TW550234B - Configurable micro flowguide device - Google Patents

Configurable micro flowguide device Download PDF

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Publication number
TW550234B
TW550234B TW91138141A TW91138141A TW550234B TW 550234 B TW550234 B TW 550234B TW 91138141 A TW91138141 A TW 91138141A TW 91138141 A TW91138141 A TW 91138141A TW 550234 B TW550234 B TW 550234B
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Taiwan
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fluid
micro
bubbles
channel
microchannel
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TW91138141A
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Chinese (zh)
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TW200410896A (en
Inventor
Tim K Shia
Jhy-Wen Wu
Nan-Kuang Yao
Yuan-Fong Kuo
Shaw-Hwa Pang
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Ind Tech Res Inst
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Abstract

Disclosed is a micro flowguide device comprising: a micro channel comprising at least one bubble trap to retard bubbles positioned in said bubble trap; an electrolytic bubble generating device to generate bubbles in said fluid by an electrolytic reaction; and a pressure source to supply a suited pressure to said fluid to pass through said micro channel; wherein said electrolytic bubble generating device causes bubbles to be generated at areas adjacent to said at least one bubble trap. Electrolytic bubbles are generated through a localized electrolytic reaction enabled by the exposure of a set of DC-source-connected electrodes inside a conduit branch. Accumulated bubbles will be trapped and kept at several traps of the invented flowguide. When the backward pressure of trapped bubbles is rising to the level of forward pressure head, flow speed reduces to zero and channel branch is shut down.

Description

550234 五、發明說明(1) 【發明名稱1 * r欢 僻】微 【發明之應用範 本發明是μ 一種1右^ 爵 丹有電觫与 發明的微通Ϊ : if# 道流 來保、雷2 ¥子、藥 發明背景】” 無動件式微 型生化袭置的應 兀件’可以應用 樣本萃取等。在 理’主要包括: 1 ·熱觸發式 内流體之黏度, 2 ·熱觸發式 產生氣泡,形成 3.電磁力導 (MHD)di rected 產生之場力導引 4 ·膠凝閥( 與收縮原理,作 5.氣泡觸發 gate valve) ·· 流0 本 通道流體導引元件 疇】 於一種微通道流體導引元件,特別是關於 泡開關或微閥的微通道流體導引元件。' 體導引元件可應用在各種醫學、化學、 業、農業及軍事等用途。 流元件,尤其是微通道流體導引元件在彳% 用上,扮演著重要的角色。無動件式微流 在例如細胞操作、分類、藥物分送、生化 習知技術中,無動件式微流導引元件的原 依渠流粘度分流:利用加熱改變微流通道 造成速度分佈差異,以決定流體流向。 沸騰蒸氣阻流:利用加熱導致流體沸騰, 阻流,決定流體是否流通。 引(Magneto-Hydrodynamically f 1 ow):利用磁場作用於載電流之流場而 流體 。550234 V. Description of the invention (1) [Name of the invention 1 * r huan secrecy] Micro [Application model of the invention The invention is a kind of 1 right ^ Jue Dan has electricity and invented micro communication: if # 道 流 来 保 、 雷2 Background of the invention of pharmaceuticals] "The application components of the micro-biochemical attack device without moving parts can be used for sample extraction, etc. The main principles include: 1 · the viscosity of the fluid within the thermal trigger, 2 · the thermal trigger generation Bubble formation 3. electromagnetic force guidance (MHD) di rected generated field force guidance 4 · gel valve (with contraction principle, made 5. bubble trigger gate valve) · · flow 0 channel channel of this channel fluid guide element] at A micro-channel fluid-guiding element, especially a micro-channel fluid-guiding element related to a bubble switch or a microvalve. 'Volume-guiding elements can be used in various medical, chemical, industrial, agricultural, and military applications. Flow elements, especially The microchannel fluid guiding element plays an important role in the application of micro-fluids. In the conventional techniques such as cell manipulation, classification, drug distribution, and biochemistry, the principle of the non-moving microfluidic element is Dividing by channel viscosity: favorable Change the velocity distribution of the microfluidic channel by heating to determine the flow direction of the fluid. Boiling vapor blockage: The use of heat causes the fluid to boil, and the flow is blocked to determine whether the fluid is circulating. Magneto-Hydrodynamically f 1 ow: Uses a magnetic field to act on a load. The current flow field is fluid.

