TW586112B - An optical raw disk manufacturing apparatus, optical raw disk manufacturing method and raw disk for optical disk, substrate for optical disk, optical disks - Google Patents

Abstract

In an optical disk where grooves exist adjacent to pre-pit, grooves are deformed to an outer periphery side of an outer periphery side, and also a pit center is moved toward the direction of the outer periphery to deform a positional relation with the groove center, while in the inner periphery side, deformation and movement toward inner periphery occur. Therefore, tracking error or deterioration of C/N arise. In dose proximity of zone border, pits are formed in positions predeterminedly shifted by DeltaCdp in inverse direction to the movement of pits, and a raw disk is cut by deforming the groove by DeltaCsg in inverse direction to the groove deformation, to make a stamper.

Description

586112 A7 __ _B7_ V. Description of the Invention (Technical Field) The present invention mainly relates to an original disc manufacturing device for a rewritable optical disc based on a region division format, a method for making the original disc, and an original disc for the optical disc. [Knowledge background] The format of the optical disc has: a certain angle of rotation (CAV) method that is superior to those who reach the predetermined data sector quickly, and has excellent bit density by maintaining a certain bit density from the inner periphery to the outer periphery of the disc High Density Linear Velocity Constant Method (CLV). However, recent rewritable (rewritable) optical discs have become mainstream with a region division method that combines the advantages of the above-mentioned CAV and CLV. For example, it is represented by a DVD-REWRITABLE (commonly known as DVD-RAM) disc specified in JIS-X-6243. The above dvd-RAM format is various formats having the following characteristics, namely, the first feature is that the radial direction is divided into a plurality of areas, and the number of rotations of the disc is kept constant in this area, and the rotation is reduced each time it moves toward the outer peripheral side. The second feature is: a single spiral ridge and groove format with a ridge track and a groove track at each rotation of the disc; the third feature is: it will be used to display the physical position of the recording sector The pre-hole information of the address is divided into Capa (complementary allocated pit address) format on the outer and inner peripheral sides of the track; and, the fourth feature is that the groove is slightly biased with a single tone rate Move the groove to the wobble format and so on. A general disc cutting method for a DVD-RAM disc having the above-mentioned characteristics and a method for improving the same are described in Japanese Patent Laid-Open Publication No. Hirakai "%".

[Questions of the invention] 1. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling out this page), -ί -4- 586112 A7 _______B7 5. Description of the invention (2 _) The CAPA format, which is one of the features of the above-mentioned DVD-RAM discs, is formed by a series of holes that are offset (wobbled) from the center of the track ^ (outer periphery) to lower (inner periphery) (please read the back first) Note for refilling this page) • It is used flexibly as an effective mechanism for specifying a physical track center, and the above-mentioned track center specifying method (composite wobbled tracking) is Revealed in, for example, Japanese Patent Publication No. 62-183037. However, it has been known that the track center using the CAPA format as an effective > prescribed method is also considered to be a new issue of optical discs caused by high track density and area division. Fig. 8 is a diagram of a DVD-RAM (4.7GB type) optical disc unit 400; Fig. 8 (a) is a diagram of the above-mentioned optical disc unit 400 viewed from the recording surface. As shown in the figure, the part that looks like a vein is the physical sector address part of the Xinxindong in the CAPA format (physical address data, hereinafter referred to as PID), the first (# 0) starting from the optical disk index 401 The piD section of the sector is radially and linearly arranged from the center of the optical disc 400, but the plD section after the # 0 sector is arranged at different angular positions under each zone. > The same figure (b) is a view of the above-mentioned optical disc unit 400 viewed from the side. Generally, there is a phenomenon in which a recording film (hereinafter referred to as a recording layer) composed of a multilayer film, such as a phase change film, a reflection film, and a protective film for recording is sputtered on the surface of a replication substrate made of polycarbonate. ) The difference between the temperature difference between the film surface side 400-S of the disc monomer and the substrate of the polycarbonate disc substrate 400 · β or the expansion ratio is caused by the steps such as vapor deposition (sputtering). Temperature rise causes warping. Although the subsequent steps can be shortened, the following phenomenon can still be confirmed. In the corrective step, the PID part deforms the adjacent groove, so that it cannot return to the radius position before employment. By. This paper size applies to China National Standard (CNS) A4 (2 ^ X29 »^) 586112

Fig. 9 is a diagram for explaining a phenomenon in which the above-mentioned PID part deforms the adjacent groove and cannot return to the original radial position. The same figure (1)) is a diagram of the CAPA structure PID hole and groove in the center of the display area.

The radial center piD_L center of the PID hole offset (wobble) to the outer peripheral side and the radial center piD_G center of the PID hole offset to the inner peripheral side (wobble) is the distance from the center of the groove representing the radial center of the groove 403 Or isometric setting of ridge center. In addition, the distance between the center of the groove and the center of the ridge surface is defined as the track pitch TP, and the offset between the center of PID_L and the center of PID-G is a plus or minus half of TP2. (A) is a figure which shows the boundary part with the adjoining area of an outer peripheral side. The groove in the abutting area on the outer peripheral side is deformed by the amount ASg (amount of deformation of the adjacent groove) as it is squeezed toward the PID hole, and at the same time, the PID center is moved from the theoretical center of the PID by Δ ^ (pm center displacement). The same figure (C) is a diagram showing a boundary portion with the adjacent region on the inner peripheral side. The adjacent groove deformation ASg and PID center displacement amount Δ (1ρ is in the direction opposite to & the above figure, that is, the person deformed and displaced toward the inner peripheral side. As described above, even if the CAPA structure is manufactured, the PID The original disc with the holes arranged in the theoretically correct position will also be deformed mainly due to the heat generated during the vapor deposition step. As a result, the problem is that the PID holes used to indicate the deviation (swing) in the outer direction and the inward direction are caused. The piD hole shifted in the circumferential direction is deviated from the actual track center when the reflected light quantity is different from the actual track center, and the groove is deformed to form the shape of the PID hole that is squeezed to the adjacent area. It can form chaotic elements outside of the push-pull tracking signal, and it also guides this paper to the size of China National Standard M (21 × 297 mm) (Please read the precautions on the back before filling this page). Order — Wei · -6- 586112 A7 ______ Β7 V. Description of the invention (4) The problem that the quality of the groove wobble reproduction signal is reduced, etc. The object of the present invention is to provide an optical disc that is inexpensive and has minimal deformation of the adjacent groove and PID center displacement, and has high reliability. single [Disclosure of the Invention] In order to achieve the above object, the present invention is a device for manufacturing an optical disc master, which is characterized by including a laser light source; a rotating mechanism for rotating a disc-shaped original disc at a predetermined speed, The surface of the original disk is coated with a photosensitizer that reacts with the wavelength of the laser beam emitted by the laser light source; an objective lens is used to condense the laser beam emitted from the light source onto the photosensitive surface of the cutting original disk to form Pointer; a moving mechanism for moving the laser spot after the beam focusing at a predetermined speed in the radial direction of the cutting original disk; a modulation signal generating component for generating a pre-groove signal for the guide rail in a predetermined format and Pre-hole signal for PID; light modulation component, which is used to control and input the output signal of the modulation signal generation component; bias signal generation component, which has a predetermined format to generate the laser point toward the above cut A component of the time information, direction information, and size information of the radial deviation of the original disk, and a component to correct the displacement of the position of the PID hole; and , Which is used to control and input the output signal of the biased signal generating component; wherein the biased signal generating component is added with the following components, namely: a majority rotation to identify the piD of the inner peripheral side abutting area before drilling the hole Angular direction range; one to predict the majority of the rotational angular direction range of the PID that has to be bored with the peripheral abutting area beforehand; and one to correct the deformation of the abutting grooves created near the abutting area. Area 'is slightly on the inner track of the piD pre-holes in advance toward 586112 A7-B7 V. Description of the invention (5) The outer circumferential direction is offset, and the PID pre-holes located on the inner peripheral side of the track are identified. The range of the rotation angle direction will deform and deform the pre-grooves formed in the outer circumferential direction. In addition, the pre-holes of the PID are shifted and arranged in the inner circumferential direction on the outer magnetic track slightly in the area, and the identification is arranged on the magnetic track. The range of the rotation angle direction of the PID pre-holes in the adjacent areas on the outer peripheral side will shift and deform the pre-grooves formed in the inner peripheral direction to cut the original disc. When the original disc for the optical disc manufactured by the above-mentioned original disc manufacturing device is based on a predetermined position in the radial direction of the pre-hole for the PID, a pre-hole is formed at a position opposite to the predicted position of the PID hole after the optical disc is completed. Those who deform in the opposite direction to the deformation direction of the pre-holes predicted after the completion of the single disc.

