-R)，且係以2P製程所形成之單面雔Page 8 1239525 V. Description of the invention (5) version and diagrams *, which explain the manufacturing method of the template and the Xianbeixun storage medium according to the preferred embodiment of the present invention. ⑪ 妁心稞的数 ⑨2 I The light-poor storage medium of the present invention is a writable-time-type shirt audio CD (DVD-R), and is a single-sided formed by the 2P process.

碟片20為例，以說明本發明 J 造方法之較佳實施例。仔烯體之衣之光參照圖3至圖5，以說明依本發明較佳實施例之光貝訊儲存媒體之製造方法。、〃如圖3所示，本實施例中，光資訊儲存媒體之製造方 3 f 一冗錄積層形成程序（P1 )、一間隔層形成程序（）、一第二記錄積層形成程序（P3)、以及一第二基板接合程序（p 4)。如圖4及圖5所示，第一記錄積層、係包含一第一記錄層22及一第一反射層23。於第一記錄積層形成程序（ρι) 中係包含一第一纪錄層形成步驟（S1 0 )，將一第一記錄層形成於一第一基板之上，以及一第一反射層形成步驟 (S20)，將一第一反射層於第一記錄層之上。、其中’第一記錄層22之材質可為有機染料或是無機材料L本實施例中，第一記錄層22之材質係為有機染料，並以旋轉塗佈方式形成。而第一反射層23係為一半反射層 (semi-ref lective layer)，其材質係為金屬或其合金，例如是銀/銀合金、以及鋁/鋁合金等等。而第一反射層23 之形成方式，通常是利用濺鍍或蒸鍍方式來形成。於間隔層形成程序（P2)中係包含一改質層形成步驟The disc 20 is taken as an example to describe a preferred embodiment of the manufacturing method of the present invention. Referring to FIG. 3 to FIG. 5, a method for manufacturing a light-beam storage medium according to a preferred embodiment of the present invention is described with reference to FIGS. 3 to 5. As shown in FIG. 3, in this embodiment, the manufacturer of the optical information storage medium 3 f a redundant recording layer formation procedure (P1), a spacer layer formation procedure (), and a second recording layer formation procedure (P3) And a second substrate bonding process (p 4). As shown in Figs. 4 and 5, the first recording stack includes a first recording layer 22 and a first reflective layer 23. The first recording layer forming process (ρι) includes a first recording layer forming step (S1 0), forming a first recording layer on a first substrate, and a first reflective layer forming step (S20). ), Placing a first reflective layer on the first recording layer. The material of the first recording layer 22 may be an organic dye or an inorganic material. In this embodiment, the material of the first recording layer 22 is an organic dye and is formed by a spin coating method. The first reflective layer 23 is a semi-reflective layer, and the material of the first reflective layer 23 is a metal or an alloy thereof, such as silver / silver alloy, aluminum / aluminum alloy, and the like. The first reflection layer 23 is usually formed by sputtering or vapor deposition. The step of forming a spacer layer (P2) includes a step of forming a modified layer

第9頁 1239525 五、發明說明（6) (S30)、一光固膠形成步驟（S4〇) ' 一壓合固化步驟 (S 5 0 )、以及一模版剝除步驟（s 6 〇 )。又’如圖4及圖5所示，改質層形成步驟（S30)係於一基板31上，形成一改質層32。其中，模版3〇係包含一基板 3 1 ’基板3 1係具有複數預刻溝槽（p r e — g r 〇〇 v e d )，基板3 1 之材質係選自聚碳酸酯、聚甲基丙烯酸甲酯、玻璃及鎳金屬其中之一。改質層3 2可利用濺鍍方式形成，其材質係選自於氮化矽（silicon nitride, SiNx)、氧化矽（silicon oxide,Page 9 1239525 V. Description of the invention (6) (S30), a photocuring step (S40), a compression curing step (S50), and a stencil stripping step (s60). As shown in FIGS. 4 and 5, the modified layer forming step (S30) is performed on a substrate 31 to form a modified layer 32. The template 30 includes a substrate 3 1 ′, and the substrate 31 has a plurality of pre-grooves (pre — gr 〇ved). The material of the substrate 3 1 is selected from polycarbonate, polymethyl methacrylate, One of glass and nickel metal. The modified layer 32 can be formed by sputtering, and the material is selected from silicon nitride (SiNx), silicon oxide (silicon oxide,

