!238887 玖、發明說明： 【發明所屬之技術領域】 、本發明係有關於-種波紋管疲勞壽命測試裝置與方 法特別疋一種利用氣體之洩漏來測試波紋管疲勞壽 裝置與方法。 【先前技術】 在真空閥、真空傳動等真空設備零組件中使用的波蚊 管，是密封機構的重要元件，其係用以隔絕真空與大氣产 境。因此，除了尺寸、材質規格外，戌漏率和疲勞壽命是 最重要的功能規格。 習用波紋管疲勞壽命測試之方式係利用商業化之❹ 試驗機，該試驗機提供待測試波紋管軸向線性作動行程和 作動速度控制、以及作動週期次數記錄等功能，另壓 力變化感測裝置輔助壽命終了之判定。該疲勞試驗機提供 數公頓至數十公頓之負載能力，採用油壓制動，系統造價 昂貴。因此’針對波紋管之疲勞壽命測試專用裝置便因應 而生。 · 孩波紋管之疲勞壽命測試專用裝置通常包括一擺動機 構及一真空腔體，該擺動機構提供待測試波紋管軸向線性 作動行程’該真錄體提供待測試波时—側真空卜側 大氣之測試環境，以壓力變化辅助待測試波紋管壽命終了 《判定。在該裝置中，係利用壓力變化感測辅助壽命判 疋’若是該真空腔體之真空壓力不是在高真空，則對來自 波紋管因疲勞破壞產生的戌露感測不錄，對於低戌漏率 1238887 要求之真空用途波紋管壽侖佥且合 P备易阿估，此外腔體壓力也受 真空系浦抽氣性能、管路接點、淹 出來之結果較不可 要^洩漏寺情況影響。因此測試 的波紋管疲勞壽命 因此，有必要提供一創新且富進步性 測4裝置與方法’以解決上述問題。 【發明内容】 本發月之主要目的係利用氣體之戌漏率作為波紋管測 試件疲勞壽命終了之判定依據，感測之精度高、反應速度 快：真空腔體之壓力低於10-Wp可進行測試，而且亦 不受真芝腔體壓力變化的影響。 本發明（另一目的係採用伺服馬達動力之線性擺弧機 =為波紋管作動行程和速度控制方式，辅以光學尺作精 密疋位和作動行程監視，光閘感測記錄作動次數，以較低 的成本滿足試驗功能需求。 :達ϋ目白勺纟發明提供一種波纹管疲勞壽命測試裝 置丄其包括：一真空泵浦、一真空腔體治具、一作動桿、 乳體導入配置、一驅動裝置及一氣體測漏儀。 心成待測試波紋管安裝後，該真空腔體治具之内部係為 触封閉芝間，該封閉空間係為一真空測試環境，該真空腔 :治具可分離之~側壁上具有，透孔。待測試波紋管之一 端連接至該真空腔體治具之該側壁作密封組合固定，另一 端則被密封為該待測試件之可移動端，使待測試波紋管之 外壁側為真空密封空間構成之一部份。 μ作動柃具有—第一端及一第二端，該作動桿係穿過該 1238887 透孔，俾使該第一端與待測波紋管之可移動端聯結，且該 第二端係位於該真空腔體治具外部，並與驅動裝置連結。 該氣體導入配置係用以將一氣體導入至該待測試波紋 管之内側壁與該作動桿之間，經由真空腔體治具之透孔與 大氣環境相連通之空間。 該驅動裝置係與該作動桿之該第二端相連接，用以帶動 該作動桿作往復運動。 該氣體測漏儀係連接至該真空腔體治具，用以偵測該氣 體自該待測試波紋管洩漏至該真空測試環境之洩漏速率。 另外，本發明提出一種波紋管疲勞壽命測試方法，其包 括： (a) 將一待測試波紋管套設於一作動桿，且將該待測試 波紋管與該作動桿第一端聯結之端面密封。 (b) 將該作動桿之第二端穿過真空腔體治具可分離設有 透孔之側壁，並密封固接該待測試波紋管之另一端於該真 空腔體治具之一側壁上。 (c) 將裝設有待測試波紋管及作動桿之側壁，以裝設待 測試波紋管之一側與真空腔體治具主體作密封結合，形成 待測試波紋管位於真空腔體治具内部，其外壁側為真空密 封空間構成之一部份，且作動桿突出於真空腔體治具外部 之組合狀態。 (d) 在待測試波紋管未被拉伸或壓縮狀態，將作動桿與 線性驅動裝置作聯結鎖合。 (e) 啟動真空泵浦提供真空腔體治具内部低壓環境條 8887 件 側真 構成待測試波紋管一 條件。 空/ 一側大氣壓之測試環境 、⑺設定線性驅動裝置之中心位置、作動寬度、作動速 又光閉位置等作動條件，啟動線性驅動裝置驅動該作動 桿使其作往復直線運動，進行疲勞壽命測試。 (g)定期導人—氦氣氣體至該待測試波紋管之内侧壁與 ’茨作動杯&間’作為$漏率量測之介f，並利用氦氣測漏 H則氦a A漏至真$系、统之速率。以上述淺漏率量測結 果為依據’依-準則判斷該待測試波紋管之壽命。 【實施方式】 參考圖1及® 2，本發明較佳實施例之波紋管疲勞壽命 測試裝置包括：-真空腔體治I 1〇、一作動桿12、—氣 體導入配置、-驅動裝置、一氣體測漏€ 14、一真空泵 浦16、一真空計顯示器18、一光閘2〇、一計數器22、— 光學尺24及一光學尺顯示器26。 该真S腔體治具1 〇之内部在待測試波紋管36組裝後係 為一封閉空間，該封閉空間係為一真空測試環境。在本實 施例中該真空腔體治具10係為圓筒狀外型，其一側係為 了刀離之二板11 ’该蓋板11具有一透孔hi及至少一 通孔112。該透孔111之内徑略大於作動桿12之外徑以供 作動桿12穿過，且兩者間保留一間隙。該通孔丨12係位 於蓋板11之徑向方向，其一端係與透孔lu相通，另一 端係開設於点盍板11之表面形成一氣體導入孔113。該 氣體導入孔設有一氣體導入接頭(圖〗）用以導 1238887 入ζ氣胆。在具他 氣體導入孔11 3。 該真空腔體治具1 〇更包括· _ 匕栝·一罘—管路接頭28、一直 空計30、一第二管路接頭32 … W及軸承34。該第一管路接 頭則連接至真空泵浦16，以將該封閉空間抽直空。今 真空計3〇係用以偵測該封閉空間之真空狀態，而顯示： 真空計顯示器18 〇該第二營踗垃碎^ 、 吕路接頭32係連接至氣體測漏 儀14。該軸承34係固設於苛芸扣υ τ , 又於4盍板1 i外側上，用以支 作動桿12。 、 該作動桿12具有-第-端⑵及一第二端122。兮作 動桿12係穿過該蓋板u之透孔lu，該第一端ΐ2ι係位 於該真空腔體治具内部，且該第二端122係位於該真空腔 體治具10外部。該第—端121套設一待測試波紋管36， 該待測試波紋管36之兩端分別固接至一密封端板38及— 轉接端板40，孩密封端板38係固接於該作動桿12之第 一端121之端面。孩轉接端板4〇亦套設於該作動桿以 上，如圖3所示，且密封固設於該蓋板u上，如圖4所 示。 該氣體導入配置係用以將一氣體導入至該待測試波纹 管36之内側壁與該作動桿12之間，在本實施例中，該氣 體導入裝置包括該通孔112及氣體導入接頭114，然而在 其他實施例中’該氣體可以利用其他方式導入至該待剛試 波紋管36之内側壁與該作動桿12之間。被導入之該氣體 係作為量測介質，當其被導入至該待測試波紋管36之内 -9- Ϊ238887 侧壁與該作動桿12之 、、严 徑只有待測試波紋〜入真空測試環境之途 界面，故當待測試仏管、3=^38及轉接端板40之 該氣體树產生變化時即可被::效應而產生裂紋導至 判有無開放性劣紋發i比 蛛變化評 精準。 b白用I測壓力變化之方式來得 孩驅動裝置係與該作動捍 以帶動該作動桿12作直緣往"：：：12::連接’用 ^ 又運動。在本貫施例中，核 驅動裝置係為一線性擺弧趟播Μ τ ^ ^ y 弧機構42，該線性擺弧機構42係 由一伺服馬達（圖中未千、k 14 所库用… 所驅動。因為-般在真空系統 所應用<銲接型波紋管具 泮性吊數特性，故壓縮或拉伸 所/員之力里不大，以商f J卜鹿 4文⑼業化應用之產品規格分析，最 動行程時波紋管受力多不 又刀夕4凫過50N，以伺服馬達作為動力 足以適用。 孩線性擺旅機構42包括—擺派機構控制器44，並㈣ 之行程及速度等作動條件皆由該祕機魅制器Μ所設 2。另外，該線性擺弧機構42上設有該光問2〇、該計數 益22、該光學尺24及該光學尺顯示器％。該光問μ係 用以感測該作動桿12之作動次數，而紀綠於該計數器 22。該光學尺24係用以定位㈣中心之相對位移量，而 顯示於該光學尺顯示器26。 