TWI221689B - Corona processing equipment - Google Patents

Abstract

The present invention provides a corona processing equipment, which improves the problem of high cost and limited surface processing effect for the plasma processing equipment in the prior art. The solution of the present invention is to install a high-voltage circuit system between a power source and a positive electrode plate. The high-voltage circuit system is grounded in the middle, and a negative electrode plate is installed. The dense silk-like arc (hopping electrons) between the positive electrode plate and the negative electrode plate is utilized to generate the corona discharge in a wider range. Thus, the corona discharge provides a better surface cleaning effect on the object to be cleaned, and enhances the surface uniformity. Also, since the gas temperature to operate the corona discharge is close to room temperature (which belongs to cold plasma type), energy is not required to raise the gas temperature, and electromagnetic interference of RF emission equipment is not generated.

Description

1221689 V. Description of the invention (1) [Technical field of the invention] The present invention provides a corona treatment device, which mainly generates a stable diffusion corona discharge between two electrode plates, and the surface treatment can be improved by using the corona discharge. The effect is consistent with the surface; specifically, the device of the present invention refers to a corona treatment device having a high-voltage circuit system, a neutral point ground, an insulation chamber, a positive electrode plate and a negative electrode plate. The surface of the object to be cleaned is subjected to a diffuse corona discharge (a large number of filamentary arcs and luminous phenomena). Electron impact will generate general surface cleaning, and a large number of filamentary coronas will increase the effect of surface cleaning. [Previous technology] According to the general, the surface treatment of low-voltage plasma is generally a high-frequency plasma power transmission system (for example: just like radio frequency RF), please refer to the first figure, including a set of electrode power supply (1 0 ), A piece to be cleaned (1 4), and another set of power sources (1 1), transmitting boxes (1 2) and AC generators (1 3) for transmitting radio frequency (RF); powered by electrodes (1 The plasma electrons generated by 0) will use the gas molecules to hide the metal atoms on the part to be cleaned (1 4). When these metal atoms pass through the gas in the bond bond chamber, these metal atoms will be generated with the gas. A large number of collisions produce the effect of surface atomic collisions and cleaning; if at the same time, the radio frequency (RF) vibration of the alternator (1 3) is additionally applied, the radio frequency

Page 5 1221689 V. Description of the invention (2) (RF) emits a unique regular electron impact and oscillating light and heat will accelerate the collision between these metals and gases and electrons, causing electrons to easily collide with gas molecules and transfer energy; the above Fuxi ’s low-voltage plasma surface treatment will reduce the amount of power required for plasma treatment (shorter operating time and lower temperature) and prevent excessive heating. This high-frequency plasma power transmission system is a common low-voltage plasma surface treatment today. One of the methods, however, its processing operations still produce the following problems: First, the conventional radio frequency (RF) will have a high cost problem. Due to the high frequency vibration of the radio frequency (RF), the temperature of the working environment will be too high. Therefore, conventional equipment must be equipped with high-temperature cooling equipment; the second is also because radio frequency (RF) is prone to local temperature problems. 5 The high operating environment will cause the formation of atoms on the surface of the part to be cleaned (1 4). The electron dispersion of the pulp is not uniform, and the effect gain of the surface treatment of the part to be cleaned (1 4) is also very limited. Third, the conventional radio frequency (RF) Will produce electromagnetic waves emitted, the electronic device will interfere with the electromagnetic circumferential side of the equipment are not allowed to break, difficult to precisely control by. The meeting system is not related to the questions and questions. The effectiveness of the research is now quite reasonable, and it is described in detail. Reasonable and machine-type department, a dizzy question appears on the phone, the case is published, how many studies have been published, such as the trapped person, and the lack of clarification, I want to send more because of the most successful businessmen Defects, in the pursuit of ideals, practicality and progress, sincerely