Thermal gelation):利用熱敏膠質膨脹 為閥子。 式門閥(Electrolysis — bubble actuated 利用電解氣泡作動雙態變形板以開關渠Thermal gelation): Expansion of the thermosensitive gel into a valve. Gate valve (Electrolysis — bubble actuated

第6頁 550234 五、發明說明(2) 6 ·機械作動闕·利用機械力或結構作動閥子以開關渠 流。 在上述應用廣J里中’膠凝閥、氣泡觸發式門閥及機械 作動閥需在微通道内置特殊材料或内部/外部可動元件, 增加元件及其外部系統的複雜度。熱觸發式依渠流粘度分 Ϊ為Ϊ T Ϊ ί : 7 Ϊ氣阻流及電磁力導引方式,雖可提供 車父為間早的内嵌式i動株嫵 可能盥豆i ϋ ^ t件機制,但其操作的溫度或電壓則 二八使用之生化液劑之預定運作相悖。 設置微流渠導元件,以道系統中之多數特定位置, 定方向、速度及步驟進=¥ Ϊ流體在微通道系統中,依既 謂「微通道矩陣”仃丄逐一進行所需之生化反應,所 道矩陣中,透過程式化ί =發展中的趨勢。纟這種微通 行進速度、停留期万式’控制微流體的行進方向、 業人士努力達成的:標:更是未來所需的應用。成為此行 因此目前必須有一 元件。 裡新穎的無動件式微通道流體導引 同時也必須有一 利用特殊材料、一種新穎的微通道流體導引元件,不必 導引。 _力口之複雜兀件,即可完成無動件式流體 同時也必須右一 之工作原理不合二一種新1員的微通道流體導引元件,其中 同時也必流體反應之9的。 流體通道流體暮一種成本低廉,製作簡便之無動件式微 今5丨元件。Page 6 550234 V. Description of the invention (2) 6 • Mechanical action • Use mechanical force or structure to actuate the valve to open and close the channel. In the above-mentioned applications, gelatin valves, bubble-triggered gate valves, and mechanically actuated valves require special materials or internal / external movable components to be built into the microchannels, increasing the complexity of the components and their external systems. The thermal trigger type can be divided into Ϊ T Ϊ and ί: Ϊ 流 Gas blocking and electromagnetic force guidance methods, although it can provide the vehicle driver as a built-in type. 妩 ^ ^ t This mechanism works, but its operating temperature or voltage is contrary to the intended operation of the biochemical fluid used. Set the microfluidic channel guide element to set the direction, speed and step at most specific positions in the channel system. ΪIn the microchannel system, the fluid will perform the required biochemical reactions one by one according to the so-called "microchannel matrix". In the matrix, through stylized ί = a developing trend.纟 This kind of micro-travel travel speed, dwell time 10,000 types of control of the micro-fluid's travel direction, the industry's efforts to achieve: standard: is the future required applications. Become this trip so there must be a component now. The novel non-moving-type micro-channel fluid guidance must also have a novel micro-channel fluid guidance element using special materials, without the need for guidance. _The complex components of Likou can complete the fluid without moving parts. At the same time, the working principle of the right one is not the same as the new one of the microchannel fluid guiding elements, and the fluid reaction is also the 9th. The fluid channel fluid is a low-cost, simple-to-manufacture, micro-component.

第7頁 550234 五、發明說明(3) 同時也必須有一種微通道流體導引元件,適合利 (programmable)控制方式,達成流體導弓丨杵制。死劍 同時也必須有一種程式化微通道流體 ^ 過:規,方式,導引流體在其中依預定路 釭序j完成所需之各種反應。 、’、v驟及 同時也必須有一種程式化微通道流 提供使用者進行 心、々丨L篮¥引糸統晶片, ^ ^ . 丁生化貫驗時,可依不同用途_易i登in 4 m 之反應程序及步驟。 易4擇適用 【發明之目的】 體導ί i:之目的乃在提供-種新穎的無動件式微通道流 本發a月t $ _ 引元件,$ ‘必利用二:2在提供一種新穎的微通道流體導 無動件式流體“材料或外加之複雜元件,即可完成 本發明之另_ 引元件,其中:=也在提供一種新穎的微通道流體導 本發明之另_作原理不會損及流體反應之目的。 之無動件式微产俨、::t在提供一種成本低廉,製作簡便 本發明^ 體通道流體導引元件。 件’“利ΐί:二:也在提供一種微通道流體導引元 本發明之另_ $控制方式,達成流體導引控制。 引系統,可透過;Iϋ也在提供一種程式化微通道流體導 路線、步驟ί J i制方式’導引流體在其中依預定 本發明之 元成所需之各種反應。 另目的也在提供一種程式化微通道流體導Page 7 550234 V. Description of the invention (3) At the same time, there must also be a microchannel fluid guiding element, which is suitable for a programmable control method to achieve a fluid guide bow. At the same time, there must be a stylized microchannel fluid ^ pass: rules, methods, guide fluid in which to complete the various reactions required in accordance with a predetermined path sequence j. , ', V step, and at the same time, there must be a stylized micro-channel flow to provide users with heart, 篮 丨 L basket, ¥ 糸 system chip, ^ ^. Ding Shenghua can be tested according to different purposes_ 易 i 登 in 4 m reaction procedures and steps. Easy 4 to choose [Purpose of the invention] The purpose of the guide ί i: is to provide-a novel type of micro-channel-free micro-channel flow of this article t $ _ lead element, $ 'must use two: 2 to provide a novel Materials or additional complex components of the microchannel fluid-conducting non-moving fluid can be used to complete the other components of the present invention, of which: = also provides a novel microchannel fluid-conducting another Impairs the purpose of fluid reaction. The micro-products without moving parts :: t provides a low-cost, easy-to-manufacture fluid channeling element of the present invention. The component "" Prosperity: Two: also provides a micro- The channel fluid guidance element of the present invention provides another control method to achieve fluid guidance control. The induction system is transparent; Iϋ is also providing a stylized microchannel fluid guideline and steps. The method is to guide the fluid in which various reactions required by the invention are predetermined. Another objective is to provide a stylized microchannel fluid guide

