經濟部智慧財產局員工消費合作社印製 567232 Α7 Β7 五、發明說明（，） [發明之詳細說明] [產業上之利用領域] 本發明係關於一種於陰極射線管(映像管)所使用之Fe-Ni系合金所構成之半拉伸張力遮罩(Semi-Streched Tension Mask，SST遮罩，簡稱半張力遮罩(Semi Tension Mask))中 ，潛變特性優異、在將施加張力後之烘烤過之遮罩的皴摺 發生加以抑制上優異的材料，再者，係關於使用該材料之 半張力遮罩、以及使用前述半張力遮罩的彩色映像管。 [習知技術] 映像管之遮罩可大致區分爲：將遮罩素材以蝕刻加工 形成電子線透過用之點或長孔(slot)之後，加壓成形爲遮罩 形態之蔭罩方式；以及，於遮罩素材藉蝕刻加工形成電子 線透過用之長狹縫(slit)之後，拉伸其上下，張架於框架上 之蔭柵(aperture grill)方式。 爲改善因熱膨脹所產生之隆起(doming)特性，一般蔭 罩方式係使用Fe-36%Ni(Invar合金）。另一方面，就蔭柵方 式而言，由於其構造上所具特徵，故不易因熱膨脹發生隆 起，即使熱膨脹係數高仍使用著較廉價的軟鋼。 上述兩種方式各有其優劣所在，不論是哪一種方式皆 爲市場所採用，惟，目前已開始硏究一擷取此2方式所各 具之優點之半張力遮罩方式(Semi-Tension Mask) 〇 此種方式係一種對於藉由蝕刻加工形成電子線透過用 之點或長孔的遮罩素材，並不進行加壓，而是與蔭柵方式 同樣地拉伸其上下，然後支撐於框架上的方法（張架方式） 3 本^尺度適用中關家標準（CNS)A4規格（ χ 297公爱) --- l·--------------------訂---------^ (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 567232 A7 B7 五、發明說明（>) 。此種新方式的開發當初，對於遮罩素材不僅是朝上下方 向、亦在左右方向進行拉伸(即4方向拉伸）。惟，當將遮 罩素材拉伸於4方向時，常有遮罩破裂的情事。爲了避免 因上述遮罩破裂所導致的危險性，乃嘗試將遮罩素材僅朝 上下2方向拉伸，而得到了良好的結果。經此改善所製作 之遮罩，因並非以4方向來拉伸，而是以2方向來拉伸之 故，乃稱爲半拉伸張力遮罩(簡稱半張力遮罩）。 圖1(a)與(b)係槪略地顯示半張力方式遮罩與蔭柵方式 遮罩之說明圖。此兩形式的遮罩皆被拉伸於上下方向。於 半張力遮罩中，複數之垂直長孔列係形成於寬全體上，各 長孔列係由相鄰之長孔2間存在著橋接(bridge)5之複數的 長孔2所構成，另一方面，蔭柵方式遮罩於寬全體包含複 數之長的垂直狹縫3，爲抑制自擴音器等音響源對遮罩造 成振動，有必要設置減振(damper)線4。半張力方式遮罩之 橋接5係藉由蝕刻形成長孔2之際於各長孔列之長孔2間 的未蝕刻部分。橋接5的作用在於防止垂直長孔列的扭曲 。半張力方式遮罩亦稱爲附橋接張力遮罩，此乃由於在各 長孔列間存在著橋接5之故。相較於藉由加壓之蔭罩方式 ，半張力方式可進一步達成平面化，且可達成高亮度化、 高解析化。再者，較蔭柵方式具有更優異的振動特性、不 需減振線，又，於上下方向之拉伸荷重僅需少許，有助於 成本的降低。 另一方面，就半張力遮罩方式而言，其異於蔭柵方式 ’因張架力小、具橋接5等，會由於熱膨脹發生隆起現象 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公楚） l·-------------------訂-------r«^ AW1 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 567232 A7 B7 五、發明說明（，） ，於是，乃硏究採用以熱膨脹係數小的Invar合金爲中心 之Fe-Ni系合金。惟，已知若使用該於以往的加壓方式所 採用之Invar合金，於蔭罩組裝階段的熱處理會造成張力 下降、皴摺發生等之嚴重的問題。 [發明所欲解決之課題] 以上，雖已知於半張力遮罩方式中採用以往之Invar 合金的不適宜之處，惟，針對遮罩製造之各階段進行詳細 地調查結果，發現其原因是由於材料的潛變特性。 亦即，將蝕刻爲點狀或長孔狀之材料進行黑化處理之 後熔接於框材上並施加一定的荷重來張架，之後藉由烘烤 來去除因熔接等所產生的應變。此時，發現在藉由框材拉 伸著的Invar合金上會出現高溫下的塑形變形、也就是潛 變現象。若發生潛變現象，會因爲遮罩的延伸造成所張架 之荷重的緩和（張力下降），並會發生皺摺、振動特性的降 低等各種的問題。 [用以解決課題之手段] 亦即，本發明係用以解決上述課題所得之物，係提供 (1) 一種半張力遮罩用Fe-Ni系合金，其特徵在於，係 由含有 Ni 34%〜45%、Μη 0.01%〜0.5%、Cu，Nb，Mo, W，Ta 之1種或1種以上之合計〇·〇1°/。〜1.5%，再加上殘餘部Fe 與不可避免之不純物所構成之具有優異潛變特性之物。 (2) 如（1)所記載之半張力遮罩用Fe-Ni系合金，其中， 係含有 Si 0.005%〜0.20%、A1 0.005%〜0.030%。 5 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) ---------訂---------線- 567232 A7 B7 五、發明說明（ (請先閱讀背面之注意事項再填寫本頁) (3) 如（1)〜(2)所記載之半張力遮罩用Fe-Ni系合金，其 中’在不可避免之不純物當中，C爲0.010%以下、P爲 0.015%以下、S爲0.010%以下。 (4) 如（1)〜(3)所記載之半張力遮罩用Fe-Ni系合金，其 中，最終冷軋之加工度係定爲15%〜60%。 (5) 如（1)〜(4)所記載之半張力遮罩用Fe-Ni系合金，其 中，最終冷軋後之拉伸強度爲600N/mm2〜700 N/mm2。 (6) 如（1)〜(5)所記載之半張力遮罩用Fe-Ni系合金，其 中，最終冷軋後之0_2%耐力爲570N/mm2〜670 N/mm2。 (7) 如（1)〜(6)所記載之半張力遮罩用Fe-Ni系合金，其 中，係於最終冷軋後進行去應變退火。 (8) —種半張力遮罩，其特徵在於，係使用上述（1)〜(7) 所記載之Fe-Ni系合金。 (9) 一種彩色映像管，其特徵在於，係使用上述(8)所記 載之半張力遮罩。 經濟部智慧財產局員工消費合作社印製 於半張力遮罩方式中，一般係進行黑化處理後再張架 。當黑化處理溫度遠較Fe-Ni系合金之再結晶溫度來得低 時，則如先前之專利申請（日本專利特願平10-356219)所記 載般，可利用該合金之加工硬化來改善潛變特性。惟，若 稱爲黑化溫度或烘烤的熱處理等條件更爲嚴苛，則無法藉 由加工硬化達到預期之潛變特性的提升效果。 此處，藉由提高黑化處理溫度所能期待之最大的效果 是磁性的改善。例如就加壓成形蔭罩用Invar合金而言， 於590°C進行黑化處理之時最大比透磁率爲870〜1000,相 6 本紙張尺度適用中國國家標準(CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 567232 A7 B7 五、發明說明（<) 對於此，若在較59〇°C高5〇°C的64〇t進行黑化處理，則最 大比透磁率爲成爲1030〜1200。又，如映像管在交流消磁 後之地屏壁方面，最大比透fe率愈大，其屏壁件也會愈 佳。 亦即，由於本發明係關於一種發明，其對於添加至 Fe-Ni系合金的元素種類與其量加以選定，故幾乎沒有熱 膨脹係數的上升，亦不會產生妨礙触刻進行的析出物，故 可藉由加工硬化來獲致更優異的效果，而可減緩潛變速度 。就本發明而言，若以以往之Fe-Ni系合金在會開始軟化 的溫度來進行黑化處理等之熱處理時，尤可發揮顯著的效 果。 又’本發明所具有之特徵在於，藉由微量元素的添加 ，即使最終加工度低之時，在機械特性上仍優異，又，即 使最終加工度高，亦不易發生軟化。又，半張力遮罩，由 一般於張架前所進行的黑化處理來看，在蝕刻爲點狀或長 孔狀之時會發生殘留應力的不均一，其會造成藉黑化處理 來開放時有形狀應變的情形，是以，較佳爲於最終冷軋後 進行去應變退火來防止上述情形的發生。 亦即，本發明者發現到，於Fe-Ni系合金中添加Cu， Nb，Mo, W以及Ta之1種或1種以上，並適量地添加A1 與Si，進一步，將最終加工度設定在適當的範圍內，並依 必要性進行去應變退火，藉此，於黑化處理、張架、烘烤 之各製程中不會發生皺摺等，而可大幅提升潛變特性。 其次說明本發明的限定理由。 7 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） l·-------------------訂---------線 (請先閲讀背面之注意事項再填寫本頁) 567232 A7 B7____ 五、發明說明（b ) (請先閱讀背面之注意事項再填寫本頁)Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 567232 Α7 Β7 V. Description of the invention (,) [Detailed description of the invention] [Industrial applications] This invention relates to a kind of Fe used in cathode ray tubes (imaging tubes) -Semi-Streched Tension Mask (SST mask, referred to as Semi Tension Mask) made of Ni-based alloy has excellent creep properties and is baked after applying tension A material that is excellent in suppressing the occurrence of the collapse of the passing mask is a half-tension mask using the material and a color image tube using the half-tension mask. [Known technology] The mask of the image tube can be roughly divided into: a mask method in which a mask material is etched to form a point or slot for transmitting electron rays, and then pressed into a mask form by pressing; and After the mask material is etched to form a long slit for the transmission of electronic wires, it is stretched up and down and stretched on the frame in an aperture grill method. In order to improve the doming characteristics due to thermal expansion, the general shadow mask method uses Fe-36% Ni (Invar alloy). On the other hand, in the case of the shadow grille, due to its structural characteristics, it is not easy to bulge due to thermal expansion, and even if the thermal expansion coefficient is high, relatively inexpensive soft steel is used. Each of the above two methods has its advantages and disadvantages. No matter which method is used by the market, however, the semi-tension mask method (Semi-Tension Mask) that has been used to capture the advantages of these two methods has begun to be studied. ) 〇 This method is a mask material for forming dots or long holes for transmitting electron rays by etching. It is not pressurized, but is stretched up and down in the same way as the shadow grid method, and then supported on the frame. Method (frame method) 3 This standard is applicable to Zhongguanjia Standard (CNS) A4 