TW568837B - Piezo-electrical ink-jetting nozzle head and its production method - Google Patents

Piezo-electrical ink-jetting nozzle head and its production method Download PDF

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TW568837B
TW568837B TW91136784A TW91136784A TW568837B TW 568837 B TW568837 B TW 568837B TW 91136784 A TW91136784 A TW 91136784A TW 91136784 A TW91136784 A TW 91136784A TW 568837 B TW568837 B TW 568837B
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ink
patent application
scope
piezoelectric
item
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TW91136784A
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TW200410835A (en
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Chiang-Ho Cheng
Long-Jang Hu
Tung-Sheng Yeh
Xuan-Peng Lin
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Chiang-Ho Cheng
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Abstract

The ink-jetting nozzle head of this invention includes: a first laminar structure, a second laminar structure and a piezo-electrical component. The first and second laminar structures made by erosion or adherence are sealed to form a nozzle head, including: an ink-jetting aperture, an ink chamber, an ink channel, a vibrating membrane and a protrusion block. The piezo-electrical component is secured to a protruding block and has an affixing base extending along its both sides to be affixed to a sidewall of the second laminar structure, with a polarization direction along the planar orientation and extending towards the opposing sides from a center. Under the influences of the electrical field along a thickness direction, the piezo-electrical component moves in a cutting manner, such that the center portion that is connected to the protruding block may urge against the vibrating membrane, thereby subjecting ink contained in the ink chamber to be sprayed from the ink-jetting aperture due to compression.

Description

568837 五、發明說明(1) 技術領域 本發明係關於剪切型壓電式喷墨頭之驅動原理與製造 方法,尤其是關於壓電致動器的驅動方式與其製造方法。 發明背景 喷墨列印頭除了可用於黑色及彩色印表機、傳真機以 及繪圖機方面外尚可應用於相關微小液滴應用的電子產 業、生物晶片、製藥產業及化學工業。目前適用電腦週邊 設備的喷墨列印頭,主要分為熱汽泡式喷墨列印頭和壓電 式喷墨列印頭,熱泡式乃利用加熱器將墨水瞬間氣化,產 生高壓氣泡推動墨水由噴嘴射出,而壓電式工作原理為利 用壓電陶瓷因施加電壓產生形變,擠壓液體產生高壓將液 體喷出,根據不同壓電產生變形之機制,各種壓電式喷墨 列印頭可分為彎曲型(Bend mode )、推擠型(Push mode )、剪力型(Shear mode )、收縮管型(Squeeze tube mode )。剪切型壓電致動器其作用的電場方向和其極化方 向互相垂直,其移動方式是以剪切的方式。 如圖一所示,為一典型壓電喷墨頭構造圖,它是由隔 間板1 0 4、壓電元件板1 0 1及喷嘴板1 0 2所組成。隔間板1 0 4 内部有墨水室1 0 5及墨水通道1 0 3,墨水是從墨水儲存槽經568837 V. Description of the Invention (1) Technical Field The present invention relates to a driving principle and a manufacturing method of a shear-type piezoelectric inkjet head, and particularly to a driving method and a manufacturing method of a piezoelectric actuator. BACKGROUND OF THE INVENTION In addition to being used in black and color printers, facsimiles, and plotters, inkjet printheads can also be used in the electronics, biochip, pharmaceutical, and chemical industries for microdroplet applications. At present, the inkjet print heads suitable for computer peripherals are mainly divided into thermal bubble inkjet print heads and piezoelectric inkjet print heads. The thermal bubble type uses a heater to instantly vaporize the ink and generate high-pressure bubbles. The ink is ejected from the nozzle, and the piezoelectric type works by using piezoelectric ceramics to deform due to applied voltage, squeezing the liquid to generate high pressure to eject the liquid, and according to the mechanism of different piezoelectric deformation, various piezoelectric inkjet printing The head can be divided into a bend type (Bend mode), a push type (Push mode), a shear type (Shear mode), and a shrink tube type (Squeeze tube mode). The direction of the electric field and the direction of polarization of a shear-type piezoelectric actuator are perpendicular to each other, and its moving mode is a shearing mode. As shown in Fig. 1, it is a structural diagram of a typical piezoelectric inkjet head, which is composed of a partition plate 104, a piezoelectric element plate 101 and a nozzle plate 102. The compartment board 1 0 4 has an ink chamber 105 and an ink channel 103, and the ink passes through the ink storage tank.

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五、發明說明(2) 由墨水通道1 0 3流通至墨水室1 0 5。當電場作用在壓電元件 1 0 1時,使壓電元件1 0 1移動而產生推力,促使墨水室1 0 5 内之墨水由喷嘴板1 0 2的喷嘴孔1 0 6喷出。V. Description of the invention (2) Circulation from the ink channel 103 to the ink chamber 105. When an electric field is applied to the piezoelectric element 101, the piezoelectric element 101 is moved to generate a thrust, and the ink in the ink chamber 105 is ejected from the nozzle holes 106 of the nozzle plate 102.

圖二是此喷墨頭之壓電元件1 0 1的噴墨驅動方式,可由圖 一之A - A截面圖加以顯示。如圖二所示,塵電元件1 0 1的極 化方向為厚度方向,在墨水室1 0 5中心的壓電元件1 0 1上下 兩側有一正電極1 0 7,在隔間板1 0 4的兩侧邊牆1 0 9上方之 壓電元件1 0 1上下兩側有一負電極1 0 8。當一電壓作用在壓 電元件1 0 1的兩側正負電極時,由於電場方向和極化方向 互相垂直,因此壓電元件1 0 1是以剪切的方式向墨水室1 0 5 方向移動而推擠墨水至喷嘴孔1 0 6喷出。此型喷墨頭其壓 電元件1 0 1極化方式的設計,其位移量可表示為: X-Vd15Fig. 2 shows the inkjet driving method of the piezoelectric element 101 of the inkjet head, which can be shown by the A-A sectional view of Fig. 1. As shown in FIG. 2, the polarization direction of the dust electric element 101 is the thickness direction, and the piezoelectric element 1 0 1 at the center of the ink chamber 105 has positive electrodes 1 7 on the upper and lower sides, and the compartment plate 1 0 There are negative electrodes 108 on the upper and lower sides of the piezoelectric element 1 0 1 on the side walls 1 0 9 on both sides of 4. When a voltage is applied to the positive and negative electrodes on both sides of the piezoelectric element 101, since the direction of the electric field and the polarization direction are perpendicular to each other, the piezoelectric element 101 is moved in a shearing manner toward the ink chamber 105. Push the ink to the nozzle hole 106 to eject. This type of inkjet head has a piezoelectric element with a polarization design of 10, and its displacement can be expressed as: X-Vd15

其中X為位移量,V為所加的電壓,d !為壓電係數。此位移 量是壓電元件1 0 1兩側固定時的中心最大位移量,當壓電 元件1 0 1四側均固定時,其位移量會小於此值。此型喷墨 頭的設計,其壓電元件1 0 1除了當致動器外,亦充當墨水 室1 0 5的振膜。因此壓電元件1 0 1的下侧電極會直接與墨水 接觸,因此墨水的選用會有很大的限制。 圖三是另一款喷墨頭之壓電元件2 0 1的喷墨驅動方式, 可由圖一之A-A截面圖加以顯示。如圖三所示,壓電元件 2 0 1的極化方向分別從墨水室2 0 5的中心到為厚度方向隔間Where X is the displacement, V is the applied voltage, and d! Is the piezoelectric coefficient. This displacement is the center maximum displacement when the piezoelectric element 101 is fixed on both sides. When the piezoelectric element 101 is fixed on all four sides, its displacement will be less than this value. This type of inkjet head is designed so that its piezoelectric element 101 acts as the diaphragm of the ink chamber 105 in addition to its actuator. Therefore, the lower electrode of the piezoelectric element 101 will directly contact the ink, so the choice of ink will be greatly limited. Fig. 3 is another inkjet driving method of the piezoelectric element 201 of the inkjet head, which can be shown by the A-A sectional view of Fig. 1. As shown in Figure 3, the polarization direction of the piezoelectric element 201 is from the center of the ink chamber 2 05 to the thickness direction compartment.

