1222659 A7 B7 五、發明説明（） 發明領域： (請先閱讀背面之注意事項再填寫本頁) 本發明係有關於一種光電元件檢測系統，特別是有關 於一種利用平行光或均勻光來輸入光電元件並進行檢測流 程的檢測系統0 發明背景： /參照第1圖，其所繪示為習知光電元件檢測系統。 此光電元件檢測系統100至少包括一個基座丨1〇用來固定 光纖10，ΧΥΖ三軸光學位移平台12〇其可作三度空間的位 移调正為了易於表示二度空間的相關位置，與光纖1 〇輸 出光線的光軸平行的方向定義為Ζ軸，而X軸與γ軸方向 所定義之平面係垂直於ζ軸，並且X、Υ與Ζ軸間相互垂 直。 經濟部智惡財產局員工消費合作社印製 在光電元件檢測系統1 〇〇中，光纖i 0的一端耦合至光 源（未繪示），其中光源可為雷射、雷射二極體、垂直腔 面射型雷射（Vertical cavity surface emitting laser， VCSEL )、二極體等，並且光源可為怪定光源或者經過調 變裝置（未繪示）的調變後產生的光訊號。經由光纖1〇的 傳遞，在光纖1 0的另一端即可輸出光源的光線。而待側的 光電元件20，例如光二極體（Ph〇t〇 Diode、卩0)、卩型- 本紙張尺度適用中國國家標準(CNS)A4規格(210x297公楚) 1222659 經濟部智莛財產局員工消費合作社印製 Α7 Β7 五、發明説明（） 本質-N型光二極體（PIN Photo Diode )，P型-本質-N型 光二極體與阻抗轉換放大器的混合包裝（PIN/TIA、PIN Photo Diode with tran-impedance Amplifier )、雪崩式光二 極體（Avalanche Photo Diode，APD)、金屬-半導體-金屬 檢光元件（Metal-Semiconductor-Metal Photo Detector， MSM )、或者光電轉換積體電路（Optical Electric Integrated Circuit ，OEIC )，貝《J固定於XYZ三軸光學位移平台120 上並電性的連接至偵測電路3 0用以在檢測的流程中，測量 光電元件20光電轉換後的電訊號，以偵測光電元件20之 良窥。 在習知檢測的流程中，首先將光電元件20以及光纖1 〇 分別固定於ΧΥΖ三軸光學位移平台120以及基座1 1〇上。 接著，調整ΧΥΖ三軸光學位移平台120中X、γ軸的方向， 使得光電元件2 0進入對準範圍内。而所謂的對準範圍即是 光纖1 0輸出的光線範圍。然而，由於習知光纖1 〇之輸出 為發散的光線，為了要獲得準確的檢測結果，光電元件2〇 必須要盡可能的接收到更多的光線，因此’光電元件2 〇在 X、Υ軸的方向的調整必須將光電元件20盡可能的調整至 光線的光軸上，接著調整Ζ軸的方向使得光電元件2〇極接 近光纖1 0的輸出端，如此才可以接收大部分的光線，而再 調整Ζ軸的方向的同時，亦要同時控制χ、γ軸的方向使 得光電元件20不會偏離對準範圍。 3 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公楚) ......會........訂.........筹 (請先閲讀背面之注意事項再填寫本頁)1222659 A7 B7 V. Description of the invention () Field of invention: (Please read the precautions on the back before filling this page) The present invention relates to a photoelectric element detection system, and in particular to a method that uses parallel light or uniform light to input photoelectricity. Detection system for component and detection process0 BACKGROUND OF THE INVENTION: / Refer to FIG. 1, which shows a conventional photoelectric component detection system. The photoelectric element detection system 100 includes at least one base, which is used to fix the optical fiber 10, and the XYZ three-axis optical displacement platform 12, which can be used for three-dimensional space adjustment. 10 The direction in which the optical axis of the output light is parallel is defined as the Z axis, and the plane defined by the X axis and the γ axis direction is perpendicular to the ζ axis, and the X, Υ, and Z axes are perpendicular to each other. Printed by the Consumer Cooperative of the Intellectual Property Office of the Ministry of Economic Affairs in the photoelectric element detection system 100, one end of the optical fiber i 0 is coupled to a light source (not shown), where the light source can be a laser, a laser diode, or a vertical cavity. A vertical cavity surface emitting laser (VCSEL), a diode, etc., and the light source may be a strange light source or a light signal generated after being modulated by a modulation device (not shown). Through the transmission of the optical fiber 10, the light of the light source can be output at the other end of the optical fiber 10. Optoelectronic elements 20 on the side, such as photodiodes (PhotoDiode, 卩 0), 卩 type-this paper size applies to China National Standard (CNS) A4 specifications (210x297), 2222659 Intellectual Property Office of the Ministry of Economic Affairs Printed by employee consumer cooperative A7 Β7 V. Description of the invention () Essence-N-type photodiode (PIN Photo Diode), P-type-essential-N-type photodiode and impedance conversion amplifier mixed package (PIN / TIA, PIN Photo Diode with tran-impedance Amplifier), Avalanche Photo Diode (APD), Metal-Semiconductor-Metal Photo Detector (MSM), or Photoelectric Conversion Integrated Circuit (Optical Electric Integrated Circuit, OEIC), "J is fixed on the XYZ three-axis optical displacement platform 120 and is electrically connected to the detection circuit 30. It is used to measure the electrical signal after the photoelectric conversion of the photoelectric element 20 during the detection process. A good view of the detection photoelectric element 20. In the conventional detection process, first, the photoelectric element 20 and the optical fiber 10 are respectively fixed on the XYZ three-axis optical displacement platform 120 and the base 1 10. Next, adjust the directions of the X and γ axes in the XYZ three-axis optical displacement stage 120 so that the photoelectric element 20 enters the alignment range. The so-called alignment range is the range of light output by the fiber 10. However, since the output of the conventional optical fiber 10 is divergent light, in order to obtain accurate detection results, the photoelectric element 20 must receive as much light as possible. Therefore, the 'optical element 20' is on the X and Y axes. The adjustment of the direction must adjust the photovoltaic element 20 to the optical axis of the light as much as possible, and then adjust the direction of the Z axis so that the photovoltaic element 20 is very close to the output end of the optical fiber 10, so that most of the light can be received, and While adjusting the direction of the Z axis, the directions of the χ and γ axes must also be controlled so that the photovoltaic element 20 does not deviate from the alignment range. 3 This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297) ....... Yes ........ Order ......... (Please read the (Please fill in this page again)
由於對準的過程步驟過於繁項，因此，以習知的檢測 方式來檢測光電元件20,其檢測速度會受限於光電元件20 與光纖10之間的對準過程，並在大量的待側光電元件需要 檢測時’更疋浪費太多的時間於對準的步驟，降低生產的 速率。 發明目的及概述： 雲於上述之發明背景中，傳統光電元件檢測系統會造 成檢測光電元件時對準過程太耗時之缺點。因此，本發明 針對上述需求，提供一種平行光的光電元件檢測系統來改 正習知的缺點。 '------』......--------:訂 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慈財產局員工消費合作社印製 本七明的主要目的之一為本發明提供一種平行光的光 電元件檢測系統，本發明係利用平行光或者均勻光來輸入 光電元件之中，由於大面積的均勻光訊號可輕易地輸入光 電元件之中，因此在進行檢測的流程中，Χγζ三軸光學位 移平台上其X與Υ軸可允許較大的對準容忍範圍，並且減 少Ζ軸的對準工作。 本發明的再一目的為本發明提供一種平行光的光電元 件檢測系統，其可大幅度的降低檢測流程中對準過程所需 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) # 1222659 五、發明説明（） 花費的時間。 (請先閲讀背面之注意事項再填寫本頁) 本發明的再-目的為本發明提供一種平行光的光電元 件檢測系統，運用本發明，除了檢測—般具有光學機構的 光電元件外，更可直接檢測無光學機構之光電元件’亦可 以於生產流程中檢測尚未完成封裝的光電元件半成品。 綜上所述’本發明係提供一種平行光的光電元件檢測 系統’包括：用來產生平行光束的平行光產生裝置，而光 電疋件則用以接收平行光束，以及偵測電路電性的連接至 光電元#，用《量測光電元件接收平行光束後所轉換之電 訊號，並根據電訊號來判斷光電元件之良窳。 圖式簡單說明： 本發明的較佳實施例將於往後之說明文字中輔以下列 圖形做更詳細的闡述，其中： 經濟部智慧財產局員工消費合作社印製 第第 2 其 圖 其 圖 例 施 實 1 第 的 習 為 示 統 系 測 檢 ;件 統元 系f 測光 檢的 件光 元行 電平 光明 知發 本 為 示 J所 統 系 測 檢 件 元 frg-1 ^β 光 的 光 行 平 明 發 本 為 示 繪 所·’ 其例 圖施 3 實 第二 第 的 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) 1222659 A7 B7 五、發明說明（ 第4圖其所繪示為運用 元件檢測系統示意圖；以及 第5圖其所繪示為本發 測系統示意圖。 圖號對照說明： 10 光纖 3 0 偵測電路 110 基座 200 光源 220 光電元件 300 光源 320 光學系統 340 偵測電路 410 固定位置 430 平行光產生裝置 450 光電元件 本發明所完成之平行光的光電 明自動化平行光的光電元件檢 20 光電元件 100 光電元件檢測系統 12 0 xyz二轴光學位移平台 210 光學系統 230 偵測電路 3 1 0 光纖 330 光電元件 40 0 XYZ三軸光學位移平台 420 基座固定位置 440 輸送帶 ——·：·：·...............