TW538073B - Aqueous dispersion for forming conductive layer, conductive layer, electronic component, circuit board and method for manufacturing the same, and multilayer wiring board and method for manufacturing the same - Google Patents

Aqueous dispersion for forming conductive layer, conductive layer, electronic component, circuit board and method for manufacturing the same, and multilayer wiring board and method for manufacturing the same Download PDF

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TW538073B
TW538073B TW89124708A TW89124708A TW538073B TW 538073 B TW538073 B TW 538073B TW 89124708 A TW89124708 A TW 89124708A TW 89124708 A TW89124708 A TW 89124708A TW 538073 B TW538073 B TW 538073B
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Taiwan
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substrate
conductive
layer
wiring
insulating layer
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TW89124708A
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Chinese (zh)
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Nobuyuki Ito
Kenichi Koyama
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Jsr Corp
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Abstract

An aqueous dispersion of the invention has conductive microparticles and organic particles dispersed in an aqueous medium and can form a conductive layer of a volume resistivity of for example 10<-4> Omega.m or less by electrodeposition. A circuit board of the invention is equipped in an insulating layer and a conducting layer, which includes conducting through parts that pass through the insulating layer, and is favorably manufactured by the invention's method that includes an electrodeposition using an aqueous dispersion of the invention as a electrodeposition solution and using the conductive foil as one of the electrodes after closing the openings at one end of the through holes formed on the insulating layer by means of a conductive foil. A multilayer wiring board of the invention is equipped in a core wiring substrate, having substrate wiring layers that are mutually connected electrically formed on both surfaces of an insulating substrate, an insulating layer that is laminated onto at least one of the surfaces of the core wiring substrate, a wiring layer that is formed on the insulating layer, and interlayer shorting parts that pass through the insulating layer and electrically connect the wiring layer to the abovementioned substrate wiring layer. These interlayer shorting parts are comprised of conductors formed by electrodeposition using an aqueous dispersion of the invention as an electrodeposition solution. Since the conductive layer or the conductor is formed by electrodeposition, the productivity is good and the connection reliability is high.

Description

538073 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs

A 一 _ B7 五、發明說明(1 ) 技術領域 本發明係有關導電層形成用水性分散液,由此水性分 散液所形成之導電層,具備此導電層之電子零件,具備使 用上述導電層形成用水性分散液所形成之導電層的電路基 板及其製造方法,多層配線板及其製造方法。 背景技術 以往,基板上形成成爲電極或配線圖形等之導電層之 方法之一係採用鍍金屬的方法。另外形成此導電層之其他 方法例如採用藉由塗佈或印刷等方法將導電性粉末分散於 液狀之熱硬化性樹脂材料中所成之導電漿料粘附於基板上 ,然後使樹脂熱硬化的方法。又,特開平9- 1 3489 1號公報中 揭不將金屬之超微粒子均勻分散於有機分散媒中之金屬超 微粒子分散液塗佈於半導體基板後,加熱除去有機溶媒, 同時使金屬超微粒子熔合之薄膜形成方法。 近年,隨著電子機器需要高功能化,小型化,而使用 集成度高,電極數多之電子零件,且需要以高密度安裝這 種電子零件。因此,電子零件用配線板或搭載電子零件用 配線板係使用僅絕緣性基板之單面形成配線層所成之單面 印刷配線板,或基板之單面或雙面交互層合絕緣層與配線 層所成之多層印刷配線板取代基板之兩面形成配線層所成 之兩面印刷配線板。 以往,製造多層印刷配線板的方法例如將絕緣性之兩 面形成彼此以電連接之配線層所成之多數厚芯配線基板, -4 - ------------f--------訂---------線· (請先閱讀背面之注意事項再填寫本頁) 538073 經濟部智慧財產局員工消費合作社印製 A‘ B7 五、發明說明(2 ) 與熱硬化性樹脂預浸體板交互層疊,熱壓粘,然後介於絕 緣層將多數厚芯配線基板進行液體層合的方法(以下稱爲 「層合壓製法」)爲主流。 此層合壓製法中,爲了以電連接相鄰之厚芯配線基板 之配線層間時,無法形成僅貫通該配線層間之絕緣層之厚 度方向所延伸的層間短路部(底孔及非貫穿孔),而必須 形成貫通該配線板整體之厚度方向所延伸之層間短路部( 通孔),因此很難形成高密度之配線層。 因此,最近製造具有高密度之配線層之多層配線板的 方法例如在厚芯配線基板上依序一層一層形成絕緣層與配 線層之增層法受囑目。依據此增層法可藉由僅貫通該配線 層間之絕緣層之厚度方所向延伸之短路部,進行各配線層 間之電連接,因此可形成高密度之配線層。 具體而言,此增層法係在厚芯配線基板表面形成具有 與必須形成之層間短路部(導孔)對應之貫通孔的絕緣層 後,此絕緣層之貫通孔內形成構成層間短路部之導電體, 同時該絕緣層表面形成配線層,藉由所定次數重複此步驟 可得到目的之多層配線板。 上述在厚芯配線基板表面形成具有貫通孔之絕緣層的 方法,例如有將液狀之放射線硬化性樹脂材料塗佈於厚芯 配線基板後,該塗膜上實施曝光處理及顯影處理形成具有 與目的之短路部(導孔)對應之貫通孔之絕緣層的方法, 將液狀之熱硬化性樹脂材料塗佈或將薄片狀之熱硬化性樹 脂材料配置於厚芯基板表面,藉由加熱處理形成絕緣層, 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱) --------------------訂·-------- (請先閱讀背面之注意事項再填寫本頁) 538073 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 Λ7 B7 五、發明說明(3 ) 以雷射照射該絕緣層形成與目的之層間短路部對應 孔的方法等。 絕緣層之貫通孔的內面形成導電體的方法例如 學鑛敷法在絕緣層之貫通孔的內面堆積金屬形成金 ,以此金屬薄膜作爲電極’藉由電鍍法堆積金屬形 要厚度之金屬層所構成之導電體的方法,藉由化學 在絕緣層之貫通孔的內面堆積金屬形成由所要厚度 層所構成之導電體的方法,例如藉由網版印刷等之 將上述之導電漿料塡充於絕緣層之貫通孔內,該導 進行硬化處理形成將導電性粉末分散於熱硬化性樹 成之導電體的方法等爲人所知。 但是上述之鍍敷法由金屬離子之鍍膜之成長速 ,因此形成厚度(例如膜厚1 0 // m以上)之導電 足上述通孔或導孔之導電層,或上述層間短路部等 成所需厚度之金屬層需要相當長的時間,因此無法 生產性。特別是上述增層法中,每次形成絕緣層時 在該絕緣層上形成貫通其厚度方向之層間短路部, 鍍敷之金屬的析出速度慢對於生產性有很大影響。 又使用導電漿料或金屬之超微粒子分散液以塗 刷等形成導電層的方法時,很難精密控制製得之導 厚度,導電層之形成位置等。特別是由樹脂與導電 所構成之導電漿料一般粘度較高(例如2 5 °C時, P a · s ),在形成位置或形狀等方面而言很難形 度之導電層。絕緣層之貫通孔之直徑較小時(例如 之貫通 藉由化 屬薄膜 成由所 鍍敷法 之金屬 印刷法 電漿料 脂中所 度緩慢 膜或滿 時’形 得到高 ’必須 因此以 佈,印 電層的 性粉末 1 0 0 成高精 1 0 0 --------------------訂---------線# (請先閱讀背面之注意事項再填寫本頁) 538073 ___ B7___ 五、發明說明(4 ) // m以下),很難將這種高粘度之導電漿料確實塡充於該 貫通孔內’因此無法得到信賴性高之多層配線基板。 (請先閱讀背面之注意事項再填寫本頁) 特開平9 一 1 3 4 8 9 1號公報所載之方法雖可降低 金屬之超微粒子分散液之粘度,但不含樹脂成分,欲形成 較厚之導電層時’導電層會產生龜裂,且導電層對於基板 之粘著性也低。 本發明之目的係提供藉由電極澱積法可以高效率形成 高精度之導電層之導電層形成用水性分散液,由此水性分 散液所形成之導電層,及具備此導電層之電子零件及電路 基板。 本發明之其他目的係提供含有將上述導電層形成用水 性分散液用於電極澱積液形成導電層之步驟之高效率且高 精度之電路基板的製造方法。 本發明之其他目的係提供生產性高,且連接信賴性高 之多層配線板及其製造方法。 發明之揭示 經濟部智慧財產局員工消費合作社印製 依據本發明可提供下述構成之導電層形成用水性分散 液,導電層,電子零件,電路基板及其製造方法,及多層 配線板及其製造方法,達成上述目的。 (1 ) 一種導電層形成用水性分散液,其特徵係將數 目平均粒子徑1 // m以下之導電性微粒子與由聚合性化合 物及聚合物中之至少一種所構成之有機粒子分散於水性媒 體中,藉由電極澱積可形成導電層。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538073 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) A7 B7_____ 五、發明說明(5 ) (2 )如上述(1 )項之導電層形成用水性分散液, 其中上述導電性微粒子與有機粒子之體積比爲9 9 : 1〜 4〇:6〇。 (3 )如上述(1 )項之導電層形成用水性分散液, 其係將上述導電性微粒子分散於有機溶媒之導電性微粒子 分散液與將上述有機粒子分散於水性媒體之有機粒子分散 液予以混合所成。 (4) 一種導電層,其特徵係藉由使用上述(1 )〜 (3 )項中任一項之導電層形成用水性分散液之電極澱積 所形成,體積電阻率10— 4Ω· cm以下。 (5 ) —種電子零件,其特徵係具備藉由使用上述( 1 )〜(3 )項中任一項之導電層形成用水性分散液之電 極澱積所形成之導電層。 (6 ) —種電路基板,其特徵係具有絕緣層,及藉由 以(1 )〜(3 )項中任一項之導電層形成用水性分散液 爲電極澱積液之電極澱積法所形成,且含有貫通該絕緣層 之貫通導電部的導電層。 (7 ) —種電路基板之製造方法,其特徵係使用上述 (1 )之導電層形成用水性分散液之電路基板的製造方法 ,具備 (a )絕緣層上形成貫通孔之步驟, (b)該絕緣層之其中之一的表面含有該貫通孔之一 開口端上之部分設置導電性箔的步驟, (c )將上述導電層形成用水性分散液用於電極澱積 -8 - ~~&quot; (請先閱讀背面之注意事項再填寫本頁) 訂---------線一 經濟部智慧財產局員工消費合作社印製 538073 A7 B7 五、發明說明(6 ) 液,藉由以上述導電性箔作爲其中之一之電極之電極澱積 法,在上述貫通孔內形成貫通孔導電部的步驟。 (8 ) —種電路基板之製造方法,其特徵係使用上述 (1 )之導電層形成用水性分散液之電路基板的製造方法 ,具備 (a )形成導體圖形之厚芯配線基板上形成絕緣層的 步驟, (b )該絕緣層形成圖形,形成具有使上述導體圖形 之一部份露出之貫通孔之絕緣層圖形的步驟, (c )藉由以該絕緣層圖形爲掩模材料之化學鍍敷, 在含有上述貫通孔內之部分形成化學鍍層的步驟, (d )將上述導電層形成用水性分散液用於電極澱積 液,藉由以上述導體圖形及上述化學鍍層作爲其中之一之 電極之電極澱積法,形成含有上述貫通孔內之貫通孔導電 部之導電層的步驟。 (9 ) 一種電路基板之製造方法,其特徵係將上述( 7 )或(8 )項之方法所製得之電路基板進行多層層合。 (1 0 ) —種多層配線板,其特徵係具有:絕緣性基 板之兩面形成彼此以電連接之基板配線層所成之厚芯配線 基板,層合於此厚芯配線基板之至少一面之絕緣層,此絕 緣層上所形成之配線層,此配線層以電連接前述基板配線 層之貫通上述絕緣層之厚度方向之延伸之層間短路部之多 層配線基板,上述層間短路部係由筒分子物質中含有導電 性微粒子所成之導電體所構成,該導電體係導電性微粒子 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 538073 經濟部智慧財產局員工消費合作社印製 Λ7 B7 五、發明說明(7 ) 與由聚合性化合物及聚合物中之至少一種所構成之有機粒 子分散於水性媒體中所構成之電極澱積液中,藉由電極殿 積處理所形成者。 (1 1 )如上述(1 〇 )項之多層配線板,其中構成 層間短路部之導電體之導電性微粒子之比例之體積分率爲 4 0 〜9 9 %。 (1 2 )如上述(1 〇 )項之多層配線板,其係具有 :在絕緣性基板之兩面形成彼此以電連接之基板配線層所 成之厚芯配線基板,層合於此厚芯配線基板之至少一面之 絕緣層,此絕緣層上所形成之配線層,此配線層以電連接 上述基板配線層之貫通上述絕緣層之厚度方向之延伸之層 間短路部的多層配線基板, 上述層間短路部係由高分子物質中含有導電性微粒子 所成之導電體所構成,該導電體係導電性微粒子與由聚合 性化合物及聚合物中之至少一種所構成之有機粒子分散於 水性媒體中所構成之電極澱積液中,藉由電極澱積處理所 形成者, 上述厚芯配線基板具有彼此以電連接在絕緣性基板之 兩面所形成之基板配線層之貫通該絕緣性基板之厚度方向 延伸之基板短路部, 該基板短路部係由高分子物質中含有導電性微粒子所 成之導電體所構成,該導電體係導電性微粒子與由聚合性 化合物及聚合物中之至少一種所構成之有機粒子分散於水 性媒體中所構成之電極澱積液中,藉由電極澱積處理所形 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -10 - --------------------IT---------^· (請先閱讀背面之注意事項再填寫本頁) 538073 A7 ___ B7 五、發明說明(8 ) 成者。 (請先閱讀背面之注意事項再填寫本頁) (1 3 )如上述(1 2 )項之多層配線板,其中構成 層間短路部及/或基板短路部之導電體之導電性微粒子之 比例爲4 0〜9 9 %。 (1 4 ) 一種多層配線板之製造方法,其係製造如上 述(1 0 )項之多層配線板的方法,其特徵具有下述步驟 :準備由絕緣性基板,此絕緣性基板之一面所形成之基板 配線層,在上述絕緣性基板之另一面上形成,且與該基板 配線層以電連接之金屬層所構成之厚芯配線基板, 此厚芯配線基板之一面上形成具有與應在該基板配線 層上形成之層間短路部對應所形成之貫通孔之絕緣層, 以形成此絕緣層之厚芯配線基板之基板配線層作爲析 出用電極,由導電性微粒子與由聚合性化合物及聚合物中 之至少一種所構成之有機粒子分散於水性媒體中所構成之 電極澱積液中,藉由電極澱積處理形成在該絕緣層之貫通 孔內形成構成層間短路部之導電體的步驟。 經濟部智慧財產局員工消費合作社印製 (1 5 )如上述(1 4 )項之多層配線板之製造方法 ,其中形成構成上述層間短路部之導電體之電極澱積液之 導電性微粒子與有機粒子之體積比爲9 9 : 1〜4 0 : 6〇。 (1 6 ) —種多層配線板之製造方法,其係製造如申 請專利範圍第1 2項之多層配線板的方法,其特徵係具有 下述步驟:準備具有絕緣性基板與此絕緣性基板之至少其 他面所形成之金屬層之基板形成材料, 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538073 A7 _ B7 五、發明說明(9 ) 形成貫通此基板形成材料之絕緣性基板之厚度方向之 貫通孔, (請先閱讀背面之注意事項再填寫本頁) 以此基板形成材料之金屬層作爲析出用電極,由導電 性微粒子與由聚合性化合物及聚合物中之至少一種所構成 之有機粒子分散於水性媒體中所構成之電極澱積液中,藉 由電極澱積處理在該絕緣性基板之貫通孔內形成構成層間 短路部之導電體,然後在上述絕緣性基板之一面上形成基 板配線層,形成由在上述絕緣性基板之一面上形成之基板 配線層;在上述絕緣性基板之另一面所形成,且與該基板 配線層以電連接之上述金屬層所構成之厚芯配線基板, 此厚芯配線基板之一面上形成具有與應在該基板配線 層上形成之層間短路部對應形成之貫通孔的絕緣層, 以形成此絕緣層之厚芯配線基板之基板配線層作爲析 出用電極,由導電性微粒子與由聚合性化合物及聚合物中 之至少一種所構成之有機粒子分散於水性媒體中所構成之 電極澱積液中,藉由電極澱積處理在此絕緣層之貫通孔內 形成構成層間短路部之導電體的步驟。 經濟部智慧財產局員工消費合作社印製 (1 7 )如上述(1 6 )項之多層配線板之製造方法 ,其中形成構成上述層間短路部之導電體之電極澱積液及 /或形成構成上述基板短路部之導電體之電極澱積液之導 電性微粒子與有機粒子之體積比爲9 9 : 1〜4 0 : 6 0 〇 以下,更詳細說明本發明。 (a )導電性微粒子 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538073A _ B7 V. Description of the Invention (1) Technical Field The present invention relates to the formation of an aqueous dispersion of a conductive layer, a conductive layer formed from the aqueous dispersion, an electronic component provided with the conductive layer, and a device formed using the conductive layer. A circuit board with a conductive layer formed using an aqueous dispersion and a method for manufacturing the same, a multilayer wiring board and a method for manufacturing the same. BACKGROUND ART Conventionally, one of the methods for forming a conductive layer such as an electrode or a wiring pattern on a substrate is a metal plating method. In addition, other methods of forming the conductive layer include, for example, applying a conductive paste in which a conductive powder is dispersed in a liquid thermosetting resin material by a method such as coating or printing to adhere the conductive paste to a substrate, and then heat curing the resin. Methods. In addition, Japanese Patent Application Laid-Open No. 9- 1 3489 1 discloses that a metal ultrafine particle dispersion liquid that does not uniformly disperse metal ultrafine particles in an organic dispersion medium is coated on a semiconductor substrate, and the organic ultrafine particles are fused while being heated to melt the metal ultrafine particles. Thin film formation method. In recent years, as electronic devices have been required to be highly functional and miniaturized, electronic components with a high degree of integration and a large number of electrodes have been used, and such electronic components have to be mounted at high density. Therefore, the wiring board for electronic parts or the wiring board for mounting electronic parts is a single-sided printed wiring board formed by forming a wiring layer on only one side of an insulating substrate, or a single-sided or double-sidedly laminated insulating layer and wiring of the substrate The multilayer printed wiring board formed by layers replaces the two-sided printed wiring boards formed by wiring layers on both sides of the substrate. In the past, a method for manufacturing a multilayer printed wiring board, for example, formed a plurality of thick-core wiring substrates formed by insulating two sides with wiring layers electrically connected to each other, -4------------- f-- ------ Order --------- Line · (Please read the notes on the back before filling this page) 538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A 'B7 V. Invention Description ( 2) The method of laminating alternately with a thermosetting resin prepreg board, thermocompression bonding, and then laminating most thick core wiring substrates with an insulating layer (hereinafter referred to as "lamination pressing method") is the mainstream. In this laminated pressing method, in order to electrically connect the wiring layers between adjacent thick-core wiring substrates, an interlayer short-circuit portion (bottom hole and non-through hole) extending only in the thickness direction of the insulating layer passing through the wiring layer cannot be formed. However, it is necessary to form an interlayer short-circuit portion (through-hole) extending through the entire thickness of the wiring board, so it is difficult to form a high-density wiring layer. Therefore, recently, a method for manufacturing a multilayer wiring board having a high-density wiring layer, such as a layer-up method of sequentially forming an insulating layer and a wiring layer on a thick-core wiring substrate, has been proposed. According to this build-up method, the electrical connection between the wiring layers can be performed by the short-circuit portion extending only in the direction of the thickness of the insulating layer between the wiring layers, so that a high-density wiring layer can be formed. Specifically, this layer-increasing method is to form an insulating layer having a through hole corresponding to an interlayer short-circuit portion (a via hole) that must be formed on the surface of a thick-core wiring substrate, and then form an interlayer short-circuit