specification (χ 297 public love) --- l · ----------------- --- Order --------- ^ (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 567232 A7 B7 V. Description of Invention (>). When this new method was developed, the mask material was stretched not only upwards and downwards, but also in the left and right directions (that is, stretched in four directions). However, when the mask material is stretched in 4 directions, the mask often breaks. In order to avoid the danger caused by the rupture of the mask, an attempt was made to stretch the mask material only in two directions, and good results were obtained. The mask produced by this improvement is not stretched in 4 directions, but stretched in 2 directions. It is called a semi-stretched tension mask (referred to as a semi-tensioned mask). Figs. 1 (a) and 1 (b) are explanatory diagrams schematically showing a half tension type mask and a shadow grid type mask. Both types of masks are stretched in the up and down direction. In the half-tension mask, a plurality of vertical long-hole rows are formed on the entire width, and each long-hole row is composed of a plurality of long holes 2 having bridges 5 between adjacent long holes 2. On the one hand, the shadow grid method covers the vertical slits 3 including a plurality of lengths in the entire width. In order to suppress the vibration of the mask from sound sources such as a speaker, it is necessary to provide a damper line 4. The bridge 5 of the half-tension mask is an unetched portion between the long holes 2 in each long hole row when the long holes 2 are formed by etching. The role of the bridge 5 is to prevent distortion of the vertical slotted column. The half tension mask is also called the bridge tension mask. This is because there is a bridge 5 between the long hole rows. Compared with the pressurized shadow mask method, the half tension method can further achieve flatness, and can achieve high brightness and high resolution. Furthermore, compared with the shadow grid method, it has more excellent vibration characteristics, does not require vibration damping lines, and requires only a small amount of tensile load in the vertical direction, which contributes to cost reduction. On the other hand, as for the half tension mask method, it is different from the shadow grille method because it has a small stretching force, a bridge 5 and the like, and it will swell due to thermal expansion. This paper applies the Chinese National Standard (CNS) A4 specification ( 210 X 297 Gongchu) l · ------------------- Order ------- r «^ AW1 (Please read the notes on the back before filling in this Page) Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 567232 A7 B7 V. Description of the invention (,) Therefore, the Fe-Ni based alloy centered on the Invar alloy with a small thermal expansion coefficient was investigated. However, it is known that if the Invar alloy used in the conventional pressurization method is used, heat treatment in the shadow mask assembly stage may cause serious problems such as a decrease in tension and occurrence of collapse. [Problems to be Solved by the Invention] Although it is known that the conventional Invar alloy is unsuitable in the half-tension mask method, detailed investigations have been conducted on each stage of mask manufacturing, and the reason is found to be Due to the creep properties of the material. That is, the material etched into a dot shape or a long hole shape is subjected to a blackening treatment, and then welded to the frame material to apply a certain load to stretch it. Then, baking is performed to remove strain caused by welding or the like. At this time, it was found that the Invar alloy stretched by the frame material had a plastic deformation at high temperature, that is, a latent phenomenon. If the creep phenomenon occurs, the load of the stretched frame will be relaxed (tensile drop) due to the extension of the mask, and various problems such as wrinkles and degradation of vibration characteristics will occur. [Means to Solve the Problem] That is, the present invention is a product obtained to solve the above-mentioned problems, and provides (1) a Fe-Ni-based alloy for a half-tension mask, which is characterized by containing 34% of Ni ~ 45%, Mn 0.01% ~ 0.5%, Cu, Nb, Mo, W, Ta, or a total of one or more of a total of 0.001 ° /. ~ 1.5%, plus residual Fe and unavoidable impurities that have excellent creep properties. (2) The Fe-Ni-based alloy for half-tension masking according to (1), which contains 0.005% to 0.20% of Si and 0.005% to 0.030% of A1. 5 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) --------- Order ------- --Line- 567232 A7 B7 V. Description of the invention ((Please read the precautions on the back before filling this page) (3) Fe-Ni alloys for semi-tension masks as described in (1) ~ (2), Among them, among the unavoidable impurities, C is 0.010% or less, P is 0.015% or less, and S is 0.010% or less. (4) Fe-Ni series for semi-tension masks as described in (1) to (3) For the alloy, the final cold-rolled workability is set to 15% to 60%. (5) The Fe-Ni-based alloy for half-tension masking described in (1) to (4), wherein after the final cold-rolling The tensile strength is 600 N / mm2 to 700 N / mm2. (6) The Fe-Ni-based alloy for half-tension masking described in (1) to (5), wherein the 0_2% endurance after final cold rolling is 570 N / mm2 to 670 N / mm2. (7) The Fe-Ni-based alloy for half-tension masks as described in (1) to (6), wherein the strain relief annealing is performed after the final cold rolling. (8) -A kind of half tension mask, characterized in that the one described in (1) to (7) is used Fe-Ni-based alloy. (9) A color image tube characterized by using the