第5頁 568837 五、發明說明(3) 板2 0 4的兩側邊牆2 0 9,在壓電元件2 0 1的上側有負電極 2 0 7,下側有正電極2 0 8。當一電壓作用在壓電元件2 0 1的 兩側正負電極時,由於電場方向和極化方向互相垂直,因 此壓電元件2 0 1是以剪切的方式向墨水室2 0 5方向移動而推 擠墨水至喷嘴孔2 0 6,喷出。此型喷墨頭其壓電元件2 0 1極化 方式的設計,其位移量可表示為: X-LVd15/2t 其中X為位移量,V為所加的電壓,d i為壓電係數,t為壓 電元件201的厚度,L為隔間板2 0 4的兩側邊牆2 0 9之間的距 離。此位移量是壓電元件2 0 1兩侧固定時的中心最大位移 量,當壓電元件2 0 1四侧均固定時,其位移量會小於此 值。由於壓電元件的極化方式不同,此型喷墨頭的致動位 移量較大,當L值愈大其致動位移量也相對提高,因此長 度是愈長愈好,厚度是愈薄愈好。壓電元件201的厚度t 不能太薄,須有足夠的厚度才有產生較大的推力以便將墨 水射出。其也不能太長,因為當愈大時,代表兩喷嘴孔 2 0 6間距愈大,如此一來,喷墨頭的高解析化將難達到。 上述兩款喷墨頭的壓電元件沒有分割而是整體覆蓋在 壓力室的下方,僅有在每一壓力室的區域上塗附正負電 極,以便能獨立控制每一壓力室的墨水受擠壓而噴出。由 於壓電元件沒有分離,因此兩相鄰的壓力室彼此之間會有Page 5 568837 V. Description of the invention (3) The side walls 2 0 9 of the plate 2 0 4 have a negative electrode 2 7 on the upper side of the piezoelectric element 2 0 and a positive electrode 2 8 on the lower side. When a voltage is applied to the positive and negative electrodes on both sides of the piezoelectric element 201, since the direction of the electric field and the direction of polarization are perpendicular to each other, the piezoelectric element 201 is moved in a shearing manner to the direction of the ink chamber 250. Push the ink to the nozzle hole 206 and eject. This type of inkjet head has a piezoelectric element with a polarization design of 201, and its displacement can be expressed as: X-LVd15 / 2t where X is the displacement, V is the applied voltage, di is the piezoelectric coefficient, and t Is the thickness of the piezoelectric element 201, and L is the distance between the side walls 209 on both sides of the partition plate 204. This displacement is the maximum displacement of the center of the piezoelectric element when both sides are fixed. When the piezoelectric element is fixed on all four sides, the displacement will be smaller than this value. Due to the different polarization methods of piezoelectric elements, the actuation displacement of this type of inkjet head is relatively large. The larger the value of L, the greater the actuation displacement. Therefore, the longer the length, the better, and the thinner the thickness. it is good. The thickness t of the piezoelectric element 201 should not be too thin, and it must be thick enough to generate a large thrust force to eject the ink. It should not be too long, because the larger the distance between the two nozzle holes 206, the higher the resolution of the inkjet head will be. The piezoelectric elements of the two inkjet heads described above are not divided, but are entirely covered under the pressure chamber. Only the positive and negative electrodes are coated on the area of each pressure chamber, so that the ink in each pressure chamber can be controlled independently. ejection. Since the piezoelectric element is not separated, two adjacent pressure chambers will have

568837 五、發明說明(4) 交互作用的影響,當喷嘴孔之間距愈小時會愈明顯而影響 喷墨品質。在壓力室上之壓電元件之四側均固定在隔間板 的邊牆上,因此需要很大的電壓作用才能產生足夠的位移 量,但較大的電壓容易短路及產生危險。此外壓電元件除 了當致動器外,亦充當墨水室的振膜,因此壓電元件的下 侧電極會直接與墨水接觸,所以墨水不能有導通性及腐蝕 成分,因此墨水的選用會有很大的限制。 發明概述568837 V. Description of the invention (4) The effect of interaction, the smaller the distance between the nozzle holes, the more obvious it will affect the inkjet quality. All four sides of the piezoelectric element on the pressure chamber are fixed on the side wall of the compartment plate. Therefore, a large voltage is required to generate a sufficient displacement, but a large voltage is easy to short-circuit and cause danger. In addition to the piezoelectric element acting as an actuator, the piezoelectric element also acts as the diaphragm of the ink chamber, so the lower electrode of the piezoelectric element will directly contact the ink, so the ink cannot have conductivity and corrosion components, so the choice of ink will be very Big restrictions. Summary of invention

本發明主要目的是改善之前喷墨頭結構及壓電元件極 化方式的缺點,不僅能降低喷墨頭的操作電壓,且能簡化 其製作過程,使製造成本能降低。 本發明另一目的是壓電元件不直接與墨水接觸,因此 墨水的選用不會有很大的限制。The main purpose of the present invention is to improve the disadvantages of the previous inkjet head structure and the polarization method of the piezoelectric element, which can not only reduce the operating voltage of the inkjet head, but also simplify its manufacturing process and reduce the manufacturing cost. Another object of the present invention is that the piezoelectric element is not in direct contact with the ink, so the choice of the ink is not greatly limited.

為達上述之目的,本發明喷墨頭之結構體,其特徵是由兩 個結構板構成喷墨頭之喷嘴孔、墨水室、墨水通道及振 膜,而驅動喷墨的元件是以剪切方式作用的壓電材料,所 謂剪切方式是作用在壓電材料的電場方向和其材料的極化 方向互相垂直。 根據目前的發明,本喷墨頭的第一結構板内有陣列式 的喷嘴孔及相對應之部分墨水室的空間、墨水通道和隔間 邊牆。本嘴墨頭的第二結構板内有部分墨水室的空間、隔 間邊牆、振膜及連接壓電元件的凸塊。壓電元件是固定在In order to achieve the above object, the structure of the inkjet head of the present invention is characterized in that the nozzle hole, the ink chamber, the ink channel and the diaphragm of the inkjet head are composed of two structural plates, and the element driving the inkjet is sheared. In the case of a piezoelectric material acting in a mode, the so-called shear mode is that the direction of the electric field acting on the piezoelectric material and the polarization direction of the material are perpendicular to each other. According to the current invention, the first structural plate of the inkjet head has array-type nozzle holes and corresponding portions of the ink chamber space, ink passages, and partition side walls. The second structural plate of the ink head of the nozzle has a part of the space of the ink chamber, a side wall of the compartment, a diaphragm and a bump connected to the piezoelectric element. The piezoelectric element is fixed at