portion in the through-hole of the insulating layer. At the same time, a conductive layer is formed on the surface of the insulating layer, and the target multilayer wiring board can be obtained by repeating this step a predetermined number of times. The above-mentioned method for forming an insulating layer having a through-hole on the surface of a thick-core wiring substrate includes, for example, applying a liquid radiation-curable resin material to the thick-core wiring substrate, and then performing an exposure process and a development process on the coating film to have A method of insulating a through-hole corresponding to a short-circuit portion (a via hole) of a target by applying a liquid thermosetting resin material or arranging a thin sheet of thermosetting resin material on the surface of a thick core substrate and subjecting it to heat treatment Form an insulation layer, this paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 public love) -------------------- Order · ----- --- (Please read the precautions on the back before filling out this page) 538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Λ7 B7 V. Description of the invention (3) Interlayer short circuit between the formation and purpose of the insulating layer with laser irradiation How to deal with holes, etc. The method of forming a conductor on the inner surface of the through hole of the insulating layer, for example, depositing metal on the inner surface of the through hole of the insulating layer to form gold, and using the metal thin film as an electrode to deposit a metal having a thickness of a metal shape by an electroplating method A method for forming a conductive body composed of layers by chemically depositing a metal on the inner surface of a through-hole of an insulating layer to form a conductive body composed of a layer having a desired thickness. For example, the above-mentioned conductive paste is printed by screen printing. A method of filling the through-holes of the insulating layer with a hardening treatment to form a conductive body in which a conductive powder is dispersed in a thermosetting tree is known. However, the above-mentioned plating method is based on the growth rate of the metal ion plating film. Therefore, a conductive layer having a thickness (for example, a film thickness of 10 // m or more) is sufficient as the conductive layer of the above through-hole or via hole, or the above-mentioned interlayer short-circuit portion. A thick metal layer requires a considerable time, and therefore cannot be productive. In particular, in the above-mentioned build-up method, each time an insulating layer is formed, an interlayer short-circuiting portion is formed on the insulating layer through the thickness direction, and the slow deposition rate of the plated metal greatly affects the productivity. When a conductive paste or a metal ultrafine particle dispersion is used to form a conductive layer by painting or the like, it is difficult to precisely control the thickness of the prepared conductive layer and the position where the conductive layer is formed. In particular, a conductive paste composed of a resin and a conductive material generally has a high viscosity (for example, P a · s at 25 ° C), and it is difficult to form a conductive layer in terms of position or shape. When the diameter of the through-hole of the insulation layer is small (for example, the penetration through the metal thin film is formed by the metal film printing method of the electroplating method, the film is slowly formed or when the shape is full, the shape must be high. , The sexual powder of printed layer 1 0 0 into high-precision 1 0 0 -------------------- Order --------- line # (Please Please read the precautions on the back before filling this page) 538073 ___ B7___ V. Description of the invention (4) // m or less), it is difficult to fill this high-viscosity conductive paste into the through-hole. Reliable multilayer wiring board. (Please read the precautions on the reverse side before filling out this page) Although the method described in JP-A-Hei 9-1 3 4 8 9 1 can reduce the viscosity of metal ultrafine particle dispersions, it does not contain resin components. When the conductive layer is thick, cracks may occur in the conductive layer, and the adhesion of the conductive layer to the substrate is also low. An object of the present invention is to provide a conductive dispersion layer that can form a conductive layer with high accuracy by an electrode deposition method to form an aqueous dispersion, a conductive layer formed from the aqueous dispersion, and an electronic part having the conductive layer and Circuit board. Another object of the present invention is to provide a method for producing a circuit board with high efficiency and high precision, which comprises the step of forming the conductive layer using the above-mentioned aqueous dispersion for forming a conductive layer for an electrode deposition solution. Another object of the present invention is to provide a multilayer wiring board having high productivity and high connection reliability, and a method for manufacturing the same. Disclosure of the Invention Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, according to the present invention, an aqueous dispersion for forming a conductive layer, a conductive layer, an electronic component, a circuit board and a manufacturing method thereof, and a multilayer wiring board and a manufacturing method thereof can be provided according to the present invention. Method to achieve the above purpose. (1) An aqueous dispersion for forming a conductive layer, which is characterized by dispersing conductive fine particles having a number average particle diameter of 1 // m or less and organic particles composed of at least one of a polymerizable compound and a polymer in an aqueous medium. In this case, a conductive layer can be formed by electrode deposition. This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) 538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) A7 B7_____ V. Description of the invention (5) (2) The aqueous dispersion for forming the conductive layer according to the item (1) above, wherein the volume ratio of the conductive fine particles to the organic particles is 99.9: 1 to 4:60. (3) The aqueous dispersion for forming the conductive layer according to the above item (1), which is a conductive fine particle dispersion liquid in which the conductive fine particles are dispersed in an organic solvent and an organic particle dispersion liquid in which the organic particles are dispersed in an aqueous medium. Made by mixing. (4) A conductive layer characterized by being formed by electrode deposition using an aqueous dispersion of the conductive layer formed in any one of the items (1) to (3) above, with a volume resistivity of 10-4 Ω · cm or less . (5) An electronic component characterized by including a conductive layer formed by electrode deposition of an aqueous dispersion using the conductive layer according to any one of (1) to (3) above. (6) A circuit substrate characterized by having an insulating layer and an electrode deposition method by using an aqueous dispersion formed from the conductive layer according to any one of (1) to (3) as an electrode deposition solution A conductive layer is formed and includes a through conductive portion penetrating the insulating layer. (7) A method for manufacturing a circuit board, which is characterized in that the method for manufacturing a circuit board using the above-mentioned conductive layer to form an aqueous dispersion is provided with (a) a step of forming a through hole in an insulating layer, (b) The surface of one of the insulating layers includes a step of disposing a conductive foil on a part of an open end of the through hole, (c) forming the above conductive layer into an aqueous dispersion for electrode deposition -8-~~ &quot; (Please read the precautions on the back before filling this page) Order --------- Printed by the Consumers Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 538073 A7 B7 V. Description of the invention (6) An electrode deposition method using the conductive foil as one of the electrodes to form a through-hole conductive portion in the through-hole. (8) A method for manufacturing a circuit board, which is characterized in that the method for manufacturing a circuit board using the conductive layer for forming an aqueous dispersion of the above (1) is provided, and (a) an insulating layer is formed on a thick core wiring board for forming a conductor pattern (B) forming a pattern of the insulating layer to form an insulating layer pattern having a through hole exposing a part of the conductor pattern, and (c) electroless plating using the insulating layer pattern as a mask material A step of forming an electroless plating layer on a portion containing the above-mentioned through hole, (d) using the above-mentioned conductive layer forming aqueous dispersion solution for the electrode deposition solution, and using the conductor pattern and the electroless plating layer as one of them The electrode electrodeposition method is a step of forming a conductive layer including the through-hole conductive portion in the through-hole. (9) A method for manufacturing a circuit substrate, characterized in that the circuit substrate prepared by the method of the item (7) or (8) above is laminated in multiple layers. (10) A multilayer wiring board characterized by having a thick core wiring substrate formed by forming a substrate wiring layer electrically connected to both sides of an insulating substrate, and laminating on at least one side of the thick core wiring substrate. Layer, a wiring layer formed on this insulating layer, this wiring layer is a multilayer wiring substrate that electrically connects the substrate wiring layer and the interlayer short-circuiting portion extending through the thickness direction of the insulating layer, the interlayer short-circuiting portion is made of a tube molecular substance The conductive particles made of conductive particles are contained in the conductive system. The conductive particles of this conductive system are in accordance with China National Standard (CNS) A4 (210 X 297 mm). ----------- --------- Order --------- line (please read the notes on the back before filling this page) 538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Λ7 B7 V. Description of the invention (7) Formed by dispersing organic particles composed of at least one of a polymerizable compound and a polymer in an electrode deposition solution composed of an aqueous medium and subjecting the electrode to deposition. (1 1) The multilayer wiring board according to the item (10) above, wherein the volume fraction of the proportion of the conductive fine particles constituting the conductor in the interlayer short-circuit portion is 40 to 99%. (1 2) The multilayer wiring board according to the item (10) above, which has a thick core wiring substrate formed by forming substrate wiring layers electrically connected to each other on both sides of an insulating substrate, and laminated on the thick core wiring An insulating layer on at least one side of a substrate, and a wiring layer formed on the insulating layer. This wiring layer is a multilayer wiring substrate that electrically connects the substrate wiring layer and the interlayer short-circuiting portion extending through the thickness direction of the insulating layer. The part is composed of a conductive body made of conductive fine particles contained in a polymer substance, and the conductive fine particles of the conductive system are dispersed in an aqueous medium with organic particles made of at least one of a polymerizable compound and a polymer. In the electrode deposition solution, formed by electrode deposition, the thick-core wiring substrate has a substrate wiring layer formed by electrically connecting the two sides of an insulating substrate to each other, and a substrate extending in a thickness direction of the insulating substrate. A short-circuit part, which is composed of a conductive body made of conductive fine particles in a polymer substance, and the conductive system Electrical particles and organic particles composed of at least one of a polymerizable compound and a polymer are dispersed in an electrode deposition solution composed of an aqueous medium, and the paper is formed by electrode deposition treatment to the Chinese national standard ( CNS) A4 specification (210 X 297 mm) -10--------------------- IT --------- ^ · (Please read first Note on the back, please fill out this page again) 538073 A7 ___ B7 V. Description of Invention (8) The person who completed. (Please read the precautions on the back before filling this page) (1 3) The multilayer wiring board as described in (1 2) above, in which the proportion of conductive particles constituting the inter-layer