half-tension mask described in (8) above. Printed in the half-tension mask method by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, Generally, it is stretched after blackening treatment. When the temperature of blackening treatment is much lower than the recrystallization temperature of Fe-Ni alloy, it is as described in the previous patent application (Japanese Patent Application No. Hei 10-356219). The workability hardening of the alloy can be used to improve the creep properties. However, if conditions such as blackening temperature or baking heat treatment are more severe, it is impossible to achieve the desired effect of improving the creep properties through work hardening. Here, the greatest effect that can be expected by increasing the temperature of the blackening treatment is the improvement of magnetic properties. For example, in the case of an Invar alloy for a press-formed shadow mask, the maximum specific permeability when the blackening treatment is performed at 590 ° C. 870 ~ 1000, phase 6 This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm). Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 567232 A7 B7 V. Description of Invention (&) More than 59 ° C high 50 ° C 64 ot blackening treatment, the maximum specific permeability is 1030 ~ 1200. Also, if the image tube in the wall after AC demagnetization, the maximum specific permeability is greater, That is, the screen member will be better. That is, since the present invention relates to an invention that selects the types and amounts of elements to be added to the Fe-Ni-based alloy, there is almost no increase in the coefficient of thermal expansion, and there is no obstacle. The precipitates that have progressed by the engraving can obtain more excellent effects through work hardening, and can slow down the creep speed. In the present invention, the conventional Fe-Ni-based alloy is particularly effective when it is subjected to a heat treatment such as a blackening treatment at a temperature at which softening starts. Furthermore, the present invention is characterized in that the addition of a trace element is excellent in mechanical properties even when the final processing degree is low, and even if the final processing degree is high, softening is hard to occur. In addition, from the perspective of the blackening treatment that is generally performed before the stretcher, the unevenness of the residual stress occurs when the etching is spot-shaped or long-hole-shaped, which causes the blackening treatment to open. In some cases, there is a shape strain, and it is preferable to perform strain relief annealing after the final cold rolling to prevent the above situation from occurring. That is, the inventors have discovered that one or more Cu, Nb, Mo, W, and Ta are added to the Fe-Ni-based alloy, and A1 and Si are added in an appropriate amount, and the final workability is set at Within an appropriate range, and if necessary, strain relief annealing is performed, thereby preventing wrinkles and the like in the processes of blackening, stretching and baking, and can greatly improve the creep characteristics. Next, the reasons for limitation of the present invention will be described. 7 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) l · ------------------- Order -------- -Line (please read the precautions on the back before filling this page) 567232 A7 B7____ 5. Description of the invention (b) (please read the precautions on the back before filling this page)
Ni : Ni的含有量會影響到熱膨脹特性與軟化特性。若 Ni超過36°/。熱膨脹係數會變得過大，在成本上也不利。惟 ，由於軟化溫度上升，於烘烤時之潛變延伸變小’半張力 遮罩用之張架力乃大，可防止因熱膨脹所造成之隆起特性 的惡化。再者，Ni的含有量愈多，磁性乃得以提升，在磁 氣屏壁方面係有利的。惟，若Ni超過45%，在熱膨脹特性 上與軟鋼的差異性會變小，就成本來考量，將Fe-Ni系合 金用於半張力遮罩上的優點將不復存在。是以，Ni的上限 係定爲45%。另一方面，即使Ni少於36%熱膨脹係數亦會 變大。惟，當Ni過少時由於軟化溫度變低，於烘烤時之潛 變延伸有變大的傾向，半張力遮罩所具之張架力會不足以 防止因熱膨脹所造成的隆起特性的惡化。是以，將Ni的下 限定爲34%。又，當增大半張力遮罩上的張架力時，框架 亦會被要求具高強度，造成成本的增加，是以，綜合熱膨 脹特性與成本來看，Ni的成分範圍以34%〜38%爲宜。 經濟部智慧財產局員工消費合作社印製 Μη : Μη在將妨礙熱軋加工性之作爲不純物包含其中 之S無害化上爲必要之物。又，若Μη少於0.01%該效果 將消失，若超過0.5%會妨礙蝕刻性，並造成熱膨脹係數變 大。是以，其成份範圍係定於0.01%〜0.5%，惟，爲讓蝕刻 性與熱膨脹特性更好，故較佳的範圍爲0.01%〜0.1%。 A1 : Α1係作爲脫氧劑來使用，若讓Α1以多於0.005% 的含量來固溶，將具有改善潛變特性的效果。惟，若Α1之 含有量多於0.03%會形成氧化鋁，不但妨礙蝕刻性、且在 冷軋時會由於氧化鋁而發生表面的瑕疵。是以，其成份範 8 $張尺度適用中國國家標準(CNS)A4規格（210 X 297公釐) "" 經濟部智慧財產局員工消費合作社印製 567232 Α7 五、發明說明（？） 圍係定於0.005%〜0.03%。 c : C係形成碳化物，若C超過0.010%會生成過多的 碳化物，此會妨礙蝕刻性。是以，將c定爲0.01%以下， 其中，固溶C亦會對於蝕刻性造成不良影響，故C以儘可 能少爲宜，C之更佳範圍爲0.005%以下。 p :若含有過量的p會成爲蝕刻不良的原因。是以， 其含有量以0.015%以下爲宣。 S :若S超過0_010%會妨礙熱軋加工性，且硫化物系 中間體會變得過多從而對蝕刻性造成不良影響。是以，其 上限係定於0.010%以下。 藉由添加 Cu，Nb，Mo, W，Ta : Cu，Nb，Mo, W，Ta 可改 善潛變特性。惟，合計量未滿0.01%在潛變改善效果上小 〇 另一方面，若添加量過多，雖在潛變特性上優良，但 熱膨脹係數會變大，尤其，增加Nb，Mo, W，Ta的添加量 會造成成本的增加。惟，隨著Cu，Nb，Mo, W，Ta的添加， 軟化溫度會上升，此與增加Ni的情形同樣地，半張力遮罩 的張架力會變大，乃可防止因熱膨脹造成之隆起特性的惡 化。惟，若添加多於1.5%則成本會增加，故這些元素的成 分範圍係定爲1種或1種以上的合計在0.01%〜1.5°/。。 最終冷軋加工度：若最終冷軋加工度未滿15%則加工 硬化量少，在潛變改善效果上表現的並不顯著。另一方面 ，若加工度超過60%，則於黑化處理時軟化才開始’反而 造成高溫強度與潛變特性的降低。因此’最終冷軋加工度 9 本紙張尺度適用中國國家標準（CNS)A4規格（210 χ 297公餐） l·---------—--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 567232 A7 __ B7 五、發明說明（纟） 係定爲15%〜60%。當黑化處理溫度超過60(TC時，最終冷 軋加工度以20%〜40%爲佳。 去應變退火：雖實施去應變退火亦不會對於黑化處理 後之潛變延伸造成影響，惟爲了將因黑化處理時開放殘留 應力所產生之不均一變形加以抑制，故實施去應變退火爲 佳。 最終冷軋後之拉伸強度：對於半張力遮罩用材料而言 ，於施加張力時之遮罩強度、烘烤處理時之遮罩的高溫強 度與潛變強度較高會利於設計上的彈性度，故爲所希望的 。已知這些遮罩的機械特性可藉由最終冷軋後之材料強度 來規定。就最終冷軋後之拉伸強度未滿600N/mm2而言， 對於可張架於遮罩上之荷重的較佳範圍的設定是非常困難 的，所以下限設定爲600N/mm2。另一方面，若超過700 N/mm2，則軟化開始溫度會開始降低。是以，將最終冷軋 後之拉伸強度的範圍設定爲600N/mm2〜700 N/mm2。 最終冷軋後之0.2%耐力：最終冷軋後之0.2%耐力超 過670 N/mm2係與拉伸強度超過700 N/mm2同樣地表示軟 化開始溫度會變低。另一方面，若未滿570 N/mm2，由於 與張架之拉伸應力的差小所以會發生潛變現象，而有皴摺 發生或振動特性惡化等之問題。是以，最終冷軋後之0.2% 耐力的範圍係設定爲570 N/mm2〜670 N/mm2。 [實施例] 以下對本發明詳細地說明。 於表1中顯示在本發明例中所使用之合金組成。 