By this, the phenomenon of the displacement (change) of the PID hole position which must occur after the subsequent steps and the phenomenon of the groove deformation (distortion) due to the influence of the pre-hole portion of the adjacent area can be corrected in advance, which can provide An optical disc unit with a relatively small displacement of the relative positions of the PID holes and the grooves in the radial direction and adjacent grooves. Furthermore, the present invention is constructed to further include the following components: those used to identify the majority of the rotation angle direction ranges of the PIDs of the majority of sectors previously drilled in the adjacent area on the inner peripheral side; and used to predict the requirements on the adjacent area on the outer peripheral side. Directional range of most rotation angles of PID of most sectors bored in advance; and, direction signals for each direction for correcting the deformation direction of adjacent grooves occurring near the adjacent area and the direction of displacement (change) of the PID hole position By. The identification of the lacking range by the PID position identification member of the above-mentioned adjacent area represents the pre-paper hole of the PID pre-hole and the adjacent area adjacent to the inner peripheral side, and the pre-paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297). (%) (Please read the notes on the back before filling in this page) • Hit _ 586112 A7 __ _B7____ V. Description of the invention (6.) The range of the rotation angle range of the groove deformation of the state of the cavity can be within the range The output of the signal generating member used to correct the distortion (deformation) of the adjacent groove is passed, and the pass output signal can be combined with the output of the signal generating member that is used to correct the position (variation) of the PID hole. Then add to the optical deflection element. As a result, it is in a state of being deformed in a direction opposite to the direction in which the groove is deformed (distorted) due to the effect of the pre-cavity of the adjacent area, and is reversed in the direction of displacement (change) with the position of the PID hole. The original disc is manufactured under the state of displacement, so it has the effect of supplying a single disc with minimal deformation of the adjacent groove and the position of the PID hole. Also, the present invention is configured to have a component for memorizing data using an inherent function that decreases from the innermost magnetic track of the inner-peripheral-side region boundary toward the central track of the region through the number of magnetic strips, and The data using the inherent function of increasing the number of remaining magnetic strips from the magnetic core of the region toward the outermost magnetic track of the boundary region of the outer peripheral side is used as the graph. The graph data of the memory component that is decreasing and increasing by the above-mentioned inherent function is sequentially drawn out every time the optical disc rotates, and each can be used as a direction for correcting the deformation direction of the adjacent groove occurring near the adjacent area and the direction of the displacement (change) of the position of the PID hole. Signal use. With this, the original disc is manufactured by making correction data in which the respective correction amounts of the adjacent groove deformation and the position change of the pID hole are decremented from the inner and outer circumferences to the center of the region, and has an optical disc that can supply a higher correction accuracy. Body effect. -The present invention is also provided with: for dividing by the correction of the occurrence of this paper in the vicinity of each adjacent to the paper size applicable Chinese National Standard (CNS) A4 specifications (210X297 public love) • ............ .......... ^ ....... tr ... (Please read the precautions on the back before filling in this page} -9_ 586112 A7 ____B7_ V. Description of the invention (7_) The direction signal component of the deformation direction of the adjacent groove and the direction of the displacement (change) of the PID hole position, and The divisor memory component is used to supply the divisor to the division component. The data stored in the divisor storage component is individually set by the unit of the area, and the size can be changed from the inner peripheral area to the outer peripheral area in any size. Correction of the deformation of the adjacent groove and the correction of the position of the PID hole. As a result, the original data of the disc has been absorbed by the correction data of the overall internal and external perimeter of the disc, and it has a single disc that can provide a comprehensive correction of the disc with high accuracy. Effects [Embodiments of the invention] Hereinafter, embodiments will be described with reference to the drawings. The first diagram is a schematic block diagram of a master disc cutting system for a DVD-RAM disc. The rotating shaft of the main shaft mechanism 205 of the cutting machine 200 is provided with a disc cutting original plate 205 coated with a photosensitive agent on the surface, and the LCM controller 206 is controlled, so that a laser beam 201 with a certain amount of light is emitted from the laser light source 201 to a certain amount. The number of rotations rotates the original disk 250, and the moving mechanism 204 is moved at a certain speed to obtain a predetermined track pitch. The laser beam 209 is turned on (beam passes) and turned off (beam truncation) by AOM (Acoustic Optical Modulator) 202 ) Modulation, a 0D (acoustic optical deflector) 203 is slightly offset along the radial direction of the original disk 250, and passes through the mirror 207 and functions as an objective lens 208 to irradiate the light sensitivity of the cutting original disk 250 into a tiny point. Here, the AOM driving signal 101 output by the formatter 100 is used as the modulation & signal of AOM202, and the output signal of the formatter ι〇〇 is also supplied. The paper size applies the Chinese National Standard (CNS) A4 specification. (210 fathers 297 males) (Please read the precautions on the back before filling in this page) •, ^ 丨 -10- 586112 V. Description of the invention (AOD driving signal 102 is used as the bias signal of AOD203, and the pre-cut can be cut out. The format of the original disc. Figure 2 is a functional block diagram of the formatter 100 shown in Figure 1 above. The basic method is to switch the two-sided buffer mode of the A side and the B side when each area is switched. In addition, The A side and B side described here are different from the "A side" or "B side" in the disc table in the descriptions related to Figure 16, Figure 19, Figure 20, and Figure 21 for the convenience of distinguishing, It is only used to distinguish the buffer surface of the 2-sided buffer formatter. The formatter 100 includes: PC (personal computer) 103 for generating and adjusting central address information or macro-level program control; frequency synthesizers for A-side channel clock 116 and 04-side b Channel clock 117 supply frequency synthesizer 105; PC 103 control information and center address pre-hole information are received via I / F (interface) 119 to specifically format and control the program controller 106; used for A-side memory controller 107 and B-side corresponding to the a-side memory controller 107 and B-side are the read / write addresses of the memory group 108 temporarily stored in the physical sector address pid pre-hole information for the A-side, etc. B-plane memory group 110 and B-plane memory controller 1 09; used to switch or rearrange the output information column from the above-mentioned A-plane memory group 108 and b-plane memory Zhao group 110, and form it with a certain formatter Editable circuit 111 in a cuttable state;