short-circuit portion and / or the substrate short-circuit portion of the conductive particles is 4 0 ~ 9 9%. (1 4) A method for manufacturing a multilayer wiring board, which is a method for manufacturing a multilayer wiring board as described in the above item (1 0), which has the following steps: preparing an insulating substrate, which is formed on one side of the insulating substrate A thick-core wiring substrate is formed on the other surface of the insulating substrate, and is a thick-core wiring substrate made of a metal layer electrically connected to the substrate-wiring layer. The interlayer short-circuit portion formed on the substrate wiring layer corresponds to the insulating layer of the through-hole formed. The substrate wiring layer of the thick-core wiring substrate forming the insulating layer is used as a precipitation electrode, and conductive fine particles and polymerizable compounds and polymers are used. Organic particles composed of at least one of these are dispersed in an electrode deposition solution composed of an aqueous medium, and an electrode deposition process is performed to form a conductive body constituting an interlayer short-circuit portion in a through hole of the insulating layer. The method for manufacturing (1 5) the multilayer wiring board as described in (1 4) above by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, wherein the conductive fine particles of the electrode deposition liquid forming the conductive body constituting the above-mentioned interlayer short-circuit portion and the organic The volume ratio of the particles is 9 9: 1 to 4 0: 60. (16) A method for manufacturing a multilayer wiring board, which is a method for manufacturing a multilayer wiring board such as the item 12 in the scope of the patent application, which is characterized by having the following steps: preparing an insulating substrate and an insulating substrate The substrate forming material of the metal layer formed on at least the other side, the paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 538073 A7 _ B7 V. Description of the invention (9) Forming the material forming the substrate Through-holes in the thickness direction of the insulating substrate. (Please read the precautions on the back before filling this page.) The metal layer of this substrate is used as the electrode for precipitation. The conductive particles are composed of conductive particles and polymer compounds and polymers. At least one kind of organic particles is dispersed in an electrode deposition solution formed in an aqueous medium, and an electrode deposition process is performed to form a conductive body constituting an interlayer short-circuit portion in a through hole of the insulating substrate, and then the above-mentioned insulating property is formed. A substrate wiring layer is formed on one surface of the substrate, and a substrate wiring layer formed on one surface of the insulating substrate is formed; A thick-core wiring substrate formed on the other side and composed of the above-mentioned metal layer electrically connected to the substrate wiring layer. One surface of the thick-core wiring substrate is formed with an interlayer short-circuit portion that should be formed on the substrate wiring layer. Corresponding to the formed insulating layer of the through hole, the substrate wiring layer of the thick core wiring substrate forming the insulating layer is used as a precipitation electrode, and conductive fine particles are dispersed with organic particles composed of at least one of a polymerizable compound and a polymer. The step of forming an electrical conductor constituting an interlayer short-circuited portion in a through hole of the insulating layer in an electrode deposition solution formed in an aqueous medium by electrode deposition. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs of the Consumer Cooperatives (1 7) The method for manufacturing a multilayer wiring board as described in (16) above, wherein the electrode deposition solution for forming the conductor constituting the interlayer short-circuiting section is formed and / or the constituent electrode forming solution is formed The volume ratio of the conductive fine particles to the organic particles of the electrode deposition solution of the conductor in the short-circuit portion of the substrate is 99.9: 1 to 4: 600, and the present invention will be described in more detail. (a) Conductive fine particles The paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) 538073

經濟部智慧財產局員工消費合作社印製 五、發明說明(10) 本發明用之構成導電性微粒子的材料只要是具有導電 性者則無持別限制,但爲了得到長期安定之導電性以不易 氧化之材料較理想。這種材料之具體例有選自金、銀、銅 、鋁、鋅、鎳、鈀、鉑、鈷、铑、銥、鐵、釕、餓、鉻、 鎢、鉅、鈦、鉍、鉛、硼、矽、錫及鋇之金屬或這些之合 金等。也可倂用由不同材料所構成之兩種以上之導電性微 粒子。此導電性微粒子係由體積電阻率1 〇 - 5 · c m以下 之材料所構成,更理想爲由體積電阻率7 χ 1 〇 - 6 Ω · c m以下之材料所構成。 上述如申請專利範圍第1〜9項中,上述導電性微粒 子之數目平均粒徑必須在1 μ m以下,〇 · 5 // m以下較 理想’ 0 · 3 // m以下更理想。數目平均粒徑超過1 # m 時’本發明之導電層形成用水性分散液中,粒子易沈降, 此水性分散液之貯存安定性不足。數目平均粒徑之下限無 特別限制,通常爲0 · 〇 2 // m以上。又如申請專利範圍 第1 0〜1 7項之導電性微粒子之數目平均粒徑也在上述 範圍內較理想。本說明書中之『粒徑』係指一次粒徑。 這種導電性微粒子若考慮製造之容易度時,理想爲使 用藉由氣體中蒸發法,電解法,還原法等所製得之金屬微 粒子。 本發明之導電性粒子可使用球狀,方塊狀,鱗片狀, 凸狀等形狀者。其中方塊狀或鱗片狀之導電性粒子可提高 粒子間之接觸面積較理想。 (b )有機粒子 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 538073 A7 _ B7 五、發明說明(11 ) (b - 1 )有機粒子之組成 (請先閱讀背面之注意事項再填寫本頁) 本發明之有機粒子係『由聚合性化合物及聚合物中之 至少一種』所構成。此處『聚合性化合物』係指具有聚合 性基之化合物,包括完全硬化前之前驅的聚合物,聚合性 低聚物,單體等。又『聚合物』係指實質上完成聚合反應 之化合物。但是也可爲藉由加熱,濕氣等在電極澱積後產 生交聯者。 上述有機粒子爲了可進行電極澱積,因此其表面具有 電荷者較理想。此表面電荷可爲陰離子型或陽離子型。導 電性微粒子之材質爲銅時,有機粒子之表面電荷爲陽離子 型時,含有這些粒子之水性分散液之保存安定性較佳。 上述有機粒子係由選自丙烯酸系樹脂,環氧系樹脂, 聚酯系樹脂及聚醯亞胺系樹脂中之一種或兩種所構成者較 佳。除了這些樹脂外,可含有其他的成分。這些樹脂可彼 此或與其他成分以化學方式結合。 經濟部智慧財產局員工消費合作社印製 本發明在電極澱積後以加熱等分解除去樹脂成分時, 特別是使用以丙烯酸系樹脂爲主成分之有機粒子較理想。 若不進行分解除去時,容易形成機械特性,化學特性及電 特性優異之導電層,因此特別是使用以聚醯亞胺系樹脂爲 主成分之有機粒子較理想。「聚醯亞胺系樹脂」係指聚醯 亞胺樹脂或電極澱積後以加熱等可硬化之前驅的聚合物( 例如聚醯胺酸等),聚醯亞胺樹脂形成用之單體與其他單 體之共聚樹脂或其前驅的聚合物,聚醯亞胺樹脂或其前驅 的聚合物與其他化合物之反應物,也包括聚醯亞胺系樹脂 -14- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538073 經濟部智慧財產局員工消費合作社印製 Λ7 ___-____B7_ 五、發明說明(12 ) 形成用之單體,低聚物等,對於其他之樹脂也相同。 (b - 2 )有機粒子之水性乳膠 本發明之水性分散液通常使用上述有機粒子分散於 水性媒體」之水性乳膠來調整。 以下說明主要由丙烯酸系樹脂所構成之有機粒子之水 性乳膠(「以下稱爲「丙烯酸系樹脂乳膠」),主要由環 氧系樹脂所構成之有機粒子之水性乳膠(「以下稱爲「環 氧系樹脂乳膠」),主要由聚酯系樹脂所構成之有機粒子 之水性乳膠(「以下稱爲「聚酯系樹脂乳膠」),及主要 由聚醯亞胺系樹脂所構成之有機粒子之水性乳膠(「以下 稱爲「聚醯亞胺系樹脂乳膠」)之製造方法。 (1 )丙烯酸系樹脂乳膠之製造方法 丙烯酸系樹脂乳膠之製造方法無特別限制,例如可藉 由通常之乳化方法或使在醇等之有機溶媒中產生聚合之反 應液在攪拌的狀態下添加至水中,使樹脂分散的方法等來 製造。單體可選自一般之丙烯酸系及/或甲基丙烯酸系單 體中之一種或兩種。此時爲了使製得之有機粒子成爲可進 行電極澱積者時,通常係使具有陰離子性基或陽離子性基 之單體產生共聚。其共聚比例係對於使用之單體整體時, 其理想比例5〜8 0重量% (更理想爲1 0〜5 0重量% )° (η )環氧系樹脂乳膠之製造方法 環氧系樹脂乳膠之製造方法無特別限制,可使用以往 之公知的方法,例如日本特開平9 一 2 3 5 4 9 5號公報 本紙張尺度適用中國國家標準(CNS)A4規格(210x 297公爱) ------------衣--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 538073Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (10) The conductive fine particles used in the present invention are not limited as long as they have conductivity, but in order to obtain long-term stable conductivity, it is not easy to oxidize The material is ideal. Specific examples of such a material are selected from the group consisting of gold, silver, copper, aluminum, zinc, nickel, palladium, platinum, cobalt, rhodium, iridium, iron, ruthenium, chromium, tungsten, giant, titanium, bismuth, lead, boron , Silicon, tin and barium metals or alloys of these. Two or more kinds of conductive fine particles composed of different materials may be used. The conductive fine particles are made of a material having a volume resistivity of 1 0-5 · c m or less, and more preferably a material having a volume resistivity of 7 χ 1 0-6 Ω · c m or less. As mentioned above, in the items 1 to 9 of the scope of patent application, the number average particle diameter of the above-mentioned conductive fine particles must be 1 μm or less, and 0 · 5 // m or less is more preferable ′ 0 · 3 // m or less. When the number average particle diameter exceeds 1 #m, the particles of the aqueous dispersion of the present invention are liable to settle in the aqueous dispersion of the conductive layer formation of the present invention, and the storage stability of the aqueous dispersion is insufficient. The lower limit of the number average particle diameter is not particularly limited, and is usually 0 · 〇 2 // m or more. For another example, the number average particle diameter of the conductive fine particles in the range of 10 to 17 of the patent application is also within the above range. The "particle size" in this specification refers to the primary particle size. Considering the ease of manufacture of such conductive fine particles, it is desirable to use metal fine particles produced by a gas evaporation method, an electrolytic method, a reduction method, or the like. The conductive particles of the present invention may be spherical, square, scaly, convex, or the like. Among them, square or scaly conductive particles can increase the contact area between the particles. (b) Organic particles The size of this paper applies to China National Standard (CNS) A4 (210 X 297 mm) -------------------- Order ----- ---- Line (Please read the notes on the back before filling this page) 538073 A7 _ B7 V. Description of the invention (11) (b-1) Composition of organic particles (Please read the notes on the back before filling this page ) The organic particles of the present invention are composed of "at least one of a polymerizable compound and a polymer". "Polymerizable compound" as used herein refers to a compound having a polymerizable group, and includes polymers, polymerizable oligomers, monomers, and the like that are precursors before being completely cured. "Polymer" means a compound that substantially completes the polymerization reaction. However, it is also possible to generate crosslinks after electrode deposition by heating, moisture, or the like. In order that the above-mentioned organic particles can be electrode-deposited, those having an electric charge on their surfaces are preferable. This surface charge can be anionic or cationic. When the material of the conductive fine particles is copper and the surface charge of the organic particles is cationic, the aqueous dispersion containing these particles has better storage stability. The organic particles are preferably composed of one or two selected from acrylic resins, epoxy resins, polyester resins and polyimide resins. In addition to these resins, other components may be contained. These resins can be chemically combined with each other or with other ingredients. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs When the resin component is decomposed and removed by heating or the like after electrode deposition, it is particularly preferable to use organic particles containing acrylic resin as the main component. If it is not decomposed and removed, it is easy to form a conductive layer having excellent mechanical properties and chemical and electrical properties. Therefore, it is particularly preferable to use organic particles containing polyimide resin as a main component. "Polyimide resin" refers to a polymer (such as polyamic acid) that can be cured by heating the polyimide resin or electrode after deposition, such as heating, and the monomers used to form the polyimide resin. Copolymer resins of other monomers or their precursor polymers, reactants of polyimide resins or their precursor polymers with other compounds, including polyimide resins-14- This paper applies Chinese national standards ( CNS) A4 specification (210 X 297 mm) 538073 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Λ7 ___-____ B7_ V. Description of the invention (12) Monomers, oligomers, etc. for formation, the same for other resins . (b-2) Aqueous latex of organic particles The aqueous dispersion of the present invention is usually adjusted using an aqueous latex in which the above-mentioned organic particles are dispersed in an aqueous medium. The following describes the aqueous emulsion of organic particles mainly composed of acrylic resin ("hereinafter referred to as" acrylic resin latex "), and the aqueous emulsion of organic particles mainly composed of epoxy resin (" hereinafter referred to as "epoxy Resin latex "), water-based latex of organic particles mainly composed of polyester resin (" hereinafter referred to as "polyester resin latex"), and water of organic particles mainly composed of polyimide resin A method for producing latex ("hereinafter referred to as" polyimide resin latex "). (1) Production method of acrylic resin latex The production method of acrylic resin latex is not particularly limited. For example, the reaction solution that is polymerized in an organic solvent such as an alcohol may be added to the reaction solution by stirring in a normal emulsification method. It is produced by a method such as dispersing resin in water. The monomer may be selected from one or two of general acrylic and / or methacrylic monomers. In this case, in order to make the obtained organic particles capable of being electrodeposited, a monomer having an anionic group or a cationic group is usually copolymerized. The copolymerization ratio is an ideal ratio of 5 to 80% by weight (more preferably, 10 to 50% by weight) for the entire monomer used. ° (η) Production method of epoxy resin latex The manufacturing method is not particularly limited, and a conventionally known method can be used, for example, Japanese Unexamined Patent Publication No. 9-1 2 3 5 4 9 5 This paper size applies the Chinese National Standard (CNS) A4 specification (210x 297 public love) --- --------- Cloth -------- Order --------- Line (Please read the precautions on the back before filling this page) 538073

