TW543015B - Light guide plate and manufacturing method of its mold - Google Patents

Light guide plate and manufacturing method of its mold Download PDF

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Publication number
TW543015B
TW543015B TW90116304A TW90116304A TW543015B TW 543015 B TW543015 B TW 543015B TW 90116304 A TW90116304 A TW 90116304A TW 90116304 A TW90116304 A TW 90116304A TW 543015 B TW543015 B TW 543015B
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TW
Taiwan
Prior art keywords
guide plate
light guide
substrate
shaped
mold
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TW90116304A
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Chinese (zh)
Inventor
Shr-Jou Chen
Jung-Guang Shie
Jr-Han Fang
Yu-Sheng Lin
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Litek Opto Electronics Co Ltd
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Priority to TW90116304A priority Critical patent/TW543015B/en
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Publication of TW543015B publication Critical patent/TW543015B/en

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Abstract

The present invention provides a light guide plate and manufacturing method of its mold, comprising combining anisotropic etching method and isotropic etching method to form plural micro structures on the back and front faces of a substrate, forming a lower mold or an upper mold on the surface of the substrate by electroforming, and then forming a light guide plate by the lower mold or upper mold, which is characterized in forming a V-shaped, U-shaped or pyramid-shaped micro structure on the front face of the substrate by anisotropic etching, and isotropically etching a square, bowel-shaped, oval-shaped, or semi-circular micro structure on the back face of the substrate. If the substrate is a transparent substrate, after being etched by the above process, the substrate can be performed with the illumination, uniformity, and angle of view tests incorporated with a lamp, reflective sheet, diffusing sheet and prism sheet to simulate the feature of a back light module, so as to be aware of the optical feature and distribution without manufacturing a mold and injecting a light guide plate. After completing the optical verification, the subsequent electroforming is performed to manufacture the mold and shape the light guide plate.

Description

543015 五543015 five

經濟部智慧財產局員工消費合作社印製 Α7 Β7 發明說明() 發明背景: 1. 發明領域: 本發明係有關於一種導光板及其模仁之製造方法,特 別是指一種用以製作發光平面顯示器之货光模組導光板的 導光板及其模仁之製造方法。 2. 習用技術說明:Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 Description of the invention (1) Background of the invention: 1. Field of the invention: The present invention relates to a method for manufacturing a light guide plate and its mold core, in particular, a method for manufacturing a light-emitting flat display. Light guide plate of cargo light module light guide plate and manufacturing method thereof. 2. Conventional technical description:

非自發光平面顯示器(如液晶顯示器)的光源來自平面 光源模組,透射型液晶顯示器採用背光模組,反射型液晶 顯示器採用前光模組。货光模組係一種將線形光源(如冷 陰極管)或點狀光源(如光二極體)轉換成高亮度與面均齊 度的平面光源的簡潔有效模組结構。如圖3A及圖3B所示係 為習用背光模組之構造,冷陰極管1線形光源置於導光板2 端面,光源經燈管反射罩1A反射進入導光板2。由於導光 板2具光傳導功能,其内光線可圼穗定直線前進且不會衰 減散射,因此可向另側端面前進,並不會向正、實兩平面 逸出。導光板2背面製作有高密度的微结構3M破壞其内光 源全反射條件,則導光板内光源將從正面方向逸出,由於 光源的輝度會隨燈管距雛衰減。因此,微結構3之位置安 排係近燈管處密度低,遠燈管處密度高,Μ調整正面方向 逸出光源的面均齊度;及一下擴散片4,係緊接著導光板2 上端,其功能在擴散導光板正面逸出光源的分佈角度,使 得光源擴散;下擴散片也兼具模糊導光板微結構影像的功 能;及一下稜鏡片5與上棱鏡片6,係分別緊接著下擴散片 4上端,下稜鏡片5與上棱鏡Μ6之構造大致上為表面具有V 一 2- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -------------^--------^---------線 (請先閱讀背面之注意事項再填寫本頁) 543015 經濟部智慧財產局員工消費合作社印製 Α7 Β7 五、發明說明() 型溝槽之微结構的透明板體,且二者表面的v型溝槽排列 方向係相互垂直,其功能在聚集光源能量,使得光源的能 量集中在以導光板法線方向為中心的固定分佈角度内,提 昇分佈角度内光源的亮度,Μ達到增加LCD可視角範圍的 目的。上擴散片7置於背光模組最上層,以模糊下稜鏡片 與上棱鏡片微结構影像的功能為主。 導光板2背面之微结構3可為方型、碗型、橢圓形或半 圓形微結構之構造,Μ調整其正面方向逸出光源的面均齊 度;微结構大小從厘米到微米級,微结構愈小則可愈细緻 調整光源的面均齊度並可避免微结構影像破壞顯示器影像 品質。此為導光板微结構微細化需求。而導光板2正面可 為鏡面,也可設置微結構以取代前述稜鏡片功效,若為V 型微結構,則其光學結構與傳統正面鏡面结構導光板加上 一片稜鏡片合成的光學结構相同,因此可Μ去除一片稜鏡 片;若導光板正面為金字塔形微結構,則其光學结構與傳 統正面鏡面结構導光板加上二片棱鏡片合成的光學結構相 同,因此可以去除二片稜鏡片。但兩者皆須精確掌控微結 構斜面與頂角,此為導光板微结構多樣與尺寸精確化需求。 傳統導光板表面微结構製作,有Μ下方式:1.網板印 刷式,於導光板表面Μ網板印刷油墨或樹脂,局限於網板 網目的大小,微結構大小300微米Μ上,且微结構形狀不 穗定且不具有微结構多樣化能力。2.噴砂與蝕刻式,以金 屬板經噴砂與蝕刻後作為母模,經電鋪翻模與塑膠射出或 熱壓方式成型導光板。微結構形狀不穗定且不具有微结構 一3 一 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱) f 裝--------訂--------- (請先閱讀背面之注意事項#填寫本頁)The light source of a non-self-emissive flat panel display (such as a liquid crystal display) comes from a flat light source module, a transmissive liquid crystal display uses a backlight module, and a reflective liquid crystal display uses a front light module. The cargo light module is a simple and effective module structure that converts a linear light source (such as a cold cathode tube) or a point light source (such as a photodiode) into a planar light source with high brightness and surface uniformity. 