TW573054B - Apparatus for forming a carbon film on an inner surface of a plastic container method for manufacturing a plastic container with an inner surface coated a carbon film - Google Patents

Description

Grave and description of the invention: [Technical field of Wuming] The present invention relates to a plastic container with a carbon film on the surface [prior art] A method for manufacturing a carbon device on the inner surface of a plastic container. Membrane device and inside and outside: a kind of plastic container: for example, a PET bottle (hereinafter referred to as a "Pottle bottle"), in order to prevent the permeation of oxygen from 4 or carbon dioxide from the inside (such as money drinks and water), shouting on the inner surface such as DIX said "Diamond 1 Carbon". A method of coating a carbon film on the inner surface of this plastic container is disclosed in Japanese Patent Laid-Open No. 8-53 116 #, Gazette and Patent No. 2788412. (Japanese Patent Laid-Open Bulletin) has a method of using a high-frequency plasma.-Japanese Patent Laid-Open No. 9'272567 #, which discloses a method of coating a carbon film into a thin film using a high-frequency plasma. As a method of responding to it, Japanese Patent Publication (Japanese Patent Application Laid-Open No. 10-226884) discloses a method for coating a carbon film corresponding to a special shape. Japanese Patent Publication No. 3 丨 5252 Kaiji Hei 1 0-258825 Bulletin), etc., there is a method of mass-producing a method for simultaneously coating a plurality of containers. As a document that discloses a technology of coating a carbon film on a plastic container, there is rK.Takem 〇t〇, < Proceedings of ADC / FCT ^ 99, p285, ^ r E. Shimamura et al 10th years IAPRI World Conference 1 997, P251 The above-mentioned Japanese Patent Publication No. 27884 1 2 (Japanese Patent Application Laid-Open No. 8-88) concerning the basic invention of coating carbon films on plastic containers using high-frequency plasma CVD 53 11 6), it will be described with reference to Fig. 18. Fig. 8 is a coating surface coating of a plastic container using the high-frequency electro-polymerization CVD described in the publication No. 82578 573054. 2001, attached to the mounting plate 002 sealing plate 203 |. &Quot; Round m made of polytetrafluoroethylene. The external electrode 2gi, has approximately along the received = = :: ;;,: ㈣细 之 ㈣㈣ «. The external electrode is open, shaped. Upper, f // 'The better is also along the inside of the thread shape used for the bottle cap :; ΐ: Γ pole 1 contains a cylindrical body mounted on the mouth The cover part 20t # 9〇4, which is the upper end of the makeup 20a, is recorded as a vacuum container. The gas exhaust is passed through the above-mentioned stand 202 and the sealing plate 20 and the electrode 2. The lower part 03 is connected to the above The outer and inner electrodes 205 'are inserted into a PET bottle B housed in the outer electrode 201. The inner electrode 205 is a jig In the seventh, Bu Ru 7 workers W, and its surface is provided with a number of gas blowout holes 206. Supply ^^? Π 7 gas supply for the medium shell rolling body. The pedestal 202 and the sealing plate 203 communicate with the lower end of the internal electrode 205. The CVD medium gas is supplied into the internal electrode 205 through the supply tube 207, and is then blown out from the gas. Qing to the above-mentioned Pote bottle B. The RF input terminal 2Q8 is connected to the lower portion of the external electrode 201 through the mount 2G2 and the sealing plate. The 1117 input terminal 208 is electrically insulated from the above-mentioned second stage 2. X, the lower end of the above-mentioned input terminal 208 is connected to the high-frequency power source 210 through 209. The external electrode 201 is induced to apply high-frequency power for plasma generation from the high-frequency power source 21 through the matching device 209 and the RF input terminal 208. First, the method of coating carbon film on a PET bottle using the device of this configuration will be described in 82578 573054. First, by inserting a pottery bottle b into the body 201a of the external electrode 201, a cover 20 丨 b is installed on the body 20 1a to air-tightly store the bottle 6 in the external electrode 20o. The gas in the external electrode 20 is passed through the gas exhaust pipe 204 to be exhausted. At this time, the gas contained in the outer and inner space of the above-mentioned PET bottle B contained in the external electrode 201 will be exhausted. After reaching a predetermined vacuum degree (representative value: ur2 to 10-5 Torr), the medium gas is passed through the gas supply pipe 207 to be supplied to the internal electrode 205 at a flow rate of, for example, 10 to 50 mL / min. The supplied medium gas passes through the gas blow-out hole 206 of the internal electrode 205 and exits into the above-mentioned special bottle B. In addition, as the medium gas, aliphatic hydrocarbons such as benzylbenzene, xylene, cyclohexane and the like, aromatic anaerobic hydrocarbons, oxygen-containing hydrocarbons, and nitrogen-containing hydrocarbons can be used. The I force in the above-mentioned PET bottle B is set at, for example, 2 X 1-1 to 1 X ur2T0rr depending on the balance between the gas supply amount and the gas discharge amount. After that, the high-frequency power of the high-frequency power sources 21 to 50 to 100 is applied to the external electrode 201 through the matching unit 209 and the RF input terminal 208. By applying such high-frequency power to the external electrode 201, a plasma can be generated between the external electrode 201 and the internal electrode 205. At this time, the above-mentioned PET bottle B is stored in the external electrode 201 with almost no gap from the ash. Therefore, the electric system ^ is generated in the above-mentioned PET bottle B. The medium gas can be dissociated and ionized according to the above-mentioned electropolymerization to generate a film-forming species for forming a carbon film. This species is deposited on the inner surface of the above-mentioned bottle B to form a carbon film. After the carbon film is formed to a specific film thickness, the application of high-frequency power is stopped. In addition, the supply of the body of the mites was exhausted to exhaust gas, and nitrogen, dilute 82578 573054 gas, or air was supplied to the external electrode 201 to restore the space to the atmosphere 1 and thereafter 'Remove the above-mentioned PET bottle B from the external electrode 201. In addition, this method requires 2 to 3 seconds to form a carbon film with a thickness of 30 nm. In the coating method using a sigma type recirculating plasma, the thickness of the carbon film from the mouth of the inner surface of the plastic container to the shoulder or the area near the shoulder becomes thicker than other mouths. The inner mouth P is thicker. Therefore, there is a problem that it is difficult to achieve uniform coating. [Summary of the Invention] The purpose of the invention is to provide a carbon film formed on the inner surface of a plastic container. A carbon film having a uniform film thickness can be coated on the entire inner surface of the plastic container. The purpose of being clear is to provide a carbon film with a uniform film thickness on the inner surface. The purpose of the present invention is to provide a garment that can be used to form a carbon film on the inner surface of the plastic glutinous rice seedlings. It can apply a good carbon film with a uniform moon fruit thickness to the clay container. Inside the whole. The purpose of the present invention is to provide an original method for producing a kind of plastic glutinous rice, which can apply a good film quality and have a uniform spoon film ^ one other ^ g pancreas and its stone hate coated on the inner surface. The object of the present invention is to provide a plastic film which is coated on the entire inner surface of a plastic container and which is formed on the inner surface of the plastic container. Uniform ... carbon film high-speed coating Second invention: The purpose is to provide a method for manufacturing a plastic container, which can be applied to the inner surface of a 7-mouth amine thick pancreas. According to the present invention, it is possible to provide a device for forming a carbon film in a plastic container and a method for manufacturing a plastic container. 82578 -10- 573054 (1) A device for forming a carbon film on the inner surface of earthenware containers, which includes: a bottomed tube-shaped recognition ° ^ Gel-condensed crying electrode, which has Insert the person who is the object to be treated. Only use u to surround the outer size of the container except the mouth and shoulders of the container. The compound "" is composed of a dielectric material. The dielectric material is inserted in the above. Rongyingxuan e, + °. Keep to ^, placed between the mouth and shoulders of the container and the outside

Among the electrodes, II is not ^ ϊα strict gas B, it is installed on the end surface of the external electrode through the insulating member on the side of the position of the mouth of the container; the internal electrode, ^ on, +, sister a ,, Insert the external grounding side from the exhaust pipe side in a substantially full length across the length of the container, and connect the D guard 5 with a gas blow-out hole for blowing the medium gas; It is installed on the exhaust pipe; t. A milk component for supplying a medium gas to the internal electrode; and a frequency power supply connected to the external electrode. (= Kind of manufacturing method of plastic container covered with carbon film on the inner surface, which involves making crying leaves ^ not covered with plastic film coated with carbon film on the inner surface as the sun guard, includes the following steps: (a) will be used as a household shirt 々Π 土 I 谷 is inserted at least in the manner of the outer electrode u. ^ ^ UN in such a way that at least the mouth of the container and Qi Ba-Jan "" inside "and the outer periphery of the above-mentioned container β knife is enclosed. Bottom cylindrical outer 邛 electrode inside and spacer made of dielectric material π; (b) A bottom 用以 ebo will be worn through the side area of _ ^-丨 & 疋 to blow out the media The internal electrode of the through hole of the lice body is placed on the outer side of the container in a manner of approximately 82578 573054 full length across the length of the container; The inside of the container (C) described in the upper mouth is exhausted by the exhaust pipe portion π, and the gas in the valley state passes through the exhaust pipe gas, and from inside the ridge: using the air supply member to Electrode supply medium container to blow out gas from two electrodes The medium gas is discharged to the above-mentioned pressure; a specific gas is set in the exhaust pipe in the above-mentioned container (d) from the high-frequency power source inside the above-mentioned container = high-frequency power is supplied to the external electrode, so that Dissociate with / μ + to form electric water, and use this plasma to make (3) a kind of Shuo Liao — w Totunnu. A carbon film is formed on the inner surface of the Toddler. A cylindrical external electrode with a bottom has two electrodes. , Which includes: when plastic containers are used to enter plastic objects to be treated; outside the original size of the size of the pieces, which are composed of dielectric materials, when the above-mentioned container is brought to W The human π ^ β ~, where the electrical material is between the plug electrodes; the mouth and shoulders of the outer conductive structure interact with the external conductive structure, and it is installed on the exhaust gas in a manner connected with the external electrode connected pile. For example, it is installed on the end surface of the external electrode via an insulating member through an insulating member. The internal I k L pole is located at the mouth of the electrode, and it extends throughout the above. Examples of dangerous cases of thoracic trachea in the container ^ t, f 1 1 +, and almost complete The long way is called from 5 into the above-mentioned container inside the external electrode and connected to 82578 -12- side the same day is provided with a gas blow-out hole for blowing out the medium gas; it is installed on the exhaust pipe; Gu Fei 1M cow 'is used to supply a medium gas to the above internal electrode; and ⑨ Shuji, which also serves as a bias voltage connected to the above external electrode. A method for manufacturing a plastic container with a carbon film on the inner surface of the upper cylinder, which is When using the device: the plastic container 3 with a carbon film on the inner surface is formed by the following steps: (a) The outer periphery of the plastic shoulder as the object to be treated is enclosed in the above-mentioned second piece; The outer periphery of the mouth and part is enclosed in the outer electrode described above and in the container-shaped external electrode other than the above, and is inserted into the bottom of the dielectric material in the bottom tube to connect the external electrode. (B) The internal electrode which blows out the through hole of the bottom gas ... or the side area of the cymbal or both sides blows out the mesocarp tooth hole, full length way , From the insulation member The above-mentioned external electrode clothing on the approximately side is positioned at the mouth portion of the container; and the exhaust pipe on the surface is inserted into the container (C) The exhaust pipe member will be used to exhaust the air, and at the same time πσ The gas passes through the exhaust pipe gas, and is supplied to the medium container from the internal electrode of the inner tube bracket to contain the containing ::: gas blow-out hole to blow out the medium gas to the above-mentioned day force; A specific gas electrode is used to generate a plasma around the supply force of the container to the external electrode, and 82578'13-using the plasma to dissociate the medium gas from the membrane. Upper Migu is coated with carbon on the inner surface (5) —It is a kind of plastic container with a bottomed tube formed on the inner surface. It is covered with clothes: It includes: when the plastic container is used to wrap it ^ — one into the object to be treated Plasticizers; and "external perimeter size spacers, which are composed of dielectric materials, which are placed at least in the container when dry into the container", 'r' soil electrodes ; Σ 卩 and shoulders.卩 Connected with the above external electrical components, which are installed on the end faces of the spacers on the side of the above-mentioned location in a manner connected with the above-mentioned external capacity, electric poles, and poles; in the breast discharge officer, it is insulated by an insulating member. On the end face of the above-mentioned external electrode on the safe side; the inner electrode of the mouth is located at the position of the private electrode, and it is from the above-mentioned container inside the above-mentioned external electrode in a roughly king-length manner throughout the above-mentioned container. Heart connected

