TW584713B - Positioning system with multiple bar mirrors - Google Patents

Abstract

A position measuring system is introduced for measuring a position of a stage positioned on a pedestal. The position measuring system includes a stage mounted on a pedestal in a movable way, at least two adjacent bar mirrors having a joint therebetween disposed on the stage, a first and a second position measuring devices disposed on the pedestal, and a controlling device. When the stage is moved along a first direction, the controlling device uses the two bar mirrors and the first and the second position measuring devices for measuring the moving direction of the stage, and when the first position measuring device passes the joint, the controlling device uses the moving direction measured by the second position measuring device to adjust the moving direction measured by the first position measuring device, which has already passed the joint, and then the controlling device continues to use the two bar mirrors and the first and the second position measuring devices for measuring the moving direction of the stage.

Description

584713 _________ Case No. 92105405_Year __g. Amendment 15 、 Explanation of the Invention (1) Field of the Invention The present invention relates to a positioning system, especially a positioning system provided with multiple strip mirrors for measuring an exposure. The direction of movement of the platform and photomask in the machine. Background Description In the LCD panel manufacturing process, the 'photolithographic process' and the engraving process are used to define various electronic early elements and other optical components (such as color filters) in the LCD panel. The current yellow light process system mostly uses a scanning exposure system to perform the exposure process. Because of the current market demand for large-area liquid crystal display panels, the scanning exposure system is suitable for exposing large-area substrates. Please refer to FIG. 5 ′ FIG. 5 is a schematic diagram of a scanning exposure system. As shown in FIG. 5, the exposure system 100 includes a light source 102, a photomask 104 disposed below the light source 102, and an optical system 106 disposed below the photomask 104, wherein the photomask 104 has A predetermined patterned opening (s 1 it), and the optical system 106 includes a trapezoidal mirroi〇6a, a concave mirror 10.6b, and a convex mirror (convex mirr 〇r) 1 0 6 c is located in a trapezoid Between the mirror 106a and the concave mirror 106b. The exposure system 100 also includes a base 108, a platform 110, which is movably disposed on the base 108, and a substrate 112, which is located at Pedestal 1 1 〇, and flat. 5 584713 --------—_ t ^ _92105405 _ year, month, day, amendment 5. Description of the invention (2) The platform 11 0 is used to carry and move the substrate 11 2 The platform 110 uses a driving device (such as a linear motor) to control the platform 110 to move on the base 108 in an air-floating or magnetic levitation manner, and controls the moving direction of the platform 110 on the base 108. In the following, the month b is based on the position of the measurement platform 110.

Among them, in order to make the platform 110 move according to a predetermined moving direction, a positioning system is required to measure the moving direction of the platform 110 at any time, and the positioning system will transmit the measurement result to a control device, and the control device will The moving direction of the platform 1 10 is adjusted in a timely manner so that the platform 1 10 moves in a predetermined moving direction. Please refer to FIG six, six FIG schematic view showing the positioning of a conventional system. As shown in Fig. 6, a conventional positioning system includes a platform 110, mirrors 11 4 and 11 6 on the platform 110, and laser interferometers 118a and 11 8b installed on the mirror 1 1 4 One side, the laser interferometers 1 2 0 a, 1 2 0 b are mounted on one side of the reflector 11 6, and a control device 1 2 2. The laser interferometers 1 1 8 a and 1 1 8 b are used to measure the position of the platform 1 1 0 on the Y axis, and the laser interferometers 1 2 0 a and 1 2 0 b are used to measure the platform 11 〇Position on the X axis.

As the demand for large-size LCD panel and the dramatic increase in Japan, and therefore the production of large-sized substrate 112 is necessary. At the same time, the platform 1 1 0 in the exposure machine is also enlarged in response to the large-sized substrate Π 2. In order to precisely control the movement direction of the large-sized platform 110, the mirror Η in the positioning system Η 4, 1 1 6 Must also increase in length. However, it is difficult for a current processing grinder technology to obtain a high-quality long mirror. Therefore, it is necessary to find a positioning system that can use short mirrors.