SiOx)、硫化鋅-二氧化石夕（ZnS-Si02)、氧化鈦（Titanium < oxide，TiOx)、碳化物（carbide)、鋁（aluminum，Al)、銅（copper，Cu)、銀（silver，Ag)、金（gold，Au)、鉑 (platinum, Pt)金屬、鑽石薄膜（DLC)、金屬氮化物 (metal nitride, AxNl-x)、金屬氧化物（metal oxide, Ax01-x)、石帝（tellurium， Te)、鍺（germanium， Ge)、銻 (stibium, Sb)合金系列、銦（indium， In)、銀（silver，SiOx), ZnS-SiO2, Titanium < oxide (TiOx), carbide, aluminum, aluminum, copper, copper, silver , Ag), gold (Au), platinum (Pt) metal, diamond film (DLC), metal nitride (AxNl-x), metal oxide (Ax01-x), stone Tellurium (Te), germanium (Ge), stibium (Sb) alloy series, indium (In), silver (silver,

Ag)錄（Sb)、及蹄（Te)合金其中之一。另外，改質層32也可由電鍍方式形成，其材質係選自於鋁（aluminum，A1 )、銅（copper，Cu)、銀（si lver，Ag) (Sb), and hoof (Te) alloys. In addition, the modified layer 32 can also be formed by electroplating, and its material is selected from the group consisting of aluminum (A1), copper (copper, Cu), and silver (silver,

Ag)、金（gold, Au)及鉑（platinum，Pt)金屬其中之一。改質層3 2之形成，係能使模版3 0之表面粗糙度及表面張力變小，有利於下面之模版3 0剝除步驟。接著，光固膠形成步驟（S40)係塗佈以形成一光固膠層24，。而光固膠層24，係可形成於具有改質層32之模版30Ag), gold (Au) and platinum (Pt) metals. The formation of the modified layer 32 can reduce the surface roughness and surface tension of the stencil 30, which is beneficial to the following stencil 30 stripping step. Next, the photo-curing adhesive forming step (S40) is applied to form a photo-curing adhesive layer 24 ′. The light-curing adhesive layer 24 can be formed on the stencil 30 having the modified layer 32.

第10頁 1239525 五、發明說明（7) 上，也能形成於第一反射層2 3上。本實施例中，係以光固膠層24 ’形成於第一反射層2 3上為例。於壓合固化步驟（S50)中，係壓合模版30及第一基板 2 1。本實施例中，係將模版3 0具有改質層3 2之側與第一基板21上之光固膠層24’壓合。壓合後，將光固膠層2 4，照射紫外光，以形成一間隔層2 4。於模版剝除步驟（S 6 0 )中，係施力將黏合於間隔層2 4 上之模版30剝除。模版30剝除後，改質層32仍設置於基板 3 1上，能重覆使用。請參照圖4，第二記錄積層h係包含一第二記錄層2 5及_ 一第二反射層26。於第二記錄積層形成程序（P3)中，係包含一弟^一 $己錄層形成步驟（S70)、以及一第二反射層形成步驟（S 8 0 )。如圖4及圖5所示，第二記錄層形成步驟（S7 0 )中，係形成一第二記錄層2 5於間隔層2 4上，本實施例中，第二記錄層2 5之材質係為有機染料，係以旋轉塗佈方式形成。第二反射層形成步驟（S80)，係形成一第二反射層26 於第二記錄層25上。而第二反射層26係可為一半導體合金薄膜、導體合金薄膜、或金屬薄膜。如圖4及圖5所示，最後，於第二基板接合程序（P4) ❸ 中，係包含一接合膠形成步驟（S 9 0 )、以及一接合膠固化步驟（S 1 0 0 )。於接合膠形成步驟（S90)中，係以旋轉塗佈一接合膠 28’於第二反射層26上。再將第二基板27接合於接合膠28，Page 10 1239525 5. The invention description (7) can also be formed on the first reflective layer 23. In this embodiment, the light-curing layer 24 'is formed on the first reflective layer 23 as an example. In the compression curing step (S50), the compression stencil 30 and the first substrate 21 are pressed. In this embodiment, the side of the stencil 30 having the modified layer 32 is pressed against the light-curing adhesive layer 24 'on the first substrate 21. After lamination, the photo-curing layer 24 is irradiated with ultraviolet light to form a spacer layer 24. In the stencil stripping step (S 6 0), a force is applied to strip the stencil 30 adhered to the spacer layer 2 4. After the stencil 30 is peeled off, the modified layer 32 is still disposed on the substrate 31 and can be used repeatedly. Referring to FIG. 4, the second recording layer h includes a second recording layer 25 and a second reflective layer 26. In the second recording stack formation process (P3), the first recording layer formation step (S70) and the second reflection layer formation step (S80) are included. As shown in FIG. 4 and FIG. 5, in the second recording layer forming step (S7 0), a second recording layer 25 is formed on the spacer layer 24. In this embodiment, the material of the second recording layer 25 is It is an organic dye and is formed by spin coating. The second reflective layer forming step (S80) is to form a second reflective layer 26 on the second recording layer 25. The second reflective layer 26 may be a semiconductor alloy film, a conductor alloy film, or a metal film. As shown in FIG. 4 and FIG. 5, finally, the second substrate bonding process (P4) ❸ includes a bonding adhesive forming step (S 9 0) and a bonding adhesive curing step (S 1 0 0). In the adhesive formation step (S90), a second adhesive layer 28 'is spin-coated on the second reflective layer 26. Bonding the second substrate 27 to the bonding adhesive 28,

