TW588186B - Method and structure of low reflection liquid crystal display unit - Google Patents
Method and structure of low reflection liquid crystal display unit Download PDFInfo
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- TW588186B TW588186B TW91134281A TW91134281A TW588186B TW 588186 B TW588186 B TW 588186B TW 91134281 A TW91134281 A TW 91134281A TW 91134281 A TW91134281 A TW 91134281A TW 588186 B TW588186 B TW 588186B
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588186 五、發明說明(1) 一、 【發明所屬之技術領域】 本發明係關於一種液晶顯示(liquid crystal display )單元構造及其形成方法。 二、 【先前技術】 - 圖1為習知技術液晶顯示單元俯視圖。其中包含有多 晶矽(poly-si 1 icon )層104、第一金屬層108以及第二金 屬層112。可以看到為了增加開口率(aperture ratio ) 而裸露部份多晶石夕層1 〇 4。然而多晶石夕1 〇 4的反射率很高, 導致顯示器效能降低,例如對比(contrast )下降。另外 多晶矽層1 0 4露出面積大小不同,或結晶製程造成多晶矽 層1 0 4反射率不一致則會使顯示器關機時有顏色不均 (mura )的現象。 一般解決多晶矽層反射 (black m a t r i X )將多晶石夕 色渡光片(color filter) transistor )側。若做在彩 遮罩失準(misalignment) 在薄膜電晶體側,則須多一 率的作法為利用黑色矩陣 層遮住。此黑色矩陣可做在彩 側或薄膜電晶體(thin nim 色濾光片側,黑色矩陣須預留 的各忍面積而面積較大。若做 道製作黑色矩陣的製程。 方法,能解 色矩陣,製 因此需要一種液晶顯示單元構造及其形成 決多晶矽層反射率問題,且毋須較大面積的黑 程亦較簡便。 、…588186 V. Description of the invention (1) 1. [Technical field to which the invention belongs] The present invention relates to a liquid crystal display unit structure and a method for forming the same. 2. [Prior art]-Fig. 1 is a top view of a conventional liquid crystal display unit. It includes a poly-Si 1 icon layer 104, a first metal layer 108, and a second metal layer 112. It can be seen that in order to increase the aperture ratio, a part of the polycrystalline stone layer 104 is exposed. However, the reflectivity of polycrystalline stone 104 is very high, which leads to a decrease in display performance, such as a decrease in contrast. In addition, the exposed area of the polycrystalline silicon layer 104 is different, or the reflectivity of the polycrystalline silicon layer 104 is inconsistent due to the crystallization process, which causes the display to have a color unevenness (mura). Generally, the polycrystalline silicon layer reflection (black ma t r i X) is set to the side of the polycrystalline silicon color filter transistor. If the misalignment of the color mask is on the side of the thin-film transistor, a more probable method is to use a black matrix layer for masking. This black matrix can be used on the color side or thin-film transistor (thin nim color filter side). The black matrix must have a large area for each tolerance. If it is a process for making a black matrix, the method can solve the color matrix. Therefore, the system needs a liquid crystal display unit structure and the formation of polycrystalline silicon layer reflectivity, and the black path without a large area is also simple....
