TWI227164B - Clean bench - Google Patents

Abstract

A clean bench providing a working space for technicians to remove and trap particles from the surface of an object by a high-pressure spray gun or a vacuum suction unit in a clean room. This clean bench has an isolated disposal working space to avoid particles escape from it; moreover, it conducts and traps them by the design of a particle-conducting basin and a fan-filter unit (FFU) in it.

Description

1227164 V. Description of the invention (1) 1. [Technical field to which the invention belongs] The present invention relates to a dust-removing workbench, and particularly to a dust-free workbench used in a clean room working environment. 2. [Previous Technology] The clean room is now an indispensable important facility in the precision industries such as semiconductor, optoelectronics, medicine, food, etc. The quality, reliability and yield of the above industrial products and the cleanliness of the manufacturing environment and manufacturing process Have a great relationship. The noodle workers use high-pressure air to blow or remove dust from the dust particles, but they cause pollution in the clean room due to disturbances. The crystals that meet the extremely strict requirements of the clean room are sucked by vacuum. The flow causes the dust particles to fly and reduce the level of the clean room. The clean room of the dust removal round factory for small objects inside is often removed and splashed into the clean room; therefore, a dust removal requirement is designed. The figure / picture shows a side view of a conventional dust removal workbench 100, and the main body 1 0 1 has a vertical partition 1 0 3 to separate the main body 1 0 1 into a dust removal work area 5 1 1 and a radon air duct 1 〇5. The vertical partition 103 is not in contact with the upper wall 107 and the lower wall 10 9 of the main body 101, and the purpose thereof is to allow the airflow duct 105 to conduct airflow. This dust removal operation area 111 is defined by the above-mentioned vertical partition \ 〇3 and the side wall of the main body 010. Above the dust removal operation area 111 is a top partition π 3 with a plurality of through holes, which allows the air flow to pass smoothly. A daylight lamp 115 is provided below the top plate 113 to provide a dust removal operation area 111

Ϊ227164 _________ V. Illumination of invention description (2); Dust removal operation area 1 1 1 Below is a bottom partition with multiple through holes 1 1 7; air can enter the bottom partition through this bottom partition 1 1 7 1 1 7 The filter 11 9 below. The above-mentioned airflow conducting pipe 105 is composed of a vertical partition plate 〇3 and a rear wall 1221 in the main body 101 and two side walls of the main body. A blower 1 2 3 device is provided below, which generates a circulating airflow through the airflow. The tube 1 〇5 is introduced into the dust removal operation area 1 1 1 from above the main body 1 〇1 through the top partition 1 1 3, and the airflow passes through the Xu dust operation area 11 1 and enters the bottom partition 1 1 7 and is carried out in the filter 1 1 9 The transitional 'adsorbs the fine dust generated during the dust removal operation, and finally the air flow returns to the blower 1 2 3 to repeat the cycle.

The conventional dust removal workbench 1 00, for the convenience of dust removal operations, includes: an open operation window, so that the dust removal operation area 1 1 1 is a non-independent operation door. The circulating air flow can easily bring the dust out through this open operation window. Net = dust operation area 丨 丨 丨, which causes pollution in the clean room and reduces the cleanliness of the clean room. The dust removal workbench 100, the bottom screen 117 and the vertical partition 103 deer II body two side walls are joined at a vertical angle. Surface, it is easy to cause a dead corner of a slight pressure accumulation. Accordingly, it is urgent to provide an improved dusting workbench to solve the problems faced by the conventional dusting workbench. [Inventive Content]

