TW567107B - Device and method for low-deformation precision welding of 0.2 to 0.5 mm thin sheets - Google Patents
Device and method for low-deformation precision welding of 0.2 to 0.5 mm thin sheets Download PDFInfo
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- TW567107B TW567107B TW90119276A TW90119276A TW567107B TW 567107 B TW567107 B TW 567107B TW 90119276 A TW90119276 A TW 90119276A TW 90119276 A TW90119276 A TW 90119276A TW 567107 B TW567107 B TW 567107B
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567107567107
《發明背景》 之a所示, 金屬板3 1 金屬板3 1 方式、能量 薄金屬板3 散性較大、 造成變形量 同時,為防 失,故,必 拭的非常乾 氧化,其過 該烊料3 2 ’勢必造成 示’係在兩 2 ’並利用 ^亍溶融,造 1接合處表 3、3 4 其 板3 1接合 3 1接合處 全融合3 5 在現今的半導體工業或電子封裝產業的領域裡 ,如何能提供一種低應變、高精密度之薄金屬板烊接裝置 ’以因應半導體工業上的需求,即為本案發明^ 如圖一 且按一般薄 ,由於該薄 3 1的焊接 而谷易造成 ’其熱的擴 對地,容易 k接效果’ 及氧化之缺 殊清潔劑擦 發生碳化及 不乾淨,使 3 1接合處 圖一之b所 別上焊料3 南熱方式進 薄金屬板3 負兩電極3 兩片薄金屬 片薄金屬板 部並無法完 因此 習用採取直 (泛指0 · 很薄,且採 不易控制及 1產生破洞 焊接點也較 大,平整性 止薄金屬板 須在薄金屬 淨,使在熔 程繁雜,倘 4融日守無法 兩薄金屬板 片薄金屬板 正、負兩電 成該焊料3 面,再如圖 電流及能量 處表面會有 ’除表面有 ’而有容易 接接觸式的 5 m m以下 電極直接接 必須使用焊 之情形,又 大(約2 3 差以及不易 3 1在熔接 板3 1熔接 接時薄金屬 若該薄金屬 黏合附著於 3 1無法密 3 1接合處 極 3 3、3 2融化、並 一之c所示 不易穩定控 破洞及不平 焊料3 2連 斷裂之憂慮 焊接方式, )在烊接時 觸薄金屬板 料 3 2,$ 因連續焊接 m m ),相 焊接等不良 時產生碳化 前,使用特 板3 1不易 板3 1擦拭 該薄金屬板 閉接合,如 上、下須分 4以高溫、 融合於兩片 ’由於正、 制’使在該 整’且該兩 接外,其内As shown in a of "Background of the Invention", the method of metal plate 3 1 metal plate 3 1 and the energy-thin metal plate 3 are relatively large and cause deformation. At the same time, in order to prevent loss, it must be wiped very dry and oxidized. 3 料 3 2 'will cause the display' to be in two 2 'and use ^ 亍 to melt to make 1 joints Table 3, 3 4 The board 3 1 joint 3 1 joint full fusion 3 5 In the current semiconductor industry or electronic packaging In the field of industry, how can a low-strain, high-precision thin metal plate bonding device be provided to meet the needs of the semiconductor industry, that is, the invention of the present invention ^ As shown in FIG. 1 and generally thin, since the thin 3 1 The soldering can easily cause 'their thermal expansion to the ground, easy to connect the effect' and the oxidized defect cleaning agent to carbonize and not clean, so that 3 1 joints shown in Figure 1b b solder 3 South thermal method Thin metal plate 3 Negative two electrodes 3 Two thin metal plates The thin metal plate portion cannot be completed, so the habit is straight (general refers to 0 · Very thin, and difficult to control and 1 produces holes. Welding points are also large, flatness is limited Thin metal plates must be made of thin metal The process is complicated. If the 4th Rong Ri Shou cannot make two thin metal plates, the thin metal plate can be positive and negative, and the three sides of the solder can be formed. If the electrode is less than 5 mm, it is necessary to use welding when it is directly connected. It is large (approximately 2 3 poor and difficult 3 1 when welding the thin plate 3 1 when welding thin metal if the thin metal is adhered to 3 1 cannot be dense 3 1 joint electrode 3 3, 3 2 melts, and it is not easy to control the stability of holes and uneven soldering as shown in c. 3 Welding method of worrying about 3 2 continuous fractures.) Touch thin metal sheet 3 during welding. 