Page 8 584713 Case No. 921 Year 5. Description of the invention (3) Amendment Summary of the invention The object of the present invention is to provide a system with multiple strip reflection > position to solve the aforementioned problem. ^ ^ ^ ^ ^ ^ Brother t 疋 locates a base according to the type and the two rangefinder systems should control the second optical optical measurement optical measurement first optical device will learn distance measurement according to the present system, up to the The shape-respective positioning system device learns the rangefinder and the distance meter and then the distance meter separately to determine the purpose, which includes the operation of placing two adjacent mirrors on the base. It will be negotiated separately to measure the amount of the platform that has been used to measure the joint clam. The preferred platform of the present invention is mounted on the joint with a removable strip mirror to move the embodiment. Place 'a first — and _ and a control device stand along a first direction seat, when the flat is used on the platform, the moving direction of the movement, the movement of the bar and vice versa To correct the pass direction, correct the mirror and that direction. The mirror and the direction, and the set will benefit from the knot, the first tie-type safety platform, the second, the mobile first, when the joint should be used, the first supply one is placed on top, when the optical control, The second one is the control of the light, which is based on the use of a plurality of bar mirrors and optical rangefinders. The measurement is the direction of movement of the platform. The number of strip mirrors m is flat and the size is increased and decreased, and the purpose of mutual correction, distance measurement, and stage position is measured by an optical rangefinder. Therefore, the present invention can be applied to substrates of various test sizes and strip reflections. The length of the mirror need not depend on the size of the substrate

1 ^ · Page 9 584713 _________________ No. 92105405. Rev. ^ _ V. Description of the invention (4) ~ ^ ~~ One is increased and lengthened, so as to avoid the trouble of processing and grinder caused by making long reflectors. Detailed description of the invention Please refer to FIG. 1. FIG. 1 is a schematic diagram of a positioning system according to a first embodiment of the present invention. As shown in FIG. 1, a positioning system includes a platform 0, bar reflectors 14a and 14b provided on one side of the platform 110, and optical rangefinders 18a and 18b installed on one side of the bar reflectors 14a and 14b. On the base,

And a control device 22, and the positioning system further includes a driving device (such as a linear motor) (not shown) for moving the platform 110 along a first party ^. Among them, the optical rangefinders 18a and 18b are moved along the same horizontal line 24, and the strip mirrors 14a and 14b are located on the same horizontal line. In addition, the distance between the joints 26 between the strip mirrors 1 4 a and 1 4 b is di, and the distance between the optical rangefinders 18a and 18b is d2, and d is less than d2. ^ In addition, the length L of the strip mirrors 1 4 a and 1 4 b must be greater than the distance d2 between the optical rangefinders 18 a and 18 b.

Please refer to Fig. 2 (A) to Fig. 2 (D). Fig. 2 (A) to Fig. 2 (d) are schematic diagrams of the method of measuring the position of the platform 110 when the platform 110 moves in the X-axis direction. As shown in Figure 2 (A), when the platform 110 moves in the X-axis direction, the optical rangefinders 1 8 a and 1 8 b first project laser light onto the bar mirror 1 4 b, and the laser light passes through the bar The reflecting mirror 1 4 b reflects and is received by the optical rangefinders 1 8 a and 1 8 b. A signal processing system (not shown) calculates a strip reflecting mirror 1 4b by calculating the projected laser light and the reflected laser light. With optical rangefinder

Page 10 584713 ______ Case No. 92105405 _Year Month Day 倐 丨 Next V. Description of the Invention (5) A ^ The distance between 18a and 18b, and then converted to know the position of the platform 11 on the γ axis. The control device 22 then uses the driving device to control the movement direction of the platform 110 according to the position calculated by the signal processing system.