第11頁 1239525 五、發明說明（8) 上，之後’進行一接合膠固化步驟（Si〇〇)，將接合膠28，照射紫外光’以形成一接合層2 8，以將第二基板2 7接合於第二反射層26之上，即完成單面雙層j)VD-R碟片20的製造。接著，請參照圖5，以說明依本發明較佳實施例之模版0 如圖5所示，模版30係用於一單面雙層DVD-R碟片20之製造，而模版30係包含一基板31、及一改質層32。其中’基板3 1係具有複數預刻溝槽（p r e — g r 0 0 v e d)，其材質係選自於聚碳酸酯（Polycarbonate，PC)、聚曱基$ 丙烯酸曱酯（PMMA)、玻璃、及鎳金屬其中之一。本實施中，基板3 1係為聚碳酸酯。改質層32係設置於模版30上。改質層32可由濺鍍方式形成，其材質係選自於氮化石夕（silicon nitride，Page 11 1239525 5. In the description of the invention (8), after that, a bonding adhesive curing step (Si〇〇) is performed, and the bonding adhesive 28 is irradiated with ultraviolet light to form a bonding layer 28 to form a second substrate 2 7 is bonded on the second reflective layer 26, and the single-sided double-layer j) VD-R disc 20 is completed. Next, please refer to FIG. 5 to explain the stencil 0 according to the preferred embodiment of the present invention. As shown in FIG. 5, the stencil 30 is used for manufacturing a single-sided double-layer DVD-R disc 20, and the stencil 30 includes a The substrate 31 and a modified layer 32. The substrate 3 1 has a plurality of pre-grooves (pre-gr 0 0 ved), and the material is selected from the group consisting of polycarbonate (PC), polymethyl acrylate (PMMA), glass, and One of nickel metal. In this embodiment, the substrate 31 is made of polycarbonate. The modified layer 32 is provided on the stencil 30. The modified layer 32 may be formed by sputtering, and the material is selected from silicon nitride (silicon nitride,

SiNx)、氧化石夕（silicon oxide，SiOx)、硫化鋅-二氧化石夕（ZnS-Si02)、氧化鈦（Titanium oxide，TiOx)、碳化物 (carbide)、铭（aluminum，A1)、銅（copper，Cu)、銀 (silver，Ag)、金（gold，Au)、顧（platinum，Pt)金屬、鑽石薄膜（DLC)、金屬氮化物（metal nitride, AxNl-x)、金屬氧化物（metal oxide，AxOl-x)、蹄（tellurium,SiNx), silicon oxide (SiOx), ZnS-Si02, titanium oxide (TiOx), carbide, aluminum (A1), copper ( copper (Cu), silver (Ag), gold (Au), platinum (Pt) metal, diamond film (DLC), metal nitride (AxNl-x), metal oxide (metal oxide) oxide (AxOl-x), hoof (tellurium,

Te)、鍺（germanium，Ge)、銻（stibium，Sb)合金系列、銦（111(1111111，111)、銀（311乂61*，48)銻（81))、及蹄（了6)合金其中之一。另外，改質層3 2也可由電鍍方式形成，其材質係選自Te), germanium (Ge), stibium (Sb) alloy series, indium (111 (1111111, 111), silver (311 乂 61 *, 48) antimony (81)), and hoof (6) alloy one of them. In addition, the modified layer 32 can also be formed by electroplating, and its material is selected from