Page 8 1227164 I In order to improve the above-mentioned conventional knowledge, in addition to providing a clean room: :: i is prone to pollution problems, the main purpose of this & supply-independent dust removal and dusting workbench is: 'surgery personnel to clear the surface of objects The dust of the present invention is another dust dust generated in the industry, which provides a dust removal operation platform to remove the opportunity for the airflow to overflow the dust removal operation area to maintain the cleanliness of the clean room. With another object of the present invention, A dust removal work table is provided at the bottom of the dust removal work area to avoid the dead angle of dust. According to the use of dust removal, use high pressure spray. This dust removal operation installs a fan, fan-filter ring and filter installation. The micro-generation is ~ with multiple basin-like structures. $ I environment exposure. The above-mentioned working table allows the !! 丄 ^ invention to provide an object that can be snatched or vacuum-cleaned in a clean room. The dust-removing workbench can be used to remove fine dust adsorbed on the surface of the object by a main body. A filter group (F and an adjustable cover, the main internal division is a knot r ~ FilterUnit, ffu) and a dust collection basin, a centrifugal fan and a high-efficiency cross-flow air circulation dust Funeral & Ϊ fan can generate a uniform airflow to filter the dust removal operation and mouse into high-efficiency filter; the dust collector is an adjustable cover composed of a bottom partition of a through hole and inclined sides. It is used to control the dust removal operation area and clean space, and the opening and closing can be adjusted according to the needs of cleanliness.

1227164 V. Description of the invention (4) Compared with the conventional dusting workbench, the present invention has at least the following advantages: (1) The present invention uses a fan-filter unit (F a η-F i 11 er Unit, FFU) for installation In the main body, in addition to improving the filtering efficiency, and simplifying the structure and volume of the conventional dust removal workbench. It is designed to remove the dust from the dust collection of the basin. The dust will be removed from the accumulation of dust, and the dust will be produced at the bottom of the dead zone. The current situation is as follows: the dust is attached to the surface of the surface, and the splashing and scattering of the four dusts are slightly induced to hit the wall side and reduce the degree of demand. The cleanliness can be set according to the plan. Fully covered cover type Λ-Λ-that is, here you can adjust the 可 aMU, which can be set with a hole in the hand, and open the whole room to remove the dust and create a separate supply for the industry. In addition to the popular gas, the follow-up dust will continue to be small and small. The energy reduction technique can also be used to clean the space and time of the room. In order to learn from the s Μ Lr / You Bundo, the photos and pictures of the attached project of the show and the drawing, the reference is published, and the explanation is four

In the formula, the implementation of rL dust removal is described in the description of Zhongming, and the work dust removal is performed on the platform. The first is Mingfa, page 10 1227164. V. Description of the invention The current description of the work platform is in use. The system will be described in detail as an example. It can also be removed without limitation. The device can be removed and adjusted (F a π-F i, combined with the centrifugal fan can be flowed and introduced into the bottom partition cover.着 洁; Reference] In addition to the example, the production table is 200 packs ^ 201 interior (5)-The description of the general structure does not include a complete description. All the techniques of the present invention are only cited here in order to highlight The related diagrams that help the present invention and the following contents are not drawn according to the actual scale and are only used to express the structural features of the present invention. The preferred embodiments of the present invention are described as follows, but in addition to these detailed descriptions, the present invention It is widely implemented in other embodiments, and the scope of the present invention is subject to the scope of subsequent patents.% You pay _ high pressure spraying or vacuum dusting operation table from a main is a fan-filter screen fan -The filter screen is a filter device. The dust generated by centrifugation takes the form of a plurality of through holes. It can adjust the degree of space in which the environment contacts. Objects can use the dust absorbed on the surface of the object in this dust removal workbench. .This division The cover is composed of a ter unit (FFU) and a dust collecting basin. The air circulation of the fan and the high-efficiency filter generates a uniform air flow to filter the high-efficiency filtering during the dust removal operation. The dust collecting basin is inclined to all sides. The basin formed by the side wall is used to control the requirements of the dust removal operation area and the degree of competition in the clean room and adjust the opening and closing of the second and second pictures of the guest A and the second b. Does A hurt I work? The specific dagger mouth 20 0 side is not intended to be a three-dimensional body with a main body 201 and a half-cylindrical body fish. ^ Stuart / Dust removal unit is equipped with a fan-filter group (Fa Fi °. That is, the cover 21 7. Main