Page 6 1221689 V. Description of the invention (3) Extreme efforts are needed to pursue the goal of improvement; in view of this, the inventor of this case has carefully considered and has been engaged in the sale of various plasma institutions and related plasma processing technologies for many years. The experience of sales, research, and development eventually led to the development of a corona treatment device, which is not only beneficial for surface treatment operations, but also can replace radio frequency electrocondensation equipment that is prone to failure and generates south temperature and electromagnetic waves. [Summary of the Invention] The first object of the present invention is to provide a corona treatment device which utilizes a stable diffusion corona discharge generated between two electrode plates for surface cleaning, not only a dense filamentary arc will effectively impact the cleaning surface, In addition, the light emitted by the corona can also improve the formation strength during surface treatment (the molecules on the surface and the electrons in the impact are stabilized), and the invention does not generate high-frequency oscillations and electromagnetic waves, so the invention will improve the past plasma The surface treatment equipment cost is too high, and the surface treatment effect is limited. A second object of the present invention is to provide an electric army processing equipment for effectively generating a corona discharge. The present invention is to set a south voltage circuit system between a power source and a positive electrode plate, and the high voltage circuit system uses a midpoint An additional negative electrode plate is provided for grounding, and a dense wire-like arc (beating electrons) between the positive electrode plate and the negative electrode plate is used to generate a wide range of corona discharges. Thus, the invention can generate a favorable surface on the plastic surface. Consistent, low temperature plasma without additional heating.

Page 7 1221689 V. Description of the invention (4) The third object of the present invention is to provide a corona treatment device which uses a dense filamentary arc between a positive electrode plate and a negative electrode plate to generate a corona. The temperature of the gas for operation and discharge is close to room temperature (which is in the form of cold plasma), so the present invention saves energy and equipment costs very much, and does not need to raise the energy temperature above the gas temperature. The hair frequency is low, the cost is high, and the production capacity is large enough. The equipment will not be able to handle 3 books. The author of the system, the light that is disturbed by the wire, has the electricity of the four magnetic waves, and the electric power, which is affected by the halo at the temperature of the open-air, will cause the electric power, motion, and vibration. The invention of this case is to achieve The above purpose, technology, means and other effects used are listed in detail with a preferred embodiment and illustrated in detail. It is believed that the purpose, characteristics and other advantages of the present invention can be obtained in-depth and specific. Understand; first please refer to the second figure, which is a schematic diagram of the present invention. The present invention includes a power source (20), a high-voltage circuit system (21), a positive electrode plate (2 20, a negative electrode plate). (2 3) and a processing room (24), wherein: the power source (20) is a person providing sufficient power; the south voltage circuit system (2 1) is connected to the power source (2 0) And will increase the power to a preset positive voltage, and a midpoint ground (2 1 1) is installed in the high voltage circuit system (21), and the midpoint ground (211) is used to generate a preset negative voltage; The positive electrode plate (2 2) is connected to the high voltage circuit system (2 1)

Page 8 1221689 V. Description of the invention (5) Connected and voltage; The negative electrode is connected and voltage; The processing chamber pressure sealed space (injected oxygen, and the negative electrode plate (2-negative electrode plate to be cleaned) (The ingenious effect of corona discharge in the 2 series position is also in the form of slurry), so that the plate (2 3) will guide the south (24), 2 4 1), and the processing chamber (2 3) is sealed to the object ( 2 5) 3); arrange, the present process, because the device of the invention of the present invention will guide the preset positive on the south voltage circuit system (2 1), and the high voltage circuit system (2 1) The preset negative system on the voltage circuit system (2 1) is made of insulating material and provides a low inside the low voltage enclosed space (2 4 1) 4) The positive electrode plate (22) and the inner Or, placing the positive electrode plate (2 2) and the above-mentioned structural features and their mutual relationship will make the object to be cleaned (2 5) subject to a dense filamentary arc, and corona enhances the temperature of the surface cleaning gas close to Room temperature (belonging to the reduction of the cost of cold electricity. Embodiments of the invention) Secondly, the operation principle of the invention of the present case is matched The detailed description of the formula is as follows, in order to allow your reviewers to have a further understanding and understanding of the structure, characteristics and other advantages of the present invention, in order to facilitate the description and highlight the advantages of the invention is indeed more advanced and practical than the traditional structure; As shown in the three figures, the power supply (20) of the present invention sends power into the high-voltage circuit system (2 1), and the high-voltage circuit system (21) increases the voltage to +75

