587019 五、發明說明（1) 【發明所屬之技術領域】 本發明係為一種整合表面張 統，尤指-種利用微機電製裎製U閥之液珠嗔射控制系 成數位化的監控每一嘴嘴口對應之控制接點，而達 系統設計。 赁里、及其喷塗與否之喷嘴 【先前技術】 一般噴墨列印技術之主要運作 文逆作原理分為兩類：熱泡式 (Thermal bubble)及壓電式（Piez〇electric)。轨泡式乃 ·· 利用加熱器將墨水瞬間氣化’產生高壓氣泡推動墨水由喷 嘴射出；此型由於製造成本低，業己由Hp &CAN〇N成功的 商業化，產生世界上非常大的噴墨印表機市埸；但由於其 尚溫氣化之運作原理使得適用液體（主要是水）之選擇性低 ，因而應用之領域有限。587019 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention is an integrated surface tension system, in particular-a kind of liquid bead ejection control system that uses micro-electromechanical system to make U valve to digitally monitor each A mouthful of control contacts corresponding to the system design. Nozzle, and its nozzle for spraying or not [Prior technology] The main operation of general inkjet printing technology is divided into two types: thermal bubble and piezoelectric (piezoelectric). Rail-bubble type ... Uses a heater to instantaneously vaporize the ink to generate high-pressure air bubbles to push the ink out of the nozzle. This type has been successfully commercialized by Hp & CANON because of its low manufacturing cost, and it has produced a very large amount in the world. Of inkjet printers; however, due to its operating principle of warm gasification, the selectivity of applicable liquids (mainly water) is low, so the application fields are limited.
壓電式係利用壓電陶磁因施加電壓產生形變，擠壓液 體產生高壓而將液體喷出；根據不同壓電產生變形之機制 ，係細分多種類型，以最具代表性之壓電式喷墨頭（彎曲 型），係由一壓電陶磁片（piezoceramic)、振膜（diaphra gm)、壓力艙（pressure chamber)、入 口管道（inlet & ma n i f ο 1 d )及喷嘴（〇 r i f i c e )所組成。當壓電陶磁片承受控制 電路所施加的電壓，產生收縮變形，但受到振膜的牽制， 因而形成側向彎曲擠壓壓力艙之液體。在噴嘴處之液體因 承受内外壓力差而加速運動，形成速度漸增的突出液面。 其後雖然作用於壓電陶磁片之電壓於適當時間釋放，液體Piezoelectric system uses piezoelectric ceramic magnets to deform due to applied voltage, squeeze liquid to generate high pressure and eject liquid; according to the mechanism of different piezoelectric deformation, it is divided into many types, with the most representative piezoelectric inkjet The head (curved type) is made of a piezoelectric ceramic sheet (piezoceramic), a diaphragm (diaphra gm), a pressure chamber (inlet & ma nif ο 1 d) and a nozzle (〇rifice) composition. When the piezoelectric ceramic magnetic sheet receives the voltage applied by the control circuit, it shrinks and deforms, but is restrained by the diaphragm, thereby forming a liquid that presses the pressure chamber sideways. The liquid at the nozzle accelerates due to the pressure difference between inside and outside, forming a protruding liquid surface with increasing speed. Although the voltage applied to the piezoelectric ceramic disc is released at a proper time thereafter, the liquid
第5頁 广'發，明⑵ 〜降 脱離 :’嘴處液滴仍因慣性緣故，克服表面張力之牽 内容 發明 有趣於 3 2墨結構匕、:本發明人係針對傳統噴墨機制，提出 …傳統喷墨使用上會產生之諸=失進 振動 气，私i 〜叮⑽貝臺便用上會產生之語 —具數位作長時間之研發過程後係發展出太宏"大琨 及复认化之#營裝番 交了贫展出本案，期能提供 嘴、社‘塗與否Γ更進一牛便對應監控喷嘴口之嘴量、 “構合微機電製程之技術，以將f 態，而〜夂表面茫力料門松引杜 並利用微機電製程 合廣大·ίίσ業界中長期無法突破及未盡完美之處，以 '使用者實際之需要者。 、疋處以 未 ^ ，發明#、 叙，係可建^為一種整合表面張力微閥之液珠噴射控制么 動板〜適岑用在喷墨式列表機之相關應用’該列表=夕Γ、 D貪峰 k自處基Μ古一处冰 . 