10 _本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) l·-------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) A7 _B7 五、發明說明（1 ) 表1 _ 567232 成分No c Si Mn P S Ni A1 Cu Nb Mo W Ta 備考 A 0.003 0.01 0.25 0.004 0.002 36.0 0.012 0.03 <0.001 <0.002 <0.002 <0.001 滿足申 B 0.004 0.01 0.26 0.003 0.003 35.8 0.021 0.08 <0.001 <0.002 <0.002 <0:001 請專利 C 0.006 0.02 0.26 0.003 0.002 36.0 0.008 <0.002 0.05 <0.002 <0.002 <0.001 範圍第 D 0.003 0.01 0.27 0.003 0.002 36.2 0.015 <0.002 0.25 <0.002 <0.002 <0.001 1〜3項 E 0.003 0.02 0.25 0.004 0.003 36.0 0.022 <0.002 1.35 <0.002 <0.002 <0.001 F 0.004 0.03 0.27 0.003 0.003 35.9 0.018 <0.002 <0.001 0.05 <0.002 <0.001 G 0.005 0.02 0.25 0.003 0.003 35.7 0.024 <0.002 <0.001 1.29 <0.002 <0.001 H 0.004 0.03 0.26 0.004 0.003 36.1 0.016 <0.002 <0.001 <0.002 0.15 <0.001 I 0.003 0.04 0.25 0.004 0.002 36.0 0.018 <0.002 <0.001 <0.002 0.82 <0.001 J 0.003 0.03 0.27 0.004 0.002 35,7 0.022 <0.002 <0.001 <0.002 <0.002 0.04 K 0.005 0.02 0.28 0.004 0.003 36.2 0.012 <0：002 <0.001 <0.002 <0.002 0.61 L 0.004 0.03 0.26 0.004 0.003 36.1 0.023 0.02 0.75 0.25 <0.002 <0.001 M 0.015 0.03 0.25 0.003 0.002 36.2 0.017 <0.002 0.28 <0.002 <0.002 <0.001 滿足申 N 0.004 0.03 0.24 0.018 0.002 35.7 0.015 <0.002 <0.001 <0.002 0.08 <0.001 請專利 0 0.003 0.03 0.26 0.003 0.012 36.1 0.014 <0.002 <0.001 <0.002 <0.002 0.06 範圍第 U項 P 0.003 0.22 0.25 0.003 0.002 36.2 0.014 <0.002 0.30 <0.002 <0.002 <0.001 滿足申 Q 0.007 0.01 0.24 0.003 0.003 36.1 0.035 0.01 <0.001 0.005 <0.002 <0.001 請專利 R 0.004 0.004 0.25 0.003 0.003 36.2 0.012 <0.002 0.06 <0.002 <0.002 <0.001 範圍第 S 0.007 0.01 0.26 0.003 0.003 36.1 0.003 <0.002 0.07 <0.002 <0.002 <0.001 1項 T 0.004 0.02 0.28 0.004 0.003 36.2 0.012 <0.002 <0.001 <0.002 <0.002 <0.001 不滿足 U 0.003 0.03 0.26 0.004 0.003 35.9 0.015 <0.002 1.65 <0.002 <0.0〇i2 <0.001 申請專 V 0.003 0.04 0.75 0.003 0.004 35.8 0.012 <0.002 <0.001 0.025 <0.002 <0.001 利範圍 w 0.004 0.02 0.27 0.002 0.002 46.5 0.013 <0.002 <0.001 0.11 <0.002 <0.001 第1項 X 0.003 0.02 0.008 0.003 0.002 35.9 0.013 <0.002 <0.001 0.24 <0.002 <0.001 Y 0.003 0.03 0.26 0.003 0.012 33.2 0.014 <0.002 <0.001 0.015 <0.002 <0.001 藉由真空熔解爐將具有表1所示之成分的Fe-Ni系合 金熔製後，以鍛造以及熱軋形成3mm的厚度之後’反覆進 行冷軋與光亮退火(bright annealing)，自約〇.3mm加工爲 0.11mm厚度的冷軋材。 再者，將上述材料再結晶退火後藉冷軋來軋製成 0.1mm厚度，製作出最終加工度經過各種變化的材料。對 所得之物測定於室溫之拉伸強度與〇.2°/〇耐力，並於605°C 與640°C進行15分鐘黑化處理之後，一邊加熱到460°C — 11 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） I-----------曠------- 訂------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 567232 五、 經濟部智慧財產局員工消費合作社印製 A7 B7 --------- ' ^----- 發明說明（I0 ) 邊負荷100N/mm2或是2〇〇N/mm2的拉伸應力，轉測定i小 時後之潛變延伸。此時，拉伸方向係軋製平行方向。 又，關於具有表1之A〜Y之化學成分的材料，其最終 冷軋加工度爲約35%之物，除了測定自30°C到i〇(rc之間 的平均熱膨脹係數，同時觀察對6(TC之表面以〇.3MPa的 壓力噴灑45波美(Baum6)之氣化鐵水溶液後之触刻面的狀 態。 表2係分別表示拉伸強度、0.2%耐力、潛變延伸的結 果以及作爲蝕刻性之蝕刻面的狀態。 表2Ni: The Ni content affects the thermal expansion characteristics and softening characteristics. If Ni exceeds 36 ° /. The coefficient of thermal expansion becomes too large, which is also disadvantageous in terms of cost. However, as the softening temperature rises, the creep extension during baking becomes smaller. The half-tension masking force is large, which can prevent deterioration of the bulging characteristics caused by thermal expansion. Furthermore, the higher the Ni content, the better the magnetic properties are, which is advantageous in terms of the magnetic screen wall. However, if Ni exceeds 45%, the difference in thermal expansion characteristics from that of mild steel will be small. In terms of cost, the advantages of using Fe-Ni alloys for semi-tension masks will no longer exist. Therefore, the upper limit of Ni is set to 45%. On the other hand, even if Ni is less than 36%, the thermal expansion coefficient becomes large. However, when the Ni is too small, the softening temperature tends to be low, and the latent extension during the baking tends to increase. The tension force of the half-tension mask is insufficient to prevent deterioration of the heave characteristics due to thermal expansion. Therefore, the lower limit of Ni is 34%. In addition, when the stretching force on the half-tension mask is increased, the frame will also be required to have high strength, resulting in an increase in cost. In view of comprehensive thermal expansion characteristics and cost, the composition range of Ni is 34% to 38%. Better. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Μη: Μη is necessary to detoxify S as an impurity that impedes hot rolling workability. If Mη is less than 0.01%, the effect will disappear, and if it exceeds 0.5%, the etching property will be impaired and the thermal expansion coefficient will increase. Therefore, the composition range is set to 0.01% to 0.5%. However, in order to make the etching properties and thermal expansion characteristics better, the preferable range is 0.01% to 0.1%. A1: A1 is used as a deoxidizer. If A1 is solid-dissolved at a content of more than 0.005%, it has the effect of improving creep properties. However, if the content of A1 is more than 0.03%, alumina is formed, which not only hinders the etching properties, but also causes surface defects due to alumina during cold rolling. Therefore, its composition range of 8 US dollars is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) " " Printed by the Employees ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 567232 Α7 V. Description of the invention (?) It is set at 0.005% ~ 0.03%. c: C-based carbides are formed. If C exceeds 0.010%, excessive carbides are formed, which hinders etching. Therefore, c is set to be 0.01% or less, among which solid solution C will also have an adverse effect on the etchability. Therefore, C is preferably as small as possible, and the more preferred range of C is 0.005% or less. p: If an excessive amount of p is contained, it will cause the etching failure. Therefore, its content is declared as 0.015% or less. S: If S exceeds 0_010%, hot rolling