Page 1212689 V. Description of the invention (6) 0 0 volts (predeterminable feasible data), and positive 7 500 volts power is transmitted to the positive electrode plate (2 2). At this time, the midpoint is grounded ( 2 1 1) will cooperate with the high voltage circuit system (2 1) to generate a negative voltage of 7500 volts (the preset feasible data), and transmit negative 750 volts of power to the negative electrode plate (2 3), so that the positive A dense wire-like arc (beating electrons) is generated between the electrode plate (2 2) and the negative electrode plate (2 3); on the other hand, since the processing chamber (2 4) is made of insulating material, and in the low-voltage enclosed space (2 4 1) It is filled with oxygen, so the electrons in the dense filamentary arc will collide with the oxygen molecules, which will cause the oxygen molecules to form an unstable high-energy state due to the impact of the electrons, but the oxygen molecules will immediately return to the low-energy position (oxygen The molecule is also beating), and when the oxygen molecule returns from a high energy state to a low energy level, it will release a photon of considerable energy (Photon) and generate corona light. At this time, the dense filamentary arc will corona with the corona. Corona discharge (2 6) (light wave, electric arc mixture) which is combined with light by diffusion, It will be kept between the positive electrode plate (2 2) and the negative electrode plate (2 3), and will continuously impact and illuminate the surface of the object to be cleaned (2 5), so the corona discharge (2 6) can cause the part to be cleaned. (2 3). The surface is cleaned to achieve the cleaning effect of the invention. Will need to be done, but the pressure operation is not electric to the C light by the temperature halo, the room electricity is external. The condition is close to the low internal wire; the connection is low, the degree of sexuality is 6 and the temperature is low, and the temperature is 2 ° C. 1% of the gas is generated. The oxygen is released. 2 minutes are set. C is set. , Li Zeng's book is Qinghui} So Waiting for Light 6, Lei Halo 2} A clear electricity C-type is assisted and the electricity shape value is auxiliary, and the slurry effect is effective.

Page 10 1221689 V. Description of the invention (7) It is worth mentioning that the present invention can enhance the cleaning effect in a low-pressure enclosed space (2 4 1). It operates in a low-frequency and relatively electromagnetic wave-free environment, so the present invention Will not cause electronic obstruction, can generate sufficient corona discharge (26) on the surface of the object to be cleaned (26), without excessive electronic impedance cooperation and excessive heating. In summary, the present invention is a high-voltage circuit system provided between a power source and a positive electrode plate, and the high-voltage circuit system uses a midpoint ground to provide another negative electrode plate. The dense wire-like arc (beating electrons) generates a wide range of corona discharges. As a result, the corona discharge will make the surface of the object to be cleaned better, improve the surface consistency, and because the gas temperature of the corona discharge is close to At room temperature (belonging to the form of cold plasma), the cost of the equipment of the present invention is relatively low. It is not necessary to use energy to increase the gas temperature, and it does not cause electromagnetic interference problems of radio frequency radiation equipment. "Availability" should be beyond doubt. In addition, the structure disclosed in the embodiment of the present invention has not been seen in publications before application, nor has it been used publicly. It not only has the fact that the effect is enhanced as above, but also has a variety of non-negligible additions. Efficacy, therefore, the "newness" and "progressiveness" of the present invention have all complied with patent regulations. The application, saying prayers vouchsafed to review and give early patent-pending, will be a real sense of ethics.

Page 11 1221689 Brief description of the drawings Schematic part The first drawing is a schematic diagram used in practice. The second figure is a schematic diagram of the present invention. The third figure is a schematic diagram of the corona discharge of the present invention. Drawing number part

I Electrode power supply (1 0) Power supply (1 1) Transmitter box (12) Alternator generator (13) To be cleaned (1 4) Radio frequency (RF) 0 13 16 2 12 4 2 (2 (2 (source C board C electric and electrical ground electrodes are connected with an electric halo point and a negative current medium and high voltage circuit system (2 1) a positive electrode plate (2 2) a processing chamber (2 4) an object to be cleaned (2 5)

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Claims (1)

1221689 6. Scope of patent application 1. A corona treatment equipment, including: a power source, which provides sufficient power; a high-voltage circuit system, which is connected to the power source, and will increase the power to a preset positive voltage, In addition, a mid-point ground is installed in the high-voltage circuit system, and a preset negative voltage is generated by using the mid-point ground. A positive electrode plate is connected to the high-voltage circuit system, and will guide the high-voltage circuit system. A preset positive voltage; 'a negative electrode plate is connected to the high voltage circuit system, and will conduct and lead to the preset negative voltage on the high voltage circuit system; a processing chamber made of insulating material, and Provide a low-pressure airtight space, inject a preset gas into the low-pressure airtight space, and the processing chamber will seal the positive electrode plate and the negative electrode plate inside; a to-be-cleaned material is placed between the positive electrode plate and the positive electrode plate. Between negative electrode plates; by this, a corona discharge will be generated between the positive electrode plate and the negative electrode plate, and the surface of the object to be cleaned will be cleaned. Provide tn * -l ίι places. The thief's electrical oxygen is described in the noted item. One is the air confinement. Fan Mi. ♦ Press down. Please apply in the application room. Page 13