訂......... (請先閲讀背面之注意事項再填寫本頁} 經 濟 部 智 慧 財 產 局 發明詳細說明： 由於習知的光電元件檢測系統中，光纖輸出端所輸出 的光線為發散的光，因此’為了要接收到更多的光線，待 消 費 合 作 社 印 製 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) 1222659 A7Because the alignment process steps are too complicated, the detection speed of the photoelectric element 20 in the conventional detection method will be limited by the alignment process between the photoelectric element 20 and the optical fiber 10. When optoelectronic components need to be inspected, it is even more wasteful of too much time in the alignment step, reducing the production rate. Object and Summary of the Invention: In the above background of the invention, the conventional photoelectric element detection system will cause the disadvantage that the alignment process is too time-consuming when detecting the photoelectric element. Therefore, the present invention addresses the above-mentioned needs by providing a collimated light photoelectric element detection system to correct the conventional disadvantages. '------ 』......--------: Order (please read the notes on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs One of the main objectives of the Ming Dynasty is to provide a parallel light photoelectric element detection system. The present invention uses parallel light or uniform light to input into the photoelectric element. Because of the large area of uniform light signal, it can be easily input into the photoelectric element. Therefore, in the detection process, the X and Y axes of the Xγζ three-axis optical displacement platform can allow a larger alignment tolerance range, and reduce the alignment work of the Z axis. A further object of the present invention is to provide a collimated light photoelectric element detection system, which can greatly reduce the alignment process required in the detection process. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). # 1222659 5. Description of the invention () Time spent. (Please read the precautions on the back before filling in this page.) The purpose of the present invention is to provide a parallel light photoelectric element detection system. Using the present invention, in addition to detecting photoelectric elements that generally have optical mechanisms, Direct inspection of optoelectronic components without optical mechanism can also detect semi-finished optoelectronic components that have not been packaged in the production process. In summary, the present invention provides a parallel light photoelectric element detection system, which includes: a parallel light generating device for generating a parallel light beam, and a photoelectric device for receiving the parallel light beam, and the electrical connection of the detection circuit. To photoelectric element #, use "to measure the electrical signal converted by the photoelectric element after receiving the parallel beam, and judge the good and bad of the photoelectric element based on the electrical signal. Brief description of the drawings: The preferred embodiment of the present invention will be explained in more detail in the following explanatory texts with the following figures, of which: The Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the second figure and its illustrations. The first practice is to show the system testing; the system is to measure the light level of the light system. The light level is known to be the light level of the system testing unit frg-1 ^ β light. This is a drawing house. 'The example is shown in Figure 3. The second paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). 1222659 A7 B7 V. Description of the invention (Figure 4 shows the drawing as Schematic diagram of using the component detection system; and Figure 5 shows the schematic diagram of the test system. Figure number comparison description: 10 optical fiber 3 0 detection circuit 110 base 200 light source 220 photoelectric element 300 light source 320 optical system 340 detection circuit 410 Fixed position 430 Parallel light generating device 450 Photoelectric element The photoelectric light of the parallel light completed by the present invention Automated parallel light photoelectric element inspection 20 Optoelectronic element 100 Optoelectronic element Detection system 12 0 xyz two-axis optical displacement platform 210 optical system 230 detection circuit 3 1 0 optical fiber 330 photoelectric element 40 0 XYZ three-axis optical displacement platform 420 base fixed position 440 conveyor belt —— ::: ... ............ Order ... (Please read the precautions on the back before filling out this page} Detailed description of the invention of the Intellectual Property Bureau of the Ministry of Economic Affairs: In the detection system, the light output from the optical fiber output end is divergent light, so 'in order to receive more light, to be printed by the consumer cooperative. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 1222659 A7
五、發明説明（） -------豐： (請先閲讀背面之注意事項再填寫本頁) 測的光電元件必須盡可能的接進光纖的輸出端，然而此動 作會造成檢測光電元件時的對準㈣太耗時之缺點。因 此，本發明S出一種平行光的光電元件檢測系統。 月 > …、第2圖，其所繪示為本發明平行光的光電元件 檢測系統的第一實施例。纟本實施例中，平行光產生裝置 包括光源200以及光學系統21Q。通f，光源㈣所產生 的光線都為發散的光線，而為了要使得發散的光線成為平 行光，本發明在光源200所行經路線上置入一組光學系統 210，此光學系統2丨〇,係由透鏡組所組成，其可將光源20( 所產生發散的光線，經由光學系統2丨〇的調整後，形成平 行的光束，完成了此平行光產生裝置。而此平行光束的截 積大j係根據光源2 0 0以及光學系統2 1 〇之間的調签 來決定。 經濟部智慧財產局員工消費合作社印製 而待測的光電元件220經過χ軸與γ軸的調整，可進 入到平行光束的截面積内。而由於平行光束内的光強度均 為一致’亦即此平行光係為均勻光，所以此平行光束的戴 面積即為對準範圍，只要光電元件220能夠完全進入平行 光束的戴面積之内，光電元件22〇即可接收到光源2〇〇所 產生的光。因此，用平行光或者均勻光來做光電元件22〇 的檢測可以容忍光電元件22〇在χ軸與γ軸上在對準步驟 時的疾差。再者，由於平行光在2軸的方向不會因為距離 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) 1222659 A7 B7 五、發明説明（) 變長而使得平行光或者均句光的光強度減弱，因此，只要 調整X軸與Y軸的方向將光電元件22〇移動至對準範圍内 即可，至於在Z軸方向的對準步驟即可省略。 最後，光電疋件220電性的連接至偵測電路23〇用以 在檢測的流程中，測量光電元件22〇接收光源2〇〇所產生 的光線經過光電轉換後的電訊號，以偵測光電元件22〇之 良窥。 請參照冑3 ϋ，其所緣示為本發明平行光的光電元件 檢測系統的第二實施例。纟本實施例中，平行光產生裝置 包括光源300、光纖310以及光學系統32〇。首先，光源 3 00所產生的光線先耦合至光纖31〇，經由光纖31〇的傳 遞，在光纖310的輸出端所輸出的光線即可來作為檢測之 用。而由於光纖3 1 0所輸出之光線都為發散的光線，而為 了要使得發散的光線成為平行光，在光纖3丨〇輸出的光線 行經路線上，置入一組光學系統32〇，此光學系統32〇，係 由透鏡組所組成’其可將光源3 〇 〇所產生發散的光線，經 由光學系統320的調整後，形成平行的光束，完成了此平 行光產生裝置。而此平行光束的截面積大小，係根據光纖 3 1 0輸出知以及光學糸統3 2 0之間的調整來決定。 而待測的光電元件3 3 0經過X軸與γ軸的調整，可進 本紙張尺度適用中國國家標準(CNS)A4規格(210Χ 297公釐） 會： (請先閲讀背面之注意事項再填寫本頁) -訂· 經濟部智惡財產局員工消費合作社印製 1222659 A 7 B7 五、發明説明（） 入到平行光束的截面積内。而由於平行光束内的光強度均 為一致’亦即此平行光係為均句光，所以此平行光束的截 面積即為對準範圍’只要光電元件330能夠完全進入平行 光束的截面積之内’光電元件330即可接收到光源3〇〇所 產生的光。因此，用平行光或者均句光來做光電元件33〇 的檢測矸以容忍光電元件33 0在X軸與γ軸上在對準步驟 時的誤差。再者，由於平行光在2軸的方向不會因為二離 變長而使得平行光或者均勻光的光強度減弱，因此，只要 調整X軸與Υ軸的方向將光電元件3 3 0移動至對準範圍内 即可，至於在Ζ軸方向的對準步驟即可省略。 最後，光電元件3 3 0電性的連接至偵測電路34〇用以 在檢測的流程中，測量光電元件3 3 0接收光源30〇所產生 的光線經過光電轉換後的電訊號，以偵測光電元件33〇之 良窳。 請參照第4圖’其所繪示為運用本發明所完成之平行 光的光電元件檢測系統示意圖。在本發明中，光電元件可 置於ΧΥΖ三軸光學位移平台400上的固定位置41〇而平行 光產生裝置可置於基座固定位置420。或者，平行光if •裝置可置於XYZ三軸光學位移平台400上的固定位置41〇 而光電元件可置於基座固定位置420，本發明並不限定其 位置。再者，本發明中之光電元件以及平行光產生裝置的 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) (請先閲讀背面之注意事項再填寫本頁) t. 訂· 經濟部智慧財產局員工消費合作社印製 1222659 A7 B7 五、發明說明（） 對準過程可為調整光電元件進入平行光產生裝置的對準範 圍、或者將平行光產生裝置的對準範圍調整至光電元^ 中、或者同時調整平行光產生裝置與光電元件的相對位 置。本發明亦不限定於此對準過程的步驟。 再者，由於平行光產生裝置所產生的平行光具有較大 的對準容忍範圍，因此本發明更可以運用在自動化測試機 台中’如第5圖所繪示，將多個光電元件45〇依序排列於 輸送帶（Feeder ) 440上，並利用輸送帶44〇的傳動，將光 電元件450帶入平行光產生裝置43〇的光束範圍内並進行 測試，如此即可達到快速地且大量地測試光電元件的目 的。 ......- · (請先閲讀背面之注意事項再場寫本頁} 明顯的，運用本發明，具有光學機構的光電元件、無 光學機構的光電元件、或者未完成之光電元件半成品均適 用於本發明之平行光的光電元件檢測系統。 訂 經濟部智慧財產局員工消費合作社印製 本發明的優點為本發明提供一種平行光的光電元件檢 測系統，本發明係利用平行光或者均勻光來輸入光電元件 之中’由於大面積的均勻光訊號可輕易地輸入光電元件之 中’因此在進行檢測的流程中，XYZ三軸光學位移平台上 其X與Y軸可允許較大的對準容忍範圍，並且減少z軸的 對準工作。 