It is used to output one of the 2 systems output by the editor & circuit 111 as AOM. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 public love) ............... ....... install ... (please read the precautions on the back before filling in this page), sentence 丨 • line 丨 -11- 586112 A7 ____ B7 V. Description of the invention (9 _) The use of driving signals And use the DA converter (DAC) 112 to convert the analog signal to the analog signal 124 as the output buffer amplifier 121 for 50Ω driving; and to use the other side of the editing circuit output system as the AOD driving signal, and After being analogized by the DA converter 113, the 50 Ω output buffer amplifier 115 is driven by the addition signal 123 of the addition circuit 114 and the correction bias signal output from the bias correction circuit 300. Here, the operation of the second diagram will be described with reference to the flowchart of FIG. 4. First, the personal computer (PC) 103 is in the preparation stage. The channel clock frequency of the initial cutting area (usually zone # 0) is set and sent to the fa frequency through gpib (general purpose interface bus). The synthesizer 104 performs this. At the same time, the PID pre-hole data, the groove data, and the bias data are transferred to the A-side memory group 108 by the I / F119 and the controller 106 (step 131 in FIG. 4), Perform the setting of the above-mentioned initial area constants and various data to another synthesizer 105 or transfer the data to the B-side memory group 101 (step 132 in Fig. 4) (this is to prepare in advance and can respond to The start from the A side may also correspond to the preparation from the start of the b side). Secondly, it is determined that the start operation to the PC 103 is performed on the a side or the B side (step 133 in FIG. 4). Here, it is assumed that when the B side is started, pci03 provides the B side start instruction to the controller 106 ( Step 139 in FIG. 4) For the fa, use the frequency synthesizer 104 to set the channel clock frequency of the next cutting area (simulating the above-mentioned common example as the area), and pass the piD preset data, groove data and high data through Dedicated control of internal busbars 丨 Η This paper size is applicable to Chinese National Standard (CNS) A4 specifications (210X297mm) (Please read the precautions on the back before filling this page), order -12- 586112 A7 B7 V. Description of the invention (10; sent to the A-side delta memory group 108 (step 14 of FIG. 4). (Please read the precautions on the back before filling out this page) The controller 106 is waiting for the area to be cut ( Step 141 in FIG. 4), further stop the β-plane motion (step 142 in FIG. 4), or if it is determined that it is not the final area (step 143 in FIG. 4), start the opposite side quickly (here, A Face) (step 134 in Figure 4), and contact with pci〇3 has been Zone switcher φ Here, PC103 sets the channel clock frequency for the next cutting area of the active frequency synthesizer 105 (imitating the aforementioned general example is # 2), and sets the PID pre-hole data, groove data and bias data Wait for transfer to the a-plane memory group 108 (step 140 in FIG. 4). • Line 丨 Subsequently, the controller 106 waits for the end flag of the A-plane action (step 136 in FIG. 4), and further ends the A-plane action (page 136). Step 137 of Fig. 4) If it is determined that it is not the final area (step 138 of Fig. 4), start the opposite side (here B side) quickly (step 139 of Fig. 4) and contact the PC 103 at the same time Those who have switched regions. The same process is repeated below, and when it is determined that the entire cutting of the disc is completed (step 138 or step 143 in FIG. 4), a series of cutting operations are ended. Figure 3 shows the second circle The functional block diagram of the internal circuit of the bias correction circuit 300. The correction circuit 300 includes: a data selector 302 for switching an input signal such as a channel clock by using the state of the surface (A or B) in action; For adjoining the outer side Byte counter 310 (1 in 43152 counter) for the PID position detection of the domain and the correction position PID position detection meeting road 311 of the outer side and the access area; This paper size applies the Chinese National Standard (CNS) A4 specification (210X297) -13) 586112 A7 V. Description of the Invention (u _) A byte counter 32 (counter 1 in 43152) used to count the area currently executing, PID position detection circuit 313 in the current area, and the above bit το group counter Current area magnetic counter 321 (6-bit programmable binary counter) output from C0 (complete; carry 〇) of 320, current area magnetic track counter 322 for counting C0 output of the above sector counter 321 (11-bit programmable binary counter), area counter (6-bit binary counter) 323 for counting the CO output of the above-mentioned track counter 322, and modified track identification circuit 324; the inner peripheral side is adjacent Zone correction position PID position detection circuit 317; bit position displacement correction table 326, bit position displacement correction data selector 327, adjacent groove deformation correction table 329, adjacent groove deformation correction data selection Device 330 and data selector 331 for switching between deformation correction data and position displacement correction data; a division circuit 332 for absorbing radius dependence and a divisor table 318 for providing a divisor; and a division circuit 332 for the above The output is analogized to generate a DA converter 333 that corrects the bias signal 301. In addition, the data selector used in this figure selects the A output as the γ output when the sel input is at the low level, and the B output as the γ output when the SEL input is at the high level. Here, a description will be given assuming that the B-plane is in operation. The channel B of the input signal (B_CHCK) U7 is set to the frequency used in the current zone | rate (the frequency when the 4 7GbdvdraM2 ^ zone is cut with 600rpm of the spindle rotation rate is 11.6051 MHz), and the channel of the a side is used Clock ........— 1 _ The paper size is suitable for financial standards (CNS) A4 (210X297 mm)--14 ·

• Order, (Please read the notes on the back before filling this page) 586112 A7 B7 .. _ ----- 丨 __ 丨 丨 " " — --- 5. Description of the invention (12.) (A -CHCK) 116 is set to the frequency used in the next zone (following the previous example, it is 12.08256 MHz corresponding to zone # 3). In addition, the input signals B-TN 0 and 10 are 11-bit data representing the number of tracks in each zone of the current zone, and the input signals A-TN 0 and 10 are 11-bit data representing the number of tracks in each zone of the next zone. Signals B-SN 0 and 5 are the number of sectors under each track in the current zone (if sector # 2 is 27 sectors) 'and the input signal α · | §ν 0 and 5 are under each track of the next zone The number of sectors (or 28 sectors if the area is # 3). The input signal B-RUN is assumed to be at a high level because it is in the B-plane operation. Therefore, the CK (counting time. Clock) input of the byte counter 310 on the peripheral side is used to select the A-CHCK for the next block. The peripheral side adjacent correction position detecting circuit 311 captures the PID position (from counting 0 to a 128-byte count) to indicate the position of the data of the above counter 310, and obtains the peripheral side adjacent groove deformation correction position 0- POS. In addition, the CK (counting clock) input of the current area byte counter 320 is a B-CHCK which selects the frequency of the current area. Therefore, the borrow byte counter 320 and the sector counter 321 (selected by the selector 302) B-SN 〇, 5 designated by 1 data counter) and track counter 322 (B-TN 0, 10 designated by data selector 1 counter selected by the selector 302) are each in the current format Motion synchronization. The correction track identification circuit 324 outputs Z · IN when the above-mentioned track counter 322 of the current track is displayed between 0 and 255, in order to correct the necessary period on the inner side, and at the same time sets the above-mentioned track counter 322 lower by 8 If the state of the bit is unchanged, enter 4 in ADR 0, 7 as the table address. The above paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling the book Page) • Order — • Line 丨 -15- 586112 A7 B7

