1232701 【發明所屬之技術領域】 本發明是有機發光元件，特別是關於一種能有效增加 沒取光輸出效率之光子晶體有機發光元件。 【先前技術】 β由於有機發光元件具備低成本、壽命長、低驅動電 摩、反應速度快、發光效率佳、耐溫差、耐震性、高視角 及厚度薄等特性，因而被譽為次世代的發光顯示器技術。 有機發光元件在其發光層的電子電洞結合產生光之後，最 重要的就是如何有效率的將光導出提高元件的汲取光輸出 ，，。由於光在疏密介質之間傳輸，會因為折射率不同的 衫響而發生全反射。一般而言，有機電激發光元件經電子 電洞再結合而產生的光量，僅有約2〇%可穿透基板至空氣 I來，使得有機電激發光元件需要以更高的電壓來驅動， 前技術大多採反射 光學的發展，光子 ^達到所需的亮度，這不僅會增加有機電激發光元件的耗 把，同=也會因為熱量的累積，導致元件的壽命減短。 ▲目則已知能提高有機發光元件的汲取光輸出效率之先 、干涉、折射或波導原理。 。而由於量子1232701 [Technical field to which the invention belongs] The present invention is an organic light emitting element, and more particularly, it relates to a photonic crystal organic light emitting element that can effectively increase the output efficiency of light. [Previous technology] β Because of its low cost, long life, low driving electric friction, fast response speed, good luminous efficiency, temperature difference, shock resistance, high viewing angle, and thin thickness, organic light-emitting elements are praised as the next generation Light-emitting display technology. After the organic light-emitting elements of the light-emitting layer are combined with electron holes to generate light, the most important thing is how to efficiently direct the light to improve the light output of the element. Because light is transmitted between dense and dense media, total reflection occurs due to the ringing of different refractive indices. Generally speaking, only about 20% of the amount of light generated by the organic electro-optical light-emitting element through the recombination of electron holes can penetrate the substrate to the air I, so that the organic electro-optical light-emitting element needs to be driven at a higher voltage. Most of the previous technologies use the development of reflective optics to achieve the required brightness of photons, which will not only increase the consumption of organic electrical excitation light elements, but also reduce the life of the elements due to the accumulation of heat. ▲ It is known that the principle of interference, refraction, or waveguide that can improve the light extraction efficiency of organic light emitting elements is improved. . And because of the quantum
1232701 五、發明說明（2) 產生出一種光子的能隙（photon i c band gap)，使具有特定 波長範圍的光子無法在晶體中傳播，進而決定光波的前進 方向。 於 1997 年發表於0pts· Lett·期刊之"1{^11-6：^61'1131-quantum-difficiency organiclight-emitting 中’揭露光子晶體於光顯示元件上的應用，藉由 圓^光子晶體陣列結構來增加光輸出效率，然而光子晶體 可旎會造成部份散射損耗而導致輸出率不如預期，使得實 際測量之實驗值無法提升至理論值。又如美國專利第 6 63 0 684號專利所述，於上表面具有凹凸結構的玻璃基板 的表面建立有機發光元件，藉由凹凸結構來增加光輸出效 率。其凹凸結構可間隔特定距離排列為方形、六角形、三 角形矩陣或是以隨機方式㈣，來降⑯出射光之全反 應。習知的有機電激發光元件僅有入射角小於全反射臨^ 角路徑的光線能透射出來，而大部分大角度的光線都合因 全反射使光線出不纟，形成侧向波導耗損， =二 可改變光的路徑減少全反射，增加元件、，、口構 【發明内容】 + 有鑑於此，本發明提供一種光子晶體有機笋 於元件之發光側或發光輸出面除了增加週期性：’ 來降低出射光之全反射效應。更藉由使凹 以上週期或於凹凸結構上增加功能性的複製^聂ς有兩種 子晶體效應’以控制發光擴散角並；u 3 能有效導出元件表面。 η漏先’使光線 1232701 五、發明說明（3) 一 、具光子晶體特性之有機發光元件係由含光子晶體結構 之透明基板、修整層、平坦層、透明電極、有機電激發光 膜堆與負極電極所形成，於透明基板之上表面形成具^兩 種以上週期之凹凸結構，修整層設置於透明基板的上表 面，而平坦層則置於修整層之上，透明電極設置於平坦層 的上表面，有機電激發光膜堆則設於透明電極上，再堆^ 負極電極於有機電激發光膜堆上以組成有機發光元件，& 透明電極與負極電極激發有機電激發光膜堆發出光線。其 中’透明基板所具有之凹凸結構為二維排列之光子晶體， 可以三角晶格（triangular)、四角晶格（square)、六角晶 格（hexagonal)或其混合型式之型態排列，且凹凸結構依 照光學設計具有不同的兩種以上週期。 —此外，本發明更具有一種光子晶體有機發光元件，由 έ光子晶體結構之透明基板、複製堆疊膜、透明電極、有 機電激發光膜堆與負極電極所形成，透明基板之上表面具 有週期性凹凸結構，其具有一種以上之週期，複製堆疊膜 由多層薄膜組成並形成於週期性凹凸結構上，且複製堆疊 膜根據週期性凹凸結構產生週期性的起伏，透明電極設置 於複製堆疊膜的上表面，有機電激發光膜堆則設於透明電 極上’再堆疊負極電極於有機電激發光膜堆上，使透明電 極與負極電極激發有機電激發光膜堆發出光線。根據不同 的功能設計，複製堆疊膜可為修整層、平坦層及高低折射 率交錯結構之任意組合，同時此複製堆疊多層薄膜具有改 變出光頻譜之效果。1232701 V. Description of the invention (2) A photon energy band gap (photon i c band gap) is generated, so that photons with a specific wavelength range cannot propagate in the crystal, and then determine the forward direction of the light wave. Published in 1997 in the 0pts Lett Journal " 1 {^ 11-6: ^ 61'1131-quantum-difficiency organic light-emitting 'to expose the application of photonic crystals to light display elements, by using circular photonic crystals The array structure is used to increase the light output efficiency. However, the photonic crystal may cause part of the scattering loss and the output rate is not as expected, so that the actual