10 本紙張尺度適用中國國家標準(CNS)A4規格(210X297公釐) 1222659 A7V. Description of the invention () ------- Feng: (Please read the precautions on the back before filling in this page) The photoelectric element to be tested must be connected to the output end of the optical fiber as much as possible. However, this action will cause the photoelectricity to be detected. Alignment when components are too time consuming. Therefore, the present invention provides a parallel light photoelectric element detection system. Month > ..., FIG. 2 shows the first embodiment of the parallel light photoelectric element detection system of the present invention.平行 In this embodiment, the parallel light generating device includes a light source 200 and an optical system 21Q. Through f, the light generated by the light source ㈣ is a divergent light, and in order to make the divergent light into parallel light, the present invention places a set of optical systems 210 on the route traveled by the light source 200. This optical system 2 丨 〇, It is composed of a lens group. It can convert the divergent light generated by the light source 20 (through the adjustment of the optical system 2 to form a parallel beam to complete the parallel light generating device. The cross-section of the parallel beam is large. J is determined according to the adjustment between the light source 2000 and the optical system 2 0. The photoelectric element 220 to be tested printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs can be accessed by adjusting the χ and γ axes. Within the cross-sectional area of the parallel beam. Because the light intensity in the parallel beam is consistent, that is, the parallel light system is uniform, the wearing area of the parallel beam is the alignment range, as long as the photoelectric element 220 can fully enter the parallel Within the wearing area of the light beam, the photoelectric element 22 can receive the light generated by the light source 200. Therefore, the detection of the photoelectric element 22 using parallel light or uniform light can be tolerated The electrical component 22 has a high degree of error in the alignment step on the χ and γ axes. Furthermore, since the direction of the parallel light in the 2 axis will not be based on the distance from this paper, the Chinese National Standard (CNS) A4 specification (210X297 mm (Centi) 1222659 A7 B7 V. Description of the invention () becomes longer and makes the light intensity of parallel light or homogeneous light weaken. Therefore, as long as the direction of the X-axis and Y-axis is adjusted, the photoelectric element 22o can be moved within the alignment range. As for the alignment step in the Z-axis direction, it can be omitted. Finally, the photoelectric device 220 is electrically connected to the detection circuit 23 for measuring the photoelectric element 22 and receiving the light source 200 generated during the detection process. The electrical signal after the photoelectric conversion of the light is used to detect the good quality of the photoelectric element 22. Please refer to 胄 3 ϋ, which shows the second embodiment of the parallel light photoelectric element detection system of the present invention. 纟 This implementation In the example, the parallel light generating device includes a light source 300, an optical fiber 310, and an optical system 32. First, the light generated by the light source 300 is first coupled to the optical fiber 31, and transmitted through the optical fiber 31, and output at the output end of the optical fiber 310. The light is It is used for detection. And because the light output by the optical fiber 3 10 is divergent light, and in order to make the divergent light become parallel light, a group of optics is placed on the route of the light output from the optical fiber 3 丨 〇. System 32, this optical system 32, is composed of a lens group, which