V. Description of the invention The selector 302 selects and displays b_TN of the number of tracks in each zone of the current zone. 10, minus the count value of the above-mentioned track counter 322. When the difference is less than 255, the outer periphery of the output zone The necessary period signal Z-OUT is corrected, and the lower 8 bits are output as the ADR 0 and 7. Outputs a PID signal that is consistent with the PID position in the current format retrieved by the PID position detection circuit 313. The PID output signal is EOR with the exclusive side or (EOR) circuit 316 and the PID side contact signal of the mode switch 315. deal with. At this time, when the PID side contact signal of the switch 3 1 5 is at a low level, the PID output signal is passed in a constant form, and when the PID side contact signal of the switch 315 is at a high level, it is reversed. Become low level, otherwise the low level becomes high level), and then pass it, and the (and) circuit 314 makes the above Z-OUT signal and the Z-IN signal and the signal processed by OR circuit 324 OR Add (AND) and connect to SEL input of hole selector 327. The hole position displacement correction table 326, the adjacent groove deformation correction table 329, and the divisor table 318 are formed by using a rewriteable I (:-ROM, via a serial interface RS232C, and a personal computer (numbered in Fig. 2). 103) The structure of the updated hole position displacement correction table 326 and the adjacent groove deformation correction table 329 are the addresses above the ADR 0, 7 and the above z-〇UT is added as the most significant bit. 9 The bit structure is formed by the amount of 256 tracks on the inner peripheral side and the amount of 256 tracks on the outer peripheral side of the reading area of the table. The divisor table 318 uses the Q outputs ZCT 0 and 5 of the area counter 323 as the address. And this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm)% (Please read the precautions on the back before filling in this page). Order · 0 · -16-586112 14 V. Description of the invention (Cheng Ke Read different data by area. (Please read the precautions on the back before filling in this page.) Set ^ 11 327 m W Set the correction value PITG and 7 read from the correction table 326 as the A input side of the data selector. 7F (Hexadecimal) is added to the opposite B input side to represent the binary code as zero. Data, when the SEL input terminal of the selector 327 is at a low level, hole correction data ριτ〇, 7 is output, and when the SEL input is at a high level, a fixed data of zero is output, and the direction of the exclusive OR circuit (EOR) 328 is output. This is determined by the following, that is, the sel input of the selector 327, that is, the output of the AND circuit 314 is set by the switch 315 so that the signal level of the PID position part of the above present area is a high level or Low level, so you can choose to correct with the PID position or the part other than PID, that is, the groove part. Assume that in the mode of groove correction, due to the effect of the Eor circuit 328, the correction values PIT 0, 7 and The direct binary code reverses the polarity. That is, it forms the shape that directly corrects the hole position and the shape that corrects the groove, and reverses its direction. On the other hand, to detect the PID position of the correction position on the inner peripheral side adjacent area, The count value of the counters 320 and 321 for the current area is input to the detection circuit 317, and the correction position output I_POS of the adjacent groove deformation of the prediction output is outputted. The I-POS is connected to the and circuit 319. The inner-peripheral-side correction necessary period Z-IN is added (AND), and the OR circuit 325 will be further corrected by the ^ AND circuit 3 12 to make the outer-peripheral side necessary period Z-OUT and the outer-peripheral side adjacent groove shape. China National Standard (CNS) A4 Specification (210X297mm) -17- 586112 A7 __ _ B7 V. Invention Description (ir) 15-(Please read the precautions on the back before filling this page) Change the correction position output 0- The P0S adder performs OR processing, so that the required period between the inner and outer peripheral sides is connected to the SEL input terminals of the data selector 330 and the data selector 331 as pulse signals with the correction position at a high level. The data xc 0 and 7 output from the adjacent groove deformation correction table 329 are read through the same path as the hole position displacement correction table 326 of PIT 0 and 7. The SEL input of the adjacent groove deformation correction data selector 330 is high. In the standard period, the above data XC 0 and 7 are selected, and in the low level period, the fixed data zero (7F in hexadecimal) is selected and connected to the B input side of the data selector 331 for correction table switching. Therefore, only the correction of the adjacent groove deformation is selected during the correction of the adjacent groove deformation, and the data is input as the molecular term of the division circuit 332 for the area dependence correction. The value is divided by the output data of the divisor table 318 (but, After being divided into absolute values, the divisor is calculated and returned to the original data form after calculation. The analog conversion is performed by the da converter 333 to form a correction bias signal. 4 Fig. 7 is a graph showing an example of an adjacent groove deformation correction table (No. 329 in Fig. 3). The horizontal axis indicates the number of grooves in the area, the right side is the outer peripheral direction, and the vertical axis is the correction coefficient. The larger the number is, the larger the correction amount is. It forms data that increases exponentially toward the area boundary. This data is obtained experimentally by using the difference between the manufacturing equipment or the different components as a constant, and it is stored in the database type in the control personal computer (No. 103 in Figure 2). In addition, the piD position displacement correction table (No. 326 in Fig. 3) is also used to form a database type. Figure 5 shows: the conventional method or various correction tables (the paper size of Figure 4 applies the Chinese National Standard (CNS) A4 specification (210X297): -18-586112 A7 __ _ _B7_ V. Invention Note (^) No. 16 (326 and 329) are all set to zero, when the original disc of the DVD-RAM disc is cut, the exposure state and formatter of the original disc (Edition of Figure 1 (please read the precautions on the back first) The graph of the output signal of No. 100), the horizontal axis direction corresponds to the rotation angle of the cutting original disk. (4) in the same figure is a diagram for explaining the exposure state, in which the area near the disk index 401 on the original disk is enlarged and cut. Here, the lower part of the figure is the inner peripheral side of the original disk, and the moving mechanism (No. 204 in the first figure) moves at a constant speed from the lower part of the figure to the upper part. First, the remaining 3rd section of area # (k — 1) is cut (corresponding to the waveform diagram of AOM drive signal 101 and AOD drive signal 102 shown in (3) of the figure). The ridge PID402-L of the address information of sector # 〇 is formed when the track center is shifted by an amount equivalent to two-half i from the outer circumferential direction, and the hole array is exposed (see number 102 in (3) in the figure). Positive potential. In the same figure, a hole is added to form a pulse train, and then the groove PID402-G with the address information of sector # 0 of the groove track is pre-drilled. The offset from the center of the track toward the inner circumference is equivalent to 1/2 When the amount is equal to, the hole array is exposed (same as No. 102 in (3) of the figure) so that a negative potential is formed. Hole 101 is applied to form a pulse train in the same figure, and then the groove (guide groove) 403 is exposed to the ridge surface PID of the next sector, so that the number 102 in (3) of the same figure forms a zero potential. For the same number 101, the action of applying a certain positive potential is performed periodically, and after the disc is rotated once through the disc index 401, all operations are discontinued to form a groove track 404. When repeating the above action and entering area #k, switch the cutting channel. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -19- 586112 A7 ______B7 V. Description of the invention (17 /) Frequency, forming a slightly higher frequency (for example, in the example in Figure 3, it is changed from 11.21952 MHz in area # 1 to 11.65104 MHz in area # 2). In this state, when the same cutting operation as in the above area 1) is performed (corresponding to the waveform of the AOM drive signal ιοί and a〇D drive signal 102 shown in (2) of the same figure), as shown in the figure , The length (angle) of sector 1 becomes shorter, and the starting point (angle) of PID after sector # 1 is inconsistent with the previous zone 0, and then moves to area # (k + 1), the channel clock frequency further increases (For example, in the example shown in Figure 3, the area is changed from 11.65104 MHz in area # 2 to 12.08256 MHz in area # 3.) When the same cutting operation is performed as in the above area 丨) (AOM shown in (1) of the same figure) The drive signal 101 corresponds to the waveform of the AOD drive signal 102). As shown in the figure, the length (angle) of 1 sector is made shorter, and the starting point (angle) of the PID after # 1 sector is the same as the previous one. Those with greater regional disparities. Figure 6 shows: in the state that various correction tables (numbers 326 and 329 in Figure 3) are valid, the position of the PID pre-hole is reversed and the displacement is reversed in advance (same as in Figure 3). The switch 315 is set on the PID side), and the groove will be deformed to the opposite side of the deformation direction of the adjacent groove deformation. When cutting the original disc of a DVD-RAM disc, the cutting of the original disc (No. 250 in Figure 1) For the exposure state and formatter (No. 100 in Figure 1) to output signals, the horizontal axis corresponds to the rotation angle of the original disc. (5) in the same figure is based on cutting the # 0 sector near the disc index 4〇1 on the original disc as the starting point, and explains the exposure status near the pID of the #n sector omitted in the middle. 1. This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) Scorpion ...: Order ... i · (Please read the notes on the back before filling this page) -20- 586112 A7 __B7 _ V. Description of the invention (18 _) Here, the lower part of the drawing is the inner peripheral side of the original disk, and the moving mechanism (No. 204 in the i-th figure) moves at the same speed from the lower part of the drawing to the upper part, and the description starts from the lower part of the figure. The remaining 3rd section of area # (k-1) is cut (corresponding to the waveform diagram of AOM driving signal 101 and A0D driving signal 102 shown in (4) of the figure), and the pre-Lidong starts from point A. Ridge track # 〇 The address information of sector pm 402-L is shifted from the center of the track to the outer periphery by an amount equivalent to one-half, and the hole row is exposed (the same as the number (102) in (4) in the figure). ) Forms a positive potential, and forms a pulse train with holes in the same figure as the number 101. Then the PID402-G of the address information of the # 0 sector of the groove track is pre-arranged. When the track center is shifted from the center of the track toward the inner circumference by an amount equivalent to 1/2, the hole row is exposed (see the same figure). (4) No. 102), so that a negative potential is formed, and a hole is formed in the same sequence as in FIG. 101 to form a pulse train. In addition, the pid hole of sector # 0 with the disc index 401 as the starting point does not change the position, so it is a person who does not perform the correction of the hole position. Next, the groove (guide groove) 403 is exposed to be generated between the PID positions of the next sector (a certain positive potential is applied to number 101 of (4) in the same figure, and number 102 is zero. Potential), but at the location of the predicted rotation angle of the placement of the pid holes in the adjacent area on the peripheral side, the ASg amount is corrected in the direction opposite to the deformation direction of the adjacent groove in advance (refer to No. 102 in (4) of the same figure). Then, when a PID hole is formed at the PID position such as #n sector, as shown by number 102 in (4) of the figure, △ dp— 1 or △ dp — g 'is subtracted from the bias signal to the ~ PID pre-holes are formed on the inner peripheral side of the disc. This paper size applies to China National Standard (CNS) A4 (210X297 mm)