Hi ----— 第8頁 550234 五 引 、發明說明(4) - 輕 系統晶片,提供使用者進行生化實驗時,可依不同用途 易選擇適用之反應程序及步驟。 發明之簡述】 氣 機 ,據本發明之微通道流體導引元件,係提供一種電解 槿式,流體開關或微閥,作為無動件式微通道流體導引 生。因:ί Γ ί待反應之微流體特性’以電解方式迅速產 到壓力i虱泡表面張力之差異,結合成大型氣泡,直 泡阱留、他、ώ ^ 。選擇微通道之適當位置形成氣泡並以氣 體微開:::闕之:::成阻,提供無動件式流 可透過預先規劃控㈣,電極之位置及作用, 通道流體導引之目的。利(prQgrammabie)微 件,π + 引用本發明之微通道流體導引元 所兩夕、、六—5又有多數微流體反應區之晶片上,任意選擇 尚之流體行進路線、> »9^ c 十I* 生化反應。 踝机體反應步驟及程序,以完成各種 上述及其他本發明之日M n 並炱去丁 <目的及優點,可由以下詳細說明 =參考下列圖式,而更形清楚。 【圖式之簡單說明】 圖。第1圖表示本發明微通道流體導引元件工作原理示意 關之^ 表不本發明之微通道流體導引元件應用在微開 不思圖。 圖。第3圖表示本發明微通道流體導引元件之製程示意 _Hi ----— Page 8 550234 Five quotes, description of the invention (4)-Light system chip, providing users with biochemical experiments, can easily choose the appropriate reaction procedures and steps according to different purposes. Brief description of the invention] The gas turbine, according to the micro-channel fluid guiding element of the present invention, provides an electrolytic hibiscus type, fluid switch or micro valve as a non-moving member-type micro-channel fluid guiding generator. Because: Γ Γ The microfluidic properties to be reacted ′ quickly produce the difference in the surface tension of the pressure lice bubbles by electrolysis, and they are combined into large bubbles, which are left in the bubble trap. Select the appropriate position of the microchannel to form air bubbles and slightly open with the gas ::: 阙 之 :::, to form a resistance to provide a moving piece-free flow. The position and function of the electrode can be controlled by pre-planning, the purpose of channel fluid guidance. PrQgrammabie widget, π + Citing the microchannel fluid guidance element of the present invention, on June 6, June 5 and most of the microfluidic reaction zone of the wafer, arbitrary choice of fluid travel route, > »9 ^ c Ten I * biochemical reactions. The ankle body reaction steps and procedures to complete the above-mentioned and other aspects of the present invention M n and eliminate Ding < purposes and advantages, can be explained in detail below with reference to the following drawings, more clearly. [Simplified description of the figure] Figure. Fig. 1 shows the working principle of the micro-channel fluid guiding element of the present invention. Related ^ It shows that the micro-channel fluid guiding element of the present invention is applied to micro-opening. Illustration. FIG. 3 shows a schematic process diagram of the microchannel fluid guiding element of the present invention.

