TW579069U - Substrate pedestal with lifting mechanish - Google Patents
Substrate pedestal with lifting mechanishInfo
- Publication number
- TW579069U TW579069U TW92202815U TW92202815U TW579069U TW 579069 U TW579069 U TW 579069U TW 92202815 U TW92202815 U TW 92202815U TW 92202815 U TW92202815 U TW 92202815U TW 579069 U TW579069 U TW 579069U
- Authority
- TW
- Taiwan
- Prior art keywords
- mechanish
- lifting
- substrate pedestal
- pedestal
- substrate
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92202815U TW579069U (en) | 2003-02-20 | 2003-02-20 | Substrate pedestal with lifting mechanish |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92202815U TW579069U (en) | 2003-02-20 | 2003-02-20 | Substrate pedestal with lifting mechanish |
Publications (1)
Publication Number | Publication Date |
---|---|
TW579069U true TW579069U (en) | 2004-03-01 |
Family
ID=32848035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92202815U TW579069U (en) | 2003-02-20 | 2003-02-20 | Substrate pedestal with lifting mechanish |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW579069U (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109300836A (en) * | 2017-07-25 | 2019-02-01 | 细美事有限公司 | Lift pin unit and substrate-holding units with the lift pin unit |
CN113725144A (en) * | 2021-08-27 | 2021-11-30 | 北京北方华创微电子装备有限公司 | Thimble lifting device and semiconductor process equipment |
CN113745145A (en) * | 2020-05-29 | 2021-12-03 | 台湾爱司帝科技股份有限公司 | Chip transfer system and chip transfer method |
WO2022062592A1 (en) * | 2020-09-25 | 2022-03-31 | 长鑫存储技术有限公司 | Wafer processing device and wafer transport method |
-
2003
- 2003-02-20 TW TW92202815U patent/TW579069U/en not_active IP Right Cessation
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109300836A (en) * | 2017-07-25 | 2019-02-01 | 细美事有限公司 | Lift pin unit and substrate-holding units with the lift pin unit |
CN109300836B (en) * | 2017-07-25 | 2024-04-09 | 细美事有限公司 | Lift pin unit and substrate supporting unit having the same |
CN113745145A (en) * | 2020-05-29 | 2021-12-03 | 台湾爱司帝科技股份有限公司 | Chip transfer system and chip transfer method |
CN113745145B (en) * | 2020-05-29 | 2023-07-21 | 台湾爱司帝科技股份有限公司 | Chip transfer system and chip transfer method |
WO2022062592A1 (en) * | 2020-09-25 | 2022-03-31 | 长鑫存储技术有限公司 | Wafer processing device and wafer transport method |
CN113725144A (en) * | 2021-08-27 | 2021-11-30 | 北京北方华创微电子装备有限公司 | Thimble lifting device and semiconductor process equipment |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4K | Annulment or lapse of a utility model due to non-payment of fees |