589751 五、發明說明（1) 發明所屬之技術領域 本發明係關於一種有機發光二極體（〇rganic Ught Emitting Diode, 〇LED)面板的製作方法，尤指一種有機 發光二極體面板製程中的蔭罩清洗步驟，可以改善習知 方法所產生之微顆粒吸附問題，以及避免面板的重複性 缺陷，提高0LED產品的良率。 先前技術 自從研究發現施加電壓在共軛性高分子（c〇n jugated Pdymer)可使高分子材料發光以來，有機發光二極體的 顯示技術發展非常快速。對於有機發光二極體而言，在 =f元件的製作上，乃是利用所謂的蔭罩（shad〇w mask) 的步進式（side by side)位移分別在基板上蒸鍍上紅、 藍二綠三原色，來形成全彩的元件。圖一及圖二分別顯 不習知主動面板及被動面板以蔭罩進行紅、藍、綠三原 色畫素蒸鍍之剖面示意圖，其中圖一並顯示蔭罩以&進 行紅、藍、綠三原色蒸鍍在主動面板表面。如圖 及圖二所示，藉由熱蒸鍍，有機電發光材料經由蔭罩 的開孔1 〇 1鑛於基板1 〇的透明電極（一般為IΜ電極）1 2 1 科丄一般而S ，蔭罩上的開孔1 0 1尺寸約為1 0 0至2 0 0 m。蔭罩通常ΐ t行數批產品之蒸鍍後始抽出換 斤或者離線進行濕式清洗，十分不便（此舉亦降低產589751 V. Description of the invention (1) The technical field to which the invention belongs The present invention relates to a method for manufacturing an organic light emitting diode (〇rganic Ught Emitting Diode, 〇LED) panel, especially an organic light emitting diode panel manufacturing process. The cleaning step of the shadow mask can improve the problem of adsorption of micro particles caused by the conventional method, avoid repetitive defects of the panel, and improve the yield of the 0LED product. Previous technology Since research has found that applying a voltage to a conjugated polymer (conon jugated Pdymer) can cause polymer materials to emit light, the display technology of organic light emitting diodes has developed very rapidly. For organic light-emitting diodes, red and blue are vapor-deposited on the substrate by using side-by-side displacement of the so-called shadow mask, respectively, in the fabrication of the f element. Two green and three primary colors to form a full-color element. Figures 1 and 2 show the cross-sectional schematic diagrams of pixel evaporation of the red, blue, and green primary colors of the active panel and the passive panel with shadow masks, respectively. The figure also shows the red, blue, and green primary colors of the shadow mask with & Evaporated on the surface of the active panel. As shown in FIG. 2, the transparent electrode (generally an IM electrode) of the organic electroluminescent material is deposited on the substrate 10 through the openings 10 of the shadow mask by thermal evaporation. The openings 101 in the shadow mask are approximately 100 to 2000 m in size. The shadow mask is usually not pumped out after changing a few batches of product or wet cleaning off-line, which is very inconvenient (this also reduces production
第5頁 ΙΜ 589751 五、發明說明（2) 能）。 此外，如圖三所示，習知OLED面板的製造流程會產 生微顆粒吸附在蔭罩上，微顆粒並可能造成蔭罩的阻 塞。若是微顆粒沾附在蔭罩上，在位移時即會產生重複 性缺陷（如圓圈處所示）。如圖四所示，此重複性缺陷在 OLED兩電極之間變成一導通路徑，造成電性短路現象， 進而造成元件壞死或是不亮。若蔭罩阻塞，則會產生有 機膜蒸鍍不均的情況。 由上可知，習知OLED面板製作技術顯然仍有實際實 施上的缺失，而猶待進一步的改善。鑑於此，申請人乃 根據此等缺點及依據多年從事製造該類產品之相關經 驗，悉心觀察且研究之，而提出改良之本發明，可降低 生產成本，增加產能以及良率。 發明内容 種有機發光二極體面 w來之微顆粒吸附及 本發明的主要目的在於提供_ 板的製作流程，可避免習知製程所 重複性缺陷等缺點。Page 5 IM 589751 V. Description of the invention (2) Yes). In addition, as shown in Fig. 3, it is known that the manufacturing process of the conventional OLED panel may cause micro particles to be adsorbed on the shadow mask, and the micro particles may cause blocking of the shadow mask. If micro-particles adhere to the shadow mask, repetitive defects will occur during displacement (as shown by the circles). As shown in Figure 4, this repetitive defect becomes a conducting path between the two electrodes of the OLED, causing an electrical short circuit phenomenon, which in turn causes the component to die or not to light up. If the shadow mask is blocked, the organic film may be unevenly vaporized. From the above, it is clear that the conventional OLED panel manufacturing technology still lacks practical implementation, and further improvements are still needed. In view of this, the applicant based on these shortcomings and based on years of relevant experience in manufacturing such products, carefully observed and researched, and proposed an improved invention that can reduce production costs, increase production capacity and yield. SUMMARY OF THE INVENTION The adsorption of micro-particles from an organic light-emitting diode and the main purpose of the present invention is to provide a manufacturing process of a plate, which can avoid the disadvantages of repetitive defects such as the conventional manufacturing process.