3A and 3B show the structure of a conventional backlight module. A linear light source of the cold cathode tube 1 is placed on the end surface of the light guide plate 2. The light source is reflected into the light guide plate 2 through the lamp tube reflection cover 1A. Since the light guide plate 2 has a light transmitting function, the light in the light guide plate 2 can be straightly moved without attenuation, so it can advance to the other end face and not escape to the positive and solid planes. The high-density microstructure 3M made on the back of the light guide plate 2 destroys the total reflection conditions of its internal light source, so the light source in the light guide plate will escape from the front direction, because the brightness of the light source will decay with the distance from the tube. Therefore, the arrangement of the microstructure 3 has a low density near the lamp tube and a high density at the far lamp tube, and M adjusts the surface uniformity of the light source that escapes from the front direction; and the lower diffusion plate 4 is connected to the upper end of the light guide plate 2, Its function escapes the distribution angle of the light source on the front of the diffused light guide plate, so that the light source diffuses; the lower diffuser sheet also has the function of blurring the microstructured image of the light guide plate; and the lower diaphragm 5 and the upper prism sheet 6 are respectively followed by the lower diffuser. The upper end of the sheet 4, the structure of the lower cymbal sheet 5 and the upper prism M6 are roughly V-2 on the surface. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -------- ----- ^ -------- ^ --------- Line (Please read the notes on the back before filling out this page) 543015 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Α7 Β7 V. Description of the Invention The micro-structured transparent plate of the () groove, and the v-groove arrangement directions of the two surfaces are perpendicular to each other. Its function is to gather the energy of the light source, so that the energy of the light source is concentrated by the light guide plate method. In a fixed distribution angle with the line direction as the center, the brightness of the light source in the distribution angle is increased. , Μ LCD can achieve the purpose of increasing the range of viewing angle. The upper diffuser sheet 7 is placed on the uppermost layer of the backlight module, and mainly functions to blur the microstructure images of the lower diaphragm and the upper prism sheet. The microstructure 3 on the back of the light guide plate 2 can be a square, bowl, oval or semi-circular microstructure. M adjusts the uniformity of the surface of the light source that escapes from the light source. The size of the microstructure ranges from centimeters to micrometers. The smaller the microstructure, the finer the surface uniformity of the light source can be adjusted, and the microstructure image can prevent the display image quality from being damaged. This is a requirement for miniaturization of the light guide plate microstructure. The front surface of the light guide plate 2 may be a mirror surface, or a microstructure may be provided to replace the aforementioned cymbal effect. If it is a V-shaped microstructure, its optical structure is the same as that of a traditional frontal mirror structure light guide plate combined with a cymbal. Therefore, one cymbal can be removed; if the front side of the light guide plate is a pyramid-shaped microstructure, its optical structure is the same as that of a traditional frontal light guide plate combined with two prism lenses, so two cymbals can be removed. However, both of them must accurately control the microstructure bevels and apex angles. This is a requirement for the diversity of the microstructure of the light guide plate and the precise size. The surface microstructure of the traditional light guide plate is produced in the following ways: 1. Screen printing type, printing ink or resin on the surface of the light guide plate. The screen structure is limited to the size of the screen mesh, and the microstructure size is 300 microns. The structure shape is not fixed and does not have the ability to diversify microstructures. 2. Sand blasting and etching type. The metal plate is used as a master mold after sand blasting and etching, and the light guide plate is formed by electric shop turning mold and plastic injection or hot pressing. The shape of the microstructure is not fixed and does not have a microstructure. 1-3 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 public love). F Pack -------- Order ------ --- (Please read the note on the back first # Fill this page)