第7頁 568837 五、發明說明(5) 凸塊上,其兩側延伸固定在第二結構板的邊牆上的固定 座,而極化方向是由中心位置至兩側,訊號電極在壓電元 件厚度方向的上側,接地電極在其下侧。當電極之間有一 電場作用時,由於電場方向和其材料的極化方向互相垂 直,因此壓電元件是以剪切的方式移動。因為壓電元件的 兩側固定在第二結構板的邊牆上的固定座,所以其連接在 凸塊的中間部分可推擠振膜,使墨水室内之墨水受擠壓而 從喷嘴孔喷出。 喷墨頭為提高解析度,其喷嘴孔間距愈小愈好,因此 墨水室的形狀大都為長方形的尺寸,一般其長寬比都很 大。當墨水室的寬度愈小,喷嘴孔間距也就愈小,其喷墨 頭解析度也就愈高。因為本發明的壓電元件是橫誇在墨水 室長度方向的隔間邊牆上固定座,所以墨水室的長度愈 大,壓電元件在固定電壓的作用下,產生的位移量也較 大,因此可降低喷墨頭的操作電壓。 本發明之振膜凸塊主要目的是連接振膜與壓電元件,它能 夠將壓電元件所產生的推力傳遞至振膜而推擠墨水從喷嘴 孔喷出。有此凸塊的設計可使壓電元件受到邊界的限制較 少,因此可產生較大的位移量,而降低喷墨頭的操作電 壓。為了增加凸塊有效的作用長度,凸塊可設計成凸的形 狀,也就是接觸振膜側的長度較大於接觸壓電元件的長 度。 為使本發明之目的、特徵及其優點能更明白易懂,特 舉一較佳實例,並配合圖示,作一詳細說明如下。Page 7 568837 V. Description of the invention (5) On the bump, the two sides of the bump are fixed to the fixing seat on the side wall of the second structure plate, and the polarization direction is from the center to the two sides, and the signal electrode is in the piezoelectric On the upper side of the element thickness direction, the ground electrode is on its lower side. When an electric field acts between the electrodes, the piezoelectric element moves in a shearing manner because the direction of the electric field and the direction of polarization of its material are perpendicular to each other. Because both sides of the piezoelectric element are fixed to the fixing seat on the side wall of the second structure plate, the diaphragm is connected to the middle portion of the projection to push the diaphragm, so that the ink in the ink chamber is squeezed and ejected from the nozzle hole. . In order to improve the resolution of the inkjet head, the smaller the nozzle hole spacing is, the better. Therefore, the shape of the ink chamber is mostly rectangular, and generally the aspect ratio is large. The smaller the width of the ink chamber, the smaller the nozzle hole pitch, and the higher the resolution of the inkjet head. Because the piezoelectric element of the present invention is a fixed seat that is exaggerated on the side wall of the compartment in the length direction of the ink chamber, the larger the length of the ink chamber, the larger the displacement of the piezoelectric element under the action of a fixed voltage. Therefore, the operating voltage of the inkjet head can be reduced. The main purpose of the diaphragm bump of the present invention is to connect the diaphragm and the piezoelectric element, which can transmit the thrust generated by the piezoelectric element to the diaphragm and push the ink to be ejected from the nozzle hole. The design with this bump allows the piezoelectric element to be less constrained by the boundary, so it can generate a larger amount of displacement and reduce the operating voltage of the inkjet head. In order to increase the effective length of the bump, the bump can be designed to be convex, that is, the length on the side of the contact diaphragm is larger than the length of the contact on the piezoelectric element. In order to make the purpose, features, and advantages of the present invention more comprehensible, a detailed example is given below with reference to the accompanying drawings.

第8頁 568837 五、發明說明(6) 圖一係顯示先前之喷墨頭的橫截面結構圖。 圖二係顯示沿著圖一之A-A線段的喷墨頭剖面圖。 圖三係顯示沿著圖一之A-A線段的另一款喷墨頭剖面圖。 圖四係顯示本發明之喷墨頭的橫截面結構圖。 圖五係顯示沿著圖四之B-B線段的喷墨頭剖面圖。 圖六係顯示圖四之喷墨頭如何將墨水喷出的狀況。 圖七係顯示本發明之喷墨頭的第一結構板製造流程示意 圖。Page 8 568837 V. Description of the invention (6) Figure 1 shows the cross-sectional structure of the previous inkjet head. FIG. 2 is a sectional view of the inkjet head taken along the line A-A in FIG. FIG. 3 is a cross-sectional view of another ink jet head taken along the line A-A in FIG. 1. FIG. 4 is a cross-sectional structural view showing an inkjet head of the present invention. FIG. 5 is a sectional view of the inkjet head taken along the line B-B in FIG. FIG. 6 shows how the inkjet head of FIG. 4 ejects ink. Fig. 7 is a schematic diagram showing the manufacturing process of the first structural plate of the ink jet head of the present invention.

圖八係顯示本發明之喷墨頭的第二結構板製造流程示意 圖。 圖九係顯示本發明之喷墨頭的壓電元件製造流程示意圖。 圖十係顯示本發明之另一款喷墨頭的橫截面結構圖。 圖十一係顯示圖十之喷墨頭如何將墨水喷出的狀況。 圖號說明:Fig. 8 is a schematic diagram showing the manufacturing process of the second structural plate of the ink jet head of the present invention. FIG. 9 is a schematic diagram showing a manufacturing process of a piezoelectric element of the inkjet head of the present invention. FIG. 10 is a cross-sectional structural view showing another ink jet head according to the present invention. FIG. 11 shows how the inkjet head of FIG. 10 ejects ink. Figure number description:

1 0第一結構板 1 1第二結構板 1 2壓電元件 1 3墨水室 1 4喷嘴孔 15墨水通道 1 6振膜 1 7凸塊1 0 first structural plate 1 1 second structural plate 1 2 piezoelectric element 1 3 ink chamber 1 4 nozzle hole 15 ink channel 1 6 diaphragm 1 7 bump

第9頁 568837 五、發明說明(7) 1 8固定座 1 9隔間邊牆 2 0訊號電極 2 1接地電極 22墨滴 2 3硬基板 2 4光阻層 2 5壓電基板 2 6正電極 2 7負電極 28凸形凸塊 實施例: 如圖四顯示係本發明之喷墨頭的橫截面結構圖,而圖 五係顯示沿著圖四之B - B線段的喷墨頭剖面圖。本發明喷 墨頭之結構體是由第一結構板1 0、第二結構板1 1及壓電元 件1 2所組成的。第一結構板1 0及第二結構板1 1構成噴墨頭 之主要結構的喷嘴孔1 4、墨水室1 3、墨水通道1 5,振膜1 6 及凸塊1 7。第一結構板1 0内有陣列式的喷嘴孔1 4及相對應 之部分墨水室1 3的空間、墨水通道1 5和隔間邊牆1 9。第二 結構板1 1内有部分墨水室1 3的空間、隔間邊牆1 9、振膜1 6 及連接壓電元件1 2的凸塊1 7及固定座1 8。而驅動喷墨的元 件是以剪切方式作用的壓電元件1 2,所謂剪切方式是作用 在壓電材料的電場方向和其材料的極化方向互相垂直。從Page 9 568837 V. Description of the invention (7) 1 8 Fixed base 1 9 Compartment side wall 2 0 Signal electrode 2 1 Ground electrode 22 Ink drop 2 3 Hard substrate 2 4 Photoresist layer 2 5 Piezo substrate 2 6 Positive electrode 2 7 Negative electrode 28 convex convex block embodiment: Fig. 4 shows a cross-sectional structural view of the inkjet head of the present invention, and Fig. 5 shows a cross-sectional view of the inkjet head along the line B-B of Fig. 4. The structure of the ink jet head of the present invention is composed of a first structural plate 10, a second structural plate 11 and a piezoelectric element 12. The first structure plate 10 and the second structure plate 11 constitute the nozzle holes 14 of the main structure of the inkjet head, the ink chamber 1 3, the ink channel 15, the diaphragm 16 and the bump 17. The first structural plate 10 has array-type nozzle holes 14 and a corresponding space of the ink chamber 13, an ink channel 15 and a compartment side wall 19. The second structural plate 11 has a space of a part of the ink chamber 13, a partition side wall 19, a diaphragm 16, and a bump 17 and a fixing base 18 connected to the piezoelectric element 12. The element driving the inkjet is a piezoelectric element 12 acting in a shearing manner. The so-called shearing manner is that the direction of the electric field acting on the piezoelectric material and the polarization direction of the material are perpendicular to each other. From

