585992 五、發明說明（3) 一 -- 部之摩擦力而有寸動（stick —slip)的現象產生，因此本發 =j用複數個空氣軸襯，分別連接上述第一驅動源與上述 第一連桿、上述第一驅動源與上述第二連桿、上述第二驅 動源與上述第三連桿以及上述平台與上述第一連桿、上述 第二連桿和上述第三連桿。 此外’為彌補結構之剛性問題，本發明更包括至少一 第一空氣軸承，設置於上述平台與上述基座之間；至少一 ，亡空氣軸承，設置於該第一連桿與該基座之間；以及至 少一第三空氣軸承，設置於該第二連桿與該基座之間。585992 V. Description of the invention (3) The phenomenon of stick-slip caused by the frictional force of the part. Therefore, the present invention uses a plurality of air bushes to connect the first driving source and the first A link, the first driving source and the second link, the second driving source and the third link, and the platform and the first link, the second link, and the third link. In addition, in order to compensate the structural rigidity problem, the present invention further includes at least a first air bearing disposed between the platform and the base; at least one dead air bearing disposed between the first link and the base And at least one third air bearing disposed between the second link and the base.
^，為有效控制平台之二維移動而不轉動，方便定位，則 =一連桿以及第二連桿需保持平行，亦即第一連桿與第二 &道ΐ述，連桿式平面定位機構將兩個驅動源組立在單一 ’與傳統兩正交導軌的系統比較，时了-組 3 =導弓:軌道：基本上已經具有成本的㈣再則因 優熱又B :導引軌道的垂直纟，在組立時又多了便利性的 Π剛i 及連桿下緣以空氣軸承支樓]曾加重力方 =二’可完全適合平台載物之考量1配合空氣軸襯 = 之旋轉元件，整個平台在做二維平面運動時， 的定位精度。 充寸動現象，利於次微米等級以上 為了讓本發明之目的 下文特舉一較佳實施例， 下： 、、特徵、和優點能更明顯易懂， 並配合所附圖示，作詳細說明如^, In order to effectively control the two-dimensional movement of the platform without rotation, and facilitate positioning, = a link and the second link need to be kept parallel, that is, the first link and the second & road description, the link type plane The positioning mechanism compares the two drive sources in a single system with the traditional two orthogonal guide rails. It is time-Group 3 = Guide Bow: Track: Basically already cost, and then again because of excellent heat and B: Guide Track Vertical 纟, which has more convenience when it is assembled. Π Gang i and the lower edge of the connecting rod are supported by air bearings.] Zeng added the gravity side = 2 ', which can be completely suitable for the consideration of the platform's load 1 with the air bushing = rotation. Components, the positioning accuracy of the entire platform when doing two-dimensional plane motion. The phenomenon of sufficient movement is conducive to the sub-micron level and above. For the purpose of the present invention, a preferred embodiment is given below. The following features, features, and advantages can be more clearly understood, and will be described in detail with the accompanying drawings.
585992585992
實施方式Implementation
如第3圖所示，為本發明之一平面定位機構的立體 圖。此一平面定位機構3包括：基座3 〇、線性導引滑執 31、第一驅動源32、第二驅動源33、第—連桿34 /第二連 桿35、第三連桿36、平台37、複數個空氣軸^38(air 一 bushing)以及複數個空氣軸承39。其中，基座3〇上設置有 一線性導引軌31，線性導引軌31上有第一^動源32=及第 二驅動源33 ’用以在線性導引軌31上移動，進而透過第_ 連桿34、第二連桿35以及第三連桿36來驅動平台37在平面 上移動；而第一連桿34以及第二連桿35為保持平行移動， 以避免平台37在移動過程中轉動，故第一連桿μ以及第二 連桿3 5長度相等。再如第4圖所示，為本發明實施例之側 視圖；平台37下方，更設置有光學二維尺讀頭4〇，以及與 其搭配的光學二維尺41，用以幫助平台37之定位，且由^ 此一光學二維尺讀頭40以及光學二維尺41之設置直接位於 平台3 7下方，則阿貝誤差縮減至最小。As shown in Fig. 3, it is a perspective view of a planar positioning mechanism according to the present invention. This planar positioning mechanism 3 includes a base 30, a linear guide slider 31, a first driving source 32, a second driving source 33, a first link 34 / second link 35, a third link 36, The platform 37, a plurality of air shafts 38 (air-bushing), and a plurality of air bearings 39. The base 30 is provided with a linear guide rail 31. The linear guide rail 31 has a first moving source 32 = and a second driving source 33 ′ for moving on the linear guide rail 31, and then through the first _ The connecting rod 34, the second connecting rod 35, and the third connecting rod 36 drive the platform 37 to move on the plane; and the first connecting rod 34 and the second connecting rod 35 keep parallel movement to avoid the platform 37 from moving during the movement. Rotate, so the first link μ and the second link 35 are equal in length. As shown in FIG. 4, it is a side view of an embodiment of the present invention. Below the platform 37, an optical two-dimensional ruler reading head 40 and an optical two-dimensional ruler 41 matched therewith are used to help the positioning of the platform 37. If the arrangement of the optical two-dimensional ruler read head 40 and the optical two-dimensional ruler 41 is directly below the platform 37, the Abbe error is minimized.