該氣體測漏儀14係連接至該真空腔體治具1〇，用以偵 ’則泫氣體自該待測試波紋管3 6洩漏至該真空測試環境之 速率。在本實施例中，該氣體測漏儀14係為一氦氣質譜 -10- 1238887 儀。質歸儀測漏法是精度最佳的測漏方法，商業化氛氣測 漏儀可量測至7.6xl(rlWliter/see’真空度在ig.2論以 下不於響乱氣質譜儀的運作，故—可抽至ι〇·3_直空度 之機械式真空泵浦即可滿足測試系統需求，且對系統^ 他接㉙《&漏或真空泵浦抽氣能力變化產生的真空度變 化在1 (T2t〇rr以下都尚可接受。 本發明另關於-種波紋管疲勞壽命測試方法，其包括如 圖5所示之以下步驟。 步驟5G1係將—待測試波紋管與-作動桿之-端作穷 t組合形成—半封閉結構。在本實施例中，係將該待測試 波紋管36之-端固接於該作動桿12之端面上之一密封端 板38,再將一轉接端板4〇固接於該待測試波紋管％之 另-端’使得該待㈣波紋管36之_壁與該作動桿Μ 之間形成一半封閉結構，如圖3所示。 步驟502係將該半封閉結構與真空腔體治具作密封组 & ’形成待測試波紋管外壁側為密封空間構成之_部份。 在本實施例中，係將上述組裝完成之作動桿Η穿投—客 板U之透孔’且將該轉接端板4〇固接於該蓋板^上了 腔二Π盖:，U固接於一真空腔體治具10，使該真空 I祖〉口具10内邵形成一封閉空間，如圖2所示。 步驟503係將作動桿與驅動裝置作聯結鎖合。在本實施 列中’在待測試波紋管未被拉伸或壓縮狀態，將作 12與線性擺弧機構42作聯結鎖合。 干 步驟遍係啟動真空泵浦，提供真空腔體治具内部低壓 1238887 :::構成：測試波紋管承受—倒真空/ 一側大氣之測試 :办、在本I施例中，即啟動真空㈣16抽真空至最佳 :工度 < 真玄腔體治具10内部封閉空間形成-真空狀 悲 ° i步驟505係驅動該作動桿使其往復直線運動而進行疲 勞Μ纟本貫她例中，在設定線性擺派機構^之中心 位置、作動寬度、作動速度、光閘位置等作動條件後，係 利用由伺服馬達所驅動之線性擺孤機構42來帶動作動桿 1 2 ’進行疲勞壽命測試。 一步驟506係定期量測真空腔體治具内部之戌漏率，並判 、待d 4波紅官< $已發生疲勞破壬袠’作為疲勞壽命判定 之依據。其量測步驟包括如下： γ驟506-1導入一氣體至待測波紋管内側壁與該作動桿 間之空間。在本實施例中，係利用蓋U上之通孔ιΐ2 及其上之氣體導入接頭114以將一氣體導入至待測試波 紋管36之内側壁與該作轉12纟間。被導人之該氣體係 作為量測介質，在本實施例中係利用氦氣。 步驟506-2量測孩氣體洩漏至該真空腔體治具内部的洩 漏率。在本貫施例巾，係利用—氦氣質譜儀量測氦氣戌漏 率。 步驟506-3係依一準則判斷該待測試波紋管之壽命。在 本男施例中，測試進行過程中每隔一段時間量測洩漏率一 次，直到判斷該待測試波紋管失效，取失效前一次量測時 之累計作動週期數作為該待測試波紋管之疲勞壽命。該判 -12- 1238887 斷待測試波紋管失效之準 卞d』以疋该洩漏率大於一凡 值，或是該洩漏率於祛、、I 4 、 一又 +於待測滅波紋管在壓縮與 測值產生明顯變化。 呷狀怎<里 上述實施例僅為說明本發明 故炙原理及其功效，並非限制 t發明。因此習於此技術之人士對上述實施例進行修改及 ’文化仍不脫本發明之精神。本發明之權利範圍應如後述之 申請專利範圍所列。 【圖式簡單說明】 圖1顯示本發明較佳實施例之波紋管疲勞壽命測試裝 置之立體示意圖； 圖2顯示本發明較佳實施例之波紋管疲勞壽命測試裝 置之前視示意圖，其中真空腔體治具及作動桿係為剖面； 圖3顯示本發明較佳實施例中待測試波紋管與作動桿 密封組合後之示意圖； 圖4顯示本發明較佳實施例中待測試波紋管與作動桿 密封組合後固設於蓋板之系意圖；及 圖5顯示本發明之流程示意圖。 【圖式元件符號說明】 1 〇真空腔體治具 11蓋板 111透孔 112通孔 Π3氣體導入孔 114氣體導入接頭 -13 - 1238887 12作動桿 121第一端 122 第二端 14氣體測漏儀 16真空泵浦 1 8真空計顯示器 20光閘 22計數器 24光學尺 26光學尺顯示器 28第一管路接頭 30真空計 32第二管路接頭 34軸承 36待測試波紋管 38密封端板 40轉接端板 42線性擺弧機構 44擺弧機構控制器238887 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a device and method for testing the fatigue life of a corrugated tube, particularly a device and method for testing the fatigue life of a corrugated tube by using gas leakage. [Previous technology] The mosquito tube used in vacuum equipment components such as vacuum valves and vacuum transmissions is an important component of the sealing mechanism, which is used to isolate the vacuum from the atmosphere. Therefore, in addition to size and material specifications, leak rate and fatigue life are the most important functional specifications. The conventional method for testing the fatigue life of bellows is the use of a commercial test machine that provides the axial linear stroke and speed control of the bellows to be tested, as well as the recording of the number of operating cycles, and is supported by a pressure change sensing device. End of life judgment. The fatigue tester provides a load capacity of several tens to tens of metric tons, and uses hydraulic braking, which makes the system expensive. Therefore, a special device for fatigue life testing of bellows is developed. · The special device for fatigue life testing of bellows usually includes a swing mechanism and a vacuum cavity. The swing mechanism provides the axial linear actuation stroke of the bellows to be tested. The true record provides the wave to be tested-side vacuum and side atmosphere. The