〗表機之振 Γ、^結構，认 有一缺槽’於該缺槽之上表面對庫嗖置 (ΛΖ )，列表機作動時，藉由振動板上下振動：幅产 s由柃此“墨水滴在表面張力閥門（噴嘴口）之表面“ 4水滴將：幅生的振動力小於墨水滴之表面張力， 4il ffl社人·、、、法喷出’而為使墨水滴由喷嘴噴出，本發明係 許1用整合表面張力微閥來降低墨水滴在噴嘴0 >主 ” <衣面張力 矣面張力微閥利用微機電製程在噴嘴口四周製作對應之 二：導線，利用對控制導線的通電與否來監控對應之：個Page 5 Guang'fa, Minghua ~ Drop off: 'The droplets at the mouth are still due to inertia and overcome the tension of the surface. The content is interesting in the 3.2 ink structure. The inventor aims at the traditional inkjet mechanism. It is proposed that the traditional inkjet uses = lost vibrating gas, private i ~ Dingdong Beitai will use the words that will be produced-after a long period of digital research and development process has been developed too macro " and re-recognition of the # camp installed fan cross depleted display case, of providing mouth, social 'coated or not Γ more into a cow will correspond to the amount of the nozzle to monitor the nozzle opening, the "configuration together MEMS process of technology, to f state, while the surface is full of force, and the use of micro-electro-mechanical manufacturing processes to meet the broad and medium-term long-term breakthroughs and imperfections in the industry, to the user's actual needs. # 、 Syria, can be built ^ is a kind of liquid droplet injection control module integrating surface tension micro valve ~ suitable application for inkjet type list machine 'The list = Xi Γ, D gree peak k self-base There is an ice in Μ ancient. 〖Structure of the table machine, Γ, ^ structure, it is recognized that there is a gap 'Yuqin The upper surface is facing the reservoir (ΛZ). When the list machine is operated, it vibrates up and down through the vibration plate: the output s is produced by the "ink drop on the surface of the surface tension valve (nozzle port)". The vibration force is smaller than the surface tension of the ink droplets. In order to eject the ink droplets from the nozzles, the present invention allows the use of an integrated surface tension microvalve to reduce the ink droplets at the nozzles 0 > "Master" < facial tension and surface tension micro-valve uses micro-electro-mechanical process to make the corresponding two around the nozzle mouth: the wire, and monitors the corresponding one by using the power to the control wire:
587019 I五、發明說明（3) I表面張力閥門的開關，並藉由各個表面張力閥門的開關來 !控制對應的噴嘴頭之噴量及喷塗與否等選擇，該表面張力 !微閥係設置於喷嘴頭喷嘴口周圍之控制導線，藉由電流導 i通喷嘴口周圍之導線後，所產生電毛細管現象（Electr〇ca i pillary)或熱毛細管現象（thermocapillary ) 方法來控 制墨水滴表面張力，同時由於操作時列表機噴印之振動板 丨上下振動幅度（ΔΖ)變小，進而達成低搖晃、低噪音之 訴求者。 爰是，本發明之主要目的係在於：提供一種整合表面 張力微閥之液珠噴射控制系統，其中：該噴嘴結構係可以 丨陣列（Array Syetem)的方式置設，利用微機電製程製作 丨對應之表面張力閥門控制接點，而達成數位化的監控各個 微喷嘴之喷量、及其喷塗與否，可達成良好的操控效果， 更能簡化系統的設計、及縮減系統的設置面積（空間）者。 I 本發明之另一目的係在於：提供一種整合表面張力微 !閥之液珠喷射控制系統，係可於表面張力閥門周緣增設控 制導線，藉由電流導通後所產生之熱度或電雙層，而確實 降低墨水滴在喷嘴口之表面張力，使墨水滴得以順利噴出 ，相對的，可有效降低振動板之振動幅度，進而減緩列表 機列印時所產生之搖晃及嗓音者。 【實施方式】 首先，請配合參閱第一、二圖所示，係為本發明整合 587019 五、發明說明（4) ;表面張力微閥之液珠噴射控制系統之示意圖、及嘴嘴結構 !之剖視放大圖’彳’丁、可運用在喷墨式列表機之應用。 I 該列表機1内部係設有一振動板2 ，該振動板2 一適 I當處著設有一缺槽2 1 ，該喷嘴結構3係對應設置於振動 丨板2上所設之缺槽2 1上面。 ! I 該喷嘴結構3可將不同口徑、形式之喷嘴頭3 1設叶 :成組，並可以陣列（Array Syetem)的方式置設（如第三圖 ;所示），該噴嘴結構3主要係利用微機電製程製作對應之 表面張力微閥控制接點，以對應監控各個噴嘴頭3丨之表 ;面張力微閥3 2之噴量、及其噴塗與否，而可達成良好的 !操控效果，更旎簡化系統的設計、及縮減系統的設置面積 (空間）。=第四圖所示，係本發明表面張力閥門設置控制 1導線之示思圖’於喷嘴頭3 1之表面張力閥門3 2周圍設 置一控制導線4。 丨 微機電乐統為一跨領域整合之技術，理論範圍跨足工 |程、科學、醫學等相關領域。在微小化的過程當中，特別 是在小於1公厘管徑的微管徑，液體表面張力的影響效應 遠大於重力的影響，因此利用表面張力本身的特性而不需 外加V動兀件來控制流體的機制在微流元件上廣泛的被運 用，本發明上述所提出之微型表面張力閥門3 2於微噴嘴 控制的應用’主要包括整合微型主動式表面張力閥門於微 喷嘴的設計丄其中：微型主動式表面張力閥門3 2主要係 運用電毛細管現象(上16(：1^(^8?丨1131^)、熱毛細管現象（ 587019 五、發明說明（5)587019 I. Description of the invention (3) I Surface tension valve switch, and by the selection of each surface tension valve! Control the corresponding nozzle head spray amount and spraying or not, the surface tension! Microvalve system The control wire provided around the nozzle mouth of the nozzle head is used to control the surface tension of the ink droplets by the electric capillary phenomenon (thermocapillary) or the electrocapillary phenomenon generated by conducting the electric current through the conductor around the nozzle mouth. At the same time, since the vibration plate sprayed by the list machine during operation is reduced, the amplitude of vertical vibration (ΔZ) becomes smaller, thereby achieving the requirements of low shaking and low noise.