又，本發明使用之空氣轴襯3 8，設置於各轉動關節 間，可減少元件間轉動之摩擦力，且空氣軸承3 9設置於平 台37、第一連桿34、第二連桿3 5及第三連桿36下方與基座 3 0之間，在盡量不增加摩擦力之情況下，支撐第一連桿 34、第二連桿35、第三連桿36以及平台37，使得平台37適 宜置物，而第一連桿34、第二連桿35、第三連桿36則不易 因為平台37上置物而變形。In addition, the air bushing 38 used in the present invention is provided between the rotary joints, which can reduce the frictional force of rotation between the components, and the air bearing 39 is provided on the platform 37, the first link 34, and the second link 3 5 And between the lower part of the third link 36 and the base 30, the first link 34, the second link 35, the third link 36 and the platform 37 are supported without increasing the friction as much as possible, so that the platform 37 It is suitable for placing objects, and the first link 34, the second link 35, and the third link 36 are not easily deformed by the objects on the platform 37.
0729-9334TWF(Nl);07910019;RITA.ptd0729-9334TWF (Nl); 07910019; RITA.ptd
585992 五、發明說明（5) 如第5A-5C圖所示，為太恭 之 意圖，·其中叫作動之示 :方向：轴為垂直射相的方向；a月二性導以滑軌31 第-驅動源32以及第二顧動㈣，·：广表示本發明 明之第一連桿34、第二連 以 e f刀別代表本發 僅移動而不轉動，因而保持底邊與χ轴平。在^平面上僅 因a以及b被限制於在X軸上滑動，故當a =離且相同方向在X軸上平移到a，以及b， == 所不（為“圖面起見，將a、b以質點表示 第、: 一，段），g在γ軸向的位置不變，但獲得一個X軸向=ς 移篁，再如第5C圖所示，當a以及b以相同距反 «軸上平移到a，以及b，時，則g «軸向的位置不相變反，方向 獲得-個Y軸向的y位移量。0此控制a及匕沿 動 即可得到所需之平面定位。 之運動 〇〇上述實施例之第一連桿、第二連桿以及第三連桿雖以 早桿組成為例，但為增加結構之剛性，亦不限定複數 桿分組成第一連桿組、第二連桿組以及第三連桿組； 唯，若為防止平台產生轉動，則第一連桿組與第二連浐 與驅動源及平台之兩個樞接間的長度需相等，以保:、 一平面機構作動時，第一連桿組與第二連桿組平行。、 、此外，本發明之線性導引滑執亦可以以多段線性滑轨 排成一直線方式組成，如第6圖所示，為簡化圖式起 與第3以及4圖相同之元件，仍沿用其標號；其中，線性導 0729-9334TW(Nl)；〇791〇〇19;RITA.ptd 585992 五、發明說明（6) 引滑軌係由一第一線性導引滑執3〗1以及一第二線性導引 滑軌312所組成，則第一驅動源32以及第二驅動源33分別 設置於上述第一線性導引滑執3 1〗以及一第二線性導引滑 執312，唯第一線性導引滑執311以及一第二線性導引滑執 3 1 2之組立方式為一維直線度之調校，仍遠優於習知兩枝 正交滑軌之垂直度調校。 雖然本發明已以較佳實施例揭露如上，然其並非用以 發明何熟習此技藝者’在不脫離 和範圍内’當可作些許之更動與 之精神 範圍當視後附之申請專利範圍所界定者G本發明之保護 第10頁 0729-9334TW(Nl) ;07910019 ;RITA. ptd 585992 圖式簡單說明 第1圖為一種習知平面定位機構示意圖； 第2圖為另一種習知平面定位機構示意圖； 第3圖為本發明平面定位機構之一實施例立體圖； 第4圖為本發明平面定位機構之一實施例側視圖； 第5A-5C圖為本發明平面定位機構作動之示意圖； 第6圖為本發明平面定位機構之另一實施例俯視圖。 符號說明 I、 2〜平面定位機構； 1 0、20〜基座； II、 2 1〜第一滑軌； 1 2、2 2〜第二滑執； 13、24〜平台； 23〜第三滑軌； 3〜平面定位機構； 30〜基座； 31、311、31 2〜線性導引滑執； 3 2〜第一驅動源； 3 3〜第二驅動源； 3 4〜第一連桿； 3 5〜第二連桿； 36〜第三連桿； 37〜平台； 3 8〜空氣軸概；585992 V. Description of the invention (5) As shown in Figures 5A-5C, it is the intention of being too respectful, which is called the action indication: Direction: the axis is the direction of the vertical shooting phase; The driving source 32 and the second driver are widely indicated: the first link 34 and the second connected ef blade of the present invention represent that the hair only moves without rotation, so the bottom edge is kept flat with the χ axis. In the ^ plane, only a and b are restricted to slide on the X axis, so when a = away and the same direction is translated to a on the X axis, and b, == (for the sake of "drawing, a, b represent the first and the second by the mass point), the position of g in the γ axis is unchanged, but we get an X-axis = ς shift 再, and then as shown in Figure 5C, when a and b are at the same distance When translating on the axis «to a and b, the position of the g« axis does not change, and the direction is obtained by a y-axis amount of y displacement. 