The shell 1 is provided with an exhaust member for blowing the medium gas out of the A, which is installed on the above-mentioned exhaust pipe; "human exit hole; :::: two is used to supply the medium gas to the above internal electrode; It is connected to the internal electrode, and a bias power source is connected to the external electrode. (Top 6) A method for manufacturing a plastic container with an inner surface covered with a carbon film, which is used in (5) When the carbon film forming device is used to manufacture the inner container, the following steps are included: A plastic container coated with a carbon film will be used as a plastic container to be treated, with at least the mouth of the container and 82578 -14-the shoulder The outer shape of the outer part of the dielectric (b) is to place the upper part of the full length of the mass-transmitting gas on the side of the upper side; σ k surrounds the inside of the spacer, and the other contents mentioned above: surround the outside The method of the electrode is inserted into the spacer made of a material with a bottomed tube and a connection member connected to the external electrode; it is used to blow the medium through the bottom or side area or both sides: Internal electrode to approximate the length of the container '丨 The exhaust pipe installed on the end face of the outer electrode with the% edge member is inserted into the container. C) The exhaust pipe is used to exhaust ~. The gas inside passes through the above-mentioned exhaust gas! The gas, lice, and piping are supplied to the above-mentioned internal electrode in the media selling container with ::::: The gas blowing hole of the electrode blows out the medium gas ... The pressure inside the exhaust pipe is set to a specific value ... 3 ... The high-frequency electricity from the bias power source, the higher frequency from the higher-frequency power source will be higher & ° The external electrodes are simultaneously located in the above-mentioned capacity, and power is supplied to the internal electrodes to make the The above-mentioned slugs, plasma, and plasma are generated around them, and the slugs are used to dissociate to coat a carbon film on the inner surface of the plastic container, which is planted in a plastic container. Bottom cylindrical external electrodes, the second & Set 'It contains ... when used in plastic containers, spoons, /, squares;

(1) A person who surrounds the container; A exhaust officer, whose end face 1 of the electrode is secure; the position of the σ part of the container is the above-mentioned external internal electrode, which is inserted into the above-mentioned external 4 force F electrode. In the container, 82578 -15- 573054 is used as a gas blow-out pipe for blowing out the medium gas; The gas supply pipe, which also serves as a power supply terminal, has one end connected to the internal electrode and the other end extended to the above-mentioned row. Gas pipe side; a grounded sealing pipe, which is arranged at least on the outer periphery of the gas supply pipe portion in the exhaust pipe located in the external electrode and near the mouth of the container, and is grounded; the exhaust member, which is installed On the exhaust pipe, a gas supply member for supplying a medium gas to the gas supply pipe, and a high-frequency power source connected to the gas supply pipe. (8) — A method for manufacturing a plastic container with a carbon film on the inner surface, which includes the following steps when using the carbon film forming device of (7) to manufacture a plastic container with a carbon film on the inner surface: (a) will be used as The plastic container of the object to be treated is inserted so as to surround the bottomed cylindrical external electrode; (b) At the same time, or before and after step (a) above, a gas that arranges a grounded grounded sealing tube on the periphery is connected A supply pipe, and insert the internal electrode of the gas blow-out pipe which also blows out the medium gas into the above-mentioned container; (c) use a gas pipe member to exhaust the gas in the container through the exhaust pipe to exhaust the same, The gas supply pipe member supplies a medium gas to the internal electrode, and blows the medium gas from a gas blowing hole of the internal electrode into the container to set a specific gas pressure in an exhaust pipe including the container, and (d) Pass the high-frequency power from the high-frequency power supply through the above-mentioned gas supply pipe to the 82578 16 two inner poles to reduce the frequency lower than the high-frequency electric power from the side-pressure power source ^ 'Soap (, high-frequency power to the frequency of the internal electrode's Belle force is applied to the above-mentioned container to generate +, 邛, 邛, 邛, 邛, 邛, 玍, 玍, 利用, 电, 玍, σ, σ, σ, σ, σ, σ) ° Electrolyzed water causes the medium gas to decompose and the inner surface of the trough is coated with a carbon film. (9)-A carbon film is formed on the inner surface of a plastic container. There are hemp & When it is a plastic container, ~ η% + /, and f are used as the object to be processed to surround the size of the container; the spacer 'which is made of dielectric f material into the above-mentioned crying day ± $ ia Cheng's electrical materials are inserted at a σ. At least the Rishou is interposed between the continuous cross electrodes; and. °. The mouth and shoulders of the above and the external exhaust pipe, which are installed through the insulating member. The above-mentioned side of the wear side ... is placed on the mouth of the container < the end face of the outer electrode; the internal electrode, 1 is provided with a piece of night / inside the container inside the outer electrode, and > Gas blowing holes for gas blowing out; Exhaust parts, which are installed on the exhaust pipe; Air supply section The factory is used to supply the medium gas to the above-mentioned rolling body supply pipe; the bias power source is connected to the above-mentioned gas supply pipe; and the dagger is matched to 11 and connected to the external electrode; and the electricity , Gan, and are connected directly to the division between the Qiqizhengqiu total commander Ruhong supply officer and the matching device, and one end is grounded. [Performance Mode] The present invention will be described in detail below with reference to the drawings 82578 -17-573054 (first embodiment) Fig. 1 is a cross-sectional view showing the internal device of a plastic container in the form of a proof ^ 贯 consistent application.彖 la, lb on the cylindrical support member 9 of the cylindrical support member 9. ...... Another 1,000 "k is placed on the same-shaped metal external electrode body 4, and the above-mentioned support member 2 is dismantled and disposed in the stem 2. The metal-shaped outer neighbor Titohiro six is formed in a disc shape. 5. It is attachable and detachable. The B-pole bottom member is mounted on the bottom of the external electrode body from the external lightning h I 4 to 4 by itself. The electrode body 4 and the above-mentioned external electrode bottom member 5structure # @ | The outer cylinder with a bottomed outer + + 5 constitutes, for example, the female electrode 6 of the eye, and the outer cylindrical plume 6 with the bottom has a Set # 6 'plastic container with anti-coated film (for example, a space of the size of Breguet. A 4-inch bottle of female shell). The disc-shaped insulator 7 is arranged in the base 3 above. 、 +. Between the external electrode bottom member 5. The base and the above-mentioned additional 'the external electrode bottom member 5, the abutment 3 is a brake field soil, a mouth shape, a% edge body 7 and

The Taihuo 4 'pusher (not shown in the figure) pushes up and down the outer body A-4, and moves to the above. P% pole opening and closing action. The bottom of the bean 4 is made of a cylindrical cylindrical upper end made of a dielectric material > Shishi _ know the edge spacer 9 above the upper end of the limb 4 to form the surface described outside # a 四 刀 月 的The method is inserted in the upper part 8 of the above body 4 in the child pole 6. #allow, 间 海 ΰ 件 9, which has an empty child hole part 8 and is inserted into the internal pair of windows, D 丨The shape of the plastic valley is, for example, a group of "column spacers 9, #" like the mouth and shoulders, m-ports to t-shaped. The above k is used to place the upper ring nail (not shown by the flange member) The external screw-shaped core 9 connected to the upper part of the screw body is inserted into the upper part of the main body 4 and fixed to the upper part. When inserting a special bottle from the bottom side of the external 82578 573054 electrode 6 above, the shoulders will be located above The hollow part of the spacer 9 :: The mouth and the outer periphery of the spacer 9 will be located on the inner surface of the external electrode 6. In addition, the dielectric glue that constitutes the spacer 9 described above can be made of various materials, but especially: For example, plastic or pottery. Polytetrafluoroacetic acid I-series waxes with excellent plasticity and heat resistance; low-frequency loss for two uses Loss of oxide, talc (s text, preferably high-frequency kelol (trade name · Macor (Y-Small)). 5 horse / like insulating member with high machinability. 'This is the The upper flange 1a of the ring-shaped insulating structure-shaped supporting member 2 forms a surface cut surface and is placed on the above-mentioned external electrode 6 and the spacer 9 in such a manner that a screw (not shown) is screwed from the insulating member 1Q. Then, the above-mentioned spacer 9 is inserted and fixed on the above-mentioned "⑼_9", and the gas exhaust supporting member having flanges 11a and 11b above and below is placed on the flange 1a and the ring-shaped insulation. Component 丨 .... The rolling body exhaust pipe 12 can be fixed to the upper part of the support member 2 by accumulating the exhaust gas above the tube 12 (not shown), Qi Λ 绦 n k2. It is raised on the upper body tin piece 2. In addition, the feeding part electrode 6 penetrates the upper flange Ub of the lower part of the exhaust pipe through the screws (not shown in the figure), and is screwed onto the body 4 of the external electric wire. q The exhaust pipe 12 is suspended from the core through the ring-shaped insulating member iG. In addition, the 'exhaust pipe 12 and the ring-shaped insulating outer casing ; &Amp; The fixing of the U and the body 4 of the above pole 6 is to use a screw to form the body 4 of the above-mentioned exhaust pipe 12M and the above-mentioned external electrode 6 into a non-conducting mounting structure. 82578 -19- 573054 of One end of the heart gas exhaust pipe 1 3 is connected to the above-mentioned gas exhaust pipe 1 2 = the side wall. The other end of the branch gas exhaust pipe 13 is an exhaust device equipped with a vacuum pump as described above. Cover 1 4 It is installed on the flange 11a on the upper part of the exhaust camp 12. The high frequency power source 15 such as the high frequency power of 13.% MHZ is transparent. See 16 and the power supply terminal 17 and connect to the external electrode. The body 4 of 6 is matched with a theft 18, and is connected to the cable 16 between the high-frequency power supply 15 and the power supply terminal 17. The gas supply pipe 19, which also serves as the ground terminal, passes through the cover M, and is inserted into the spacer 9 through the gas exhaust pipe 12. The external electrode 2G is arranged in a substantially full-length manner throughout its length, and is described in the external electrode 6 and the spacer 9 (a space that can be inserted into the Poteco). The upper end of the upper electric pole 20 of the upper part = 1 is installed freely at the lower end of the gas supply pipe 19 located at the above-mentioned interval 1 :. The above-mentioned content 20 is tied to ::: dug the gas flow path 21. The lid 23 is for attaching and detaching the bottom of the internal electrode 20 mentioned above. The lid 2 has a gas blow-out hole 22 of a mass gas. It can be used to blow out the media. The hole can also be opened on the side wall of the lower part of the internal electrode and connected with the gas flow path 2 丨 ^ ^ # A ^ h ^ M ^ Monthly conditions, the milk blowout hole is better. ... 逑 Internal electrode 2. The side area in the range from the bottom to the upper-length grip is opened. The diameter of the above-mentioned internal electrode 20 is set under the Pott bottle, and the length is set to the length of the long square piece of the Pott bottle 6 degrees. The standard of length is for Baoteer 22: the length of the long tile that can be inserted is about {1-D / (2L)} 82578 -20-573054. Here D represents the inner warp of the bottle, a L > (D / 2). It indicates the full length of the Jart bottle, and although the upper internal electrode 20 ′ is made of a metal material, the heat resistance of the code or stainless steel can also be made of aluminum when the surface of the electrode 20 is smooth. Carbon film on the surface of electricity. Therefore, the surface of the internal electrode 20 is subjected to sandblasting to increase the surface roughness without the carbon film on the surface of the electrode 20. It is also not easy to peel and deposit on the surface, and a manufacturing method using the apparatus shown in FIG. The plastic container with the inner surface covered with carbon film is placed on the inner surface. The outer body 7 and the abutment 3 are unloaded with a propeller not shown in the figure. 5. The disc-shaped insulation is used to open the bottom of the outer electrode body 4. For example, the Pott bottle B is inserted from the opened external emperor soil to the mouth side of the Pott bottle B. The bottom side of the peptide 4 is spear J, which is not shown in the figure; Component 5, disk-like shape "^ & Taiwan J in order to stay on the bottom side of the outer mouth P pen body 4. Borrow ,, .〇 ^? ^ As the 01 does not put the mouth of the special bottle β to 4 The shoulders are housed in a cylindrical spacer made of a dielectric material ^. Jin. Ten, outer Qiu to the bottom side is stored in the mouth to communicate with it. Exhaust components (not shown) are used to exhaust air from the inside and outside of the exhaust pipe 12 and the above-mentioned Baotefan B through the sub-station exhaust fan-L ~ "knives lice tube 13 and exhaust officer η. The medium gas is passed through the gas supply pipe 19 叩 1 and the gas 1 ′ of the main internal electrode 20 and is blown out from the gas blowing hole 22 of the cover 23 82578 21 573054 installed at the bottom of the internal electrode 20 into the pottery. The mouth of the PET bottle B continued to flow in. :, ’And further towards ^ ^ Calculate the balance of the gas exhaust volume of the milk supply pan, so that the above-mentioned Po H and drink A bottle is called 5 and held at a specific gas pressure. The high-frequency power supply 15 transmits high-frequency power through the power supply terminal 17 to the above-mentioned distribution ^ ^ ^ L. This ¥ can be grounded in the above external child pole 6 (戸, shell is the above-mentioned Pote bottle β w J Plasma is generated between the inner thunder poles 20. The ^ ^ ^ ^, A ^ shakes water to dissociate the beetle lice body, and the resulting film-forming species will be deposited in the above-mentioned Pote bottle 6 to form a tritium coating film (carbon Film). After the film thickness of the slave fe reaches a specific level, 5 ^ heart rate, the confession of high-frequency power from the above-mentioned lettuce frequency power supply 15 is stopped, and 1 time & Supply, and exhaust the residual gas, and then stop the exhaust of disordered limbs. Then, nitrogen, rare gas, or air, etc. from the above-mentioned wide carving 20, ^ to the upper milk supply pipe 19 through the inside The gas flow path 21 and the lid of the electrode 20 are in contact with each other. Pull ... The milk blowing hole 22 of the son 23 is supplied to the bottle B. In this case, return the above bottle B to the inside and outside of Dezhaogu Mountain M. Return the outer port to atmospheric pressure, and remove the bottle with the broken stone anaerobic membrane on the inside. After that, press. ^, Silly Know-exchange the bottle in the order above The coating operation from Asia-private to the next bottle. The above-mentioned medium gas system is based on hydrocarbons. For example, " end, ethylene dipropane, butane, pentane, hexane, etc. can be used; Alkenes such as ethylene, propylene, canton, pentene, butadiene, etc .; blocks such as ethyl block; stupid, a ^, -a stupid; howling, howling, Philippine (_ 咖啡 叫 Γ! Aromatic nitrogen carbides; Cyclopropane, cyclohexyl, etc. Ring green cyclopentane / clothing materials; Oxygenated hydrocarbons such as methanol, ethanol, etc .; Also: Ethylamine, Aniline, etc. Nitrogen-containing hydrocarbons, etc. The above-mentioned medium gases can be carbon monoxide, carbon dioxide, etc. 82578 -22- 573054 Second, high :: Electricity 'Although generally use 13.56 Qin Qin ~ 10 ...' s ;; :: not limited to Therefore, the application of the high-frequency power may be flail or intermittent (pulse type). That is, if the cylindrical spacer 9 made of the material is inserted and fixed according to the first embodiment, In the outer material, make at least the mouth of the bottle B to the shoulder = 6 above the part '8, and insert r ... ± I in the space of the spacer 9 above. In the second part of the pole 6, the shoulder M to the bottom side is housed in the above-mentioned external electric power C to supply the medium gas to the above-mentioned Pote "inside, and the" child power is supplied to the external electrode 6 ", ^ As mentioned above, the inner surface of the bottle B) and the grounded electrode, a plasma is generated between # θ and the inner 4 electrode 20.