經濟部智慧財產局員工消費合作社印製 五、發明說明(13) ,同9 一 7 2 0 8 8 6 5號公報所載之方法等。 (Πι )聚酯系樹脂乳膠之製造方法 聚酯系樹脂乳膠之製造方法無特別限制可使用以往之 公知的方法’例如曰本特開平5 7 — 1 6 6 3號公報, 同57 — 7〇1 53號公報,同58 — 17442 1號公 報所載之方法。 (1 v )聚醯亞胺系樹脂乳膠之製造方法 聚醯亞胺系樹脂乳膠之製造方法無特別限制,.適合 本發明用之聚醯亞胺系樹脂乳膠及其製造方法有下述兩種 〇 (1 )由(A )有機溶媒可溶性之聚醯亞胺與(B ) 親水性聚合物之複合粒子所構成之聚醯亞胺系樹脂乳膠。 此聚醯亞胺系樹脂乳膠例如可使用日本特開平11一 4 9 9 5 1號公報所載的方法來製造。 (2 )由含有(C )聚醯胺酸與(D )疏水性化合物 之複合粒子之粒子所構成之聚醯亞胺系樹脂乳膠。此聚醯 亞胺系樹脂乳膠例如可使用日本特開平1 1 一 6 0 9 4 7 號公報所載的方法來製造。 這些聚醯亞胺系樹脂乳膠不僅水性分散體之保存安定 性優異,且此乳膠中之粒子藉由電極澱積可形成保持聚醯 亞胺原有之耐熱性,電絕緣性,機械特性,耐藥品性等之 電極澱積膜。 更詳細說明上述(1 )之方法所使用的聚醯亞胺系樹 脂乳膠之製造方法。 --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -16- 538073 Λ7 B7 五、發明說明(14 ) (請先閱讀背面之注意事項再填寫本頁) 「( A )有機溶媒可溶性之聚醯亞胺」之合成方法無 特別限制,例如有機極性溶媒中,混合四羧酸二酐與二胺 化合物使之產生聚縮合,得到聚醯胺酸後,該聚醯胺酸以 加熱醯亞胺化法或化學醯亞胺化法產生脫水閉環反應,可 合成聚醯亞胺。四羧酸二酐與二胺化合物以多段進行聚縮 合,可合成具有嵌段結構之聚醯亞胺。 有機溶媒可溶性之聚醯亞胺係具有一種以上例如羧基 ,胺基,羥基,磺酸基,醯胺基,環氧基,異氰酸酯基等 之反應性基(a )較理想。具有反應性基(a )之聚醯亞 胺之合成方法例如有聚醯胺酸合成用之羧酸酐,二胺化合 物,羧酸-酸酐,一胺化合物等之反應原料使用具有反應 性基(a )之化合物,脫水閉環反應後,使反應性基(a )殘留的方法等。 經濟部智慧財產局員工消費合作社印製 「( B )親水性聚合物」係具有一種以上例如胺基, 羧基,羥基,磺酸基,醯胺基等之親水性基,對於水之 2〇°C的溶解度通常爲〇 . 〇 1 g / 1 〇 〇 g以上,理想 爲0 · 0 5 g / 1 〇 〇 g以上之親水性聚合物所構成。除 了上述親水性基外,具有一種以上能夠與上述(A )成分 中之反應性基(a )反應之反應性基(b )較理想。這種 反應性基(b )例如有除了環氧基,異氰酸酯基,羧基外 ,尙有與上述親水性基相同之基等。這種親水性聚合物可 藉由將具有親水性基及/或反應性基(b )之一乙烯基單 體單獨聚合或共聚,或這些之一乙烯基單體與其他單體共 聚來製得。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538073 經濟部智慧財產局員工消費合作社印製 Λ7 137 五、發明說明(15) 選擇(A )有機溶媒可溶性之聚醯亞胺與(B )親水 性聚合物使反應性基(a )與親水性聚合物中之反應性基 (b )具有適當反應性之組合,將該聚醯亞胺與該親水性 聚合物例如在有機溶媒中以溶液狀態混合’必要時進行力口 熱使兩者反應。然後此反應溶液與水性媒體混合,有時至 少除去有機溶媒之一部份,可得到由該聚醯亞胺與該親水 性聚合物相互結合的狀態,被包含在同一粒子內之複合粒 子所構成之聚醯亞胺系樹脂乳膠。 其次更詳細說明上述(2 )之方法所使用之聚醯亞胺 系樹脂乳膠之製造方法。 聚醯亞胺之前驅物之「( C )聚醯胺酸」之合成方法 無特別限制,例如在機極性溶媒中,使四羧酸二酐與二胺 化合物產生聚縮合反應可得到聚醯胺酸。又四羧酸二酐與 二胺化合物以多段進行聚縮合反應,也可合成具有嵌段結 構之聚醯胺酸。也可使用將聚醯胺酸脫水閉環,可合成部 分醯亞胺化之聚醯胺酸。 「( D )疏水性化合物」係具有至少能與上述聚醯胺 酸中之醯胺酸基反應之基(以下稱爲「反應性基」)的化 合物。此反應性基例如有環氧基,異氰酸酯基,碳化二亞 胺基,氫硫基,鹵基,烷基磺醯基,芳基磺醯基,偶氮基 ,羰基等。這些反應性基在疏水性化合物中可含有一種以 上。「疏水性」係指對於水之2 〇 °C的溶解度通常爲 〇 · 05g/100g 以下,理想爲 〇 · 〇ig/l〇〇 g以下,更理想爲0.〇5g/i〇〇g以下。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公复) 衣--------1T---------^· (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538073 A7 B7 五、發明說明(16) 疏水性化合物例如可使用一種或兩種以上選自環氧化 聚丁二烯,雙酚A型環氧樹脂,萘系環氧樹脂,芴系環氧 樹脂,聯苯型環氧樹脂,縮水甘油酯型環氧樹脂,烯丙基 縮水甘油醚,縮水甘油基(甲基)丙烯酸酯,1 ,3 ,5 ,6 —四縮水甘油基—2,4 —己二醇,N,N,Ν' N '一四縮水甘油基一間二甲苯二胺,甲苯二異氰酸酯,二環 己基碳化二亞胺,聚碳化二亞胺,膽固醇,T醇,對甲苯 磺酸酯,氯醋酸乙酯,三嗪三硫醇,偶氮甲烷,二丙酮( 甲基)丙烯醯胺等。 將該(C )聚醯胺酸與(D )疏水性化合物例如在有 機溶媒中以溶液狀態混合反應後,此反應溶液與水性媒體 混合,有時至少除去有機溶媒之一部份,可得到由聚醯胺 酸與疏水性化合物被包含在同一粒子內之複合粒子所構成 之聚醯亞胺系樹脂乳膠。 上述(1 )及(2 )之方法使用之四羧酸二酐無特別 限制,例如有丁烷四羧酸二酐,1 ,2,3,4 一環丁烷 四羧酸二酐,3 ,3',4,4'—二環丁烷四羧酸二酐, 2,3, 5-,三羧基環戊基醋酸二酐,1,3, 3a, 4 ,5 ,9b —六氫化一 5—(四氫化—2 ,5 —二羰基 一 3 -呋喃基)一萘〔1 ,2 — c〕一 呋喃一 1 ,3 —二 酮等之脂肪族四羧酸二酐或脂環四羧酸二酐; 均苯四甲酸二酐,3 ,3,,4 ,4'—苯並二酮四羧 酸二酐,3 ,3 ',4,4 ' 一聯苯砚四羧酸二酐等之芳族 四羧酸二酐;等。這些之四羧酸二酐可單獨或混合兩種以 ------------f--------訂---------線· (請先閱讀背面之注意事項再填寫本頁) 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -IV- 538073 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(17) 上使用。 上述(1 )及(2 )之方法使用之二胺化合物無特別 限制,例如有對苯二胺,4,4 ' 一二胺基二苯基甲院,2 ,2 -雙〔4 一(4 一胺基苯氧基)苯基〕丙烷等之芳族 二胺類; 1 ,1 一間二甲苯二胺,1 ,3 —丙二胺’丁二胺, 4,4 ' 一亞甲基雙(環己胺)等之脂肪族二胺或脂環二胺 類; 2 ,3 —二胺基吡啶,2 ,4 —二胺基一 6 —二甲基 胺基一 1 ,3 ,5 —三嗪,2 ,4 —二胺基一 5 —苯基吡 唑,雙(4 一胺苯基)苯胺等之分子內具有2個第一級胺 基及該第一級胺基以外之氮原子之二胺類; 一取代苯二胺類; 二胺基有機基矽氧烷;等。這些二胺化合物可單獨或 混合兩種以上使用。 (c )水性分散液 本發明之水性分散液係將上述導電性微粒子及上述有 機粒子分散於水性媒體中所成者。本說明書中「水性媒體 」係指含水之媒體,此水性媒體中之含水率爲〇 . 5重量 %以上,理想爲10重量%以上。含水率爲〇.5重量% 以下時,此水性分散液很難直接用於電極澱積液。又含水 率太高時,導電性微粒子等之分散安定性降低,因此含水 率爲5 0重量%以下,理想爲4 0重量%以下,更理想爲 2 0重量%以下。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐 --------------------訂---------線4|^ (請先閱讀背面之注意事項再填寫本頁) 538073 經濟部智慧財產局員工消費合作社印製 A7 __ B7 五、發明說明(18 ) 必要時可與水一同使用之其他媒體例如前述用於製造 聚醯胺酸或聚醯亞胺之非質子性極性溶媒,酯類,酮類, 苯酚類,醇類,胺類等。其中考慮導電性微粒子之金屬微 粒子之分散安定性時,含有1 0〜9 0重量% (更理想爲 2〇〜7 0重量%)之由碳原子數1〜1 〇之醇類之一種 或兩種以上所構成之醇類較理想。此水性媒體含有 0 · 0 1〜5重量% (0 · 0 1〜1重量%)之一乙醇胺 ,二乙醇胺等之胺類較理想,藉此可提高分散安定性。 水性分散液所含有之導電性微粒子與有機粒子之體積 比爲9 9 : 1〜4 0 : 6 0,理想爲9 5 ·· 5〜4 0 : 6 0,更理想爲8 5 : 1 5〜6 0 : 4 0。導電性微粒子 與有機粒子之合計量中所佔有之導電性微粒子的比例爲 4〇體積%以下時,體積電阻率太大,因此有時不適合作 爲導電層使用。又導電性微粒子的比例超過8 0體積%時 ,成膜性,形狀維持性,對基板之粘著性不足,在導電層 上可能會產生龜裂。 此水性分散液之理想的P Η爲3〜1 2 (更理想爲3 〜1 0 ),理想之固形份濃度爲1〜5 0重量% (更理想 爲5〜3 0重量% ),2 CTC之理想粘度爲1〜1 0〇 m P a · s 。ρ Η,固形份濃度,粘度在上述範圍外時, 有時粒子之分散性降低,或貯存安定性不足,或無法得到 充分之電極澱積速度,生產性降低,或操作時或使用時之 作業性降低,貫通孔內之微細形狀的部分電極澱積困難。 此水性分散液藉由混合將上述導電性微粒子分散於有 本紙張尺度適用中國國家標準(CNS)A4規格(2〗〇χ 297公釐) ------------衣--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538073 Α7 Β7 五、發明說明(19) 機溶媒之導電性微粒子分散液與將上述有機粒子分散於水 性媒體之有機粒子分散液(理想爲上述之水性乳膠)來調 製。 上述「導電性微粒子分散液」所用之有機溶媒若考慮 分散安定性及對於水性乳膠之媒體之溶解性時,理想爲使 用由碳原子數1〜1 0之醇類之一種或兩種以上所構成之 醇系溶媒,特別理想爲使用乙醇,異丙醇或這些之混合溶 媒。將導電性微粒子分散於有機溶媒的方法例如有使用均 質器,高壓均質器,超音波混合機等的方法,或組合使用 這些的方法等。此導電性微粒子分散液含有3〜4 0重量 %之導電性微粒子較理想,含有5〜3 0重量%更理想。 本發明之水性分散液除了上述導電性微粒子及有機粒 子外,可含有至少一種選自以下述式(1 )表示之有機基 矽烷,此有機基矽烷所具有之水解性基之一部份或全部被 水解之水解物及此水解物部分脫水縮合之部分縮合物(以 下稱爲「有機基砂院縮合物等」)。由這種水性分散液所 形成之導電層特別是電極殿積後加熱硬化時,導電層中, 有機基矽烷縮合物以交聯形成機械特性及化學特性優異之 導電層。 (R 1 ) n S i (OR2) 4 - η ( !) (式中,R1係表示氫原子或碳數1〜8之一價之有機 基’R係碳數1〜5之垸基,碳數1〜6之醯基或苯基, η爲1或2之整數,R1及R2可相同或不同)。 上述式(1 )中,R1係碳數1〜8之一價之有機基例 --------------------訂---------線 41^ (請先閱讀背面之注意事項再填寫本頁) 538073 經濟部智慧財產局員工消費合作社印製 A7 -----B7____ 五、發明說明(2〇) 如有具有直鍵或支鍵之院基,鹵取代之院基,乙嫌基,苯 基及3,4 一環氧基環己基乙基等。R1可具有羰基。R1 係碳數1〜4之烷基或苯基較理想。 R2之碳數1〜5之烷基或碳數1〜6之醯基例如有甲 基,乙基,正丙基,異丙基,正丁基,異丁基,第二丁基 ’第三丁基,正戊基,乙醯基,丙醯基,丁醯基等。R2係 碳數1〜4之烷基較想。 適合使用之有機基矽烷例如有二甲基甲氧基矽烷,二 甲基二乙氧基矽烷,異丁基三甲氧基矽烷及苯基三乙氧基 矽烷。這些有機基矽烷可單獨使用或兩種以上倂用。 上述「有機基矽烷縮合物」係在本發明之水性分散液 中,形成有機粒子與複合粒子較理想。此「複合粒子」係 指構成上述有機粒子之化合物與有機基矽烷縮合物等以化 學方式結合者,或上述有機粒子之表面或內部吸附有機基 矽烷縮合物等者等。 此有機基矽烷縮合物等之使用量係上述有機粒子 1〇0重量份時,使用0 · 1〜5 0 0重量份,理想爲 0· 5〜250重量份。有機基矽烷縮合物等之使用量爲 0 · 1重量份以下時,有時無法得到所要的效果,又超過 5 0 0重量份時,導電層之粘著性等有下降的傾向。 這種複合體粒子可藉由下述(1 )或(2)的方法製 造。也可組合這些的方法。 (1 )上述有機粒子之乳膠中添加上述有機基矽烷, 使上述有機粒子吸收有機基矽烷之至少一部份後,進行此 $纸張ϋ適用中國國家標準(CNS)A4規格(210 x 297公釐) 二匕: -------------·衣--------訂---------線· (請先閱讀背面之注意事項再填寫本頁) 538073 Λ7 B7 五、發明說明(21 ) 有機基矽烷之水解反應及縮合反應。 (請先閱讀背面之注意事項再填寫本頁) (2 )被分散於水性媒體之上述有機基矽烷縮合物等 之存在下,進行生成上述有機粒子的反應。 上述(1 )的方法中,爲了使有機粒子吸收有機基矽 烷時,在乳膠中添加有機基矽烷,利用充分攪拌等之方法 即可。此時使粒子吸收被添加之有機基矽烷之1 0重量% 以上(理想爲3 0重量%以上)較理想。吸收不足的階段 時,爲了避免有機基矽烷進行水解•縮合反應,可將反應 體系之P Η調整爲4〜1 0,理想爲5〜1 0,更理想爲 6〜8。使有機粒子吸收有機基矽烷之處理溫度爲7 0 t 以下,理想爲5 0 t:以下,更理想爲0〜3 0 °C。處理時 間通常爲5〜1 8 0分鐘,理想爲2 0〜6 0分鐘。 使被吸收之有機基矽烷進行水解•縮合時之溫度通常 爲3 0 °C以下,理想爲5 0〜1 0 0 °C,更理想爲7 0〜 9〇t:,理想之聚合時間爲0 . 3〜1 5小時,更理想爲 1〜8小時。 經濟部智慧財產局員工消費合作社印製 上述(1 )的方法中,使用均質器,超音波混合機等 將上述有機基矽烷在烷基苯磺酸等之強酸性乳化劑之水溶 液中混合,進行水解·縮合可得到被分散於水性媒體之有 機基矽烷縮合物等。此有機基矽烷縮合物等之存在下,理 想爲藉由乳化聚合生成上述有機粒子。 (d )導電層 本發明之水性分散液通常直接以該濃度用於導電層形 成用之電極澱積液較理想,但也稀釋或濃縮後使用。必要 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 經濟部智慧財產局員工消費合作社印製 538073 A7 B7 五、發明說明(22 ) 時可適當配合以往公知之添加劑。可藉由使用此電極澱積 液之通常的電極澱積方法將水性分散液之導電性微粒子及 有機粒子電極澱積於電極表面,製造導電層。 此電極澱積步驟之後,以下述方法降低導電性微粒子 界面之導電電阻爲宜。 ① 爲了除去存載於導電性微粒子表面之金屬氧化物等 之非導電性物質時,將電極澱積所形成之層在還原性氣氛 下進行燒成。例如在混合0 · 1〜5體積%之氫之惰性氣 體氣氛下,以2〇0〜500 °C進行燒成30〜1 80分 鐘能使金屬氧化物還原。或此層表面以醋酸,甲酸,丙酸 等之弱酸之5 0〜1 0 0 %水溶液等洗淨,溶解除去金屬 氧化物等之非導電性物質。 ② 使金屬析出於導電性微粒子之表面。例如浸漬於電 鍍液中,電流以脈衝狀流通,能有效地使金屬析出於微粒 子界面。通電時間對於脈衝一週期之比例理想爲〇 . 6以 下’更理想爲0 · 3以下。電鍍之金屬例如可用銅、鎳、 金、鉛、銀、錫、焊錫合金等公知物。 在電極澱積後之粒子之樹脂成分可以加熱分解除去, 藉此可降低導電層之體積電阻率。此時樹脂成分使用可以 較低溫分解除去之丙烯酸系樹脂較理想,例如以2 0 0〜 8 〇 0 °C加熱3 0〜1 8 0分鐘大致可除去樹脂成分。如 上述導電層在還原性氣氛下進行燒成時,燒成之同時可分 解除去樹脂成分。 樹脂成分使用熱硬化性樹脂,電極澱積後可將此樹脂 本紙張尺度適用中國國家標準(CNS)A4規格(21〇 X 297公釐) --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 538073Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (13), the same as the method described in 9-1 7 2 0 8 8 65. (Πι) Production method of polyester resin latex The production method of polyester resin latex is not particularly limited, and a conventionally known method can be used. For example, Japanese Patent Application Laid-Open No. 5 7-1 6 6 3, same as 57-7 1 53, the same as the method contained in 58-17442 1. (1v) Production method of polyimide resin latex There is no particular limitation on the production method of polyimide resin latex. There are two types of polyimide resin latex suitable for the present invention and the production method thereof. 〇 (1) Polyimide-based resin latex composed of (A) organic solvent-soluble polyimide and (B) hydrophilic polymer composite particles. This polyimide-based resin latex can be produced, for example, by a method described in Japanese Patent Application Laid-Open No. 11-49-9551. (2) A polyimide resin latex composed of particles containing composite particles of (C) polyamidic acid and (D) a hydrophobic compound. This polyfluorene-imide-based resin latex can be produced, for example, by the method described in Japanese Patent Application Laid-Open No. 1 1 6 0 9 47. These polyimide resin latexes not only have excellent storage stability of aqueous dispersions, but also the particles in this latex can be formed by electrode deposition to maintain the original heat resistance, electrical insulation, mechanical properties, and resistance of polyimide. Electrode-deposited films for pharmaceutical properties. The method for producing the polyimide-based resin latex used in the method (1) will be described in more detail. -------------------- Order --------- Line (Please read the notes on the back before filling this page) This paper size is applicable to China Standard (CNS) A4 specification (210 X 297 mm) -16- 538073 Λ7 B7 V. Description of the invention (14) (Please read the precautions on the back before filling this page) "(A) Organic Solvent Soluble Polyurethane The synthesis method of "amine" is not particularly limited. For example, in an organic polar solvent, a tetracarboxylic dianhydride is mixed with a diamine compound to cause polycondensation. After obtaining polyamic acid, the polyfluorinated acid is heated by fluorinated imidization Or the chemical dehydration method can produce dehydration ring-closing reaction to synthesize polyfluorene imine. Tetracarboxylic dianhydride and diamine compound are polycondensed in multiple stages to synthesize polyfluorene imine having a block structure. The organic solvent-soluble polyfluorene imide is preferably one or more reactive groups (a) such as a carboxyl group, an amine group, a hydroxyl group, a sulfonic acid group, a sulfonylamino group, an epoxy group, an isocyanate group, and the like. As a method for synthesizing polyimide having a reactive group (a), for example, carboxylic acid anhydride, diamine compound, carboxylic acid-anhydride, and monoamine compound used as a raw material for the synthesis of polyamidic acid can be used. ), And a method of leaving a reactive group (a) after dehydration ring-closure reaction and the like. The "(B) Hydrophilic Polymer" printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs has more than one type of hydrophilic group such as amine group, carboxyl group, hydroxyl group, sulfonic acid group, amido group and the like. The solubility of C is usually made of a hydrophilic polymer of not less than 0.01 g / 1, 000 g, and preferably not less than 0.05 g / 100 g. In addition to the above-mentioned hydrophilic group, it is preferable to have one or more reactive groups (b) capable of reacting with the reactive group (a) in the component (A). Such a reactive group (b) includes, for example, an epoxy group, an isocyanate group, and a carboxyl group, and a same group as the above-mentioned hydrophilic group. This hydrophilic polymer can be prepared by polymerizing or copolymerizing one of the vinyl monomers having a hydrophilic group and / or a reactive group (b), or copolymerizing one of these vinyl monomers with another monomer. . This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 538073 Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs Λ7 137 V. Description of the invention (15) Selection (A) Polyurethane soluble in organic solvents A combination of an amine and (B) a hydrophilic polymer such that the reactive group (a) and the reactive group (b) in the hydrophilic polymer have appropriate reactivity. The polyimide and the hydrophilic polymer are, for example, in The organic solvent is mixed in a solution state, and if necessary, heat is applied to make the two react. Then, the reaction solution is mixed with an aqueous medium, and at least a part of the organic solvent is sometimes removed, to obtain a state in which the polyimide and the hydrophilic polymer are combined with each other, and are composed of composite particles contained in the same particle. Polyimide resin latex. Next, a method for producing a polyimide-based resin latex used in the method (2) described above will be described in more detail. There is no particular limitation on the method for synthesizing the "(C) polyamidic acid" precursor of polyimide. For example, in a polar organic solvent, a polycondensation reaction between