550234 五、發明說明(5) 【發明之詳細說明】 本發明提供一種新穎的微通道流體導引元件及此元件 之製備方法。 雖不欲為任何理論所拘束,但本發明人發現,在一般 之生化反應中所使用之液劑,通常具有特定之電化學特 性。換言之,在通常所使用的生化反應流體中,均存在有 特定之電解質。如果在該生化反應流體中施加局部電流, 可以迅速產生電解氣泡。此種氣泡產生方式並不需對反應 流體加熱至足以損害生化反應之程度,而所施加之局部電 流,對反應系統也不致造成整體的破壞。因而產生之氣 泡,初期為微小氣泡,但因該反應液體之驅動源對該反應 液體所施加之壓力,與氣泡之表面張力間具有相當之差異 值,促使小氣泡表面破壞,形成較大之氣泡,直到兩者 達成平衡。利用一氣泡阱與一大角度反轉流道設計留置該 大型氣泡,即可形成一流阻,足以提供微流體之流阻之功 能。該電解氣泡式流阻乃形成一無動件式流體微開關或微 閥,提供流體導引功能。 在一生化晶片或其他生化反應系統中,製備多數反應 區,在各反應區間形成選擇性微通道,並在選擇節點設置 該電解氣泡式流體微開關或微閥,即可藉特定電解氣泡式 流體微開關或微閥之作動與與否,決定流體在各反應區間 之行進路線、步驟及程序。利用一可規劃控制裝置,控制 各該電解氣泡式流體微開關或微閥之作動,達成程式化生 化反應晶片之應用。550234 V. Description of the invention (5) [Detailed description of the invention] The present invention provides a novel microchannel fluid guiding element and a method for preparing the element. Although not intending to be bound by any theory, the inventors have found that the liquid agent used in general biochemical reactions usually has specific electrochemical characteristics. In other words, a specific electrolyte is present in the commonly used biochemical reaction fluid. If a local current is applied to the biochemical reaction fluid, electrolytic bubbles can be generated quickly. This type of bubble generation does not require heating the reaction fluid to a level sufficient to damage the biochemical reaction, and the applied local current does not cause overall damage to the reaction system. The resulting bubbles are initially micro-bubbles, but due to the pressure exerted by the driving source of the reaction liquid on the reaction liquid, there is a considerable difference between the surface tension of the bubbles and the surface of the small bubbles is promoted to form larger bubbles. Until the two are in balance. By using a bubble trap and a large-angle reverse flow channel design to retain the large bubble, a first-rate resistance can be formed, which is sufficient to provide the function of the flow resistance of a microfluid. The electrolytic bubble-type flow resistance forms a fluidless micro-switch or micro-valve that provides a fluid guiding function. In a biochemical wafer or other biochemical reaction system, most reaction zones are prepared, selective microchannels are formed in each reaction zone, and the electrolytic bubble fluid microswitch or microvalve is set at a selected node to borrow a specific electrolytic bubble fluid Whether the micro-switch or micro-valve is activated or not determines the fluid's route, steps and procedures in each reaction zone. A programmable control device is used to control the operation of each of the electrolytic bubble fluid micro-switches or micro-valves to achieve the application of a stylized biochemical reaction chip.

第10頁 550234 五、發明說明(6) 以下以實例說明本發明之微通道流體導引元件及該微 通道流體導引元件之製備方法。 第1圖表示本發明微通道流體導引元件之工作原理示 意圖。如圖所示,該微通道流體導引元件係建置於一基板 (1 0)上。該基板(1 0)可為任何材質之板狀物,用以容 納該微通道流體導引元件,通常可為玻璃、塑膠、矽晶片 等適用之材質。 該微通道流體導引元件包括承載在該基板(1 0)上之 微通道(20)。該微通道(20)具有一流體入口 ( 21)及 一流體出口 ( 25),並具有一第1氣泡阱(22),一第2氣 # 泡阱(23)及位於其間之橋段(24)。流體入口 ( 21)可 接一壓力源(未圖示),用以提供流體自入口 ( 21)流經 橋段(24)至出口 ( 25)之壓力。該壓力源可為一氣壓 源、液壓源或其他壓力來源,只要適合搬送一流體在該微 通道(20)中移動即可。 在該第1氣泡阱(22)下方,提供一第1電極(31), 該第2氣泡阱(2 3)下方提供一第3電極(3 3),而該橋段 (2 4)下方則提供一第 2電極(32)。各電極均以導線 (3 4) ( 3 5) ( 3 6)而電氣連接至位於基板(10)邊緣之 接點(3 7) ( 3 8) ( 3 9)。該電極(3 1) ( 3 2) ( 3 3)較 〇 好裸露至少一部份在該微通道(20)中,以提供流經該第 1氣泡阱(22),該橋段(24)及/或該第2氣泡阱(23) 之流體與該電極(3 1) ( 3 2) ( 3 3)作電氣接觸,用以供 應電流至該流體中。該電極(3 1)( 3 2) ( 3 3)與該導線Page 10 550234 V. Description of the invention (6) The microchannel fluid guiding element of the present invention and a method for preparing the microchannel fluid guiding element will be described below with examples. Fig. 1 is a schematic diagram showing the working principle of the microchannel fluid guiding element of the present invention. As shown in the figure, the microchannel fluid guiding element is built on a substrate (10). The substrate (10) can be a plate of any material to accommodate the micro-channel fluid guiding element, and generally can be a suitable material such as glass, plastic, or silicon wafer. The microchannel fluid guiding element includes a microchannel (20) carried on the substrate (10). The microchannel (20) has a fluid inlet (21) and a fluid outlet (25), and has a first bubble trap (22), a second gas # bubble trap (23) and a bridge section (24) therebetween. ). The fluid inlet (21) can be connected to a pressure source (not shown) to provide the pressure of the fluid flowing from the inlet (21) through the bridge section (24) to the outlet (25). The pressure source may be a pneumatic source, a hydraulic source, or other pressure source, as long as it is suitable for transporting a fluid to move in the microchannel (20). A first electrode (31) is provided below the first bubble well (22), a third electrode (3 3) is provided under the second bubble well (23), and a bridge electrode (24) is provided below A second electrode (32) is provided. Each electrode is electrically connected with a lead (3 4) (3 5) (3 6) to a contact (3 7) (3 8) (3 9) located on the edge of the substrate (10). The electrode (3 1) (3 2) (3 3) is better than bare at least partly in the microchannel (20) to provide a flow through the first bubble trap (22), the bridge section (24) And / or the fluid of the second bubble trap (23) is in electrical contact with the electrode (3 1) (3 2) (3 3) for supplying an electric current to the fluid. The electrode (3 1) (3 2) (3 3) and the lead