2: The inner surface from the shoulder to the bottom side of the above-mentioned Baotei. As for the spacer I made of the electric material, the opposing I and the inner surface of the upper part can be coated with a mouthful of sound. Carbon film with uniform lamination to the shoulder soil. The surface of the special bottle covered with carbon film, and the clothing w-kind of servant Shishan ... coffee, has the ability to prevent milk from the outside, and two gases (such as carbonated beverage water) through the excellent barrier properties. For example, the spacer 9 can be ejected into the spacer 9 to form a spacer shape corresponding to the galvanic material covering the bottle. Head A can be manufactured more easily than in the past when the structure around the mouth β and the shoulders are all around. Furthermore, the construction of a conductive material including these members and the construction of an external electrode including the use of a metal can reduce the overall weight of the device. In all cases, the use of plastics or newly formed spacers " can prevent the occurrence of scars on the part by using POT materials. 82578 '23-573054 to Γ :: 方 上 f 第 —In the embodiment, the π-shaped spacer 9 having the hollow portion 8 is inserted in a manner corresponding to the center of the Pote bottle 8 ”.闳 — * From the round branch α 疋 composed of ☆ needles on the upper part of the body 4 of the external electrode 6, it can be made θ and Pote Ryuji plus 1 疋. It can also extend to the bottom of the dielectric material & I & Membrane. $ 7-inch thin (example 1) household? Using the carbon film forming apparatus shown in Figure 1 above, the k-port of the bottle is made of = spacer 9 made of a dielectric material. Inside the hollow part 8 and make the 6 and the "face" and let the above-mentioned Pote bottle B contact the outside "to the bottom side" urgently 6 and store it, and then use the following conditions in the above-mentioned Pote = ::: charcoal In addition, the cylindrical spacer 9 is located on the part of the external electrode 6 at a height of approximately one mouth of the bottle 8 :: = (from the top " ™. The cylindrical spacer 9: Manufactured by Hotbell (氺 布) (made of gold ceramics), • Gas outlet hole 22 of the lid 23: 1 mm hole,!, • Medium: C2H2 gas, Gas flow of medium shell: 124 sccm, • ^ Gas pressure in 4-inch bottle B and exhaust pipe 丨 2: 0.3 τ〇η, • High-frequency power supplied to external electrode 6: 13 MHz, 1 600 W (Example 2) Using the conventional carbon film forming apparatus shown in FIG. 18, the mouth of the 4-inch bottle B with a height of about 22 m was brought into contact with the inner surface of the external electrode 201 to the bottom side and stored 82578. -24-573054, and apply a carbon film on the inner surface of the above-mentioned bottle 3 under the following conditions. ≪ Application conditions > • Gas blowing holes 206 of the internal electrode 205: holes, i, • media: C2H2 gas, • the gas flow rate of the medium: 58 sccm, • the gas pressure in the bottle B: 0.16, • the high-frequency power supplied to the external electrode 201: 13 MHz, 700 W. According to Example 1 and Example 2 and measure the exhaustion from the mouth to the bottom of the PET bottle coated with carbon film. The results are shown in Figure 2. It can be seen from Figure 2 that the external electrode 6 corresponding to the POT σ and eyebrow is inserted into In Example 1 of the present invention, the cylindrical spacer 9 made by Hotbell (Small 夂 —Small) is coated with a carbon film. The entire inner surface of the d-inch bottle B is coated with a hook. 2: Pair: ... contact the outer electrode of the f special bottle 6 to the bottom side with an external electrode: = the inner surface near the shoulder is coated with a thick carbon film, and the thickness of the carbon film is uneven. In addition, in the example The ancient degree is not included in 2 because the part has been stripped thicker: the thickness of the smoke thick cm and the thickness of the pancreas and pancreas. (First embodiment) Figure J shows that the shape of the second implementation is not private. A cross-sectional view is formed for the inner surface. In addition, Q t & inverse M of π. In FIG. 3, the same component symbols as those in the above-mentioned drawing are omitted, and description is omitted. Component The carbon film forming device of Fig. 3 extends downwards in a circle. The upper end face of the spacer 9 will protrude from the same ring-shaped conductive member 24, and is connected by the cylinder 82578 -25- 573054. The way of the inner surface of the body 4 of the external electrode 6 on the mountain is set to be flush with the surface of the upper end of the external electrode, source. The shoulder source 1 5 is recorded as a bias current. The method is to use a carbon film as shown in FIG. 3 to form a plastic container. …, The body covered with a carbon film on the inner surface, meimei = the propeller will remove the bottom member of the external electrode 5, the disc-shaped insulation ^ soil σ 3 remove to open the bottom of the external electrode. Next, a plastic buckle, such as a bottle B, is inserted from the bottom side of the body 4 to the mouth side of the mouth bottle β. Afterwards, two ice shirts were installed with the thruster (not shown) of the mouth F electrode bottom member 5, the disc-shaped insulation .Λ and the storm platform 3 in this order.底部 The bottom side of the electrode body 4. Borrow ^ σ ^, as shown in Figure 3, put the special bottle Β w m. The cylindrical spacer 9 made up of ~ τ is inside the hole portion 8 of the cylindrical spacer 9, and the above-mentioned PET bottle 6 is .._ only.丨 To the bottom side is stored in the outer pole 6 described above. At this time, the aforementioned fast communicates through its mouth. The above will pass through the exhaust pipe η 2 :: 1] through the branch exhaust pipe η and exhaust with the exhaust components not shown in the figure. The gas inside and outside the bottle B will be milked to pass the media gas. Gas supply pipe 19% & 5 Α Μ -ά 'mouth g 19 and gas moon beans ~ road 2 1 supplied to the internal electrode 20, and let it blow out from the gas blow-out hole installed in it to ten ~ ° 'The lid at the bottom 23', "Inside the bottle 6. The medium gas continues to flow towards the mouth of the 4-inch bottle B. Then, take the balance between the amount of gaseous gas and the amount of gas discharged * 1. In order to reduce the above-mentioned Pote bottle β η. And the gas pressure of 疋% 疋. "Times, from the high-frequency power supply seat 13 which also serves as a bias, the frequency-return power is passed through the electrical delay 16, the matching state 18 and The power supply terminals 17 are μ, +, &# + 叩 彳, to the external electrode 6 described above. At this time, 82578 -26, 573054 may be used to solidify the hair name around the internal electrode 20 described above. In addition, since the above-mentioned external band structure I is connected to the spacer 9 made of a dielectric material, "therefore / ', the exhaust pipe U grounded in the vicinity can be used as a reference ㊉ ^ will be from the external electrode 6 The electric dust is biased towards the internal power plant. 2. In other words, the heart = generation: "apply. The use of this kind of electric paddle generation and will :; the above external electrode 6, and the above-mentioned plasma to use the above plasma to make the media gas 俨 boat hybrid & the film type of the bias voltage &, ... … 'For the above-mentioned bottomed cylindrical external electrode 6 "Inch bottle B is coated with a uniform and uniform carbon film on the inner surface. = After the film thickness of the above-mentioned carbon film reaches a specific thickness, stop from the high 15 The frequency of electric power is from above, and the supply of the lice's body is broken, and the exhaust is clear, and the exhaust of the gas is stopped. ㈣: Pass:: body, 4 air, etc. through the above-mentioned gas supply pipe 丨,: gas outlet 21 of the gas flow path 21 and the cover 23; inside the bottle B. By j; bu, spleen μ, +, and gold) 4_ Wang Bei% The inside surface, " f special bottle B, returned to atmospheric dust inside and outside, and took out the special bottle with broken stone anaerobic membrane inside. After that, the bottle's sub-change is carried out in the order described above and the next bottle is coated. The above medium gases can be used in the same way as the above. 2. The above-mentioned high-frequency electric power, as explained in Dibei Shixing, is generally connected to 13.56 100 ^ 1 000.-Asia and Africa are limited to this. Also, it is intermittent or pulsed. The force of knowledge can also be more than continuous. If according to the second embodiment, a cylindrical spacer 9 made of a material having a hollow portion 8 is inserted into the upper portion of the outer electrode 导 1, The electrical member 24 is connected to the above-mentioned external electrode 6 on the above-mentioned spacer 9 82578 -27- 573054

Arranged so that Baote gradually R is inside the hollow portion s, and the upper mouth to the shoulder are housed in the outer electrode 6 of the spacer 9 above, and the shoulder to the bottom side of the two special bottles B are housed in the above power supply to ... Broadcast media gas is supplied to the above-mentioned Baoyi, and the high frequency hi is used to generate electricity between the above-mentioned external electrode 6 (essentially the inside surface of the above-mentioned treasure bucket bottle β) and the ground. Get together. According to the introduction of "Material: View the inner surface of the shoulder to the bottom side, even the 9th phase of the spacer made of upper ... shell material: the inner surface of the material can be coated with a uniform thickness of carbon film, which can be used to pack two shoulder special bottles B's mouth to shoulders can be placed on the ground and rented from the soil; a carbon film with a uniform degree. The result is transparent and carbon-coated with a special bottle 'It has barrier properties to prevent oxygen from outside.' It is excellent in reducing the penetration of rabbits from the inside (such as carbonated beverage water). By using, for example, injection-moldable plastic spacers 9, it can be used to cover the treasures and also open the m-position "" mouth of bottle B. The complex around the shoulders and shoulders: Γ. Therefore, compared to the conventional use of external electrodes to include "metal evening 逡 ♦ 丄 丄 丹 #", compared to the previous use such as: Shu V "talent and external electrodes to include N" The whole device can be made lighter. Furthermore, by using plastics or spacers 9, it is possible to prevent the double-cutting of Baote_ to form a scar on the part. The mouth and shoulders At the time of contact, the above-mentioned conductive member 24 which is connected to the external electrode 6 and the vicinity of the conductive member 24 When the power of the grounded exhaust pipe is generated, between the conductive member 24 and the exhaust gas = position: bias applied < in other words, unnecessary electricity is generated in the 82578 -28- 573054 exhaust gas g 1 2 and reduced. Carbon film coating efficiency. By exposing the inner part of the exhaust pipe near the conductive member 24 and covering the exhaust pipe 12 above it with an insulating film (not shown), the above can be prevented. Do not generate plasma. In addition, although in the second embodiment described above, it is made up of a pottery bottle: 6 mouth type is made of a dielectric material with a hollow portion 8 _ "Two fixed on the upper part of the external electrode 6, It is a thin film made of a dielectric material that can be extended all over Bao (=) and even more at the bottom. Using the above-mentioned carbon film 彡 & read to form a set, the mouth of the bottle B to the shoulder can be installed in the hollow portion 8 of the spacer 9 constituted by a ring-shaped guide at the upper end. Then two = the cup of coffee, her shoulders to the bottom side contact the external electrode 6; the inner surface I fan conditions coated carbon film on the inner surface of the above beta bottle. In addition: = shaped spacer 9 is inserted into the external electrode 6 in a Pott bottle β # with a height of about 22 cm and the inside of the pillar. / External electrode 6 (u cm from the upper part). "Shoulder" corresponding part < Coating conditions > • Cylindrical spacer 9 ·· Made by Hotter Bell (made of Sabine Ceramics), (Brand name, live • Ring-shaped conductive member 24: Stainless steel System '• Gas blow-out hole 22 of cover 23 • Medium: Krypton gas, holes ~, one' • Gas flow of medium: 26 ~ 394 se⑽, 82578 -29- 573054

Torr, output 100 W • Gas pressure in the actual bottle B and the exhaust pipe 12: 0 • High-frequency power applied to the external electrode 6 · 13.56 mHz (constant). (Example 4) In the carbon film forming apparatus shown in FIG. 3 described above, the mouth portion to the shoulder portion of the PET bottle B was housed in a dielectric material without a ring-shaped conductive member mounted on the upper end.

