TW548531B - Test head positioning apparatus - Google Patents

Abstract

A positioning apparatus for positioning a test head for resting electronic components is provided. The positioning apparatus includes an outer cylinder and a support coupled to the outer cylinder for supporting the test head. The positioning apparatus also includes a piston arranged within said outer cylinder such that the piston and the outer cylinder define a fluid compartment within the outer cylinder. The positioning apparatus also includes a pressure regulator for maintaining a pressure within the fluid compartment such that the test head may be suspended in a substantially weightless position, the substantially weightless position being adjustable in a vertical direction. The positioning apparatus also includes a lifting device for raising and lowering the outer cylinder. The lifting device includes a threaded drive mechanism coupled to the piston. The positioning apparatus also includes a drive apparatus for operating the threaded drive mechanism to move the test head to a predetermined position.

Description

548531

琰, Fa Mo Qianming (Invention Day Listening_Technical Fields of the Japanese Thieves, Prior Technology, Strategy, and Implementation Guide Descriptions) Inventive Model t In summary, the present invention is related to testing electronic components "Positioning system" and more specifically, there is a positioning system for testing heads used for testing electronic components with a vertical compliance movement. In automated testing of electronic components such as integrated circuits (1C), it is customary to use a system with a "handling app" to process the items under test. The transport device may be a packaged component manipulator, -Wafer detectors or other transport equipment; the transport equipment used may depend on the stage of manufacture or development at the time of the test. The transport equipment leads each tested component (job) to the contained test area in turn, At this place, connect each tested component to-test socket, probe card and other similar devices, P test component can be tested electronically there. Electronic test. The formula itself is supplied by a large and sophisticated automatic test system The test system includes a test head. The test head is connected to a main frame; the electrical environment carries electricity, signals, and required items, such as the coolant used by the test head. The test power and test The signal is given to the device under test). The test head is tightly encapsulated with a fine electronic circuit to achieve the complex component: fine = test 5 type. Therefore, the test head is very heavy, and the number is more than the side round weight. In non-t-complex test equipment, = transport = pass the test head, which greatly increases the test head's length and the π greatly increases the weight and resilience of the cable. (2) 548531

When testing, the 1¾ test head must be set as close as possible to the test area of the transport device to minimize signal attenuation. Therefore, the test head may have to be connected together. A test head positioning system can be used to position the test head relative to the transport device, and it can be designed to facilitate the flexible docking and disengagement of the test head and each different transport device. Test head positioning system can also be called test positioner or test head manipulation

Controller (manipulator). Test head positioning systems have been described in many patents ’Some related patents will be discussed later. Docking is well known and is included in patent documents. For example, U.S. Patent No. 4,58M15 (issued to Smith describes the first phase of docking H. Its principle is still widely used today. In addition, the World Intellectual Property Rights Organization (WIP〇) International Publication w〇 〇 2/25292 A2 (Ni

(Ny) et al.) And WO 001/64389 8 2 (Holter et al.) Provide a more general discussion of modern docking and include a number of further references. These related concepts will be discussed in The following discussion provides a brief explanation of where appropriate. It is often necessary to connect a given test device to a different transport device; ". For example, the test may be performed with a certain packaged component processor for a period of time, Then it may be necessary to switch to another machine at another package component. In other occasions, it may be necessary to change between a wafer detector and a Jun component processor. In these cases, the test head is the same as the original The packaged component processing machine is disconnected, and the original packaged component processing machine is removed. However, a new conveying device is advanced, and the test head is docked with it. Moreover, it is often necessary to remove a test head from a The transport device is removed in order to perform maintenance work. Therefore, the test head and a variety of -6-548531 are necessary

⑺ Different iguan ** ^ s can be easily docked and undocked. The test area of each transport device has a different location and orientation. It may be horizontal 2 (DUT), horizontal downward (DUt), vertical, or at an angle, and the angle is different. Depending on the device to be docked, the test head may have to be approximately upwards. ' Move down, vertically, or at any angle. Therefore, in this positioning system, a wide range of motion is required. For example, it is not unusual for a demand condition of a vertical range of motion of approximately -meters (or more). The Hai-test β-type positioning device is a mechanical device that allows an operator to bring an automatic test equipment test head with a mass of more than several hundred kilograms into the vicinity of a transport device, and let the test head be docked with the transport device. . As the semiconductor wafer industry has become faster and more complex, the volume and weight of the test head has grown. What's more, it is used to connect the test head and the cabinet of automatic test equipment. Its volume, weight *, and resilience are also increased accordingly. These factors have created a demand for the test head positioning system, which has to increase both the load and the range of motion. When the test head and the transport device are docked, ‘A hundred or thousands of detailed electrical contacts must be accurately arranged and matched’ so that the test signals and power between the DUT and the test head can be transmitted. In general, it is indeed a very important thing to design a device that can freely push negative weights weighing hundreds of kilograms, and at the same time have the necessary accuracy to match hundreds of thousands of detailed electrical contacts. A huge challenge, as discussed in more detail in the aforementioned WIP0 publication, is that there are two general classifications of docking: • actuator follower and manipulator follower. Special at ^ 5 (4) 548531