test environment assists the end of the life of the bellows to be tested with pressure changes. In this device, pressure change sensing is used to assist the life judgment. If the vacuum pressure of the vacuum cavity is not at high vacuum, then the exposure of the dew from the corrugated tube due to fatigue damage is not recorded, and for low leakage The vacuum use bellows required by the rate 1238887 is suitable for easy evaluation. In addition, the cavity pressure is also affected by the pumping performance of the vacuum system, the connection of the pipeline, and the result of flooding. Therefore, the fatigue life of the bellows tested is therefore necessary to provide an innovative and progressive testing device and method 'to solve the above problems. [Summary of the invention] The main purpose of this month is to use the leakage rate of gas as the basis for determining the end of the fatigue life of the corrugated tube test piece. The accuracy of the sensing is high and the response speed is fast: the pressure of the vacuum chamber is less than 10-Wp. Tested and unaffected by pressure changes in the real cavity. The present invention (another purpose is to use a servo motor-powered linear arc swing machine = actuating stroke and speed control mode for a corrugated tube, supplemented by an optical ruler for precise positioning and actuating stroke monitoring, and the shutter sensing records the number of actuations to compare The low cost meets the test function requirements. The invention provides a fatigue life testing device for bellows, which includes: a vacuum pump, a vacuum cavity fixture, an actuating rod, a milk introduction configuration, and a driving device. After the installation of the bellows to be tested, the interior of the vacuum cavity fixture is a closed Shiba room, and the closed space is a vacuum test environment. The vacuum cavity: the fixture can be separated. ~ There is a through hole on the side wall. One end of the bellows to be tested is connected to the side wall of the vacuum cavity fixture for sealing and fixing, and the other end is sealed as the movable end of the part to be tested, so that the bellows to be tested The outer wall side is a part of the vacuum-sealed space. Μ Actuator has a first end and a second end, and the actuating rod is passed through the 1232887 through-hole, so that the first end and the measured The movable end of the corrugated tube is connected, and the second end is located outside the vacuum cavity fixture and is connected to the driving device. The gas introduction configuration is used to introduce a gas into the inner side wall of the corrugated tube to be tested and A space connected between the actuating rods and the atmospheric environment through a through hole of the vacuum cavity fixture. The driving device is connected to the second end of the actuating rod to drive the actuating rod to reciprocate. The gas leak detector is connected to the vacuum cavity fixture to detect the leakage rate of the gas from the corrugated tube to be tested to the vacuum test environment. In addition, the present invention provides a method for testing the fatigue life of a corrugated tube, which Including: (a) A corrugated tube to be tested is sleeved on an