543015,543015,

A7 B7 五、發明說明() 多樣化能力。3.機械加工式,係以成型鑽石刀具加工母模 ,經電鏞翻模製作一模仁,再利用模仁以塑膠射出或熱壓 方式成型導光板。該方法雖可控制所成型之微結構的形狀 與尺寸,而具有微结構多樣化能力,但局限於刀具的大小 ,其微结構的尺寸在數十微米以上而無法微细化,且加工 定位精度與刀具損耗造成微結構形狀不穗定。4.光阻光刻 鋪撗式(如美國專利5,776,636),係Μ光阻塗佈基板,光 阻經曝光、顯影在基板上成型出微结構的形狀後,再Μ電 鏞翻模方式成型一模仁,再利用模仁以塑膠射出或熱壓方 式成型導光板。 由於導光板之微結構的形狀與尺寸關係到其光學性能 的表示,因此所要求的精度極高,所Μ其開發時必須反覆 試驗修正,方能得到滿意效果,然而由於傳統製it方法都 必須開模射出或熱壓成型製作出導光板後,才能加以測試 ,因此導光板開發時,必須執行上述所有製程後》導光板 才可以進行光學驗證*周而復始耗時傷財直到驗證成功。 其次導光板表面微结構的高度變異受光阻塗佈平坦度影響 ,從而限制導光板微結構微細化與尺寸精確化。另外本方 式亦限制了導光板表面微结構多樣化需求。 由於以上原因,使得習用的導光板之開發與製作上具 有相當大的缺點,本發明有鑑於此,乃苦思细索,積極研 究,加以多年從事相關產品研發之經驗,並經不斷試驗及 改良,終於發展出本發明。 3.技術背景說明: 一4 一 本紙張尺度適用中國國家標準(CNS)A4規格(21〇 X 297公釐) ------------I · I----I I « — — — — — 111 (請先閱讀背面之注意事項再填寫本頁) 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 543015 五 經濟部智慧財產局員工消費合作社印製 A7 B7 發明說明() Μ蝕刻方式製作微结構的方法可分為等向蝕刻,及非 等向蝕刻二種方法,在進行蝕刻時,若對每個方向(X y ζ 軸)的蝕刻速度皆為一樣,即為等向性蝕刻(Isotropic Etching),這種触刻可Μ藉由改變蝕刻液的組成、蝕刻溫 度、攪拌狀態等條件,而触刻出各種形狀的微結構(如方 形結構、碗形、橢圓形及半圓形微結構等)。 而非等向性蝕刻係利用蝕刻液對單结晶材料不同之晶 格方向具有不同蝕刻速度的特性進行蝕刻,因此可Μ將單 結晶材料蝕刻出特定的形狀,如V型、U型或金字塔微结構 。非等向性蝕刻製作方法,係選擇單结晶之基板,如單晶 石夕(s i 1 icon)、石英(quartz)、石申化嫁(GaAs)、(#尼)酸鍾( LiNb03)等基板,接著於基板上成長蝕刻之幕罩(mask)薄 膜,經塗佈光阻與曝光顯影,蝕刻幕罩薄膜,利用剩餘之 薄膜作為触刻幕罩(mask),再利用非等向性蝕刻液蝕刻單 结晶基板,因為非等向性蝕刻液對不同之結晶方向具有不 同之蝕刻速率,所Μ可以蝕刻出具特定角度之V型、U型或 金字塔微结構。例如若選擇晶格方向為&lt;100〉矽基板 (silicon substrate),在砂基板上成長二氧化砂(Si02), 塗佈光阻與曝光顯影後,再Μ氫氟酸(HF)触刻二氧化矽並 去除光阻後,利用剩餘的二氧化砂作為蝕刻之幕罩,進行 單精細非等向性蝕刻,蝕刻單晶砂可以使用氫氧化鉀(Κ0Η) 、氮氧化納(NaOH)、乙二胺(Ethylene-Diamine Pyrocatechol)、聯胺(N2H4)等蝕刻液,因為對不同的晶 格方向有不同的蝕刻速率,所以可Μ蝕刻出特定之晶格面 一5 一 本紙張尺度 酬家標準(CNS)A4規格(210 X 297公釐) 裝------ (請先閱讀背面之注意事填寫本頁) 543015 Α7 Β7 經濟部智慧財產局員工消費合作社印制衣 五、發明說明() ,進而在砂基板上非等向性触刻出V型、U型或金字塔微结 構。 發明概述: 本發明之主要目的,在於提供一種薪新的導光板及其 模仁的製作方法。主要係利用曝光顯影技術,並结合非等 向性蝕刻與等向性蝕刻的特性,在基板製作微結構,再進 行電鐮翻模與成型導光板。其中成型導光板正面微結構之 | 上橫仁,係利用非等向性蝕刻基板,製作v型,u型或金字 塔型等微结構,經過翻_模仁後,提供導光板之成型,使 導光板正面成型V型,U型或金字塔型等微结構,因而具備 將光線折射至特定角度、提高正面光線的亮度、控制光線 正面出射的角度之功能。成型導光板背面微結構之下模仁 ,係利用等向性蝕刻基板,製作方型、碗型、橢圓形或半 圓形微结構,經過翻鐮模仁後,提供導光板之射出,使導 光板背面成型方型、碗型、橢圓形或半圓形之微結構,因 I 而具備將光線散射之功能,改變微结構之密度,即可調整 光線散射之多寡,進而調整背光模組之輝度與均匀度,達 到控制出射光線均勻分布在整個導光板正面(出光面)的效 果。结合上、下模仁成型導光板後,導光板在背面具有與 下模仁相同的方型、碗型、橢圓形或半圓形微结構,在正 面具有與上模仁相同的v型、u型或金字塔微结構。若導光 板正面為V型微結構,則其光學结構與傳統正面鏡面結構 導光板加上一片稜鏡Μ合成的光學结構相同,因此可以去 除一片稷鏡片;若導光板正面為金字塔形微結構,則其光 -6 一 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -------------裝--------訂--------- (請先閱讀背面之注音?事項再填寫本頁) 543015 A7 B7 五、發明說明() 學結構與傳統正面鏡面結構導光板加上二片稷鏡片合成的 光學結構相同,因此可以去除二片棱鏡片,因此本發明可 達到降低背光模組零件數目、提昇產品品質與節省成本等 目的。 本發明另一目的*在於提供一種薪新的導光板開發驗 證方法,係结合非等向性蝕刻與等向性蝕刻單结晶之透光 基板,在透光基板正面非等向性蝕刻V型,U型或金字 塔型微结構,在透光基板货面等向性蝕刻方型、碗型、橢 圓形或半圓彩之微结構。透光基板經過前述製程蝕刻完成 ,即具有與塑膠射出成型的導光板具有相同的微结構,即 可Μ搭配燈管、反射片、擴散片、稜鏡片模擬背光模組的 特性,進行輝度、均匀度與視角之測試。不需製作模仁與 射出導光板即可知道光學之特性與分佈,待完成光學驗證 後,再進行後鑛之電鐮翻製模仁,與導光板之成型。省卻 既有利用印刷方式、蝕刻方式或是模仁方式製作導光板的 製程,必須執行所有製程,包括製作模具,翻禱模仁,射 出導光板後才可Μ進行光學測試之缺點。因此本發明具有 節省開發時間與成本之優點。 本發明為達成上述及其他目的,其所採用之技術手段 、元件及其功效,茲舉出幾個實施例,並配合相關圖式詳 细說明如下。 圖示說明: 圖1係為本發明第一實施例之透光基板進行光學驗證程序 之方法示意圖。 一Ί 一 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) Φ-------- tr---------線· 經濟部智慧財產局員工消費合作衽印製A7 B7 V. Description of invention () Diversification ability. 3.Machining type, which uses a diamond cutter to process the master mold, and then makes a mold kernel by turning the mold, and then uses the mold kernel to form the light guide plate by plastic injection or hot pressing. Although this method can control the shape and size of the formed microstructure, and has the ability to diversify the microstructure, it is limited to the size of the tool. The size of the microstructure is more than tens of micrometers and cannot be miniaturized. Tool wear caused the microstructure shape to be undefined. 4. Photoresist lithography (such as US Pat. No. 5,776,636), which is a M photoresist coated substrate. After the photoresist is exposed and developed, the microstructure shape is formed on the substrate, and then the M electrophotographic flip-molding method is used. The mold core is then used to mold the light guide plate by plastic injection or hot pressing. Because the shape and size of the microstructure of the light guide plate are related to the expression of its optical performance, the required accuracy is extremely high. Therefore, it must be repeatedly tested and revised during development to obtain satisfactory results. However, due to the traditional method of making it, it must be The test can only be performed after the light guide plate is made by injection molding or hot press molding. Therefore, during the development of the light guide plate, all the above processes must be performed. "The light guide plate can be optically verified. It takes time and money to complete the verification until the verification is successful." Secondly, the height variation of the microstructure on the surface of the light guide plate is affected by the flatness of the photoresist coating, thereby limiting the miniaturization and size precision of the light guide plate microstructure. In addition, this method also limits the diversified needs of the microstructure on the surface of the light guide plate. Due to the above reasons, the conventional light guide plate has considerable shortcomings in the development and production of the conventional light guide plate. In view of this, the present invention is to think hard, study actively, add years of experience in related product research and development, and continue to test and improve , Finally developed the invention. 3.Technical background description: 1-4 paper sizes are applicable to Chinese National Standard (CNS) A4 specifications (21 × X 297 mm) ------------ I · I ---- II « — — — — — 111 (Please read the notes on the back before filling out this page) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Printed by the Consumer Consumption Cooperative 543015 Five printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Printed by the Consumer Consumption Cooperative of A7 B7 There are two methods for making microstructures: isotropic etching and non-isotropic etching. During the etching, if the etching rate is the same in each direction (X y ζ axis), it is isotropic etching. (Isotropic Etching), this type of etching can be used to change the composition of the etching solution, etching temperature, stirring conditions and other conditions, and touch various shapes of microstructures (such as square structure, bowl-shaped, oval and semi-circular Microstructure, etc.). Non-isotropic etching uses an etching solution to etch different crystal lattices with different etching speeds. Therefore, single crystal materials can be etched into specific shapes, such as V-shaped, U-shaped, or pyramid micro structure. The anisotropic etching method is to select