The actuator driven docking introduced by Lee is the most widely accepted and used type to date. The actuator follower requires complementary alignment elements, such as (but not limited to) alignment pins and sockets, attached to the test head and the transport device, respectively. At the same time, it is also provided with a driving mechanism, such as (but not limited to, one of the two test heads and the conveying device, which is attached to: the driving member on the other of the two, such as (But not limited to) cam follow: match. Simply put, the docking must first locate the test head in the vicinity of the transport = (about one centimeter) and approximately align the test area. This system can be described as A "ready to match," position. Push the test head closer to its opposite position until the moving mechanism and the driving member enter into a preliminary whistle. Often a rough alignment of the dispensing opening 1-cattle, to Make sure that this action can accurately perform without damaging the detailed contact points. At this time, the system can be said to run the actuator at the edge of the material, perform further-step, and then make the move, drag the test head to touch, It has a condition of "electrical connection and fine butt connection", which is typically equipped with precise and precise alignment. The actuator develops the friction and contact force within tolerance. Depending on the system and Martial arts inferred from the second service system Move or person. ≫ The relatives are in the position of the slave-receiver docking:-Relatively fine movements of the complete docking condition, can be: The "fine" of the position is like this, the fact clearly shows that the position of the fully docking is entered. Simultaneous fine tuning and manipulation during the docking process. It is necessary for the actuator to pull the test head to support the quality of the test head. The other four heads generally have the same track and conveying device (5) (5) 548531

: Orientation of the test area. Moreover, during the docking and inducing process, "fine alignment of the test head may require slight movements in several directions. For example," while supporting the quality of the test head, the positioning system of the test head is good. In several degrees of freedom, the test head is allowed to be freely compliant, move ', or in a substantially weightless state in several degrees of freedom. In other words, the force required for load positioning is much smaller than the force required to support the load = Although 'guilty has compliant movement in all six degrees of freedom, it is often the most important one', but it is known that A test head positioning system with fewer degrees of freedom and the 'under test' transport device may generate mechanical vibrations, and the vibration energy must be absorbed by the system. For this reason, in order to prevent the vibrations from being absorbed by the fine contact points in a manner that is injurious, users often prefer to maintain the remote test head in a compliant state while the test is in progress. It is well known that a test head positioning system maintains the test head in a substantially weight state over the entire range of motion. Such a system would allow an operator to hold the test head (or a handle attached to the test head) and push it manually through space. The compliance activities required for the driven follower docking must be included. Therefore, in terms of docking, an operator manually positions the measuring head to a position ready to be actuated, and then operates the actuator. U.S. Patent No. 4,529,942 (Smith) discloses a test head positioner that provides this free movement in six degrees of freedom. In order to achieve this, several counterweights are provided for free movement in the vertical direction; the axis of rotation, which may not be on the horizontal plane, basically passes through the center of gravity of the test head; and low-friction bearings are in full use . U.S. Patents 4,589,815, 4,70 5,447, and 5,1 49,029 (all issued to 548531

) Smith's release-an alternative system that uses a cylinder and piston instead of a counterweight to provide approximately weightless movement over the vertical range of the entire stroke. "《Describes a pneumatic retractable vertical cylinder, whose movable part intersects the pneumatic piston. In this arrangement, maintaining a constant pressure provides a balancing force for the weight of the test head and cable. The test head is secured to the piston through a suitable support structure. When the test head moves vertically, the piston moves accordingly in the cylinder. Compressed air or other appropriate fluid is injected into the cylinder, and a regulator controls its pressure to maintain a force on the piston corresponding to the weight of the piston. The system is also arranged so that the cylinder and piston form a telescoping vertical cylinder with a height equivalent to the height of the test head. In some cases and especially when the test head becomes larger and heavier, it becomes more and more desirable to set-drive devices, such as motors, hand cranks or the like, to drive selected ones in a test head positioning system Several axes. It is often necessary to first use a drive for the vertical axis. When the actuator is used for driven docking, the drive device will drive the axis until it reaches a position ready to be docked or to be driven. The test head can then be moved compliantly against the drive so that it can be docked. In a telescopic pneumatic system, as described in Patent '815 (see above), it is believed that flexible activities can be achieved by controlling the air pressure in the cylinder, as it is used in automobile lifts. However, this method may be difficult to achieve full control. A more practical approach 'is disclosed in WIPO International Publication No. WO 00/4 1536 (Holt et al.). The case discloses a technology that attaches the drive motor unit to a fully balanced manipulator in a manner that maintains compliance, -10- 548531