workability will be impeded, and sulfide-based intermediates will become excessive, which will adversely affect etching properties. Therefore, the upper limit is set to 0.010% or less. By adding Cu, Nb, Mo, W, Ta: Cu, Nb, Mo, W, Ta can improve the creep characteristics. However, if the total amount is less than 0.01%, the effect of improving the creep is small. On the other hand, if the amount is too large, although the creep characteristics are excellent, the coefficient of thermal expansion will increase, especially, increasing Nb, Mo, W, Ta The added amount will increase the cost. However, as Cu, Nb, Mo, W, and Ta are added, the softening temperature will increase. As in the case of increasing Ni, the tension force of the half-tension mask will increase, which can prevent the swelling caused by thermal expansion. Deterioration of characteristics. However, if it is added more than 1.5%, the cost will increase. Therefore, the composition range of these elements is set to be one or more than 0.01% to 1.5 ° /. . Final cold-rolled workability: If the final cold-rolled workability is less than 15%, the amount of work hardening is small, and the effect of improving the creep is not significant. On the other hand, if the degree of processing exceeds 60%, softening only starts during the blackening treatment, and the high-temperature strength and the creep properties are reduced. Therefore, 'final cold-rolled processing 9 paper size is applicable to China National Standard (CNS) A4 specifications (210 χ 297 meals) l · ------------------- Order- ------- line (Please read the precautions on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 567232 A7 __ B7 V. Description of the invention (纟) It is set to 15% ~ 60% . When the temperature of the blackening treatment exceeds 60 ° C, the final cold rolling workability is preferably 20% to 40%. Strain relief annealing: Although the strain relief annealing is performed, it will not affect the creep extension after the blackening treatment, but In order to suppress the uneven deformation caused by the open residual stress during the blackening treatment, it is better to perform strain relief annealing. Final tensile strength after cold rolling: For a material for half-tension mask, when tension is applied The mask strength, the high temperature strength and the creep strength of the mask during the baking process are good for the design flexibility, so it is desirable. It is known that the mechanical properties of these masks can be obtained after final cold rolling. The material strength is specified. As for the tensile strength after the final cold rolling is less than 600N / mm2, it is very difficult to set a preferable range of the load that can be stretched on the mask, so the lower limit is set to 600N / mm2. On the other hand, if it exceeds 700 N / mm2, the softening start temperature starts to decrease. Therefore, the range of tensile strength after final cold rolling is set to 600 N / mm2 to 700 N / mm2. After final cold rolling 0.2% endurance: after final cold rolling The 0.2% endurance exceeding 670 N / mm2 means that the softening start temperature will be lowered in the same way as the tensile strength exceeding 700 N / mm2. On the other hand, if it is less than 570 N / mm2, the difference in tensile stress from the tensioning will be caused. It causes small creep phenomenon, and there are problems such as occurrence of collapse and deterioration of vibration characteristics. Therefore, the 0.2% endurance range after final cold rolling is set to 570 N / mm2 to 670 N / mm2. [Example ] The present invention is described in detail below. The alloy composition used in the examples of the present invention is shown in Table 1. 10 _ This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) l · --- ---------------- Order --------- line (Please read the precautions on the back before filling this page) A7 _B7 V. Description of the invention (1) Form 1 _ 567232 Composition No c Si Mn PS Ni A1 Cu Nb Mo W Ta Remark A 0.003 0.01 0.25 0.004 0.002 36.0 0.012 0.03 < 0.001 < 0.002 < 0.002 < 0.001 meet the application B 0.004 0.01 0.26 0.003 0.003 35.8 0.021 0.08 < 0.001 < 0.002 < 0.002 < 0: 001 Patent C 0.006 0.02 0.26 0.003 0.002 36.0 0.008 < 0.002 0.05 < 0.002 < 0.002 < 0. 001 range D 0.003 0.01 0.27 0.003 0.002 36.2 0.015 < 0.002 0.25 < 0.002 < 0.002 < 0.001 1 to 3 items E 0.003 0.02 0.25 0.004 0.003 36.0 0.022 < 0.002 1.35 < 0.002 < 0.002 < 0.001 F 0.004 0.03 0.27 0.003 0.003 35.9 0.018 < 0.002 < 0.001 0.05 < 0.002 < 0.001 G 0.005 0.02 0.25 0.003 0.003 35.7 0.024 < 0.002 < 0.001 1.29 < 0.002 < 0.001 H 0.004 0.03 0.26 0.004 0.003 36.1 0.016 < 0.002 < 0.001 < 0.002 0.15 < 0.001 I 0.003 0.04 0.25 0.004 0.002 36.0 0.018 < 0.002 < 0.001 < 0.002 0.82 < 0.001 J 0.003 0.03 0.27 0.004 0.002 35,7 0.022 < 0.002 < 0.001 < 0.002 < 0.002 0.04 K 0.005 0.02 0.28 0.004 0.003 36.2 0.012 < 0: 002 < 0.001 < 0.002 < 0.002 0.61 L 0.004 0.03 0.26 0.004 0.003 36.1 0.023 0.02 0.75 0.25 < 0.002 < 0.001 M 0.015 0.03 0.25 0.003 0.002 36.2 0.017 < 0.002 0.28 < 0.002 < 0.002 < 0.001 meet the application N 0.004 0.03 0.24 0.018 0.002 35.7 0.015 < 0.002 < 0.001 < 0.002 0.08 < 0.001 patent request 0 0.003 0.03 0.26 0.003 0.012 36.1 0.014 < 0.002 < 0.001 < 0.002 < 0.002 0.06 Range item U 0.003 0.22 0.25 0.003 0.002 36.2 0.014 < 0.002 0.30 < 0.002 < 0.002 < 0.001 Satisfy Q 0.007 0.01 0.24 0.003 0.003 36.1 0.035 0.01 < 0.001 0.005 < 0.002 < 0.001 please patent R 0.004 0.004 0.25 0.003 0.003 36.2 0.012 < 0.002 0.06 < 0.002 < 0.002 < 0.001 range S 0.007 0.01 0.26 0.003 0.003 36.1 0.003 < 0.002 0.07 < 0.002 < 0.002 < 0.001 1 item T 0.004 0.02 0.28 0.004 0.003 36.2 0.012 < 0.002 < 0.001 < 0.002 < 0.002 < 0.001 does not satisfy U 0.003 0.03 0.26 0.004 0.003 35.9 0.015 < 0.002 1.65 < 0.002 < 0.0〇i2 < 0.001 Application V 0.003 0.04 0.75 0.003 0.004 35.8 0.012 < 0.002 < 0.001 0.025 < 0.002 < 0.001 profit range w 0.004 0.02 0.27 0.002 0.002 46.5 0.013 < 0.002 < 0.001 0.11 < 0.002 < 0.001 item 1 X 0.003 0.02 0.008 0.003 0.002 35.9 0.013 < 0.002 < 0.001 0.24 < 0.002 < 0.001 Y 0.003 0.03 0.26 0.003 0.012 33. 