single crystal substrates, such as monocrystalline stone (si 1 icon), quartz (quartz), Shi Shenhua (GaAs), (# 尼) 酸 钟 (LiNb03) and other substrates Then, an etched mask film is grown on the substrate. After coating photoresist and exposure development, the mask film is etched, and the remaining film is used as a mask for etching, and then an anisotropic etching solution is used. Etching single crystal substrates, because the anisotropic etching solution has different etch rates for different crystalline directions, it can etch V-shaped, U-shaped or pyramid microstructures with specific angles. For example, if the lattice direction is selected as <100> silicon substrate, sand dioxide (SiO 2) is grown on the sand substrate, and then coated with photoresist and exposed and developed, and then the hydrofluoric acid (HF) is etched into the substrate. After the silicon oxide is removed and the photoresist is removed, the remaining fine sand is used as an etching curtain to perform single-fine anisotropic etching. The single crystal sand can be etched by using potassium hydroxide (K0Η), sodium oxynitride (NaOH), and ethyl acetate. Ethylene-Diamine Pyrocatechol, N2H4 and other etching solutions, because different lattice directions have different etching rates, so can be etched out of a specific lattice plane-5-a paper-scale standard (CNS) A4 specification (210 X 297 mm) Packing ------ (Please read the notes on the back and fill in this page first) 543015 Α7 Β7 Printed clothing by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs ), And then anisotropically touch the V-shaped, U-shaped or pyramid microstructures on the sand substrate. Summary of the Invention: The main object of the present invention is to provide a new light guide plate and a method for manufacturing the mold core. It mainly uses the exposure and development technology, and combines the characteristics of anisotropic etching and isotropic etching to make microstructures on the substrate, and then performs electric sickle turning and forming light guide plates. Among them, the shape of the front microstructure of the light guide plate | Shanghengren is the use of anisotropic etching of the substrate to make v-shaped, u-shaped or pyramid-shaped microstructures. After turning the mold core, the light guide plate is formed to guide the light. The front side of the light plate is formed with microstructures such as V-shaped, U-shaped or pyramid-shaped, so it has the function of refracting light to a specific angle, improving the brightness of the front light, and controlling the angle of the front light. The mold core under the microstructure on the back of the light guide plate is formed by using isotropic etching of the substrate to make square, bowl, oval or semicircular microstructures. After turning the mold core, the light guide plate is ejected to guide the light guide. The back side of the light plate is shaped into a square, bowl, oval or semi-circular microstructure. Because of I, it has the function of scattering light. By changing the density of the microstructure, you can adjust the amount of light scattering, and then adjust the brightness of the backlight module. And uniformity, to achieve the effect of controlling the uniform distribution of the emitted light on the entire front (light emitting surface) of the light guide plate. After combining the upper and lower mold cores to form the light guide plate, the light guide plate has the same square, bowl, oval, or semicircular microstructure on the back as the lower mold core, and has the same v-shaped, u Type or pyramid microstructure. If the front side of the light guide plate is a V-shaped microstructure, its optical structure is the same as that of a traditional frontal mirror light guide plate combined with a piece of 稜鏡 M synthesized optical structure, so a piece of 稷 lens can be removed; if the front of the light guide plate is a pyramid-shaped microstructure, Then its light-6 a paper size applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) ------------- installed -------- order- ------- (Please read the note on the back? Matters before filling out this page) 543015 A7 B7 V. Description of the invention () The structure is the same as that of the traditional frontal mirror structure light guide plate combined with two cymbals. Therefore, two prism sheets can be removed, so the present invention can achieve the purposes of reducing the number of parts of the backlight module, improving product quality, saving costs, and the like. Another object of the present invention is to provide a new method for developing and verifying a light guide plate, which combines a non-isotropic etching and an isotropic etching single-crystal light-transmitting substrate, and anisotropically etches a V-shape on the front surface of the light-transmitting substrate. U-shaped or pyramid-shaped microstructures, isotropically etched square, bowl, oval or semicircular microstructures on the light-transmitting substrate cargo surface. The transparent substrate is etched through the aforementioned process, that is, it has the same microstructure as the light guide plate molded by plastic injection, which can be used to match the characteristics of the backlight module, such as lamps, reflectors, diffusers, and cymbals, for brightness and uniformity. Degree and viewing angle test. You can know the characteristics and distribution of optics without making mold cores and emitting light guide plates. After the optical verification is completed, the mold cores and light guide plates of the mine will be converted. Eliminates the shortcomings of the process of making the light guide plate by printing, etching or mold method. All the processes must be performed, including making the mold, turning the mold core, and emitting the light guide plate before the optical test can be performed. Therefore, the present invention has the advantage of saving development time and cost. In order to achieve the above and other objectives, the present invention adopts technical means, components, and effects thereof, and presents several embodiments, which are described in detail below in conjunction with related drawings. Description of the drawings: Fig. 1 is a schematic diagram of a method for performing an optical verification procedure on a transparent substrate according to a first embodiment of the present invention. A paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) Φ -------- tr ----- ---- Line Printed by Consumers' Cooperatives of Intellectual Property Bureau, Ministry of Economic Affairs