2, because of continuous welding mm). Before carbonization occurs when welding or other defects occur, use special plate 3 1 not easy plate 3 1 to wipe the thin metal plate to close the joint, and the upper and lower must be divided into 4 pieces at high temperature, fused to two pieces 'due to the positive and negative' The two connections are outside and inside
mmmm
第4頁 567107 i號 9011Q27R 五、發明說明(2) 欲解決之技術困難點及研發之動機所在 《發明 有 經驗、 之目的 接裝置 、重疊 雷射光 其中藉 雷射光 做瞬間 ,係利 強度較 接合之 目的》 鑑於此 及不斷 乃在提 和方法 的雷射 焊接處 由夾置 照射兩 的汽化 用薄鋼 好、不 目的者 ,本案發 的思慮研 供一種0. ,其係採 焊接方式 均勻融合 具將兩片 片薄鋼板 溶融而將 板材料本 易斷裂, 明人乃以其本身 究’終使本發明 〜〇· 2_薄金 取咼頻率之脈衝 ,並能控制雷射 及高平整性,亦 薄鋼板固定於專 溶接處,進而使 兩片薄鋼板熔接 身作為黏合之接 且不需使用焊料 從事相 得以誕 屬板低 點密集 焊接能 不會有 用床台 該薄鋼 處之間 著劑, ,即達 關行業多年 生,其首要 變形精密焊 組成之連續 量,進達該 破洞產生, 上,並利用 板材料本身 隙自然融合 其焊接點的 兩片薄鋼板 《技術内容、特點及功效》 盘善ί ^ f貝審查員方便簡捷瞭解本發明之其他特徵内办 .....,、所達成之功效能夠更為顯現,兹將本#日@ %今 附圖,詳細說明如下: 么打不毛明配合 * 圖二所示,本發明〇. 〜 變形精密焊接奘w ^ ’辱i屬板低 X Μ :裝係包含有雷射焊接系統1及夾置且 :射具有非常尚的熱集中性,其焊接時易 形及破孔情形,+ A 女于劳k成變 - 因此在本發明夾置具夹設薄鋼板的同時 ;67l°7 案號 90119276 ±_η 曰 、發明說明(3) 町遂過具高導熱效果之夾置具將薄鋼板上的熱導出,使在 雷射焊接薄鋼板的製程裡,所造成之變形量非常小,其精 始、度較咼’以符合因應半導體工業的需求,其特徵在於: 該夾置具組係由左、右兩組夾置具2所組成,而該夾 置具2係包含一鉗固體2 1、數個壓塊2 2及一壓板2 3 ’其中遠射固體2 1下方係内凹設一门型槽2 1 1 ,而可 供數個壓塊2 2置設,且該鉗固體2 1上表面則設有數個 呈貫穿整個钳固體2 1之螺孔2 1 2 ,俾藉由螺絲2 1 3 貫穿旋入以鎖固门型槽2 1 1下方相對應之壓塊2 2 ,而 該钳固體2 1兩側亦分別設有數個呈貫穿整個钳固體2 1 之螺孔2 1 4,俾藉由螺絲2 1 5貫穿旋入以鎖固於床台 3上(如圖四),而該壓塊2 2及床台3間則設一平整之壓 板2 3 ’俾當欲作溶接之兩片薄鋼板4分別置入左、右兩 組夾置具2之壓板2 3及床台3之間,即透過螺絲2 1 5 貫穿鉗固體2 1兩側螺孔2 1 4旋入鎖固於床台3上,並 透過慢慢旋緊以產生向下壓迫之力量,使該鉗固體2丄下 方之壓塊2 2則可平均施力於壓板2 3,其壓迫力量亦造 成壓板2 3下方之薄鋼板4平整、並固設於床台3上; 該雷射焊接系統1 ,係由一雷射1 1及其前、後設置 滾輪1 2、1 3所組成,其中該雷射1 1及前、後滾輪工 2、1 3係設置於兩塊薄鋼板4欲熔接處4 1上方(如圖 五、圖六所示),而當雷射1 1焊接兩片薄板時(如圖七 (A )) ’该前滾輪1 2係先行將熔接處4 1壓整(如圖 七(B)) ’使其薄鋼板4表面炼接處4 1較為平整,而 易於雷射1 1焊接(如圖七(c )),並具有較高之平面Page 4 567107 i No. 9011Q27R V. Explanation of the invention (2) The technical difficulties to be solved and the motivation for research and development are "Invented with experience, the purpose is to connect the device, overlap the laser light. The laser light is used for instants. In view of this, and in the laser welding of the extraction method, the thin steel used for vaporization is sandwiched and irradiated with two thin steels that are good and unintended. The considerations developed in this case provide a 0, which uses a uniform welding method. The fusion device melts two pieces of thin steel plates and easily breaks the plate material. The Ming Dynasty itself has finally made the present invention ~ 0.2_ thin gold to take pulses with a chirp frequency, and can control laser and high leveling. In addition, the thin steel plate is fixed at the special welding place, so that the two thin steel plates are welded together as a bonded joint without the use of solder to engage in the phase. The low point dense welding can be used on the bed. The coating agent, which is the perennial of the Daguan industry, its primary deformation is the continuous amount of the precision