第12頁 1239525 五、發明說明（9) 於紹（aluminum， Ag)、金（gold, 改質層3 2之張力變小，有利綜上所述，法，模版係具有版及光資訊儲存面粗糙度及表面力。故於剝除模為間隔層與模版落的問題；也不為剝除模版的力一來，即可提昇以上所述僅本發明之精神與應包含於後附之 A 1)、銅（copper, Cu)、銀（si 1 ver，Page 12 1239525 V. Description of the invention (9) The tension of Yu Shao (aluminum, Ag), gold (gold, modified layer 32) becomes smaller, which is beneficial to sum up the above method. The stencil has a plate and optical information storage surface. Roughness and surface force. Therefore, the problem of peeling the mold is the spacer layer and the stencil falling; nor is the force of peeling the stencil to enhance the above-mentioned spirit of the present invention and should be included in the attached A 1), copper (Cu), silver (si 1 ver,

Au)及顧（platinum，Pt)金屬其中之一。形成，係能使模版3 0之表面粗糙度及表面於間隔層24形成後之模版30剝除。本發明之模版及光資訊儲存媒體之製造方一改質層。與習知技術相比，本發明之模媒體之製造方法，改質層能降低模版之表張力，進而降低間隔層與模版之間的黏著版時，所需之剝除力量較小，不易發生因之間的黏著力過大，而使得間隔層^碎剝钃 2發生第一有機染料層或是第一反射層因 ϊ過大，而與第一基板分離的現象。如此產品之良率，進而也降低了生產成本。 ί;例性.：而非為限制性者。任何未脫離 =可而對其進行之等效修改或變更，均申請專利範圍中。Au) and platinum (Pt) metals. The formation is such that the surface roughness of the stencil 30 and the surface of the stencil 30 after the formation of the spacer layer 24 are peeled off. The manufacturing method of the template and the optical information storage medium of the present invention is a reforming layer. Compared with the conventional technology, in the manufacturing method of the mold medium of the present invention, the modified layer can reduce the surface tension of the stencil, thereby reducing the adhesive force between the spacer layer and the stencil. Due to the excessive adhesive force between the spacers, the first organic dye layer or the first reflective layer is separated from the first substrate due to the excessively large adhesion. The yield of such products also reduces production costs. ί; Exemplary .: Not restrictive. Any equivalent modification or change that can be made without departing from the scope of the application is covered by the patent.

第13頁 1239525 圖式簡單說明 (五）、【圖式簡單說明】圖1 係習知單面雙層數位影音光碟之一示意圖；圖2 A〜2F 係習知之單面雙層數位影音光碟之2P製程之一示意圖；圖3 係本發明之光資訊儲存媒體製造方法之一流程圖；圖4係本發明之光資訊儲存媒體製造方法之另一流程圖；以及圖5 A〜5G 係本發明之光資訊儲存媒體製造方法及模版之一示意圖。元件符號說明： 10 單面雙層DVD-R碟片 11 第一基板 12 第一有機染料層 13 半反射層 14 間隔層 14，光固膠層 15 第二有機染料層 16 反射層 17 第二基板 18 模版 19 接合層 19’ 接合膠Page 13 1239525 Brief description of the drawings (five), [Simplified description of the drawings] Figure 1 is a schematic diagram of a conventional single-sided double-layer digital video disc; Figure 2 A ~ 2F is a conventional single-sided double-layer digital video disc A schematic diagram of a 2P process; Figure 3 is a flowchart of a method for manufacturing an optical information storage medium of the present invention; Figure 4 is another flowchart of a method for manufacturing an optical information storage medium of the present invention; and Figures 5 A to 5G are the present invention One of the optical information storage media manufacturing methods and templates. Description of component symbols: 10 single-sided double-layer DVD-R disc 11 first substrate 12 first organic dye layer 13 semi-reflective layer 14 spacer layer 14, photocuring layer 15 second organic dye layer 16 reflective layer 17 second substrate 18 stencil 19 bonding layer 19 'bonding glue

第14頁 1239525 圖式簡單說明 20 單面雙層DVD-R碟片 21 第一基板 2 2 第一記錄層 23 第一反射層 24 間隔層 24’ 光固膠層 2 5 第二記錄層 26 第二反射層 2 7 第二基板 28 接合層 2 8’ 接合膠 30 模版 31 基板 32 改質層 P1 第一記錄積層形成程序 P2 間隔層形成程序 P 3 第二記錄積層形成程序 P4 第二基板接合程序 S1 0 第一記錄層形成步驟 S20 第一反射層形成步驟 S 3 0 改質層形成步驟 S40 光固膠形成步驟 S50 壓合固化步驟 S 6 0 模版剝除步驟Page 14 1239525 Brief description of the drawings 20 Single-sided double-layer DVD-R disc 21 First substrate 2 2 First recording layer 23 First reflective layer 24 Spacer layer 24 'Photocuring layer 2 5 Second recording layer 26 Two reflective layers 2 7 Second substrate 28 Bonding layer 2 8 'Bonding glue 30 Stencil 31 Substrate 32 Modified layer P1 First recording stack formation procedure P2 Spacer layer formation procedure P 3 Second recording stack formation procedure P4 Second substrate bonding procedure S1 0 First recording layer forming step S20 First reflective layer forming step S 3 0 Modified layer forming step S40 Photocuring adhesive forming step S50 Lamination curing step S 6 0 Stencil stripping step