第11頁 550234 五、發明說明(7) (34) ( 3 5) ( 3 6)及該接點(3 7) ( 3 8) ( 3 9)可以為 相同材質或不同材質,但較好為電導體,並可以單一步驟 製成在該基板(1 0)上。在製作時,可以使用任何適用之 方法,例如印刷、塗佈、蝕刻、化學蒸鍍等等習知方法。 如有必要,亦可在該電極表面加一層絕緣層,預留所需之 孔隙,用以規制該電極與流體間之電氣接觸。 為達成電解產生氣泡之目的’該第1電極(31)及該 第3電極(3 3)較好連接至一電源(未圖示)之第1極性, 而該第2電極(3 2)則連接至該電源(未圖示)之第2極 性。因此,該第1電極(31)與該第2電極(32),分別連 接至不同極性。第2電極與第3電極亦然。 待反應之微流體係由微通道(2 0)之入口( 21)進 入。其移動之驅動源為該壓力源(未圖示)所產生之壓力 或其他壓力。該流體通常係包括一液體及溶解或懸浮其中 之待反應物質,用以在該微通道(2 0)中之特定反應區進 行所需之生化實驗。可能進行之實驗包括:加熱、混合、 化學反應、免疫反應,加入物質、沉殿、萃取、乾燥、靜 置等物理、化學或生物反應。該流體中所含之液體可為承 載液體或反應液體本身,通常可為水、低分子量化合物、 其他溶劑、血清、人類或動物之體液或動、植物之產生 物。但為達成本發明電解產生氣泡之目的,其中應具有不 會對反應系統產生不利影響且有助於電解產生氣泡之電解 質。以該待反應流體所含液體為細胞培養液為例,例如市 售之RPMI-1640( GIBCO公司)即可適用。其所含少量食鹽Page 11 550234 V. Description of the invention (7) (34) (3 5) (3 6) and the contact (3 7) (3 8) (3 9) can be the same material or different materials, but it is preferably The electrical conductor can be formed on the substrate (10) in a single step. In manufacturing, any suitable method can be used, such as printing, coating, etching, chemical vapor deposition and the like. If necessary, an insulating layer can be added to the surface of the electrode to reserve the required pores to regulate the electrical contact between the electrode and the fluid. In order to achieve the purpose of generating bubbles in electrolysis, the first electrode (31) and the third electrode (33) are preferably connected to a first polarity of a power source (not shown), and the second electrode (32) is Connect to the second polarity of this power supply (not shown). Therefore, the first electrode (31) and the second electrode (32) are connected to different polarities, respectively. The same applies to the second electrode and the third electrode. The microfluidic system to be reacted enters through the inlet (21) of the microchannel (20). The driving source of its movement is the pressure generated by the pressure source (not shown) or other pressure. The fluid usually includes a liquid and a substance to be reacted dissolved or suspended therein, and is used to perform a required biochemical experiment in a specific reaction zone in the microchannel (20). Possible experiments include: physical, chemical, or biological reactions such as heating, mixing, chemical reactions, immune reactions, adding substances, immersion, extraction, drying, and standing. The liquid contained in the fluid may be a carrier liquid or a reaction liquid itself, and generally may be water, a low molecular weight compound, other solvents, serum, human or animal body fluids or animal or plant products. However, in order to achieve the purpose of generating bubbles in the electrolysis of the present invention, it should have an electrolyte that does not adversely affect the reaction system and helps to generate bubbles in the electrolysis. Taking the liquid contained in the fluid to be reacted as a cell culture liquid as an example, a commercially available RPMI-1640 (GIBCO) can be applied. It contains a small amount of table salt