a tetracarboxylic dianhydride and a diamine compound can be used to obtain polyamidoamine. acid. In addition, tetracarboxylic dianhydride and a diamine compound are subjected to polycondensation in multiple stages, and a polyamino acid having a block structure can also be synthesized. It is also possible to use dehydration and ring-closing of polyamic acid to synthesize partially polyimidized polyamino acid. The "(D) hydrophobic compound" is a compound having a group (hereinafter referred to as "reactive group") capable of reacting with at least the amino acid group in the polyamino acid. Examples of the reactive group include an epoxy group, an isocyanate group, a carbodiimide group, a hydrogen thio group, a halo group, an alkylsulfonyl group, an arylsulfonyl group, an azo group, a carbonyl group, and the like. These reactive groups may contain more than one kind in a hydrophobic compound. "Hydrophobic" means that the solubility in water at 20 ° C is usually 0.05 g / 100 g or less, preferably 0.0 g / 100 g or less, and more preferably 0.05 g / 100 g or less. . This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 public compound) Clothing -------- 1T --------- ^ · (Please read the precautions on the back before filling (This page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 538073 A7 B7 V. Description of the invention (16) For example, one or two or more kinds of hydrophobic compounds can be selected from epoxy polybutadiene and bisphenol A , Naphthalene-based epoxy resin, fluorene-based epoxy resin, biphenyl epoxy resin, glycidyl ester epoxy resin, allyl glycidyl ether, glycidyl (meth) acrylate, 1, 3, 5 , 6-tetraglycidyl-2,4-hexanediol, N, N, N'N'-tetraglycidyl-m-xylylenediamine, toluene diisocyanate, dicyclohexylcarbodiimide, polycarbide Diimine, cholesterol, T-alcohol, p-toluenesulfonate, ethyl chloroacetate, triazine trithiol, azomethane, diacetone (meth) acrylamide, etc. After the (C) polyamidic acid is mixed with the (D) hydrophobic compound in a solution state in an organic solvent, the reaction solution is mixed with an aqueous medium, and at least a part of the organic solvent is sometimes removed. Polyimide resin latex composed of composite particles in which polyamic acid and a hydrophobic compound are contained in the same particle. The tetracarboxylic dianhydride used in the above methods (1) and (2) is not particularly limited, for example, butane tetracarboxylic dianhydride, 1, 2, 3, 4 monocyclobutane tetracarboxylic dianhydride, 3, 3 ', 4,4'—Dicyclobutanetetracarboxylic dianhydride, 2,3,5-, tricarboxycyclopentylacetic dianhydride, 1,3,3a, 4,5,9b —Hexahydro-5— (Tetrahydro-2,5-dicarbonyl-3-furanyl) -naphthalene [1,2-c] -furan-1,3-dione, etc. aliphatic tetracarboxylic dianhydride or alicyclic tetracarboxylic dicarboxylic acid Anhydride; pyromellitic dianhydride, 3, 3, 4, 4, 4'-benzodione tetracarboxylic dianhydride, 3, 3 ', 4, 4' monobiphenylpyrene tetracarboxylic dianhydride, etc. Group tetracarboxylic dianhydride; etc. These tetracarboxylic dianhydrides can be used alone or in combination with ------------ f -------- order --------- line · (please first Read the notes on the reverse side and fill out this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -IV- 538073 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (17). The diamine compounds used in the above methods (1) and (2) are not particularly limited, for example, p-phenylenediamine, 4,4'-diaminodiphenylmethylamine, 2,2-bis [4 one (4 Monoaminophenoxy) phenyl] propane and other aromatic diamines; 1,1 m-xylenediamine, 1,3-propanediamine'butanediamine, 4,4 'monomethylenebisamine (Cyclohexylamine) and other aliphatic diamines or alicyclic diamines; 2,3-diaminopyridine, 2,4-diamino-6-dimethylamino-1,3,5-tris Zine, 2,4-diamino-5phenylphenylazole, bis (4-monoaminophenyl) aniline, etc. have two primary amine groups and nitrogen atoms other than the primary amine group in the molecule Diamines; monosubstituted phenylenediamines; diamine-based organosiloxanes; etc. These diamine compounds can be used alone or in combination of two or more. (c) Aqueous dispersion The aqueous dispersion of the present invention is obtained by dispersing the above-mentioned conductive fine particles and the above-mentioned organic particles in an aqueous medium. The "aqueous medium" in this specification refers to a medium containing water, and the water content in this aqueous medium is 0.5% by weight or more, and preferably 10% by weight or more. When the water content is 0.5% by weight or less, it is difficult to use the aqueous dispersion directly as an electrode deposition solution. When the water content is too high, the dispersion stability of the conductive fine particles and the like is reduced. Therefore, the water content is 50% by weight or less, preferably 40% by weight or less, and more preferably 20% by weight or less. This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm -------------------- Order --------- Line 4) | ^ (Please read the notes on the back before filling this page) 538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __ B7 V. Description of the invention (18) Other media that can be used with water if necessary Aprotic polar solvents, esters, ketones, phenols, alcohols, amines, etc. for manufacturing polyamic acid or polyimide. When considering the dispersion stability of conductive fine particles and metal particles, it contains 1 0 Alcohols consisting of one or two or more alcohols having 1 to 100 carbon atoms are preferred to 90 wt% (more preferably 20 to 70 wt%). This aqueous medium contains 0. 0 1 to 5% by weight (0 · 0 1 to 1% by weight) of amines such as ethanolamine, diethanolamine, etc. are preferred, thereby improving dispersion stability. The volume of conductive fine particles and organic particles contained in the aqueous dispersion The ratio is 9 9: 1 to 4 0: 60, preferably 9 5 ·· 5 to 4 0: 6 0, and more preferably 8 5: 1 5 to 6 0: 4 0. Conductive fine particles When the proportion of the conductive fine particles in the total amount with the organic particles is 40% by volume or less, the volume resistivity is too large, so it may not be suitable as a conductive layer. When the proportion of the conductive particles exceeds 80% by volume , Film-forming property, shape-maintaining property, insufficient adhesion to the substrate, and cracks may occur on the conductive layer. The ideal P 此 of this aqueous dispersion is 3 to 1 2 (more preferably 3 to 1 0) The ideal solid content concentration is 1 to 50% by weight (more preferably 5 to 30% by weight), and the ideal viscosity of 2 CTC is 1 to 100 m P a · s. Ρ Η, solid content concentration, viscosity Outside the above range, the dispersion of particles may be reduced, or storage stability may be insufficient, or sufficient electrode deposition speed may not be obtained, productivity may be reduced, or workability during operation or use may be reduced, and the fineness in the through holes may be fine. Partially shaped electrodes are difficult to deposit. This aqueous dispersion is used to disperse the above-mentioned conductive fine particles in a paper with the standard of China National Standards (CNS) A4 (2) 〇χ 297 mm). ------ clothing -------- order --------- line ( (Please read the notes on the back before filling in this page) Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is printed in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 538073 Α7 Β7 V. Description of the invention (19) The organic fine particle dispersion liquid of the organic solvent and the organic particle dispersion liquid (preferably the above-mentioned aqueous latex) in which the organic particles are dispersed in an aqueous medium are prepared. In consideration of dispersion stability and solubility in aqueous latex media, the organic solvent used in the above “conductive fine particle dispersion” is preferably composed of one or two or more alcohols having 1 to 10 carbon atoms. As the alcohol-based solvent, ethanol, isopropanol, or a mixed solvent thereof is particularly preferably used. The method of dispersing conductive fine particles in an organic solvent includes, for example, a method using a homogenizer, a high-pressure homogenizer, an ultrasonic mixer, or a combination of these methods. The conductive fine particle dispersion preferably contains 3 to 40% by weight of conductive fine particles, and more preferably contains 5 to 30% by weight. The aqueous dispersion of the present invention may contain, in addition to the above-mentioned conductive fine particles and organic particles, at least one kind selected from an organic silane represented by the following formula (1), and a part or all of the hydrolyzable groups of the organic silane The hydrolyzed hydrolysate and a part of the condensate of which the hydrolysate is partially dehydrated and condensed (hereinafter referred to as "organic-based sand garden condensate, etc."). The conductive layer formed from such an aqueous dispersion, especially when the electrode is cured by heating, the organic silane condensate in the conductive layer is crosslinked to form a conductive layer having excellent mechanical and chemical properties. (R 1) n S i (OR2) 4-η (!) (Wherein R1 represents a hydrogen atom or a monovalent organic group having 1 to 8 carbon atoms; R is a fluorenyl group having 1 to 5 carbon atoms, carbon A fluorenyl or phenyl group of the number 1 to 6, η is an integer of 1 or 2, R1 and R2 may be the same or different). In the above formula (1), R1 is an example of a monovalent organic group having 1 to 8 carbon atoms. -Line 41 ^ (Please read the notes on the back before filling this page) 538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ----- B7____ V. Description of the invention (2) If there is a direct key or support Bonded radicals, halogen-substituted radicals, ethylsulfanyl, phenyl, and 3,4-epoxycyclohexylethyl. R1 may have a carbonyl group. R1 is preferably an alkyl group or a phenyl group having 1 to 4 carbon atoms. Examples of the alkyl group having 1 to 5 carbon atoms or a fluorenyl group having 1 to 6 carbon atoms in R2 include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, and second butyl. Butyl, n-pentyl, ethylfluorenyl, propylfluorenyl, butylfluorenyl and the like. R2 is preferably an alkyl group having 1 to 4 carbon atoms. Suitable organic silanes are, for example, dimethylmethoxysilane, dimethyldiethoxysilane, isobutyltrimethoxysilane and phenyltriethoxysilane. These organic silanes can be used alone or in combination of two or more. The above-mentioned "organosilane condensate" is preferably formed in the aqueous dispersion of the present invention to form organic particles and composite particles. The "composite particle" refers to a chemical compound that combines the compound constituting the organic particle with an organic silane condensate or the like, or an organic silane condensate or the like is adsorbed on the surface or inside of the organic particle. In the case where the organic silane condensate is used in an amount of 100 parts by weight of the organic particles, 0.1 to 500 parts by weight is used, and 0.5 to 250 parts by weight is preferably used. When the amount of the organic silane condensate used is less than or equal to 0.1 part by weight, the desired effect may not be obtained, and when it exceeds 500 parts by weight, the adhesiveness and the like of the conductive layer tend to decrease. Such composite particles can be produced by the following method (1) or (2). These methods can also be combined. (1) After adding the above-mentioned organic silane to the latex of the above-mentioned organic particles, so that the above-mentioned organic particles absorb at least a part of the organic-based silane, perform this $ paper. Applicable to China National Standard (CNS) A4 (210 x 297) (Li) Two daggers: ------------- · Clothing -------- Order --------- Line · (Please read the notes on the back before filling (This page) 538073 Λ7 B7 V. Description of the invention (21) Hydrolysis reaction and condensation reaction of organic silane. (Please read the precautions on the reverse side before filling out this page) (2) The reaction to generate the organic particles is performed in the presence of the above-mentioned organic silane condensate dispersed in an aqueous medium. In the method (1) described above, in order to allow the organic particles to absorb the organic silane, an organic silane may be added to the latex, and a method such as sufficient stirring may be used. At this time, it is preferable that the particles absorb 10% by weight or more (preferably 30% by weight or more) of the added organic silane. At the stage of insufficient absorption, in order to avoid the hydrolysis and condensation reaction of the organosilane, the P P of the reaction system can be adjusted to 4 to 10, preferably 5 to 10, and more preferably 6 to 8. The treatment temperature for the organic particles to absorb the organic silane is 70 t or less, ideally 50 t: or less, more preferably 0 to 30 ° C. The processing time is usually 5 to 180 minutes, and ideally 20 to 60 minutes. The temperature at which the absorbed organic silane is hydrolyzed and condensed is usually 30 ° C or less, preferably 50 to 100 ° C, more preferably 70 to 90 t: and the ideal polymerization time is 0. 