^ΟΟΙδΟ 五、發明說明(2) 二、【發明内容】 法。ί 1: t提,一種液晶顯示單元構造及其形成方r、 大面浐$:拓鱼法能解決多晶矽層反射率問題,且番須乂 大面積黑色矩陣,製程亦較簡便。 c之主要方面在提供—種液晶顯示單元構造及其 $成方法,可解決多晶石夕層反射率問題。 pi % ί發明之另一方面在提供一種可解決多晶矽層反射率 :45陆液晶顯示單元構造及其形成方法,毋須較大面積黑 色矩陣,製程亦較簡便。 ,發明提供一種液晶顯示單元構造的形成方法。主要 ^中在利用金屬|延伸而遮住原裸冑的多晶石夕|。此 、形成方法包含形成一半導體層、形成一絕緣層 ^nSulator)於半導體層上、形成一第一金屬層於絕緣 田上、、形成一介電層(dielectric )於第一金屬層上,以 及形成一第二金屬層於介電層上。其中第一金屬層盥 $屬層皆位於半導體層上方。且第一及/或第二金屬層延一 而遮住半導體層之一部份或全部。此處所述半導體層之 2分係指半導體層面積的百分之:七十以上。第一金屬層 包含一共同線(common 1 ine )或一閘極線(gate 9 hne ),而第二金屬層包含一資料線(data Une )。^ ΟΟΙδΟ 5. Description of the invention (2) 2. [Summary of the invention] method. ί 1: To mention, a kind of liquid crystal display unit structure and its formation method, large surface 浐 $: extension fish method can solve the problem of reflectivity of polycrystalline silicon layer, and a large area black matrix of Panyu, the process is relatively simple. The main aspect of c is to provide a liquid crystal display unit structure and a method for forming the liquid crystal display unit, which can solve the problem of the reflectivity of the polycrystalline silicon layer. pi% ί Another aspect of the invention is to provide a structure capable of solving the polycrystalline silicon layer reflectance: 45 terrestrial liquid crystal display units and a method for forming the same, without the need for a large-area black matrix, and the manufacturing process is relatively simple. The invention provides a method for forming a liquid crystal display unit structure. Mainly in the use of metal | extended to cover the original naked polycrystalline stone |. The forming method includes forming a semiconductor layer, forming an insulating layer (nSulator) on the semiconductor layer, forming a first metal layer on the insulating field, forming a dielectric layer (dielectric) on the first metal layer, and forming A second metal layer is on the dielectric layer. The first metal layer and the metal layer are all located above the semiconductor layer. And the first and / or the second metal layer is extended to cover part or all of the semiconductor layer. The 2 points of the semiconductor layer mentioned here refers to the percentage of the area of the semiconductor layer: more than 70%. The first metal layer includes a common line (common line) or a gate line (gate 9 hne), and the second metal layer includes a data line (data Une).
第6頁 588186Page 6 588186
此-ί t :亦提供如上方法所形成的液晶顯示單元構造。 Π”一半導體層、一第一金屬層,及一第二金屬 層。其中弟一金屬層與.第二金屬層皆位於半導體層上方。 ^第一及/或第三金屬I延伸而遮住半導體層之一部份或 =部。此處所述半導體層之-部分係指半導體層面積的百 二^七十以上。第一金屬層包含一共同線或一閘極線,而 第二金屬層包含一資料線。 四、【實施方式】 本發明提供一種液晶顯示單元構造及其形成方法。主 要精神在利用金屬層延伸而遮住原裸露的多晶矽層。本發 明之較佳實施例之形成方法剖面示意圖如圖2。首先形成 一多晶石夕層104於基板102上(步驟20)。再形成一絕緣層 106於多晶矽層1〇4上(步驟22)。再形成一第一金屬層 2〇8於絕緣層1〇6上(步驟24)。接著形成一介電層no於 第一金屬層208上(步驟26)。最後形成一第二金屬層212 於介電層110上(步驟28)。其中第一金屬層208與第二金 屬層2 1 2皆位於多晶矽層1 〇 4上方。此較佳實施例中第一金 屬層208與第二金屬層212皆延伸而遮住多晶石夕層1〇4之全 部。第一金屬層2 0 8可包含一共同線21 4或一閘極線(圖2 中未示),此實施例為一共同線2 1 4。而第二金屬層2 1 2包 含一資料線218。This -t: also provides a liquid crystal display cell structure formed by the above method. Π "a semiconductor layer, a first metal layer, and a second metal layer. Among them, the first metal layer and the second metal layer are located above the semiconductor layer. ^ The first and / or third metal I extends to cover A part or part of a semiconductor layer. The-part of a semiconductor layer herein refers to more than one hundred twenty seventy of the area of the semiconductor layer. The first metal layer includes a common line or a gate line, and the second metal The layer includes a data line. [Embodiment] The present invention provides a structure of a liquid crystal display unit and a method for forming the same. The main spirit is to use a metal layer to extend and cover the original bare polycrystalline silicon layer. The formation of a preferred embodiment of the present invention The schematic diagram of the method is shown in Fig. 2. First, a polycrystalline stone layer 104 is formed on the substrate 102 (step 20). An insulating layer 106 is formed on the polycrystalline silicon layer 104 (step 22). A first metal layer is formed. 208 on the insulating layer 106 (step 24). Next, a dielectric layer is formed on the first metal layer 208 (step 26). Finally, a second metal layer 212 is formed on the dielectric layer 110 (step 28). The first metal layer 208 and the second metal layer 2 1 2 are located above the polycrystalline silicon layer 104. In this preferred embodiment, the first metal layer 208 and the second metal layer 212 both extend to cover the entire polycrystalline silicon layer 104. The first metal layer 208 It may include a common line 21 4 or a gate line (not shown in FIG. 2), and this embodiment is a common line 2 1 4. The second metal layer 2 1 2 includes a data line 218.