第10頁 568837 五、發明說明(8) 圖四可顯示壓電元件1 2是固定在凸塊1 7上,其兩側延伸固 定在第二結構板1 1的邊牆上的固定座1 8 ’而極化方向是由 中心位置至兩侧,訊號電極2 0在壓電元件1 2厚度方向的上 侧,接地電極2 1在其下側。當電極之間有一電場作用時, 由於電場方向和其材料的極化方向互相垂直,因此壓電元 件是以剪切的方式移動。因為壓電元件的兩侧固定在第二 結構板1 1的邊牆上固定座1 8,所以其連接在凸塊1 7的中間 部分可推擠振膜1 6,使墨水室1 3内之墨水受擠壓而從喷嘴 孔1 4喷出。 壓電元件1 2的極化方向是在壓電板的平面方向,且沿 著墨水室1 3空間之較長邊的一侧。此種型式的極化方式在 相同的操作條件下,會比先前發明的喷墨頭圖二(極化方 向在厚度方向)及圖三(極化方向在平面方向,且沿著較 短邊的一側)更有效率。由圖四及圖五可顯示墨水是由第 一結構板1 0及第二結構板1 1封閉於墨水室1 3内,壓電元件 1 2的電極不直接與墨水接觸,因此不會有電路短路及電極 被墨水腐蝕的現象發生。本發明之壓電元件1 2並不是封閉 墨水於墨水室1 3内的結構之一,因此不需要四個側邊都固 定密封,如圖四所示,只有較長邊的兩侧固定在邊牆上固 定座1 8,而另外較短邊的兩側是自由端沒有限制,如圖五 所示。此種致動器的設計,在固定電壓操作下,所產生的 位移量較大,因此可降低喷墨頭的作用電壓。此外從圖五 可顯示每一噴墨機制的壓電元件1 2是沒有連接而獨立分開 的,也就是彼此相鄰的致動器可獨力運作而不會彼此干Page 10 568837 V. Description of the invention (8) Fig. 4 shows that the piezoelectric element 12 is fixed on the bump 17 and the two sides thereof are fixed to the fixing base 1 1 on the side wall of the second structural plate 1 1 'While the polarization direction is from the center position to both sides, the signal electrode 20 is on the upper side of the piezoelectric element 12 in the thickness direction, and the ground electrode 21 is on its lower side. When an electric field acts between the electrodes, the piezoelectric element moves in a shearing manner because the direction of the electric field and the polarization direction of its material are perpendicular to each other. Since both sides of the piezoelectric element are fixed to the side wall fixing base 18 of the second structural plate 11, the middle portion of the piezoelectric element connected to the bump 17 can push the diaphragm 16 to make the inside of the ink chamber 13 The ink is squeezed and ejected from the nozzle holes 14. The polarization direction of the piezoelectric element 12 is in the plane direction of the piezoelectric plate and along one side of the longer side of the space of the ink chamber 13. Under the same operating conditions, this type of polarization method will be better than that of the inkjet head in the previous invention. Side) is more efficient. Figures 4 and 5 show that the ink is enclosed in the ink chamber 13 by the first structural plate 10 and the second structural plate 11. The electrodes of the piezoelectric element 12 are not in direct contact with the ink, so there is no circuit. Short circuit and electrode corrosion by ink occur. The piezoelectric element 12 of the present invention is not one of the structures for enclosing the ink in the ink chamber 13, so it is not necessary that all four sides are fixed and sealed. As shown in FIG. 4, only the two sides of the longer side are fixed to the side. The wall mount 18 is free, and there are no restrictions on the free ends of the other short sides, as shown in Figure 5. This type of actuator is designed to generate a large displacement amount under a fixed voltage operation, so that the applied voltage of the inkjet head can be reduced. In addition, from Figure 5, it can be shown that the piezoelectric elements 12 of each inkjet mechanism are independently connected and separated, that is, the actuators adjacent to each other can work independently without interfering with each other.

568837 五、發明說明(9) 擾,因此兩相鄰的壓力室1 3彼此之間會比較沒有交互作用 的影響,縱使喷嘴孔1 4之間距愈小時也較不會影響喷墨品 質。568837 V. Description of the invention (9) Disturbance, therefore, two adjacent pressure chambers 13 will have less interaction with each other. Even if the distance between the nozzle holes 14 is smaller, the inkjet quality will be less affected.

本發明之凸塊1 7主要目的是連接振膜1 6與壓電元件 1 2,它能夠將壓電元件1 2所產生的推力傳遞至振膜1 6而推 擠墨水從喷嘴孔1 4喷出。從圖五可顯示有此凸塊1 7的設計 可使壓電元件1 2的寬度增加而不影響其致動位移量,增加 壓電元件1 2的寬度可使其產生的推力增加。有此凸塊1 7的 設計可使壓電元件1 2受到邊界的限制較少,因此可產生較 大的位移量,而降低喷墨頭的操作電壓。除此之外,它能 將壓電元件1 2產生不均勻的位移量(由中心位置的最大位 移量依次遞減至兩側端點)藉由凸塊1 7之作用而將均勻位 移量傳遞至振膜1 6。為了達到此目的,凸塊1 7之厚度須遠 大振膜1 6之厚度,最好遠大於1 0倍以上。一搬來說,振膜 1 6之厚度愈薄愈好,大約在數微米之間,而凸塊1 7之厚度 大約在數十微米至百微米之間。為了增加振膜1 6之體積變 化量,凸塊1 7之長度和寬度的設計是愈大愈好。但是當凸 塊1 7之寬度愈寬時,其振膜1 6愈不易變形,凸塊1 7之長度 愈長時,壓電元件1 2產生的位移量傳遞至振膜1 6的位移量 也會相對的減少。因此凸塊1 7需有合適的設計,以得到振 膜1 6最佳的位移量及其體積變化量。 本發明之壓電式喷墨列印頭其工作原理是當電源供應器給 予壓電元件1 2微致動器一足夠脈衝電壓而產生一微小上下 擺動之變形,使微致動器快速伸縮推動振膜1 6壓縮墨水室The main purpose of the bump 17 of the present invention is to connect the diaphragm 16 and the piezoelectric element 12, which can transmit the thrust generated by the piezoelectric element 12 to the diaphragm 16 and push the ink to be ejected from the nozzle hole 14 Out. It can be seen from FIG. 5 that the design with the bump 17 can increase the width of the piezoelectric element 12 without affecting its actuating displacement. Increasing the width of the piezoelectric element 12 can increase the thrust generated by the piezoelectric element 12. The design with this bump 17 allows the piezoelectric element 12 to be less restricted by the boundary, so that a larger amount of displacement can be generated, and the operating voltage of the inkjet head can be reduced. In addition, it can generate the non-uniform displacement amount of the piezoelectric element 12 (decreasing from the maximum displacement amount at the center position to the end points of both sides in turn). The uniform displacement amount is transferred to the Vibration membrane 1 6. In order to achieve this, the thickness of the bump 17 needs to be much larger than the thickness of the diaphragm 16, and it is preferably much larger than 10 times. As a matter of fact, the thinner the thickness of the diaphragm 16 is, the better, it is about several micrometers, and the thickness of the bump 17 is about tens of micrometers to 100 micrometers. In order to increase the volume change of the diaphragm 16, the design of the length and width of the bump 17 is as large as possible. However, when the width of the bump 17 is wider, the diaphragm 16 is less likely to be deformed. When the length of the bump 17 is longer, the displacement amount generated by the piezoelectric element 12 is transferred to the diaphragm 16 Relatively reduced. Therefore, the bump 17 needs to have a proper design to obtain the optimal displacement and volume change of the diaphragm 16. The working principle of the piezoelectric inkjet print head of the present invention is that when the power supply device gives the piezoelectric element 12 a micro-actuator with a sufficient pulse voltage to generate a small up-and-down swing deformation, the micro-actuator quickly expands and pushes. Diaphragm 1 6 compressed ink chamber

