TWD174923S - Protective tube for thermocouple - Google Patents

Protective tube for thermocouple

Info

Publication number
TWD174923S
TWD174923S TW104303927F TW104303927F TWD174923S TW D174923 S TWD174923 S TW D174923S TW 104303927 F TW104303927 F TW 104303927F TW 104303927 F TW104303927 F TW 104303927F TW D174923 S TWD174923 S TW D174923S
Authority
TW
Taiwan
Prior art keywords
protective tube
thermocouple
article
thermocouples
processing chamber
Prior art date
Application number
TW104303927F
Other languages
Chinese (zh)
Inventor
Akihiro Osaka
Hideto Yamaguchi
Motoya Takewaki
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD174923S publication Critical patent/TWD174923S/en

Links

Abstract

【物品用途】;本設計的物品是熱電偶用保護管，使用在用來對基板進行處理的基板處理裝置。;【設計說明】;本物品是配置在基板處理裝置的處理室周邊，利用設在內部的孔來設置熱電偶，而可測定處理室周邊的溫度。;「以斜線表示透明部的參考前視圖」中，斜線部分是表示透明部。[Use of article]; The article of this design is a protective tube for thermocouples, which is used in substrate processing equipment used to process substrates. ;[Design Description];This product is placed around the processing chamber of a substrate processing device, and the temperature around the processing chamber can be measured by installing thermocouples through holes provided inside. ;In "Reference front view with transparent part indicated by hatching", the hatched part indicates the transparent part.

TW104303927F 2015-02-25 2015-07-22 Protective tube for thermocouple TWD174923S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-3915F JP1534939S (en) 2015-02-25 2015-02-25

Publications (1)

Publication Number Publication Date
TWD174923S true TWD174923S (en) 2016-04-11

Family

ID=54258373

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104303927F TWD174923S (en) 2015-02-25 2015-07-22 Protective tube for thermocouple

Country Status (3)

Country Link
US (1) USD780606S1 (en)
JP (1) JP1534939S (en)
TW (1) TWD174923S (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1689064S (en) * 2020-08-31 2021-07-05 Temperature Sensor
JP1692912S (en) 2020-09-15 2021-08-16 Temperature Sensor
USD1031467S1 (en) * 2022-03-18 2024-06-18 Therm-O-Disc, Incorporated Dual probe sensor
USD1030526S1 (en) * 2022-03-18 2024-06-11 Therm-O-Disc, Incorporated Single probe sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4088509A (en) * 1977-03-04 1978-05-09 Mcdanel Refractory Porcelain Company Thermocouple protection tubes
JPS61262625A (en) * 1985-05-16 1986-11-20 Toyota Motor Corp Protective pipe for thermocouple and its preparation
AU612230B2 (en) * 1988-02-16 1991-07-04 Tempra Therm (Pty) Limited Thermocouples
US6776524B2 (en) * 2001-10-02 2004-08-17 Ametek, Inc. Rake thermocouple
US6857776B2 (en) * 2002-12-12 2005-02-22 Ametek, Inc. Connectorized high-temperature thermocouple
USD597423S1 (en) * 2008-07-30 2009-08-04 James Tech Co., Ltd. Temperature detecting apparatus for oven

Also Published As

Publication number Publication date
USD780606S1 (en) 2017-03-07
JP1534939S (en) 2015-10-13

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