第15頁 1239525 圖式簡單說明 S 7 0 第二記錄層形成步驟 S80 第二反射層形成步驟 S 9 0 接合膠形成步驟 S1 0 0 接合膠固化步驟 L〇第一記錄積層 L1 第二記錄積層Page 15 1239525 Brief description of the drawing S 7 0 Second recording layer forming step S80 Second reflective layer forming step S 9 0 Adhesive forming step S1 0 0 Adhesive curing step L〇 First recording layer L1 Second recording layer

I « 第16頁I «page 16

Claims

1239525 VI. Scope of patent application 1 · A template for the manufacture of an optical information storage medium, the template includes: a substrate with a plurality of pre-etched grooves; and a modified layer provided on the substrate on. 2. The template described in item 1 of the scope of patent application, wherein the optical information storage medium is a write-once single-sided double-layer digital video disc. 3. The template described in item 1 of the scope of patent application, wherein the material of the template is one selected from the group consisting of polycarbonate, polymethyl acrylate, glass and nickel metal. 4. The template according to item 1 of the scope of patent application, wherein the modified layer is formed by coin forging. 5. The template described in item 4 of the scope of patent application, wherein the material of the modified layer is selected from the group consisting of silicon nitride, silicon oxide, zinc sulfide-silicon dioxide, titanium oxide, broken compounds, copper, silver, and silver. , Gold, flip metal, diamond film, metal nitride, metal oxide, stele, germanium, antimony alloy series, indium, silver, antimony, and tellurium alloy. 6. The stencil according to item 1 of the scope of patent application, wherein the modified layer is formed by electroplating.

Page 17 1239525 6. Scope of patent application 7. The template according to item 6 of the scope of patent application, wherein the material of the modified layer is selected from one of aluminum, copper, silver, gold and platinum. 8. A method for manufacturing an optical information storage medium, comprising: forming a first recording layer on a first substrate; forming a first reflective layer on the first recording layer; forming a modified layer Coating a photo-curable adhesive layer; laminating the stencil and the first substrate; curing the photo-curable adhesive layer and stripping the stencil to form a spacer layer; forming a second recording layer on the spacer layer Forming a second reflective layer on the second recording layer; and bonding a second substrate on the second reflective layer. 9. The method for manufacturing an optical information storage medium according to item 8 of the scope of patent application, further comprising: coating a bonding adhesive on the second reflective layer. 10. The method for manufacturing an optical information storage medium according to item 9 of the scope of the patent application, further comprising: curing the bonding adhesive to form a bonding layer. 11. The method for manufacturing an optical information storage medium according to item 8 of the scope of patent application, wherein the material of the first recording layer is an organic dye.

Page 18 1239525 VI. Scope of Patent Application · —— ------- —__ 12 · As described in Item 8 of the Patent Application Scope, the first reflective layer is the manufacturer of the optical information storage medium + Reflective layer. 13. The method described in item 8 of the scope of the patent application, wherein the modified layer is formed by the method of manufacturing the square-shaped optical information storage medium. 14. · As described in the item 13 of the scope of patent application, Method, in which the material of the modified layer is selected ^, the manufacturer of optical information storage media-silicon dioxide, titanium oxide, carbides, siliconized silicon, silicon oxide, thionium germanium pebbles film, metal nitride, metal oxidation Lu, steel, silver, gold, platinum, indium, silver, antimony, tellurium alloy-among them. Materials, tellurium, germanium, antimony alloys, and 15. The method as described in item 8 of the patent claim, wherein the modified layer is formed in the form of electroplating to form a lean storage media manufacturer 1:. = i One of the five laws, in which the modification was performed and the pain was caused by A Yubeizun's storage media. " Materials are made of aluminum, copper, silver, gold or platinum metal method, which is the manufacturer of the optical information storage medium described in Item 8 of Liganwei '/' 'The material of the recording layer is organic dye.

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