第12頁 568837 五、發明說明(ίο) 1 3之墨水,而將墨水喷出於紙面上。壓電元件1 2^:致動器 便經由連續的脈衝電壓,使喷嘴不斷的喷出墨滴串而列 印。圖六係顯示圖四之本發明喷墨頭如何將墨水喷出的狀 況及壓電元件1 2透過凸塊1 7推擠振膜1 6之變形狀況。壓電 元件1 2的下側電極為接地電極2 1 ’其上側的電極為訊號電 極2 0。當一脈衝接通至訊號電極2 0時,由於電場方向和其 材料的極化方向互相垂直’因此壓電元件1 2是以臭切的方 式移動。圖六(a)為訊號電極2 0是零電位的狀況,也就 是沒有電場的作用,因此壓電元件1 2沒有變形,所以墨水 室1 3之墨水在沒有外力作用之下呈現靜止狀況。圖六(b )顯示當訊號電極2 0接通負電壓時,壓電元件1 2在厚度方 向有·^^向上的電場,由於電場方向和其材料的極化方向互 相垂直,因此壓電元件1 2是以剪切的方式向下移動,藉由 凸塊1 7的傳遞,振膜1 6也跟著往下變形,因而造成墨水室 1 3的體積變大,壓力減少,促使墨水槽(圖中未顯示)之 墨水經由墨水通道1 5流入墨水室1 3内部。圖六(c)顯示 當訊號電極2 0接通正電壓時,壓電元件1 2在厚度方向有一 向下的電場’由於電場方向和其材料的極化方向互相垂 直,因此壓電元件是以剪切的方式向上移動,藉由凸塊1 7 的傳遞,振膜1 6也跟著往上擠壓變形,使墨水室1 3内之墨 水受擠壓而從喷嘴孔1 4喷出墨滴2 2。 本發明之壓電喷墨頭的製程大概包含第一結構板1 0、 第二結構板1 1及壓電元件1 2等三部分,其製程分別敘述如 下。蝕刻矽晶圓之技術,於半導體之製造技術中已被確定Page 12 568837 V. Description of the invention (ίο) 1 3 ink, and the ink is sprayed on the paper surface. The piezo element 1 2 ^: actuator continuously prints ink droplets through a continuous pulse voltage. Fig. 6 shows how the ink jet head of the present invention shown in Fig. 4 ejects ink and the deformation state of the piezoelectric element 12 pushing the diaphragm 16 through the bump 17. The lower electrode of the piezoelectric element 12 is a ground electrode 2 1 ', and the upper electrode thereof is a signal electrode 20. When a pulse is applied to the signal electrode 20, the direction of the electric field and the polarization direction of the material are perpendicular to each other ', so the piezoelectric element 12 moves in a stinking manner. Figure 6 (a) shows the situation where the signal electrode 20 is at zero potential, that is, there is no electric field effect, so the piezoelectric element 12 is not deformed, so the ink in the ink chamber 13 is in a static state without external force. Figure 6 (b) shows that when the signal electrode 20 is connected to a negative voltage, the piezoelectric element 12 has an electric field in the thickness direction. Since the direction of the electric field and the polarization direction of the material are perpendicular to each other, the piezoelectric element 12 is moved downward in a shearing manner. Through the transmission of the bumps 17, the diaphragm 16 is also deformed downward, which causes the volume of the ink chamber 13 to increase and the pressure to decrease, which promotes the ink tank (Figure (Not shown) flows into the ink chamber 1 3 through the ink channel 15. Figure 6 (c) shows that when the signal electrode 20 is connected to a positive voltage, the piezoelectric element 12 has a downward electric field in the thickness direction. Since the direction of the electric field and the polarization direction of its material are perpendicular to each other, the piezoelectric element is The shearing mode moves upwards, and through the transmission of the bumps 17, the diaphragm 16 is also squeezed upward to deform, so that the ink in the ink chamber 13 is squeezed and the ink droplets 2 are ejected from the nozzle holes 1 4 2. The manufacturing process of the piezoelectric inkjet head of the present invention generally includes three parts, such as a first structure plate 10, a second structure plate 11 and a piezoelectric element 12, and the manufacturing processes are described below. Silicon wafer etching technology has been identified in semiconductor manufacturing technology

