TWD188699S - Vertical heating module - Google Patents
Vertical heating moduleInfo
- Publication number
- TWD188699S TWD188699S TW106303141F TW106303141F TWD188699S TW D188699 S TWD188699 S TW D188699S TW 106303141 F TW106303141 F TW 106303141F TW 106303141 F TW106303141 F TW 106303141F TW D188699 S TWD188699 S TW D188699S
- Authority
- TW
- Taiwan
- Prior art keywords
- heating module
- vertical heating
- equipment front
- end module
- module
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 title abstract description 4
Abstract
【物品用途】;本設計之物品為用於設備前端模組(EFEM,equipment front-end module)的垂直式加熱模組,其用以加熱待輸入至該設備前端模組內之氣流。[Purpose of the item]; The item of this design is a vertical heating module for the equipment front-end module (EFEM, equipment front-end module), which is used to heat the airflow to be input into the equipment front-end module.
Description
本設計之物品為用於設備前端模組(EFEM,equipment front-end module)的垂直式加熱模組,其用以加熱待輸入至該設備前端模組內之氣流。The article of the design is a vertical heating module for an EFEM (equipment front-end module) for heating the airflow to be input into the front end module of the device.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW106303141F TWD188699S (en) | 2017-06-09 | 2017-06-09 | Vertical heating module |
US29/609,570 USD831805S1 (en) | 2017-06-09 | 2017-06-30 | Vertical heating module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW106303141F TWD188699S (en) | 2017-06-09 | 2017-06-09 | Vertical heating module |
Publications (1)
Publication Number | Publication Date |
---|---|
TWD188699S true TWD188699S (en) | 2018-02-21 |
Family
ID=63832896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106303141F TWD188699S (en) | 2017-06-09 | 2017-06-09 | Vertical heating module |
Country Status (2)
Country | Link |
---|---|
US (1) | USD831805S1 (en) |
TW (1) | TWD188699S (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD916257S1 (en) * | 2019-08-22 | 2021-04-13 | Noritz Corporation | Heat exchanger for water heater |
USD904588S1 (en) * | 2019-08-22 | 2020-12-08 | Noritz Corporation | Heat exchanger for water heater |
USD904587S1 (en) * | 2019-08-22 | 2020-12-08 | Noritz Corporation | Heat exchanger for water heater |
USD904589S1 (en) * | 2019-08-22 | 2020-12-08 | Noritz Corporation | Heat exchanger for water heater |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3907050A (en) * | 1974-02-19 | 1975-09-23 | Gen Electric | Heat exchanger housing |
USD348727S (en) * | 1992-01-03 | 1994-07-12 | Consolidated Technology Corporation | Heat pump |
USD378402S (en) * | 1996-03-04 | 1997-03-11 | Solaronics, Inc. | Radiant space heater for residential use |
US6986708B2 (en) * | 2002-05-17 | 2006-01-17 | Airfixture L.L.C. | Method and apparatus for delivering conditioned air using dual plenums |
KR100483428B1 (en) * | 2003-01-24 | 2005-04-14 | 삼성전자주식회사 | Apparatus for processing a substrate |
USD566256S1 (en) * | 2005-05-11 | 2008-04-08 | Nonox Ltd. | Filtering device |
USD560276S1 (en) * | 2005-09-13 | 2008-01-22 | Catacel Corp. | Heat exchanger |
US7542287B2 (en) * | 2005-09-19 | 2009-06-02 | Chatsworth Products, Inc. | Air diverter for directing air upwardly in an equipment enclosure |
US8107238B2 (en) * | 2005-09-19 | 2012-01-31 | Chatsworth Products, Inc. | Ducted exhaust equipment enclosure |
US7804685B2 (en) * | 2005-09-19 | 2010-09-28 | Chatsworth Products, Inc. | Ducted exhaust equipment enclosure |
JP4606355B2 (en) * | 2006-03-14 | 2011-01-05 | 東京エレクトロン株式会社 | Heat treatment apparatus, heat treatment method and storage medium |
USD579101S1 (en) * | 2007-05-30 | 2008-10-21 | Catacel Corp. | Heat exchanger |
US8973951B2 (en) * | 2009-07-02 | 2015-03-10 | Panduit Corp. | Adjustable vertical exhaust duct |
US20150079719A1 (en) * | 2013-09-16 | 2015-03-19 | JiFu Machinery & Equipment Inc. | Systems and methods for flipping semiconductor bodies during a manufacturing process |
US9349620B2 (en) * | 2014-07-09 | 2016-05-24 | Asm Ip Holdings B.V. | Apparatus and method for pre-baking substrate upstream of process chamber |
CA2960633A1 (en) * | 2016-07-08 | 2018-01-08 | Cci Thermal Technologies Inc. | Electrically isolating block and flange for rail-heating duct |
-
2017
- 2017-06-09 TW TW106303141F patent/TWD188699S/en unknown
- 2017-06-30 US US29/609,570 patent/USD831805S1/en active Active
Also Published As
Publication number | Publication date |
---|---|
USD831805S1 (en) | 2018-10-23 |
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