第12頁 550234 五、發明說明(8) 即可作為適用之電解反應溶液。而濃度則視應用上之需要 而定。此外,在待反應液體中加入含有電解質之液體,以 促進電解產生氣泡,亦屬可行。只要加入之物質及其電解 後產物不會對待反應流體之反應系統產生不利影響即可。 當流體自微通道(20)之入口 ( 21)注入,並以壓力源對 流體提供壓力後,流體將向壓力較小的第1氣泡阱(2 2 ),乃至於橋段(24)流動。當流體一部份進入該橋段, 另一部份進入該第1氣泡阱(22)時,由第1電極(31)及 第2電極(32)提供電流。在應用上,第1電極(31)與第 2電極(32)應屬不同極性;第2電極(32)與第3電極 (3 3)亦然。唯各電極之極性,仍應依應用上之需要而 定。原則上,在對微流體供應電流時,該微流體之連續部 分應有一部份接觸一第1極性之電極,另一部份則接觸一 第2極性之電極,以促成微流體之電解反應。 對該微流體提供電流時,因該微流體同時接觸不同極 性之電極,且該流體内含電解質,因而產生電解反應,而 在電極附近發生許多微小氣泡。例如,當該微流體含水, 且其中含食鹽時,則將在陰電極產生氫氣。在其他微流體 及其他電解質之場合,亦會發生相同現象。 當流體注入該第 1氣泡阱(22)及該橋段(24)時, 對該第1電極(31)及該第2電極(32)通電。因此流體内 含特定之電解質,將因通電而產生微小氣泡。由於微小氣 泡表面位能較大,由壓力源提供於微流體的壓力將破壞該 氣泡表面,使微小氣泡結合成較大氣泡,氣泡之結合不斷Page 12 550234 5. Description of the invention (8) can be used as a suitable electrolytic reaction solution. The concentration depends on the application. In addition, it is also feasible to add a liquid containing an electrolyte to the liquid to be reacted to promote the generation of bubbles in the electrolysis. As long as the added substances and their electrolyzed products do not adversely affect the reaction system of the reaction fluid. When the fluid is injected from the inlet (21) of the microchannel (20) and pressure is applied to the fluid by a pressure source, the fluid will flow to the first bubble trap (2 2) with a lower pressure and even the bridge segment (24). When part of the fluid enters the bridge section and the other part enters the first bubble trap (22), a current is provided by the first electrode (31) and the second electrode (32). In application, the first electrode (31) and the second electrode (32) should be of different polarities; so are the second electrode (32) and the third electrode (33). However, the polarity of each electrode should still depend on the application. In principle, when supplying current to a microfluid, one part of the continuous part of the microfluid should contact an electrode of the first polarity, and the other part should contact an electrode of the second polarity to promote the electrolytic reaction of the microfluid. When the microfluid is supplied with an electric current, the microfluid is in contact with electrodes of different polarities at the same time, and the fluid contains an electrolyte, so that an electrolytic reaction occurs, and many microbubbles occur near the electrode. For example, when the microfluid is water-containing and salt is contained therein, hydrogen gas will be generated at the negative electrode. The same phenomenon occurs in other microfluidics and other electrolytes. When a fluid is injected into the first bubble trap (22) and the bridge section (24), the first electrode (31) and the second electrode (32) are energized. Therefore, the fluid contains a specific electrolyte, which will generate micro-bubbles when energized. Due to the large potential energy of the surface of the micro-bubble, the pressure provided by the micro-fluid from the pressure source will destroy the surface of the bubble, causing the micro-bubbles to become larger bubbles, and the combination of the bubbles will continue.

第13頁 550234 五、發明說明(9) 發生,且氣泡將會被大角度彎道阻泥並在下游氣泡阱集 結,直到氣泡之表面張力,内壓力及外部壓力達到平衡時 為止。此時因為有氣泡陕(2 2) ( 2 3)之設置’該氣泡之 大小及位置可以維持及成長。當形成之氣泡體積適當時, 則可將微流體相對於該第1氣泡阱(22)之上、下游兩側 加以隔絕,停止流體進入該第1氣泡阱(2 2)之下游側, 形成一個微閥。而且當橋段為氣泡填滿時,電解反應因鹽 橋為氣泡阻斷會自動停止反應。此種現象也可發生在該第 2氣泡阱(2 3)。換言之,此裝置可串連使用。 第2圖表示本發明微通道流體導引元件應用在微開關 # 時之示意圖。如圖所示,作為微開關使用時,該微通道流 體導引元件仍製作在一基板(50)上,並包括一微通道 (40)。該微通道(40)具有一入口 ( 41),並在一節點 (46)處,分歧成2支流,分別具有一含有氣泡拼(42) (4 4)之微閥及其個別之出口 ( 43) ( 45)。該基板、微 通道、電極、導線、接點等之製作方式及其構造,均如前 述,不再贅述。 應用時,令流體由入口 ( 41)進入微通道(4 0),以 壓力令其前進,經過節點(46)分別進入第1含有氣泡阱 _ 之微閥(42)及第2含有氣泡阱之微閥(44)。利用前述 P 之操作,使位於所選定微閥之氣泡阱附近之微小氣泡形成 大氣泡,形成阻隔,使流體無法流經該被選定之電極之氣 泡阱,迫使流體只能流向另一含有氣泡阱之微閥,而向其 下游側之出口移動。Page 13 550234 V. Description of the invention (9) Occurs, and the bubbles will be blocked by the large-angle bends and build up in the downstream bubble trap until the surface tension of the bubbles, internal pressure and external pressure reach equilibrium. At this time, because there are bubbles (2 2) (2 3), the size and position of the bubbles can be maintained and grown. When the volume of the formed bubbles is appropriate, the microfluid can be isolated from the upper and lower sides of the first bubble well (22), stop the fluid from entering the downstream side of the first bubble well (22), and form a Micro valve. And when the bridge is filled with bubbles, the electrolytic reaction will automatically stop because the salt bridge is blocked by bubbles. This phenomenon can also occur in the second bubble trap (23). In other words, this device can be used in series. FIG. 2 shows a schematic diagram of the microchannel fluid guiding element of the present invention when it is applied to a microswitch #. As shown in the figure, when used as a micro-switch, the micro-channel fluid guiding element is still fabricated on a substrate (50) and includes a micro-channel (40). The micro-channel (40) has an inlet (41), and is divided into two branches at a node (46), each of which has a micro-valve containing bubbles (42) (4 4) and its individual outlet (43 ) (45). The manufacturing method and structure of the substrate, micro-channels, electrodes, wires, contacts, etc. are as described above and will not be repeated. During application, the fluid is caused to enter the microchannel (40) from the inlet (41), and is advanced by pressure, and enters the first microvalve (42) containing the bubble trap_ and the second microbubble containing the bubble trap_ through the node (46), respectively. Micro valve (44). Use the operation of P to make small bubbles near the bubble trap of the selected microvalve to form large bubbles and form a barrier so that fluid cannot flow through the bubble trap of the selected electrode, forcing the fluid to flow only to another bubble trap The micro valve moves toward the outlet on its downstream side.