爰 Yes, the main purpose of the present invention is to provide a liquid bead spraying control system with integrated surface tension microvalve, in which the nozzle structure can be placed in an array (Array Syetem) manner, and produced by a micro-electro-mechanical process. The surface tension valve controls the contacts, and digitally monitors the spray volume of each micro-nozzle and whether it is sprayed or not. It can achieve a good control effect, simplify the system design, and reduce the system's installation area (space )By. I Another object of the present invention is to provide a liquid bead injection control system that integrates a surface tension micro! Valve, which can be provided with a control wire on the periphery of the surface tension valve, and the heat or electric double layer generated by the current conduction, And it does reduce the surface tension of the ink droplets at the nozzle opening, so that the ink droplets can be ejected smoothly. On the contrary, it can effectively reduce the vibration amplitude of the vibration plate, and then slow down the shaking and voice produced by the printing machine. [Embodiment] First, please refer to the first and second figures, which are the integration of the present invention 587019 5. Description of the invention (4); The schematic diagram of the liquid bead injection control system of the surface tension micro valve, and the mouth and mouth structure! The enlarged view of the cross section '彳' 丁 can be used in the application of inkjet type list machine. I The list machine 1 is provided with a vibrating plate 2 inside, and the vibrating plate 2 is provided with a notch 2 1 at an appropriate place. The nozzle structure 3 is correspondingly provided on the vibrating plate 2 provided with the notch 2 1 Above. ! I The nozzle structure 3 can be provided with nozzle heads 3 of different calibers and forms. 1 leaves: grouped, and can be installed in an array (Array Syetem) (as shown in the third figure;), the nozzle structure 3 is mainly Use micro-electro-mechanical process to make corresponding surface tension micro-valve control contacts to monitor the surface of each nozzle head 3 丨; the surface tension micro-valve 32's spray volume, and whether it is sprayed or not, can achieve a good! Control effect In addition, it simplifies the design of the system and reduces the installation area (space) of the system. = As shown in the fourth figure, it is a schematic diagram of the surface tension valve setting control 1 wire of the present invention 'A control wire 4 is provided around the surface tension valve 3 2 of the nozzle head 31.丨 Micro-Mechatronics is a cross-field integration technology, with theoretical scope spanning engineering, science, medicine and other related fields. In the process of miniaturization, especially for micro-tube diameters smaller than 1 mm, the effect of liquid surface tension is far greater than the effect of gravity. Therefore, the characteristics of surface tension itself are used without the need for additional V moving parts to control The fluid mechanism is widely used on microfluidic elements. The above-mentioned application of the micro-surface tension valve 32 in the present invention to the control of micro-nozzles' mainly includes the integration of micro-active surface tension valves in the design of micro-nozzles. Among them: micro Active surface tension valve 3 2 mainly uses the electric capillary phenomenon (above 16 (: 1 ^ (^ 8? 丨 1131 ^), thermal capillary phenomenon (587019, description of the invention (5)