Mlter Unit, FFU) 20 1227164 V. Description of the invention (6) and a dust collecting basin 213, the fan-filter group 203 is a centrifugal fan 205 fish-high efficiency particulate air filter group (HEPA fnter m〇dule, High ”Efficiency Particulate Air fUter m〇duie) 2 07 group, the centrifugal fan 2 05 is used to generate an outlet air flow to dust removal operations. The generated fine dust is absorbed by this outlet air flow to high efficiency Particulate air filter 徂 2 07. High-efficiency particulate air filter group 207 includes a centrifugal fan 205 above, with a rated air volume for a particle size of 311] 111, and has a capture rate of more than 99.6%. South efficiency particulate air pre-filter (HEpA pre-filter) 2 0 9, and under the centrifugal fan 2005, the high efficiency particulate air filter group 2 0 7 contains another 〇3mm fine dust has a high efficiency particulate air filter (HEpa fi, lter) with a capture rate of 99.7% or more 2 1 Depending on the needs of cleaning operations, the high efficiency particulate air filter group 2 0 7 can also be replaced Is an ultra-low penetration air filter group (ULpA hlter, Ultra Low Penet rati〇n Air filte〇 (not shown), this is a filter device with a capture rate of 99 g995% or more for particles with a particle size of 0.15 mm under the rated air volume. It is placed above the fan-filter group 203 The No. 2 dust basin 213 is composed of a bottom partition plate 215 with a plurality of holes and a four-face tilting type ^ side wall. It is a pot-shaped structure and a semi-cylindrical adjustable cover 21 7 defines a dust removal operation. Area 2 2 7, basin shape of the dust collecting basin 21 3 = allows the airflow to be smoothly guided by the inclined side wall, and enters the fan filter group 2 in the main body 2 through multiple bottom partition plates 2 1 5 Filtering 'to avoid the accumulation of fine dust on the dead corner at the bottom of the dust removal operation area 2 2 7; Station 2 pairs the dust removal operation area 2 2 7; the side wall surface of this dust collection basin 2 1 3 is adhesive by sticking double-sided tape. To absorb dust generated during dust removal

1227164 Description (7) " " "-particles. Located above the main body 2 Ο 1, the semi-cylindrical adjustable cover 21 7 is a movable front cover 21 9 made of transparent material and a fixed rear cover & 2 2 1 which is movable. The front cover 2 1 9 can adjust the opening and closing angles to facilitate the dust removal operation with different cleanliness requirements. Dynamically adjust the space between the dust removal operation area 2 2 7 and the clean room environment. The movable front cover 2 丨 9 has one hand. Hole device 2 2 3, when performing dust removal operations with higher cleanliness requirements, the movable cover 2 1 9 can be completely closed to provide an independent dust removal operation space and reduce the dust removal operation area 2 2 7 contact with the clean room environment At this time, the operator / personnel can continue the dust removal operation through this hand hole device 2 23; and the fixed rear cover 2 2 1 is adhered to the dust removal operation area with an easily replaceable double-sided tape 2 2 The surface of 7 and the fixed rear cover 2 2 1 The sticky arc surface can adsorb the dust particles generated during the dust removal operation. In addition, a halogen lamp 225 is provided inside the fixed rear cover 2 2 1 to provide the lighting required for dust removal operations. The design of the above-mentioned semi-cylindrical adjustable cover 2 1 7 can reduce the chance of the dust particles rebounding outside the dust removal operation area 2 2 7.

Referring to the third figure, which is a schematic diagram of a side of a workbench 300 in addition to another preferred embodiment of the present invention, it includes a main body 300 and a rectangular adjustable cover 317. A first fan-filter unit (FFU) 3 0 3 and a dust collecting basin 313 are installed in the main body 301. The first fan-filter unit 3 0 3 is a first centrifugal fan 3 〇5 and a first high efficiency particulate air filter group (组 ΕΛΛ filter module, High Efficiency ^

Particulate Air filter module) 30 7 combination, in which the first centrifugal fan 3 0 5 system generates an outlet airflow, which will be generated during dust removal operation.

Page 13 Ϊ227164 _______-------------5. The dust of the invention description (8) is then led to the airflow and adsorbed in the first high-efficiency particulate air filter group 3 0 7. The first high-efficiency particulate air filter group 3 0 7 includes a first high above the first centrifugal fan 3 05, and has the first highest capture rate of 9 9 · 6% or more for dust particles having a particle size of 0.3 mm under a rated air volume. High efficiency particulate air pre-filter 309, and under the first centrifugal fan 30 5, the first high-policy particulate air filter group 3 0 7 contains another for the particles under the rated air volume. The 0.3mm fine dust has the first high-efficiency particulate two-air filter (Η EPA fi 11 er) 3 1 1 with a capture rate of 99.97% or more. Depending on the needs of clean operation, the first high-efficiency particulate air filter group 3 07 can also be replaced with an ultra-low penetration air filter.