Next, as shown in FIG. 2 (B), when the platform 1 10 moves in the X-axis direction and the optical rangefinder 1 8 a is about to pass through the joint 26, the control device 2 2 stops using the optical rangefinder 1 8 a to measure the moving direction of the platform 110. As shown in FIG. 2 (C), when the platform 1 10 moves along the X-axis direction and the optical rangefinder 18a completely passes through the joint 26, the optical rangefinder 18a will start to measure the bar reflection. The distance between the mirror 14a and the optical rangefinder 18a, and the control device 22 uses the data measured by the optical rangefinders 18a and 18b to calculate the position of the strip mirror 14a and its position with the optical The relational expression of the distance of the rangefinder 18a, and the data measured by the optical rangefinder 18a is compared with the relational expression to determine whether the moving direction of the platform 110 is correct. That is, the control device 22 will use the movement direction measured by the optical rangefinder 18b to correct the movement direction measured by the optical rangefinder 18a. After the correction, the control device 22 will use the bar mirrors separately. 14a and 14b and optical rangefinders 18a and 18b measure the moving direction of the platform 110. It should be noted that, since the positioning system of the present invention has two mutually correctable optical rangefinders 18a and 18b, even if the strip mirror 14b is not aligned with the strip mirror 14a, the present invention still It can accurately monitor and control the moving direction of the platform 110. Similarly, when the optical rangefinder 1 8 b is about to pass through the joint 26, the control device 2 2 stops using the optical rangefinder 1 8 b to measure the movement of the platform 110.

Page 11 584713. η Amendment No. 92105405 V. Description of the Invention (6) 't Ϊ 2 2 ^ ^ ^ 18b- ^ ^ ^ ^ ^ 4 26ii > ^ fj Device 22 will use the optical rangefinder 18a After the measured Fang Zhuyan jealousy 18b ^ ^ ^ ^ ^ ^ b all passed through the joint 26, the control device followed f ^ using the strip mirror 14a and the optical rangefinder 18a and 8b to measure the moving direction of the platform 1 1 0 . First, please refer to FIG. 3, which is not intended for the positioning system of the second embodiment of the present invention. As shown in FIG. 3, a positioning system includes a platform 110, shaped mirrors 64a, 64b, and 66 provided on one side of the platform 110, and optical distance meters 68 and 70 mounted on the strip mirrors 64a, 641) and 66 on one side of the base and a control device 72. The strip mirrors 6 4 a and 6 4 b are positioned on a horizontal line, and the strip mirror 66 is located on one side of the strip mirror 6 “” 64b, and the height of the strip mirror 66 is lower than the strip The height of the mirrors 64a and 64b. Also, the positioning system includes a driving device (such as a linear motor) (not shown). In addition, the optical rangefinder 68 moves along a first horizontal line 74, and the first horizontal line 74 passes through the strip mirrors 64a, 64b, and 66, and the optical rangefinder 70 moves along a second horizontal line 76. The second horizontal line 76 passes through the bar mirror 64 flag 64b. Please refer to Fig. 4 (A) to Fig. 4 (D). Fig. 4 (A) to Fig. 4 (D) are the positions of the platform i 丨 〇 when the platform 110 moves in the X-axis direction. As shown in Figure 4 (A), when the platform 11 moves along the 1-axis direction, the optical distance meter 68 projects laser light onto the bar mirror 64a, and the laser light is reflected by the bar mirror 64a and is optically measured. The instrument 68 receives, and calculates, based on the calculation of the correction signal processing, a calculation of the emitted light (shown). According to the calculation, the projected laser light and the reflected light are calculated according to the position of the axis 1 in the axis VII. Then the control device 72 will control the position calculated by the platform Γι7 system to use the moving direction of the driving device i i 0. Next, when the optical distance H is not set, when the platform 11 〇 moves in the X-axis direction to start the measurement, = dagger-shaped mirror 64a, the distance measuring device 70 and 72 will use the 10 on the γ axis. position. At the same time, the position measured by the control device 70 and the distance measured by the rangefinder 68 are used to correct the optical rangefinder. Using the optical, optical, and vertical settings, the control device 72 will simultaneously display Figure 4 (c). Therefore, the position of the platform 11 is measured by the meter / 8 and the meter 70. Then, as shown in FIG. 6, when the platform 110 moves in the χ-axis direction to make the optical rangefinder 70 measure the reflecting mirror 66, the control device 72 uses the optical rangefinder to correct the optical position. For the position measured by the rangefinder 68, the control device 72 on the platform 110 will use the optical rangefinder 68 to measure the direction movement position. As shown in FIG. 4 (D), when the platform 110 continues to pass the optical rangefinder 70 along the bar-shaped reflector 64b along the X-axis rangefinder 7, the optical two-center = the measurement platform 110 on the γ axis position. Tongzheng Optical Ranging ϋ 奘 罟 Use the position measured by the optical rangefinder 68 to calibrate 7? Combiner 7 〇 The position set after correction is controlled, 0 Use the optical rangefinder 7 0 To measure the position of the platform 110. In addition, in the second embodiment of the present invention, the positions of the bar mirror and the optical rangefinder can be reversed, that is, the optical rangefinder is installed on the side of the platform 110, and the bar mirror is Installed on the base.

