TWD220881S - Part of the substrate cleaning tool - Google Patents

Part of the substrate cleaning tool Download PDF

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Publication number
TWD220881S
TWD220881S TW110305788F TW110305788F TWD220881S TW D220881 S TWD220881 S TW D220881S TW 110305788 F TW110305788 F TW 110305788F TW 110305788 F TW110305788 F TW 110305788F TW D220881 S TWD220881 S TW D220881S
Authority
TW
Taiwan
Prior art keywords
substrate
cleaning tool
substrate cleaning
design
article
Prior art date
Application number
TW110305788F
Other languages
Chinese (zh)
Inventor
岡本芳樹
久留巣健人
滝口靖史
久保明広
水野剛資
宮原理
Original Assignee
日商東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商東京威力科創股份有限公司 filed Critical 日商東京威力科創股份有限公司
Publication of TWD220881S publication Critical patent/TWD220881S/en

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Abstract

【物品用途】;本設計的物品是基板洗淨具，係用於與半導體基板或液晶基板之類的基板的表面接觸，而進行洗淨基板表面之基板洗淨具。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分。[Use of article]; The article designed in this design is a substrate cleaning tool, which is used to contact the surface of a substrate such as a semiconductor substrate or a liquid crystal substrate to clean the surface of the substrate. ;[Design Description];The dotted line portion disclosed in the drawing is the part of this case that does not require design.

Description

基板洗淨具之部分Part of the substrate cleaning tool

本設計的物品是基板洗淨具，係用於與半導體基板或液晶基板之類的基板的表面接觸，而進行洗淨基板表面之基板洗淨具。The article of this design is a substrate cleaning tool, which is used to clean the surface of the substrate by contacting the surface of a substrate such as a semiconductor substrate or a liquid crystal substrate.

圖式所揭露之虛線部分，為本案不主張設計之部分。The dotted line part disclosed in the drawings is the part that does not claim design in this case.

TW110305788F 2021-04-27 2021-10-26 Part of the substrate cleaning tool TWD220881S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2021-8973F JP1698469S (en) 2021-04-27 2021-04-27
JP2021-008973 2021-04-27

Publications (1)

Publication Number Publication Date
TWD220881S true TWD220881S (en) 2022-09-01

Family

ID=78282194

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110305788F TWD220881S (en) 2021-04-27 2021-10-26 Part of the substrate cleaning tool

Country Status (2)

Country Link
JP (1) JP1698469S (en)
TW (1) TWD220881S (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD204496S (en) 2018-12-10 2020-05-01 日商富士紡控股股份有限公司 Substrate retaining ring

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD204496S (en) 2018-12-10 2020-05-01 日商富士紡控股股份有限公司 Substrate retaining ring

Also Published As

Publication number Publication date
JP1698469S (en) 2021-11-01

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