actuating rod, and the end face connecting the corrugated tube to be tested with the first end of the actuating rod is sealed. (B) Passing the second end of the actuating rod The vacuum cavity fixture can be separated from the side wall provided with a through hole, and the other end of the corrugated tube to be tested is sealed and fixed on one of the sidewalls of the vacuum cavity fixture. (C) The corrugated tube to be tested is installed and actuated. The side wall of the rod One side of the corrugated tube to be tested is sealed with the main body of the vacuum cavity fixture, so that the corrugated tube to be tested is located inside the vacuum cavity fixture, and the outer wall side is a part of the vacuum sealed space, and the actuating rod protrudes from The combined state outside the vacuum cavity fixture. (D) When the bellows to be tested is not stretched or compressed, the actuating rod and the linear drive device are connected and locked. (E) The vacuum pump is started to provide the vacuum cavity fixture. The internal low-pressure environment bar 8887 side really constitutes a condition of the bellows to be tested. The air / side atmospheric pressure test environment, 大 set the center position of the linear drive device, the operating width, the operating speed, and the light closing position and other operating conditions to start the linear drive. The device drives the actuating rod to make a reciprocating rectilinear motion to perform a fatigue life test. (G) Regularly introduce helium gas to the inner side wall of the corrugated tube to be tested and the 'actuator cup &' as the leakage rate. Measure the medium f, and use the helium to detect the leak H, then the helium a A leaks to the true rate. Based on the results of the above-mentioned shallow leak rate measurement, the life of the bellows to be tested is determined according to the 'criteria'. [Embodiment] Referring to FIGS. 1 and 2, a fatigue life testing device for a bellows according to a preferred embodiment of the present invention includes:-a vacuum cavity treatment I 10, an actuating rod 12,-a gas introduction configuration,-a driving device, a Gas leak detection € 14, a vacuum pump 16, a vacuum gauge display 18, a shutter 20, a counter 22, an optical scale 24 and an optical scale display 26. The interior of the true S cavity fixture 10 is an enclosed space after the bellows 36 to be tested is assembled, and the enclosed space is a vacuum test environment. In this embodiment, the vacuum cavity fixture 10 has a cylindrical shape, and one side of the vacuum cavity fixture 10 is a two-piece plate 11 ′. The cover plate 11 has a through hole hi and at least one through hole 112. The inner diameter of the through hole 111 is slightly larger than the outer diameter of the actuating rod 12 for the actuating rod 12 to pass through, and a gap remains between the two. The through hole 12 is located in the radial direction of the cover plate 11. One end thereof communicates with the through hole lu, and the other end is opened on the surface of the spot plate 11 to form a gas introduction hole 113. The gas introduction hole is provided with a gas introduction joint (picture) for guiding 1238887 into the ζ gas tank. In the other gas introduction