第7頁 、發明說明(4) 圖3為本發明第一實施例剖面示意圖。其中第一金屬 層2 0 8包含一共同線21 4,且延伸而遮住多晶矽層丨〇 4之全 部。第二金屬層3 1 2包含一身料線3 1 8,則只遮住多晶矽層 ! 〇4的一部份。此處所述多晶矽層1 0 4的一部分係指多晶石^ 層1〇4面積的百分之七十以上。 圖4為本發明第二貫施例剖面示意圖。其中第一金屬 層408包含一閘極線416,且延伸而遮住多晶矽層1〇4之全 部。第二金屬層3 1 2則只遮住多晶矽層丨〇4的一部份。此處 所述多晶矽層104的一部分係指多晶矽層1〇4面積的百: 七十以上。 圖5為本發明第三實施例剖面示意圖。其中第一金 層508包含一共同線514,而只遮住多晶矽層1〇4的一 份。第二金屬層212包含一資料線218,則延伸而遮住 部。此處所述多曰曰“夕層104的-部分係指多:日: 石夕層104面積的百分之七十以上。 圖6為本發明第四實施例剖面示意圖。其中第一 :6。08包含一開極線616 ’ @只遮住多晶石夕層1〇4的一部屬 ^苐一金屬層212則延伸而遮住多晶矽層1〇4之全部。 之七ί二:矽層1 〇 4的一部分係指多晶矽層1 〇4面積的百分Page 7 Description of the Invention (4) FIG. 3 is a schematic sectional view of the first embodiment of the present invention. The first metal layer 208 includes a common line 21 4 and extends to cover all of the polycrystalline silicon layer 04. The second metal layer 3 1 2 includes a body line 3 1 8 and only covers a part of the polycrystalline silicon layer! A part of the polycrystalline silicon layer 104 here refers to more than 70% of the area of the polycrystalline silicon layer 104. FIG. 4 is a schematic sectional view of a second embodiment of the present invention. The first metal layer 408 includes a gate line 416 and extends to cover all of the polycrystalline silicon layer 104. The second metal layer 3 1 2 only covers a part of the polycrystalline silicon layer 104. Here, a part of the polycrystalline silicon layer 104 refers to a percentage of the area of the polycrystalline silicon layer 104: more than seventy. FIG. 5 is a schematic sectional view of a third embodiment of the present invention. The first gold layer 508 includes a common line 514, and only covers one part of the polycrystalline silicon layer 104. The second metal layer 212 includes a data line 218, which extends to cover the portion. The term "part of the evening layer 104" refers to more than 70% of the area of the evening layer 104. Fig. 6 is a schematic cross-sectional view of a fourth embodiment of the present invention. The first one is 6 .08 contains an open electrode line 616 '@ only covers a part of the polycrystalline stone layer 104, a metal layer 212 is extended to cover all of the polycrystalline silicon layer 104. The seventh: the silicon layer A part of 104 is the percentage of the area of polycrystalline silicon layer 104.