苐13頁 568837 五、發明說明(11) 可進行高精度之蝕刻,因此第一結構板丨〇及第二結構板i i 的材料是以矽晶圓為主圖七係顯示本發明之喷墨頭的第 一結構板10製造流程示意圖。首先如圖七(a)所示,在 一合適厚度的矽基板23旋塗—岣勻光阻層24,以此光阻層 24當保護層。之後再利用光罩以曝光顯影的方式將光阻層 2 4顯影出墨水通道1 5 (此視圖蝶法顯示出來)及部份墨水 室1 3之空間,然後以乾蝕刻的方式將無光阻層2 4保護的矽 基板23蝕刻出墨水通道1 5及部份墨水室丨3之空間,如圖七 (b)所示。接著如圖七(c)顯示,再旋塗另一均勻光 阻層24,同樣在利用=同的光罩以曝光顯影的方式將光阻 層2 4顯影出墨水窒1 3靠近喷嘴孔1 4之較小空間,然後以乾 蝕刻的方式將無光阻層2 4保護的矽基板2 3蝕刻出墨水室1 3 的部分空間。接著如圖七(d)顯示,在矽基板2 3的背面 旋塗一均勻光阻層2 4 ’並以曝光顯影的方式將喷嘴孔1 4的 尺寸顯影出來。如圖七(e)顯示,同樣地以乾蝕刻的方 式將無光阻層2 4保護的石夕基板2 3餘刻出噴嘴孔1 4的形狀。 最後如圖七(f)顯示,將所有光阻層24去除掉,則可顯 示出第一結構板1 0完整工程圖。此第一結構板1 〇内有陣列 式的喷嘴孔1 4及相對應之部分墨水室1 3的空間、墨水通道 1 5和隔間邊牆1 9。其中墨水通道1 5和隔間邊牆1 9在此視圖 無法顯示出來。 圖八係顯示本發明之喷墨頭的第二結構板1 1製造流程 示意圖。如同第〆結構板10之製程’仍然以矽晶圓為基 板。首先如圖八(a)所示’在一合適厚度的矽基板2 3旋 568837 五、發明說明(12) 塗一均勻光阻層2 4,以此光阻層2 4當保護層。之後再利用 光罩以曝光顯影的方式將光阻層2 4顯影出部份墨水室1 3之 空間,如圖八(b)所示。接著如圖八(c)顯示以乾餘刻 的方式將無光阻層2 4保護的矽基板2 3蝕刻出部份墨水室1 3 之槽壁空間及隔間邊牆1 9 (此視圖無法顯示出來),。然後 如圖八(d)顯示,在石夕基板2 3的背面再旋塗一均勻光阻 層2 4。接著如圖八(e)顯示,利用不同的光罩以曝光顯 影的方式將光阻層2 4顯影出振膜1 6的形狀,然後以乾蝕刻 的方式將無光阻層2 4保護的矽基板2 3蝕刻出振膜1 6及凸塊 1 7的形狀。最後如圖八(f)顯示,將所有光阻層2 4去除 掉,則可顯示出第二結構板1 1完整工程圖。此第二結構板 1 1内有部分墨水室1 3的空間、隔間邊牆1 9、振膜1 6及連接 壓電元件1 2的凸塊1 7及固定座1 8,其中隔間邊牆1 9在此視 圖無法顯示出來。 目前的第一結構板1 0及第二結構板1 1的製程是以矽晶 圓為基板利用蝕刻的方式製造出來,除了以矽晶圓為基板 之外,尚可以樹脂、金屬及陶瓷等基板取代。上述第一結 構板1 0及第二結構板11之製程是以消去法的方式將基板蝕 刻出喷墨頭的微結構,除此之外尚可以附著法的方式將材 料逐次附著於基板上,以便形成喷墨頭的微結構。附著法 的方式可藉由濺鍍、蒸鍍及CVD等薄膜之製程或使用電鑄 的方式。為得到較厚之微結構,一般是使用電鑄的方式, 且其鍍液是以低内應力的胺基磺酸鎳為主。 在壓電元件1 2的製程方面,首先採用高壓電係數的锆鈦酸页 Page 13 568837 V. Description of the invention (11) High-precision etching can be performed, so the material of the first structure plate 丨 〇 and the second structure plate ii is based on silicon wafers. Figure 7 shows the inkjet head of the present invention. Schematic diagram of the manufacturing process of the first structural plate 10. First, as shown in FIG. 7 (a), a photoresist layer 24 is spin-coated on a silicon substrate 23 of an appropriate thickness to uniformly use the photoresist layer 24 as a protective layer. Then use the photomask to develop the photoresist layer 2 4 into the ink channel 15 (shown in this view butterfly method) and part of the ink chamber 1 3 by exposure and development. Then dry-etch the non-photoresist The silicon substrate 23 protected by the layer 24 etches the space of the ink channel 15 and a part of the ink chamber 3, as shown in FIG. 7 (b). Next, as shown in FIG. 7 (c), another uniform photoresist layer 24 is spin-coated. Similarly, the photoresist layer 2 4 is developed by using the same mask to develop the ink. 1 3 Close to the nozzle hole 1 4 Small space, and then dry-etch the silicon substrate 2 3 protected by the photoresist layer 2 4 to a part of the ink chamber 1 3. Next, as shown in FIG. 7 (d), a uniform photoresist layer 2 4 ′ is spin-coated on the back surface of the silicon substrate 23 and the size of the nozzle holes 14 is developed by exposure and development. As shown in FIG. 7 (e), the shape of the nozzle hole 14 is etched in the Shi Xi substrate 2 3 protected by the photoresist-free layer 2 4 in a dry etching manner. Finally, as shown in FIG. 7 (f), after removing all the photoresist layers 24, the complete engineering drawing of the first structural board 10 can be displayed. The first structure plate 10 has array-type nozzle holes 14 and a corresponding space of the ink chamber 13, an ink channel 15 and a partition side wall 19 therein. Among them, the ink channel 15 and the compartment side wall 19 cannot be displayed in this view. Fig. 8 is a schematic diagram showing the manufacturing process of the second structural plate 11 of the ink jet head of the present invention. The process of the first structural plate 10 is still based on a silicon wafer. Firstly, as shown in FIG. 8 (a), a silicon substrate 2 with a suitable thickness is rotated. 568837 V. Description of the invention (12) A uniform photoresist layer 24 is coated, and the photoresist layer 24 is used as a protective layer. Then, the photoresist layer 2 4 is developed by a photomask to develop a space of a part of the ink chamber 13 as shown in FIG. 8 (b). Next, as shown in Fig. 8 (c), the silicon substrate 2 3 protected by the photoresist layer 2 4 is etched in a dry manner to etch out part of the groove wall space of the ink chamber 1 3 and the partition side wall 19 (this view cannot be used) show),. Then, as shown in FIG. 8 (d), a uniform photoresist layer 24 is further spin-coated on the back surface of the Shixi substrate 23. Next, as shown in FIG. 8 (e), the photoresist layer 2 4 is developed into the shape of the diaphragm 16 by using different photomasks in an exposure and development manner, and then the silicon without the photoresist layer 24 protection by dry etching is used. The substrate 2 3 etches the shapes of the diaphragm 16 and the bump 17. Finally, as shown in Fig. 8 (f), after removing all the photoresist layers 2 4, a complete engineering drawing of the second structural plate 11 can be displayed. This second structural plate 11 has a part of the space of the ink chamber 13, a partition side wall 19, a diaphragm 16, and a bump 17 and a fixing base 18 connected to the piezoelectric element 12. Wall 19 cannot be displayed in this view. The current manufacturing process of the first structural board 10 and the second structural board 11 is based on a silicon wafer as a substrate and is etched. In addition to the silicon wafer as a substrate, resin, metal, and ceramic substrates can also be used. To replace. The above-mentioned manufacturing process of the first structural plate 10 and the second structural plate 11 is to etch the substrate out of the microstructure of the inkjet head by means of the erasing method. In addition, the materials can be successively attached to the substrate by the adhesion method. In order to form the microstructure of the inkjet head. The method of the adhesion method can be a thin film process such as sputtering, vapor deposition, and CVD, or an electroforming method. In order to obtain thick microstructures, electroforming is generally used, and the plating solution is mainly nickel sulfamate with low internal stress. In terms of the manufacturing process of the piezoelectric element 12, zirconate titanate