經 濟 部 智 慧 財 產 局 員 X 消 費 合 作 社 印 製 543015 A7 _____B7___ 五、發明說明() 圖2A至圖2H係為本發明第一實施例之製作流程示意圖。 圖3A及3B係為習用之LCD背光模組構造示意圖。 圖4A至圖4J係為本發明第二實施例之製作流程示意圖。 圖5及圖6係為應用Μ本發明第一實施例與第二實施例製 作出之導光板之宽光模組的構造示意圖。 圖7Α至7G係為本發明第三實施例之製作流程示意圖。 圖8Α至圖8D係為本發明第三實施例製作上模仁的製作流程 示意圖。 圖9Α至圖9D係為本發明第三實施例製作下模仁的製作流程 示意圖。 圖10係為利用本發明第三實施例製作出來的上下模仁翻製 一導光板的方法示意圖。 圖號說明: 1 冷陰極管 1A 燈管反射罩 1B 反射片 2 導光板 3 微结構 4 下擴散片 5 下棱鏡片 6 上棱鏡片 7 上擴散片 10 玻璃基板 20 光阻劑 20A 單晶基板 21A 二氧化砂 22A 光阻劑 23A 微结構 24A 晶種層 21B 光阻劑 20B 透光基板 22B 微結構 -8- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -------------裝-------^訂---------線 (請先閱讀背面之注意事項再填寫本頁) 543015 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明() 40材料如鎳(Ni)、銅(Cu)、銀(As);再如圖2E戶/f示進行模 仁之電鏞在基板表面以電_方式成型一模仁50,電鐮材料 如鎳(Ni)、鎳姑(NiCo)合金、、鎳鐵(NiFe)合金、鎳含碳化 砂(SiC)等,爾後如圖2F所示,將模仁與玻璃分離並如圖 2G所示蝕刻晶種層,即完成模仁之製作。 玻璃基板表面上微结構的形狀與疏密在經過電_翻模 與成型導光板後,會轉寫在模仁50上,然後再Μ横仁50成 &gt; 型導光板,因此成型的導光板窗面具有與玻璃基板背面相 同肜狀與疏密分佈的微结構,亦與透光玻璃基板搭配燈管 、反射片、擴散片、稜鏡片所形成的背光模組一樣,具有 規格所需的輝度與視角分佈。所以利用本發明首先在透光 基板10上製作微结構,利用透光基板驗證微结構的肜狀與 疏密,再進行電鐮翻棋與成型導光板。可以省卻既有開發 導光板的過程中,必須執行所有製程,包括製作棋具,翻 鐮棋仁50 »射出成型導光板後才可以進行光學測試之缺點 ,因此本發明可Μ大幅節省開發階段之時間與成本。Printed by the Consumer Affairs Bureau of the Intellectual Property Office of the Ministry of Economic Affairs, X Consumer Affairs Co., Ltd. 543015 A7 _____B7___ V. Description of the invention () Figures 2A to 2H are schematic diagrams of the manufacturing process of the first embodiment of the present invention. 3A and 3B are schematic structural diagrams of a conventional LCD backlight module. 4A to 4J are schematic diagrams of a manufacturing process according to a second embodiment of the present invention. 5 and 6 are schematic structural diagrams of a wide light module of a light guide plate manufactured by applying the first embodiment and the second embodiment of the present invention. 7A to 7G are schematic diagrams of a manufacturing process according to a third embodiment of the present invention. 8A to 8D are schematic diagrams of a manufacturing process for manufacturing an upper mold core according to a third embodiment of the present invention. 9A to 9D are schematic diagrams of a manufacturing process for manufacturing a lower mold core according to a third embodiment of the present invention. FIG. 10 is a schematic diagram of a method for turning a light guide plate by using the upper and lower mold cores manufactured according to the third embodiment of the present invention. Description of drawing number: 1 cold cathode tube 1A lamp tube reflector 1B reflection sheet 2 light guide plate 3 microstructure 4 lower diffusion sheet 5 lower prism sheet 6 upper prism sheet 7 upper diffusion sheet 10 glass substrate 20 photoresist 20A single crystal substrate 21A Sand dioxide 22A, photoresist 23A, microstructure 24A, seed layer 21B, photoresist 20B, light-transmitting substrate 22B, microstructure -8- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) --- ---------- install ------- ^ order --------- line (please read the precautions on the back before filling this page) 543015 Employees of Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the consumer cooperative A7 B7 V. Description of the invention (40) Materials such as nickel (Ni), copper (Cu), silver (As); and then as shown in Figure 2E / f, the mold core is used for electricity. Forming a mold core 50, electric sickle materials such as nickel (Ni), nickel alloy (NiCo) alloy, nickel iron (NiFe) alloy, nickel-containing carbide (SiC), etc., as shown in Figure 2F, the mold core and The glass is separated and the seed layer is etched as shown in FIG. 2G to complete the manufacture of the mold kernel. The shape and density of the microstructure on the surface of the glass substrate are transferred to the mold core 50 after being turned over and formed into a light guide plate, and then the hengheng 50 is turned into a &gt; type light guide plate, so the light guide plate is formed. The window surface has the same microstructure and densely distributed microstructure as the back of the glass substrate. It also has the brightness required by the specifications, as is the backlight module formed by matching a light transmitting glass substrate with a lamp, reflection sheet, diffusion sheet, and cymbal sheet. With perspective distribution. Therefore, using the present invention, a microstructure is first made on a light-transmitting substrate 10, and the microstructure is verified to be dense and dense using the light-transmitting substrate, and then an electronic sickle and a light guide plate are formed. It can save the existing process of developing the light guide plate, and all the processes must be performed, including making chess equipment, turning the sickle 50. »The shortcomings of the optical test can be performed after the light guide plate is shot, so the invention can greatly save the time of the development stage. And cost.