3 to 15 hours, more preferably 1 to 8 hours. In the method of printing the above (1) by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the above-mentioned organic silane is mixed with an aqueous solution of a strong acidic emulsifier such as alkylbenzenesulfonic acid using a homogenizer, an ultrasonic mixer, etc. By hydrolysis and condensation, an organic silane condensate or the like dispersed in an aqueous medium can be obtained. In the presence of this organic silane condensate or the like, it is desirable to generate the above-mentioned organic particles by emulsion polymerization. (d) Conductive layer The aqueous dispersion of the present invention is usually preferably used as the electrode deposition solution for forming the conductive layer at this concentration, but it is also used after dilution or concentration. Necessary This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 538073 A7 B7 5. In the invention description (22), it can be appropriately matched with previously known additives. The conductive fine particles and organic particle electrodes of the aqueous dispersion can be deposited on the electrode surface by a common electrode deposition method using this electrode deposition solution to produce a conductive layer. After this electrode deposition step, it is preferable to reduce the conductive resistance at the interface of the conductive fine particles by the following method. ① In order to remove non-conductive materials such as metal oxides that are stored on the surface of conductive fine particles, the layer formed by electrode deposition is fired in a reducing atmosphere. For example, metal oxides can be reduced by firing at 2000 to 500 ° C for 30 to 180 minutes under an inert gas atmosphere in which hydrogen is mixed in an amount of 0.1 to 5% by volume. Or the surface of this layer is washed with a 50 to 100% aqueous solution of a weak acid such as acetic acid, formic acid, propionic acid, etc., to dissolve and remove non-conductive materials such as metal oxides. ② Precipitate metal on the surface of conductive fine particles. For example, when immersed in an electroplating solution, a current flows in a pulsed manner, which effectively precipitates the metal out of the particle interface. The ratio of the energization time to one cycle of the pulse is preferably 0.6 or less and more preferably 0.3 or less. As the metal to be plated, known materials such as copper, nickel, gold, lead, silver, tin, and solder alloys can be used. The resin component of the particles after electrode deposition can be thermally decomposed and removed, thereby reducing the volume resistivity of the conductive layer. In this case, it is preferable to use an acrylic resin that can be decomposed and removed at a relatively low temperature. For example, the resin component can be removed by heating at 2000 to 800 ° C for 30 to 180 minutes. For example, when the conductive layer is fired in a reducing atmosphere, the resin component can be decomposed and removed at the same time as the firing. The resin composition is made of thermosetting resin. After the electrode is deposited, this resin can be used in accordance with Chinese National Standard (CNS) A4 (21〇X 297 mm). -------------- ------ Order --------- Line (Please read the precautions on the back before filling this page) 538073

五、發明說明(23) 經濟部智慧財產局員工消費合作社印製 成分再加熱硬化。此時使用含有上述有機基矽烷縮合物等 之水性分散液爲宜。熱硬化性樹脂可使用環氧系樹脂或聚 醯亞胺系樹脂’使用聚醯亞胺系樹脂最理想。加熱硬化的 條件只要是不會分解除去樹脂成分之溫度即可,無特別限 制’理想之加熱溫度爲1 〇 〇〜4 0 0 t,更理想爲 1 5 0〜3 0 0 °C。加熱時間理想爲5分鐘以上,更理想 爲1 0分鐘以上。將樹脂成分加熱硬化提高導電層之機械 特性,以燒結使導電層緊密,也可提高電特性。導電層中 所殘留之樹脂成分具有粘結劑作用,因此可形成粘著性, 耐衝擊性等優異之導電層。如上述膜在還原性氣氛下進行 燒成時’可利用此燒成時之熱將樹脂成分加熱硬化。 依據本發明之水性分散液時,可得到體積電阻率 10— 4Ω· cm以下(更理想爲〇· 5X10 一 4Ω· cm 以下)之導電層。此導電層形成膜狀時之厚度爲1〜8 0 # m (理想爲3〜5 0 // m,更理想爲5〜2 0 // m )。 較理想。形成具有此厚度之導電層時,使用本發明之水性 分散液能發揮以電極澱積製造之優點。 (e )電子零件 依據本發明之水性分散體時,可以高效率製作膜厚精 度等較高之導電層。又貫通絕緣層之通孔,導孔等之微細 形狀部分也能以高效率製作膜厚精度等較高之導電層。此 導電層適用於導電性之電路,凸塊及組合這些製成之配線 基板(例如多層配線板)等之電子零件。 (f )電路基板 --------^--------線 0^&quot; (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -ZO - 538073 A7 ________ B7 五、發明說明(24) (f 一 1 )構成 (請先閱讀背面之注意事項再填寫本頁) 本發明之電路基板係具備絕緣層,使用上述導電層开多 成用水性分散液所形成之導電層。此導電層之一部份係構 成貫通上述絕緣層之貫通導電部。 構成此絕緣層的材料無特別限制,配合製得之電路基 板之用途等可使用聚醯亞胺樹脂,環氧系樹脂,雙順丁嫌 二胺系樹脂,苯酚系樹脂等。例如可使用一般增層配線板 之厚芯基板所用之玻璃環氧基板,B T樹脂基板等,或增 層配線板之絕緣層所用之環氧系樹脂層,聚醯亞胺系樹脂 層等。絕緣層之厚度無特別限制,若爲厚芯基板時,通常 爲20〜150//m(理想爲50〜100//m),若爲 增層絕緣層時,通常爲5〜1 0 0 // m (理想爲1 〇〜 5 0 ^ m )。 經濟部智慧財產局員工消費合作社印製 絕緣層所用之聚醯亞胺系樹脂層特別適合使用由彈性 模數爲1 0 G p a以下之聚醯亞胺系複合物所構成者。這 種聚醯亞胺系複合物可使用如日本特開2 0 0〇-4 4 8 0 0號公報所揭示,由(A)聚醯亞胺成分與(B )其他聚合物成分所構成者。(A )聚醯亞胺成分理想爲 使用有機溶媒可溶性,且具有嵌段結構之聚醯亞胺,末端 改質型聚醯亞胺,具有反應性基之聚醯亞胺及聚醯胺酸等 。(B )其他聚合物成分理想爲具有能與(A )聚醯亞胺 成分直接或介於交聯劑等間接反應之反應基者。(B )其 他聚合物成分之具體例有丙烯酸聚合物等之乙烯單體之聚 合物,天然橡膠及其環氧化物,聚丁二烯及其環氧化物’ 本纸張尺度適用中國國家標準(CNS)A4規格(2]0 X 297公釐) 538073 A7 -------B7 五、發明說明(25) 苯乙烯-丁二烯橡膠,異戊二烯橡膠,聚胺酯橡膠,丙腈 ,乙儲-丙烯橡膠,氟聚合物,聚矽氧烷聚合物等。 (請先閱讀背面之注意事項再填寫本頁) 上述貫通導電部通常係被塡充將貫通上述絕緣層之貫 通孔塡埋’或形成沿著貫通孔壁面之膜狀。此貫通孔之直 徑爲4〜1 5 〇 // m (理想爲6〜1 0 〇 m,更理想爲 1 0〜Θ 0 // m )。具有此直徑範圍之貫通孔能有效地發 揮藉由使用本發明之水性分散液之電極澱積法在其內部形 成貫通導電部的優點。形成沿著貫通孔壁面之膜狀時,其 膜厚爲1〜5 0 // m (理想爲2〜3 0 // m,更理想爲3 〜2 0 # m )。 (f 一 2 )製造方法 上述電路基板可藉由例如申請專利範圍第7項的方法 (以下稱爲「方法1」)來製造。使用圖1說明此方法之 製造步驟。 首先,如圖1 ( a )所示,在絕緣層4 1上形成貫通 孔4 1 1。接著如圖1 ( b )所示,絕緣層4 1之另一表 面4 1 a層合導電性箔4 2。此導電性箔4 2可覆蓋表面 經濟部智慧財產局員工消費合作社印製 4 1 a之全面或一部份,但至少設置於含有貫通孔4 1 1 之一開口端上之部分。換言之,導電性箔4 2之一部份形 成貫通孔411之底面421。然後,圖1 (b)所示之 基板與由申請專利範圍第1項之水性分散液所構成之電極 澱積液接觸使電極澱積液塡滿貫通孔4 1 1 ,以導電性箔 42作爲其中之一的電極進行電極澱積。藉此如圖1(c )所示,底面4 2 1上被電極澱積導電性微粒子及有機粒 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -28 - 538073 A7 --- B7 五、發明說明(26) 子,貫通孔4 1 1內形成貫通導電部4 3 1。 然後如圖1 ( d )所示,絕緣層4 1之另一表面4 1 (請先閱讀背面之注意事項再填寫本頁) b層合另一導電性箔4 2,接著以習知方法蝕刻導電性箔 4 2 ,形成導體圖形4 4,可得到如圖1 ( e )所示,表 面4 1 a所形成之導體圖形4 4與表面4 1 b所形成之導 體圖形4 4以貫通導電部4 3 1連接之電路基板。電極澱 積後之適當之步驟中,將基板適度加熱能使形成貫通導電 部4 3 1之樹脂產生熱硬化,又絕緣層4 1爲由半硬化之 樹脂所構成時,可在此階段同時進行熱硬化。 本發明之電路基板可藉由如申請專利範圍第8項之方 法(以下稱爲「方法2」)來製造。使用圖2說明此方法 之製造步驟。 此方法中’預先在形成導體圖形之厚芯配線基板上形 成導電層。厚芯配線基板可使用如圖2 ( a )所示,具備 藉由圖1 ( a )〜(e )所示之步驟等所製造之絕緣層( 也稱爲厚芯絕緣層)4 1,導體圖形4 4及貫通導電部 4 3 1之厚芯配線基板4 8。 在厚芯配線基板4 8之兩表面上如圖2 ( b )所示塗 經濟部智慧財產局員工消費合作社印製 佈光敏性絕緣樹脂形成絕緣層4 5。再以常法形成圖形, 圖2 (c)所示,形成具有使導體圖形44之一部份露出 之貫通孔4 5 1之絕緣層圖形4 6。接著如圖2 ( d )所 示,以絕緣層圖形4 6爲掩模材料,以常法進行化學鍍形 成化學鑛層4 7。可在圖2 ( c )所示之基板全面或僅一 部份形成此化學鑛層4 7 ’但至少含有貫通孔4 5 1內的 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公£7 538073 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(27 ) 部分形成化學鍍層4 7以電連接位於貫通孔4 5 1底部之 導體圖形4 4。 然後,圖2 ( d )所示之基板與由申請專利範圍第1 項之水性分散液所構成之電極殿積液接觸使電極丨殿積液塡 滿貫通孔4 5 1 ,以化學鍍層4 7作爲其中之一的電極進 行電極澱積。藉此如圖2 ( e )所示,化學鑛層4 7上被 電極澱積導電性微粒子及有機粒子,形成含有貫通孔4 5 1內所形成之貫通導電部4 3 2之導電層4 3。 圖2 ( e )所示之基板係於藉由如申請專利範圍第7 項的方法所製得之電路基板之兩面上分別一片一片層合藉 由如申請專利範圍第8項的方法所製得之電路基板。由此 狀態進行導電層4 3之圖形化後,重複如圖2 ( b )〜( e )所示之步驟可再層合藉由如申請專利範圍第8項的方 法所製得之電路基板。可僅多片層合藉由如申請專利範圍 第7項的方法所製得之電路基板,或僅多片層合藉由如申 請專利範圍第8項的方法所製得之電路基板,或僅在藉由 如申請專利範圍第7項的方法所製得之電路基板之一面層 合一片或多片藉由如申請專利範圍第8項的方法所製得之 電路基板。 \ ( g )多層配線板 其次說明如申請專利範圍第1 0〜1 7項之多層配線 板之構成及其製造方法。 (g - 1 )構成 圖3係表示本發明之多層配線板之一例之構成的說明 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) --------------------訂---------線^^· (請先閱讀背面之注意事項再填寫本頁) -30 - 538073 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(28) 用斷面圖。此多層配線板 此多層配線板具有厚芯配線基板1 〇 ’此厚芯配線基 板1 0係在絕緣性基板1 1之上面形成第1基板配線層 1 2,該絕緣性基板1 1之下面形成第2基板配線層1 3 ,第1基板配線層1 2及第2基板配線層1 3係藉由貫通 緣性基板1 1之厚度方向所延伸之基板短路部1 4彼此以 電連接。 厚芯配線基板1 0之上面形成上部絕緣層2 0 ’此上 部絕緣層2 0之上面形成上部配線層2 1 ,此上部配線層 2 1係藉由貫通上部絕緣層2 0之厚度方向所延伸之層間 短路部2 2以電連接第1基板配線層1 2。含有上部配線 層2 1之上部絕緣層2 0之上面設置具有使該上部配線層 2 1之構件連接用焊接區露出之開口 2 6之焊錫抗蝕層 2 5° 另外,厚芯配線基板1 〇之下面形成下部絕緣層3 0 ,此下部絕緣層3 0之下面形成下部配線層3 1 ,此下部 配線層3 1係藉由貫通下部絕緣層3 0之厚度方向所延伸 之層間短路部3 2以電連接第2基板配線層1 3。含有下 部配線層3 1之下部絕緣層3 0之上面設置具有使該下部 配線層3 1之構件連接用焊接區露出之開口 3 6之焊錫抗 倉虫層3 5。 構成厚芯配線基板1 〇之絕緣性基板1 1的材料例如 可使用耐熱性較高之絕緣性樹脂材料,其具體例有玻璃纖 維補強型環氧樹脂,玻璃纖維補強型聚醯亞胺樹脂,玻璃 -------------衣--------訂---------線 (請先閱讀背面之注意事項再填寫本頁&gt; 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) 538073V. Description of the invention (23) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The ingredients are reheated and hardened. In this case, it is preferable to use an aqueous dispersion containing the above-mentioned organosilane condensate or the like. As the thermosetting resin, an epoxy-based resin or a polyimide-based resin can be used. A polyimide-based resin is most preferably used. The conditions for the heat curing are not particularly limited as long as they do not decompose and remove the resin component. The ideal heating temperature is 100 to 400 t, and more preferably 150 to 300 ° C. The heating time is preferably 5 minutes or more, and more preferably 10 minutes or more. The resin component is heat-hardened to improve the mechanical characteristics of the conductive layer, and the conductive layer is compacted by sintering, which can also improve the electrical characteristics. The resin component remaining in the conductive layer has a binder function, so that a conductive layer having excellent adhesion and impact resistance can be formed. When the film is fired in a reducing atmosphere as described above, the resin component can be heated and hardened by using the heat during the fire. When the aqueous dispersion according to the present invention is used, a conductive layer having a volume resistivity of 10-4 Ω · cm or less (more preferably 0.5 × 10 to 4 Ω · cm or less) can be obtained. The thickness of the conductive layer when it is formed into a film is 1 to 8 0 # m (ideally 3 to 5 0 // m, more preferably 5 to 2 0 // m). More ideal. When forming a conductive layer having such a thickness, the use of the aqueous dispersion of the present invention can exhibit the advantage of being manufactured by electrode deposition. (e) Electronic parts When the aqueous dispersion according to the present invention, a conductive layer having a high film thickness accuracy and the like can be produced with high efficiency. It is also possible to form a conductive layer having a high film thickness accuracy and the like with high efficiency by passing through finely shaped portions such as through holes and via holes of the insulating layer. This conductive layer is suitable for electronic circuits such as conductive circuits, bumps, and assembled wiring boards (such as multilayer wiring boards). (f) Circuit board -------- ^ -------- Wire 0 ^ &quot; (Please read the precautions on the back before filling in this page) The paper size applies to Chinese National Standard (CNS) A4 specification (210 X 297 mm) -ZO-538073 A7 ________ B7 V. Description of the invention (24) (f-1) Structure (please read the precautions on the back before filling this page) The circuit board of the present invention is provided with insulation As the layer, a conductive layer formed by using the above conductive layer to form an aqueous dispersion is used. A part of the conductive layer constitutes a through conductive portion penetrating the insulating layer. The material constituting this insulating layer is not particularly limited, and polyimide resin, epoxy resin, bis-cis-butyl diamine resin, phenol resin, etc. can be used for the purpose of the prepared circuit board. For example, a glass epoxy substrate, a B T resin substrate, etc. for a thick core substrate of a general build-up wiring board, or an epoxy-based resin layer, a polyimide-based resin layer, etc. used for the insulation layer of the build-up wiring board can be used. The thickness of the insulating layer is not particularly limited. In the case of a thick-core substrate, it is usually 20 to 150 // m (ideally 50 to 100 // m). In the case of a build-up insulating layer, it is usually 5 to 1 0 / / m (ideally 10 to 50 ^ m). The polyimide resin layer used for the insulation layer printed by the employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is particularly suitable for the use of polyimide-based composites with an elastic modulus of 10 G p a or less. Such a polyfluorene-based compound can be used as disclosed in Japanese Patent Application Laid-Open No. 2000-4 4800, which is composed of (A) a polyimide component and (B) another polymer component. . (A) The polyimide component is preferably a polyimide which is soluble in an organic solvent and has a block structure, a terminally modified polyimide, a polyimide having a reactive group, and a polyamic acid, etc. . (B) The other polymer component is preferably one having a reactive group capable of directly reacting with (A) the polyfluorene imine component or indirectly through a crosslinking agent or the like. (B) Specific examples of other polymer components are polymers of vinyl monomers such as acrylic polymers, natural rubber and its epoxides, polybutadiene and its epoxides. CNS) A4 specification (2) 0 X 297 mm) 538073 A7 ------- B7 V. Description of the invention (25) Styrene-butadiene rubber, isoprene