The spacer 9 formed in the cavity portion 8 is brought into contact with the inner surface thereof, and the bottle P = B shoulder to the bottom side is brought into contact with the inner surface of the external electrode 6 and accommodated, under the same conditions as in Example 2. A carbon film was coated on the inner surface of the above-mentioned PET bottle B. 'In Examples 3 and 4, 13.56 MHz was applied to the external electrode 6 and a south frequency electric power of ⑽% was output' to measure that the gas pressure of the bottle B and the exhaust pipe was changed to ... The bias voltage of the internal electrode 20 at rr. The results are shown in Fig. 4 (Example 3) and Fig. 5 (Example 4). As can be understood from FIG. 4 and FIG. 5, in Example 3 of the second embodiment, when the high-frequency electric power Nissa with i 3.5 6 Μ η z and an output of 〇〇〇w is applied to the external band electrode 6, the pressure can be changed according to the second pressure A bias voltage of -1GG V to _3QQ v is applied to the internal electrode. On the other hand, it is understood that in Example 4 which does not have a conductive member, a bias voltage is hardly applied to the internal electrode 20 even if the same frequency power is applied and the pressure is changed. This is because in Example 3, by mounting a conductive member 24 extending from the external electrode 6 on the upper end of the spacer 9, the conductive member 24 can be opposed to the conductive member μ, and the grounded exhaust gas fl2 can be used as a reference potential. The reason. (Example 5) The carbon film shown in FIG. 3 was used to form a skirt, and the mouth portion to the shoulder portion of the bottle 6 was stored in a dielectric material holder with a ring-shaped conductive member 24 mounted on the upper end. 82578 -30- 573054 The spacers 9 > &, η μ Q &, and Qianzhigongdong 邛 8 Guinea brought it into contact with its inner surface,

The inside of the bottle B is in contact with the external battery J 'from the shoulder to the bottom side, and a carbon film is coated on the inside of the bottle B under the following conditions. In addition, the ^ -shaped spacer 9 is at a height of about 2 in the outer column of the # neighbor 6 meat cup cylinder: the pole is inserted into the mouth of the external electrode 6 and the spoon 22, which is stored in the outer electrode 6 (from the upper part)丨 丨 cm position). <Coating conditions> on the applicable part • Cylindrical spacer 9: made of Hotbell (... ceramics), eight-door '-name, Sumikin ring-shaped conductive member 24 ·· Stainless steel, cover 23 Gas blow-out holes 22: imm, i holes, medium · C2H2 gas, gas flow of the medium: 80sccm, gas pressure u W in 2 bottles B and exhaust f 丨 2. "Effective force of 16: nw wheel out ⑽ ~ ... (Example 6) The carbon part shown in Fig. 3 is stored at the upper end, and the garment is placed so that the spacer 9 formed by the mouth of f special bottle B to the shoulder The shoulder of the special bottle B made of the dielectric material of the empty conductive member to I :: and brought it into contact with its inner surface, and the above-mentioned bottom to the inside of the external electrode 6 and the same as in Example 3 Let it be stored. In Examples 5 and 6, a carbon film was coated on the inside surface of the wood bottle. 8. The high-frequency power of w: the gas pressure in the two-inch bottle B and the exhaust pipe 12 82578 -31- 573054 In Fig. 6 (Example 5) and Fig. 7 (Example 6) of the internal electrode 20 when it is changed to 0_2 T〇rr.筮 -Every # plant strength is constant, and: In the example 5 of the form, the output can be changed by applying a gas soil knife and applying 1 3 56 MH7 to the external electrode 14 to change, ㈣ A bias voltage of 500 yen is applied to the inner pole to the inner pole 20. On the other hand, it can be understood that in Example 6, even if the dust force of the gas is constant: one: the component hardly faces the inner electrode 2. The bias is applied == Frequency power is also "" mouth J child seat. This is because it is opposed to the cymbal member 24 protruding from the external electrode installed on the upper end of the spacer 9 and will be used as a reference potential. Hanging hole S12 畐: Examples 3 and 5 of the second embodiment of the Mihai can introduce the electropolymer generated in the above-mentioned Biersite bottle B into the external electrode 6, and can apply a uniform thickness of carbon on the inner surface of the special bottle B (Second embodiment) The second series: π is the outline of a carbon film on the inner surface of the plastic container of the third embodiment; Fig. 9 is an enlarged cross-sectional view of the main part of Fig. 8. It has a protrusion at the t &quot;! end. The cylindrical support members 42 'of the edges 41a and 41b are placed on the annular base 43. The cylindrical metal external electrode body 44 is placed inside the support member 42. The metal is formed in a disc shape. External electrode _ | cattle 5 iT, can be detachably installed on the bottom of the external electrode body 44. The external electrode body 44 and the external electrode bottom member 45 = external cylindrical electrode material such as a bottom, and The bottomed cylindrical battery P46 is provided with a carbon coating film. Plastic container (example 82578 -32-) / state 54 such as Baote bottle) B. In addition, a disc-shaped insulator is placed between the bottom part of the electrode 45 and the door D 4 J and the above-mentioned external parts. 47. And == Bubu electrode bottom member 45, the above-mentioned disc-shaped insulator 47, and the above abutment $ 家 收 47 44— 体 作 上下 上 # * Pushing is performed to close the external electrode body. Go to 4 of the external electrode body 44 The bottom part is made of a dielectric material. The upper and outer: = spacers 49 'in the external electrode 46 are inserted into the upper part of the body 44 in the above-mentioned ... 6. The cavity portion 48, the cavity portion 48 is a transmission,

^ π ', the bottle B inserted by the adult in the inside refers to the shape of the cylinder and the truncated cone corresponding to the shoulder. The above-mentioned spacer ㈣ uses screws (not shown in the drawing) screwed by a ring-shaped insulating member placed thereon. The conductive member 50 is provided on the end surface of the above-mentioned spacer Ί so that the moon beans and the outer electrode 46 are in contact with each other. The surface of the upper end of the external electrode 46 is aligned with the conductive member 50 to form a shape that extends downward from its circumference in a ring shape. In this way, the cylindrical spacer 49 and the conductive member 50 are inserted into the external electrode. In the structure of the upper part of the main body 44 of 46, when the bottom side of the external electrode 46 is inserted into the bottle B, the mouth and shoulders outside the bottle b can be stored in the cavity of the spacer 49. The outer periphery of the special bottle B in the inner part M can be stored on the inner surface of the external electrode *. The dielectric material 'forming the spacer 49' can be used as described in the first embodiment. — The ring-shaped insulating member 51 is placed on the external electrode 46 such that the upper surface of the ring-shaped insulating member is aligned with the upper flange 41a of the first-shaped support member 42. The upper and lower flanges 52a, Gas of 5 to 82578 573054 exhaust 53 'is placed on the upper flange * la of the support member 42 and above the annular insulating member 51. The exhaust pipe 53 is grounded. The above-mentioned gas exhaust officer 53, Screws are screwed from the lower flange 52b of the exhaust pipe 53 to the upper flange 4U of the support member 42 so as to be fixed to the support member 42. The exhaust pipe 53 is not shown in FIG. The screw shown in the figure passes through the annular insulation from the lower flange 53b of the exhaust pipe 53 and is adjacent to 51, and is screwed to the body of the external electrode 46, and can be fixed to the bad insulating member 51 and the external electrode. 46 ±. The ring-shaped insulating member 51 can also be fixed to the external electrode 4 6 by using the screw. In addition, the L-type gas g 5 j can be fixed to the ring-shaped insulating member 51 and the external electrode 46 by using nails. The exhaust officer 53 and the external electrode * form a non-private mounting structure. One end of the branch gas exhaust pipe 54 is connected to the side wall of the gas exhaust pipe 53. The branch gas exhaust The other side of the pipe 54 is an exhaust device equipped with a vacuum pump as not shown. .

The ring 59 is exhausted through the gas, and the upper end of the gas supply pipe 62 is connected to the lower end of the gas introduction pipe 63 inserted through the casing 61 from the outside through an insulating joint 64 through an insulating joint 64. A grounded sealing tube 66 having a flanged tube 65 at the upper end is arranged to cover the gas exhaust pipe 53 and the gas supply 6 2 inside the spacer 49. The ground seal tube 65 is located inside the spacer * 9 and in the gas exhaust pipe 53 near the spacer 49. The upper end of the flange tube 65 is connected to the back surface of the lid body 60. In other words, the grounded sealing tube 66 is connected to the grounded cover 60 through the flanged tube 65. The internal electrode 67 'is disposed in the above-mentioned external electrode 46 and the spacer 49 in a substantially full length over its length direction (a space into which the bottle P can be inserted). The upper end 'of the internal electrode 67 is detachably mounted on the lower end of the gas supply pipe 62 on the side of the spacer 49. The above-mentioned internal electric circuit: digs the gas flow path 68 on its central axis. The cover 70 is detachably attached to the bottom of the internal electrode 67. The cover &lt; pudding, tooth δ is also useful for blowing out the gas through the mouth 6 9. In addition, the gas blow-out hole can also communicate with the above-mentioned gas flow below the internal voltage. In this case, the gas blow-out is from the bottom of the internal electrode 67 to the insertion of the above-mentioned length of 2 5 °. The diameter of the above-mentioned internal electrode 67 in the side area within the range up to and below is set to a Pott bottle ... and the length is set to approximately the full length of the length direction of the Pottbus B. Length The standard is the ratio of the ratio of the length of the bottle 6 to the length of the bottle 2: where D is the inside diameter of the f bottle and L is the length of the bottle 2: 82578 -35- 573054 L &gt; (D / 2) 〇The internal electrode 67 on the upper tap is made of a basic material with heat resistance such as tungsten or stainless steel, but it can also be made of aluminum. In addition, when the surface of the internal pole 67 is smooth, it can be easily peeled off. The carbon film deposited on the surface of the internal electrode 2 may be damaged. Therefore, it is better to sandblast the surface of the internal electrode 67 to increase the surface roughness and not easily peel the carbon film deposited on the surface. ,, the higher 2 frequency power source 71, through the cable 72 and the power supply end It is connected to the side of the gas supply pipe M that also serves as the terminal of the slave-frequency power. MH is installed on the cable 72 between the higher frequency power source ^ and the power supply terminal 73. " The edge film 75 ′ is formed on the inner surface of the row with the grounded sealing tube 66 ′. The insulation 75 ′ is made of, for example, a polyfluorotetrafluoroethylene resin, using a plastic container manufacturing method shown in FIGS. 8 and 9. The external electrode bottom member 45, the disc-shaped rural body 47, and the base 43 are detached by an unillustrated pusher to open the bottom of the external electrode body 44. Then, a plastic container, such as a PET bottle B, is inserted from the bottom side of the opened external electrode body 4 to the mouth portion of the PET bottle B. Next, the external electrode bottom member 5, the plate-like insulator 47, and the base 4 are mounted on the bottom of the external electrode body 44 in this order using a pusher of a new type. As a result, the mouth to shoulder of the bottle of PET bottle B is not accommodated in the hollow portion 48 of the 0-shaped spacer 49 made of a dielectric material 4, and the shoulder of the bottle of PET bottle 3 is 82578. -36-573054 To the bottom side is housed in the above external electrode combination / secret # ^. Within T46. At this time, the above-mentioned PET bottle B is communicated through the mouth on the exhaust officer 5j. Secondly, the gas exhaust inside the upper exhaust pipe 53 and the upper and lower parts of the bottle and the bottle B are exhausted through the branch exhaust pipe 54 and the exhaust pipe 5 using the oxygen exhaust section and the breast exhaust port (not shown). milk. Then, the medium gas is passed through the gas 63 and the gas supply pipe 1, and the gas cooker to the internal electrode 6 7 0…… strong man lice slave road 68. At the bottom of the internal electrode 67, the gas of the supplied medium, Qiu Α φ s ^, and the gas blow-out hole of the scorpion 70 which is in the bottom of the internal electrode 67, were discharged into the actual bottle B. This medium gas, ±. Bekongyue and further into the mouth of the bottle B. After that, a balance of gas supply, turbulence, and lice removal was obtained, and the above-mentioned rent bottle B was set to a specific gas power. Next, the bias power 〇 _ 刀 刀 道 过 电 # see 56, the matching device 59, and the electric power terminal 57 are supplied from the bias power source 55 to the above-mentioned external DIFENG, a, F, and F46. After that, or the same ¥ Drink more high-frequency power supply 7 1 will return higher ancient phase ten 丄 * 乂 back to the high-frequency power through the cable 72, matching port 74 and power supply terminal 73, the hole limbs to the official 62 , And through the gas supply, supply, and supply to the internal electrode 67, +, ~ instrument back frequency power. At this time, a plasma can be generated around the upper inner electrode 67. Furthermore, the above-mentioned external electrodes 4 and 6 are electrically connected to a conductive structure 63A disposed on a spacer 49 made of a dielectric material piece 50 and a ten piece of clothing. The grounded exhaust pipe is a reference potential and from the outside, the child electrode 46 applies a bias voltage toward the internal electrode, Ju Jie, and brother toward the generated plasma. Result 'a) When using a high-frequency thunderbolt I Erri Sunwatch, because the electron density is higher than that of high-frequency electricity w especially at low gas pressure and parts, so the L7 7 load and medium The collision frequency of gas and the density of μμ 南 made film. b) Effects of each program. Since the potential with the plasma can be changed when the voltage is compressed, 82578 ~ 37-573054 can be adjusted to the ion energy on the inner surface of the bottle B. e) Since the ion density is poor compared with the electron 2: ratio: Therefore, by adjusting the potential difference with the above, it is possible to control the ion flux to the inner surface of the actual bottle B. By applying a bias voltage to the neighbouring ^ 9% of the plasma and the earth king 丨 ΛΙ 口 丨 electrode 6 7 to bow the plasma |, you can draw the electrode at the feeding part in mm% water 46 in amine The external electrode 46 using the above-mentioned polymerization to desolvate the medium gas and add partial power to the ink == — a uniform and homogeneous carbon film. After the specific thickness of the film thickness phase of the "quick-coated carbon film" in the bottle B, stop the bias power from the above-mentioned bias power supply 5 5 and 1 away from the ancient phase. Supply and stop the medium gas. ~, Private, and then stop the exhaust of the gas. Then: the exhaust gas into the Saga body and so on through the above-mentioned gas guide pipe 63 through: &amp; rare milk, or air gas flow Road 68 and cover 70—the supply tube 62 and the internal electrode 67 will be the inside and outside of the above-mentioned PET bottle B = Γ: ν ^ 69㈣, and a carbon film PET bottle. After that, press 1 to remove the inner cover To the coating of the next Pote bottle: exchange the Pote in the order described, and move the phase I; the medium gas can be used with the above high-frequency power as described in the first embodiment is not limited Here, it is sexual (pulse type). 'Although it is generally defined as 30 ~ 300 Μ300ζ, the application of electric power such as ° can also be continuous or intermittent, but it is not limited to this.