I 圖4Α至圖4J所示之本發明第二資施例係用以於導光板 的正面成型V形、U形或金字塔形微结構,其方法為利用非 等向触刻方法,在一個基板的表面成型出V彩、ϋ形或金字 塔形微结構之後,並以模仁製造導光板的正面之V形、U形 或金字塔形微结構。 其製作流程說明如下:如圖4Α所示,其係於一單晶基 板20Α上成長一二氧化砂21Α (Si02),然後於二氧化砂21Α 上塗附一光阻劑22A (如圖48所示),然後如圖4C所示, -10- ^紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐1 ---------------------I (請先閱讀背面之注意事項再填寫本頁) 543〇15 A7 B7 經 濟 部 智 慧 財 產 局 員 工 消 費 合 社 印 製 五、發明說明() 以曝光顯影方式將光阻劑22A顯影成為多數個光阻圖案; 然後如圖4D所示,利用蝕刻液蝕刻二氧化砂21A後,再將 光阻劑去除。然後如圖4E所示,利用上述之二氧化矽21A 作為阻隔,再對單晶基板20A進行蝕刻,在單晶基板20A上 成型若干V形、U形或金字塔形的微結構23A。接著再來如 圖4F所示,將單晶基板20A表面的二氧化砂21A去除後,再 於該單晶基板20A表面植附晶種層24A (如圖4G所示);然後 如圖4H至圖4J所示,利用該單晶基板20A翻製一模仁30A後 ,再Μ該模仁30A脫模後,將模仁30A表面的晶種層24A去 除後,便可Μ利用該模仁30Α製作導光板表面的微型結構。 本發明第二實施例的方法,主要的功效係為利用蝕刻 方式製作出成型導光板正面之V形、U形或金字塔形微结構 的模仁,其相對於習用的技術,可達到微细化及更精確的 尺寸與形狀的精確度。習用技術中,成型上述V形、U形或 金字塔形微结構通常係Μ微型刀具,並Μ線性切割(Flying cutting)的方法在模仁的表面成型出微型結構,其受限於 刀具的尺寸,因此無法達到微细化的要求,且因刀具尺寸 控制不易及刀具磨損之影響,使得微型结構的尺寸與形狀 精密度不佳。而本發明之第二實施例的方法可完全克腋微 型刀具切削的技術限制,而達到微细化及更精確的尺寸與 形狀的精確度。 本發明第二實施例的方法與第一實施例的方法可Μ相 互结合蓮用,也可以分開蓮用,在分開蓮用時,可先利用 前述第一實施例Μ等向蝕刻方法製作出一塊具有導光板背 -11 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) -1— n J1 · ---- 訂---------線j 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 543015 A7 ______B7_ 五、發明說明() 面之微結構的透光基板,進行光學驗證完成後,再以非等 向蝕刻的方法製作出一塊具有導光板正面之V形、U形或金 字塔形微结構的基板,然後分別利用二塊基板翻製用以成 形導光板的上下模仁,再以該上下模仁成形導光板。 如圖5所示,係為結合本發明第一實施例與第二實施 例製成之上下模仁,經過成型之導光板的货光模組的構造 圖,其中包括··一導光板60,一設置在導光板60底面的反 射板64、一棱鏡62、一擴散片65等元件。導光板60的背 面具有方形、碗型、備圓型、半圓型之微結構63,正面具 有V形或U形之微结構61,因此其表面的微結構61係可取代 一片的棱鏡,因此使得該導光板60只需搭配一片上稜鏡 片62使用,該上稜鏡片62之表面係具有V形溝槽狀的微结 構,且其方向與導光板60表面之微結構61的方向相互垂直 。而如圖6所示,則係為利用本發明的方法在導光板60A的 表面成型金字塔狀的微結構61A,货面成形半圓形、碗彩 或備圓形的微結構62A。該若干金字塔形微結構61A係可同 時取代二片的稜鏡片,因此該實施例的费光模組中,便不 須使用稜鏡Η,而只需要搭配一反射片63A及擴散H64A— 起使用。 此外,本發明亦可Μ將前述第一、二實施例的方法结 合,在同一塊透光基板的背面Μ等向蝕刻方法製作用Μ擴 散光源的半圓形、碗形、橢圓形的微結構,而在透光基板 正面成形V形、U形或金字塔形微結構,然後再以該基板的 正面與费面分別翻製出用Μ成形導光板的上下模仁。如圖 一 12- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -------------裝--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 543015 Α7 Β7 五、發明說明() 7A至7G所示之本發明第三實施例係將前述第一、二實施例 的技術加Μ结合,利用曝光顯影技術,並结合單结晶透光 基板在不同蝕刻液中非等向性蝕刻與等向性蝕刻的特性, 在透光基板的下表面分別成形用Μ擴散光源之方形、碗形 、橢圓形、半圓形的微結構,並於透光基板上表面成形V 形、U形或金字塔形微结構,而使得能夠使用單獨一塊透 光基板同時翻製用以成形導光板之上下面微结構的方法。 首先如圖7Α所示,在單结晶之透光基板20Β正面塗佈 光阻劑21Β,曝光顯影後(圖7Β),利用非等向性蝕刻液 製作V型、U型或金字塔微结構22Β (圖7C),接著在單結 晶之透光基板(如石英)黄面塗佈光阻劑23Β (圖7D),曝光 顯影後,利用等向性蝕刻液製作方型、碗型、橢圓形或半 圓彤之微結構24Β (圖7Ε)。如圖7G所示,触刻完成之透 光玻璃基板即可先用來作為導光板,搭配燈管、反射片、 擴散片、稜鏡Μ模擬背光模組的特性,先進行輝度、均句 度之測試,測試结果可用來重新設計微結構的形狀與疏密 分布,並進行再一次的曝光顯影與蝕刻測試,如此反覆進 行直至規格所需的輝度分佈。經此過程完成之透光玻璃基 板即擁有導光板輝度規格所需的微結構形狀與疏密分佈。 如圖8Α至圖8D所示,係為利用該成型後的基板20Β的 正面成長一晶種層40Α,然後以電鋪成形方式成型一上模 仁30C,上模仁30C脫模後去除晶種層40Α ;然後如圖9Α至 圖9D所示,係為利用該成型後的基板20Β的背面成長一晶 種層40Β,然後Μ電鐮成形方式成型一下模仁30D,下模仁 -13- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) -------丨訂---------線· 經濟部智慧財產局員工消費合作社印製 543015 ( » * • Α7 ____ Β7_ •五、發明說明() 30D脫模後去除晶種層40B .,再如圖10所示,利用該上模仁 30C及下模仁30DM塑膝射出或熱壓方式成型一導光板。 成型後的導光板在背面具有與透光基板货面相同的方 型、碗型、橢圓形或半圓形微結構,在正面具有與透光基 ^ 板正面相同的V型、U型或金字塔微结構。若導光板正面為 V型微结構,則其光學结構與傳統正面鏡面结構導光板加 上一片稜鏡片合成的光學结構相同,因此可以去除一片稜 fp 鏡Μ,若導光板正面為金字塔形微结構,則其光學结構與 傳統正面鏡面结構導光板加上二片棱鏡片合成的光學結構 相同,因此可以去除二片棱鏡片,因此本發明除可大幅節 省開發階段之時間外,使模組簡單化、輕薄化,並提昇產 品品質,大幅降低成本。 -14- -------------裝--------訂- (請先閱讀背面之注意事項再填寫本頁) -線· 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)I The second embodiment of the present invention shown in FIGS. 4A to 4J is used to form a V-shaped, U-shaped, or pyramid-shaped microstructure on the front surface of the light guide plate. The method is to use an anisotropic touch-etching method on a substrate. After forming a V-color, ϋ-shaped, or pyramid-shaped microstructure on the surface, a V-shaped, U-shaped, or pyramid-shaped microstructure on the front side of the light guide plate is manufactured by using mold cores. The manufacturing process is described as follows: As shown in FIG. 4A, it is grown on a single crystal substrate 20A to grow a sand dioxide 21A (Si02), and then a photoresist 22A is coated on the sand dioxide 21A (as shown in FIG. 48). ), And then as shown in Figure 4C, -10- ^ paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm 1 ------------------- --I (Please read the precautions on the back before filling this page) 543〇15 A7 B7 Printed by the Employees ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention () The development of the photoresist 22A by majority exposure As shown in FIG. 4D, the photoresist is removed after etching the sand dioxide 21A with an etchant. Then, as shown in FIG. 4E, the above-mentioned silicon dioxide 21A is used as a barrier, and the single crystal is then used. The substrate 20A is etched, and a plurality of V-shaped, U-shaped, or pyramid-shaped microstructures 23A are formed on the single crystal substrate 20A. Next, as shown in FIG. 4F, the sand dioxide 21A on the surface of the single crystal substrate 20A is removed, and then A seed layer 24A is implanted on the surface of the single crystal substrate 20A (as shown in FIG. 4G); and then as shown in FIGS. 4H to 4J, After using the single crystal substrate 20A to make a mold core 30A, and then removing the mold core 30A, the seed layer 24A on the surface of the mold core 30A is removed, and then the mold core 30A can be used to make the surface of the light guide plate. Miniature structure. The main effect of the method of the second embodiment of the present invention is to produce a V-shaped, U-shaped, or pyramid-shaped mold structure on the front side of the light guide plate by etching. Compared with the conventional technology, it can achieve Miniaturization and more precise size and shape accuracy. In conventional technology, the above-mentioned V-shaped, U-shaped or pyramid-shaped microstructures are usually M miniature tools, and the method of M linear cutting (Flying cutting) is on the surface of the mold core. The micro-structure is formed, which is limited by the size of the tool, so it cannot meet the requirements of miniaturization, and the size and shape precision of the micro-structure is not good because of the difficult control of the tool size and the influence of tool wear. The method of the second embodiment can completely overcome the technical limitations of axillary micro-tool cutting, and achieves miniaturization and more accurate size and shape accuracy. The method of the second embodiment of the present invention is the same as the first The method of the embodiment can be used in combination with each other, or can be used separately. In the case of separating the lotus, the first embodiment M can be used to make an isotropic etching method with a light guide plate back-11-This paper is applicable to the standard China National Standard (CNS) A4 Specification (210 X 297 mm) (Please read the notes on the back before filling this page) -1— n J1 · ---- Order --------- Line j Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 543015 A7 ______B7_ V. Description of the invention The microstructured light-transmitting substrate on the surface of