TWD194773S - 研磨墊 - Google Patents

研磨墊

Info

Publication number
TWD194773S
TWD194773S TW107302369F TW107302369F TWD194773S TW D194773 S TWD194773 S TW D194773S TW 107302369 F TW107302369 F TW 107302369F TW 107302369 F TW107302369 F TW 107302369F TW D194773 S TWD194773 S TW D194773S
Authority
TW
Taiwan
Prior art keywords
polishing pad
view
case
item
design
Prior art date
Application number
TW107302369F
Other languages
English (en)
Chinese (zh)
Inventor
尾関晃
Original Assignee
日商霓塔哈斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商霓塔哈斯股份有限公司 filed Critical 日商霓塔哈斯股份有限公司
Publication of TWD194773S publication Critical patent/TWD194773S/zh

Links

TW107302369F 2017-10-30 2018-04-27 研磨墊 TWD194773S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-024155 2017-10-30
JPD2017-24155F JP1613788S (enExample) 2017-10-30 2017-10-30

Publications (1)

Publication Number Publication Date
TWD194773S true TWD194773S (zh) 2018-12-21

Family

ID=63525013

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107302369F TWD194773S (zh) 2017-10-30 2018-04-27 研磨墊

Country Status (2)

Country Link
JP (1) JP1613788S (enExample)
TW (1) TWD194773S (enExample)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW419739B (en) 1997-05-06 2001-01-21 Ibm Device and method for preventing settlement of particles on a chemical-mechanical polishing pad
TW422759B (en) 1999-04-30 2001-02-21 Norton Co Improved grinding system
TWM331408U (en) 2007-11-20 2008-05-01 Eino Entpr Co Grinding disc
TWM333985U (en) 2007-11-20 2008-06-11 Eino Entpr Co A multi-directional grinding disk
TW201416175A (zh) 2012-10-18 2014-05-01 San Fang Chemical Industry Co 研磨墊、研磨裝置及研磨墊之製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW419739B (en) 1997-05-06 2001-01-21 Ibm Device and method for preventing settlement of particles on a chemical-mechanical polishing pad
TW422759B (en) 1999-04-30 2001-02-21 Norton Co Improved grinding system
TWM331408U (en) 2007-11-20 2008-05-01 Eino Entpr Co Grinding disc
TWM333985U (en) 2007-11-20 2008-06-11 Eino Entpr Co A multi-directional grinding disk
TW201416175A (zh) 2012-10-18 2014-05-01 San Fang Chemical Industry Co 研磨墊、研磨裝置及研磨墊之製造方法
TWI531442B (zh) 2012-10-18 2016-05-01 三芳化學工業股份有限公司 研磨墊、研磨裝置及研磨墊之製造方法

Also Published As

Publication number Publication date
JP1613788S (enExample) 2018-09-18

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