|
US5226118A
(en)
*
|
1991-01-29 |
1993-07-06 |
Prometrix Corporation |
Data analysis system and method for industrial process control systems
|
|
GB2257507B
(en)
|
1991-06-26 |
1995-03-01 |
Digital Equipment Corp |
Semiconductor wafer processing with across-wafer critical dimension monitoring using optical endpoint detection
|
|
US6813032B1
(en)
|
1999-09-07 |
2004-11-02 |
Applied Materials, Inc. |
Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques
|
|
JP2004536440A
(en)
|
2000-08-11 |
2004-12-02 |
サーマ−ウェーブ・インコーポレイテッド |
Optical critical dimension metrology system built into semiconductor wafer processing tool
|
|
CN100407215C
(en)
|
2002-09-30 |
2008-07-30 |
东京毅力科创株式会社 |
Method and apparatus for the monitoring and control of a semiconductor manufacturing process
|
|
US8257546B2
(en)
|
2003-04-11 |
2012-09-04 |
Applied Materials, Inc. |
Method and system for monitoring an etch process
|
|
KR100556529B1
(en)
|
2003-08-18 |
2006-03-06 |
삼성전자주식회사 |
Method for measuring thickness of multi-layer and apparatus for the same
|
|
US7651946B2
(en)
*
|
2005-12-12 |
2010-01-26 |
University College Cork - National University Of Ireland, Cork |
Wet etch processing
|
|
USD602942S1
(en)
*
|
2008-08-05 |
2009-10-27 |
Allgress, Inc. |
Graphical user interface for portion of a display screen
|
|
USD605652S1
(en)
*
|
2008-11-19 |
2009-12-08 |
Pvt Solar, Inc. |
Graphical user interface for computer
|
|
US20110172952A1
(en)
|
2009-10-05 |
2011-07-14 |
Upendra Ummethala |
Apparatus and Method for Measuring Position and/or Motion Using Surface Micro-Structure
|
|
US8954184B2
(en)
|
2011-01-19 |
2015-02-10 |
Tokyo Electron Limited |
Tool performance by linking spectroscopic information with tool operational parameters and material measurement information
|
|
JP2013161913A
(en)
|
2012-02-03 |
2013-08-19 |
Tokyo Electron Ltd |
Plasma processing apparatus and plasma processing method
|
|
USD737853S1
(en)
*
|
2013-10-21 |
2015-09-01 |
Apple Inc. |
Display screen or portion thereof with graphical user interface
|
|
USD756371S1
(en)
*
|
2013-12-02 |
2016-05-17 |
Symantec Corporation |
Display screen with graphical user interface
|
|
US10330612B2
(en)
|
2014-09-11 |
2019-06-25 |
Applied Materials, Inc. |
Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures
|
|
USD781300S1
(en)
*
|
2014-09-19 |
2017-03-14 |
Illumina, Inc. |
Display screen or portion thereof with graphical user interface for use with a sequencing instrument
|
|
WO2016086056A1
(en)
|
2014-11-25 |
2016-06-02 |
Kla-Tencor Corporation |
Analyzing and utilizing landscapes
|
|
USD767612S1
(en)
*
|
2015-04-16 |
2016-09-27 |
Nasdaq, Inc. |
Display screen or portion thereof with graphical user interface
|
|
KR20180038477A
(en)
*
|
2015-08-04 |
2018-04-16 |
노바 메주어링 인스트루먼츠 엘티디. |
Hybrid measurement system and measurement method in thin film
|
|
USD766940S1
(en)
*
|
2015-08-17 |
2016-09-20 |
Td Ameritrade Ip Company, Inc. |
Display screen or portion thereof with graphical user interface
|
|
USD805525S1
(en)
*
|
2016-03-22 |
2017-12-19 |
Branch Banking And Trust Company |
Display screen or portion thereof with graphical user interface
|
|
USD819066S1
(en)
*
|
2016-05-05 |
2018-05-29 |
Corsearch, Inc. |
Display panel with a graphical user interface
|
|
JP6697984B2
(en)
|
2016-08-31 |
2020-05-27 |
東京エレクトロン株式会社 |
Substrate processing method and substrate processing system
|
|
USD924910S1
(en)
*
|
2016-09-19 |
2021-07-13 |
Roxar Flow Measurement As |
Computer screen with graphical user interface
|
|
TWI779986B
(en)
|
2016-11-30 |
2022-10-01 |
美商應用材料股份有限公司 |
Spectrographic monitoring using a neural network
|
|
KR101910268B1
(en)
|
2017-02-23 |
2018-10-19 |
에스케이 주식회사 |
Semiconductor GP Prediction Method and System
|
|
USD829749S1
(en)
*
|
2017-03-06 |
2018-10-02 |