the invention is optically verified, and then a non-isotropic etching method is used to produce a light guide plate with a front surface. The V-shaped, U-shaped or pyramid-shaped micro-structured substrates are then respectively made of two substrates to form the upper and lower mold cores for forming the light guide plate, and the upper and lower mold cores are used to form the light guide plate. As shown in FIG. 5, it is a structural diagram of a light module that is formed by combining the first and second embodiments of the present invention with upper and lower mold cores and a shaped light guide plate, which includes a light guide plate 60, A reflecting plate 64, a prism 62, a diffusion sheet 65 and other components are arranged on the bottom surface of the light guide plate 60. The back of the light guide plate 60 has a square, bowl, round, semi-circular microstructure 63, and a V-shaped or U-shaped microstructure 61 on the front. Therefore, the microstructure 61 on the surface can replace a prism, so that The light guide plate 60 only needs to be used with an upper cymbal plate 62. The surface of the upper cymbal plate 62 has a V-shaped groove-shaped microstructure, and its direction is perpendicular to the direction of the microstructure 61 on the surface of the light guide plate 60. As shown in FIG. 6, the method of the present invention is used to form a pyramid-shaped microstructure 61A on the surface of the light guide plate 60A, and a semi-circular, bowl-colored or round-shaped microstructure 62A is formed on the cargo surface. The plurality of pyramid-shaped microstructures 61A can replace two cymbals at the same time. Therefore, in the light-emitting module of this embodiment, it is not necessary to use cymbals, but only with a reflection sheet 63A and diffusion H64A. . In addition, the present invention can also combine the methods of the first and second embodiments to produce a semicircular, bowl-shaped, or elliptical microstructure using a diffusion light source on the back surface of the same transparent substrate. Then, a V-shaped, U-shaped, or pyramid-shaped microstructure is formed on the front surface of the light-transmitting substrate, and then the upper and lower mold cores of the light guide plate formed by M are respectively formed on the front surface and the surface of the substrate. Figure 1 12- This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ------------- Installation -------- Order --- ------ line (please read the notes on the back before filling this page) 543015 Α7 Β7 V. Description of the invention () The third embodiment of the invention shown in 7A to 7G is the first and second embodiments described above. Combined with the technology of M, using exposure and development technology, and combining the characteristics of anisotropic etching and isotropic etching of single crystal light-transmitting substrates in different etching solutions, respectively forming the M-diffused light source on the lower surface of the light-transmitting substrate. Square, bowl-shaped, oval, semi-circular microstructures, and forming V-shaped, U-shaped or pyramid-shaped microstructures on the upper surface of the light-transmitting substrate, so that a single light-transmitting substrate can be simultaneously turned to form a guide Method of microstructure above and below the light plate. First, as shown in FIG. 7A, a photoresist 21B is coated on the front surface of a single-crystal light-transmitting substrate 20B, and after exposure and development (FIG. 7B), a V-shaped, U-shaped, or pyramidal microstructure 22B is produced using an anisotropic etching solution ( (Figure 7C), and then apply a photoresist 23B (Figure 7D) to the yellow surface of a single-crystal light-transmitting substrate (such as quartz). After exposure and development, use an isotropic etching solution to make square, bowl, oval, or semicircular shapes. Tongzhi microstructure 24B (Figure 7E). As shown in Figure 7G, the transparent glass substrate that has been engraved can be used as a light guide plate first. With the characteristics of a light tube, a reflective sheet, a diffuser sheet, and a simulated backlight module, the brightness and uniformity are first performed. The test results can be used to redesign the shape and density distribution of the microstructure, and perform another exposure development and etching test, and so on until the brightness distribution required by the specification is repeated. The light-transmitting glass substrate completed through this process has the microstructure shape and dense distribution required for the light guide plate brightness specification. As shown in FIG. 8A to FIG. 8D, a seed layer 40A is grown by using the front surface of the formed substrate 20B, and then an upper mold core 30C is formed by electroforming, and the upper mold core 30C is removed from the mold to remove the seed. Layer 40A; then, as shown in FIG. 9A to FIG. 9D, a seed layer 40B is grown by using the back surface of the formed substrate 20B, and then the mold core 30D is formed by the M electro-forming method. Paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) ------- 丨 Order --------- line · Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 543015 (»* • Α7 ____ Β7_ • V. Description of the invention () 30D After removing the seed layer 40B. Then, as shown in Figure 10, use the upper mold core 30C And the lower mold core 30DM plastic knee injection or hot pressing to form a light guide plate. The shaped light guide plate has the same square, bowl, oval or semi-circular microstructure on the back as the surface of the light-transmitting substrate. It has the same V-shaped, U-shaped or pyramidal microstructure as the front side of the light-transmitting substrate. If the front side of the light guide plate is V-shaped Structure, the optical structure is the same as that of the traditional frontal mirror structure light guide plate combined with a cymbal. Therefore, a prism fp mirror M can be removed. If the front side of the light guide plate is a pyramid-shaped microstructure, the optical structure is the same as the traditional front surface. The optical structure of the mirror structure light guide plate and the two prism lenses is the same, so the two prism lenses can be removed. Therefore, in addition to greatly saving the time of the development stage, the present invention simplifies the module, makes it lighter and thinner, and improves the product quality. , Significantly reducing costs. -14- ------------- Installation -------- Order- (Please read the precautions on the back before filling out this page)-Ministry of Economic Affairs Printed by the Intellectual Property Bureau Staff Consumer Cooperatives Paper size applicable to Chinese National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

