TWD167549S - 氣體擴散器組件之部分 - Google Patents

氣體擴散器組件之部分

Info

Publication number
TWD167549S
TWD167549S TW102306034F TW102306034F TWD167549S TW D167549 S TWD167549 S TW D167549S TW 102306034 F TW102306034 F TW 102306034F TW 102306034 F TW102306034 F TW 102306034F TW D167549 S TWD167549 S TW D167549S
Authority
TW
Taiwan
Prior art keywords
view
gas diffuser
gas
diffuser assembly
plate body
Prior art date
Application number
TW102306034F
Other languages
English (en)
Inventor
Dongsuh Lee
Beom Soo Park
Yi Cui
William N Sterling
Original Assignee
應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 應用材料股份有限公司 filed Critical 應用材料股份有限公司
Publication of TWD167549S publication Critical patent/TWD167549S/zh

Links

Abstract

【物品用途】;本設計物品係一種氣體擴散器組件，用以於半導體製程中引導氣體之流動與擴散。;【設計說明】;本設計之氣體擴散器組件，板體上表面具有氣體入口，板體下表面設置有多個氣流引導元件，以輻射狀的排列方式從內向外延伸。;圖式所揭露的虛線部分為本案不主張設計的部分。;1.右側視圖與左側視圖相同，故省略右側視圖。;2.後視圖與前視圖相同，故省略後視圖。
TW102306034F 2013-07-23 2013-09-06 氣體擴散器組件之部分 TWD167549S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/461,403 USD756502S1 (en) 2013-07-23 2013-07-23 Gas diffuser assembly

Publications (1)

Publication Number Publication Date
TWD167549S true TWD167549S (zh) 2015-05-01

Family

ID=55920616

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102306034F TWD167549S (zh) 2013-07-23 2013-09-06 氣體擴散器組件之部分

Country Status (2)

Country Link
US (1) USD756502S1 (zh)
TW (1) TWD167549S (zh)

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Also Published As

Publication number Publication date
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