Citigroup Global Markets, Inc. |
Display screen with transitional graphical user interface of a financial markets orders and executed trades viewer application
|
|
US10387755B2
(en)
|
2017-06-28 |
2019-08-20 |
Applied Materials, Inc. |
Classification, search and retrieval of semiconductor processing metrology images using deep learning/convolutional neural networks
|
|
JP6778666B2
(en)
*
|
2017-08-24 |
2020-11-04 |
株式会社日立製作所 |
Search device and search method
|
|
JP1665444S
(en)
|
2017-09-27 |
2020-08-11 |
|
|
|
US10515172B2
(en)
|
2017-10-20 |
2019-12-24 |
Taiwan Semiconductor Manufacturing Company Limited |
RC tool accuracy time reduction
|
|
USD861724S1
(en)
|
2017-12-21 |
2019-10-01 |
Toontrack Music Ab |
Computer screen with a graphical user interface
|
|
US10795346B2
(en)
|
2018-03-13 |
2020-10-06 |
Applied Materials, Inc. |
Machine learning systems for monitoring of semiconductor processing
|
|
WO2019182913A1
(en)
|
2018-03-20 |
2019-09-26 |
Tokyo Electron Limited |
Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using same
|
|
WO2019200015A1
(en)
|
2018-04-10 |
2019-10-17 |
Lam Research Corporation |
Optical metrology in machine learning to characterize features
|
|
USD947208S1
(en)
*
|
2018-04-19 |
2022-03-29 |
Abb Schweiz Ag |
Display screen or portion thereof with graphical user interface
|
|
USD940169S1
(en)
*
|
2018-05-22 |
2022-01-04 |
Data.World, Inc. |
Display screen or portion thereof with a graphical user interface
|
|
JP7184547B2
(en)
|
2018-06-27 |
2022-12-06 |
株式会社Ｓｃｒｅｅｎホールディングス |
Correction method, substrate processing apparatus, and substrate processing system
|
|
USD874481S1
(en)
*
|
2018-06-29 |
2020-02-04 |
Innoplexus Ag |
Display screen with transitional graphical user interface
|
|
USD894922S1
(en)
*
|
2018-08-28 |
2020-09-01 |
Covestro Llc |
Display screen or portion thereof with an animated graphical user interface
|
|
EP3637186A1
(en)
|
2018-10-09 |
2020-04-15 |
ASML Netherlands B.V. |
Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus
|
|
US10705514B2
(en)
|
2018-10-09 |
2020-07-07 |
Applied Materials, Inc. |
Adaptive chamber matching in advanced semiconductor process control
|
|
USD948543S1
(en)
*
|
2018-10-26 |
2022-04-12 |
Hvr Mso Llc |
Display screen or portion thereof with a graphical user interface
|
|
EP3807720B1
(en)
|
2018-11-07 |
2022-05-11 |
ASML Netherlands B.V. |
Method for configuring a semiconductor manufacturing process, a lithographic apparatus and an associated computer program product
|
|
JP1644619S
(en)
|
2018-11-21 |
2019-11-05 |
|
|
|
USD897372S1
(en)
*
|
2019-02-03 |
2020-09-29 |
Baxter International Inc. |
Portable electronic display with animated GUI
|
|
JP1651220S
(en)
|
2019-02-18 |
2020-01-27 |
|
|
|
USD928818S1
(en)
*
|
2019-06-04 |
2021-08-24 |
Samsung Electronics Co., Ltd. |
Display screen or portion thereof with animated graphical user interface
|
|
USD941851S1
(en)
*
|
2019-07-03 |
2022-01-25 |
Theta Lake, Inc. |
Computer display with graphical user interface for video compliance review
|
|
USD937861S1
(en)
*
|
2019-07-29 |
2021-12-07 |
2624491 Ontario Inc. |
Display screen or portion thereof with graphical user interface
|
|
JP1664109S
(en)
|
2019-10-15 |
2020-07-20 |
|
|
|
USD938465S1
(en)
*
|
2020-02-14 |
2021-12-14 |
SparkCognition, Inc. |
Display screen with transitional graphical user interface
|
|
USD961605S1
(en)
*
|
2020-07-20 |
2022-08-23 |
Jeffrey H. Starr |
Display screen or portion thereof with graphical user interface
|
|
US20220026817A1
(en)
*
|
2020-07-22 |
2022-01-27 |
Applied Materials, Inc. |
Determining substrate profile properties using machine learning
|
|
US11842910B2
(en)
*
|
2021-02-04 |
2023-12-12 |
Applied Materials, Inc. |
Detecting outliers at a manufacturing system using machine learning
|
