1 ·發明領域 本發明係關於一種庫存傳給δ 4、、 早仔得輸系統，砰言之，係關於一種 :於-庫存傳輸純之空氣潔淨裝置。2.先前技術說明參 考圖1，為中華民國專利公止m 4 Α σ罘4 3 0 6 3 1號「庫存傳輸系 、'’无」（示意：’其顯示—庫存站100、_高架傳輸系統 300、-機器人200、置物架7〇〇、承載器8〇〇、起重機 彻及-處理站901之相對位置，在該庫存傳輸系統中， 起重機400用以將承載器8〇〇取出，並傳送至輸入/輸出 蜂’並由機器人200傳送晶圓或平板玻璃等物品至處理站 9〇1做處理.。當該起重機例移動時，將造成擾流之現象 並使得部分之揚塵飄起，可能會污染在承載器8〇〇内之晶 圓或平板玻璃，影響其要求甚嚴之潔淨度。 另外，在處理站901做處理時或是機器人2〇〇在傳送過 程中，若有晶圓或平板玻璃破片之現象時，將會造成其他 承載器8 0 0内之晶圓或平板玻璃之污染。若該起重機 又再移動，則將造成更上層之承載器8 〇 〇受污染。因此， 實有必要提供一種創新且富進步性的庫存傳輸系統之空氣 潔淨裝置，以解決上述問題。 發明概述 本發明之目的在於提供一種用於一床存傳輸系統之空氣 潔淨裝置’該庫存傳輸系統區分為一上半部區域及一下半 邵區域’該上半部區域具有複數個置物架，各該置物架可 容納一承載器，該下半部區域具有複數個承載器負載/卸 555947 A7 B7 五、發明説明（2 ) 埠，該庫存傳輸系統另具有一起重機，直立地設置於上半 部區域及下半部區域，該起重機與該等置物架及該等承載 器負載/卸載埠之間形成一空氣流道。 該空氣潔淨裝置包括：至少一空氣輸入口、複數個空氣 過濾元件及複數個回風道。該空氣輸入口設置於該庫存傳 輸系統之該上半部區域之一頂部，用以輸入經處理之空氣 至該庫存傳輸系統。 該等空氣過濾元件直立地設置於相對於該空氣流道之該 等置物架之一側邊，該等空氣過濾元件具有複數個空氣潔 淨器及複數個回風口，該等空氣潔淨器用以潔淨來自空氣 輸入口之空.氣，該等回風口設置於該等空氣潔淨器之一底 部。該等回風道形成於該等置物架之下，用以使經由空氣 輸入口及空氣潔淨器至該等承載器之空氣，部分之空氣可 經由該等回風道及回風口，引導至該等空氣潔淨器，俾循 環利用已經該等空氣潔淨器過濾之空氣。 因此，利用本發明之空氣潔淨裝置可以循環回收利用經 該等空氣潔淨器過濾之空氣，以減少該等空氣潔淨器處理 之空氣量，因此可以增加該等空氣潔淨器之使用壽命。 本發明之另一目的在於提供一種用於庫存傳輸系統之空 氣潔淨裝置，該空氣潔淨裝置另包括至少一氣流阻絕凸 緣，該氣流阻絕凸緣橫向地設置於該庫存傳輸系統之上半 部區域及下半部區域之間，俾使該上半部區域至該下半部 區域之空氣流道縮減。因此，該上半部區域至該下半部區 域之由上向下空氣流速增加，可抑制因起重機移動所造成 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297谷釐? , 裝 訂1 · FIELD OF THE INVENTION The present invention relates to a system for transferring inventory to δ. 4. The early child loses system, in other words, it relates to a pure air cleaning device for in-stock transfer. 2. The previous technical description refers to FIG. 1, which is the patent publication of the Republic of China m 4 Α σ 34 3 0 6 3 1 "Inventory transmission system," "None" (schematic: 'its display-inventory station 100, _ overhead transmission The relative positions of the system 300, the robot 200, the rack 700, the carrier 800, and the crane-to-processing station 901. In this inventory transfer system, the crane 400 is used to take out the carrier 800, and Transfer to the input / output bee 'and the robot 200 will transfer the wafer or plate glass and other items to the processing station 901 for processing. When the crane is moved, it will cause the phenomenon of turbulence and cause some of the dust to float, It may contaminate the wafer or flat glass in the carrier 800, affecting its very strict cleanliness. In addition, when the processing station 901 is processing or the robot 200 is transferring, if there is a wafer Or the phenomenon of broken flat glass will cause contamination of wafers or flat glass in other carriers 800. If the crane moves again, it will cause the upper carrier 800 to be contaminated. Therefore, It is necessary to provide an innovation and An air cleaning device of a progressive inventory transmission system to solve the above problems. SUMMARY OF THE INVENTION The object of the present invention is to provide an air cleaning device for a bed storage transmission system. The inventory transmission system is divided into an upper half area and Lower half Shao area 'The upper half area has a plurality of racks, each of which can hold a carrier, the lower half area has a plurality of carrier loads / unloads 555947 A7 B7 V. Description of the invention (2) Port The inventory transmission system also has a crane, which is arranged upright in the upper half and the lower half, and an air flow path is formed between the crane and the racks and the load / unload ports of the carriers. The air The cleaning