上 On the axis and other axes. As time goes by, ^ the larger the measuring head becomes, the more moving it ^ _ the more its position becomes correspondingly larger, the more A ′, especially when the demand for vertical punching has increased. Therefore, in order to facilitate the consideration of transportation, passage through the portal, and maintenance, etc., the extension structure has become a popular expectation. As Luo ’s test head becomes more and more huge, it becomes more and more unwilling to use weights, because the weight must be more than that of the test head, its supporting structure, and its supporting components. The total mass of the cables must be greater. An all-pneumatic system, as described in Patent No. 8, 15, is limited to stroke; as mentioned earlier, precise positioning is difficult to achieve. U.S. Patent No. 5,931,048 (Slocum et al.) Discloses a telescopic test head manipulator driven by an electric motor and a screw mechanism. The load is not used, and the load is supported by the unit. Vertical compliance is provided by a pneumatic mechanism, which is placed between the bottom and a telescopic vertical cylinder. Such as & the vertical compliance mechanism desperately needs the space of responsibility under the cylinder. This space may be limited to the vertical reach and / or limited by the overall compliance range. Springs and the like provide flexibility for other axes. US Patent No. 5,949,002 (A1 den) § describes a manipulator similar to the '048 patent, but with a load cell and a complex electronic control system configured to provide compliance Instead of the pneumatic way. According to reports, this arrangement makes the system more suitable for variable or changing load conditions. There are also reports of earlier craftsmanship. WIPO Publication No. WO 01/643 89 A2 (Holt et al.) Discloses a telescopic manipulator with a ball-beam screw driven from a vertical axis. The load is supported by the driven spiral. There is a -11- 548531 垂直 vertical compliance mechanism, which includes a mechanical „g ^. Clothing (such as a ball-and-ball screw) sub-has-for the load mass-a small part of the mass. W㈣published Ze Ze 02/25292 Α2__ et al.) Disclosure—This item contains a number of technologies—force generators, and complex control devices—that provide balancing forces and compliance on a variety of possible driven axes to facilitate docking. The disclosure is German Patent No. 44 36 045 Α1, a lifting device in the basin, with a ball mandrel driven by an electric motor, which can push a carrier for loading a workpiece or other device in the vertical direction. Here This load also enables two or more magnets to operate in a joint-cylinder. This technique has not been applied to the test head positioning system, and it has not been shown to provide flexibility. An improved stretch test positioning system has -Convenient drive shaft with straight axis for docking is desirable. In order to maintain and adapt to simplicity and minimal cost, it should not rely on load elements and other sensing benefits combined with complex control systems. To To reduce the total weight to a minimum, it must not use counterweights. Vertical driving is best controlled by electric power to achieve smooth operation and operator-friendly press control or computer control. The compliant device should be able to improve accessible compliant activities The range can be adjusted quickly to match a situation and the scope of application. / Latent 1 Summary In an exemplary embodiment of the present invention, a positioning device is provided for testing a test head for testing electronic components. The positioning device includes an outer cylinder and a bracket connected to the outer cylinder to support the test head. The positioning device further includes a piston disposed in the outer cylinder so that the piston and the outer cylinder A fluid compartment is defined in the cylinder. The positioning device is also -12- (9) 548531

A pressure regulator is included for maintaining a pressure in the fluid compartment so that the test head is suspended in a substantially weightless position, the substantially weightless position being adjustable in a vertical direction. The positioning device also includes a lifting device for raising and lowering the outer cylinder. The lifting device includes a threaded drive mechanism coupled to the piston. The positioning device further includes a driving device for operating the threaded driving mechanism to push the test head to a predetermined position.

In another exemplary embodiment of the present invention, a positioning device is further provided for positioning a test head for testing electronic components. The positioning device includes a driving mechanism for pushing the test head in a vertical direction. The positioning device further includes a pneumatic compliant coupling mechanism i connected to the pneumatic mechanism. The pneumatic, compliant coupling mechanism supports the test head in a substantially weightless condition, and provides a range of motion of the test head in a vertical direction. . The position of the pneumatic compliance coupling mechanism is provided above the driving mechanism, and is fixed to the driving mechanism, so that the driving mechanism pushes the measurement in the vertical direction, and also pushes the pneumatic compliance coupling mechanism.

In another exemplary embodiment of the present invention, a method for positioning a test head for testing electronic components is provided. The method includes placing a fluid flow into a fluid compartment connected to a test head. The method also includes using a drive mechanism to mechanically push the test head in a vertical direction to a desired position. The method also includes suspending the test head with the fluid in a substantially weightless condition by maintaining the pressure of the fluid in the fluid compartment; the position of the fluid compartment is between the test head and the drive mechanism. , -13- 548531

(ίο) Brief description of the drawings The present invention can be best understood by referring to the accompanying drawings and reading the following description. It is emphasized that, in accordance with general practice, the components in the drawings are not drawn to scale. However, for the sake of clarity, the size and size of each component can be arbitrarily enlarged and reduced. Included in the drawings are the following figures: Fig. 1 is a perspective view of a positioning device with a test head in an exemplary embodiment of the present invention; Fig. 2 is an exemplary embodiment of the present invention A perspective view of a positioning device with a test head butted to a transport device; FIG. 3 is a front cross-sectional view of two cylinders and a lead screw included in a positioning device according to an exemplary embodiment of the present invention Zhuang Figures 4 to 6 are front cross-sectional views of a positioning garment according to an exemplary embodiment of the present invention, in which an outer cylinder is connected with an inner cylinder set at different height positions; FIG. 7 is A pneumatic connection diagram of a pressure regulating device according to a specific embodiment of the present invention; FIG. 8 is a perspective view of a part of the position device according to the present invention-an exemplary embodiment; FIG. The invention is a detailed view of the detail section of the two-cylinder and one lead screw section of the position device in the specific embodiment of the non-drying property. FIG. 10 is a non-wearing specific example according to the present invention. In the embodiment of the two positioning means in the cylindrical guide and a screw < Wear sectional partial perspective view of the Fo; -14-548531

(ii) FIG. 11 is a perspective view for supporting the bottom of two cylinders and a lead screw included in a positioning device according to the present invention. Detailed description of the invention FIGS. 1 and 2 provide a perspective view of a positioning device 1, including a The transport arm device is used to support the test head 3 for testing electronic components.