-21- 586112 A7 _______ Β7 V. Description of the Invention (19) Next, after the disc is rotated once to pass the disc index 401, the above operation is interrupted, and then the groove track 404 is formed between the disc index 401. When the above operation is repeated and the area #k area is entered, the frequency of the cutting channel clock is switched to form a slightly higher frequency (for example, in the example in FIG. 3, 11.21952 MHz of area # 1 is changed to 11.65104 MHz of area # 2). In this state, when the cutting operation of the inner peripheral side boundary portion (from the starting point of the area to within 256 magnetic tracks in this embodiment) is performed (using the AOM driving signal shown in (3) of the same figure) and a〇D driving Corresponding to the waveform of signal 102)) As shown in the figure, the length (angle) of sector 1 becomes shorter, and the PID starting point (angle) after sector # 1 is inconsistent with the previous zone. Here, as shown by the waveform 102 in (3) of the same figure, the offset of the PID hole plus Δdp-1 or Adp-g is formed by shifting from a predetermined position to a position on the outer peripheral side, and has ended. In the PID portion of the adjacent region on the inner peripheral side generated by the exposure, the amount of Δsg is subtracted to correct the deformation toward the inner peripheral side. When the area #k is near the boundary of the outer periphery (in this embodiment, the number of remaining tracks is 256 or less), the outer boundary is cut and the AOM drive signal 101 and AOD drive signal 1 shown in (2) of the same figure are cut. The operation shown in the waveform chart 2 is the same operation as the above (4) of the same figure by changing the frequency of the channel clock to make the PID and the like different. The pid hole of the # 〇 sector starting from the optical disk index 401 is correctly shifted from the groove center to the outer peripheral side by 1/2 tracks (+ Tp / 2), and even correctly toward the inner peripheral side by 2 points One track (one τρ / 2) is formed after exposure, and the position of the Asg is changed toward the outer direction within the predicted position of the PID of the adjacent area on the outer side, and the groove is formed. The PID system of #n sector Developed in accordance with the Chinese paper standard (®s) A4 size (210X297 mm) which is larger than the above paper size (please read the precautions on the back before filling this page). Ή · • Awl -22- 586112 A7 B7 V. Invention Note (2 {) _) # 0 The PID formation position of sector 0 is also determined by the position on the inner peripheral side which is equivalent to positions △ and 1 dp — g. When entering the area # (k + 1), as shown in the a0m drive signal 101 and the AOD drive signal 102 of the figure (1), the same operation as that of the inner peripheral side boundary portion described in the figure is performed. Correction, formation of pID pre-holes and grooves. Fig. 10 is used to capture the vicinity of the stamped pre-hole PID section made by cutting the original disc made by the above-mentioned method, and explain the position of the PID section, the correction of the displacement and the correction status of the adjacent groove deformation. The ⑷ in the figure refers to the boundary of the adjacent area on the outer peripheral side. During the period of the pre-holes PID-L and PID-G in the CAPA format, the groove 403 is deformed by an adjacent groove, and is formed by deforming the distance △ Csg toward the inner peripheral side. The PID center is formed by shifting the center of the PID from the predetermined position toward the inner peripheral side by a distance Δcdp. The same figure (b) refers to the central (middle-peripheral) part of the area. The central part does not need to be corrected because the amount of piD hole displacement and adjacent groove deformation is very small. Therefore, the offset from the center of the PID center and the center of the groove track or the center of the ridge track, Weapa, is correctly formed at the track gauge. One half of TP, and without any modification and deformation, the groove 403 is formed. The same figure (c) shows the adjacent groove interface on the inner peripheral side. The pre-drilled hole makes the corrected PID center in the opposite direction to the outer circle side of the same circle (a), that is, the distance from the center line of the groove 403 is 1/2 the amount of the magnetic track and then the distance △ (^ ρ of On the wing, the adjacent groove is also attached to the outer peripheral side with a correction of the distance △ Cdp. 、 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 cm) (Please read the precautions on the back before filling (This page). Order ·: Line 丨 -23- 586112 A7 _ B7 V. Description of the invention (21 _) (Please read the precautions on the back before filling in this page) Above, the process of the original disk is mainly used to explain the implementation. Next, the flow chart of the general process until the completion of the DVD-RAM disc is described with reference to FIG. 11. In the glass master process 501, a photosensitive agent is evenly coated on the surface of a glass disc processed into an extremely flat state. Use The original disc cutting system as shown in the above figure 1 is exposed in a predetermined format and then subjected to a development process to form about 80 nm (typically a quarter of the laser wavelength for regeneration) on the surface of the glass disc. 1 to 8/8) Deep pre-holes and pre-grooves. In the stamping process 502, metal such as nickel is plated on the above-mentioned pre-holes and pre-grooves glass discs to produce a metal mold (stamping tool) for transferring the pre-holes and pre-grooves. In the copying process 503, the above molds are used. Polycarbonate (PC) resin is extruded between the uneven surface of the (pressing tool) and a flat plate arranged in parallel with a predetermined gap (0.6 mm), and after the Pc resin is hardened, it is peeled off by the above-mentioned pressing tool to produce the glass. Original discs with the same concave and convex surface (replications) In addition, although the PC resin is hardened during the hardening process, it is reduced in size, so it must be formatted in advance in the above-mentioned glass master process 501 by estimating the reduction rate. When the deformation correction amount of the adjacent groove of the figure needs 100 nm, it is only necessary to perform a deformation correction equivalent to 100 · 8ηπ. Based on this, a large number of duplicated circular plates (substrates) are subjected to a sputtering process of 504. A multilayer structure is formed by sequentially vaporizing a reflective film (layer) member, a heat dissipation film (layer) member, etc. to form a so-called recording film. The more productive the vapor deposition step is, the more it is required for the sputtering step. Time into Inversely, the heat generation increases, as illustrated in Figure 8, so that the national paper standard (Q ^ g) Α4 caused by the difference in temperature or expansion rate between the base substrate (replica) and the chain film is applicable. Specifications (21〇 > < 297mm) • 24 · 586112 A7 ___B7_ V. Description of the invention (22.) The amount of warpage has also increased, resulting in an increase in the amount of CAPA center displacement and adjacent groove shape. (Please first Read the notes on the back and fill in this page again.) In the posting / finishing procedure 505, the back-to-back bonding of the single 0.6mm-thick disc veneers with recording film, and the finishing operations such as printing and sealing are organized. The appearance of a single-sided optical disc with a thickness of 1 · 2ππη is good. In this embodiment, two optical disc units having a recording film are bonded to each other and the recording film side is positioned inside. However, it is also possible to constitute an optical disc unit having a recording film and a simulation substrate without a recording film. A form in which the recording film side is positioned inside. After the above steps, in the inspection program 506, not only the evaluations and appearance inspections required by the Japanese Industrial Standards (JIS), etc., but also comprehensive evaluations such as reliability and recording and reproduction characteristics evaluations are carried out. Figure 12 is a functional block diagram showing the above-mentioned inspection procedure (program 506 in Figure 丨) and the evaluation device used in the design stage. However, to avoid being too complicated, the recording circuit system and controller, etc. The description and drawings of the parts not directly related to the present invention are omitted. A laser beam 660 with a wavelength of 660 nm emitted by a semiconductor laser 553 driven by a laser drive circuit 552 with an APC (Automatic Power Controller) circuit passes through a semi-transparent mirror 555 and changes its orientation with the mirror 556 to enter a two-dimensional The actuator 557 condenses a small light spot on the recording film surface of the optical disc unit 400 by the action of the objective lens 558. The above-mentioned optical disc 400 is fixed to the spindle motor 551 and rotates at a constant speed, and reflects the light and dark information of the film surface of the above-mentioned optical disc 400 and the diffraction light information produced by the groove (pre-groove). Light 554-S chase photo paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -25 · 586112 A7 _____B7 V. Description of the invention ^ 23 _) The light path reflected by the translucent mirror 555 , Is incident on the 4-division detector 559. The photodiodes a, b, c, and d constituting the four-division detector 559 output currents in an independent state independently of the currents that are proportional to the intensity of the incident light. The current-voltage conversion amplifier 56 is used. 〇Convert it into a voltage signal to form four input signals to the arithmetic circuit 561. The tracking error signal [TE = (a + b) — (c + d)], which is the first output of the arithmetic circuit 561, implements phase protection and current increase by the tracking control circuit 562, and drives the above 2-dimensional actuator The coil of 557 is driven in the horizontal direction, and the objective lens 558 is moved in the radial direction, so that the focusing point of the laser beam 554 is maintained at the center of the groove or the center of the ridge (between the groove and the groove). Guide (track) the light spot in the state. In addition, the tracking error signal [FE = (a + c) — (b + d)], which is the second output of the arithmetic circuit 561, is driven by the autofocus circuit 563 after phase protection and current increase, and drives the above two-dimensional The actuator 557 drives the coil in the vertical direction to move the objective lens 5 5 8 in the up-down direction to control (autofocus) the above laser beam 554 so that it is condensed on the above-mentioned optical disc 400 under the optimal conditions. Surface. In addition, the hole signal (SUM = a + b + C + d) as the third output signal of the operation circuit 561 is the light and shade information of the recording film surface of the above-mentioned optical disc 400, and is used to detect the presence of pre-holes or recorded holes. The purpose is to further improve the tracking error signal (TE) as a tracking error monitoring signal 5 through a low-pass circuit 564 to remove high-frequency components such as groove wobble. Figure 13, Department of Profits > The above evaluation device (Figure 12) applies the Chinese National Standard (CNS) Α4 specification (210X297 public love) to the paper standard that is not adjacent. ------------- ---------_____ (Please read the precautions on the back before filling in this page) ·, ^ Γ— -26- 586112 A7 _____B7_ 5. Description of the invention (24-) Slot deformation and PID hole position change Under the state of bit correction (CAPA misalignment correction), (ie, the correction bias signal 301 in Fig. 2 is fixed at zero potential) produced by the ^ DVD_rAM optical disc unit for evaluation of TE monitoring signal (No. 565 in Fig. 12) The waveform diagram of the specific rotation angle position. In addition, the horizontal axis is time, and the spindle motor (No. 551 in Figure 12) rotates at a certain speed in the zone. Usually, it is controlled to make the number of rotations every time the area moves to the outer peripheral side. Those who are slower, but for the sake of convenience, do not switch the above-mentioned number of rotations to observe the waveform. Target area # 1 (the second area from the inner peripheral side) as the target, and the lower part of the figure is the optical disc (the 12th The waveform in the inner circumferential direction of the figure (number 400) is displayed in order from the bottom: the tracking area TE monitoring signal 565-10-1564 when the second groove (area # 〇 之 # 1 564 track) in the inner circumferential direction of the domain boundary is tracked, and the groove (area # 0 之 # 1566 magnetic) that traces to the area junction Tracking) TE monitoring signal 565-0-1564, TE monitoring signal 565-1-0 when tracking to the innermost groove (area # 1 ## track) of area # 1, and tracking area # 1 TE monitoring signal 565-1-2 when the second groove (area # 1 to # 2 track) from the inner peripheral side is tracked to the groove in the center of the radius direction of area # 1 (area # 1 to # 782 magnetic. Track) TE monitoring signal 565-1-782, TE monitoring signal 565-1-1564 when tracking the second groove from the outer periphery of the area (area # 1 of # 1564 magnetic track) TE track # 565 · 0 · 1566 when tracking to the outermost groove (area # 1 to # 1566 track) of area # 1, and to the innermost circumference of area # 2 adjacent to the outer side Τε monitoring signal 65 reverse when groove (area # 2 of # 0 track): 2. In the emergence area # 0 pan PIDL (laser light spot is formed on the outer peripheral side) This paper scale applies Chinese National Standard (CNS) Α4 Specifications (210X297 male) (Please read the note on the back first Please fill in this page again) -Order-: Line 丨 -27 · 586112 A7 B7 V. Description of the invention (W) Swing is equivalent to the wave-shaped part when the PID hole is located at the position of 1/2 track of the center of the track) And the time position of the PIDG (wave spot when the laser spot is oscillated toward the inner peripheral side corresponding to the PID hole array portion at the position held by 1/2 of the magnetic track center) (the PID hole position of area # 0) Noise waveforms △ CS-O and ^ CS-2 caused by the deformation of adjacent grooves in area # 1 were observed above, but TE monitoring signals 565-1-782 in the center of the area were not observed. Noise waveform caused by adjacent groove deformation. Further, as the area # 2 closer to the outer peripheral side adjoining area, an edge in the opposite direction to the noise waveform ACS-O caused by the deformation of the adjacent groove from the inner peripheral side appears at the PID hole position of the area # 〇. △ CS-1566 caused by adjacent groove deformation. In addition, although it is not clearly shown in the figure, it can be confirmed that the closer to the regional boundary, the more disordered the above-mentioned symmetry of PIDL and PIDG is. Figure 14 shows the noise waveform caused by the deformation of the adjacent grooves (the size and direction of △ CS-0, △ CS-2, and △ CS-1566 in Figure 13). It can be confirmed that ... Deformation occurs at adjacent grooves with a maximum equivalent to plus or minus 15 nm. In addition, based on this data, a correction table as shown in Figure 7 above can be derived. Figure 15 is a comparison of the above evaluation device (Figure 12). Waveform of specific rotation angle position of te monitoring signal (No. 565 in Fig. 12) when evaluating a DVD-RAM disc produced in the state of performing adjacent groove deformation correction and PID hole position displacement correction (CAPA misalignment correction) The figure, specific method and horizontal axis are the same as those in the above Figure 13. The adjacent groove deformation system of the TE monitoring signal 56 ^ -1-782 and the above Figure 13 are in accordance with the Chinese National Standard (CNS) A4 specification (210X297). (Please read the precautions on the back before filling in this page). Order 丨 -28- 586112 A7 __B7_ V. The form of the invention description (26-) is also completely unobservable, and the TE monitoring signal v 565 is hardly observed △ CS_0 of -1-0, △ CS-2 of TE monitoring signal 565-1-2, And TE monitoring signal 565-1-1566, △ CS · 1566.