device includes at least one air input port, a plurality of air filter elements, and a plurality of return air ducts. The air input port is provided on the top of one of the upper half of the inventory transmission system, and is used to input the processed air to The inventory transmission system. The air filter elements are arranged upright on one side of the racks opposite to the air flow path, and the air The filter element has a plurality of air cleaners and a plurality of return air outlets. The air cleaners are used to clean the air from the air inlet. The return air outlets are arranged at the bottom of one of the air cleaners. The return air ducts It is formed under the shelves to allow the air passing through the air inlet and the air cleaner to the carriers, and part of the air can be guided to the air cleaners through the return air ducts and return air outlets,俾 Recycle the air that has been filtered by these air cleaners. Therefore, using the air cleaning device of the present invention can recycle the air filtered by these air cleaners to reduce the amount of air processed by these air cleaners, so it can Increasing the service life of these air cleaners. Another object of the present invention is to provide an air cleaning device for an inventory transfer system. The air cleaning device further includes at least one airflow blocking flange which is disposed laterally. Between the upper half area and the lower half area of the inventory transfer system, move the upper half area to the lower half area Reduced air flow path. Therefore, the increase in air velocity from the top to the bottom half of the air flow from the top to the bottom can prevent the crane from moving. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 centimeters, binding)
線 555947 A7 B7 五、發明説明（3 ) 擾流之揚塵，降低對於上半部區域之承載器之污染及影 響。 圖式簡述 圖1為習用庫存傳輸系統之示意圖； 圖2為本發明用於庫存傳輸系統之空氣潔淨裝置之示意 圖； 圖3為本發明空氣潔淨裝置之空氣過濾元件示意圖；及 圖4為依據本發明庫存傳輸系統之承載器之示意圖。 元件符號說明 1 00 :庫存站 200 :機器人 3 00 :高架傳輸系 統 400 :起重機 700 :置物架 800 :承載器 90 1 :處理站 2 :庫存傳輸系統 2 1·· 承載器 22 ： 起重機 23 二 置物架 24 ： 承載器負載/ 卸載埠 25 ： 機器人 26 ： 處理站 27 ： 空氣流道 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐$Line 555947 A7 B7 V. Description of the invention (3) The dust caused by the turbulence reduces the pollution and impact on the carrier in the upper half. Brief Description of the Drawings Fig. 1 is a schematic diagram of a conventional inventory transmission system; Fig. 2 is a schematic diagram of an air cleaning device used in the inventory transmission system of the present invention; Fig. 3 is a schematic diagram of an air filter element of the air purification device of the present invention; Schematic diagram of the carrier of the inventory transmission system of the present invention. Description of component symbols 1 00: inventory station 200: robot 3 00: overhead transmission system 400: crane 700: rack 800: carrier 90 1: processing station 2: inventory transport system 2 1 ·· carrier 22: crane 23 two storage Shelf 24: Carrier loading / unloading port 25: Robot 26: Processing station 27: Air flow path This paper is sized for China National Standard (CNS) A4 (210 X 297 mm $