The positioning device 1 includes a base frame 4 which is seated on the ground, and a vertical circular phase I is provided. The base frame 4 extends upward. The cylindrical device 5 can be moved in the y-direction by the side frame 6. The conveying arm device 2 can move the cylindrical device 5 in the χ_ direction. The cylindrical device 5 includes a bottom tubular inner cylinder 7 and a top official outer cylinder 8 provided on the inner g 2 1 so that the cylinders 7 and 8 are engaged with each other in a telescopic manner. By adjusting the height of the outer cylinder 8 to the inner cylinder 7, the conveying arm device, which is connected to the outer cylinder 8 (and the measuring head 3), can be adjusted in height (that is, in the direction). Further, the conveying arm device 2 can be red-turned about a horizontal axis in the v direction. The test head 3 can be rotated in a upward direction about a horizontal axis and in a direction about a vertical axis. The test head 3 is connected to the free end of the transport arm device :. With this arrangement, the test head 3 can be manipulated in all directions. Electric power hanger 9 is used to support and test head 3 and / or positioning! The electrical gauge connected to the device is also shown in Figure i and Figure: Figure 2 again shows the positioning device with a broken arm g, such as a dagger, to support the transport of the test head 3 and the broken device 2. In FIG. 2, the test head 3 is connected to the transport device 10 by a borrowing loan # 壮 494mi 册 μ. The electronic ten-flail device 10 is taken to the test head 3 and the electrical characteristics are tested in a pattern. Therefore, it is necessary to make ^ into a precise location of its related 10 '. Character test head 3 relative to the conveying device -15- (12) —__ (12) —__ 548531 The alignment part of the test head 3 is aligned with the conveying device quasi-component, the sound θ + ^ For example, the situation can be used up, from the center lock and ⑷ Positioning screws, protruding in the direction of the test head 3 on the frame of the test set 10, and then introduced the setting base 'in the example I ;; the respective openings or inserts on the frame of the test head 3) In other words, the docking is completed by driving the test head 3 into the required preparation docking position of the tightening device 10 as accurately as possible by corresponding movements in u, ν, η 0. When necessary, most of the fine tuning actions can be completed manually, and the ready-to-actuate position 'is entered until the docking and actuating components are spit to each other. At this time, you can use the docking guide = drag the test head 3 into a fully docked position as described above. As for the situation, the vertical fine tuning and alignment of the test head 3 (that is, fine adjustment in the z direction) can be performed in a very simple and precise manner using the positioning device of the present invention; this follows There are more detailed explanations. The vertical cylinder device 5, including the inner cylinder 7 and the outer cylinder 8, is shown in more detail in FIG. The outer cylinder 8 is arranged so that it can slide on the inner cylinder 7 to provide a telescopic alignment pattern. In order to achieve the required sliding characteristics, there are two further sliding bushes " and 12 between the cylinders 7 and 8. The top sliding sleeve 11 is provided near the top end of the inner cylinder 7, and the bottom sliding sleeve 11 is provided near the bottom end of the outer cylinder 8. The piston 13 is arranged at the top end portion of the outer cylinder 8, and the central lifter µ extends vertically downward from the piston. The lift lever 14 is movable in the longitudinal direction within the center of the guide bush ⑼. The top guide bushing 15 is supported by a horizontal support web 17, which extends radially inward from the inner peripheral wall of the outer cylinder 8, and is fastened to the original position of the inner peripheral wall at -16-548531 (13) . Supporting the web 17 and thus the guide bush 15 is provided near the top end region of the outer cylinder 8 at a distance from the top surface 18 of the cylinder 8 in the exemplary embodiment shown in FIG. 3, This corresponds to approximately 11% of the total length of the cylinder 8. Of course, this distance can vary depending on the required piston stroke, and can be between 5 and 20% of the length of the cylinder 8, for example. The bottom guide bush 16 is set at the center of the front end surface 19 of the inner cylinder 7. The lifting rod 14 extends downward and thus enters the inner cylinder 7. In addition, the cross-section of the lifting rod 14, and thus the guide bushes 15, 16 may be square cards to prevent the lifting rod 14 from rotating in the cylindrical device 5 (the lifting rod 附近 near the bottom end of the inner cylinder 7). At the bottom end, a lead screw nut 20 is attached. In order to push the lifting rod 14 in a vertical direction (with the piston 13, the outer cylinder 8, the transport arm device 2, and the test head 3), a lead screw 2 1 is provided to extend downward. The inner cylinder 7 is also engaged with the lead screw nut 20. The lifting rod 14 may be a hollow design so that the lead screw 2 丨 can extend into the lifting rod 14. The lead screw 21 extends downward through the bottom end of the inner cylinder 7 and is connected to a drive motor (not shown in Fig. 3). As shown in Fig. 3, the lead screw tip 21a projects under the inner cylinder 7. By rotating the guide rod 21 (using the drive motor), the lead screw nut 20, together with the lift rod 14, moves up and down along the stationary lead screw 21 in the vertical direction. The piston 13, the lift rod 14, the lead screw nut 20 and the lead screw 21 are all part of a lifting device 3 丨. The piston has a radially convex sealing journal 22 which seals the piston 17 against the inner peripheral wall of the outer cylinder 8. A closed fluid holding chamber 23 is thus provided between the piston 13 and the top surface 18 of the outer cylinder 8. The fluid holding compartment 23 is borrowed (14) 548531

-An opening 24 provided in the top face 18 is connected to a fluid line 25, so that a fluid such as compressed air can be introduced into the fluid holding chamber 23 and can be discharged from the chamber.