2 0.014 < 0.002 < 0.001 0.015 < 0.002 < 0.001 After the Fe-Ni based alloy having the composition shown in Table 1 was melted in a vacuum melting furnace, it was forged and hot rolled to a thickness of 3 mm. Cold rolling and bright annealing were performed, and a cold-rolled material having a thickness of 0.11 mm was processed from about 0.3 mm. Furthermore, the material was recrystallized and annealed, and then cold-rolled to a thickness of 0.1 mm to produce a material having various final processing degrees. The obtained product was measured for tensile strength and endurance at 0.2 ° / 〇 at room temperature, and after being blackened for 15 minutes at 605 ° C and 640 ° C, it was heated to 460 ° C — 11 This paper applies China National Standard (CNS) A4 Specification (210 X 297 mm) I ----------- Kuang ------- Order ------- (Please read the note on the back first Please fill in this page for further information) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 567232 V. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 --------- '^ ----- Description of the invention ( I0) The tensile stress at a side load of 100 N / mm2 or 2000 N / mm2 was measured after i hours. At this time, the drawing direction is a rolling parallel direction. In addition, for materials having the chemical composition of A to Y in Table 1, the final cold-rolled workability was about 35%. In addition to measuring the average thermal expansion coefficient from 30 ° C to i0 (rc, 6 (The surface of TC was sprayed with a 45% Baum 6 gasified iron aqueous solution at a pressure of 0.3 MPa. The state of the contact facet. Table 2 shows the results of tensile strength, 0.2% endurance, creep extension, and The state as an etching surface. Table 2
No. 成分 No. 最終加 工度 (%) 最終冷軋後之機械 性質 460°C張架1小時之時的潛變延伸(％) 30 〇C 〜100 °c平均熱 膨脹係數 X 10々°C 蝕刻面 之狀態 拉伸強 度 N/mm2 0.2% 耐 力 N/mm2 605°CX15分黑化 處理 640°C X 15分黑化 處理 100N/mm2 200 N/mm2 100N/mm2 200 N/mm2 1 A 35 ’ 651 622 0.050 0.115 0.064 0.148 14 i好 2 B 34 657 626 0.047 0.100 0.059 0.134 15 良好 3 C 35 662 629 0.053 0.106 0.066 0.141 14 良好 4 D 18 654 630 0.051 0.104 0.063 0.130 16 良好 5 D 58 677 653 0.045 0.085 0.055 0.118 — — 6 E 33 670 642 0.044 0.088 0.054 0.118 26 良好 7 F 34 — 648 624 0.051 0.090 0.061 0.132 17 良好 8 G 35 651 625 0.044 0.092 0.054 0.115 33 良好 9 G 48 687 657 0.041 0.087 0.050 0.108 — — 10 H 32 ， 656 633 0.047 0.106 0.060 0.141 19 良好 11 I 35 65Γ 629 0.046 0.098 0.058 0.127 28 良好 12 J 33 ’ 640 614 0.051 0.101 0.063 0.147 15 良好~ 13 K 33 656 640 0.048 0.092 0.059 0.131 — 21 良好 14 L 34 690 659 0.042 0.089 0.052 0.112 27 良好 12 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） -l·-----------··11 (請先閱讀背面之注意事項再填寫本頁) 訂-------一-線· 567232 A7B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（〇) 15 C 13 582 554 0.064 0.119 0.079 0.146 — — 16 C 62 674 649 0.060 0.115 0.074 0.165 — 一 17 D 13 592 567 0.060 0.113 0.074 0.145 — — 18 D 68 691 563 0.056 0.105 0.069 0.161 — — 19 T 35 629 605 0.064 0.209 0.092 0.267 13 _良好 20 T 58 662 633 0.076 0.214 0.105 0.312 — — 21 U 35 666 638 0.040 0.090 0.050 0.112 57 良好 22 P 33 669 642 0.047 0.109 0.060 0.152 18 普通* 23 Q 34 658 628 0.046 0.106 0.059 0.142 19 普通* 24 V 35 676 949 0.044 0.103 0.056 0.138 23 普通* 25 W 35 666 638 0.055 0.123 0.070 0.145 68 良好 26 Μ 33 655 632 0.043 0.104 0.055 0.124 16 普通* 27 Ν ' 34 663 634 0.046 0.109 0.059 0.138 14 普通* 28 0 33 659 631 0.051 0.121 0.066 0.144 16 普通* 29 R 35 652 621 0.054 0.133 0.071 0.154 13 良好 30 X 35 656 626 0.048 0.106 0.061 0.124 10 普通* 31 S 34 649 619 0.055 0.129 0.071 0.159 14 良好 32 Υ 35 656 628 0.051 0.121 0.066 0.144 41 良好 *有些許之凹凸以及異物的蝕刻痕 自No.l到No.14係滿足申請專利範圍第1〜6項的本發 明例。 在黑化處理過之實際的半張力遮罩方面，對於烘烤後 之發生雛摺的材料與未發生皺摺的材料於640°C進行15分 鐘的黑化處理，接著於460°C負荷200N/mm2的應力1小時 後測定潛變延伸，結果成爲皴摺發生之交界的潛變延伸爲 0.16%。No.l到No.14係，即使黑化處理溫度高達640°C、 且張架應力大，潛變延伸仍未滿0.16%。其中，由No.8與 No.9可知，當添加元素(Mo)過多之時，即使最終冷軋加工 度大，於640°C黑化處理後之潛變延伸相較於在最終冷軋 13 本紙張尺度適用中國國家標準（CNS)A4規格（210 χ 297公釐） l·------------------訂------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 567232 A7 B7 五、發明說明（、>) 加工度上較Νο·9爲低的Νο·8仍顯得低。此乃表示，當添 加元素過多時，因軟化溫度朝高溫側移動，黑化處理溫度 固然會變高，但潛變延伸則不會變大。 另一方面，Νο·15與Νο.17係，由於最終冷軋加工度 未滿15%，故於最終冷軋後之強度低，對於蝕刻等之處理 來說並非所希望的。又，Νο.16與Νο.18係，由於最終冷 軋加工度超過60%，軟化開始溫度乃降低，其結果，負荷 200 N/mm2的應力時之潛變延伸乃大，尤其是640°C黑化處 理後之潛變延伸會超過推定爲半張力遮罩所會發生之皴摺 的下限的0.16%。就Νο.16與Νο.18而言，由添加了 Nb的 Νο.18之潛變延伸較小此結果來看，推測受到添加元素(Cu， Nb，Mo, W，Ta)的影響，軟化開始溫度會移動至高溫側。No. Ingredient No. Final degree of processing (%) Mechanical properties after final cold rolling 460 ° C Tensile stretch at 1 hour (%) 30 ℃ ~ 100 ° c Average thermal expansion coefficient X 10々 ° C Etching Surface state Tensile strength N / mm2 0.2% Endurance N / mm2 605 ° CX15 min blackened 640 ° CX 15min blackened 100N / mm2 200 N / mm2 100N / mm2 200 N / mm2 1 A 35 '651 622 0.050 0.115 0.064 0.148 14 iGood 2 B 34 657 626 0.047 0.100 0.059 0.134 15 Good 3 C 35 662 629 0.053 0.106 0.066 0.141 14 Good 4 D 18 654 630 0.051 0.104 0.063 0.130 16 Good 5 D 58 677 653 0.045 0.085 0.055 0.118 —18 — 6 E 33 670 642 0.044 0.088 0.054 0.118 26 Good 7 F 34 — 648 624 0.051 0.090 0.061 0.132 17 Good 8 G 35 651 625 0.044 0.092 0.054 0.115 33 Good 9 G 48 687 657 0.041 0.087 0.050 0.108 — — 10 H 32, 656 633 0.047 0.106 0.060 0.141 19 Good 11 I 35 65Γ 629 0.046 0.098 0.058 0.127 28 Good 12 J 33 '640 614 0.051 0.101 0.063 0.147 15 Good ~ 13 K 33 656 640 0.048 0.092 0.059 0.131 — 21 Good 14 L 34 69 0 659 0.042 0.089 0.052 0.112 27 Good 12 