3 :空氣潔淨裝置 31、32:空氣輸入口 3 3、3 4 :空氣過濾元件 3 3 1、3 3 2 :空氣潔淨器 3 3 3 :封閉壁 3 3 4 :回風口 3 5、3 6 :回風道 3 7、3 8 :氣流阻絕凸緣 3 9 :空氣潔淨器 41、42 :化學過濾器 登明詳述 . ⑽參考圖2，依據本發明之庫存傳輸系統2包括複數個承載 益21、一起重機22、複數個置物架23複數個承載器自載/ 卸載埠24、機器人25及處理㈣。置物㈣設置於該庫 存傳輸系統2之上半部區域，各該置物架2 3可容納一承載 器2 1 ;承載器負載/卸載埠24、機器人25及處理站“設置 於孩庫存傳輸系統2之下半部區域。該起重機22直立地跨 ，又於上半部區域及下半部區域，該起重機22與該等置物架 23及該等承載器負載/卸載埠以之間形成一空氣流道幻。 起重機22用以將承載器21自置物架23中取出，並傳送 至承載器負載/卸載埠24，機器人25將在承載器負載/卸載 埠2 4上之承載器内之晶圓或平板玻璃等物品傳送至處理站 2 6做處理。 該空氣潔淨裝置3包括：二空氣輸入口 3_1、32、二空氣 本紙張尺度適用中國國家標準(CNS) A4規格(210X297石釐1 ~= "" ' 555947 A7 B73: Air cleaning device 31, 32: Air inlet 3 3, 3 4: Air filter element 3 3 1, 3 3 2: Air cleaner 3 3 3: Enclosed wall 3 3 4: Return air outlet 3 5, 3 6: Return air duct 3 7, 3 8: Airflow blocking flange 3 9: Air cleaner 41, 42: Chemical filter is clearly stated. ⑽ Referring to FIG. 2, the stock transfer system 2 according to the present invention includes a plurality of bearing benefits 21. , A crane 22, a plurality of racks 23, a plurality of carrier self-loading / unloading ports 24, a robot 25, and a processing unit. The storage racks are arranged in the upper half of the inventory transfer system 2, and each of the shelves 23 can accommodate a carrier 2 1; the loader load / unload port 24, the robot 25 and the processing station are set in the child inventory transfer system 2 In the lower half area, the crane 22 spans upright, and in the upper and lower half areas, an air flow is formed between the crane 22 and the racks 23 and the load / unload ports of the carriers. The crane 22 is used to take the carrier 21 out of the rack 23 and transfer it to the carrier load / unload port 24, and the robot 25 will load the wafers in the carrier on the carrier load / unload port 24 or The flat glass and other items are transferred to the processing station 26 for processing. The air cleaning device 3 includes: two air input ports 3_1, 32, and two air. The paper size is applicable to China National Standard (CNS) A4 specifications (210X297 stone weight 1 ~ = " " '555947 A7 B7
過濾元件33、34及二回風道35、36。二办々 工氧ι輸入口 3 1、 32纟又置於該上半部區域之一頂部，用以 、可用以輸入經化學過濾器 41、42處理之空氣至該庫存傳輸系統2。 二空氣㈣元件33、34直立地設置於相對於該空氣流道 27之該等置物架23之—側邊。配合參考圖3，空氣過滤元 件33具有複數個空氣潔淨器（FFU，Fan FiitM Unit) 3 3 1、3 3 2等、一封閉壁3 3 3及複數個回風口 3 3 *等，該等 回風口 334設置於該等空氣過濾元件33之一底部。該空氣 過滤元件3 3除了空氣潔淨器3 3 !、3 3 2及回風口 3 3 4可供 空氣况通外’其餘皆為封閉壁3 3 3所設置之密閉空間。 空氣潔淨.器331、332用以將來自空氣輸入口31之空氣 再次地潔淨處理，並將潔淨之空氣輸入至承載器2 1，該潔 淨之空氣經承載器2 1傳遞至該空氣流道2 7 ^沿著該空氣流 道2 7，潔淨之空氣由庫存傳輸系統2之上半部區域傳遞至 下半部區域。 配合參考圖2及圖4，二回風道35、36形成於該等置物 架23之下，回風道35用以使經由承載器21至空氣流道27 之潔淨空氣，可經由回風道3 5及回風口 3 3 4，引導至該等 空氣潔淨器3 3 1、3 3 2之入口附近，俾循環利用已經該等 空氣潔淨器3 3 1、3 3 2過濾之空氣，以減少該等空氣潔淨 器3 3 1、3 3 2處理之空氣量，而能增加該等空氣潔淨器 331、332之使用壽命。 續參考圖2，該空氣潔淨裝置3另包括二氣流阻絕凸緣 3 7、3 8，該等氣流阻絕凸緣3 7、3 8橫向地設置於該庫存 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公爱 m 裝 訂The filter elements 33 and 34 and the two return air channels 35 and 36. The second office 工 industrial oxygen input port 3 1, 32 纟 is placed at the top of one of the upper half area, which can be used to input the air treated by chemical filters 41, 42 to the inventory transfer system 2. The two air loop elements 33 and 34 are arranged upright on one side of the racks 23 opposite to the air flow path 27. With reference to FIG. 3, the air filter element 33 has a plurality of air cleaners (FFU, Fan FiitM Unit) 3 3 1, 3 3 2 and the like, a closed wall 3 3 3 and a plurality of air return openings 3 3 *, etc. A tuyere 334 is provided at the bottom of one of the air filter elements 33. The air filter element 3 3 is an enclosed space provided by the closed wall 3 3 3 except that the air cleaners 3 3!, 3 3 2 and the air return opening 3 3 4 are available for air flow. Air cleaners 331, 332 are used to clean the air