TWD179921S - 離子源真空鍍膜系統中和器之陰極電極 - Google Patents

離子源真空鍍膜系統中和器之陰極電極

Info

Publication number
TWD179921S
TWD179921S TW105302898F TW105302898F TWD179921S TW D179921 S TWD179921 S TW D179921S TW 105302898 F TW105302898 F TW 105302898F TW 105302898 F TW105302898 F TW 105302898F TW D179921 S TWD179921 S TW D179921S
Authority
TW
Taiwan
Prior art keywords
view
neutralizer
ion source
cathode electrode
coating system
Prior art date
Application number
TW105302898F
Other languages
English (en)
Inventor
Chia Ming Chang
Kun Mien Chen
Original Assignee
艾提那科技股份有限公司
Atn Power Techlnogy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 艾提那科技股份有限公司, Atn Power Techlnogy Co Ltd filed Critical 艾提那科技股份有限公司
Priority to TW105302898F priority Critical patent/TWD179921S/zh
Publication of TWD179921S publication Critical patent/TWD179921S/zh

Links

Abstract

【物品用途】;其係為在離子源真空鍍膜系統之中和器內部的陰極電極。;【設計說明】;本設計係有關一種離子源真空鍍膜系統中和器之陰極電極,其有如各圖式所示之形狀者。;1.後視圖為與前視圖相同,故省略後視圖。;2.右側視圖與前視圖相同,故省略右側視圖。;3.左側視圖與前視圖相同,故省略左側視圖。
TW105302898F 2016-05-23 2016-05-23 離子源真空鍍膜系統中和器之陰極電極 TWD179921S (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW105302898F TWD179921S (zh) 2016-05-23 2016-05-23 離子源真空鍍膜系統中和器之陰極電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW105302898F TWD179921S (zh) 2016-05-23 2016-05-23 離子源真空鍍膜系統中和器之陰極電極

Publications (1)

Publication Number Publication Date
TWD179921S true TWD179921S (zh) 2016-12-01

Family

ID=89166181

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105302898F TWD179921S (zh) 2016-05-23 2016-05-23 離子源真空鍍膜系統中和器之陰極電極

Country Status (1)

Country Link
TW (1) TWD179921S (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD956005S1 (en) 2019-09-19 2022-06-28 Applied Materials, Inc. Shaped electrode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD956005S1 (en) 2019-09-19 2022-06-28 Applied Materials, Inc. Shaped electrode

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