Electrocapillary)方法來控制表面張 管現象疋液態金屬（一般為水銀）和電解 之間的界面稱之為電雙層（Electrical | ，當有電位差通過此界面時，界面上的 ;此現象稱之為電毛細管現象。而熱毛細 |於有溫度分佈微管道時，液滴通常朝熱 |是因為界面上的溫度梯度造成表面張力 流動’而使液滴移動的現象又稱之為熱 在本發明專利中’上述兩種機制皆 I嘴控制上’在應用實施例上係可以電阻 4 b利用在微機電技術製作，以對應設 表面張力微閥3 2周圍（如第五、六圖Electrocapillary) method to control the phenomenon of surface tensioning. The interface between liquid metal (generally mercury) and electrolysis is called electrical double layer (Electrical |), when a potential difference passes through this interface, the interface is called; this phenomenon is called The electrocapillary phenomenon. And the thermal capillary | when there is a temperature distribution in the micro-pipe, the droplets usually go to the heat | is because the temperature gradient on the interface caused the surface tension to flow 'and the phenomenon of moving the droplets is also called heat In the above two examples, the above two mechanisms are controlled by the mouth. In the application embodiment, the resistor 4 b can be used in micro-electro-mechanical technology to correspond to the surface tension micro-valve 3 2 (such as the fifth and sixth figures).
I ! ! 當啟動列表機1作動時，墨水即會 I頭3 1 ，而墨水滴會於表面張力微閥3 I ，而啟動列表機1作動之同時，列表機 |度（△z )振動，控制振動板上下振動 '於墨水滴在表面張力微閥（嘴嘴口）3 2 ί |由於振幅所產生的振動力小於墨水滴之 I將無法喷出，而為使墨水滴由喷嘴喷出 合表面張力微閥3 2來降低墨水滴在嗔 其中一實際例子便是利用上述之熱毛細 ;p i 1 1 ary )，將電流施加在加熱電阻導 微閥3 2周圍所設之加熱電阻導線4電 力，所謂的電毛細 質（Electrolyte) double layer ) 表面張力會改變， 管現象則是液滴置 端移動，這種現象 梯度，引起界面的 毛細管現象。 可應用於微噴嘴噴 線4 a或電極導線 置於噴嘴頭3 1之 所示）。 由墨水夾流至喷嘴 2處產生表面張力 1振動板2振動幅 之幅度（△Z)小 之表面張力，此時 表面張力，墨水滴 ，本發明係利用整 嘴口之表面張力， 管現象（thermoca 線4 ，當表面張力 流導通後，其微溫 587019 五、發明說明（6) 可使在表面張力微間3 ^ 其所產生之表面張力即會$墨水溫熱，墨水滴之溫度升高 滴在喷嘴口的表面張 低’此時振動力便可突破墨水 取刀而碌利哈ψ 门 動板2也可在較小的j ® ’同時由時列表機1振 列表機1於列印時所连斗 又1 Δ ζ )之下操作，進而使 生之搖晃、與噪音變小者。 生產：Ϊ ΐ ί目Ϊ發明之特徵的確能提供-種可有效節省 ίft^貫用價值之整合表面張力微閥之液珠噴射 控制糸、，·充，以其整體之組合及特徵而言，既未曾見諸於同 類產品中’申請前亦未見公開，誠已符合專利法之法定要 件’爱依法提出發明專利申請。 惟以上所述者，僅為本發明之較佳實施例，當不能以 此限定本發明實施之範圍，即大凡依本發明申請專利範圍 及創作說明書内容所作之等效變化與修飾，皆應仍屬發明 作專利涵蓋之範圍内。I!! When the list machine 1 is activated, the ink will be I head 3 1, and the ink droplets will be on the surface tension microvalve 3 I. When the list machine 1 is activated, the list machine | degrees (△ z) vibrate, Control the vibration of the vibration plate up and down on the ink droplets on the surface tension microvalve (mouth mouth) 3 2 ί | Because the vibration force generated by the amplitude is less than the ink droplets I will not be able to eject, but in order to make the ink droplets ejected from the nozzle Surface tension micro-valve 3 2 to reduce ink droplets. One practical example is to use the above-mentioned thermal capillary; pi 1 1 ary) to apply electric current to the heating resistance wire 4 provided around the heating-resistance micro-valve 3 2. The so-called Electrolyte double layer has a change in surface tension, and the tube phenomenon is the movement of the droplet placement end. This phenomenon gradient causes capillary phenomenon at the interface. It can be applied to the micro-nozzle spray line 4 a or the electrode lead placed on the nozzle head 3 1). The surface tension 1 caused by the flow of the ink clip to the nozzle 2 has a small surface tension of the vibration plate 2 (ΔZ). At this time, the surface tension and ink droplets. The present invention uses the surface tension of the entire mouth, the tube phenomenon ( Thermoca line 4, when the surface tension flow is conducted, its micro temperature is 587019. 