第14頁 550234 五、發明說明(10) 利用上述操作,即可使本發明之微通道流體導引元件 作為單次微開關使用。 第3圖為本發明微通道流體導引元件之製作流程圖。 以下依據第3圖說明本發明微通道流體導引^件二方 =。如圖所示,在步驟(301)首先製備一玻璃基板,其 =,於(3〇2),在該基板上以化學蒸鍍及蝕刻製作電極 :岛接著’於(3 0 3),在該基板及電極層上方製備微通 微i、首隨後在(3〇4)在該微通道層内以顯影蝕刻法形成 1之圖型,並使该電極層之電極至少一部份 通道中。在製作時,需預留適用之氣令 在破 該微通道層上方製備覆層,最後在/ ; 〇5)在 成流體注入口及出口,完成本發 製作。 知a u通道流體導引元件之 【發明之效果】 利用本發明所揭示之電解顏 通道流體導引裝置中,並益任何可t開關或微閥’在微 元件耗損,反應劑阻塞在通道内等^件’因此不會發生 極,微通道流體導引元件不需製〃碭。由於使用電解電 製程。再·,驅動微開關或微閥時设^ t m可以簡化 也容易’但所提供之微開關或微斤:電:率小,控制 丨具有優異準確之功能。實驗證:背壓範圍内, 解氣泡,較之在10(rc下所產 2〇C下所產生的電 有高出23· 5%之背壓力。生的熱觸發式沸騰氣泡,具 此外,該微通道流體導引元件 1干之知作,可以透過電子Page 14 550234 5. Description of the invention (10) With the above operation, the micro-channel fluid guiding element of the present invention can be used as a single-time micro switch. FIG. 3 is a flowchart of manufacturing a microchannel fluid guiding element according to the present invention. The micro-channel fluid guiding member of the present invention will be described below based on FIG. 3. As shown in the figure, in step (301), a glass substrate is first prepared, which is: (3202), and electrodes are formed by chemical evaporation and etching on the substrate: island followed by (3 0 3), A micro-channel micro-i is prepared above the substrate and the electrode layer, and then a pattern of 1 is formed in the micro-channel layer by a development etching method at (304), and at least a part of the electrodes of the electrode layer are in the channel. During the production, it is necessary to reserve a suitable gas order to prepare a coating layer above the broken microchannel layer, and finally to complete the production of the present invention at /; 05) at the fluid injection port and outlet. [Effects of the invention on the AU channel fluid guide element] Use the electrolytic channel fluid guide device disclosed in the present invention, and benefit from any t-switch or microvalve that consumes microelements and blocks reagents in the channel, etc. Therefore, the pole does not occur, and the microchannel fluid guiding element does not need to be controlled. Due to the use of electrolytic process. Furthermore, setting ^ t m when driving a micro-switch or micro-valve can be simplified and easy ', but the micro-switch or micro-jin provided: electricity: small rate, control 丨 has excellent and accurate functions. Experimental proof: In the range of back pressure, the bubbles are decomposed, which has a back pressure of 23.5% higher than the electricity generated at 20 ° C produced at 10 ° C. The thermally triggered boiling bubbles have The micro-channel fluid guiding element 1 is known to be capable of transmitting electrons.