Air filter net group (ULPA filter, Ultra Low Penetration Air

f 1 iter) (not shown in the figure), this is a filter device with a capture rate of 99.99 9 5% or more for particles with a particle size of 0.15 under the rated air volume. The dust collecting basin 313, which is placed above the first fan-crossing grid group 3 0 3, is composed of a bottom partition plate 3 1 5 with a plurality of holes and an inclined side wall with four masks. The rectangular design with a rectangular adjustable cover 317 defines a dust-removing work area 27. The wood-dust basin 31 3 has a basin-like design that allows the airflow to be smoothly guided by the inclined side wall. It enters the main body 3 through a bottom partition 315 with multiple openings. Inner 1 = First fan-filter group 3 0 3 to prevent dust from accumulating on the bottom of the dust removal area f 2 3 7 and facing the dust removal operation area 327. The side wall surface of this dust collection basin 1 3 can Adhesive by sticking double-sided tape, used to adsorb dust particles generated during dust removal. Located above the main body 301, the rectangular adjustable cover 31 7 is composed of a top partition 321, a front door cover 319, an f-wall 3 2 9 and two side walls. The top partition 321 has a plurality of openings to allow the air machine to pass freely. A halogen lamp 3 2 5 is placed below the top screen 3 2 1

1227164 V. Description of the invention (9), providing dust removal as a function of $ Β77 βΒ γ i, which can be seen clearly. The front door cover 319 is made of transparent material to remove dust. It is easy to handle different places of cleanliness. At the same time, the dust removal operation area 3 2 7 and the clean room ring before the door cover 319 are dynamically adjusted. With hand hole device 323, when the supply is relatively high, "= Erlu's dust removal operation, the front door cover 3 1 9 can be completely closed, and the chance of raising contacts is reduced = reducing the dust removal operation area 32 7 and the clean room ring for dust removal and gold The dumb person can use this hand hole device 323 to relay Tan Qi U 7 ^, and face the dust removal operation area 3 2 7, this rectangle can be adjusted ^ > μ of: wall 3 2 9 and the surface of the two side walls It can be sticky by sticking an easy-to-face masking tape, which can be used to attach the dust generated during the dust removal operation: above the top partition 321 in the rectangular adjustable cover 317, a first fan-filter screen set ( Fan-Fi 1 ter Uni t (FFU) 331, the fan-filter group 331 is a second centrifugal fan 3 3 3 and a second high-efficiency particulate air filter group (HEPA fUter m0dule, High

Effi ^ iency particulate Air filter m〇dule) 3 35 combination of the river = the first centrifugal fan 3 3 3 The machine generates an induced airflow to introduce the clean room ambient air into the dust removal operation area 327 and adsorb the dust in the air to the second highest f rate U particle air filter group 3 3 5. The second high-efficiency particulate air filter group 33 5 includes a second high-efficiency particulate which is located above the second centrifugal fan 33 3 and has a capture rate of 99. 6% or more for fine dust with a particle size of 0.3 mm at a rated air volume. Air pre-filter (HEPA pre-f i 1 ter) 337, and under the second centrifugal fan 3 3 3, the second high-efficiency particulate air filter group 3 3 5 contains The fine dust with a diameter of 0.3 mm has a second high efficiency particulate air filter (HEPA fi Iter) 339 with a capture rate of 9 9.97% or more.

Page 15 1227164 V. Description of the invention (10) 'Depending on the needs of clean operation', the above-mentioned second high-efficiency particulate air filter group 3 3 5 can also be replaced with an ultra-low penetration air filter group (1 ^ 1 ^ { 111 ^ 『