welding composition, and the breakage is generated, and the welding of the plate material itself is used to naturally fuse its welding. Two sheets of thin steel plate "Technical content, characteristics and efficacy" Pan Shan c. Examiner convenient and easy to understand the other features of the present invention .... ,, the achieved effect can be more apparent, hereby will This # 日 @% 今 drawings, the detailed description is as follows: Moda does not work together as shown in Figure 2, the present invention is 〇. ~ Deformed precision welding 奘 w ^ 'I is a plate low X Μ: The installation system contains a laser Welding system 1 and clamping and: the shot has very high thermal concentration, its shape and hole breakage during welding, + A female Yu Lak becomes changed-so while the clamping device of the present invention clamps a thin steel plate; 67l ° 7 Case No. 90119276 ± _η Description of the invention (3) The chrysanthemum uses a clamping device with a high thermal conductivity to conduct heat from the thin steel plate, so that the amount of deformation caused by the laser welding of the thin steel plate It is very small, and its precision and degree are relatively low to meet the needs of the semiconductor industry. It is characterized by: The clamping set is composed of two sets of left and right clamping sets 2, and the clamping set 2 includes One clamp solid 2 1, several pressure blocks 2 2 and one pressure plate 2 3 ′ The groove 2 1 1 can be set by several pressure blocks 2 2, and the upper surface of the pliers solid 2 1 is provided with a plurality of screw holes 2 1 2 that penetrate the entire pliers solid 2 1, by means of screws 2 1 3 Through and screw in to lock the corresponding pressure block 2 2 below the door groove 2 1 1, and the pliers solid 2 1 are also provided with several screw holes 2 1 4 on both sides of the pliers solid 2 1, 俾It is screwed through the screws 2 1 5 to be fixed on the bed 3 (as shown in Figure 4), and a flat plate 2 3 'is set between the pressure block 2 2 and the bed 3. A thin sheet of steel 4 is placed between the left and right sets of clamping plates 2 3 and bed 3 of the clamp 2 respectively, that is, through the screws 2 1 5 to penetrate the solid of the clamp 2 1 and the screw holes 2 1 4 on both sides are screwed into the lock On the bed 3, and by slowly tightening to generate downward pressing force, the pressure block 2 2 below the solid 2 钳 of the forceps can be evenly applied to the pressure plate 23, and its pressing force also causes the pressure plate 2 3 to be below The thin steel plate 4 is flat and fixed on the bed 3; The laser welding system 1 is composed of a laser 11 and rollers 1 2 and 1 3 arranged in front and rear, of which the laser 1 1 And front and rear roller workers 2, 1 and 3 It is placed on the top of two thin steel plates 4 to be welded 41 (as shown in Figures 5 and 6), and when the laser 1 1 welds two thin plates (as shown in Figure 7 (A)) 'The front roller 1 2 series First, weld the welded joint 4 1 (as shown in Figure 7 (B)) 'to make the welded joint 4 1 on the surface of the thin steel plate 4 flat and easy to weld by laser 1 1 (as shown in Figure 7 (c)). High plane