from the air input port 31 again, and input the clean air to the carrier 21, and the clean air is transmitted to the air flow path 2 through the carrier 21 7 ^ Along this air flow path 27, clean air is transferred from the upper half area to the lower half area of the inventory transfer system 2. With reference to FIG. 2 and FIG. 4, two return air ducts 35 and 36 are formed under the racks 23. The return air duct 35 is used to allow clean air passing through the carrier 21 to the air flow path 27 to pass through the return air duct. 3 5 and return air outlet 3 3 4, guide to the air cleaners 3 3 1, 3 3 2 near the entrance, recycle the air that has been filtered by the air cleaners 3 3 1, 3 3 2 to reduce the Waiting for the amount of air processed by the air cleaners 3 3 1, 3 3 2 can increase the service life of these air cleaners 331, 332. Continuing to refer to FIG. 2, the air cleaning device 3 further includes two air-barrier flanges 3 7 and 3 8 which are arranged laterally in the inventory. The paper standard is applicable to Chinese National Standards (CNS) A4 size (210X 297 public love m binding
線 555947 A7Line 555947 A7
傳輸系統2之上半部區域及下半部區域之間，並橫向地延 伸至Μ氣流道27内，俾使該上半部區域至該下半部區域 《空氣流道27縮減，使該空氣流道27内由上往下之氣流之 流速增加，因此可抑制因起重機22移動所造成擾流之揚 塵’以降低對於該庫存傳輸系統2上半部區域之承載器幻 内晶圓或平板玻璃之污染或影響。 參考圖2，該2氣潔淨裝置3另包括複數個空氣潔淨器3 9 寺，設置於機器人25之上方，以提供潔淨空氣至機器人 25，俾形成經由機器人25、承載器負載/卸載埠24至空氣 流道27之另一潔淨空氣之氣流。在處理站26做處理時或是 機器人25在傳送過程中，若有晶圓或平板玻璃破片之現象 時泫破片之/亏染將順著該氣流至該空氣流道2 7，如上所 述，由於該空氣流道27内由上往下之氣流之流速較大，因 此该破片足污染不會對於該庫存傳輸系統2上半部區域之 承載器21内晶圓或平板玻璃造成污染或不良之影響。 上述實施例僅為說明本發明之原理及其功效，而非限制 本發明。因此，習於此技術之人士可在不達背本發明之精 神對上述實施例進行修改及變化。本發明之權利範圍應如 後述之申清專利範圍所列。 裝 訂 _ kBetween the upper half area and the lower half area of the transmission system 2 and extending laterally into the M airflow path 27, the upper half area is reduced to the lower half area, and the air flow path 27 is reduced to make the air The flow velocity of the airflow from top to bottom in the flow path 27 is increased, so the dust caused by the turbulence caused by the movement of the crane 22 can be suppressed to reduce the wafer or flat glass of the carrier in the upper half of the inventory transfer system 2 Pollution or impact. Referring to FIG. 2, the 2 gas cleaning device 3 further includes a plurality of air cleaners 39 temples, which are provided above the robot 25 to provide clean air to the robot 25, and are formed via the robot 25 and the loader / unloader port 24 to The air flow of another clean air of the air flow path 27. When the processing station 26 is processing or the robot 25 is in the transfer process, if there is a wafer or flat glass fragmentation phenomenon, the broken pieces / defectives will follow the air flow to the air flow channel 27, as described above, Because the flow velocity of the air flow from the top to the bottom in the air flow path 27 is large, the fragment foot pollution will not cause contamination or failure to the wafer or flat glass in the carrier 21 in the upper half of the inventory transfer system 2 influences. The above-mentioned embodiments are only for explaining the principle of the present invention and its effects, but not for limiting the present invention. Therefore, those skilled in the art can modify and change the above embodiments without departing from the spirit of the present invention. The scope of the rights of the present invention should be listed in the scope of the patent application. Binding _ k