measured experimental value cannot be improved to the theoretical value. As described in U.S. Patent No. 6,63,0684, an organic light-emitting element is established on the surface of a glass substrate having a concave-convex structure on the upper surface, and the light output efficiency is increased by the concave-convex structure. The concave-convex structure can be arranged in a square, hexagonal, or triangular matrix at specific distances, or can be chirped in a random manner to reduce the full response of the emitted light. In the conventional organic electro-optic light element, only light rays with an incident angle smaller than the total reflection angle path can be transmitted, and most of the large-angle light rays are combined with total reflection to make the light out of the way, forming a side waveguide loss. The path of light can be changed to reduce total reflection, increase the number of elements, and structure [Inventive Content] + In view of this, the present invention provides a photonic crystal organic shoot on the light emitting side or light emitting surface of the element. In addition to increasing the periodicity: 'to reduce Total reflection effect of outgoing light. Furthermore, by duplicating the concave period or adding functional replication on the concave and convex structure, there are two kinds of sub-crystal effects' to control the light emission diffusion angle; u 3 can effectively derive the surface of the element. η leak first to make light 1232701 V. Description of the invention (3) I. Organic light-emitting elements with photonic crystal characteristics consist of a transparent substrate with a photonic crystal structure, a trimming layer, a flat layer, a transparent electrode, an organic electro-optic light film stack and The negative electrode is formed to form a concave-convex structure with two or more cycles on the upper surface of the transparent substrate. The trimming layer is disposed on the upper surface of the transparent substrate, and the flat layer is disposed on the trimming layer. The transparent electrode is disposed on the flat layer. On the top surface, the organic electroluminescent film stack is set on the transparent electrode, and the negative electrode is stacked on the organic electroluminescent film stack to form an organic light-emitting element. The transparent electrode and the negative electrode excite the organic electroluminescent film stack and emit. Light. Among them, the uneven structure of the transparent substrate is a two-dimensional array of photonic crystals, which can be arranged in a triangular lattice, a square lattice, a hexagonal lattice, or a mixed type thereof, and the uneven structure There are two or more different periods depending on the optical design. —In addition, the present invention further has a photonic crystal organic light emitting element, which is formed of a transparent substrate with a photonic crystal structure, a replication stack film, a transparent electrode, an organic electro-excitation light film stack, and a negative electrode. The upper surface of the transparent substrate has a periodicity. The concave-convex structure has more than one period. The replication stack film is composed of a multilayer film and is formed on the periodic uneven structure. The replication stack film generates periodic fluctuations according to the periodic uneven structure. The transparent electrode is provided on the replication stack film. On the surface, the organic electroluminescent film stack is disposed on the transparent electrode, and the negative electrode is stacked on the organic electroluminescent film stack, so that the transparent electrode and the negative electrode excite the organic electroluminescent film stack to emit light. According to different functional designs, the replication stack film can be any combination of a trimming layer, a flat layer, and a high-low refractive index staggered structure. At the same time, the replication stack film has the effect of changing the optical spectrum.