0 This control can be achieved by a and dagger movement The positioning of the plane. The first link, the second link, and the third link of the above embodiment are taken as an example of the early rod composition, but in order to increase the rigidity of the structure, the plural rods are not limited to the first component. The link group, the second link group, and the third link group; However, if the platform is to prevent rotation, the length between the first link group and the second flail and the two pivot joints of the driving source and the platform needs to be Equal to ensure that: 1. When a planar mechanism is actuated, the first link group is parallel to the second link group. In addition, the linear guide slider of the present invention can also be linear in multiple stages. The slide rails are arranged in a straight line. As shown in Fig. 6, to simplify the drawing, the same elements as those in Figs. 3 and 4 are still used. The linear guides are 0729-9334TW (Nl); 0791〇〇 19; RITA.ptd 585992 5. Explanation of the invention (6) The guide rail is composed of a first linear guide slider 3 and 1 and a second linear guide slider 312, then the first drive source 32 and The second driving source 33 is respectively provided at the first linear guide slider 31 and a second linear guide slider 312, except that the first linear guide slider 311 and the second linear guide slider 311 The assembly method of 3 1 2 is the one-dimensional straightness adjustment, which is still far better than the vertical adjustment of the two orthogonal slide rails. Although the present invention has been disclosed above in a preferred embodiment, it is not used for Anyone who is familiar with the art of this invention 'without departing from the scope' should be able to make some changes and the scope of the spirit should be treated as defined by the scope of the appended patents. Protection of the present invention, page 10 0729-9334TW (Nl); 07910019; RITA. Ptd 585992 Brief description of the diagram Figure 1 is a schematic diagram of a conventional planar positioning mechanism; Figure 2 is A schematic view of a conventional planar positioning mechanism; Figure 3 is a perspective view of an embodiment of a planar positioning mechanism of the present invention; Figure 4 is a side view of an embodiment of a planar positioning mechanism of the present invention; Figures 5A-5C are planar positioning mechanisms of the present invention Schematic diagram of operation; Figure 6 is a plan view of another embodiment of the planar positioning mechanism of the present invention. Symbols I, 2 ~ Planar positioning mechanism; 10, 20 ~ Base; II, 2 1 ~ First slide rail; 1 2 2, 2 ~ second slide; 13, 24 ~ platform; 23 ~ third slide; 3 ~ plane positioning mechanism; 30 ~ base; 31, 311, 31 2 ~ linear guide slide; 3 2 ~ first A driving source; 3 3 to a second driving source; 3 4 to a first link; 3 5 to a second link; 36 to a third link; 37 to a platform; 3 8 to an air shaft;
0729-9334TWF(Nl),07910019;RITA.ptd 第 11 頁 585992 圖式簡單說明 3 9〜空氣軸承； 4 0〜二維尺讀頭 4 1〜二維尺。 ❿0729-9334TWF (Nl), 07910019; RITA.ptd Page 11 585992 Simple explanation of drawings 3 9 ~ air bearing; 4 0 ~ two-dimensional scale read head 4 1 ~ two-dimensional scale. ❿
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