Intermittent or intermittent (pulse type 1 乂 56 MHz, 100 ~ 100 000 ψ) The application of the bias power can also be continuous 82578 ~ 38-573054 or more, according to the third embodiment, it will have A cylindrical spacer 49 made of a dielectric material of the hollow portion 48 is inserted and fixed on the external electric upper portion, and the conductive members 50A μ, +, and M ^ are connected to the external electrode 46 on the spacer 49. It is arranged so that at least the mouth of the Pote bottle 3 is connected to the hollow portion 48 of 49, and the upper: two P are stored in the spacer h. The shoulder of the shell 4 inch bottle B to the bottom side are stored in the outer p electrode 4 6 and supply the data and the low-intensity medium shell milk to the above-mentioned bottle B, and supply the partial power to the external electrodes 4 electrodes 87 to use the "_ 力 给" Plasma is generated between the inner A electrode 87 and the outer electrode (substantially ^ the inner surface of the above-mentioned special bottle B). As a result, it is not only the inner surface from the shoulder of the window & bottle B to the bottom side, but also the above Dielectric: The thickness of the mouthpiece of the PET bottle B opposite the spacer 49 to the scapular, ',, and thickness are all ~ W ^ The inside of the scapular is acceptable Ziyou 厌 9 stone hate moon fruit. In addition, the entire inner surface including the shoulders can be coated with a thick mouth to a uniform and homogeneous carbon film. You can use higher frequency power When supplied to the internal electrode 87, it can be compared with the above, /,:,... As a result, a PET bottle with the above-mentioned carbon film oxygen from the outside = Γ carbon film can be coated on the entire inner surface at high speed, which has excellent barrier properties for prevention. … K inside (such as finished acid beverage water) can be used to cover the special bottle B through the partition 49 that can be injection-molded plastic, for example: The material is formed into a heterogeneous shape. Therefore, compared with the past From the external ::: all the surrounding complex components can be more easily manufactured. Furthermore, it can be made of conductive materials containing these metals and composed of external electrodes. In the past, if used, the entire Pei Zhi can be made lighter ... The entire 82578 -39- 573054 of the pieces can be prevented by using spacers such as plastic to prevent the Pott bottle heart: == In the case of a scar on this part. ° U When in contact, again, in the above The conductive member 50 and the exhaust pipe 53 are connected by connecting ^ 、 / 、 &Amp; 53 'In other words, the N-cut elbow is connected to the upper part of the fan, and the use of the conductive structure of the above-mentioned conductive structure is almost exhausted. Apply a bias power to the "," in other words, say between the total line of cattle 50 and the exhaust pipe 53, ~ to generate unnecessary electrical equipment in the breast milk officer 53. Therefore, the pancreas application efficiency will be affected. This kind of unnecessary exhaust gas, the above-mentioned exhaust gas near 50, its 60 Γ can be exhausted by making the guide 73 above. "The inner surface is exposed, and the insulation film is used to restore the exhaust gas above this. Part 63 to prevent. Exhaust Ϊ 5, between the gas supply pipe 62 and the grounded general, in other words, the exhaust pipe _ also generates unnecessary electric water, so that the carbon film The coating efficiency is lowered. The generation of the unnecessary plasma of the zinc alloy is caused by the above-mentioned gas supply pipe 62 to 66. ㈣ The grounded sealed tube is arranged to the third embodiment, although Insert the dielectric material with the cavity 48 in a manner corresponding to the mouth of the Bautuan B. 6: The spacer 49 is inserted and fixed on the upper part of the external electrode 46, = the shoulder of the actual bottle β extends to the bottom, σ, (Example 7) A film made of "Extrude". The above-mentioned carbon film forming apparatus shown in Figs. 8 and 9 enables the mouth of the beta bottle β: 1 a spacer made of a dielectric material 枓 with a ring-shaped conductive member 50 mounted on the upper end. The hollow portion 48 of 49 is brought into contact with its inner surface. 82578 -40- 573054 Place the shoulders of the upper bucket bucket B to the bottom and contact the external electrodes for storage. In this state, Quya% died Γ. s 1 The following conditions are applied to the inner surface of the above-mentioned bottle B, and a cylindrical spacer 49 is inserted into and housed in the external electrode 46 inside the external electrode 46. The mouth and shoulders of the Pott bottle b with an inner depth of approximately 22 cm (11 em from the upper part). &lt; Application conditions &gt; • Cylindrical spacer 49: made of gold ceramic), • ring-shaped conductive member 5 0 • gas blow-out of cover 70 is made of 4 inch bell (shower \ one small) (brand name) : Made of stainless steel, hole 6 9 · 1 mm hole, 1 hole, medium: C2H2 gas, medium gas flow rate · 4 ～ 80 ～ seem • Gas pressure in special bottle B and exhaust pipe 53: 〇 〇8 ~ 〇_ ”. Rr, high frequency power from 仏 to inner port 15 electrode 67. 100 MHz, 250 λν, high frequency power applied to external electrode 46: 13.56 MHz, output 25 watt. In Example 7, a high pressure of 13.56 MHz and an output of 25 watts was applied to the external electrode 46. The pressure of the gas in the Pote bottle 8 and the exhaust pipe 53 was set to 一 &quot; T. The voltage in the vertical direction of the m-inch internal electrode 67. The results are shown in Fig. 10. It can be understood from Fig. 10 that in Example 7 of the third embodiment, a bias of -450 V can be added under the pressure 0 2 τ%. Voltage, and as shown in Example 5 of the second embodiment (illustrated in FIG. 6), a bias voltage of approximately the same when a high-frequency power of 250 W is applied can be applied. Example 7, the higher-frequency power can be supplied to the internal electrode 67, and the plasma of the door degree is generated in the above-mentioned bottle B, and the above-mentioned plasma is attracted by the 82578 • 41 · 2 electricity External electrode ... and available,

The inner surface is coated with a carbon film with a uniform thickness. This is a cross-sectional view of a beaker bottle B (fourth embodiment). The plastic container and the inner leg of the fourth embodiment are shown. 3 w | 烕 The carbon film is provided at the upper and lower ends, and is placed on the lower part of the ring shape: Seal :: Cylindrical electromagnetic ㈣ High frequency slave device leaks ::: ⑻, and is electrically connected to seal at the same time. The metal external electrode body located in the upper flange 10] is inside the sealing member 102. The method of forming &amp; is arranged on the above-mentioned electromagnetic password, and is detachably mounted on the bottom of the external electrode body 104 and the upper electrode body 104. For example, except for the bottomed cylindrical shape, the external electrode bottom member 105 constitutes 1 W ^ pole 1 〇6, and the ancient ancient m ..., pole 106, there is an external battery that can be set to form a carbon blanket "B" In addition, a L-shaped sealing member 103 is formed on the bottom of the Bote external electrode, and a disc-shaped insulator 配置 is disposed between the above and the outside. The bottom seal J and the bottom member 1 are also provided. 5. The above-mentioned disc-shaped insulator 107 electrode bodies 1G4—the stomach opens and closes the bottom of the outer body 104. The sub-pair of the outer body of the cylindrical body is made of a dielectric material. , +, Are the inserting side; the above is the upper part with the hollow part 108 ,: body. 4. The plastic container of the cylindrical spacer 109 (for example, the second hollow part is formed and inserted into the inner shell 4 inch bottle punch Cylinder and circle corresponding to the mouth and shoulders 82578 -42- 573054 The shape of the frustum 'the spacer ι09 above, the screw pin to which the insulating member is screwed (not shown: the ring-shaped cylindrical spacer on it) 109 insert and fix :: solid again. So when the circle _ upper part, from above : Kennedy 106t of Ϊ4Γ power plant of the body

At the time, the outer side of the Pote Bottle B is inserted into the Pote Bottle B and the outer shoulder of the Inch Tile B at the bottom side of the house at ° ° 106, and it is divided into: Close to the above-mentioned spacers ^ The outer periphery of the other special bottle B is connected to the seven piles near the inner surface of the above-mentioned external electrode 106. Θ-day contact or connection constitutes the same material as described in the above-mentioned embodiment of the spacer 109. The same edge member UQ as the first description above can be used, and the ring-shaped insulating member ⑽ is used to form the same shape on the fish. The sealing member 10 is formed on the external electrode 106 with the surfaces ^ ^ ^, ', aligned on the surface. The above-mentioned spacer ⑽ sets a screw (not shown) from the above-mentioned ring:,; gp on the spacer I 09 can be connected to the above-mentioned edge member U0 and fixed in the external electrode 6. The above-mentioned ring can definitely match the upper end face of the mouth part of Potejo. However, the person from the mouth of the bottle B to the side of the shoulder. In order to suppress, "1 main crumb °" becomes thicker. This is the mouth of B: = generated by the inside of 'and prevent A film is attached to the inner surface of the Pote bottle ^ to improve the appearance. The upper and lower gas exhaust pipes 112 with flanges ⑴HUb are placed on the parts ::: the upper surface of the dense seal member 102 and the above ring. Insulating stud ... The gas exhaust pipe 112 'is fixed to the sealing member 102 by electromagnetically sealing the upper part of the electromagnetic bifurcation seal member 102 by protruding the lower part of the helical core 112 (not shown) from the above-mentioned platoon ^ pipe 112 to the convex member. The trachea 112 is formed by screwing an unillustrated screw from the above 82578 • 43-573054 exhaust I 11 2 lower flange 1 11 & penetrating the handle-like insulating portion 110 on the outer W teeth and the screw 21 104, it can be fixed on the ring-shaped insulating structure Γ ° and the external electrode 106. The ring-shaped insulating member U. It can also be fixed on the external electrode with the screw screw 06. In addition, the milk-exhausting officer 1 1 2 is fixed with the ring-shaped insulating member ii 〇 and the external electrode 固定 2, and the exhaust is exhausted with a screw. The pipe 112 and the external electrode 106 form a mounting structure that is not electrically conductive. One end of the branch gas exhaust pipe ⑴ is connected to the side wall of the gas exhaust pipe 112. The branch gas is exhausted and the other end is g⑴. It is an exhaust device equipped with a vacuum pump as not shown. For example, a high-frequency power with a frequency of 13.56 MHz is used as the bias power. The source f is 114 ′, which is transmitted through a coaxial cable 115 and adopts an N-type socket. The power supply unit 116 (not shown) is connected to the external electrode 106. The matching device ιΐ7 is connected to the coaxial cable 115. In addition, the lower flange 11 ib of the exhaust pipe uses the coaxial The cable i 15 is hermetically sealed (not shown) and grounded. In addition, all components such as the electromagnetic sealing member 102 which are electrically connected to the lower flange and above are all grounded. The cover 119 is air-tightly fixed to the gas. The upper flange 111 &amp; of the exhaust pipe 112. The cover 119 is provided with an insulating ring 118 at the center, and is grounded by an electrical connection with the lower flange 1 丨 lb. The frame body 20 is installed On the cover 1 to 19. The gas supply tube of the terminal of the high-frequency power 丨 2 丨 is the insulating ring 1 1 8 from the above frame moon bean 1 to the inner shell 1 1 9 and passes through the above-mentioned gas exhaust officer 1 1 2 And inserted into the spacer i 09. The gas supply pipe i 2 1 stands upright, and is connected to the gas inserted through the housing from the outside through an insulating joint 1 2 3 ^ 2 〇82578 -44- 573054 The lower end of the introduction pipe 122. The ground sealing pipe 124 having the flange pipe 125 at the upper end is configured to cover the gas exhaust pipe 112 and the gas supply pipe 121 portion located in the spacer 1009. The ground sealing tube 124 can be fixed and grounded by screwing the flange portion 125 on the upper portion to the cover 119. In addition, the ground sealing pipe 124 is located in the gas exhaust pipe u 2 in the spacer 109 and in the vicinity of the spacer 10 9. The inner electrode! 26 is arranged in the above-mentioned outer electrode 106 and the spacer 109 in a substantially full length across its length (the space into which the bottle P can be inserted). The upper end 'of the internal electrode 126 is detachably mounted on the lower end of the gas supply pipe 121 located in the space: paste. The internal electrode 126'k cuts through the gas flow path 1 2 7 on its central axis. The two gas blowing holes can also be on the lower side wall of the internal electrode 126. In this case, it is preferable that the gas blow-out hole is opened at a side region within a range of 2 'from the bottom of the internal electrode 126 to the long 25/0 inserted into the above-mentioned bottle B. = The diameter of the internal electrode 126 'is set as the sealing part of f special bottle β, straight furnace 2: The degree is set to approximately the full length of the length of the Bosch, and the standard is the ratio of the length of the special bottle B to the heart. : &gt; (D / 2): D indicates the inner diameter of the bottle, 4 indicates the full length of the bottle 1, 2: Γ126, although it can be made from various metal materials, but the electrical properties of the gold are: 3 skin surface The preferred material is such as "㈣". However, when considering cost, it is made of aluminum rather than 82578 -45- 573054. In addition, when the surface of 1% of the internal electrode is smooth%, there is a possibility that the electrode deposited on the internal electrode 126 may be easily peeled off. Therefore, the “better” is to advance the surface of the internal electrode 126: processing to increase the surface itch.