1232701 五、發明說明（4) 為使對本發明的目的、構 了解，茲配合圖示詳細說明如；特氣、功-有進-步的 【實施方式】 板上製；！：：：：光子晶體有機發光元件，㉟於透明基 好的結構开^成节，之凹凸結構，可利用微影技術將計算 凹凸钍構丄开/ i叩明基板，以及藉由自動複製薄膜製程於 膜，自1複：Ϊ早一複製堆疊膜或包含多層之複製堆疊 可先配合凹：結：3 ::不同於凹凸結構㈣^ 構上：修整層可為锯齒狀或波浪狀。生凹凸、，.. 咅圖：：f f 1圖’其為本發明第一實施例之結構截面示 W β '、1蝕刻方式於平坦之透明基板1 00上表面形成兩 ?=之：柱凹凸結構110，彡明基板m上表面分為内部 區域101與外部區域⑽，内部區域101之圓柱凹凸結構11〇 週：約為1.96微米，外部區域1〇2之圓柱凹凸結構ιι〇 = '38 ’針對個另^件之工作波長與發光擴散角度需’ ^ ，不同的週期設計。再於圓柱凹凸結構1 1 0上形 成禝製堆疊膜150，且複製堆疊膜15〇根據週期性凹凸結構 1 1 1產生週期性的起伏，複製堆疊膜丨5〇包含鋸齒狀之修整 層1 5 1以及披覆於修整層1 5 1上之平坦層1 5 2。然後，依 序鍵上透明電極1 2 〇、有機電激發光膜堆丨3 〇與負極電極 1 40。由於有機發光元件對水氣具有高度敏感性，故加入 平坦層1 5 2可產生防止水氣或氧氣滲入的效果。 此外’亦可於複製堆疊膜中加入高低折射率交錯結 1232701 五、發明說明（5) ' 1 --- 構，來產生濾鏡控制光譜的作用，請參考第2圖，其為 發明第二貫施例之結構截面示意圖。係由透明基板2 〇 〇、 複製堆疊膜250、透明電極22〇、有機電激發光膜堆23〇盥 負極電極240所形成，透明基板2〇〇之上表面具有週期性凹 凸結構Η 〇，複製堆疊膜2 5 0形成於週期性凹凸結構21q 上二先形成鋸齒狀之修整層251，再堆疊氧化鈕（Ta2〇 與氧化矽（Si 02)層形成高低折射率交錯結構25 3，再於苴 上披覆平坦層252，其中，高低折射率交錯結構2 5 3盘平坦 日係:毫整層251之形狀而自動複製。然後，依序鍍 立^ ^極220、有機電激發光膜堆230與負極電極24〇。 i折射率交錯結構253可選自無機材料、有機材 口材料之組合，如氧化鈦（Τ1 〇2)層與氧化矽 :二曰之組合，或氧化鈮（Nb2 05 )層與氧化矽（Si0 )層之 組合。 2 日〜 元件社M本發明之原理應用於另一種光子晶體有機發光 請參考第3® ’其為本發明第三實施例之結構 320、有^ ^由透明基板則、複製堆疊膜350、透明電極 中，透明雷發光膜堆330與負極電極340所形成。其 330的兩側以^32〇與負極電極340設置於有機電激發光膜堆 33 0發出# 且成有機發光元件，激發有機電激發光膜堆 置於透明A線形成單位晝素之發光區，有機發光元件係設 區的邊缘:ΐ30〇上，而透明基板300之上表面相對於發光 3〇〇之週期\係形成週期性凹凸結構310。再於透明基板 ^ 凹凸結構31 〇上形成複製堆疊膜35 0，複製堆1232701 V. Description of the invention (4) In order to understand the purpose and structure of the present invention, detailed descriptions are given in conjunction with the illustrations such as: Special Qi, Gong-Progress-Step [Embodiment] On-board system; ：：：： Photonic crystal organic light-emitting element, which is based on the structure of transparent base. The uneven structure can be calculated by lithography technology. The process is on the film. Since the 1st copy: ΪThe first copying stacking film or the copying stack including multiple layers can be matched with the concave: knot: 3 :: different from the uneven structure. 构 Structural: The trimming layer can be jagged or wavy. Concave and convex, ... Figure :: ff 1 Figure 'This is a structural cross-sectional view of the first embodiment of the present invention W β', 1 etching method to form two on the top surface of a flat transparent substrate 100? = Of: column uneven Structure 110. The upper surface of the substrate m is divided into an inner region 101 and an outer region. The cylindrical uneven structure of the internal region 101 has a circumference of about 10: about 1.96 microns, and the cylindrical uneven structure of the external region 102 has ιι = = 38 For each other, the operating wavelength and the light emission diffusion angle need to be designed differently. Then, a stacked stack film 150 is formed on the cylindrical concave-convex structure 1 10, and the stacked stack film 15 is generated periodically according to the periodic concave-convex structure 1 1 1. The replicated stack film 5 includes a zigzag trimming layer 1 5 1 and a flat layer 1 5 2 overlying