第6頁 五、發明說明(4) 度,然經由雷射1 1熔接過後,由於尚具有熱度、及擁有 較高之延展性(如圖七(D )),因此,又再藉由後滾輪 13壓整、壓平後(如圖七(e)),則不會有凸點及毛 邊現象產生,具高平整度(如圖七(F)); 本發明0. 5mm〜〇· 2mm薄金屬板低變形精密焊接方法係 採用雷射光熔接方式,由於雷射的能量點、熱量傳導性及 穩定性很高,及該雷射的光點非常小,其焊接速度亦較— 般電子焊接速度更快,倘若進行兩片薄鋼板焊接時,1埶 的擴散性小及變形量也非常+,且該雷射係由高頻率之脱: 衝點密集組成一連續、4叠的焊接方式,並能控制雷射焊 接能量,進達該雷射光焊接處均勻融合及高平整性,亦 洞產生,係利用雷射焊接時由於不須與薄板材料表 3觸’ #可在薄板及雷射之間放置一些保護 ―: 為鼠氧),以防止焊接時,氧化及碳化之情形發 = 直接,而有效的保護,如^所示,首先將要接合之兩= 專用戍二卫扪用夾置具將兩片薄鋼板固定於 使…口6上,並透過電子監視器(CCD)及電腦龄讳 其=位點並設定雷射聚焦焊接路徑7,如圖九之視 倘右該雷射聚焦焊接路徑未做校正 Ζ么 Ϊ成該偏差點42會產生焊接…= = :便會 :腦便可設定連續且重疊之雷射聚 射以完成焊接融合之動作8 ,而Λ y $ 2 再藉由雷 jz ^ ^ G 而兩片溥鋼板4焊桩考亚於 及無破洞,且在薄鋼板4表面並未有^化處千整 再如圖十所示’藉由兮蕾以 反化之現象; 處4 1 ,、隹而佶兮·^4 χ 光照射兩片薄鋼板4炼接 ϋ-l進而使邊薄鋼板材料本身做瞬門的、> 化 接 則-------------------的a化熔融而將 --- 9011 卯 7fi— 五、發明說明(5) --— 一 — 兩片薄鋼板炫:接_ & M ^ 料本身作為黏合:接=自:融合9,係利用薄鋼板4材 裂,且不需ϋί劑,,其焊接點的強度較好、不易斷 用与*料,該薄鋼板4_ 生碳化、氧化之翊纟★ 熔接處4 1便不容易產 。 現象,亦可達兩片薄鋼板4接合之目的者Page 6 V. Description of the invention (4) Degree, but after welding by laser 1 1 because it still has heat and has high ductility (as shown in Figure 7 (D)), it also uses the rear roller 5mm〜〇 · 2mm 薄 After 13 flattening and flattening (as shown in FIG. 7 (e)), there will be no bumps and burrs, and high flatness (see FIG. 7 (F)); The metal plate low-deformation precision welding method uses laser light welding. Due to the high energy point, thermal conductivity and stability of the laser, and the laser light point is very small, its welding speed is also faster than the general electronic welding speed. Faster, if two thin steel plates are welded, the diffusion of 1 埶 is small and the amount of deformation is very +, and the laser system is made of high frequency: the punch points are densely formed into a continuous, 4-fold welding method, and It can control the laser welding energy, reach the laser light welding place with uniform fusion and high flatness, and also generate holes. It is not necessary to touch with the sheet material when using laser welding. Table 3 # can be placed between the sheet and the laser Some protection --- for rat oxygen) to prevent oxidation and carbonization during welding Shaped hair = direct and effective protection, as shown by ^, the two to be joined first = special 戍 two guards 扪 fix two thin steel plates on the mouth 6 with a clamp, and pass the electronic monitor (CCD ) And the computer age tabulate its position and set the laser focus welding path 7, as shown in Figure IX. If the laser focus welding path is not corrected, then the deviation point 42 will produce welding ... = =: Yes: the brain can set continuous and overlapping laser beams to complete the welding fusion action8, and Λ y $ 2 and then two pieces of 溥 steel plate 4 welded piles with Ray jz ^ ^ G and no holes , And there is no ^ on the surface of the thin steel plate 4 and then as shown in Fig. 10, the phenomenon of "reversing by Xi Lei"; Steel plate 4 smelting joint ϋ-l further makes the side thin steel plate material itself an instantaneous