This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) -l · ----------- · 11 (Please read the back first Please note this page, please fill in this page) Order ------- First-line · 567232 A7B7 Printed by the Consumers' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (〇) 15 C 13 582 554 0.064 0.119 0.079 0.146 — — 16 C 62 674 649 0.060 0.115 0.074 0.165 — one 17 D 13 592 567 0.060 0.113 0.074 0.145 — — 18 D 68 691 563 0.056 0.105 0.069 0.161 — — 19 T 35 629 605 0.064 0.209 0.092 0.267 13 _good 20 T 58 662 633 0.076 0.214 0.105 0.312 — — 21 U 35 666 638 0.040 0.090 0.050 0.112 57 Good 22 P 33 669 642 0.047 0.109 0.060 0.152 18 Normal * 23 Q 34 658 628 0.046 0.106 0.059 0.142 19 Normal * 24 V 35 676 949 0.044 0.103 0.056 0.138 23 Normal * 25 W 35 666 638 0.055 0.123 0.070 0.145 68 Good 26 Μ 33 655 632 0.043 0.104 0.055 0.124 16 Normal * 27 Ν '34 663 634 0.046 0.109 0.059 0.138 14 Normal * 28 0 33 659 631 0.051 0.121 0.066 0 .144 16 Normal * 29 R 35 652 621 0.054 0.133 0.071 0.154 13 Good 30 X 35 656 626 0.048 0.106 0.061 0.124 10 Normal * 31 S 34 649 619 0.055 0.129 0.071 0.159 14 Good 32 Υ 35 656 628 0.051 0.121 0.066 0.144 41 Good * Slight unevenness and etch marks of foreign matter from No. 1 to No. 14 are examples of the present invention satisfying the items 1 to 6 of the scope of patent application. In terms of the actual half-tension mask after blackening treatment, the material that undergoes creases after baking and the material that does not crease are blackened at 640 ° C for 15 minutes, and then loaded at 460 ° C and 200N. The creep elongation was measured after 1 hour of stress / mm2. As a result, the creep elongation at the junction where the collapse occurred was 0.16%. For No.l to No.14 series, even if the blackening temperature is as high as 640 ° C and the tensile stress is large, the creep extension is still less than 0.16%. Among them, it is known from No. 8 and No. 9 that when the added element (Mo) is excessive, even if the final cold rolling process is large, the creep extension after blackening at 640 ° C is higher than that in the final cold rolling 13 The size of this paper is applicable to China National Standard (CNS) A4 (210 χ 297 mm) l · ------------------ Order ------- (please first Read the notes on the back and fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 567232 A7 B7 V. Description of the invention (>) The processing degree of Νο · 8, which is lower than Νο · 9, still looks low. This means that when too many elements are added, the softening temperature moves to the high-temperature side, although the blackening temperature will increase, but the latent extension will not increase. On the other hand, No. 15 and No. 17 series, because the final cold-rolling degree is less than 15%, have low strength after the final cold-rolling, and are not desirable for processing such as etching. In addition, in the Νο.16 and Νο.18 series, since the final cold-rolling degree exceeds 60%, the softening start temperature is reduced. As a result, the creep extension at a load of 200 N / mm2 is large, especially at 640 ° C. The creep extension after the blackening treatment will exceed 0.16% of the lower limit of the presumption that a half tension mask will occur. As far as Νο.16 and Νο.18 are concerned, it is presumed that the softening starts from the effect of the added elements (Cu, Nb, Mo, W, Ta) from the small extension of the creep of No. 18 with Nb added. The temperature moves to the high temperature side.
No.19與No.20係，由於未含有本發明之申請專利範 圍第1項所規定的量的添加元素(Cu，Nb，Μσ，W，Ta)，不 論最終冷軋加工度大小，即使於600°C經黑化處理的情形 ，若負荷200 N/mm2的應力，潛變延伸仍超過0.16%。 又，Νο.21、Νο·25、Νο·32係，由於化學成分(Nb或 Ni)超出本發明之申請專利範圍第1項所規定之範圍，熱膨 脹係數乃大，由隆起特性的觀點來看並不適合作爲半張力 遮罩用材料。又，作爲Cii，Nb，Mo, W，Ta之添加元素量超 出本發明之申請專利的範圍的例子，雖僅就Nb來比較， 惟增加Cu，Mo, W，Ta之含有量熱膨脹會變大一事可由表2 的結果明顯地看出，若超出申請專利的範圍，將不適宜作 爲半張力遮罩用材料。 14 ^紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) l·-------------------訂-------線 (請先閱讀背面之注意事項再填寫本頁) 567232 Α7 ____Β7 五、發明說明（、b ) 另一方面，就自Νο·22到Νο·24以及自Νο·26到 Νο·28 而言，Νο.22 爲 Si、Νο.23 爲 Α卜 Νο·24 爲 Μη、 Νο·26爲C、Νο·27爲ρ、Νο.28爲S超過規定量。這些材 料的潛變延伸在0.16%以下，雖無半張力遮罩之皺摺發生 的問題’惟’於材料中含有多量之異物等（就中間物而言 Νο·22 爲 Si02、Νο·23 爲 Al2〇3、Νο·24 與 Νο.28 爲 MnS、 Νο·26爲鐵碳化物、No.27爲磷偏析），於蝕刻後會成爲蝕 刻痕造成蝕刻面的粗糙，故作爲半張力遮罩用材料並不能 說是充分。尤其，由於Al2〇3係以團狀存在，MnS或磷偏 析具有延性會延伸爲線狀，這些物質會惡化點狀或狹縫狀 之蝕刻加工孔之邊緣的形狀。又，No.24係Μη造成熱膨脹 係數的增大。 又，Νο.29係，由於Si未滿0.005%，相較於本發明例 之No.l〜Νο·14在黑化處理後之潛變延伸大，若於640°C黑 化處理後負荷200 N/mm2的應力來張架，由於與推定爲半 張力遮罩所會發生之皴摺的下限的〇_16%接近，故不希望 黑化處理溫度的更高溫化。No.31係，由於A1未滿0·0〇5% ，故會發生同樣的現象。 又，Νο·30係，雖潛變延伸在0·16%以下、且熱膨脹係 數小，惟由於Μη未滿0.01% ’並無法將熱加工時因$偏 析所造成之脆化無害化，於是有時在鍛造或熱軋時會發生 裂痕或瑕疵。又，於鈾刻後之結晶晶界的凹凸大’此被認 定爲乃因對S之結晶晶界的偏析所造成者。 又，就本發明之實施例而言’於最終冷軋後雖未實施 15 1本紙張尺度適用中國國家標準（cns)a4規格χ 297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂-------一-線· 經濟部智慧財產局員工消費合作社印製 567232 A7 B7 五、發明說明（^) (請先閱讀背面之注意事項再填寫本頁) 去應變退火，惟，即使以與Νο·4同樣的條件來製作試驗片 ，於700°C進行1秒的去應變退火，則於64(TC黑化處理後 負荷200 N/mm2的應力來張架時，已確認潛變延伸爲未受 到影響的0.128%。不過，若不進行去應變的動作，藉蝕刻 加工爲點狀或狹縫狀之遮罩之際，殘留應力分布的平衡會 崩潰，有時會造成藉黑化處理所解放之形狀的惡化，故乃 希望在張架作業上進行去應變退火以避免因黑化處理所造 成之形狀的變化。再者，依必要性有時亦可實施藉張力校 平器(leveler)所進行之形狀矯正，當然將這些製程加入對本 發明之有效性不會造成問題，亦毋庸置疑其可包含於本專 利申請的範圍內。 [發明之效果] 由於本發明之Fe-Ni系合金具備優異之潛變特性、且 熱膨脹係數亦低，故可適切地當作無色差的彩色映像管用 材料。尤其，由於在磁氣遮蔽性上優良，故於高溫（超過 600°C)下進行黑化處理之時可發揮效力。 又，本發明所製作之半張力遮罩在將彩色映像管的畫 面平面化上是適宜的。 經濟部智慧財產局員工消費合作社印製 [圖式之簡單說明] 圖1(a)係槪略地顯示半張力方式遮罩的說明圖。 圖1(b)係槪略地顯示蔭柵方式遮罩的說明圖。 [符號說明] 1 框架 2 長孔 16 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 567232 A7 B7 五、發明說明（/ ) 3 狹縫 4 減振線 5 橋接 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）No.19 and No.20 series, because they do not contain the additive element (Cu, Nb, Mσ, W, Ta) in the amount specified in item 1 of the scope of patent application of the present invention, regardless of the final cold rolling process, In the case of blackening at 600 ° C, if the load is 200 N / mm2, the creep extension still exceeds 0.16%. In addition, in the Νο.21, Νο · 25, and Νο · 32 series, since the chemical composition (Nb or Ni) is outside the range specified in item 1 of the patent application scope of the present invention, the thermal expansion coefficient is large, from the viewpoint of the bulging characteristics. Not suitable as a material for half-tension masks. In addition, as an example of the amount of the added elements of Cii, Nb, Mo, W, and Ta exceeding the scope of the patent application of the present invention, although only Nb is compared, the increase in the content of Cu, Mo, W, and Ta will increase the thermal expansion. It is obvious from the results in Table 2 that if it exceeds the scope of the patent application, it will not be suitable as a material for semi-tension masks. 14 ^ Paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) l · ------------------- Order ------- line (Please read the notes on the back before filling this page) 567232 Α7 ____ Β7 V. Description of the invention (, b) On the other hand, in terms of from Νο · 22 to Νο · 24 and from Νο · 26 to Νο · 28, Νο .22 is Si, No. 23 is AB, No. 24 is Mn, No. 26 is C, No. 27 is ρ, and No. 28 is S exceeds the prescribed amount. The creep of these materials extends below 0.16%, although there is no problem with the wrinkles of the semi-tension mask 'only', which contains a large amount of foreign matter in the material, etc. (in the case of intermediates, No. 22 is Si02, No. 23 is Al2〇3, No. 24 and No. 28 are MnS, No. 26 is iron carbide, and No. 27 is phosphorous segregation). After etching, it will become an etching mark and cause the roughness of the etched surface, so it is used as a semi-tension mask. The material cannot be said to be sufficient. In particular, since Al203 is present in agglomerates, MnS or phosphorus segregation has ductility and extends into a linear shape. These materials deteriorate the shape of the edge of a spot-shaped or slit-shaped etched hole. In addition, No. 24 series Mn increases the thermal expansion coefficient. In addition, for the No. 29 series, since Si is less than 0.005%, compared with No. 1 to No. 14 of the present invention, the latent extension after blackening treatment is larger. If the blackening treatment is performed at 640 ° C, the load is 200 The tension of N / mm2 is stretched, and it is close to 0-16% of the lower limit of the transition that is estimated to occur in the half-tension mask. Therefore, it is not desirable to increase the temperature of the blackening treatment. In No. 31 series, the same phenomenon occurs because A1 is less than 0.05%. In addition, Νο · 30 series, although the creep extension is below 0.16%, and the thermal expansion coefficient is small, but because η is less than 0.01%, it cannot harm the embrittlement caused by $ segregation during hot processing. Cracks or flaws can occur during forging or hot rolling. It is considered that the unevenness of the crystal grain boundary after the uranium engraving is caused by the segregation of the crystal grain boundary of S. In addition, as far as the embodiment of the present invention is concerned, although it has not been implemented after the final cold rolling, 15 1 paper size is applicable to the Chinese National Standard (cns) a4 size χ 297 mm) (Please read the precautions on the back before filling this page ) Order --------- First-line · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed 567232 A7 B7 V. Description of the invention (^) (Please read the precautions on the back before filling this page) However, even if a test piece is produced under the same conditions as No. 4 and subjected to strain relief annealing at 700 ° C for 1 second, the test piece is stretched at a stress of 200 N / mm2 after 64 (TC blackening treatment). It is confirmed that the creep elongation is 0.128% unaffected. However, if the strain relief is not performed, the balance of the residual stress distribution will collapse when it is etched into a spot-shaped or slit-shaped mask, which may cause it. The deterioration of the shape liberated by the blackening treatment is desirable to perform strain relief annealing on the stretcher operation to avoid the change of the shape caused by the blackening treatment. In addition, it is sometimes necessary to perform tension correction if necessary. The shape correction performed by the leveler, of course, will The addition of these processes will not cause a problem to the effectiveness of the present invention, and there is no doubt that it can be included in the scope of this patent application. [Effects of the invention] Because the Fe-Ni alloy of the present invention has excellent creep properties and thermal expansion The coefficient is also low, so it can be appropriately used as a material for color image tubes without color difference. In particular, because it has excellent magnetic shielding properties, it can be effective when blackening is performed at high temperatures (over 600 ° C). The semi-tension mask made by the present invention is suitable for flattening the screen of the color image tube. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs [Simplified description of the figure] Figure 1 (a) is a sketch An explanatory diagram showing a half tension type mask. Fig. 1 (b) is an explanatory diagram showing a shadow grid type mask. [Symbols] 1 Frame 2 Long hole 16 This paper applies Chinese National Standard (CNS) A4 Specifications (210 X 297 mm) 567232 A7 B7 V. Description of the invention (/) 3 Slit 4 Vibration damping line 5 Bridging (Please read the notes on the back before filling this page) Paper scale applicable Chinese National Standard (CNS) A4 size (210 X 297 mm)