On the contrary, there is another method of forming the surface of 矣 Α π ^ H very smoothly, and erasing or blowing away the deposited material each time.仃 Read Higher frequency power supply for higher frequency power! 2 8. The mirror 129 and the power supply part 13 ° are connected to the gas supply pipe 气体. Matching: T series is mounted on the coaxial electrical object. The above power supply unit Tao Er (, :: (not shown :)) is installed on the above-mentioned frame 120. The coaxial cable 129 has 4 seals, and the above-mentioned frame is also filled with the conductor outside the plug (both not shown). 120 is connected, and constitutes the above-mentioned high-frequency power source 28 and the partial use of the factory: The ground of the source 14 is all set at the same ground potential. Electricity uses the above-mentioned bias in the above-mentioned carbon film forming device ^ ^ .s ^ The power supply 114 for compression and the relatively tight seal member 103 applied by the south frequency power supply 128, the cylindrical shape ~, the south frequency system for S use, the same shape of the pen magnetic seal member 102, the exhaust pipe 112 January The bean 119 and the frame body 120 are released in the room. The inner part is used as an electromagnetic seal without facing downwards, and the method of manufacturing a plastic container using the film shown in FIG. 11 is used. The outer cover is used to explain the inner surface coating. The "carbon film edge" is pushed forward to remove the external electrode bottom member 105 and the disc-shaped sealing member 1 (33) to open the bottom of the external electrode body 104. Then, mark the plastic tape. For example, a PET bottle B is inserted from the bottom side of the opened outer p "to the mouth side of the PET bottle b. Immediately after 825 78 -46- Μ, using an unillustrated thruster to seal the outer edge body 107 and the lower member! $ &Amp; part member 105, the bottom side of the disc-shaped insulator 104. Burst J χ This order is installed on the external electrode The body is housed in a dielectric material: it is shown that the mouth of the PET bottle β to the shoulder 108 is brought into contact with or connected to the hollow portion of the columnar spacer 至 to the bottom side or close to the above, Outer two: Shangna. At this time, the above-mentioned treasure series will pass through. And on the S 112 through its mouth, and then next 'Using the adjacent exhaust pipe not shown through the branch exhaust pipe U3 and exhaust Lu 1 and Exhaust the gas from the above exhaust pipe 丨 12 above and above the bottle B. Pass the medium gas from the gas introduction pipe ^ 122 through the rolling body supply pipe 121 to the gas flow path 126 of the internal electrode 125 , A _

Phenomenal, it was blown out to the bottle B. : The medium gas continues to flow toward the k mouth of the bottle. Next, take the balance between the milk supply and the gas exhaust to set the above to a specific gas pressure. ,. . Next, the bias power is applied from the bias power source 114 to the external electrode 106 through the cable 115, the matching unit 117, and the power supply unit 116. Thereafter, or at the same time, the higher-frequency power is supplied from the higher-frequency power source 128 to the gas supply pipe 121 through the cable 129, the matcher 13 1 and the power supply unit 130, and further through the 50-h gas supply pipe 121. The internal electrodes 126 are supplied with high-frequency power. As a result, a plasma can be generated around the above-mentioned internal electrode 126. At this time, the ground sealing pipe 124 is disposed on the outer periphery of the gas supply pipe 1 2 1 so as to be located in the spacer 109, the ring-shaped insulating member 110, and the gas exhaust pipe 112, and penetrates the flange portion 125 at the same time. And ground. Therefore, 82578 -47- 573054 == the sealed tube 124 can be used as a reference potential to generate a bias voltage from the above-mentioned external electric plasma. The moon side is also added to the above-mentioned gas supply camp, and the relatively high-frequency electric field system of L, Liaoquan, Kou, and Lulu 121 can be shielded by arranging the four seals 24 on the outer periphery of the gas supply pipe. It is possible to prevent a relatively high-frequency electric field from being applied to the exhaust pipe u 2. Two to the higher of the above-mentioned gas supply pipe 121 and the internal electrode 126. The above-mentioned grounded sealing tube ⑵ is inserted into the inside of the second bottle from the mouth of the bottle B, and can be partially shielded near the mouth of the bottle B. Therefore, the relatively high-frequency electric field in the south can be prevented from being applied to the space of the mouth portion of the f special bottle 8 described above: in the shape of the edge member 11. Setting the lower surface to the height from the upper end of the above-mentioned bottle P 7 to the shoulder can also prevent the bias voltage applied to the outside U from being applied to the space of the mouth of the above-mentioned bottle B. Secondly, the carbon content and film quality of the inner surface of the bottle B can be improved according to the following effects. A) When using higher high-frequency power, because in particular under low gas pressure conditions I: obtain a higher electron density than high-frequency power, the collision frequency with the medium gas can be increased and the density of the film formation can be increased . w When adjusting the bias power, the potential difference from the electric potential can be changed, so the ion energy incident on the inner surface of the bottle B can be adjusted. Since the ion density is directly proportional to the electron density, by using the above-mentioned potential difference ", the ion flux that a person shoots to the inside of the f special bottle B can be controlled. Furthermore, the following effects can be obtained. d) The higher high-frequency electric field applied to the gas supply pipe] can be shielded by arranging the upper ground sealing pipe 124 on the outer periphery of the gas supply pipe 121: Therefore, 82578 -48-573054 prevents the higher frequency ♦ μ, +. ± ^ electric% palladium from being added to the exhaust f 112. The above-mentioned high-frequency thunderbolts and high-frequency effects can prevent Lie Yan's electric shock from being generated at the mouth of the special bottle B. Because the higher-frequency electricity is similar to the strong electric shock, it can be consumed, which can make When it arrives ... "The efficiency produced near the mouth of bottle 6 can improve the power transmission by increasing the M pole 126, and the e) generated inside the beta bottle β) is due to the electric field. ^ For Yiwusheng ’s thickness, you can use η π #] Λ coating of the shoulder opening P of the bottle B. “Use the spacer 1109 with a long production of 1 μ + 124 thickness Or the grounding of the sealed tube again to control. Therefore, the speed and quality of the carbon film. ^ The inner surface of "inch bottle B is formed by this kind of plasma, that is," the inner surface of Renbei inch cup B is coated with a few centimeters of uniform and homogeneous carbon film at high speed. After forming a specific film thickness, the η 6 beauty bottle is closed together. Fen ^ 3 is from the end of the above-mentioned bias power supply 114 and the high-frequency power supply 128 of the Emperor Liu Bu Yidian / Yuan 114 Zhisong ^ The power supply of the earth is more than the power of the southern frequency, Stop ^ bleed the exhaust of milky moon beans, stop gas, rolling. Next, nitrogen, a rare gas, or an internal electrode of "1?" And the above-mentioned gas introduction tube 1 2 2 were passed through the gas supply tube 2 1, 127, and the vermiculite was weak, and the internal electrode of '1 The gas flow path i of U6, to the actual knowledge &gt; inside the bottle B, and return the inside and outside of the present Zhaizhukou Haibet bottle B to atmospheric pressure. After that, pay the window in the same order as above and change the 4-inch bottle B again, and move to the coating operation of the next bottle. Inch

The above-mentioned medium gas can use I 4 π and use the same as described in the above-mentioned one embodiment. 0 The above-mentioned local frequency of the southern frequency, a ship miscellaneous site A,, although the version is 30 ~ 300 MHz, but It is not limited to this. In addition, the ribbon belt temple can be continuous or intermittent (pulse type). 82578 -49- 573054 Although the above bias power is generally 1 3 · 56 MHz, the range is 50 kHz ~ 20 MH \ 100 ~ 1000%, but it is not limited to this. The% addition of the bias voltage may be continuous or intermittent (pulse type). In the above, according to the fourth embodiment, the right side is arranged on the outer periphery of the gas supply pipe 121 in such a manner that the grounded sealed pipe 124 is located inside the spacer 1009 and near the spacer 1009. At least the mouth ^ shoulder of the f special bottle B is stored in the hollow portion ⑽ of the spacer 109, and the shoulder of the inch bottle B is brought into contact with the external electrode 1 to the bottom side and stored, and is supplied from the gas supply. The tube 121 supplies the medium gas to the above-mentioned f special bottle through a blow-out hole that also serves as an internal electric blower of the blow-out tube, and supplies higher-frequency power to the internal electrode by biasing the partial electrode 106. The inner pole of the above-mentioned internal electrode 126 (the inside surface of the bottle B) is essentially the above-mentioned Bao special description Bao special Γβ. By the generation of this type of electropolymerization, the thickness of the upper surface ^ WB can be coated with carbon of uniform thickness membrane. In addition, by generating coins from the above-mentioned coin 1 to the internal electrode 126, in other words, to the electric water yoke, the thickness of the mouth portion to the shoulder surface including the above-mentioned Pote bottle B can be coated. The high-frequency electric power is supplied to the interior in particular, and the carbon film can be coated on the royal limbs on the inner surface of the beta bottle β by φ ^ ^ L ^. As a result, a special bottle that can be coated with carbon film can produce a kind of inner surface carbon from the inside. A /, &quot; Permeation of oxygen from the outside, and dioxide Re :: (such as carbonated beverage water) barrier to the advantages of permeation. The gas supply pipe 121 of the exhaust pipe frequency power and the grounded one will decrease = coating =: said = gas is not necessary. The plasma rate is bad. The grounded sealed tube 124 82578 &gt; 50- 573054 is arranged in the above. Generation of gas supply pipe 12ι. °, | 7 can prevent the above-mentioned unnecessary plasma. Furthermore, in the appearance of the PET bottle B, a barrier film is preferably attached. By inserting the inner surface of the mouth part of the upper part and the lower part of the mouth… into the interior ’, the mouth portion of the bottle B 特特 观 B can be suppressed from being applied:: generated. In addition, from the upper end to the shoulder ... TT hunting is not prevented at the mouth of the special bottle B. By using these two ^, the barrier film is attached to the mouth, and Rui can be obtained. The inner part of the south face is covered with a carbon film, and the treasurer is a sigma mouth; 1 06 Xi Xiangbian In addition, because the special bottle B is located outside the outer package pole 1 06, the inner wall is close to the outer space and the toilet 1 1 , Down, so on the outer wall of the bottle B 'on the outer wall of the bottle B will not be coated. 9 ¥ water, and furthermore, by using, for example, an injection-moldable spacer 109, it is possible to rub a complex-shaped member made of an "electrical material" made of f earth. Because of 彳 and shoulder J around the bucket dagger (in the case of all the components of the sentence 3 Haisi Temple made of external electrodes can be more easily manufactured. In addition, "3 uses a metal guide like 4'i; 丄 t dagger In the past, Lige's V children's materials were made of external electrodes and the crotch was made more lightweight. This is an important advantage when the rotary type is used in all components. M _ coating device In the fourth embodiment described above, although the mouth-to-column spacer of the dielectric I having the hollow portion 108 is formed so as to face to the shoulder, the circle formed by the bucket ^ 仵109 is inserted and fixed on the external electrode. 〇6 extends across the shoulder of the bottle B to the bottom. It is also a thin film. 82578 -51-573〇54 made of crust material, and the grounded sealing tube 124 is not It is limited to the shape of I and Gang, whose lower end is near the second part as shown in Fig. 11. For example, as shown in Fig. 12, you can also make the grounding fork seal · guan 1 2 4 down ☆ Shan You Seven People ^ There is a length of gold m near the center of the body of the special bottle B of 1 square bottle. With this structure, it can be suppressed in the shell bottle B. Chigu near the mouth and-attached «unwanted electric paddles generated in the milk discharge officer 112. 'The effective f paddles in the special bottle B can be used to consume the power supply. Therefore, it can be connected to Gu Leng private" 7 ^ The coating speed is increased. Moreover, the bias can be effectively applied to the electro-water in the bottle B, and the coating quality can be improved. (Example 8) The user uses the carbon film forming apparatus shown in FIG. 11 above. Make the mouth of the bottle B to H ° H Wenner in the cavity 108 of the spacer 10 made of dielectric material = contact or approach the inner surface, and make the shoulder of the above " The bottom is in contact with or near the external electrode} 〇6 &lt; Menquya is stored. To be grounded, the ground sealing pipe m is located above the spacer i〇9 and the gas near the spacer i09 to the exhaust officer i 1 The method of 2 is arranged on the outer periphery of the gas supply tube 1 2 1 and the carbon film is coated on the inner surface of the above-mentioned bottle B under the condition of 逑. In addition, a cylindrical spacer 1109 is inserted into and accommodated in the external electrode 106. On the part corresponding to the mouth and shoulder of the bottle 8 of approximately 22 cm in the external electrode 106 (a position of 11 cm from the upper part). Conditions &Conditions; • Cylindrical spacer ⑽: made by Hautbur (... a trade name, made by Sumikin Ceramics), • grounded sealing tube 1 2 4: stainless steel, gas path with inner pole 1 26 127 inner diameter 4 mm, 82578 -52- 573054 • medium c2h2 gas, gas flow of the medium 4 0 ~ 80 sccm, • gas pressure in the bottle B and exhaust pipe 112: 〇 〇8 ~ ... • High-frequency power supplied to the internal electrode 126 :: High-frequency power of the external electrode: 13.56MHz, output. ^ And the above-mentioned conventional example 2 ', the thickness of the bottom of the mouthpiece #bottom to be coated with a carbon film was measured. The results are shown in FIG. 13. It can be understood from FIG. 13 that the insert by Hotter Bell (Sample &lt; ° ⑽ ⑽ Example) is inserted into 114 corresponding to the mouth and shoulder of the f special bottle. The conventional Saki shown in FIG. 18, which is stored in contact with the inner surface of the external electrode from the mouth of the special bottle 5 to the bottom side, is shown in FIG. 18, and a thick carbon film is coated on the inner surface near the shoulder to prevent pancreas It is not uniform. In addition, the thickness of the in-situ part is due to the part of the Ishido membrane p ^ 5 that has entered 5 cm south. Conversely, the thickness of the thicker carbon film that has been peeled off from the pancreas (Example 9) is shown in the above figure. The carbon film forming device shown in η is arranged on the outer periphery of the gas supply pipe, so that the special bottle — ί = :: the hollow portion of the spacer 109 made of the material _ == near the outside = Γ〇 = the above f special bottle B Contact or connect from the shoulder to the bottom side, and apply a carbon film on the inner surface of the β-ampoule β. On the ship ’s bow, she ’s woven with 56MΗZ, 82578 -53-573054, and a high-frequency power of 250 W is used to measure Bottle b and exhaust pipe] The partial results of the internal electrode 126 when the gas pressure is set at 0.2 Torr are shown in Table 1. The table will be closed ---- Pressure (Torr) — ---- —, ~-Bias voltage V) Example 9 '------ 0.2 -1 Example 8 "with a -420 -------