5. Description of the invention (6) The surface tension can be changed between 3 ^ and the surface tension generated by it will warm the ink and increase the temperature of the ink droplets. The surface dripping at the nozzle opening is low. At this time, the vibration force can break through the ink and take the knife. The Luliha ψ door moving plate 2 can also be printed by the time list machine 1 and the list machine 1 at the same time. At that time, the combo was operated under 1 Δ ζ), and then the shaking and the noise were reduced. Production: Ϊ ΐ The features of the invention can indeed provide a kind of liquid bead injection control that can effectively save the value of integrated surface tension microvalve, which is effective in terms of its overall combination and characteristics. It has never been seen in similar products 'before application or public disclosure, and has already met the legal requirements of the Patent Law'. However, the above are only preferred embodiments of the present invention. When the scope of implementation of the present invention cannot be limited by this, that is, any equivalent changes and modifications made in accordance with the scope of the patent application and the content of the creative description of the present invention should still be It is within the scope of the invention as a patent.
第10頁 587019 圖式簡單說明 有關本發明為達上述目的，辦^ 功效，兹舉較佳可行實施斤刼用之技術手段及其他 審查人員承且认戒Λ 並配合圖式說明如下，俾使 八員更易於瞭解本發明之產生： 彳早使 第- 圖式之 簡 早 說 明 -圖 係 本 發 明 整 合 表 面 張 力 微 闕 之 液珠 喷射 控制 第二 系 統 之 示 意 圖 0 二圖 係 本 發 明 噴 嘴 結 構 之 剖 視 放 大 圖。 第] L圖 係 本發 明 整 合 表 面 張 力 微 閥 之 液珠 喷射 控制 系 統 之 結 構 設 計 狀 態 示 意 圖 (Array Sy e t em) 第四51 係本發明表面張力微閥設置控制導線之示意 圖。 第五圖 第六圖 圖號之簡單說明 本發明： 係本發明表面張力微閥之實施例一。 係本發明表面張力微閥之實施例二。Page 587019 The diagram simply explains that the present invention achieves the above-mentioned objects, and achieves the effects. Hereby, it is better and feasible to implement the technical means and other reviewers who accept and abide by Λ and cooperate with the diagram to explain the following. It is easier for eight members to understand the emergence of the present invention: 彳 Early-Earth-Simplified description of the diagram-The diagram is a schematic diagram of the second system of the liquid bead ejection control integrated with the surface tension micro-diaphragm of the present invention. Enlarged section. Fig. L is a schematic view of the structure design of the liquid droplet injection control system for the integrated surface tension microvalve of the present invention (Array Sytem). The 51st line is a schematic diagram of the control wires for setting the surface tension microvalve of the present invention. Fifth Figure Sixth Figure Brief Description of Drawing Numbers The present invention is the first embodiment of the surface tension microvalve of the present invention. It is the second embodiment of the surface tension microvalve of the present invention.
列表機 2 振動板 缺槽 3 喷嘴結構 噴嘴頭 導線 3 2 表面張力閥門List machine 2 Vibration plate Notch 3 Nozzle structure Nozzle head Wire 3 2 Surface tension valve