TWD216728S - 溫度感測器之部分 - Google Patents

溫度感測器之部分 Download PDF

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Publication number
TWD216728S
TWD216728S TW110300928F TW110300928F TWD216728S TW D216728 S TWD216728 S TW D216728S TW 110300928 F TW110300928 F TW 110300928F TW 110300928 F TW110300928 F TW 110300928F TW D216728 S TWD216728 S TW D216728S
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Taiwan
Prior art keywords
design
temperature
temperature sensor
article
heat treatment
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TW110300928F
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English (en)
Inventor
赤尾徳信
小杉哲也
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日商國際電氣股份有限公司
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Publication of TWD216728S publication Critical patent/TWD216728S/zh

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Abstract

【物品用途】;本設計的物品係在半導體製造裝置的熱處理爐中用於感測爐內溫度的溫度感測器。本物品係將多個感測器設置在一個保護管中，分別用於感測熱處理爐內之既定位置的溫度。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分。;各圖式中以虛線呈現的圓筒形的保護管係由透明材料製成的。

Description

溫度感測器之部分
本設計的物品係在半導體製造裝置的熱處理爐中用於感測爐內溫度的溫度感測器。本物品係將多個感測器設置在一個保護管中，分別用於感測熱處理爐內之既定位置的溫度。
圖式所揭露之虛線部分，為本案不主張設計之部分。
各圖式中以虛線呈現的圓筒形的保護管係由透明材料製成的。
TW110300928F 2020-09-15 2021-02-23 溫度感測器之部分 TWD216728S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020019645F JP1692912S (ja) 2020-09-15 2020-09-15 温度センサ
JP2020-019645 2020-09-15

Publications (1)

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TWD216728S true TWD216728S (zh) 2022-01-21

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TW110300928F TWD216728S (zh) 2020-09-15 2021-02-23 溫度感測器之部分

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US (1) USD976129S1 (zh)
JP (1) JP1692912S (zh)
TW (1) TWD216728S (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1729419S (ja) * 2022-03-18 2022-11-09 温度センサ
USD1031467S1 (en) * 2022-03-18 2024-06-18 Therm-O-Disc, Incorporated Dual probe sensor
USD1030526S1 (en) * 2022-03-18 2024-06-11 Therm-O-Disc, Incorporated Single probe sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD891947S1 (en) 2018-12-31 2020-08-04 Flir Systems Ab Handheld sensor device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2988172B1 (fr) * 2012-03-19 2014-12-26 Sc2N Sa Capteur de temperature
DE202012003186U1 (de) * 2012-03-29 2012-04-30 Türk & Hillinger GmbH Eintauch-Temperatursensor
US9791328B2 (en) * 2013-12-18 2017-10-17 Ewig Industries Macao Commercial Offshore Ltd Waterproof food thermometer probe and associated methods
JP1534939S (zh) 2015-02-25 2015-10-13
JP1564809S (zh) * 2016-02-10 2016-12-05
JP1577927S (zh) * 2016-07-14 2017-06-05
JP1577928S (zh) * 2016-07-14 2017-06-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD891947S1 (en) 2018-12-31 2020-08-04 Flir Systems Ab Handheld sensor device

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USD976129S1 (en) 2023-01-24
JP1692912S (ja) 2021-08-16

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