TWD201273S - Vacuum supply control valve manifold - Google Patents

Vacuum supply control valve manifold

Info

Publication number
TWD201273S
TWD201273S TW107306871F TW107306871F TWD201273S TW D201273 S TWD201273 S TW D201273S TW 107306871 F TW107306871 F TW 107306871F TW 107306871 F TW107306871 F TW 107306871F TW D201273 S TWD201273 S TW D201273S
Authority
TW
Taiwan
Prior art keywords
vacuum
suction port
pressure fluid
valve
supplied
Prior art date
Application number
TW107306871F
Other languages
Chinese (zh)
Inventor
Toru Nakayama
Koji Sugano
Yasuhiro Ushijima
Original Assignee
日商Ｓｍｃ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商Ｓｍｃ股份有限公司 filed Critical 日商Ｓｍｃ股份有限公司
Publication of TWD201273S publication Critical patent/TWD201273S/en

Links

Abstract

【物品用途】;本物品係一種使用壓縮空氣等壓力流體產生真空之歧管式的真空供給控制閥。;在使用時，首先，對真空抽吸通口連接未圖示的吸附墊或吸附噴嘴等。當根據來自外部機器的控制信號而對預定的真空單元供給壓力流體時，即會於預定的真空抽吸通口產生真空，使工件被吸附於吸附墊等。另一方面，當根據來自外部機器的控制信號而對預定的真空抽吸通口供給真空破壞用壓力流體時，真空抽吸通口的真空就會被破壞，工件會從吸附墊等脫離。;【設計說明】;本設計物品之真空供給控制閥具備：複數個真空單元；軌道，供連接設置複數個真空單元；端板，安裝於連接設置之複數個真空單元之兩端；串列傳輸控制部，控制各真空單元與未圖示之外部機器的通信；及基板盒，收納使用於各真空單元與串列傳輸控制部的通信之通信用基板。;真空單元包含：真空抽吸通口；壓力流體供給通口；排氣通口；破壞流量調整針，調整真空破壞用壓力流體之流量；未圖示之真空產生部(噴射部)；供給閥/破壞閥組件；導引閥部，控制用以驅動供給閥/破壞閥組件之導引空氣；及未圖示的壓力感測器，檢測真空抽吸通口中之壓力。;供給閥/破壞閥組件包含：真空供給閥，可切換對於真空產生部供給壓力流體的狀態與不對於真空產生部供給壓力流體的狀態；真空破壞閥，可切換對於真空抽吸通口供給真空破壞用壓力流體的狀態與不對於真空抽吸通口供給真空破壞用壓力流體的狀態。;本創作之特徵在於「真空供給控制閥」的整體形狀。[Use of article] This article is a manifold-type vacuum supply control valve that uses pressure fluid such as compressed air to generate vacuum. ; When using, first connect an adsorption pad or adsorption nozzle (not shown) to the vacuum suction port. When the pressure fluid is supplied to the predetermined vacuum unit in accordance with the control signal from the external device, a vacuum is generated in the predetermined vacuum suction port, so that the workpiece is adsorbed to the adsorption pad or the like. On the other hand, when the vacuum breaking pressure fluid is supplied to a predetermined vacuum suction port based on a control signal from an external device, the vacuum in the vacuum suction port is broken and the workpiece is separated from the adsorption pad or the like. ;[Design Description];The vacuum supply control valve of this design article has: a plurality of vacuum units; a track for connecting and setting a plurality of vacuum units; an end plate, installed at both ends of a plurality of connected vacuum units; serial transmission The control unit controls communication between each vacuum unit and an external device not shown in the figure; and the substrate box stores a communication substrate used for communication between each vacuum unit and the serial transmission control unit. ;The vacuum unit includes: a vacuum suction port; a pressure fluid supply port; an exhaust port; a breaking flow adjustment needle to adjust the flow rate of the pressure fluid for vacuum breaking; a vacuum generating part (injection part) not shown; a supply valve /Release valve assembly; the pilot valve part controls the pilot air used to drive the supply valve/relief valve assembly; and a pressure sensor not shown in the figure detects the pressure in the vacuum suction port. ;The supply valve/break valve assembly includes: a vacuum supply valve that can switch between a state in which pressure fluid is supplied to the vacuum generating part and a state in which pressure fluid is not supplied to the vacuum generating part; a vacuum break valve that can switch a state in which vacuum is supplied to the vacuum suction port; A state in which the pressure fluid for breaking is not supplied to the vacuum suction port. ;The characteristic of this creation is the overall shape of the "vacuum supply control valve".

TW107306871F 2018-08-06 2018-11-23 Vacuum supply control valve manifold TWD201273S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2018-17186F JP1629151S (en) 2018-08-06 2018-08-06

Publications (1)

Publication Number Publication Date
TWD201273S true TWD201273S (en) 2019-12-01

Family

ID=66097814

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107306871F TWD201273S (en) 2018-08-06 2018-11-23 Vacuum supply control valve manifold

Country Status (3)

Country Link
US (1) USD888200S1 (en)
JP (1) JP1629151S (en)
TW (1) TWD201273S (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1659024S (en) * 2019-06-14 2020-05-11
JP1659026S (en) * 2019-06-14 2020-05-11
JP1659025S (en) * 2019-06-14 2020-05-11
JP1659103S (en) * 2019-06-14 2020-05-11
JP1659102S (en) * 2019-06-14 2020-05-11
JP1659419S (en) * 2019-07-29 2020-05-18
JP1659420S (en) * 2019-07-29 2020-05-18
USD1094488S1 (en) * 2021-12-10 2025-09-23 Lam Research Corporation Manifold for supplying coolant to components of substrate processing systems

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD107876S1 (en) 2004-04-09 2005-11-21 股份有限公司 Electromagnetic valve
TWD107877S1 (en) 2004-04-09 2005-11-21 股份有限公司 Electromagnetic valve
JP4554482B2 (en) * 2005-09-26 2010-09-29 株式会社コガネイ Manifold solenoid valve
TWD124397S1 (en) * 2007-06-11 2008-08-21 股份有限公司 Electromagnetic valve
JP4594404B2 (en) * 2008-02-26 2010-12-08 株式会社コガネイ Manifold solenoid valve
TWD129895S1 (en) * 2008-03-24 2009-07-21 股份有限公司 Electromagnetic valve
TWD129896S1 (en) 2008-03-24 2009-07-21 股份有限公司 Electromagnetic valve
TWD129718S1 (en) * 2008-03-24 2009-07-11 股份有限公司 Electromagnetic valve
TWD135616S1 (en) 2008-07-29 2010-07-01 Ｓｍｃ股份有限公司 Solenoid valve
TWD139473S1 (en) 2009-06-11 2011-03-11 Ｓｍｃ股份有限公司 Solenoid valve
TWD139474S1 (en) 2009-06-11 2011-03-11 Ｓｍｃ股份有限公司 Solenoid valve
TWD137439S1 (en) 2009-06-11 2010-10-21 Ｓｍｃ股份有限公司 Solenoid valve
TWD147443S (en) 2011-04-25 2012-06-01 Ｓｍｃ股份有限公司 Vacuum supply control valve manifold
TWD147345S (en) 2011-04-25 2012-06-01 Ｓｍｃ股份有限公司 Vacuum supply control valve manifold
JP6673546B2 (en) * 2016-02-29 2020-03-25 Smc株式会社 Controller assembly

Also Published As

Publication number Publication date
USD888200S1 (en) 2020-06-23
JP1629151S (en) 2019-04-15

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