can adjust the divergent light generated by the light source 300 through the optical system 320 to form a parallel beam, and complete this parallel light generating device The cross-sectional area of this parallel beam is determined based on the adjustment of the optical fiber 3 10 output and the optical system 3 2 0. The photoelectric element 3 3 0 to be measured is adjusted by the X axis and the γ axis. The paper size applicable to this paper applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm). Will: (Please read the precautions on the back before filling out this page)-Order · Printed by the Consumer Cooperative of Intellectual Property Office of the Ministry of Economic Affairs 1222659 A 7 B7 V. Description of the invention () Into the cross-sectional area of the parallel beam. And because the light intensities in the parallel beams are all the same, that is, the parallel light system is a uniform sentence light, the cross-sectional area of this parallel beam is the alignment range. As long as the photoelectric element 330 can fully enter the cross-sectional area of the parallel beam 'The photoelectric element 330 can receive the light generated by the light source 300. Therefore, the parallel or uniform light is used to detect the photoelectric element 33o to tolerate the error of the photoelectric element 33o during the alignment step on the X-axis and the γ-axis. In addition, since the direction of the parallel light in the 2 axis will not become longer due to the eccentricity, the light intensity of the parallel light or uniform light will be weakened. Therefore, as long as the directions of the X axis and the Υ axis are adjusted, the photoelectric element 3 3 0 is moved to the opposite direction. Within the standard range, the alignment step in the Z-axis direction can be omitted. Finally, the photoelectric element 3 300 is electrically connected to the detection circuit 34o, and is used to measure the photoelectric signal of the light generated by the photoelectric element 3 30 receiving the light source 30o during the detection process for detection. Photovoltaic element is good. Please refer to FIG. 4 ', which shows a schematic diagram of a photoelectric device detection system using parallel light completed by the present invention. In the present invention, the photoelectric element can be placed at a fixed position 41 on the XYZ three-axis optical displacement stage 400, and the parallel light generating device can be placed at a fixed position 420 of the base. Alternatively, the parallel light if device can be placed at a fixed position 41 on the XYZ three-axis optical displacement platform 400 and the photoelectric element can be placed at a fixed position 420 of the base, and the present invention is not limited to its position. In addition, the paper size of the photoelectric element and the parallel light generating device in the present invention is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling in this page). Printed by the Consumer Cooperative of the Ministry of Intellectual Property Bureau 1222659 A7 B7 V. Description of the invention () The alignment process can be to adjust the photoelectric element into the alignment range of the parallel light generating device, or adjust the alignment range of the parallel light generating device to the photovoltaic element ^ Adjust the relative position of the parallel light generating device and the photoelectric element at the same time. The invention is not limited to the steps of this alignment process. Furthermore, since the parallel light generated by the parallel light generating device has a large alignment tolerance range, the present invention can be further applied to an automated test machine. As shown in FIG. 5, a plurality of photoelectric elements 45 Sequences are arranged on a conveyor belt 440, and the transmission of the conveyor belt 44 is used to bring the photoelectric element 450 into the beam range of the parallel light generating device 43 and carry out the test. In this way, rapid and large-scale testing can be achieved. Purpose of optoelectronic elements. ......