為達上述目的’本發明乃針對 的製作流程中的蔭罩的清潔來著手 有機發光二極體面板 ’在製程中插入電漿In order to achieve the above-mentioned purpose, the present invention is directed to the cleaning of the shadow mask in the manufacturing process, and the organic light-emitting diode panel is started. The plasma is inserted in the manufacturing process.
$ 6頁 589751$ 6 pages 589751
乾式清潔步驟，此乃由於電 所以提出分別於蒸鍍前和個 用電漿對蔭罩進行電漿清潔 成陰罩的清洗’確保製程可 場清洗蔭罩不但可以大幅降 其所造成之重複缺陷，並可 時也可以降低蔭罩的孔洞被 為了使 貴審查委員能 及技術内容，請參閱以下有 圖。然而所附圖式僅供參考 明加以限制者。 t本身就具有清潔的功能， 別顏色的有機膜蒸鍵後，利 。其優點是可在短時間内完 罪度及產品良率。以電聚現 低微顆粒的吸附現象，以及 以降低暗點發生之機率，同 阻塞之現象。 更近一步了解本發明之特徵 關本發明之詳細說明與附 與說明用，並非用來對本發 實施方式 如前所述，習知OLED面板的製造流程會產生微 吸附在蔭罩上，微顆粒並可能造成蔭罩的阻塞。 料 顆粒沾附在蔭罩上，在位移時即會產生重複性缺陷， 重複性缺陷在OLED兩電極之間變成一導通路徑，i 性短路現象，進而造成元件壞死或是不亮。^乃^ 常為進行數批產品之蒸鍍後始抽出換新，或 ^ = 行濕式清洗，此舉十分不便，亦降低產能。 而 ν 、Dry cleaning step. This is due to electricity. It is proposed to clean the shadow mask with a plasma before the vapor deposition and clean the shadow mask. 'Ensure that the shadow mask can be cleaned in the process, which can greatly reduce the repeated defects caused by it. The holes of the shadow mask can also be lowered. It is designed to enable your review committee and technical content. Please refer to the figure below. However, the drawings are for reference only. t itself has a cleaning function, after the organic film of different colors is steamed, it is beneficial. The advantage is that the crime rate and product yield can be completed in a short time. The phenomenon of low-particle adsorption by electro-aggregation and the reduction of the probability of occurrence of dark spots are the same as the phenomenon of blocking. A closer understanding of the characteristics of the present invention is related to the detailed description of the present invention and for the purpose of explanation. It is not intended to describe the embodiment of the present invention as described above. It is known that the manufacturing process of the OLED panel will micro-adsorb on the shadow mask and micro-particles And may cause blockage of the shadow mask. Material particles adhere to the shadow mask, and repetitive defects will occur during displacement. The repetitive defects become a conduction path between the two electrodes of the OLED, i-type short circuit phenomenon, and then cause the component to die or not to light. ^ Nay ^ It is often used for extraction and replacement after several batches of product evaporation, or ^ = wet cleaning, which is very inconvenient and reduces production capacity. And ν,
第7頁 589751 、發明說明（4) 微 本 示 漿 為解決習知問題，本發明提供一 極體面&的製作流冑，可冑免上述if=之有機發光 =粒吸附及重複性缺陷等缺點。請參J =所帶來之 發明有機發光二極體面板的製作流程〔同圖五為 發明-開始進行有機膜蒸鍍 ：·五所 洗可以現場或離線方式進行'構為成求清 功率以及電襞溫度可以調整至相 2異巧之 ⑹膜的蒸鍵，僅為例干吓本认實知例中先進行紅色 線方式進行，為长唯捭二姦此 漿清洗可以現場或離 度可以調整至昇功率以及電浆溫 有機膜r的蒸鍍，並接 先效率。隨後，進行 膜Β的&鍍，ίηίί以電毁重複清洗。最後’進行有機 朕的”、、蛵並冋樣接以電漿重複清洗。 極體：5 t技藝，本發明藉由電漿清洗有機發光二 = ; = Ϊ流程中的陰罩，達到提昇產能與良率之 性缺陷以及電性短之微顆粒吸附、重複 種種優點均顯示：ϊ以;顯然之進步。以上 +丨^ μ、#』^發明已完全符合專利法所規定之產業 申4 f ，及進步性等法定要件，爰依專利法提出 申吻，敬响砰查並賜准本案專利。