the finishing layer 1 5 1. Then, a transparent electrode 12 o, an organic electro-excitation light film stack 3o, and a negative electrode 1 40 are sequentially bonded on the electrode. Since the organic light emitting element is highly sensitive to water vapor, the addition of the flat layer 1 5 2 can prevent the penetration of water vapor or oxygen. In addition, it is also possible to add high and low refractive index staggered junctions 12327701 to the replication stack film. 5. Description of the invention (5) '1 --- structure to generate the filter control spectrum effect, please refer to Figure 2, which is the second invention. A schematic cross-sectional view of the structure of the embodiment. It is formed by transparent substrate 2000, replication stack film 250, transparent electrode 22, organic electro-excitation light film stack 23, and negative electrode 240. The upper surface of transparent substrate 200 has periodic uneven structure Η 〇, replication The stacked film 2 50 is formed on the periodic uneven structure 21q. The first is to form a zigzag trimming layer 251, and then the oxide button (Ta20 and the silicon oxide (Si 02) layer are stacked to form a high and low refractive index staggered structure 25 3, and then 苴A flat layer 252 is coated thereon, in which the high-low refractive index staggered structure 2 5 3 disks are flat Japanese: the shape of the entire layer 251 is automatically copied. Then, the vertical electrode 220 and the organic electro-excitation light film stack 230 are sequentially plated. And the negative electrode 24 °. The refractive index staggered structure 253 may be selected from a combination of inorganic materials and organic materials, such as a combination of a titanium oxide (T1 〇2) layer and a silicon oxide: two, or niobium oxide (Nb2 05) A combination of a silicon oxide layer and a silicon oxide (Si0) layer. 2nd ~ The element company M The principle of the present invention is applied to another photonic crystal organic light-emitting Please refer to the third embodiment of the structure 320 of the third embodiment of the present invention, there is ^ ^ By a transparent substrate, the stacked film 350, In the bright electrode, a transparent lightning light-emitting film stack 330 and a negative electrode 340 are formed. The two sides of 330 are provided with ^ 32〇 and the negative electrode 340 at the organic electro-excitation light film stack 33 and emit an organic light-emitting element. The electromechanical excitation light film is stacked in a light-emitting area where the transparent A-line forms a unit of daylight. The edge of the organic light-emitting element system area: 设 30, and the upper surface of the transparent substrate 300 is 300 cycles relative to the light emission cycle. Uneven bump structure 310. A replication stack film 350 is formed on the transparent substrate ^ bump structure 31 〇, and a replication stack is formed.