If fluid is to be added to the fluid holding chamber 23, the outer cylinder 8 is pressed upwards and the piston 13 is held still. 4 to 6 show three different positions of the outer cylinder 8 relative to the piston 13. For example, as shown in the figure, the position of the outer cylinder 8 when the piston 13 has been lowered to the maximum degree is therefore pushed by the piston 13 on the front end surface 18. Figure 5 shows the cylinder 8 in a raised position. Figure 6 shows that the cylinder 8 has reached the maximum lifted position for the piston 13. In order to reverse the process and lower the cylinder 8 relative to the piston 13, the fluid is released from the fluid holding chamber 23. At this time, the cylinder 8 is due to the support arm device 2 (which is connected to the cylinder 8) and The weight of the test head 3 is lowered relative to the piston 13. So at the beginning of the docking operation, in case of being in the fluid holding compartment 2 3

When there is insufficient air supply, air may be injected into the fluid holding compartment U to offset the weight of the test head 3 (and the connected system components), thereby suspending the test head 3 in a substantially weightless state. At this time, the operator can push the test head to a central position (for example, FIG. 5) or any other position within the range of motion of the piston 13. As explained in more detail below, when the test head 3 is docked with the transport device 10, the test head 3 is often maintained in a substantially weightless state. This weightless state can be achieved without excessive force. It can be adjusted in the vertical direction 2 to make fine adjustment of the position of the test head 3 possible. This roughly childless state can be referred to as a compliant state. In this state, the test head can be flexible along a vertical axis within a certain range of motion. = -18- (15) 548531 surface to push, without Excessive force. For example, 'the outer circle R is set in FIG. 5 to indicate that the test head 3 is on the spear, and the position of 1 U and 8 can be moved along a vertical range, below the center of the heart' cylinder y ^ white and down (to Figures 4 and 6 do one location). , Μ μ & not

In order to test the fine adjustment of the vertical position of the head 3 in an early manner without excessive force, the positioning device ^ is used to keep the head 3 at a height close to the desired height. A small amount of force can be used for height adjustment in a precise manner within limits, provided with—a pressure adjustment device 26 as shown in FIG. 7. The pressure coupling device 26 regulates the fluid flow and pressure between the pressure generating device "and the fluid holding chamber 2⑷. For this purpose, the pressure generating device 27 is ㈣ to a pressure regulator 28, which uses a very precise The pressure of the fluid is adjusted in such a way that a specific pressure target value is maintained: in case the pressure in the fluid line 25 drops, the fluid can be immediately fed into the fluid holding phase chamber 23, and the pressure is increased to When the target value is higher than this, the fluid can be immediately desorbed from the fluid holding chamber 23.

As shown in FIG. 7, the fluid supplied by the pressure generating device 27 first flows through a 3 / 2-way valve 29 controlled by an electromagnetic force, and the 3 / 2-way valve 29 is changed to flow through the active state. . The 3 / 2-way valve 29 has a return impulse, so that in the event of a power failure, the distribution valve 29 will be pressed back to a position to prevent the return flow from the fluid holding chamber 23. Arranged parallel to the 3 / 2-way valve 29 is a one-way flow restrictor 30, which can also prevent backflow from the fluid holding chamber 23 'and, besides, can be used for positioning purposes, allowing slight The human lifts the test head 3. On 3 / 2_ Tongku 29 and -19- (16) 548531

Downstream of the one-way flow restrictor 30, the total flow is r ^ 丨. +. '打 3 The two official paths are brought back together to form a μ limb official path 2 :), which then expands into the fluid holding compartment u of the outer cylinder 8.