543015 經濟部智慧財.4局員工消費合作社印製 A8 B8 C8 D8、申請專利範圍 9·如申請專利範圍第3項所述之導光板及其模仁之製造方 法,其中該電_模仁材料為鎳(Ni)、鎳鈷(NiCo)合金、 鎳峨(NiFe)合金、鎳含碳化矽(SiC)。 10.如申請專利範圍第5項所述之導光板及其模仁之製造方 法,其中該電禱模仁材料為鎳(Hi)、鎳鈷(NiCo)合金、 鎳纖(NiFe)合金、鎳含碳化砂(SiC)。 11· 一種導光板及其模仁之製造方法,係利用非等向性蝕 刻單結晶基板,製作V型,U型或金字塔型微结構,再經 過翻鐮上模仁後,提供導光板正面之成型,其製程包括 下列步驟; a·於一基板上形成蝕刻幕罩之薄膜; b·在基板及薄膜表面塗佈光阻; c·曝光顯影在光阻上成型光阻圖案; cL触刻薄膜; 殘餘之薄膜作為遮罩,並以非等向性触刻方式在 該單结晶基板表面製作微结構; f·在基板表面晶種層金屬化; g·利用該基板電鐮上模仁; h·將上模仁脫模後触刻晶種餍,完成上模仁之製作。 一 17 — 閱 讀 背 面 之 注 意 事 項543015 Ministry of Economic Affairs Wisdom. Printed on A8 B8 C8 D8 by the Consumer Cooperative of the 4th Bureau, patent application scope 9 · The manufacturing method of the light guide plate and its mold core as described in item 3 of the patent scope, where the electrical_mold material is Nickel (Ni), nickel-cobalt (NiCo) alloy, nickel metal (NiFe) alloy, nickel containing silicon carbide (SiC). 10. The manufacturing method of the light guide plate and the mold core according to item 5 of the scope of the patent application, wherein the material of the electric mold core is nickel (Hi), nickel cobalt (NiCo) alloy, nickel fiber (NiFe) alloy, nickel containing Carbide sand (SiC). 11. · A method for manufacturing a light guide plate and a mold core, which uses a non-isotropic etching of a single crystal substrate to produce a V-shaped, U-shaped, or pyramid-shaped microstructure, and then passes through the mold core to provide the front surface of the light guide plate. The manufacturing process includes the following steps: a. Forming an etching mask film on a substrate; b. Coating a photoresist on the substrate and the surface of the film; c. Forming a photoresist pattern on the photoresist by exposure and development; cL etching film; The remaining film is used as a mask, and microstructures are made on the surface of the single crystal substrate in an anisotropic way; f. Metallization of the seed layer on the surface of the substrate; g. Mold cores on the substrate electric sickle; h. After removing the upper mold kernel, touch the seed seed 餍 to complete the production of the upper mold kernel. I 17 — Read the Notes on the Behind Order 本紙張又度適用中國國家標準(CNS ) A4規格(210X297公釐)This paper is again suitable for China National Standard (CNS) A4 (210X297 mm)
TW90116304A 2001-07-03 2001-07-03 Light guide plate and manufacturing method of its mold TW543015B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI408418B (en) * 2004-05-10 2013-09-11 Saint Gobain Textured transparent panel with pyramidal sloping patterns
TWI422874B (en) * 2006-12-12 2014-01-11 Samsung Display Co Ltd Optical sheet and method for fabricating the same
CN107435818A (en) * 2016-05-26 2017-12-05 技嘉科技股份有限公司 Luminous Ring and radiator fan

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI408418B (en) * 2004-05-10 2013-09-11 Saint Gobain Textured transparent panel with pyramidal sloping patterns
TWI422874B (en) * 2006-12-12 2014-01-11 Samsung Display Co Ltd Optical sheet and method for fabricating the same
CN107435818A (en) * 2016-05-26 2017-12-05 技嘉科技股份有限公司 Luminous Ring and radiator fan

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