TW579069U - Substrate pedestal with lifting mechanish - Google Patents

Substrate pedestal with lifting mechanish

Info

Publication number
TW579069U
TW579069U TW92202815U TW92202815U TW579069U TW 579069 U TW579069 U TW 579069U TW 92202815 U TW92202815 U TW 92202815U TW 92202815 U TW92202815 U TW 92202815U TW 579069 U TW579069 U TW 579069U
Authority
TW
Taiwan
Prior art keywords
mechanish
lifting
substrate pedestal
pedestal
substrate
Prior art date
Application number
TW92202815U
Other languages
Chinese (zh)
Inventor
David Tu
Chung-Chen Lee
Ing-Chieh Huang
Original Assignee
Applied Materials Taiwan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Taiwan Ltd filed Critical Applied Materials Taiwan Ltd
Priority to TW92202815U priority Critical patent/TW579069U/en
Publication of TW579069U publication Critical patent/TW579069U/en

Links

TW92202815U 2003-02-20 2003-02-20 Substrate pedestal with lifting mechanish TW579069U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92202815U TW579069U (en) 2003-02-20 2003-02-20 Substrate pedestal with lifting mechanish

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92202815U TW579069U (en) 2003-02-20 2003-02-20 Substrate pedestal with lifting mechanish

Publications (1)

Publication Number Publication Date
TW579069U true TW579069U (en) 2004-03-01

Family

ID=32848035

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92202815U TW579069U (en) 2003-02-20 2003-02-20 Substrate pedestal with lifting mechanish

Country Status (1)

Country Link
TW (1) TW579069U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109300836A (en) * 2017-07-25 2019-02-01 细美事有限公司 Lift pin unit and substrate-holding units with the lift pin unit
CN113725144A (en) * 2021-08-27 2021-11-30 北京北方华创微电子装备有限公司 Thimble lifting device and semiconductor process equipment
CN113745145A (en) * 2020-05-29 2021-12-03 台湾爱司帝科技股份有限公司 Chip transfer system and chip transfer method
WO2022062592A1 (en) * 2020-09-25 2022-03-31 长鑫存储技术有限公司 Wafer processing device and wafer transport method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109300836A (en) * 2017-07-25 2019-02-01 细美事有限公司 Lift pin unit and substrate-holding units with the lift pin unit
CN109300836B (en) * 2017-07-25 2024-04-09 细美事有限公司 Lift pin unit and substrate supporting unit having the same
CN113745145A (en) * 2020-05-29 2021-12-03 台湾爱司帝科技股份有限公司 Chip transfer system and chip transfer method
CN113745145B (en) * 2020-05-29 2023-07-21 台湾爱司帝科技股份有限公司 Chip transfer system and chip transfer method
WO2022062592A1 (en) * 2020-09-25 2022-03-31 长鑫存储技术有限公司 Wafer processing device and wafer transport method
CN113725144A (en) * 2021-08-27 2021-11-30 北京北方华创微电子装备有限公司 Thimble lifting device and semiconductor process equipment

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Legal Events

Date Code Title Description
MM4K Annulment or lapse of a utility model due to non-payment of fees