Ultra Low Penetration Air filter) (not shown in the figure), ‘This is a filter device with a particle size of 0.15 mm in the frontal wind, which has a yield of more than 9 9 · 9 95 5% ^. The above-mentioned dust-removing workbench 300 is equipped with two sets of fans-filter screens 3 03 and 3 31. The purpose is to provide a dust-removing working environment with a smooth circulating air flow and meeting the requirements of high cleanliness. The design of the front door cover 3 丨 9 can reduce the chance of dust falling out of this dust removal operation area 3 2 7 and avoid the pollution of the clean room. The above-mentioned embodiments are only for explaining the technical ideas and characteristics of the present invention. Its purpose is to enable those skilled in the art to understand the contents of the present invention and implement them accordingly. When the scope of the patent of the present invention cannot be limited, That is, equal changes or modifications made by Tuas in accordance with the spirit disclosed in the present invention should still be covered by the patent scope of the present invention. %

Page 16 1227164 Brief description of the drawings The first diagram is a schematic side view of a conventional dust removal workbench. Figure A is a schematic side view of a dust removal workbench according to a preferred embodiment of the present invention. FIG. 2B is a schematic perspective view of a dust removing workbench according to a preferred embodiment of the present invention. The third figure is a schematic side view of a dust removing workbench according to another preferred embodiment of the present invention. Graphic description 100 101 103 105 107 109 111 113 115 117 119 121 123 200 201 Dust removal table main body vertical partition airflow duct upper wall lower wall dust removal work area top partition fluorescent lamp bottom partition filter rear wall blower dust removal work bench main body

Page 17 1227164 Brief description of the diagram 203 Fan-filter group 205 Centrifugal fan 207 Two-efficiency particulate air filter group 209 1¾ Efficient particulate air front filter 211 High-efficiency particulate air filter 213 Dust collector 215 Bottom partition 217 Semi-cylindrical adjustable instant cover 219 Movable front cover 221 Fixed rear cover 223 Hand hole 225 Halogen lamp 227 Dust removal work area 30 0 Dust removal table 301 Main body 303 First fan-filter and net group 305 No. Centrifugal fan 307 First two-efficiency particulate air filter group 309 First — Efficiency particulate air front filter 311 First particulate air filter 313 Dust collector 315 Bottom partition 317 Rectangular adjustable cover 319 Front door cover

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Claims (1)