door, > transformation rule ------------------- a melting and will- -9011 卯 7fi— V. Description of the invention (5) --- One— Two sheets of thin steel sheet: 接 _ amp &M; the material itself is used as a bond: 接 = 自: Fusion 9, which uses 4 sheets of thin steel sheet to crack, Without the need for an agent, its welding The good strength, and easily broken by * material, carbonizing the raw steel sheet 4_, Yi of Si oxide at the welded ★ 41 will not easily generated. Phenomenon, can also achieve the purpose of joining two thin steel plates 4
I 曰 一修正 為使 點列舉如 1 、雷射 擴散 2、 雷射 3、 雷射 接方 處均 4、 雷射 兩片 好、5 、不易 6、可在 7 8 接而 雷射 薄鋼 象產 係透 本發明 下: 的光點 性小及 焊接速 係由高式,並 勻融合 焊接係 薄板接 不易斷 產生碳 薄板及 以防止 有效的 作焊接 板表面 生,具 過具高 更加顯現出其進步性與實用性,茲將其優 非常小 變形量 度較一 頻率之 能控制 及高平 造成薄 合處之裂,且 化、氧 雷射之 焊接時 保護。 時,藉 熔接處 高平整 導熱效 ’若進行兩片薄板焊接時,其熱的 也非常小。 般電子焊接速度更快。 脈衝點密集組成一連續、重 雷射焊接能量,進達該雷射 整性,亦不會有破洞產生。 板材料本身做瞬間的汽化熔 間隙自然融合,其焊接點的 不需使用焊料。 化之現象。 間放置一些保護氣體(一般為氮氣 ’氧化及碳化之情形發生,進達直 由前、後滾輪將熔接處壓整,使其 較為平整,則不會有凸點及毛邊現 度。 果之夾置具將薄鋼板上的熱導出, 疊的焊 光焊接 融而將 強度較 鮝 567107 _案號90119276_年月曰 修正_ 五、發明說明(6) 使在雷射焊接薄鋼板的製程中,其造成之變形量非常 小、精密度高。 9、具工業界及產業界上利用價值。 綜上所述,本發明誠已符合發明專利之申請要件,爰 依法提出申請,祈請 鈞局審查委員明鑑,並賜予本發明 專利權,實感德便。I said a correction to make the points listed such as 1, laser diffusion 2, laser 3, laser joints 4, laser two good, 5, difficult 6, can be connected at 7 8 and laser thin steel elephant Under the present invention: The light spot is small and the welding speed is high, and the welding system thin plate is not easily broken to produce a carbon thin plate and to prevent the surface of the welding plate from being effectively produced. Its progress and practicability, it is better to control the deformation of a small frequency than a frequency and high level of cracks caused by thin joints, and protection during welding, oxygen laser welding. At the same time, the heat-sealing effect is improved by welding the joints. ’If two thin plates are welded, the heat is also very small. Electronic welding is generally faster. The pulse points are densely formed into a continuous, heavy laser welding energy, which achieves the integrity of the laser without any holes. The material of the board itself is instantaneously vaporized and the gaps are naturally fused. No soldering is required for the solder joints. Phenomenon. Place some protective gas (generally nitrogen 'oxidation and carbonization). The front and rear rollers will straighten the welded joint to make it more flat, so there will be no bumps and burr visibility. It can extract the heat from the thin steel plate, and the welding light of the stack is melted to make the strength stronger than 鮝 107107107 _Case No. 90119276_ Year, month, and month of the year_ V. Description of the invention (6) In the process of laser welding thin steel plate, its The amount of deformation caused is very small and the precision is high. 9. It has the value of use in industry and industry. In summary, the invention has already met the application requirements for invention patents. Ming Jian, and granted the patent right of this invention, it is a real sense.