Page 7 589751, description of the invention (4) In order to solve the conventional problems, the micro-display slurry provides a decent & elegant production process, which can avoid the organic luminescence of if == particle adsorption and repetitive defects. Disadvantages. Please refer to J = the production process of the organic light-emitting diode panel brought by the invention [the same as the figure 5 is the invention-start of organic film evaporation: · Wushao washing can be performed on-site or offline mode ' The temperature can be adjusted to the steaming key of the phase 2 film. It is just an example. In the actual example, the red line method is performed first. The cleaning can be adjusted on-site or the degree of separation. The evaporation to the power and the plasma temperature of the organic film r, and the efficiency is first. Subsequently, & plating of the film B was performed, and the cleaning was repeated with electric destruction. Finally, the organic electroluminescence is carried out, and the electromagnetism is repeatedly cleaned with a plasma. Polar body: 5 t technology, the present invention cleans the organic light-emitting diode by electroplasma =; The sexual defects with yield, the adsorption of microparticles with short electrical properties, and the advantages of repeating all show: ϊ ;; obvious progress. The above + 丨 ^ μ, # 』^ invention has fully complied with the industrial application stipulated by the Patent Law 4 f , And statutory requirements such as progress, apply for a kiss in accordance with the Patent Law, respectfully investigate and grant the patent in this case.
589751 五、發明說明（5) 以上所述僅為本發明之較佳實施例，凡依本發明申 請專利範圍所做之均等變化與修飾，皆應屬本發明專利 之涵蓋範圍。589751 V. Description of the invention (5) The above description is only a preferred embodiment of the present invention. Any equal changes and modifications made in accordance with the scope of the patent application of the present invention shall fall within the scope of the invention patent.
589751 圖式簡單說明 圖式之簡單說明 圖一為習知方法蔭罩以步進方式進行紅、藍、綠三 原色蒸鍍之示意圖。 圖二顯示習知被動面板以蔭罩進行紅、藍、綠三原 色畫素蒸鍍之剖面示意圖。 圖三為習知OLED面板的製造流程產生微顆粒吸附在 蔭罩上之示意圖。 圖四為習知重複性缺陷在OLED兩電極之間變成一導 通路徑之示意圖。 圖五為本發明有機發光二極體面板的製作流程圖。 圖式之符號說明 12 基板 121 透明電極 10 蔭罩 101 開孔589751 Brief description of the diagram Brief description of the diagram Figure 1 is a schematic diagram of the conventional method of performing shadow evaporation of three primary colors of red, blue and green in a stepwise manner. Figure 2 shows a schematic cross-sectional view of a conventional passive panel using a shadow mask to perform pixel evaporation of three primary colors: red, blue, and green. FIG. 3 is a schematic diagram of micro-particles adsorbed on a shadow mask during the manufacturing process of a conventional OLED panel. Figure 4 is a schematic diagram of a conventional repetitive defect becoming a conduction path between two electrodes of an OLED. FIG. 5 is a manufacturing flowchart of the organic light emitting diode panel of the present invention. Explanation of Symbols for Drawings 12 Substrate 121 Transparent electrode 10 Mask 101 Opening
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