If the measuring head 3 (when it is attached to a weightless state), it is manually lifted up for the purpose of fine adjustment of the angle position, so the pressure in the fluid holding chamber 23 is raised according to the table. Force while reducing. The pressure regulating device% recognizes that ^ is reduced, that is, the pressure is raised by feeding additional fluid into the fluid holding chamber 23 until the original target pressure is reached again. With a continuous slight lifting of the test head 3, the outer cylinder 8 can be moved, so the test head 3 is continuously moved upwards with a slight force until the outer cylinder 8 reaches the position shown in FIG. 6; in FIG. 6 In the middle, the piston 13 is tightly supporting the web 17 or the guide bush. In this way, if the test head 3 (when it is tied in a substantially weightless state, the 疋 is pressed down in the fine withholding, and the fluid remains The pressure in the compartment 23 will rise. The pressure control device 26 recognizes this pressure rise and drains the fluid in the fluid holding compartment 23 until the original goal is reached. By continuously and gently pointing down Pressing M without applying excessive force I 'can push the test head 3 downwards until the outer cylinder 8 reaches the position shown in FIG. 4-the core ocean cormorant "floating" system is prepared in this way for supply. Manual and fine adjustment of the height position of the test head 3 is easy and smooth. Figure ^ is a perspective view of a part of the positioning device! As mentioned above, the outer cylinder and the inner circle ㈤7 疋 are in a telescoping manner σ to each other. Inner The cylinder 7 is mounted on a stand. The components can also be mounted on On the stand 6, for example, the power supply units 3 and 34 'and the control electronics housing 33, are shown in _. Figure μ -20- 548531 (17) Plane __ provides a perspective view on the system's containment Several components under the gantry 6. A motor (not visible in FIG. 8) is mounted on the top surface of the gantry 6. As shown in FIG. 8, the motor shaft 36 projects below the gantry 6. The motor shaft 36 is connected to the motor pulley 38. The lead screw 21 is connected to the encoder drive pulley 44. The lead screw pulley 42 can be firmly fixed to the lead screw 21, or the encoder drive pulley 44 can be driven through the encoder if necessary (for example, A stepped pulley including a lead screw pulley 42 and an encoder drive pulley 44 is connected to the lead screw 21. The lead screw pulley 42 is connected to the motor pulley 38 through a transmission belt 40. According to this arrangement, when the motor When the rotating shaft 3 $ rotates, the motor pulley 38 also rotates, thereby driving the transmission belt 40. The transmission belt 40 rotates the lead screw pulley 42 to run the lead screw 21. According to this arrangement, the motor is used in any direction Operation, you can turn the lead screw 2 i to lift The piston 13 'is lowered, as described above, to raise or lower the test head 3. The encoder drive pulley 44 is connected to the encoder pulley 48 via a timing belt 46. Thus, when the encoder drive pulley 44 rotates, the encoder The encoder pulley also rotates. The encoder 50 can retrieve data from the encoder pulley 48, such as the number of rotations, etc. These data can be translated into the lead screw 2 ^ 乂 and the measuring head positioning system. General operating information, for example, the vertical position of the test head 3 is such that a code of 50 can provide feedback data to a computer or control π, 'first end & sensing in this exemplary embodiment of the present invention The sensor is a flat code sensor, and any type of sensor can be used, for example, a traditional position sensor (such as a string tube). FIG. 9 is a detailed cross-sectional partial perspective view of the cylinders 7 and 8. FIG. Lifting -21- (18) (18) 548531

The various components set at 3! Can also be seen at least in part in the figure, including the lead screw 21 and the lead screw nut 20. Under the lead screw nut ", a θ stopper is included. The stopper 51 may be included to prevent the mechanical movement of the ball screw head 20 from reaching a predetermined position below. The lead screw ^ includes The shoulder portion 2lb. The shoulder portion 21b is supported by a bearing 53 as a journal. The motor 52 is also mounted on the stand 6 as shown in Fig. 9. The motor is extended from the motor 52 under the stand 6. Below the surface. Encoder 50, encoder pulley 48, timing belt 46, encoder drive pulley material, lead screw pulley ^, drive belt 40 and motor pulley 38 are also shown in cross-sectional view in Figure 9 As shown in Figure 9, the TF 'lead screw end 2 1 a is coupled to the encoder drive pulley. The figure is a perspective view of a part of the positioning system, including the cylinders 7 and 8 and the lifting device 31. As previously described As mentioned above, the lifting device 31 includes a lead screw and a lead screw nut 20. 4 to 52 are again shown mounted on the stand 6 while a motor shaft 36 protrudes below the lower surface of the stand 6. As shown in FIG. Horse 50, encoder pulley 48, timing belt 46, encoder drive pulley 44, The guide screw pulley 42, the transmission belt 40, and the motor pulley 38 are also shown in cross-sectional views in Fig. 10. Fig. 11 is a perspective view of the upper part of the frame 6. The cylinders 7 and 8 are available. The telescopic manner meshes with each other and is mounted on the stage 6. The motor 52 is also mounted on the stage 6. In addition, the power units 54 and 56 shown are on both sides of the motor 52. Thus, the present invention provides a positioning device i , Which allows a test head 3 to be docked with a transport device 10 in a simple, safe and effective manner. As pointed out in the above, in an exemplary embodiment, the present invention provides -22- (19) 548531

The bit holder 4 includes an inner cylinder 7 and a telescopic mesh with a cylinder 8. A lifting device 31 includes a piston 13 disposed inside the outer cylinder 8. The outer cylinder 8 is movable relative to the piston 13. The pressure in the fluid holding chamber 2 3 can be adjusted so that the outer cylinder 8 together with the conveying arm device 2 ^ and the measuring cylinder 3, f can be adjusted into a floating position, and the height of the piston 丨 3 can be adjusted. .

Through the operation of the positioning device, the test head 3 is maintained at a certain height ", in a floating or floating state. In this exemplary embodiment, c can be maintained without the external force being applied to the test head 3 or the transport arm device 2. However, if an operator or a pair of people, when docking, in order to bring the test head 3 into the desired position, try to cold or push 'push the test head 3' down. The test head 3 then moves into the required The lotus is upright without significant force. The test head 3 and the conveying arm device 2 weigh f, and at this time, they are donated and offset by the fluid existing in the fluid holding chamber.