As can be understood from Table 1 above, in Example 8 of the fourth embodiment, a bias voltage of about 420 volts can be applied at a pressure A of 0.2 Torr. On the other hand, in Example 9 with a grounded sealed tube, 'even if the same high-frequency power is applied :, the bias is applied to the internal electrode 26. This fairy dreams in Example 8: The grounded sealed tube 124 is arranged in the gas supply. In addition to the tube i2i, the grounded grounded sealed tube 124 can be used as the external electrode ι〇6: for the purpose of use. Tochihiro to the internal electrode can be used at the same time and can be used in Baoteruo according to this kind of example In 8, the high-frequency power can be supplied to 26 and the high-density plasma can be generated in the above-mentioned bottle b. The bias voltage can be used to introduce the above-mentioned plasma to the external electrode 106, and the inner surface of the bottle B is quickly coated. A high-quality carbon film with uniform thickness is applied. (Embodiment 5) Figure 14 is a cross-sectional view showing a modified example of the device of the fifth embodiment. In addition to the carbon film formed on the inner surface of a plastic container, Carbon of the fourth embodiment Except for the structure of the carbon film forming apparatus of the fifth embodiment, the rest is the same as in the above figure 丨 丨 82578 -54- 573054 = Garment set. The ground seal f 124 is extended to the PET bottle = Nearly, its surface area becomes larger The internal electric ㈣6 is lengthened as described above-in S 124, the length is shortened. The external electrode ι〇6 'also extends to the mouth of the pan fighter bottle: near the mouth. Set at the outer periphery of the mouth of the bottle B: 2: 9 It is the same as the external electrode 1 () 6 and extends to the vicinity of the f special bottle. Also, the grounded sealing tube 124 is shown in FIG. 14 and FIG. Exhaust fu2 (the outer peripheral surface of the exhaust fu2 and the outer peripheral portion directly above the internal electrode m)). In addition, the ground sealing tube 124 is shown in FIG. 16 in order to increase the surface area. A bellows-shaped protrusion 133 is formed on the outer peripheral portion and the inner peripheral portion of the exhaust pipe ι2 and directly above the inner electrode 126. In this fifth embodiment, the external electrode 10 is extended by To the vicinity of the mouth of the Pote bottle B, and using a bias power applied to the external electrode 贝 to supply the high-frequency power to the internal electrode 26, so as to place the plasma on the internal electrode 26 and the external electrode! 〇6 ( It is essentially the inner surface of the above-mentioned Pote bottle B) and the internal production of the exhaust pipe 112 At this time, the surface area of the ground electrode that can be seen from the plasma is the sum of the surface areas of the fins 132 and the ground sealing tube 124, and the surface area becomes larger compared to the fourth embodiment. The sheath (―) voltage generated between the electrodes is roughly inversely proportional to the area ratio of the electrode. Because the surface of the inner surface of the Pott bottle B located inside the external electrode 106 is the surface area of the above-mentioned grounded sealing tube 24 The ratio will become smaller, so the skinning voltage generated between the external electrode 106 and the plasma, in other words, the skinning voltage generated inside the Pote bottle B will be higher. In this kind of Pote The higher skin voltage generated inside the bottle B will accelerate the ions in the bottle B and increase the energy of 82578 -55- 573054 which can be shot from the inside of the bottle B to the inside surface of the bottle B. As a result, a carbon film having a better film value was applied. (Sixth Embodiment) FIG. 17 is an equivalent circuit diagram of a power supply system in which a carbon film is formed on the inner surface of the 实施 valley state in the sixth embodiment. The carbon film of the sixth embodiment is formed through

The system has the same structure as the carbon film forming apparatus of the fourth embodiment shown in FIG. 11 except that the ground seal is not disposed on the outer periphery of the gas supply pipe. As shown in FIG. 17, the bias power source 114 is connected to an external power source 117 via a power source 5 and is mounted on the power source 5 described above. The matching benefit 117: includes a first variable capacitor C, which is installed on the electric buffer U 5, and a blade cable i 6 whose one end is from the bias power source 11 4 and the first variable Capacitor. The electrical environment 115 between them begins to diverge, and the other end is grounded; and the second variable capacitor c2 'is interposed on the divergent electrical relay i6i. The high-frequency power source 128 is connected to the internal electrode 126 through a cable 129. Although the cable 129 is connected to a gas supply pipe (not shown), it will be described here by connecting it to the internal electrode 26 for convenience. Matching fast 1 3 1 is installed on the cable i 29 mentioned above. The matching device m includes: a first variable capacitor 〇1, which is installed on the cable i29; and a branch cable 162, one end of which is from the higher-frequency power source 128 and the first variable capacitor C Γ. The cable 29 between them starts to diverge, and the other end is grounded; and the second variable capacitor C2, which is installed on the divergent cable 162. One end of the sense L 'is connected to the conduction path between the matching device 131 and a gas supply pipe (not shown), and the other end is grounded. 82578 -56- 573054… According to this configuration, the bias power is applied from the bias power source 114 to the external electrode 106 through the cable 115 and the bias matcher η? As in the fourth embodiment described above. . The higher-frequency power is transmitted from the higher-frequency power source 128 to the internal electrode 126 through the cable 129 and the matcher 131 to supply higher-frequency power. As a result, a discharge can be generated between the internal electrode 126 and the external electrode :, thereby generating electricity. At this time, by connecting one end of the inductor ^ to the conduction path between the gas supply pipes not shown by the above-mentioned matcher ⑶ and grounding the other end thereof, the interior to which high-frequency power is applied can be made. The electrode 126 has a grounding effect with respect to the external electrode ，, and the grounded sealing tube is not arranged on the outer periphery of the gas supply tube. However, the fourth embodiment also applies a bias voltage from the external electrode 106 to the internal electrode 1 2 6, in other words The words are applied toward the generated plasma. As expected above, according to the present invention, a device for forming a carbon film on the inner surface of a plastic container can be provided. The basin can apply a carbon film with a uniform hook M to the entire inner surface of the plastic container. According to the present invention, a method for manufacturing a plastic container can be provided, in which a carbon film with a uniform film thickness of mr is coated on the inner surface, and has excellent barrier properties against oxygen and carbon dioxide. According to the present invention, a carbon film can be formed on the inner surface of the sturdy soil. Various types of plasma can be introduced into the plastic container toward the inner surface of the container by using a bias voltage. ㈣ 八 和 丌 Apply a good carbon film with uniform dryness to the entire inner surface of the plastic container. According to the present invention, a plastic system can be provided which can coat a carbon film with good film quality and uniform film thickness, and its 82578 -57- 573054 has better barrier properties against oxygen and carbon dioxide. If according to the present invention ', then a device can be provided which can be used in plastic containers, which can supply the internal electrodes with electric power which is higher than the temperature of the moon, and the ancient plasma can be generated in a plastic container.沭 山 沭 + will apply the bias voltage to the inside of the container, and apply a high-quality carbon film with a uniform film thickness to the entire inner surface of the plastic container at a high speed. Γ /, According to the present invention, It can provide a kind of mass production and manufacturing: glue capacity, which can be a good film quality and have a uniform film, the inner face of Yamaguchi t 'and has better barrier properties for oxygen and carbon dioxide. [Schematic description of the diagram] Figure 1 is a schematic perspective view showing a device for exterminating a stone in the shape of a plastic container within the shape of a yoke. Figure 2 shows the characteristics of the first embodiment and the mouth of the bottle; in Example 2 of M, the characteristic diagram of the skin thickness of the branch from Poto | Fig. 3 is a schematic perspective view showing a carbon film device according to a second embodiment of the present invention. / The formation of the inner surface of the seizure Fig. 4 is a characteristic diagram showing the change of the internal electric power and dust force when the high-frequency power of 笫 -Y At is applied to the external electrode in Example 1-3. Fig. 5 is a characteristic diagram showing the change in the force and bias of electricity applied to the external electrodes in Example 4 to the gas plant in the bottle and the exhaust pipe. Figure 6 shows the internal electrode pair of the modified electrode. Figure 6 shows that the high-frequency power that is also added to the external electrode in the bottle and the exhaust pipe of the 7th gas pressure is set to -82578 -58- Internal electrode θ, Fig. 7-Characteristic diagram of the change of Yu's compression. It is determined that the gas pressure in the special bottle and the exhaust pipe in the magic 6 is a pair of poles. ": The characteristic diagram of the internal radio, television and daytime changes when the high-frequency power of the child pole changes. Figure 8 This is a schematic perspective view showing the formation of a garment on the inside of a plastic container in which the F w brother of At carbon film is applied. Figure 9 is a view of the stone luri of Figure 8. ^ 丄 图 i 〇 ～: Money forming device Enlarged cross-section view of the main part. The fixed high-frequency power, the external electrode force port in Example 7 of the Form II, and the window liver is applied to the internal electrode. Pressure production—characteristics of cladding / soil and cross. E Fig. 1 Ut, _ cross section of the device of the fourth embodiment of the present invention, m inner surface η diaphragm film. An inner surface formation f Fig. 12if, _ not the present invention A cross-sectional view of a variation example of the inner surface y &amp; M of the fourth embodiment. Α. Formation of the inner surface. 3 shows the thickness of the carbon film of Example 8 and the portion to the bottom of the fourth embodiment. Fig. 14 is a cross-sectional view of a variation example of the fifth embodiment of the carbon film device according to the present invention D. Inner surface formation Fig. 15 is a sectional view showing the main part of the grounded sealing pipe of Fig. 14. Fig. 16 is a sectional view showing another type of the grounded sealing pipe of Fig. 4; The equivalent circuit diagram of the power supply system incorporated in the anti-pancreatic device in the plastic container of the sixth embodiment of the invention. / 82578 -59- 573054 Figure 18 shows a cross-section of a conventional device in a plastic container. Unload y. [Illustration of Symbols in the Schematic Diagrams] 201, 6, 46, 54, 106, 201a, 4, 44, 104 201b 202 203 204, 12, 53, 112 205, 20, 67, 87, 126 206, 22 207, 19 、 121 208 209 、 18 、 58 、 74 、 117 、 External electrode External electrode body cover stand stand, sealing plate gas exhaust pipe Internal electrode gas blowout hole Gas supply pipe RF input terminal 13 1 Matching device 2 1 0, 1 5, 5 5 High-frequency power supply la, 11a, 41a, 52a, 53a, 101a, 111a Upper flange lb, lib, 41b, 5 2b, 53b, 101b, 111b Lower flange 2, 4 2 Cylindrical support member 3, 43 Ring-shaped abutment 5, 4 5, 1 〇5 External electrode bottom Pieces 7, 47, 107 disc-shaped insulators 8, 4 8, 1 008 hollow part spacers 9, 49, 109 10, 51, 110 ring-shaped insulation members 82578 -60- 573054 13, 54, 113 branch gas exhaust Tubes 14, 60, 119 Covers 16, 56, 72 Cables 17, 57, 73 Power supply terminals 21, 68, 127 Gas flow paths 23 ^ 70 Covers 24, 50 Conductive members 59, 118 Insulating rings 61, 120 Frames 63, 122 Gas introduction pipe 64, 123 Insulation joint 65, 125 Flange pipe 66 &gt; 124 Ground seal pipe 71, 128 South-South frequency power supply 75 Insulation film 102 Electromagnetic seal member 103 Lower seal member 114 Bias power supply 115, 129 Coaxial Cable 116, 130 Power supply section 132 Fin 133 Corrugated protrusion 161, 162 Branch cable c !, CV First variable capacitor 82578 -61-573054

c2, c2, B L Second variable capacitor

82578 -62-

Claims (1)