567107 案號90119276_年月日 修正 圖式簡單說明 圖號說曰J 1 11 12 13 2 2 1 2 11 2 12 4 2 1 2 2 2 3 3 2567107 Case No. 90119276_Year Month and Day Amendment Simple Explanation of Drawings Drawings say J 1 11 12 13 2 2 1 2 11 2 12 4 2 1 2 2 2 3 3 2
雷射焊接系統 雷射 前滾輪 後滾輪 夾置具 鉗固體 •门型槽 •螺孔 •螺絲 •螺孔 •螺絲 壓塊 壓板 床台 薄金屬板 焊料 正電極 負電極 内部並無法完全融合 薄鋼板 溶接處 偏差點 將要接合之兩片薄鋼板簡略擦拭 利用夾置具將兩片薄鋼板固定於專用床台Laser welding system Laser front roller rear roller clamping clamp solid • door groove • screw hole • screw • screw hole • screw pressure plate bed plate thin metal plate solder positive electrode negative electrode cannot be fully integrated with thin steel plate welding The two thin steel plates to be joined at the deviation point are simply wiped. The two thin steel plates are fixed to the special bed with a clamp.
第10頁 567107 _案號90119276_年月曰 修正_ 圖式簡單說明 7 · ·透過電子監視器(C C D )及電腦監視其定位點 並設定雷射聚焦焊接路徑 8 ··完成焊接融合之動作 9 · •薄鋼板材料本身做瞬間的汽化炫融而將兩片薄鋼 板熔接處之間隙自然融合 圖示說明 第一之a圖係兩片薄金屬板利用電極焊接示意圖。 第一之b圖係正、負電極熔接焊料之動作示意圖。 第一之c圖係兩片薄金屬板之間焊料熔接示意圖。Page 10 567107 _Case No. 90119276_ Years and Months Revision _ Brief Description of Drawings 7 · · The electronic monitor (CCD) and computer monitor their positioning points and set the laser focus welding path 8 ·· Complete the welding fusion operation 9 · • The thin steel plate material itself is instantaneously vaporized and melted, and the gap between the fusion of the two thin steel plates is naturally merged. The first illustration a is a schematic diagram of two thin metal plates using electrode welding. The first picture b is a schematic diagram of the welding of positive and negative electrodes by soldering. The first figure c is a schematic view of solder welding between two thin metal plates.
第二圖係本發明夾置具組之立體分解圖。 第三圖係本發明夾置具組之組合俯視圖。 第四圖係本發明夾置具組夾設薄鋼板及鎖固於床台之剖視 圖。 第五圖係本發明利用雷射熔接兩片薄鋼板熔融之立體圖。 第六圖係本發明利用雷射熔接兩片薄鋼板熔融之側視圖。 第七圖係本發明熔接兩片薄鋼板之動作實施步驟。The second figure is an exploded perspective view of the clamp set of the present invention. The third figure is a combined top view of the clamp set of the present invention. The fourth figure is a cross-sectional view of the clamp set of the present invention for clamping a thin steel plate and locking it on a bed. The fifth figure is a perspective view of two sheets of thin steel sheet fused by laser welding according to the present invention. The sixth figure is a side view of two sheets of thin steel sheet fused by laser welding according to the present invention. The seventh diagram is an operation step of welding two thin steel plates according to the present invention.
第八圖係本發明利用雷射熔接兩片薄鋼板之流程圖。 第九之a圖係兩片薄鋼板間雷射擊光位置偏差示意圖。 第九之b圖係兩片薄鋼板間雷射擊光位置正確示意圖。 第十圖係利用雷射熔接之兩片薄鋼板熔融示意圖。The eighth figure is a flow chart of the present invention for welding two thin steel plates by laser. The ninth figure a is a schematic diagram of the positional deviation of the lightning firing light between two thin steel plates. The ninth picture b is a schematic diagram of the correct position of the lightning firing light between two thin steel plates. The tenth figure is a schematic diagram of the fusion of two sheets of thin steel plates by laser welding.
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TWI571347B (en) * | 2014-12-11 | 2017-02-21 | 財團法人金屬工業研究發展中心 | Manufacturing method of metal strip |
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TWI571347B (en) * | 2014-12-11 | 2017-02-21 | 財團法人金屬工業研究發展中心 | Manufacturing method of metal strip |
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