In the case of the old cow, if the operator tried to lift the test head, the pressure in the fluid holding chamber 23 was closed, and the knife 9 was lowered by an amount corresponding to the manual lifting force. The pressure adjustment device f recognizes this force and increases accordingly: the pressure in the limb holding chamber 23, so that the set target pressure can be reached again: aspect 'if it is to lower the test head 3', the operator uses relatively little The force pushes or pulls the test head 3 down or down, so that the pressure i in the fluid holding chamber 23 is increased day by day. The pressure adjusting device 26 recognizes that in order to increase the pressure, the fluid in the fluid holding chamber 23 is dehydrated ^, and then the original set force is reached. In this way, the test head 3 is lowered. Artificially exerted force, representing -23- 548531

(20) Control #, which can cause the pressure regulating device 26... A ^ /; | L ^ ........ stick to the holding room to 2 3 or discharge fluid from the room, and Regenerate the set target pressure value. In this way, the test head 3 can be brought into the exact vertical position required for the docking without applying significant force and in a very precise manner. In the exemplary embodiment of the present invention, the lifting device includes a lead screw 21 (connected to the lead screw nut 20) and a lift rod 14 capable of vertically adjusting the height. This is the case. Height adjustment. The lead screw 21 may be a type that is performed in a simple and space-saving manner. For example, the 'lead screw 21 may be arranged inside the combination of the cylinders 7 and 8 and thereby receive protection therefrom. It is also known that, instead of using this type of lead screw, it is also conceivable to use other lifting devices to roughly set the height position, such as a 'scissor connection, hydraulic drive or any other type of lifting mechanism. In a specific embodiment of the present invention Hfl, the lifting device Η includes a space ^ 提 幵 # 14, which can be adjusted by the lead screw η (connected to the lead screw nut) ㈣, wherein the guide The cup 21 is a medium ginseng placed in the inner cylinder 7, and the lead screw 21 can be inserted into the hollow lifting rod 14 at least 4 minutes. Such a specific embodiment can be produced in a way that saves space in a short time. In an exemplary embodiment of the present invention, the fluid holding chamber 23 is defined by the top surface of Bu Yuantong 8 at the top boundary. This boundary is defined by the piston 13 at the bottom. The side edge is 23 疋 located at the top of the outer cylinder 8 and the piston 13 疋 is tightly sealed against the inner peripheral wall of the outer cylinder 8. * In an exemplary embodiment of the present invention, the pressure regulator 26 packs衽 A pressure fine regulator 28, 12b is used to hold the fluid to the fluid holding room -24- (21) 548531

The pressure in the fluid line is constant. In this fluid line, a through valve 29 is provided together with a one-way flow restrictor 30, which is connected in parallel with the 3/3 through valve 29. In this way, in the event of a power failure, the undesired test head 3 can be prevented from lowering. In addition, during a power outage,… the head 3 can also be manually upgraded in a simple manner by using human power, so that the test head 3 can be docked or undocked. As described by Ke, the lifting device 3 can be used for rough positioning of the test head 3 relative to the conveying device. For example, the 'lifting device 31 can be used to drive the test head 3 to a position ready for docking, or possibly a position ready for actuation, both of which have been described earlier. In addition, the compliant range of motion provided by the pneumatic equipment can be provided when the test head 3 is in a substantially weight-free state. The compliant range of motion is provided for accurate alignment of the test head 3 relative to the transport device 10 . Although %% invented each

For example, in the case of Xantou Xuan, U states that a screw is used as the driving mechanism, and the driving mechanism can be any type of mechanism as long as it can drive the outer cylinder and such as the test head. Give

The driving mechanism may be a screw driving mechanism (for example, a lead screw), a pneumatic driving mechanism, or any other mechanism having a vertical load for ㈣. Tomorrow. If L 4 U is added to the axis-for example, the drive mechanism has been specified to move the test head. In addition, pushing in the straight direction of Tailing, the pneumatically compliant coupling mechanism described in the article mentioned above is compliant in a vertical direction. These characteristic galleries are used for ... Apply to § HAI Measured Head »^ The axis of motion of the dagger. For example, Yan #, the driving mechanism can be used as a vertical example. Brother in any direction (such as ·· 45. Oblique -25- 548531

(22) angular direction, -7jc flat direction, etc.), and the compliance mechanism can provide compliance in any direction other than the vertical direction. Also, the term "weightlessness" is used to indicate that the test head is weightless relative to any external force (such as cable force, butt joint force, etc.) applied to the test head. Rather than just focusing on gravity. Although it has been illustrated and described with reference to a specific specific embodiment here, this service is definitely not intended to be limited to published details. Rather, it is intended to include details Various modifications that can be made and are still within the scope of patent application and equivalent fields and scopes and do not depart from the description of the representative symbols of the drawings of the invention 1 positioning device 2 transport arm device 3 test head 4 base frame 5 cylindrical device 6 units Frame 7 Inner cylinder 8 Outer cylinder 9 Cable hanger 10 Conveying device 11 Top sliding bush 12 Bottom sliding bush 13 Piston 14 Lifting rod -26- 548531 (23) 15, 16 Guiding sleeve 17 Supporting web 18, 19 Top surface 20 Lead (or ball) screw nut 21 Lead screw 21a Lead screw end 21b Shoulder 22 Journal 23 Fluid (holding) fixing 24 Opening 25 Fluid line 26. Pressure adjustment device 27 Pressure generating device 28 Fine pressure regulator 29 3 / 2-way (or distribution) valve 30 One-way flow restrictor 31 Lifting device 32, 33, 54, 56 Power supply unit 33 Control electronics housing 36 Motor turning by 38 motor Pulley 40 Drive belt 42 Lead screw pulley 44 Encoder drive pulley

