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Application filed by 安川電機股份有限公司, Yaskawa Electric CorpfiledCritical安川電機股份有限公司
Publication of TWD165424SpublicationCriticalpatent/TWD165424S/en
239000004973liquid crystal related substanceSubstances0.000abstract1
239000004065semiconductorSubstances0.000abstract1
235000012431wafersNutrition0.000abstract1
Abstract
【物品用途】;本設計的物品是，為一種藉由並設複數根本物品(叉桿)，構成用來載置基板(液晶面板之類的玻璃基板和半導體晶圓等)的機器手。;【設計說明】;如使用狀態參考圖所示，機器手是經由手連結部而安裝在基板運送用的機器人的手臂部的前端，藉由使機器手作動，就能在預定的位置彼此間進行運送基板。[Use of article]; The article of this design is a robot arm for placing substrates (glass substrates such as liquid crystal panels and semiconductor wafers, etc.) by juxtaposing a plurality of basic articles (forks). ;[Design Description];As shown in the reference diagram of the use state, the robot arm is installed at the front end of the arm part of the substrate transport robot via the hand connection part. By operating the robot arm, the robot arm can move between each other at a predetermined position. Carry out transportation of substrates.