第8頁 588186 五、發明說明(5) 圖7為本發明第五實施例剖面示意圖。此第五實施例 ^較佳實施例之一。其中第一金屬層2〇8包含一共同線 ^,第二金屬層212則包含一資料線218。第一金屬声 人第二金屬層21 2皆延伸而遮住多晶矽層丨〇4之全部。 圖8為本發明第六實施例剖面示意圖。此第六實 1較佳實施例之一。其中第一金屬層8〇8包含一間極線 石…一金屬層8〇8與第二金屬層212皆延伸而遮住多晶 石夕層1 0 4之全部。 相較Κ ί ΐ發:ΐ:實施例俯視圖。以此實施例與圖1 而ί 層2 08、808與第二金屬層2丨2均延伸 本裸露的多晶石夕層104(圖9中未示)。如ϋ =加黑色矩陣面積或製程而解決…侧反 上述說明並非對本發明範疇的 各種改變與均等性的安排皆於本二以及 護的範疇内。 月申5月專利軏圍意欲保 第9頁 588186 圖式簡單說明 五、【圖式簡單說明】 為解釋本發明,附上圖式並做以下的敘述。其中類似 的編號表示類似的元件: 圖1為習知技術液晶顯示單元俯視圖; 圖2為本發明之較佳實施例形成方法剖面示意圖; 圖3為本發明第一實施例剖面示意圖; 圖4為本發明第二實施例剖面示意圖; 圖5為本發明第三實施例剖面示意圖; 圖6為本發明第四實施例剖面示意圖;Page 8 588186 V. Description of the invention (5) Fig. 7 is a schematic sectional view of a fifth embodiment of the present invention. This fifth embodiment is one of the preferred embodiments. The first metal layer 208 includes a common line ^, and the second metal layer 212 includes a data line 218. The first metal vocalist and the second metal layer 212 are all extended to cover the entire polycrystalline silicon layer. FIG. 8 is a schematic sectional view of a sixth embodiment of the present invention. This sixth embodiment is one of the preferred embodiments. The first metal layer 008 includes a polar wire ... a metal layer 808 and a second metal layer 212 both extend to cover the entire polycrystalline stone layer 104. Compared with Κ ΐ ΐ 发: ΐ: embodiment top view. In this embodiment and FIG. 1, the layers 2 08, 808 and the second metal layer 2 丨 2 all extend the exposed polycrystalline stone layer 104 (not shown in FIG. 9). For example, ϋ = add the black matrix area or process to solve ... Side effects The above description is not that the various changes and equality arrangements in the scope of the present invention are within the scope of the second and the protection. May application for patent protection in May. Page 9 588186 Brief description of the drawings 5. [Simplified description of the drawings] In order to explain the present invention, the drawings are attached and the following description is made. Similar numbers indicate similar components: Figure 1 is a top view of a conventional liquid crystal display unit; Figure 2 is a schematic sectional view of a preferred embodiment of the present invention; Figure 3 is a schematic sectional view of a first embodiment of the present invention; and Figure 4 is a Sectional schematic diagram of the second embodiment of the present invention; FIG. 5 is a schematic sectional diagram of the third embodiment of the present invention; FIG. 6 is a schematic sectional diagram of the fourth embodiment of the present invention;
圖7為本發明第五實施例剖面示意圖; 圖8為本發明第六實施例剖面示意圖;以及 圖9為本發明之較佳實施例俯視圖。 圖式元件符號說明 102基板 104多晶矽層 I 0 6絕緣層 108、208、408、508、608、808 第一金屬層 II 0介電層Fig. 7 is a schematic sectional view of a fifth embodiment of the present invention; Fig. 8 is a schematic sectional view of a sixth embodiment of the present invention; and Fig. 9 is a plan view of a preferred embodiment of the present invention. Symbol description of the graphic elements 102 substrate 104 polycrystalline silicon layer I 0 6 insulating layer 108, 208, 408, 508, 608, 808 first metal layer II 0 dielectric layer
112、212、312第二金屬層 1 1 4、2 1 4、5 1 4 共同線 I 1 6、4 1 6、6 1 6、8 1 6 閘極線 II 8、2 1 8、3 1 8 資料線112, 212, 312 Second metal layer 1 1 4, 2 1 4, 5 1 4 Common line I 1 6, 4 1 6, 6 1 6, 8 1 6 Gate line II 8, 2 1 8, 3 1 8 Data line
第10頁Page 10
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