J / 丨 The scope of this announcement and the scope of patent application: 1. A device that forms a carbon film on the inner surface of a plastic film with a bottom and a μ r, which includes: an external electrode with the same shape as the bottom, with a plastic cap U 3 μ is used at the time; the size r as the object to be treated is used to surround the peripheral spacers other than the mouth and shoulders of the container. 'It is made of a dielectric material and inserted into the above container. It is connected between the external electrodes; the mouth and shoulder of μ and the upper exhaust pipe, which are on the end of the container on the end surface of the external electrode on the insulation side, are approximately the length of the container. In the full-length way, the exhaust pipe side is inserted into the container inside the external electrode and placed on the ground side. At the same time, a hole for blowing out the medium gas is worn; ^ 7 gas components are installed on the exhaust pipe; An air-jacket element is used to supply a medium gas to the internal electrode; and a high-frequency power source is connected to the external electrode. 2. A method for manufacturing a plastic container covered with a carbon film on the inner surface, which includes the following steps when using a carbon film forming device called the first target of the patent to manufacture a plastic container covered with a carbon film on the inner surface: (a) 82578 573054 'Insert a plastic container as a to-be-processed object so that at least the outer periphery of the mouth and shoulder of the container is enclosed in the spacer, and the outer periphery of the other container portion is enclosed in the external electrode. In a bottomed, positive + M + -π-shaped external electrode and a dielectric material composed of a dielectric material; (b) A low g τ will be provided for the bottom.丨 or 疋 the side area or the inside of the through hole where the media gas is blown out # 二 口 Ρ 扑 极 'in a way that covers the entire length of the container, and the eighth ... The mouth side of the mouth; +, &amp; + The exhaust pipe on the end surface of the external electrode on the spoon is inserted into the inside of the container; (c) Use the exhaust pipe part to pass the gas above σσ ^ 1 through the above The exhaust gas is discharged and rolled. At the same time, a medium gas is supplied to the internal electrode by a gas supply member, and the medium gas is blown from the gas blowing hole of the internal electrode to the container to set the exhaust gas contained in the container to A specific gas pressure; and 将 supplying high-frequency power from a high-frequency power source to the external electrode to generate a plasma around the internal electrode located in the container, and using! Electrolysis to dissociate the medium gas to the container The inner surface is coated with stone reverse film. A device for forming a carbon film on the inner surface of a plastic container, which includes: a cylindrical external electrode with a bottom, which is inserted into the soil of the object to be treated under the plastic mouth R six mouths V 1 Zhigu descent inch is used to surround the mouth of the container. The outer periphery except the primary crumbs. The dielectric material is at the mouth and shoulders and the upper spacer. It is made of dielectric material. When the container is inserted, it is at least interposed between the external electrodes of the container; 82578 conductive members are connected to the external electrodes on the end face of the spacer on the side of the mouth of the 573054; row: tube It is installed on the end face of the external electrode through the insulating member on the side where the mouth of the container is located; the internal electrode is inserted from the exhaust pipe side to the outer port P in a substantially full length across the length of the container. The above-mentioned container in the package electrode is connected to the ground side, and at the same time, there is a gas blow-out hole for blowing out the shellfish gas; A milk discharge component is installed on the exhaust pipe; And treated with #, /, of the internal electrode for supplying medium gas; and a power supply member 4. ~ 'doubles which is connected to the external electrode bias it. = The manufacturing method of a plastic container with a carbon film on the inner surface is based on the application of the patent application No. 3 ^ Dou. Anti-pancreas Φ to describe the production of the inner surface of the coated carbon Wu Jiaogu | §, including the following steps: ⑷ Insert the plastic container as a to-be-processed object so that at least the outer periphery of the mouth and shoulder of the container is enclosed in the spacer, and the outer periphery of the valley portion is otherwise enclosed in the external electrode. In a spacer composed of a bottomed cylindrical external electrode and a dielectric material that holds a female garment in a manner that a conductive member is connected to the δHai external electrode; (b) A baffle will be worn to the bottom or side The internal electrodes of the region or both blowing media are through-holes of the milk body, and are mounted on the end faces of the external electrodes located on the side of the Saigu ... The exhaust pipe 82578 is inserted into the inside of the Jb container; (c) The above-mentioned gas is exhausted through the exhaust pipe parts through exhaust pipe parts, and the exhaust gas is exhausted through the exhaust pipe. The medium gas is supplied to the internal mine, and the medium gas is mixed into the container to set the gas pressure in the outlet pipe to a specific gas pressure; and the exhaust gas in the trough device also serves as a high bias voltage. The high-frequency power supply supplies high-frequency power to the outer and outer poles to generate pulp around the internal electrodes located in the container, and uses the plasma to coat the inner surface of the medium with a carbon film. $ 贝 乳 体 角 Noon to form a device for forming a carbon film on the inside of a plastic container, which includes: a bottom tube, and an external electrode, which has two devices inserted as objects to be surrounded. The perimeter spacers other than the σ portion and the shoulder portion of the container are made of a dielectric material, and the dielectric = is at least interposed between the mouth portion of the container and the external electrodes described in the shoulder portion; η 丨 only An upper conductive member, which is attached to the spacer on the mouth side of the container so as to be connected to the external electrode, and is a ventilating pipe, which is installed on the exterior of the container side through an insulating member On the end surface of the electrode; °° In the mouth P :: pole, which is inserted into the external electrode above the connection to the ground side with a general description of the length of the container above the lice tube, and is provided with a medium, The gas used by the Uranus ugly man blows out the 573054 exhaust component, which is installed on the exhaust pipe; the milk supply component, which is used to supply the medium gas to the internal electrode; a higher-frequency power source, which is connected to the interior On the electrode In: bias power source 'which is connected to the external electrode. For example, if a hard film is formed on the inner surface of a plastic container according to item 5 of the patent application, the inner surface of the exhaust pipe separated from the outer electrode by a desired distance is covered with an insulating film. For example, if a plastic film is formed on the inner surface of the plastic soil to form a carbon film coat on the inside of the patent application No. 5 or 6, the above-mentioned internal electrode is formed into a rod-like shape with a gas blow-out hole. The gas blow-out hole is used for Its central axis cuts through the gas passage and blows the medium gas to both the bottom and side areas. A gas supply unit has a gas supply extending from the exhaust pipe side to the vicinity of the mouth of the container. The above-mentioned internal electrode is installed on the end of the cryogenic tube freely. The above-mentioned gas supply on the mouth side of the device 8. 9 · ❿ The device for forming a carbon film on the inner surface of a plastic container, such as the item 5 of the scope of patent application, in which the 'grounded sealed tube is further arranged from the container to the exhaust pipe. A part of the above-mentioned gas supply pipe is on the outer periphery. For example, the sound of forming a carbon film on the inner surface of the plastic molder f 'of item 5 of the application for patent, among which, the feeding pole can be divided in the axial direction on the bottom' side of the container inserted above. _ 10 .: A method for manufacturing a plastic container coated with a carbon film on the inner surface, which is a carbon film forming device applying for item 5 of the patent scope for manufacturing the inner coating: 82578 573054 The plastic container of Yueguo includes the following steps: () As a plastic container to be treated, use a small net with a scoop net outside the shoulders to enter u. 之 The mouth of the container | The outer periphery of the container is enclosed by the spacer, the outer periphery of the container portion is enclosed by the outer = other than, Inserted into the bottomed cylindrical external electrode :. The inner method $ 笔 件 鱼 姬 玄 夕 卜 邛 黾 pole connection method installation medium / d pieces; the space formed by Mao Beicai ): The internal electrode provided with a through hole for the bottom or side area or both sides of the shirt gas is installed in an approximately full length of the container, and is installed in the second container through an insulating member. The exhaust on the end surface of the external electrode on the mouth side is inserted into the container; c The gas in the container is exhausted by the exhaust pipe member through the exhaust valve, and the medium gas is supplied to the internal electrode by the gas supply member, and the medium gas is blown from the gas blowing hole of the internal electrode to the container. Set a specific gas pressure in the exhaust pipe containing the container; and (d) apply high-frequency power from a bias power source to the external electrode, and simultaneously apply higher-frequency power from a higher-frequency power source. The plasma is supplied to the internal electrode, and a plasma is generated around the internal electrode located in the container, and the media gas is dissociated by the electropolymerization to apply a carbon film on the inner surface of the container. u · A device for forming a carbon film on the inner surface of a plastic container, comprising: a cylindrical external electrode with a bottom, which is used to surround the container when a 82578 573054 plastic container is inserted as the object to be processed; It is installed on the end face of the electrode of the container; ^ U is used to blow the gas out of the medium; lice supply pipe, which also serves as the power supply terminal, is connected to the above two L Inner package °, and its other end extends to the above exhaust pipe Hung; grounded in Fengguan, it is arranged in the above exhaust pipe located at least in the above it ^ ^ ^ rabbit pole and near the mouth of the upper mouth —Af &lt; Lice body supply officer 4 blades around and grounded; Exhaust component, which is installed on the exhaust pipe; Radon component, which is used to supply medium gas to the gas supply pipe and high frequency A power source is connected to the gas supply pipe. .For example, in the scope of application for patent No. ii in a plastic container ^ wicheng slave panties, wherein the exhaust pipe is installed on the end surface of the external electrode located on the mouth side of the valley through an insulating member. There is also a high-frequency power supply for bias voltage connected to the external electrode, and the n-frequency power supply for bias voltage has a higher frequency than the high-frequency frequency of the smart frequency power supply connected to the internal hammer. Low high frequency. ) L 13 For example, in the item 11 or 12 of the scope of Shen Qing's patent for the formation of carbon 'on the inner surface of a plastic container, wherein the grounded sealed tube is inserted into the inner side of the container than the mouth of the container. σσ 4 · For example, in the scope of the patent application No. 11 of 82578 573054 ′ where a carbon film is formed on the inner surface of a plastic container, which is further provided with a dielectric material. The dielectric material is inserted at least in the container when it is inserted into the container. ^ Rong: Between the mouth and shoulder blades and the outer condyle electrodes. °. 15 · ::: Please: form the carbon film on the inner surface of the plastic container in item u of the second range ... /, the above exhaust pipe system and an insulating member are mounted on the above external electrode located on the upper side of the upper part &lt; The upper end face; the upper and f insulation members are located in the area where the shoulders are inserted. … Day… The mouth of the Haigu device reaches 16. If the scope of patent application F ¥ GANΛ, Zhiwan, Plastic ♦ Guyi forms a carbon film on the inner surface; /, the above ground sealing pipe system has an enlarged outer surface $ Area shape. I. Door unloading surface 17. If the device in the scope of patent application 6 is applied, the upper, upper and lower surfaces of the center form a carbon film-like protuberance. If the U.S.A. unit or team applies for a device in the scope of patent application, it should be taken out and placed in the above container with a closed part that forms a carbon film on the surface. Above and below, and can be applied for the patent scope of the plastic coated with carbon film on the inner surface of the seeding method &amp; &quot; 〇 衣 &amp; method, which is used to manufacture the inner surface coating using the r The stone container of moon fruit contains the following steps: The inner surface is broken (a) It will be inserted as a processed external electrode; enclosed in a bottomed cylindrical shape. (==): Simultaneously, or back and forth, connected There is a gas supply pipe with a grounded seal placed on the outer periphery, and an internal electrode that also serves as a gas blowing pipe for blowing out the gas 82578 573054 is inserted into the above container; (C) the exhaust pipe member The gas is exhausted through the exhaust pipe, and at the same time, the medium gas is supplied from the gas supply pipe member to the internal electrode, and the medium gas is blown from the gas blowing hole of the internal electrode to the container to contain the gas contained in the container. A specific gas pressure is set in the exhaust pipe; and (d) the south frequency power is supplied from the south frequency power supply to the internal electrode through the gas supply pipe to reduce the frequency lower than the voltage from the bias power supply The high-frequency power of the frequency of the high-frequency power supplied to the internal electrode is applied to the external electrode to generate a plasma in the container, and the plasma is used to dissociate the medium gas to apply a carbon film on the inner surface of the container. 20. —A device for forming a carbon film on the inner surface of a plastic container, comprising: a bottomed cylindrical external electrode having a size to surround the container when the plastic container is inserted as a processed object; a spacer, which It is composed of a dielectric material, which is inserted between the mouth and shoulder of the container and the external electrode at least when the container is inserted into the container; The external electrode is located on the end surface of the external electrode on the mouth side of the container; the internal electrode is inserted into the container inside the external electrode and is provided with a gas blow-out hole for blowing the medium gas; an exhaust member for mounting On the exhaust pipe; an air supply component for supplying a medium gas to the gas supply pipe; 82578 573054 a higher frequency power supply, which is connected through a matching device On the gas supply pipe, a bias power source is connected to the external electrode through a matcher, and an inductor is connected at one end to a conduction path between the gas supply pipe and the matcher, and one end is grounded. 82578 10-