1227164 VI. Scope of patent application 1. A dust removing workbench including: a main body; a dust collecting basin located above the main body; an adjustable cover located above the dust collecting basin, the dust collecting basin and the adjustable The type cover defines a dust removal operation area; a fan installed in the main body and located below the dust collecting basin, generates a top-to-bottom airflow to lead out the dust in the dust removal operation area; and a filter screen, It is installed in the main body and located below the dust collecting basin to filter out the dust contained in the airflow of the dust removal operation area. 2. The dust-removing workbench described in item 1 of the scope of patent application, wherein the fan is a centrifugal fan. 3. The dust removal workbench described in item 1 of the scope of patent application, wherein the filter is a high-efficiency particulate air filter. 4. The dust removal workbench described in item 1 of the scope of patent application, wherein the filter is an ultra-low penetration air filter. 5. The dust removal workbench described in item 1 of the scope of patent application, wherein the filter further comprises a high-efficiency particulate air pre-filter. 6. The dust-removing workbench described in item 1 of the scope of patent application, wherein the filter screen further comprises an ultra-low through-air front filter screen. Page 20 1227164 6. Scope of patent application 7. The dust removal workbench described in item 1 of the scope of patent application, wherein the dust collecting basin is composed of a bottom partition plate with a plurality of openings and four side walls. 8. The dust-removing workbench as described in item 7 of the scope of patent application, wherein the four-sided sidewall is a four-mask inclined-shaped sidewall. 9. The dust-removing workbench described in item 7 of the scope of patent application, wherein the four-sided sidewalls are adhesive to the surface facing the dust-removing business area. 10. The dust-removing workbench described in item 1 of the scope of patent application, further comprising a high-pressure clean air spray rush, connected to the central clean air supply system by a hose. 1 1. The dust removal workbench described in item 1 of the scope of patent application, further comprising a vacuum extraction device, which is connected to a central vacuum extraction system by a hose. 1 2. The dust-removing workbench described in item 1 of the scope of patent application, wherein the adjustable cover is a semi-cylindrical adjustable cover. 1 3. The dust removal workbench described in item 12 of the scope of patent application, wherein the semi-cylindrical adjustable cover includes a quarter-cylinder movable front cover and a quarter-cylinder Type fixed rear cover. 14. The dust-removing workbench as described in item 13 of the scope of patent application, wherein the fourteen-two-seventh circular scope of the patent application includes a hand hole device. 15. The dust-removing workbench described in item 13 of the scope of patent application, wherein the quarter-cylinder movable front cover is made of a light-transmitting substance. 16. The dust-removing workbench as described in item 13 of the scope of the patent application, wherein the quarter-cylinder fixed rear cover is sticky to the surface facing the dust-removing business area. 17. The dust removal workbench described in item 1 of the scope of patent application, further comprising a light source in the dust removal work area. 18. A kind of dust removing workbench, including: a main body; a dust collecting basin located above the main body; an adjustable cover located above the dust collecting basin, the dust collecting basin and the adjustable covering defining a Dust removal operation area; a first fan installed in the main body, located below the dust collecting basin, generating a top-to-bottom airflow to lead out the dust in the dust removal operation area; a first filter installed in the main body Inside, located below the dust collecting basin, used to filter out the dust contained in the airflow of the dust removal operation area; a second fan, located above the adjustable cover, generates a top-down airflow, The air above the adjustable cover is introduced into the dust removal operation area; and Page 22 1227164 VI. Scope of patent application A second filter is located above the adjustable cover to filter the fine dust contained in the airflow leading into the dust removal operation area. 19. The dust removal workbench described in item 18 of the scope of patent application, wherein the first fan is a centrifugal fan. 20. The dust removal workbench described in item 18 of the scope of patent application, wherein the first filter is a high-efficiency particulate air filter. 2 1. The dust removal workbench described in item 18 of the scope of patent application, wherein the first filter is an ultra-low penetration air filter. 2 2. The dust removal workbench described in item 18 of the scope of patent application, wherein the first filter further comprises a high-efficiency particulate air pre-filter. 2 3. The dust-removing workbench as described in item 18 of the scope of patent application, wherein the first filter further comprises an ultra-low-through air air pre-filter. 24. The dust removal workbench described in item 18 of the scope of patent application, wherein the second fan is a centrifugal fan. 25. The dust removal workbench described in item 18 of the scope of patent application, wherein the second filter is a high-efficiency particulate air filter. Page 23 1227164 6. Scope of patent application 26. The dust removal workbench described in item 18 of the scope of patent application, wherein the second filter is an ultra-low penetration air filter. 27. The dust removal workbench described in item 18 of the scope of patent application, wherein the second filter further comprises a high-efficiency particulate air pre-filter. 28. The dust-removing workbench described in item 18 of the scope of patent application, wherein the second filter further comprises an ultra-low through-air front filter. 29. The dust-removing workbench described in item 18 of the scope of patent application, wherein the dust collecting basin is composed of a bottom partition plate with a plurality of openings and four side walls. 30. The dust-removing workbench as described in item 29 of the scope of patent application, wherein the four-sided side wall is a four-sided inclined side wall. 31. The dust-removing workbench described in item 29 of the scope of patent application, wherein the four-sided sidewalls are sticky to the surface facing the dust-removing business area. 3 2. The dust removal workbench described in item 18 of the scope of patent application, further comprising a high-pressure clean air spray gun, connected to the central clean air supply system by a hose 3 3. As described in item 18 of the scope of patent application The dust removal workbench further includes a vacuum extraction device, and the central vacuum extraction system is connected by a hose. Page 24 1227164 6. Scope of patent application 34. The dust removal workbench described in item 18 of the scope of patent application, wherein the adjustable cover is a rectangular adjustable cover. 35. The dust removal workbench described in item 34 of the scope of patent application, wherein the rectangular adjustable cover includes a top partition with a plurality of openings, a vertically movable front door cover, a rear wall and two Sidewall. 36. The dust removal workbench described in item 35 of the scope of patent application, wherein the vertical movable front door cover includes a hand hole device. 37. The dust-removing workbench according to item 35 of the scope of patent application, wherein the vertically movable front door cover is made of a light-transmitting substance. 38. The dust-removing workbench described in item 35 of the scope of patent application, wherein the back wall and the two side walls are adhesive to the surface facing the dust-removing business area. 39. The dust removal workbench described in item 18 of the scope of patent application, further comprising a light source in the dust removal work area. Page 25