Page 13 584713 Correction

Case No. 92105405 Month _____—----- " — — ~ ——-**** " ^ ~ '~ V. Description of the Invention (8) On the other hand, in the first and In the second embodiment, the number of the strip mirrors can be increased or decreased according to the size of the platform 110. In addition, the first to second embodiments of the present invention take the Y-axis position when the measurement platform 1 is moved along the X-axis direction as an example. Similarly, the positioning system of the present invention can also be used for the measurement platform 11 〇 along the γ-axis. The position of the X axis when moving in the direction. This should be well known to those skilled in the art. In addition, the positioning system of the present invention can also be used to measure the position of the Y-axis when the light army in the exposure system moves along the X-axis direction, and the position of the X-axis when the photomask moves in the Y-axis direction. Compared with the conventional technology, the present invention uses a combination of a plurality of bar mirrors and an optical rangefinder to measure the moving direction of a platform. The number of strip mirrors can be increased or decreased according to the size of the platform, and the position of the platform can be measured by aligning the optical rangefinders with each other. Therefore, the present invention 1 can be applied to substrates of various sizes, and the length of the strip-shaped mirror does not need to be increased as the size of the substrate is increased, thereby avoiding the trouble of processing grinders caused by making long mirrors. The above description is only a preferred embodiment of the present invention, and any equivalent changes and modifications made in accordance with the scope of the patent application of the present invention shall fall within the scope of the patent of the present invention.

Page 14 584713 Case No. 92105405 Amendment Brief description of the drawings Brief description of the drawings Fig. 1 is a schematic diagram of a positioning system according to the first embodiment of the present invention. Figures 2 (A) to 2 (D) are schematic diagrams of the position measurement method of the platform 1 10 when the platform 1 10 moves in the X-axis direction. Figure III a schematic view of a second embodiment of the positioning system according to the present invention. Figures 4 (A) to 4 (D) are schematic diagrams of the position measurement method of the platform 110 when the platform 110 moves in the X-axis direction. FIG. 5 is a schematic diagram of a scanning exposure system. Figure VI is a line schematic of a conventional positioning system. Explanation of symbols in the figure 14a bar mirror 14b, bar mirror 18a optical rangefinder 18b optical rangefinder 22 control device 24 horizontal line 26 joint 64a bar reflector 64b bar reflector 66 bar reflector 68 Optical rangefinder 70 Optical rangefinder 7 2 Control device 74 First horizontal line 76 Second horizontal line 100 Exposure system 102 Light source 104 Photomask 106 Optical system 106a Trapezoidal mirror 106b Concave mirror 10 6c r Convex mirror

IBBI Page 15 584713 ______________ Case No. 92105405_ Simple Modification Illustration 108 Base 110 Platform 112 Substrate 114 Reflector 116 Reflector 118a Laser Interferometer 118b Laser Interferometer 120a Laser Interferometer 120b Laser Interferometer 122 control device