- (Please read the precautions on the back before writing this page} Obviously, using the present invention, photoelectric elements with optical mechanisms, photoelectric elements without optical mechanisms, or semi-finished semi-finished photovoltaic elements Both are applicable to the parallel light photoelectric element detection system of the present invention. Ordered by the Intellectual Property Bureau of the Ministry of Economic Affairs, the employee's cooperative prints the advantages of the present invention. The present invention provides a parallel light photoelectric element detection system. The present invention uses parallel light or uniform light. The light comes into the optoelectronic element 'because a large area of uniform optical signal can be easily input into the optoelectronic element'. Therefore, during the detection process, the X and Y axes of the XYZ three-axis optical displacement platform can allow a larger alignment Quasi-tolerance range, and reduce the z-axis alignment work. 10 This paper size applies to China National Standard (CNS) A4 (210X297 mm) 1222659 A7
五、發明説明（） 元需 電所 光程 的過 光準 行對 平中 種程 1 流 供測 提檢 明低 發降 本的 為度 點幅 優大 一 可 再其 的 ’ 。 明統間 發系時 本測的 檢費 件花 元的 電構 光機 的學 光光 行有 平具 種般 1 1 供測 提檢 明了 發除 本， 為明 點發 優本 一 用 再運 的， 明統 發系 本測 檢 件 可 亦。 , 品 件成 元半 電件 光元 之電 構光 機的 學裝 光封 無成 測完 檢未 接尚 直測 可檢 更中 ， 程 外流 件 '產 元生 電於 光以 ......豐： (請先閲讀背面之注意事項再填寫本頁} 明範 發利 本專 為請 僅申 述之 所明 上發 以本 ，定 的 解 瞭 所 員 人並 之， 術 技]¾ 此例 悉施 熟實 如佳 較 之 已 限 以 用 br 改 效 等 之 成 C 完内 所圍 下範 神利 精專 之請 示申 揭之 所述 明下 發在 本含 離包 脫應 未均 它 ， 其飾 凡修 •’ 或 圍變 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210x297公釐)V. Description of the invention () The optical path length of the Yuannei Electric Power Station will be accurately aligned with the mid-range seeding range, and the test will show that the low-cost and low-cost components are of great magnitude and can be changed again. When the system is issued between the Ming and the Qing Dynasty, the inspection fee of Huayuan's electro-optical machine is flat. There are various types of testing. 1 1 The test has been issued to verify the issued version. , Ming Tongfa is also available for this test piece. , The semi-electrical part of the optical element of the optical element of the optical element of the optical structuring machine is not installed, the optical seal is not tested, the direct test can be detected, and the inspection can be corrected. The out-of-process part 'produces electricity to the light .... .. Feng: (Please read the notes on the back before filling out this page} Ming Fanfali This book is designed to be issued only with the statement of the statement, and the inmate will be solved, and the technique] ¾ This example It is understood that Shi Zhishi Rujia is better than the limited use of br to improve the effectiveness of C, and is surrounded by Fan Shenli's request for application, which is clearly stated in this document. Its decoration Fan Xiu 'or printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the paper is printed in accordance with China National Standard (CNS) A4 (210x297 mm)