第15頁 568837 五、發明說明(13) 鉛(PZT)系列的壓電粉末製造壓電基板,其製造流程如 圖九顯示。首先利用合適的治具將壓電粉末加壓成形,而 後利用高溫燒結法使壓電粉末成為致密的壓電基板,在利 用雙面研磨機加工此基板至合適的厚度及表面的平滑度, 圖九(a)為加工完成的壓電基板2 5。接著如圖九(b)顯 示,在壓電基板2 5厚度方向之上下兩侧覆蓋一層極化用的 正電極2 6和負電極2 7,此電極可利用網板印刷的方式或者 是鍍膜的方式。其鍍膜的方式可利用金屬遮罩、蝕刻或者 是舉離(1 i f t 〇 f 〇的製程方法將電極的樣式製作出來。 網板印刷的電極材料可為金、銀、鈀及銀鈀等,而鍍膜的 電極材料可為金、銀、妃、ί呂、鎳及白金等。然後如圖九 (c)顯示,在壓電基板2 5厚度方向之上下兩側的正電極 2 6和負電極2 7之間給予一表面極化電場,其極化方向如圖 中之箭頭方向一樣。最後如圖九(d)顯示,將壓電基板 2 5厚度方向之上下兩侧的正電極2 6和負電極2 7除掉,然後 在其上側覆蓋一層訊號電極2 0,在下側部分覆蓋一層接地 電極2 1,如此則可完成壓電元件1 2的製作。 圖十係顯示本發明之另一款喷墨頭的橫截面結構圖。 此款喷墨頭的本體結構與壓電致動器的驅動方式與先前本 發明之喷墨頭都類似,其差異在凸塊形狀設計的差異。此 款喷墨頭其凸塊的形狀是凸形,從圖中可顯示此凸形凸塊 2 8接觸振膜1 6側的長度較大於接觸壓電元件1 2的長度。此 凸形凸塊2 8接觸壓電元件1 2的面積較少的主要目的是讓壓 電元件1 2受到較少的限制,使其產生較大的致動位移量。Page 15 568837 V. Description of the invention (13) Lead (PZT) series piezoelectric powder is used to manufacture piezoelectric substrates. The manufacturing process is shown in Figure 9. First, the piezoelectric powder is press-formed with a suitable jig, and then the piezoelectric powder is made into a dense piezoelectric substrate by a high-temperature sintering method. This substrate is processed to a suitable thickness and surface smoothness by a double-side grinding machine. Nine (a) is the processed piezoelectric substrate 25. Next, as shown in FIG. 9 (b), a layer of polarizing positive electrode 26 and negative electrode 27 is covered on the upper and lower sides of the piezoelectric substrate 25 in the thickness direction. This electrode can be screen-printed or coated. the way. The coating method can be made by using a metal mask, etching or lift-off (1 ift 〇f 〇) manufacturing method. The electrode material for screen printing can be gold, silver, palladium, silver palladium, etc., and The coated electrode materials can be gold, silver, princess, silver, nickel, platinum, etc. Then, as shown in FIG. 9 (c), the positive electrode 26 and the negative electrode 2 on the upper and lower sides of the piezoelectric substrate 25 are shown in the thickness direction. A surface polarized electric field is given between 7 and the direction of polarization is the same as the direction of the arrow in the figure. Finally, as shown in FIG. 9 (d), the positive electrodes 26 and negative electrodes on the upper and lower sides of the piezoelectric substrate 25 in the thickness direction are shown. The electrode 27 is removed, and then a layer of the signal electrode 20 is covered on the upper side, and a layer of the ground electrode 21 is covered on the lower side, so that the fabrication of the piezoelectric element 12 can be completed. Fig. 10 shows another spray nozzle of the present invention. A cross-sectional structural diagram of the ink head. The main structure and driving method of the piezoelectric actuator of this inkjet head are similar to those of the previous inkjet head of the present invention, and the difference is in the shape of the bumps. This inkjet head The shape of the bump on the head is convex, as shown in the figure The length of the convex bump 2 8 contacting the diaphragm 16 is larger than the length of the piezoelectric element 12. The convex bump 2 8 has a smaller area to contact the piezoelectric element 12. The main purpose is to make the piezoelectric element 12 is less restricted, causing it to generate a larger actuating displacement.

第16頁 568837 五、發明說明(14) 因為壓電元件1 2是以剪切的方式變形,從中心位置的最大 位移量,依次遞減至兩側端點的固定端。而接觸振膜1 6側 的面積較大的主要目的是讓振膜1 6的等效體積變化量變 大。 圖十一係顯示圖十之本發明喷墨頭如何將墨水喷出的 狀況及壓電元件1 2透過凸形凸塊2 8推擠振膜1 6之變形狀 況。從圖中可顯示有此凸形凸塊2 8的設計,其壓電元件1 2 推擠振膜1 6之位移量較大,因此在相同的操作條件下可降 低驅動電壓。Page 16 568837 V. Description of the invention (14) Because the piezoelectric element 12 is deformed in a shearing manner, the maximum displacement from the center position decreases in order to the fixed ends of the two end points. The main purpose of the larger area on the side of the diaphragm 16 is to make the equivalent volume change of the diaphragm 16 larger. Fig. 11 shows how the ink jet head of the present invention shown in Fig. 10 ejects ink and the shape of the piezoelectric element 12 pushing the diaphragm 16 through the convex projection 28. As shown in the figure, the design of this convex bump 28 is shown. The displacement of the piezoelectric element 12 pushing the diaphragm 16 is large, so the driving voltage can be reduced under the same operating conditions.

以上所述,僅為本發明之較佳實施例,然其並非用以 限定本發明,舉凡任何熟悉此項技藝者,於本發明之領域 内所作之任何修飾,具有同等之功效者,均含蓋於本發明 之申請專利範圍内。The above descriptions are merely preferred embodiments of the present invention, but they are not intended to limit the present invention. Any modification made by anyone skilled in the art in the field of the present invention and having the same effect are included. Covered within the scope of patent application of the present invention.

第17頁 568837Page 17 568837

第18頁Page 18

Claims (1)