The symmetry between the upper and lower directions of the W and PIDL waveforms and PIDG waveforms has also been greatly improved, and it can be confirmed that the PID hole array is arranged at a position symmetrical to the center of the track. m When the recording film of the DVD-RAM disc used here is peeled back to the state of the disc substrate and observed, it can be confirmed by waveform observation that adjacent groove deformation correction and PID hole position displacement correction are performed. Status person. Next, a description will be given of an embodiment corresponding to recording and reproduction with higher density. Fig. 16 is a pattern diagram showing the relationship between the cross-sectional structure of a compact disc and the laser beam of a DVD-RAM disc and a magneto-optical (MO) disc specified by international standards. The recording layer of the first substrate 500A with a thickness of tO (0.6 mm in the case of DVD-RAM) (a layer formed by sputtering a recording member) and the recording layer of the second substrate 500B with a thickness of t0 Adhesive layers for relative merging are bonded together (in the case of a single-sided recording disc, the second substrate 500B is a blank substrate that uses t0 for the plate without any treatment). The laser beam 554 for recording and reproduction is irradiated from the substrate side, and the function of the objective lens 558 is used to maintain the focal length f to focus on the recording layer on the irradiation surface side. This can minimize the scratches and dust on the surface of the disc, and keep a sufficient distance between the lens surface and the light% surface. It is confirmed that the Chinese national standard (Norwegian) A4 standard (21) is used as the paper size. 〇 > < 297 mm) ............................. ........... Fate (Please read the notes on the back before filling out this page) -29- 586112 A7 — _ B7 V. Description of the invention (27 _) The reliability of the media. Figure 17 shows the relationship between the focal length f and the number of openings (NA) of the objective lens 558. The length of the circular flat light of radius r converged at an angle up to the intersection is the focal length f. The number of openings is a sine function (na = ^ θ) of the angle 0, so the focal length f can be expressed by the following formula! Calculation (In addition, in order to improve the calculation accuracy, it is necessary to add the refractive index of the substrate member, etc.). [Number 1] / = {fe) 'r2. In addition, the light spot size ω of the light collecting surface is generally expressed by the following formula 2. That is, it is proportional to the wavelength λ of the laser light and inversely proportional to the number of openings NA. [Number 2] Figure 18 of NA is a general table, assuming the relationship between the number of openings NA and focal length f when the radius r of the incident laser beam towards the lens is 2mm, and the names and wavelengths of the specific examples and Light spot diameter ω and so on. F is 4.6mm when NA = 0.4, taking a representative example as a CD-R (rewritable optical disc) as an example, its wavelength is 830nm, and the spot diameter ω is 2β1 # m. When NA = 0.55, f = 3 mm, wavelength λ is 780 nm, and light spot aperture ω is 1.4 / z m. The DVD-RAM has a wavelength λ of 650 nm and a spot diameter ω of 1.1 · m. In addition, the combination of the next generation of optical discs under development with a high να lens blue laser can reduce the diameter of the light spot to 1.1 # m, in order to achieve a higher density disc. However, at this time, the focal length f is shortened to 12 mm, and the paper size applies the Chinese National Standard (Which) A4 specification (21 × 297 mm) 4 ……… Order ……: 蠊 (Please read the precautions on the back before filling (This page) -30- 586112 A7 _ _B7_ 5. The description of the invention (28 _) makes it impossible to achieve the structure of the aforementioned Figure 16. Here, a method of attaching a thin protective layer to a recording layer of a substrate and irradiating a laser light spot for recording and reproduction from the protective layer side is studied. Figure 19 is a schematic diagram of the cross-sectional structure of a disc corresponding to a high NA lens. A surface recording layer and a B surface recording layer of a multilayer recording film member are laminated on both sides of a two-sided forming substrate (replication) 600 having a thickness of tO, and a thickness td (such as 0.1 mm) is pasted on the side of the A surface recording layer. A-side protective layer 601-A made of transparent resin, and a transparent resin B-side protective layer 600-B of the same thickness is pasted on the opposite side. The recording and reproducing light spot is such that the laser beam 554 is irradiated from the protective layers 600-A and 600-B through the high NA objective lens 558-h. In this case, the focal length f is i.2 mm in the example of FIG. 18 where NA = 0.85. Fig. 20 is a flowchart showing the sequence of the above-mentioned high NA corresponding optical disc process corresponding to CAPA misalignment and deformation correction of adjacent grooves. The above-mentioned CAPA misalignment and deformation of adjacent grooves have been described previously because the substrate is deformed (warped) due to the heat generated by the extinction step of the recording layer. In addition, the technique of simultaneously forming (reducing) the film on both sides of the single-disc structured disc shown in FIG. 19 is extremely difficult at the current technical level. Therefore, the following description is based on the premise that the film is formed on one side in sequence . First, the glass master used for the first film formation surface (assuming A surface) is made into 611-A, and then the first film formation surface (A surface) is made into 612-A with a punch. On the other hand, a glass master for the subsequent film formation side (assume b side) is made into 61U-B, and then a punch for the subsequent film formation side (] 3 side) is made into 612-B: Here, in The above-mentioned glass master used for side b as the paper standard is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page) Order-: Line · -31- 586112 A7 B7 5 Explanation of the invention (29 _) The correction amount of CAPA misalignment and adjacent groove deformation during the original disc cutting performed in step 611-B is the correction when the original disc cutting performed in step 611-A is made with the glass original disc used in the above A surface. When the quantity is compared, it is set to a relatively small value (or no correction). Using the two punches prepared in the above-mentioned stamping tool creation steps 612-A and 612-B, a double-sided molded replica substrate is manufactured (step 613). At this time, a mark is applied to the person who can visually see which side is the first to form the film (basically, it is applied outside the outermost frame when cutting the original disk). The preceding film-forming surface of the two-sided molded replica substrate is installed in a stamping device in a state where it can be sputtered, and the preceding-side side film sputtering step 614 is performed. Then, the above-mentioned, two-sided molded replica substrate is reversely mounted on the sputtering substrate. The device, and the opposite side film is sputtered (step 615). Subsequently, a protective layer forming step 616 of a thin resin (0.1 mm in the embodiment) of the transparent resin is formed on both sides of the above-mentioned completed copying substrate, and it ends after finishing and checking step 617. In addition, in the form of the high-NA-compatible optical disc, it was also confirmed that the film was formed on the one-sided molded replica, and after the protective layer was applied, the 2 animal husbandry was back-to-back pasted (with the s recording layer and the protective layer facing outward). Achievable. Furthermore, in the form of a four-layer laminated disc like the one-sided two-layer recording method, it has been confirmed that the CAPA · distortion correction amount and adjacent groove deformation correction are effective methods. Fig. 21 is a cross-sectional structural model diagram of another example of a high NA lens corresponding to an optical disc. In this example, an A-side recording layer and a Λ-side protective layer 601-a are sequentially formed on one side of the substrate 600, so that the two sides of the substrate 600 are located inside each other, and are bonded together by adhesion. The disc also has a protective layer 601. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling this page)