-27- 548531 (24) 46 timing belt 48 encoder pulley 50 encoder 51 stopper 52 motor 53 bearing

-28-

Claims (1)

548531 Patent application scope A device for positioning only the positioning device includes: an outer cylinder; a test head for testing electronic components is connected to the outer cylinder to support the test head, the tongue I, is disposed in the In the outer cylinder; a fluid compartment-pressure regulator is defined inside the piston and the outer cylinder far from the outer cylinder, for maintaining a pressure in the fluid compartment, so that the test head is floating in Shizhan Station. θ recognizes the spear in a generally weightless position, which is adjustable in the vertical direction; an external lowering device for raising and lowering the outer cylinder; the lifting device includes a driving mechanism coupled to the piston ; And a driving device for operating the driving mechanism to push it to a predetermined position. 2. The positioning device according to the first requirement of the scope of patent application, wherein the driving mechanism is a threaded driving mechanism. The positioning device according to item 2 of the patent application, wherein the driving mechanism is a lead screw mechanism. … According to the positioning device of the scope of application for patent application, wherein the fluid compartment position 1 is above the driving mechanism, so that when the driving mechanism drives the fluid compartment in a vertical direction, the test head is also in a vertical direction Is driven. 1. The positioning device according to item 1 of the patent application scope, further comprising: a position sensor for detecting the vertical position of the test head. 548531 6. A positioning device for positioning an electronic component for testing, the positioning device includes: a> a test head, a driving mechanism for pushing the test head in a vertical direction, and a pneumatic device connected to the driving mechanism Gentle coupling mechanism; this pneumatic spear is pleasing to the ear! The knotting mechanism supports the test head under a substantially weightless bear, and provides a range of movement of the test head in a vertical direction; the air-bundle coupling mechanism is located above the driving mechanism, and is a fixed and jade-like area. move Mechanism so that when the driving mechanism pushes the test head in the vertical direction, it also pushes the pneumatic compliant coupling mechanism. The positioning device according to item 6 of the patent application, wherein the driving mechanism is threaded. 8. The positioning device according to item 6 of the scope of patent application, wherein the pneumatically compliant coupling mechanism includes a fluid chamber and a pressure regulator for maintaining a pressure in the flow chamber, so that the test head can be suspended in the Under weight. ~, 9 · A method of locating a test head for testing electronic components, comprising the following steps: 7 (a) preparing a unitary flow into a fluid chamber coupled to the test head; (b) after step (a), Use a drive mechanism to mechanically move the test head to a desired position in the vertical direction; and (c) maintain a fluid pressure in a fluid chamber intermediate the test and drive mechanism to fluidly move the test head The test head is suspended under a weightless condition. 10. The method according to item 9 of the patent application scope further includes the following steps: -2- The chamber is expanded or contracted by a piston fixed to the driving mechanism. 11. According to the method of patent application Fan Yuan 筮 ㈤ ㈤ ㈤ ㈤ ㈤ ㈤ ㈤ ㈤ ㈤ ㈤ ㈤ ㈤ ㈤ ㈤ ㈤ 9 method, still includes a step: & add an external force to adjust the position of the test head required. The method of item 9 of the scope of patent application of Gen 1 further includes a step: θ supply air into the fluid compartment 'so that the substantially reset-free condition of the test head is maintained. 13. The method according to item 9 of the patent, further comprising a step: 3 'M and air flow out of the fluid compartment, so that the substantially weightless condition of the test head is maintained. "A positioning device for a test head of an electronic test system for testing electronic components. The positioning device includes: an inner cylinder; an outer cylinder, which is arranged above the inner cylinder so that it can be used. Sliding in a longitudinal direction; a transport arm device that carries the test head and is connected to the outer cylinder; a lifting device for raising and lowering the outer cylinder; a fluid holding compartment, which is provided in the The inner and outer parts of the outer cylinder; and a pressure generating device, which is connected to the fluid through a fluid pipeline, and is designed to generate pressure fluid directly against the weight of the test head and the support arm device, wherein The 5H lifting device includes a piston arranged inside the outer cylinder, the outer cylinder can slide relative to the piston, and the pressure in the fluid holding chamber can be adjusted by 548531 to make the outer cylinder, together with the branch, It can be brought into a floating position that can be adjusted relative to the piston through a pressure adjusting device to hold the arm device and the test head. 15 • The positioning device according to item 14 of the scope of patent application, wherein the lifting device includes a lifting rod 'which can be adjusted in height by a threaded driving mechanism, and carries the piston on the top of the lifting rod. 16. According to the positioning device of the scope of patent application No. 14 or 15, the lifting device in # includes-a hollow lifting rod, which can be adjusted in height by a threaded drive mechanism, and the threaded drive mechanism A transmission mechanism with a thread is arranged at the center of the inner cylinder, and the transmission mechanism is also introduced into the hollow lifting rod. 17. The positioning device according to item 14 or 15 of the scope of patent application, wherein the fluid holding compartment is bounded by the top surface of the outer cylinder at the top and the piston is bounded by the bottom. 1 8 · The positioning device according to item 14 or 15 of the scope of patent application, wherein the pressure regulating device includes a pressure regulator for maintaining the pressure in the fluid pipeline communicating with the fluid holding compartment. In the fluid pipeline, a 3 / 2-way valve and a one-way flow restrictor are provided, and the two are connected in parallel with each other. -4-