568837 案號 91136784 年 月 曰 修正 六、申請專利範圍 器沒有直接接觸振膜,而是藉由振模上的凸塊推擠振膜, 使墨水室内之墨水受擠壓而從喷嘴孔喷出。 5 .根據申請專利範圍第1項所述之喷墨頭,其中在每一喷 墨單元内皆有一獨立訊號控制之壓電致動器,而每一壓電 致動器之間,彼此是分開而沒有連接在一起。 6· — 第一 第二 模, 及隔 壓電 一墨 間, 其下 一壓 二結 其材 形凸 而從 種喷 結構 結構 在振 間邊 致動 水室 在其 側有 電致 構板 料的 塊的 喷嘴 墨頭 板, ,其 具有 具有 方有 在其 模上 牆, 器與振模 是由第一 一側 一振 動器 的邊 極化 中間 孔喷 有墨 膜; ,固 牆上 方向 部分 出。 組成包含: 很多相同間距的喷嘴孔; 很多相同間距且與喷嘴孔相對應的振 相對應之墨水入口通道和墨水室之空間 下方有固定壓電致動器的固定座及連接 的凸形凸塊; 結構板和第二結構板所構成的密閉空 水入口通道,而上側有喷嘴孔,另外在 定在凸形凸塊上,其兩側延伸固定在第 的固定座,壓電致動器電場作用方向和 互相垂直,在電場作用之下,連接在凸 可推擠振膜,使墨水室内之墨水受擠壓 7 .根據申請專利範圍第6項所述之噴墨頭,其中第二結構 板之振模下方的凸塊形狀是凸形的,其凸塊與壓電致動器568837 Case No. 91136784 Amendment VI. Patent application scope The device does not directly contact the diaphragm, but pushes the diaphragm by the bumps on the die, so that the ink in the ink chamber is squeezed out from the nozzle hole. 5. The inkjet head according to item 1 of the scope of the patent application, wherein each inkjet unit has an independent signal-controlled piezoelectric actuator, and each piezoelectric actuator is separated from each other And not connected together. 6 · — The first and second molds, and the piezoelectric and ink compartments, which are pressed together to form a convex shape, and from the seed spray structure, the water chamber is actuated on the side of the vibration chamber with an electro-structural sheet on its side. The nozzle head plate of the block, which has a square wall on its mold, and the device and the vibration mold are sprayed with an ink film from the side polarized middle hole of the vibrator on the first side; Out. The composition includes: a lot of nozzle holes of the same pitch; a lot of the same pitch of the ink inlet channel and the ink chamber corresponding to the nozzle holes are provided with a fixed seat for fixing the piezoelectric actuator and a convex bump connected thereto The closed empty water inlet channel formed by the structural plate and the second structural plate, with nozzle holes on the upper side, and fixed on the convex block, the two sides of which are fixed to the first fixed seat, the electric field of the piezoelectric actuator The direction of action is perpendicular to each other. Under the action of the electric field, it is connected to the convex can push the diaphragm, so that the ink in the ink chamber is squeezed. 7. The inkjet head according to item 6 of the patent application scope, wherein the second structure plate The shape of the bump under the vibration mode is convex, and the bump and the piezoelectric actuator 第20頁 2003.10.17. 020 568837 _案號91136784_年月日__ 六、申請專利範圍 接觸之面積較小於與振模的接觸之面積。 8 .根據申請專利範圍第6項所述之喷墨頭,其中壓電致動 器的較長一邊的兩側端點是固定在第二結構板的邊牆上的 固定座,而較短一邊的兩側是自由端沒有任何限制。 9 .根據申請專利範圍第6項所述之噴墨頭,其中壓電致動 器沒有直接接觸振膜,而是藉由振模上的凸形凸塊推擠振 膜,使墨水室内之墨水受擠壓而從喷嘴孔喷出。 1 0 .根據申請專利範圍第6項所述之喷墨頭,其中壓電致動 器的極化方向是由中心位置至較長一端的兩側。 1 1.根據申請專利範圍第6項所述之喷墨頭,其中壓電致動 器的電極是在厚度方向的上下兩側。 1 2. —種喷墨頭之製作方法,係包含: 以消去法或附著法的方式,製造很多相同間距的喷嘴孔及 其相對應之墨水出口通道和部分墨水室之空間及隔間邊牆 的第一結構板; 以消去法或附著法的方式,製造很多相同間距的振模,在 振模上方有相對應之墨水入口通道和部分墨水室之空間及 隔間邊牆,在其下方固定座及凸塊的第二結構板; 以中間介質物或直接接合的方式將第一結構板及第二結構Page 20 2003.10.17. 020 568837 _ Case No. 91136784_ year month__ Sixth, the scope of patent application The area of contact is smaller than the area of contact with the vibration mold. 8. The inkjet head according to item 6 of the scope of patent application, wherein the two ends of the longer side of the piezoelectric actuator are fixed bases fixed to the side wall of the second structure plate, and the shorter side The sides are free ends without any restrictions. 9. The inkjet head according to item 6 of the scope of the patent application, wherein the piezoelectric actuator does not directly contact the diaphragm, but pushes the diaphragm by a convex bump on the die to make the ink in the ink chamber Squeezed and ejected from the nozzle hole. 10. The inkjet head according to item 6 of the scope of patent application, wherein the polarization direction of the piezoelectric actuator is from the center position to both sides of the longer end. 1 1. The inkjet head according to item 6 of the scope of patent application, wherein the electrodes of the piezoelectric actuator are on the upper and lower sides in the thickness direction. 1 2. —A method for manufacturing an inkjet head, including: manufacturing a plurality of nozzle holes of the same pitch and corresponding ink outlet channels, a part of the ink chamber space and a partition wall by means of erasing or attaching. The first structural plate of the method; by the method of erasing or attaching, manufacturing a lot of vibrating dies with the same pitch, there are corresponding ink inlet channels above the vibrating dies, part of the space of the ink chamber and the side wall of the compartment, fixed below it The second structure plate of the seat and the bump; the first structure plate and the second structure are interposed or directly connected 第21頁 2003.10.17. 021 568837 _案號91136784_年月日__ 六、申請專利範圍 板結合在一起; 製作一壓電基板,使其而極化方向和厚度方向是互相垂直 且由中心位置至兩側,而作用電極是在厚度方向之上下兩 側; 壓電基板黏著至第二結構板後,以乾蝕刻、雷射加工或切 割方式將壓電基板加工成陣列式之壓電致動器。 1 3 .根據申請專利範圍第1 2項所述之製作方法,以消去法 方式製作之第一結構板及第二結構板是以矽晶圓為基板利 用蝕刻的方式製造出來;除了以矽晶圓為基板之外,尚可 以樹脂、金屬及陶瓷等基板取代。 1 4 .根據申請專利範圍第1 2項所述之製作方法,以附著法 方式製作之第一結構板及第二結構板是以電鑄的方式製 作,其鍍液是以低内應力的胺基磺酸鎳為主。 1 5 .根據申請專利範圍第1 2項所述之製作方法,壓電致動 器之作用電極可用網板印刷的方式或者是鍍膜的方式製 作。 1 6 .根據申請專利範圍第1 5項所述之製作方法,其中電極 之材料可為金、銀、把、I呂、鎳及白金等。 1 7.根據申請專利範圍第1 2項所述之製作方法,壓電基板Page 21 2003.10.17. 021 568837 _ Case No. 91136784_ year month__ VI. The patent application board is combined together; a piezoelectric substrate is made so that the polarization direction and the thickness direction are perpendicular to each other and from the center Position to both sides, and the working electrode is above and below the thickness direction; after the piezoelectric substrate is adhered to the second structure plate, the piezoelectric substrate is processed into an array of piezoelectric actuators by dry etching, laser processing or cutting. Actuator. 1 3. According to the manufacturing method described in Item 12 of the scope of the patent application, the first structure plate and the second structure plate manufactured by the elimination method are manufactured by using a silicon wafer as a substrate by etching; except for silicon crystal In addition to the circle, substrates such as resin, metal, and ceramic can be used instead. 14. According to the manufacturing method described in Item 12 of the scope of the patent application, the first structural plate and the second structural plate produced by the adhesion method are produced by electroforming, and the plating solution is made of amine with low internal stress. Based on nickel sulfonate. 15. According to the manufacturing method described in item 12 of the scope of the patent application, the working electrode of the piezoelectric actuator can be manufactured by screen printing or coating. 16. According to the manufacturing method described in item 15 of the scope of the patent application, the material of the electrode may be gold, silver, handle, I, nickel, platinum, etc. 1 7. According to the manufacturing method described in Item 12 of the scope of patent application, the piezoelectric substrate 第22頁 2003.10.17. 022 568837 _案號91136784_年月曰 修正_ 六、申請專利範圍 以乾蝕刻加工成陣列式之壓電致動器,其加工方式是使用 ICP° 1 8 .根據申請專利範圍第1 2項所述之製作方法,壓電基板 以雷射加工成陣列式之壓電致動器,其加工方式是使用準 分子雷射。 1 9 .根據申請專利範圍第1 2項所述之製作方法,壓電基板 以切割方式加工成陣列式之壓電致動器,其加工方式是使 用晶圓切割機。Page 22 2003.10.17. 022 568837 _ Case No. 91136784_ year month amendment _ six, the scope of the patent application for dry etching process into an array of piezoelectric actuators, the processing method is to use ICP ° 1 8. According to the application In the manufacturing method described in item 12 of the patent scope, the piezoelectric substrate is processed into an array-type piezoelectric actuator by laser, and the processing method is an excimer laser. 19. According to the manufacturing method described in item 12 of the scope of the patent application, the piezoelectric substrate is processed into an array-type piezoelectric actuator by a cutting method, and the processing method is a wafer dicing machine. 第23頁 2003.10.17. 023Page 23 2003.10.17. 023
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US7641943B2 (en) 2004-12-24 2010-01-05 Seiko Epson Corporation Coating method, liquid supplying head and liquid supplying apparatus
TWI392594B (en) * 2006-04-20 2013-04-11 Microjet Technology Co Ltd Fabricating system and fabricating procedure of microgranule

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JP2016055555A (en) * 2014-09-11 2016-04-21 キヤノン株式会社 Liquid discharge device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7641943B2 (en) 2004-12-24 2010-01-05 Seiko Epson Corporation Coating method, liquid supplying head and liquid supplying apparatus
TWI392594B (en) * 2006-04-20 2013-04-11 Microjet Technology Co Ltd Fabricating system and fabricating procedure of microgranule

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