TWD188699S - Vertical heating module - Google Patents

Vertical heating module

Info

Publication number
TWD188699S
TWD188699S TW106303141F TW106303141F TWD188699S TW D188699 S TWD188699 S TW D188699S TW 106303141 F TW106303141 F TW 106303141F TW 106303141 F TW106303141 F TW 106303141F TW D188699 S TWD188699 S TW D188699S
Authority
TW
Taiwan
Prior art keywords
heating module
vertical heating
equipment front
end module
module
Prior art date
Application number
TW106303141F
Other languages
Chinese (zh)
Inventor
江岳霖
白欣然
李英峰
黃鈴喬
Original Assignee
香岳實業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 香岳實業股份有限公司 filed Critical 香岳實業股份有限公司
Priority to TW106303141F priority Critical patent/TWD188699S/en
Priority to US29/609,570 priority patent/USD831805S1/en
Publication of TWD188699S publication Critical patent/TWD188699S/en

Links

Abstract

【物品用途】;本設計之物品為用於設備前端模組(EFEM，equipment front-end module)的垂直式加熱模組，其用以加熱待輸入至該設備前端模組內之氣流。[Purpose of the item]; The item of this design is a vertical heating module for the equipment front-end module (EFEM, equipment front-end module), which is used to heat the airflow to be input into the equipment front-end module.

Description

垂直式加熱模組Vertical heating module

本設計之物品為用於設備前端模組(EFEM，equipment front-end module)的垂直式加熱模組，其用以加熱待輸入至該設備前端模組內之氣流。The article of the design is a vertical heating module for an EFEM (equipment front-end module) for heating the airflow to be input into the front end module of the device.

TW106303141F 2017-06-09 2017-06-09 Vertical heating module TWD188699S (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW106303141F TWD188699S (en) 2017-06-09 2017-06-09 Vertical heating module
US29/609,570 USD831805S1 (en) 2017-06-09 2017-06-30 Vertical heating module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW106303141F TWD188699S (en) 2017-06-09 2017-06-09 Vertical heating module

Publications (1)

Publication Number Publication Date
TWD188699S true TWD188699S (en) 2018-02-21

Family

ID=63832896

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106303141F TWD188699S (en) 2017-06-09 2017-06-09 Vertical heating module

Country Status (2)

Country Link
US (1) USD831805S1 (en)
TW (1) TWD188699S (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD904589S1 (en) * 2019-08-22 2020-12-08 Noritz Corporation Heat exchanger for water heater
USD904587S1 (en) * 2019-08-22 2020-12-08 Noritz Corporation Heat exchanger for water heater
USD904588S1 (en) * 2019-08-22 2020-12-08 Noritz Corporation Heat exchanger for water heater
USD916257S1 (en) * 2019-08-22 2021-04-13 Noritz Corporation Heat exchanger for water heater

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3907050A (en) * 1974-02-19 1975-09-23 Gen Electric Heat exchanger housing
USD348727S (en) * 1992-01-03 1994-07-12 Consolidated Technology Corporation Heat pump
USD378402S (en) * 1996-03-04 1997-03-11 Solaronics, Inc. Radiant space heater for residential use
US6986708B2 (en) * 2002-05-17 2006-01-17 Airfixture L.L.C. Method and apparatus for delivering conditioned air using dual plenums
KR100483428B1 (en) * 2003-01-24 2005-04-14 삼성전자주식회사 Apparatus for processing a substrate
USD566256S1 (en) * 2005-05-11 2008-04-08 Nonox Ltd. Filtering device
USD560276S1 (en) * 2005-09-13 2008-01-22 Catacel Corp. Heat exchanger
US7542287B2 (en) * 2005-09-19 2009-06-02 Chatsworth Products, Inc. Air diverter for directing air upwardly in an equipment enclosure
US7804685B2 (en) * 2005-09-19 2010-09-28 Chatsworth Products, Inc. Ducted exhaust equipment enclosure
US8107238B2 (en) * 2005-09-19 2012-01-31 Chatsworth Products, Inc. Ducted exhaust equipment enclosure
JP4606355B2 (en) * 2006-03-14 2011-01-05 東京エレクトロン株式会社 Heat treatment apparatus, heat treatment method and storage medium
USD579101S1 (en) * 2007-05-30 2008-10-21 Catacel Corp. Heat exchanger
US8973951B2 (en) * 2009-07-02 2015-03-10 Panduit Corp. Adjustable vertical exhaust duct
US20150079719A1 (en) * 2013-09-16 2015-03-19 JiFu Machinery & Equipment Inc. Systems and methods for flipping semiconductor bodies during a manufacturing process
US9349620B2 (en) * 2014-07-09 2016-05-24 Asm Ip Holdings B.V. Apparatus and method for pre-baking substrate upstream of process chamber
CA2960633A1 (en) * 2016-07-08 2018-01-08 Cci Thermal Technologies Inc. Electrically isolating block and flange for rail-heating duct

Also Published As

Publication number Publication date
USD831805S1 (en) 2018-10-23

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