holes 11 3. The vacuum cavity fixture 10 further includes a pipe joint 28, an air gauge 30, a second pipe joint 32, ..., and a bearing 34. The first pipe joint is connected to a vacuum pump 16 to evacuate the enclosed space. The vacuum gauge 30 is used to detect the vacuum state of the enclosed space, and displays: the vacuum gauge display 18, the second battalion 踗, and the Lu joint 32 are connected to the gas leak detector 14. The bearing 34 is fixedly mounted on the harsh buckle υ τ and on the outside of the 4 盍 plate 1 i to support the moving rod 12. The actuating lever 12 has a first end and a second end 122. The actuating rod 12 passes through the through hole lu of the cover u, the first end ΐ2ι is located inside the vacuum cavity fixture, and the second end 122 is located outside the vacuum cavity fixture 10. The first end 121 is provided with a corrugated tube 36 to be tested. The two ends of the corrugated tube 36 to be tested are fixedly connected to a sealed end plate 38 and a transfer end plate 40, respectively. An end surface of the first end 121 of the actuating rod 12. The child transfer end plate 40 is also sleeved on the actuating rod, as shown in FIG. 3, and is sealed and fixed on the cover u, as shown in FIG. The gas introduction configuration is used to introduce a gas between the inner side wall of the corrugated tube 36 to be tested and the actuating rod 12. In this embodiment, the gas introduction device includes the through hole 112 and a gas introduction joint 114, However, in other embodiments, the gas may be introduced between the inner wall of the corrugated tube 36 to be tested and the actuating rod 12 in other ways. The introduced gas system is used as the measurement medium. When it is introduced into the corrugated tube 36 to be tested, the diameter of the side wall and the actuating rod 12 is only the corrugation to be tested. Interface, so when the gas tree to be tested, 3 = ^ 38 and the adapter end plate 40 changes, the crack can be caused by the :: effect to determine whether there is an open bad texture i. Be precise. b white is obtained by measuring the pressure change with I. The driving device is connected with the actuation to drive the actuation rod 12 to make a straight edge " ::: 12 :: connection 'and ^ to move. In the present embodiment, the nuclear driving device is a linear pendulum arc-traveling M τ ^ ^ y arc mechanism 42. The linear pendulum arc mechanism 42 is used by a servo motor (not shown in the figure, k 14 is used in the library ... Driven. Because the general application in the vacuum system < welded bellows has the characteristics of flexible hanging number, so the force of compression or tension is not large, in order to apply to the industry According to the product specification analysis, the bellows is subjected to more force during the most dynamic stroke, and the blade is more than 50N, and the servo motor is sufficient as the power. The linear travel mechanism 42 includes the pendulum mechanism controller 44, and the stroke Operating conditions such as speed and speed are set by the secret machine charmer M. In addition, the linear pendulum mechanism 42 is provided with the optical question 20, the counting benefit 22, the optical ruler 24, and the