第9頁 1232701 五、發明說明（6) 疊膜3 5 0可包含鋸齒狀之修整層。 柄i/f : : 5扭則逑光子晶體有機發光元件結構亦可Λ > 低折射率父錯結構，請參考第 加入冋 例之結構截面示咅二：：4Λ其為本發明第四實施 Λ ^ 心圖同樣地由透明基板40 0、週期柯w 製堆疊膜45°、透明電極42〇、有“：： 極440嗖置^有^ Ϊ極440所形成。透明電極420與負極電 二，μ 风早位畫素之發光區，而透明基板400之上表 發光區的邊緣之處係形成週期性凹凸結構“Ο表 膜4^η。壯U生凹凸結構410上形成複製堆疊膜45 0，複製堆疊 (s . 、、、: y的修^整層4 5 1上加入氧化鈕（Ta2 〇5)層與氧化矽 #^2播丄形成南低折射率交錯結構452，立此高低折射率交 曰、、° f^2亦根據修整層451之形狀而自動複製。 以限ί:ί:Γ月”1圭ΐ施例揭露如上所▲ ’、:然其並非用 杜、上 任何热習相關技藝者，在不脫離本發明之 $p U| . 專利保 ，‘可作些許之更動與潤飾，因此本發明之 為準Μ "乾圍須視本說明書所附之申請專利範圍所界定者 1232701 圖式簡單說明 第1圖為本發明第一實施例之結構截面示意圖； 第2圖為本發明第二實施例之結構截面示意圖； 第3圖為本發明第三實施例之結構截面示意圖；及 第4圖為本發明第四實施例之結構截面示意圖。 【圖式符號說明】Page 9 1232701 V. Description of the invention (6) The laminated film 3 50 may include a sawtooth-like trimming layer. Handle i / f:: 5 twists and turns 逑 Photonic crystal organic light-emitting element structure can also be Λ > Low refractive index father and wrong structure, please refer to the structure cross-section shown in the second example of addition 2: 4 Λ This is the fourth implementation of the present invention The Λ ^ cardiogram is similarly formed of a transparent substrate 40 0, a stacked film made of periodic Kew 45 °, a transparent electrode 42 °, and a “:: electrode 440 set ^ with ^ Ϊ electrode 440. The transparent electrode 420 and the negative electrode are two In the light emitting region of the early wind pixel, the edge of the surface light emitting region on the transparent substrate 400 is formed with a periodic concave-convex structure "0 surface film 4 ^ η". A replication stack film 450 is formed on the Zhuang U-concave and convex structure 410, and an oxidation button (Ta205) layer and a silicon oxide # ^ 2 播 上 are added on the replication stack (s., ..., y trimming layer 4 5 1). A south low-refractive index staggered structure 452 is formed, and the high-low refractive index intersecting, °, and f ^ 2 are also automatically copied according to the shape of the trimming layer 451. To limit ί: ί: Γ 月 "1 Guiyi Example revealed as above ▲ ',: But it is not used by Du, any hot-study related arts, without departing from the $ p U | of the invention. The patent guarantee,' can be changed and retouched slightly, so this invention is the standard M " Qianwei must be based on the 12327701 diagram defined by the scope of the patent application attached to this specification. The first diagram is a schematic sectional view of the structure of the first embodiment of the present invention; the second diagram is the schematic sectional view of the structure of the second embodiment of the present invention; Fig. 3 is a schematic cross-sectional view of the structure of the third embodiment of the present invention; and Fig. 4 is a cross-sectional schematic view of the structure of the fourth embodiment of the present invention.
100 透 明 基 板 110 圓 柱 凹 凸 結 構 101 内 部 區 域 102 外 部 區 域 120 透 明 電 極 130 有 機 電 激 發 光 膜 堆 140 負 極 電 極 150 複 製 堆 疊 膜 151 修 整 層 152 平 坦 層 200 透 明 基 板 210 週 期 性 凹 凸 結 構 220 透 明 電 極 230 有 機 電 激 發 光 膜 堆 240 負 極 電 極 250 複 製 堆 疊 膜 251 修 整 層 253 低 折 射 率 交 錯 結構 252 平 坦 層 1232701100 Transparent substrate 110 Cylindrical concavo-convex structure 101 Inner area 102 Outer area 120 Transparent electrode 130 Organic electroluminescent film stack 140 Negative electrode 150 Replicated stacking film 151 Finishing layer 152 Flat layer 200 Transparent substrate 210 Periodic concave-convex structure 220 Transparent electrode 230 Organic electricity Excitation light film stack 240 Negative electrode 250 Replicated stack film 251 Trimming layer 253 Low refractive index staggered structure 252 Flat layer 1232701
第12頁 圖式簡單說明 300 透明基板 310 週期性凹凸結構 320 透明電極 330 有機電激發光膜堆 340 負極電極 350 複製堆疊膜 400 透明基板 410 週期性凹凸結構 450 複製堆疊膜 451 修整層 452 高低折射率交錯結構Schematic illustration on page 12 300 Transparent substrate 310 Periodic concave-convex structure 320 Transparent electrode 330 Organic electroluminescent film stack 340 Negative electrode 350 Replicated stacking film 400 Transparent substrate 410 Periodic concave-convex structure 450 Replicated stacking film 451 Trimming layer 452 High and low refraction Rate staggered structure