第15頁 550234 五、發明說明(11) 電路,以軟體 本發明所 置數個微流體 應元件及偵測 時間程序參數 式,加以精確 本發明所 複雜的驅動、 以上是對 藝之人士不難 不同的衍伸與 含於其申請專 【元件之說明 10 20 21 22 23 24 25 31 32 33 34' 35、 36 控制, 之微通 模組, 。所有 可透過 ,實現 之微通 元件, 明微通 述之說 ,唯只 圍内。 基板 微通道 流體入口 第一氣泡阱 第二氣泡阱 橋段 流體出口 第1電極 第2電極 第3電極 導線 上甚為方便。 體導引元件,可以在其上設 相對應之微閥、微開關、反 元件之作動與否,以及作動 劃(programmable)之方 劃微通道流體導引的目的。 體導引元件,由於並未設置 作極為簡便,成本亦低廉。 體導引元件之說明,習於斯 明瞭本發明之精神進而作出 超出本發明之精神,均應包 應用 道流 及其 這些 可規 可規 道流 其製 道流 明, 要不 加以 提供 反應 裝置 ,均 控制 揭示 導引 本發 由上 變4匕 利範Page 15 550234 V. Description of the invention (11) The circuit uses software to install several microfluidic components and detection time program parameter formulas of the present invention to accurately drive the complex drive of the present invention. The above is not difficult for those skilled in the art. Different extensions and micro communication modules included in its application [component description 10 20 21 22 23 24 25 31 32 33 34 '35, 36 control. All the micro communication components that can be implemented through, Ming Wei said, but only within. Substrate Microchannel Fluid inlet First bubble trap Second bubble trap Bridge segment Fluid outlet 1st electrode 2nd electrode 3rd electrode It is convenient on the lead wire. The body guiding element can be provided with corresponding micro-valves, micro-switches, anti-elements for operation or not, and programmable micro-channel fluid guiding purposes. The body guiding element is extremely simple and inexpensive because it is not provided. The description of the body guiding element, and the spirit of the present invention, which is beyond the spirit of the present invention, should include the application of the channel flow and its controllable flow control lumens, or not provide a reaction device, Both controls reveal that the hair changes from up to 4 daggers.

第16頁 55023416th page 550234

第17頁 550234 圖式簡單說明 第1圖表示本發明微通道流體導引元件工作原理示意 圖。 第2圖表示本發明之微通道流體導引元件應用在微開 關之示意圖。 第3圖表示本發明微通道流體導引元件之製程示意 圖。Page 17 550234 Brief Description of Drawings Figure 1 shows a schematic diagram of the working principle of the microchannel fluid guiding element of the present invention. Fig. 2 is a schematic diagram showing the application of the microchannel fluid guiding element of the present invention to a microswitch. Fig. 3 is a schematic diagram showing the manufacturing process of the microchannel fluid guiding element of the present invention.

Claims (1)

550234 六、申請專利範圍 【申請專利範圍】 1. 一種微通道流體導引元件,包括: 一微通道,可供一流體通過; 該微通道包括至少一形成在該通道内之氣泡阱,用 以滯留形成在該微通道内之氣泡; 一電解氣泡產生裝置,透過對該微通道内之流體供 應電流,引起電解反應,在該流體内產生氣泡;及 一壓力源,用以對通過該微通道之流體提供一適當 壓力; 其特徵在於,該電解氣泡產生裝置可使通過該微通 0 道之流體在該氣泡阱附近產生氣泡。 2 .如申請專利範圍第1項所述之微通道流體導引元 件,其中該氣泡阱包括一形成在該微通道内之大角度彎 道。 3 .如申請專利範圍第1項所述之微通道流體導引元 件,其中該氣泡阱包括一形成在該微通道内,用以阻泥氣 泡並使氣泡集結之部分。 4.如申請專利範圍第1項所述之微通道流體導引元 件,其中該電解氣泡產生裝置包括一至少一裝置在該氣泡 m 阱附近之電極。 5 .如申請專利範圍第4項所述之微通道流體導引元 件,其中該電極具有至少一可與該流體接觸之部分。550234 6. Scope of patent application [Scope of patent application] 1. A microchannel fluid guiding element includes: a microchannel for a fluid to pass through; the microchannel includes at least one bubble trap formed in the channel, and is used for Bubbles formed in the microchannel are retained; an electrolytic bubble generating device generates an electrolytic reaction by supplying an electric current to the fluid in the microchannel; and generates a bubble in the fluid; and a pressure source for passing through the microchannel The fluid provides an appropriate pressure; characterized in that the electrolytic bubble generating device can cause the fluid passing through the microchannel 0 to generate bubbles near the bubble trap. 2. The micro-channel fluid guiding element according to item 1 of the scope of the patent application, wherein the bubble trap includes a large-angle curved channel formed in the micro-channel. 3. The micro-channel fluid guiding element according to item 1 of the scope of the patent application, wherein the bubble trap includes a portion formed in the micro-channel for blocking mud bubbles and agglomerating the bubbles. 4. The micro-channel fluid guiding element according to item 1 of the scope of the patent application, wherein the electrolytic bubble generating device includes at least one electrode near the bubble m-well. 5. The microchannel fluid guiding element according to item 4 of the scope of patent application, wherein the electrode has at least one portion that can contact the fluid. 第19頁Page 19
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US8298398B2 (en) 2007-07-30 2012-10-30 Benq Materials Corp. Micro flow device and method for generating a fluid with pH gradient

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US11441701B2 (en) * 2017-07-14 2022-09-13 Hewlett-Packard Development Company, L.P. Microfluidic valve

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8298398B2 (en) 2007-07-30 2012-10-30 Benq Materials Corp. Micro flow device and method for generating a fluid with pH gradient

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