optical ruler display% The light question μ is used to sense the number of movements of the actuation lever 12, and Ji Lu is in the counter 22. The optical ruler 24 is used to locate the relative displacement of the center of the cymbal, and is displayed on the optical ruler display 26. The gas leak detector 14 is connected to the vacuum cavity fixture 10 for detecting the gas The rate at which the bellows 36 to be leaked to the vacuum test environment. In this embodiment, the gas leak detector 14 is a helium mass spectrometer-10- 1238887 instrument. The mass return leak detection method has the best accuracy Leak detection method, commercial atmosphere gas leak detector can measure to 7.6xl (rlWliter / see 'vacuum degree below ig.2 theory is not less than the operation of the disturbing gas mass spectrometer, so-can be pumped to ι〇 · 3 _Mechanical vacuum pump of straightness can meet the requirements of the test system, and for the system ^ he then accepted the & leak or the change in the vacuum pumping capacity caused by the change in pumping capacity is less than 1 (T2t〇rr is acceptable The present invention also relates to a method for testing the fatigue life of a bellows, which includes the following steps as shown in Fig. 5. Step 5G1 is a combination of the bellows to be tested and the end of the actuating rod as a poor t to form a semi-closed structure. In this embodiment, the -end of the corrugated tube 36 to be tested is fixed to a sealed end plate 38 on the end surface of the actuating rod 12, and an adapter end plate 40 is fixed to the test to be tested. The other end of the bellows% makes a half seal between the wall of the bellows 36 and the actuating rod M The closed structure is shown in Fig. 3. Step 502 is to form the semi-closed structure and the vacuum cavity fixture as a sealing group & 'form the outer wall side of the bellows to be tested to form a part of the sealed space. In this embodiment The above-mentioned assembled actuating rod is inserted through the through hole of the guest plate U, and the adapter end plate 40 is fixed to the cover plate ^, and the second cavity cover is fixed: U is fixed to a vacuum The cavity fixture 10 forms a closed space inside the vacuum fixture 10, as shown in Fig. 2. Step 503 is to link and lock the actuating rod and the driving device. Test the bellows is not stretched or compressed, and make the 12 and the linear swinging mechanism 42 linked and locked. The dry steps are used to start the vacuum pump, and provide the internal low pressure of the vacuum cavity fixture. 1238887 ::: Composition: test the bellows withstand-down vacuum / test of one side of the atmosphere: do, in this example, start the vacuum ㈣16 pump Vacuum to the best: work < formation of closed space inside the vacuum cavity fixture 10-vacuum-like sadness i Step 505 is to drive the actuating rod to make it reciprocate linearly to perform fatigue. In this case, in her example, After setting the operating conditions such as the center position, operating width, operating speed, and shutter position of the linear pendulum mechanism ^, the linear pendulum mechanism 42 driven by the servo motor is used to drive the operating lever 1 2 ′ to perform the fatigue life test. A step 506 is to periodically