Page 16

Claims (1)

584713 ·· _____________ Case No. 92105405 Amendment Date of Patent Application 1. A positioning system includes: a platform that is movably placed on a base; at least two adjacent ones A strip-shaped mirror is mounted on the platform, and the two shaped-mirrors have a joint; a first optical rangefinder and a second optical rangefinder are respectively disposed on the base; and a control device, Used to control the operation of the positioning system; wherein when the platform moves in a first direction, the control device uses the strip mirrors and the first and second optical rangefinders to measure the platform, respectively Moving direction, when the first optical rangefinder passes the joint, the control device will use the moving direction measured by the second optical rangefinder to correct the first optical rangefinder passing through the joint After the correction of the measured moving direction, the control device uses the strip mirrors and the first and second optical range finders to measure the moving direction of the platform, respectively. 2. The positioning system range patent, Paragraph 1, wherein those strip mirror system mounted on the platform along a first direction on the one side. 3. As for the positioning system in the first scope of the patent application, wherein the distance between the first optical distance meter and the second optical distance meter is greater than the distance between the joints of the strip mirrors. 4. The scope of patented positioning system, Paragraph 1, wherein the first optical Page 17 584713 Amendment _________92105405 Sixth, the scope of the patent application Second secret between optical rangefinder 5. A positioning system, which includes: a platform is placed on a base in a movable manner; • -drive device ' Used to control the moving direction of the platform on the base; a first bar-shaped mirror and a first optical rangefinder are respectively arranged on the base and the platform; a second bar-shaped mirror and A second optical rangefinder is respectively disposed on the base and the platform; and a control device for controlling the operation of the positioning system; wherein when the platform moves in a first direction, the control device is Will use the first strip reflector and the first optical rangefinder to measure the movement direction of the platform in a first period of time, and use the second strip reflector and the second optical rangefinder to measure the The moving direction of the platform in a second period, wherein the second period and the first period overlap the first period, and the control device uses the first bar mirror and the first period in the first period. Use a rangefinder to measure the movement direction of the platform, and use the movement direction measured by the first strip mirror and the first optical rangefinder to correct the second strip reflection at the overlapping portion of the two periods. The movement direction measured by the mirror and the second optical rangefinder. After the correction, the control device will use the second strip mirror and the second optical rangefinder to measure the movement direction of the platform. 584713 _______________Case No. 92105405__Year Month Day Amendment VI. The mouth of the patent application scope should be installed in the Department of Safety and Security. All mirror items t # 5 shots of the anti-circumferential Fanlili second specialty Qinghai Shen and Rujing Shooting 6 counterpoints, the system is fixed, the strips are the first one, the other side is 1st, and the opening is flat. ·. Haichong t series, J, a package, a mirror item, W 6 shots, and a counterpoint . On the side of the rule, the second side of the second leg of the paradigm asks the side to apply a reverse direction, such as a mirror, and the first pass along the mouth of the mirror. On the second side of the article, the special side of the rule asks the side to apply and the eight reverse direction of the mirror, which is the shape of the system. 9. If the positioning system of the scope of patent application for item 5, the first The strip-shaped mirror and the second strip-shaped mirror are both mounted on the base. 10. The positioning system according to item 9 of the scope of patent application, wherein the first strip mirror and the second strip mirror are mounted on two sides of the base along the first direction of the platform. Aside. 11. The positioning system according to item 9 of the application, wherein the first strip mirror and the second strip mirror are mounted on the base beside a single side of the platform along the first direction. 1 2. The positioning system according to item 5 of the patent application scope, wherein the platform is Page 19 584713 ___Case No. 92105405_ Rev. __ Sixth, the scope of patent application moves flat on a horizontal surface of the base, the first rangefinder and the second rangefinder are respectively along the first The first and second horizontal lines on the surface of the one-bar mirror and the second-bar mirror are used to measure distances, and the first and second horizontal lines are located at different heights.