-32- 586112 A7 _____B7 V. Description of the invention.) The side is illuminated with a laser beam 554 for recording and reproduction. In the optical discs of the foregoing embodiments, the substrate can be made of, for example, polycarbonate resin, epoxy resin, polyetherimide resin, polyether resin, polyphenylene sulfide resin, polyacrylate resin, polyetherketone resin, and polyether.胯 resin, polymethylpentene resin, polystyrene resin, polymethyl methacrylate resin, amorphous polyolefin resin, etc. As the phase-change type recording layer, for example, Sb-Sc-based alloy, Ge-Sb-Te-based alloy, Ag-In-Sb-Te-based alloy, and In-Sb-Te-based alloy are used. As the magneto-optical recording layer, a Tb-Fe-Co-based alloy is used. The protective layer uses, for example, a UV-curable resin. The ultraviolet curable resin is composed of organic compounds such as neo-pentyl ethylene glycol acrylate, hexanediol diacrylate, free radical polymerization type, and ionic polymerization type. Multifunctional monomers such as trimethylolpropane triacrylate, pentaerythritol triacrylate, or a mixture of monofunctional monomers such as lauryl acrylate, ethyl ethyl hexyl acrylate, etc. Add dibenzo-, benzyl diketal, Made from light initiators such as toluene. Adhesives can be used, such as: acrylic resin, poly (hydrocarbon resin), polyparaben resin, polycarbonate resin, epoxy resin, ethyl baking-vinyl acetate copolymer, and ultraviolet curing resin, etc. . When corresponding to a high-density recording and reproducing disc, the shortest hole length should be between 0.13 to 0.23 #m, and the track pitch should be within the range of 0.16 to 0.33 // m. In addition, when the adhesive layer or the protective layer and the recording layer are peeled off from the optical disc unit manufactured in the embodiment described so far, when the waveform is observed with an evaluation device (circle 12), it can be confirmed that CAPA error correction and adjacency are applied. Slot correction This paper size applies to China National Standard (CNS) A4 (210X297 mm) ...........: installed ... ......... ΤΓ …… ........ line (please read the precautions on the back before filling this page) -33- 586112

Condition person. (Please read the precautions on the back before filling this page.) According to this embodiment, each of the laminated discs and veneer discs is bounded by the inner peripheral side area with 256 tracks and the outer peripheral side area with 256 tracks. “Period” is the period during which the PID pre-holes have a lot of displacement. Before the hole position is corrected by displacement, or the groove is read, the displacement correction can make the center of the wobble track of CApA format and the groove (guide groove). The center is the same, and the shape of the adjacent grooves is reduced, so a 47GB DVD-RAM disc with both tracking and recording stability can be realized. [Effects of the Invention] According to the present invention, the optical discs that are heated and ordered during the manufacturing process of an optical disc that is divided into regions and has a structure that can detect swing track error detection and squeeze track error can be eliminated. Therefore, the manufacturing time can be shortened, and the effect of providing an inexpensive and highly reliable optical disc unit can be exhibited. [Brief description of the drawings] Fig. 1 is a schematic block diagram of a disc master cutting system. Figure 2 is a functional block diagram of the formatter. Figure 3 shows the function square circle of the bias correction circuit. Figure 4 is a flow chart of the formatter operation. Fig. 5 is a diagram for displaying the exposure state of the original disk and the output waveform of the formatter in a conventional manner. Fig. 6 is a graph showing the exposure state of the original disc to which the skew correction is applied and the output waveform of the formatter. Fig. 7 is a graph showing an example of a correction circle for adjacent-to-slot deformation. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -34- 586112 A7 ____B7 _ V. Description of the invention (32 _) Figure 8 is a schematic diagram of the dvD-RAM unit used to explain the problem. Fig. 9 is an explanatory diagram of the positional displacement of the physical address information (piD) section and the deformation of the adjacent groove. Fig. 10 is an explanatory diagram of position displacement correction and adjacent groove deformation correction of the physical address information (PID) section. FIG. 11 is a flowchart of manufacturing steps of a DVD-RAM disc. Fig. 12 is a functional block diagram of an evaluation device for a DVD-RAM disc. Figure 13 is a waveform diagram of a DVD-RAM disc created in a conventional manner. Fig. 14 is a line diagram of the adjacent deformation variables of a DVD-RAM disc made in a conventional manner. Fig. 15 is a waveform diagram of a DVD-RAM disc made in the manner of the present invention. Fig. 16 is a schematic diagram showing the relationship between the cross-sectional structure of a bonded optical disc and the light spot. FIG. 17 is an explanatory diagram showing the relationship between the focal length f and the number of lens openings (NA). FIG. 18 is a graph showing the relationship between the number of openings and the focal length, the wavelength λ, and the spot diameter ω. Fig. 19 is a schematic diagram showing a cross-sectional structure of a high NA lens in response to a disc. FIG. 20 is a flowchart showing the manufacturing steps of the high-NA response to the optical disc. Fig. 21 is a schematic diagram showing the cross-sectional structure of another high NA lens to the optical disc. [Explanation of the reference numerals in the figure] ~ This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page) • Sentence 丨: Line 丨 -35 · 586112 A7 B7 V. Description of the invention (33 _) 100 ... formatter 101 ... AOM drive signal (please read the precautions on the back before filling this page) 102 .. .AOD drive signal 103 ... personal computer 104 ... A-side frequency synthesizer 105... B frequency synthesizer 106… program controller 107... A surface memory controller 108... A surface memory group 109... B surface memory controller 110... B surface Memory group 112, 113, 333 ... DA converter (DAC) 115, 121 ... Output buffer amplifier 116 " .A-CHCK (channel lock for A side cutting) 117 " .B-CHCK (channel lock for B side cutting) 123… plus signal 124… modulation signal 200 .. .LCM (laser cutting machine) 201 .. .laser light source 202 ··· AOM (sound optical modulator) 203..AOD (sound optical deflector) 204… moving mechanism 205 ··· spindle mechanism 206 ... LCM controller, this paper size applies Chinese National Standard (CNS) A4 specification (210X297 cm) -36- 586112 A7 B7 34 V. Description of the invention 250 ... Cutting the original disc 300 ... Deviation correction circuit (Please read the precautions on the back before filling this page) 301 ... Correction of the deviation signal 3 10 ... Adjacent on the outer side With byte counter 3 11 ... outer peripheral side adjacency correction position detection circuit 3 13 ... Now the area physical address information (PID) position detection circuit 3 17 ... the inner peripheral side adjacency correction position detection circuit 318 ... Counting table 320 ... Now area byte counter 321 ... Now area sector counter 322 ... Now area track counter 323 ... Area counter 324 ... Correction of track identification circuit 326 ... Hole position displacement correction table 327 … Data Sector 329 for Hole Position Displacement ... Adjacent Groove Deformation Correction Table 330 ... Adjacent Groove Deformation Data Sector 331 ... Correction Table Switching Data Sector 332 ... Area Dependency Correction Dividing circuit 400 ... disc unit 400-S ... disc unit film surface 401 ... disc index 402 ... physical address information (PlD) 402-L ... Address Information (PID) This paper size applies to China National Standard (CNS) A4 Grid (210X297 mm) -37- 586112 A7 B7 V. Description of the invention (35 _) 402-G. ·· Groove address Physical address information (PID) 403 ··· Groove (Please read the note on the back first Please fill in this page again.) 404. ·· Spine rail 500A ... A-side substrate 500B ... B-side substrate 551 ··· Spindle motor 553 ... Semiconducting laser 554. · Semiconducting laser beam 555 ... half mirror 557 ... 2D actuator 558 ... objective lens 558h ... high NA objective lens 559 ... cut detector 561 ... arithmetic circuit 562 ... tracking control circuit 563 ... automatic Focusing circuit 565 .. TE monitor signal 600 ... Substrate 601 ... Protective layer 601-A ... A-side protective layer 601-B ... B-side protective layer This paper applies the Chinese national standard (CNS) ) A4 size (210X297 mm) -38-