measure the leakage rate inside the vacuum cavity fixture, and judge and wait for 4 waves of red officer < $ fatigue fatigue has occurred ' as the basis for determining the fatigue life. The measurement steps include the following steps: γ step 506-1 introduces a gas into the space between the inner wall of the bellows to be measured and the actuating rod. In this embodiment, the through-hole 2 on the cover U and the gas introduction joint 114 on the cover U are used to introduce a gas between the inner wall of the corrugated tube 36 to be tested and the rotation 12 °. The guided gas system is used as the measurement medium. In this embodiment, helium gas is used. Step 506-2 measures the leakage rate of the gas leaked into the vacuum cavity fixture. In this example, the helium leak rate was measured using a helium mass spectrometer. Step 506-3 is to judge the life of the bellows to be tested according to a criterion. In this male example, the leakage rate is measured at intervals during the test until the failure of the bellows to be tested is determined, and the cumulative number of operating cycles during the previous measurement before failure is taken as the fatigue of the bellows to be tested. life. The judgment-12- 1238887 judges the failure criterion of the bellows to be tested (d) in order to determine whether the leakage rate is greater than a normal value, or whether the leakage rate is being removed, I 4, and ++. There is a significant change with the measured value. The above examples are merely illustrative of the principle and effectiveness of the present invention, and are not intended to limit the invention. Therefore, those skilled in the art can modify the above embodiments and the culture still does not depart from the spirit of the present invention. The scope of rights of the present invention should be as listed in the patent application scope mentioned later. [Brief description of the drawings] FIG. 1 shows a schematic perspective view of a corrugated tube fatigue life test device according to a preferred embodiment of the present invention; FIG. 2 shows a schematic front view of a corrugated tube fatigue life test device according to a preferred embodiment of the present invention, in which a vacuum cavity The jig and the actuating rod are cross-sections; FIG. 3 shows a schematic view of a combination of a bellows to be tested and an actuating rod seal in a preferred embodiment of the present invention; FIG. 4 shows a bellows to be tested and an actuating rod seal in a preferred embodiment of the present invention It is intended to be fixed on the cover plate after assembly; and FIG. 5 shows a schematic flow chart of the present invention. [Illustration of Symbols of Schematic Elements] 1 〇 Vacuum cavity fixture 11 cover plate 111 through hole 112 through hole 3 gas introduction hole 114 gas introduction joint -13-1238887 12 Actuator 121 first end 122 second end 14 gas leak detection 16 vacuum pump 1 8 vacuum gauge display 20 light shutter 22 counter 24 optical ruler 26 optical ruler display 28 first pipe joint 30 vacuum gauge 32 second pipe joint 34 bearing 36 bellows to be tested 38 sealed end plate 40 transfer End plate 42 linear swing arc mechanism 44 swing arc mechanism controller