Claims (1)

586112 A8 B8 C8 D8 6. Application for patent application 1. A device for manufacturing optical disc masters, which includes: a laser light source; (please read the precautions on the back first, and then read this page). Rotating mechanism is used to preset the speed Those who cut the original disc in a rotating disc shape, the surface of the original disc is coated with a photosensitizer that reacts with the wavelength of the laser beam emitted by the laser light source; an objective lens is used to converge the laser beam emitted by the light source onto Those on the photosensitive surface of the cutting original disk are dot-shaped; the moving mechanism is used to move the laser light spot after the focusing at a predetermined speed in the radial direction of the cutting original disk, and a modulation signal generating component is used to Pre-formatted rails are used to generate pre-slot signals and pre-hole signals for physical address information (PID); light modulation components are used to control and input the output signals of the modulation signal generation components; biased signal generation components, A component having a predetermined format for generating time information, direction information, and size information for shifting the laser light spot in a radial direction of the cutting original disk And, a component for correcting the displacement of the physical address information (PID) hole position; and a light deflection component for controlling and inputting the output signal of the deflection signal generating component; wherein the above deflection signal generating component is added and added There are the following components, namely: one to identify the majority of the rotation angle direction range of the physical address information (PID) of the inner hole adjacent area before the Xinxin cave; one to predict the physics of the hole adjacent area before the hole Address This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) '-39- 586112 A8B8C8D8 6. Most of the range of rotation angle direction of patent application information (PID); and one for correction in adjacent areas Deformed adjacent grooves. 2. If the optical disc original disk manufacturing device of item 1 of the scope of patent application is provided with an adjacent groove deformation correction data table for correcting the above-mentioned adjacent groove deformation, the adjacent groove deformation correction data table is selected to match the optical disk original disk. An optical disc master is manufactured after the adjacent groove deformation correction data matching the manufacturing conditions. 3. A kind of optical disc original disk manufacturing device, which includes a laser light source; a rotating mechanism that rotates a disc-shaped original disk at a predetermined speed, and the surface of the original disk is coated with the light emitted by the laser light source; Photosensitive agent that responds to the wavelength of the laser beam; The objective lens is used to condense the laser beam emitted from the light source onto the photosensitive surface of the cutting original disk into a point shape; the moving mechanism is used to condense the above The laser light spot moves at a predetermined speed along the radial direction of the cutting original disk; the modulation signal generating member is used to generate the pre-groove signal for the guide rail and the pre-hole signal for the physical address information (PID) in a predetermined format; The variable component is used to control and input the output signal of the modulation signal generating component; The biased signal generating component is to generate a period of time information in a predetermined format that causes the above-mentioned laser light spot to shift toward the radius of the cutting original disk , Direction information and size information, and components used to correct the displacement of the physical address information (PID) hole position; and this paper is applicable National Standard (CNS) A4 specification (210X 297 mm) • 40 · 586112 A8 B8 C8 ___ D8 VI. Patent application scope Light deflection component is used to control and input the output signal of the deflection signal generating component; (please first Read the precautions on the back and fill in this page again.) The above-mentioned bias signal generating component is added with the following components, namely: One is used to identify the number of magnetic tracks passing from the junction of the area on the side of the cutting start point to the current point. Track number identifying means; a remaining track number identifying means for identifying the number of remaining tracks up to the boundary of the cutting end side area; and a track number identifying means for the two types of tracks The correction function of the random function of the data obtained by the identification component is decremented or incremented, and the memory component is counted. 4. An optical disc original disk manufacturing device comprising: a laser light source; a rotating mechanism for rotating a disc-shaped original disk at a predetermined speed; the surface of the original disk is coated with the light emitted by the laser light source; Photosensitive agent that responds to the wavelength of the laser beam; An objective lens is used to condense the laser beam emitted from the light source onto the photosensitive surface of the cutting original disk to form a dot; a moving mechanism is used to converge the above-mentioned The laser light spot moves at a predetermined speed in the radial direction of the cutting original disk; the modulation signal generating component is used to generate the pre-groove signal for the guide rail and the pre-hole signal for the physical address information (PID) in a predetermined format; the bias signal is generated The component is a light modulation component for controlling and inputting the output signal of the modulation signal generating component; a component for pre-determining that the paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) -41 -586112 A8 B8 C8 _______D8 VI. Generation of patent application format format makes the above laser light point in the direction of the radius of the above-mentioned cutting original disk, and the information of the offset time A component of direction information and size information, and a component for correcting the displacement of the physical address information (PID) hole position; and a light deflection component for controlling and inputting the output signal of the deflection signal generating component; where The above-mentioned bias signal generating component is supplemented with the following components, namely: a zone counter for counting the number of zones passed from the starting point of cutting to the present point; a zone for memorizing the data using the zone counter A zone coefficient memory component of the function; and a division circuit for dividing the zone coefficient correction component into a divisor. 5. If the optical disc original disk manufacturing device of item 3 or 4 of the scope of patent application is applied, it is provided with a component for freely updating the memory content of the above-mentioned correction function memory component and the above-mentioned area coefficient memory component. 6 · —A method for manufacturing a master disc for optical discs, comprising the following steps: making the surface coated with a wavelength phase of a laser beam radiated by a laser light source, and reacting a photoreceptor with a disc-shaped cutting disc to a predetermined Speed rotation; converging the laser beam emitted from the laser light source onto the photosensitive surface of the cutting k original disk into a point shape; moving the converged laser light point at a predetermined speed in the radial direction of the cutting original disk; and cutting at the above The pre-slot signal for the guide rail and the pre-hole signal for the physical address information (PID) are formed on the original disk; This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before reading 蜞) (Write this page)-order · • line · -42 · 586112 AS B8 C8 D8 patent application scope ----—. I »Those with a recording film. 13. An optical disc which has a redundant recording film formed on a substrate for an optical disc in the item (1) of the patent application. 14. For the optical disc No. 1 in the scope of patent application, it is a conformer. 15. The optical disc of item n of the patent scope, wherein the recording film of the substrate is provided with a protective layer, and the protective layer is irradiated with a laser light spot for recording and reproduction. ............. Installation ... (Please read the precautions on the back before filling out this page), τ: line 丨 This paper size applies to China National Standard (CNS) A4 Specification (210X297 Male) -44-