rubber, polyurethane rubber, propionitrile, Ethyl-propylene rubber, fluoropolymer, polysiloxane polymer, etc. (Please read the precautions on the back before filling this page.) The above-mentioned through conductive parts are usually filled with through holes that penetrate the above-mentioned insulating layer 'or formed into a film shape along the wall surface of the through hole. The diameter of this through hole is 4 to 15 〇 // m (ideally 6 to 10 〇 m, and more preferably 10 to Θ 0 // m). A through hole having this diameter range can effectively exert the advantage of forming a through conductive portion in the inside by the electrode deposition method using the aqueous dispersion of the present invention. When the film is formed along the wall surface of the through hole, the film thickness is 1 to 5 0 // m (ideally 2 to 3 0 // m, and more preferably 3 to 2 0 # m). (f-2) Manufacturing method The above-mentioned circuit board can be manufactured by, for example, a method (hereinafter referred to as "Method 1") in the scope of patent application. The manufacturing steps of this method will be described using FIG. First, as shown in FIG. 1 (a), a through hole 4 1 1 is formed in the insulating layer 41. Next, as shown in Fig. 1 (b), the other surface 4 1 a of the insulating layer 41 is laminated with a conductive foil 42. This conductive foil 42 may cover the surface of the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, which prints a part or all of the part 1 a, but is provided at least on an open end containing a through hole 4 1 1. In other words, a part of the conductive foil 42 forms the bottom surface 421 of the through hole 411. Then, the substrate shown in FIG. 1 (b) is brought into contact with the electrode deposition solution composed of the aqueous dispersion liquid of item 1 of the patent application, so that the electrode deposition solution fills the through holes 4 1 1, and the conductive foil 42 is used as One of the electrodes is subjected to electrode deposition. As shown in Figure 1 (c), conductive particles and organic particles are deposited on the bottom surface 4 2 1 by electrodes. The paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -28-538073 A7 --- B7 V. Description of the invention (26) In the through hole 4 1 1, a through conductive part 4 3 1 is formed. Then, as shown in FIG. 1 (d), the other surface 4 1 of the insulating layer 4 1 (please read the precautions on the back before filling this page) b. Laminate another conductive foil 4 2 and then etch in a conventional way As shown in FIG. 1 (e), a conductive pattern 4 4 formed on the surface 4 1 a and a conductive pattern 4 4 formed on the surface 4 1 b can be obtained by forming a conductive pattern 4 4 from the conductive foil 4 2 to penetrate the conductive portion. 4 3 1 Connected circuit board. In an appropriate step after electrode deposition, moderate heating of the substrate can thermally harden the resin forming the through conductive portion 4 31, and when the insulating layer 41 is composed of a semi-hardened resin, it can be performed at this stage at the same time. Heat hardened. The circuit board of the present invention can be manufactured by a method (hereinafter referred to as "Method 2") as described in the patent application No. 8 range. The manufacturing steps of this method will be described using FIG. 2. In this method, a conductive layer is formed in advance on a thick core wiring substrate on which a conductor pattern is formed. As shown in FIG. 2 (a), a thick-core wiring board can be provided with an insulating layer (also referred to as a thick-core insulating layer) manufactured by the steps shown in FIGS. 1 (a) to (e). The pattern 4 4 and the thick-core wiring board 4 8 penetrating the conductive portion 4 3 1. On both surfaces of the thick-core wiring board 48, as shown in FIG. 2 (b), printed with a photosensitive insulating resin to form an insulating layer 45, printed by a consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Then, a pattern is formed by a conventional method. As shown in FIG. 2 (c), an insulating layer pattern 46 is formed which has a through hole 4 51 that exposes a part of the conductor pattern 44. Next, as shown in Fig. 2 (d), the chemical mineral layer 47 is formed by electroless plating using a conventional method using the insulating layer pattern 46 as a mask material. The chemical mineral layer 4 7 ′ can be formed on the substrate shown in FIG. 2 (c) in full or only in part, but contains at least the through-holes 4 5 1. The size of this paper is applicable to the Chinese National Standard (CNS) A4 specification (210 x 297g £ 7 538073 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (27) Part of the electroless plating layer 4 7 is used to electrically connect the conductor pattern 4 4 at the bottom of the through hole 4 5 1. Then, Figure 2 The substrate shown in (d) is in contact with the electrode effusion formed by the aqueous dispersion of item 1 of the patent application, so that the electrode 丨 the effusion fills the through hole 4 5 1, and the electroless plating layer 4 7 is one of them. As shown in FIG. 2 (e), conductive fine particles and organic particles are deposited on the chemical mineral layer 47 by the electrode to form a through conductive portion 4 formed in the through hole 4 51. The conductive layer of 3 2 4 3. The substrate shown in Fig. 2 (e) is laminated one by one on both sides of the circuit substrate obtained by the method of item 7 of the scope of patent application. The circuit board prepared by the method of item 8. This state is advanced After the conductive layer 43 is patterned, the steps shown in Fig. 2 (b) ~ (e) can be repeated to laminate the circuit substrate obtained by the method as described in the item 8 of the patent application scope. Only multiple pieces can be laminated. Laminate a circuit substrate made by the method as claimed in item 7 of the patent application scope, or laminate multiple circuit substrates made by the method as described in the item 8 of the patent application scope or One or more circuit substrates produced by the method of the scope of patent application claim 7 are laminated with one or more circuit boards produced by the method of the scope of patent application claim. (G) Multi-layer wiring board The structure and manufacturing method of multilayer wiring board with the scope of application for patent No. 10 ~ 17. (G-1) Structure Figure 3 shows the structure of an example of the multilayer wiring board of the present invention. (CNS) A4 specification (210 X 297 mm) -------------------- Order --------- line ^^ · (Please read first Note on the back, please fill out this page again) -30-538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (28) Use sectional drawing. Multi-layer wiring board This multilayer wiring board has a thick-core wiring substrate 10. This thick-core wiring substrate 10 is formed on a first substrate wiring layer 12 on the insulating substrate 11 and a first substrate wiring layer is formed on the lower surface of the insulating substrate 11 The two substrate wiring layers 1 3, the first substrate wiring layer 12, and the second substrate wiring layer 13 are electrically connected to each other through the substrate short-circuit portion 14 extending through the thickness direction of the edge substrate 11 1. An upper insulating layer 2 0 is formed on the substrate 10. An upper wiring layer 2 1 is formed on the upper insulating layer 20. The upper wiring layer 21 is an interlayer short circuit extending through the thickness direction of the upper insulating layer 20. The section 22 is electrically connected to the first substrate wiring layer 12. On top of the upper wiring layer 21, the upper insulating layer 20 is provided with a solder resist layer 2 having an opening 26 that exposes the pads for component connection of the upper wiring layer 21, and a thick core wiring board 1 is provided. A lower insulating layer 3 0 is formed below, and a lower wiring layer 3 1 is formed below the lower insulating layer 30. The lower wiring layer 3 1 is an interlayer short-circuiting portion 3 2 extending through the thickness direction of the lower insulating layer 30. The second substrate wiring layer 13 is electrically connected. Above the lower insulating layer 30 containing the lower wiring layer 31 is provided a solder-resistant worm-resistant layer 3 5 having an opening 3 6 for exposing the soldering area for connecting the components of the lower wiring layer 31. As the material constituting the insulating substrate 11 of the thick-core wiring substrate 10, for example, an insulating resin material having high heat resistance can be used. Specific examples thereof include glass fiber reinforced epoxy resin, glass fiber reinforced polyimide resin, Glass ------------- clothing -------- order --------- line (please read the precautions on the back before filling this page &gt; this paper Dimensions are applicable to China National Standard (CNS) A4 (210 x 297 mm) 538073

經濟部智慧財產局員工消費合作社印製 五、發明說明(29 ) 纖維補強型苯酚樹脂,玻璃纖維補強型雙順丁烯二胺三嗪 樹脂,聚醯亞胺樹脂,聚醯胺樹脂,聚酯樹脂等。 又基板短路部1 4可使用以往印刷配線板所使用之各 種的構成者,例如由化學鍍及電鍍所成之筒狀金屬堆積物 所構成者,導電性微粒子被分散於熱硬化性樹脂材料中所 成之導電性膏材料之硬化物所構成者等,但使用構成後述 之層間短路部2 2及層間短路部3 2之材料,即,導電性 微粒子與由聚合性化合物及聚合物中之至少一種所構成之 有機粒子分散於水性媒體中所構成之電極殿積液中,藉由 電極澱積處理所形成之導電層所構成者較理想。 構成上部絕緣層2 0及下部絕緣層3 0之材料可使用 以往印刷配線板所使用之各種的熱硬化性樹脂材料及放射 線硬化性樹脂材料。 上部絕緣層2 0及下部絕緣層3 0所形成之層間短路 部2 2,3 2係由高分子物質中含有導電性微粒子所構成 之導電體所構成,此導電體係由特定之電極澱積液中,藉 由電極澱積處理所形成者。 形成層間短路部2 2,3 2之特定之電極澱積液導電 性微粒子與由聚合性化合物及聚合物中之至少一種所構成 之有機粒子分散於水性媒體中所構成者。此電極澱積液使 用如申請專利範圍第1〜3項之導電層形成用水性分散液 特別理想。 這種層間短路部2 2,3 2係含有以體積分率4 0〜 9 9 %,理想爲6 0〜9 5 %之導電性微粒子。滿足這種 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) --------------------訂---------線^^ (請先閱讀背面之注意事項再填寫本頁) 538073 Α7 ___ Β7 五、發明說明(30) 條件時,可確實形成導電性高,例如體積電阻率爲1 X 1〇—4Ω· cm以下,更理想爲〇 · 5χΐ〇 4Ω· cm 以下之層間短路部2 2,3 2。 (請先閱讀背面之注意事項再填寫本頁) (g — 2 )製造方法 如上述之多層配線板例如可由下述方法製造。 首先準備如圖4所示’絕緣性基板1 1之上面形成第 1基板配線層1 2 ,該絕緣性基板1 1之下面形成藉由基 板短路部1 4以電連接第1基板配線層1 2之金屬層1 3 A所成的厚芯配線基板材1 〇 a。 經濟部智慧財產局員工消費合作社印製 此厚芯配線基板材1 〇 A例如可由下述方法製造。換 言之,準備絕緣性基板1 1之下面形成金屬層1 3 A所成 之層合材料1 0 B,如圖6所示,此層合材料1 0 B之絕 緣性基板1 1上形成與應形成之基板短路部1丨對應之貫 通該絕緣性基板1 1之厚度方向之貫通孔1 4 Η。接著在 前述之電極澱積液中,以金屬層1 3 Α爲析出用陰極,對 於此層合材料1 0 B進行電極澱積處理,在貫通孔1 4H 內之金屬層1 3 A之表面堆積電極澱積液中之導電性微粒 子及有機粒子,形成堆積物,此堆積物必要時藉由加熱處 理如圖7所示形成貫通絕緣性基板1 1之厚度方向所延伸 之基板短路部1 4。必要時將絕緣性基板1 1之上面硏磨 處理後,絕緣性基板1 1之上面形成第1基板配線層1 2 ,可得到圖4所示之厚芯配線基板材1 〇 A。 上述中,絕緣性基板1 1上形成貫通孔1 4 Η的方法 例如爲了得到小孔徑之貫通孔1 4 Η時,可利用照射雷射 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538073 經濟部智慧財產局員工消費合作社印製 Α7 Β7 五、發明說明(31 ) 的方法。 電極澱積處理的方法若考慮容易控制厚度時,可利用 定電壓法。電極澱積處理之具體條件係考慮電極殿積液中 所含有之導電性微粒子及有機粒子之材質,濃度等予以適 當設定,例如外加電壓爲5 0〜5 Ο Ο V,處理時間爲 0 . 5〜2 0 0分鐘。 加熱處理藉由電極澱積處理所形成之堆積物時,該力口 熱處理條件係考慮電極澱積液之有機粒子之材質等予以適 當設定,例如理想之加熱溫度爲1 0 0〜4 0 0 °C,更理 想爲1 5 0〜3 0 0 °C,加熱時間理想爲5分鐘以上,更 理想爲1 0分鐘以上。 形成第1基板配線層1 2的方法例如可使用以往印刷 配線板製造用之配線層的形成方法,例如在絕緣性基板 1 1之上面全面施予化學鍍或電鍍銅形成金屬層,對於該 金屬層實施光蝕刻處理除去一部份,形成配線層之消去法 ,或在絕緣性基板1 1之上面施予微影術及化學鍍直接形 成圖形化之金屬層之配線層的加法,或其他的方法等。 這種厚芯配線基板材1 Ο A之上面如圖8所示,形成 與應形成之層間短路部2 2對應形成貫通孔2 2 Η之上部 絕緣層2 0。接著在前述之電極澱積液中,以第1基板配 線層1 2爲析出用陰極,進行電極澱積處理,在貫通孔 2 2 Η內在第1基板配線層1 2之表面堆積電極澱積液中 之導電性微粒子及有機粒子,形成堆積物,此堆積物必要 時藉由加熱處理如圖9所示形成貫通上部絕緣層2 0之厚 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) -34 - --------------------訂--------•線 (請先閱讀背面之注意事項再填寫本頁) 538073Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (29) Fiber-reinforced phenol resin, glass fiber-reinforced bis-butene diamine triazine resin, polyimide resin, polyimide resin, polyester Resin, etc. The substrate short-circuiting section 14 can use various structures conventionally used in printed wiring boards, for example, a cylindrical metal deposit formed by electroless plating and electroplating, and conductive fine particles are dispersed in a thermosetting resin material. The conductive paste material is composed of a hardened product of the conductive paste material, etc., but the materials constituting the interlayer short-circuiting portion 22 and the interlayer short-circuiting portion 32 described below, that is, at least conductive particles and polymerizable compounds and polymers are used. An organic particle formed is dispersed in an electrode liquid formed in an aqueous medium, and a conductive layer formed by an electrode deposition process is preferable. As the material constituting the upper insulating layer 20 and the lower insulating layer 30, various thermosetting resin materials and radiation curing resin materials conventionally used in printed wiring boards can be used. The interlayer short-circuiting portions 22, 32 formed by the upper insulating layer 20 and the lower insulating layer 30 are composed of a conductive material composed of conductive fine particles in a polymer substance, and the conductive system is composed of a specific electrode deposition liquid. , Formed by electrode deposition. The specific electrode deposition liquid forming the interlayer short-circuiting portions 22, 32 is composed of conductive fine particles and organic particles composed of at least one of a polymerizable compound and a polymer dispersed in an aqueous medium. This electrode depositing liquid is particularly preferably formed with an aqueous dispersion using a conductive layer such as those in claims 1 to 3 of the patent application. Such interlayer short-circuit portions 22, 32 contain conductive fine particles having a volume fraction of 40 to 99%, and preferably 60 to 95%. To meet this paper size, apply Chinese National Standard (CNS) A4 (210 X 297 mm) -------------------- Order ------ --- Wire ^^ (Please read the precautions on the back before filling in this page) 538073 Α7 ___ Β7 V. Description of the invention (30) Under the conditions, high conductivity can be formed, for example, the volume resistivity is 1 X 1〇— 4 Ω · cm or less, and more preferably 0.5 5 × 40 Ω · cm or less, the interlayer short-circuit portions 2 2 and 3 2. (Please read the precautions on the back before filling out this page.) (G — 2) Manufacturing method The multilayer wiring board described above can be manufactured, for example, by the following method. First, as shown in FIG. 4, a first substrate wiring layer 1 2 is formed on the insulating substrate 11, and a first substrate wiring layer 12 is electrically connected to the first substrate wiring layer 1 4 on the lower surface of the insulating substrate 11. The thick-core wiring-based board material 10a formed by the metal layer 1A. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs This thick core wiring board 10A can be manufactured, for example, by the following method. In other words, a laminated material 1 0 B formed by forming a metal layer 1 3 A under the insulating substrate 11 is prepared. As shown in FIG. 6, the laminated substrate 1 0 B is formed and should be formed on the insulating substrate 11. Corresponding to the through-hole 1 4 贯通 of the substrate short-circuit portion 1 丨 through the thickness direction of the insulating substrate 11. Next, in the aforementioned electrode deposition solution, using the metal layer 1 3 A as a cathode for precipitation, electrodeposition treatment was performed on this laminated material 10 B to deposit on the surface of the metal layer 1 3 A in the through hole 14 H The conductive fine particles and the organic particles in the electrode deposition liquid form a deposit, and the deposit may be heated to form a substrate short-circuit portion 14 extending through the thickness direction of the insulating substrate 11 as shown in FIG. 7 as necessary. After honing the upper surface of the insulating substrate 11 as necessary, a first substrate wiring layer 1 2 is formed on the insulating substrate 11 to obtain a thick core wiring base plate 10A as shown in FIG. 4. In the above, the method of forming the through-holes 1 4 Η on the insulating substrate 11 is, for example, to obtain the through-holes 1 4 孔径 with a small aperture, the irradiation laser can be applied to the paper standard of China National Standards (CNS) A4 (210 X 297 mm) 538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Method of Invention Description (31). If the electrode deposition method is considered to be easy to control the thickness, the constant voltage method can be used. The specific conditions of the electrode deposition process are appropriately set in consideration of the material and concentration of the conductive fine particles and organic particles contained in the electrode effusion. For example, the applied voltage is 50 to 5 0 V, and the processing time is 0.5. ~ 2 0 0 minutes. When heating the deposits formed by electrode deposition, the conditions of the heat treatment should be appropriately set in consideration of the material of the organic particles of the electrode deposition liquid, for example, the ideal heating temperature is 100 to 4 0 ° C is more preferably 150 to 300 ° C, and the heating time is preferably 5 minutes or more, and more preferably 10 minutes or more. The method for forming the first substrate wiring layer 12 can be, for example, a conventional method for forming a wiring layer used in the manufacture of a printed wiring board. For example, the insulating substrate 11 can be subjected to electroless plating or copper plating to form a metal layer. The layer is subjected to a photo-etching process to remove a part to form a wiring layer, or an addition method of directly forming a patterned metal layer by applying lithography and chemical plating on the insulating substrate 11 or other methods Method, etc. As shown in Fig. 8, the upper surface of this thick-core wiring base plate 10A is formed with an insulating layer 20 formed on the upper portion corresponding to the interlayer short-circuit portion 22 to be formed, and an upper portion. Next, in the aforementioned electrode deposition solution, the first substrate wiring layer 12 is used as a cathode for deposition, and an electrode deposition process is performed to deposit an electrode deposition solution on the surface of the first substrate wiring layer 12 in the through hole 2 2 Η. The conductive fine particles and organic particles in the medium form a deposit, and the deposit may be heated to form a thickness that penetrates the upper insulating layer 20 as shown in FIG. 9 as required. The paper size is in accordance with Chinese National Standard (CNS) A4 specification (210 x 297 mm) -34--------------------- Order -------- • Line (Please read the notes on the back before filling in this Page) 538073

五、發明說明(32 ) 度方向所延伸之層間短路部2 2。 (請先閱讀背面之注意事項再填寫本頁) 上述中,形成貫通孔2 2 Η之上部絕緣層2 〇的形成 方法可利用例如將液狀之放射線硬化性樹脂材料塗佈於厚 芯配線基板材1 〇 Α之上面後,該塗膜上實施曝光處理及 顯影處理形成貫通孔之上部絕緣層2 0之形成方法,或在 厚芯配線基板材1 〇 A之表面塗佈液狀之熱硬化性樹脂材 料或配置薄片狀之熱硬化性樹脂材料,藉由加熱處理形成 上部絕緣層2 0,此上部絕緣層2 0上進行雷射照射形成 貫通孔的方法等。 電極澱積處理的方法及具體的條件係與形成前述之基 板短路部1 4相同。 如上述形成上部絕緣層2 0及層間短路部2 2,必要 時將該上部絕緣層2 0之表面硏磨處理後,如圖1 0所示 該上部絕緣層2 0之上面施予化學鍍或電鍍形成金屬層 2 1 A。 接著對於厚芯配線基板材1 〇 A之金屬層1 3 A實施 光蝕刻除去一部份,絕緣性基板1 0之下面形成第2基板 配線層1 3,藉此形成厚芯配線基板1 0。 經濟部智慧財產局員工消費合作社印製 厚芯配線基板1 0之下面如圖1 2所示形成與應形成 之層間短路部3 2對應之貫通孔3 2 Η之下部絕緣層3〇 。接著在前述之電極源積液中,以第2基板配線層1 3爲 析出用陰極,進行電極澱積處理,在貫通孔3 2Η內,第 2基板配線層1 3之表面堆積電極澱積液中之導電性微粒 子及有機粒子,形成堆積物,此堆積物必要時藉由加熱處 本紙張尺度適用中國國家標準(CNS)A4規格(2]〇χ 297公釐) 538073V. Description of the invention The inter-layer short-circuit portion 22 extending in the direction of (32) degrees. (Please read the precautions on the back before filling in this page.) In the above, the formation method of forming the through hole 2 2 Η upper insulating layer 2 0 can be applied to a thick core wiring substrate by using a liquid radiation-curable resin material, for example. After the upper surface of the board 1 OA, a method for forming an insulating layer 20 on the upper part of the through hole by performing an exposure process and a development process on the coating film, or applying liquid heat curing on the surface of the thick core wiring board board 10 A A heat-resistant resin material or a sheet-shaped thermosetting resin material is formed by heat treatment to form an upper insulating layer 20, and a method of forming a through hole by performing laser irradiation on the upper insulating layer 20. The method and specific conditions for the electrode deposition process are the same as those for forming the substrate short-circuit portion 14 described above. The upper insulating layer 20 and the interlayer short-circuiting portion 22 are formed as described above. After honing the surface of the upper insulating layer 20 as necessary, as shown in FIG. 10, the upper insulating layer 20 is chemically plated or A metal layer 2 1 A is formed by electroplating. Next, a part of the metal layer 1 A of the thick-core wiring base plate 10 A is subjected to photoetching to remove a part, and a second substrate wiring layer 13 is formed under the insulating substrate 10 to form a thick-core wiring substrate 10. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the thick core wiring substrate 10 is formed with a through-hole 3 2 〇 a lower insulating layer 30 corresponding to the interlayer short-circuit portion 32 to be formed as shown in FIG. 12. Next, in the aforementioned electrode source effusion, the second substrate wiring layer 13 is used as a cathode for deposition, and an electrode deposition process is performed, and the electrode deposition liquid is deposited on the surface of the second substrate wiring layer 13 in the through hole 3 2Η. The conductive fine particles and organic particles in the medium form a deposit. If necessary, the deposit is heated to the size of the paper, which applies the Chinese National Standard (CNS) A4 specification (2) 0 × 297 mm. 538073

經濟部智慧財產局員工消費合作社印製 五、發明說明(33 ) 理如圖1 3所示形成貫通上部絕緣層2 0之厚度方向所延 伸之層間短路部2 2。 上述中,形成貫通孔3 2 Η之下部絕緣層3 0的方法 ,電極澱積處理的方法及具體的條件係與前述形成下部絕 緣層3 0及層間短路部2 2相同。 接著以光蝕刻處理除去在上部絕緣層2 0之表面所形 成之金屬層2 1 Α之一部份,如圖1 4所示,形成上部配 線層2 1 ,同時在下部絕緣層3 0之下面必要時進行硏磨 處理後,該下部絕緣層3 0之下面形成下部配線層3 1。 形成下部配線層3 1的方法例如與形成前述第1基板 配線層1 2的方法相同,可使用以往印刷配線板製造用之 配線層的形成方法,若使用消去法時,該光蝕刻處理可與 光蝕刻處理形成上部配線層2 1之金屬層2 1 A相同的步 驟。 分別在含有上部配線層2 1之上部絕緣層2 0之上面 及含有下部配線層3 1之下部絕緣層3 0之下面形成具有 使上部配線層2 1及下部配線層3 1之構件連接用焊接區 露出之開口 2 6 ,3 6之焊錫一抗蝕層2 5 ,3 5 ,可得 到如圖3所示之多層配線板。 依據這種多層配線板時,導電性微粒子與有機粒子分 散所成之電極澱積液中,以基板配線層1 2,1 3作爲析 出用陰極,藉由電極澱積處理以短時間形成層間短路部 2 2,3 2,因此製造多層配線板時,可得到高的生產性 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ----------------I---訂--------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538073 Λ7 Β7 五、發明說明(34) 能夠輕易調製低粘度之電極源積液,使用這種電極源 積液時,即使上部絕緣層2 0及下部絕緣層3 0之各層所 形成之貫通孔2 1 Η,3 1 Η爲較小直徑者,電極澱積液 也能進入貫通孔2 1Η,3 1Η內,結果可確實形成所要 之層間短路部2 2,3 2,因此可得到高的信賴性。 本發明之導電層形成用水性分散液係藉由電極澱積形 成導電層,因此相較於以往之塗佈,印刷等之技術,可容 易形成膜厚,位置等之精度更高之導電層。而且並不實施 鍍敷,係藉由微粒子之電極澱積形成膜,因此膜之成長速 度快,生產性佳。依據此水性分散液時,導電性微粒子及 樹脂成分之有機粒子被電極澱積,可得到對於基板之粘著 性優異之導電層。本發明中,樹脂成分係在水性媒體中以 粒子形態分散,因此,與有機溶媒溶液或無溶媒狀態使用 樹脂成分的情形不同,樹脂成分之濃度或分子量對於分散 液之粘度影響較少,可作爲適合電極澱積之粘度的分散液 〇 使用此水性分散液之本發明的導電層可得到如上述對 於基板之粘著性優異,膜厚精度,位置精度等較高者。本 發明之導電層係發揮這種特性,適用於導電性電路,凸塊 及組合這些之電路基板等之電子零件。 依據本發明之電路基板的製造方法時,能以高效率製 造由本發明之水性分散液所形成,且具備貫通絕緣層之貫 通導電部之電路基板。 依據本發明之多層配線板時,導電性微粒子及有機粒 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) ------------f--------訂---------線· (請先閱讀背面之注意事項再填寫本頁) 538073 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(35) 子分散所成之電極澱積液中,以基板配線層作爲析出用電 極,藉由電極澱積處理以短時間形成層間短路部,因此製 造多層配線板時,可得到高的生產性。 能夠輕易調製低粘度之電極澱積液,使用這種電極澱 積液時,即使絕緣層所形成之貫通孔爲較小直徑者,電極 澱積液也能進入貫通孔內,結果可確實形成所要之層間短 路部,因此可得到高的信賴性。 依據本發明之多層配線板之製造方法時,導電性微粒 子及有機粒子分散所成之電極澱積液中,以基板配線層作 爲析出用電極,藉由電極澱積處理以短時間形成層間短路 部,因此製造多層配線板時,可得到高的生產性。 能夠輕易調製低粘度之電極澱積液,使用這種電極澱 積液時,即使絕緣層所形成之貫通孔爲較小直徑者,電極 澱積液也能進入貫通孔內,結果可確實形成所要之層間短 路部,因此可製造連接信賴度高之多層配線板。 圖面之簡單說明 圖1 ( a )〜(e )係表示使用方法1之電路基板之 製造步驟的模式斷面圖。 圖2 ( a )〜(e )係表示使用方法2之電路基板之 製造步驟的模式斷面圖。 圖3係表示本發明之多層配線板之一例之構成的說明 斷面圖。 圖4係表示爲了得到圖3所示之多層配線板之厚芯配 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -όό - --------------------訂--------1 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538073 A7 ______B7_____ 五、發明說明(37 ) 以下藉由實施例及比較例更具體說明本發明。以下若 無特別聲明時,「%」係表示「重量%」。 (合成例1 :銅微粒子之分散液a ) 藉由氣體中蒸發法所製造之銅微粒子(真空冶金股份 有限公司製,數目平均一次粒徑〇 . 〇 5 0 //m) 2 〇重 量份及異丙醇8 0重量份以均質器混合機混合後,添加二 乙醇胺0 · 6重量份,再以超音波分散1 〇分鐘,得到無 凝集物之銅微粒子之醇分散液(固形份濃度2 0 % )。 (合成例2 :銅微粒子之分散液b ) 藉由還原法所製造之銅微粒子(住友金屬股份有限公 司製,數目平均一次粒徑0 · 3 //m) 20重量份及異丙 醇2 0重量份以均質器混合機混合後,添加一乙醇胺1重 量份及異丙醇3 0重量份,再使用高壓均質器(白水化學 製),得到無凝集物之銅微粒子之醇分散液(固形份濃度 2 0%)。 (合成例3 :銅微粒子之分散液c ) 藉由電解法所製造之銅微粒子(川鐵礦業股份有限公 司,數目平均一次粒徑0 · 5 //m) 2 〇重量份及異丙醇 3 0重重份以均質混合機混合後’添加異丙醇5 0重量份 ,再使用高壓均質器(白水化學製),得到無凝集物之銅 微粒子之醇分散液(固形份濃度2 0 % )。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 74u - --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538073 A7 _ B7 五、發明說明(38 ) (合成例4 :鎳微粒子之分散液) 藉由氣體中蒸發法所製造之鎳微粒子(真空冶金股份 有限公司製,數目平均一次粒徑0 · 020#m) 1〇重 量份及異丙醇9 0重量份以均質混合機混合後,添加二乙 醇胺0 · 3重量份,再以超音波分散1 〇分鐘,得到無凝 集物之鎳微粒子之醇分散液(固形份濃度1 0 % )。 (合成例5 :銀微粒子之分散液) 藉由氣體中蒸發法所製造之銀微粒子(真空冶金股份 有限公司製,數目平均一次粒徑0·050#m) 20重 量份及乙醇8 0重量份以均質混合機混合後,添加二乙醇 胺0 · 3重量份,再以超音波分散1 0分鐘,得到無凝集 物之銀微粒子之醇分散液(固形份濃度2 0 % )。 〔2〕有機粒子乳膠之調製 (合成例6 :丙烯酸系樹脂乳膠) 將異丙醇1 0 0重量份投入反應器中,升溫至8 0 °C 。以另外容器混合乙基丙烯酸酯8 5重量份,甲基丙烯酸 1 0重量份,縮水甘油基甲基丙烯酸酯5重量份,偶氮異 丁腈1重量份,然後以5小時連續滴入前述異丙醇中,得 到丙烯酸樹脂之醇溶液。在離子交換水9 0重量份中強力 攪拌狀態下添加此丙烯酸樹脂溶液2 0重量份(固形份換 算1 0重量份)與一乙醇胺〇 · 2重量份,得到以丙烯酸 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) Τ7ΓΡ· (請先閱讀背面之注意事項再填寫本頁) --------1T------1 —^ 經濟部智慧財產局員工消費合作社印製 538073 A7 _ B7 五、發明說明(39) 系樹脂聚合物爲主成份之陰離子性有機粒子之乳膠。 (合成例7 :環氧系樹脂乳膠A ) 混合由甲苯二異氰酸酯與2 -乙基己醇所構成之嵌斷 異氰酸酯4 0重量份,與使Epycoat 8 2 8 (油化SheelPrinted by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (33) The interlayer short-circuiting section 22 extending through the thickness direction of the upper insulating layer 20 is formed as shown in Fig. 13. In the above, the method of forming the lower insulating layer 30 of the through hole 3 2 ,, the method of electrode deposition and the specific conditions are the same as those of forming the lower insulating layer 30 and the interlayer short-circuiting section 22 described above. Then, a portion of the metal layer 2 1 A formed on the surface of the upper insulating layer 20 is removed by photoetching. As shown in FIG. 14, an upper wiring layer 2 1 is formed, and at the same time, it is under the lower insulating layer 30. After honing if necessary, a lower wiring layer 31 is formed under the lower insulating layer 30. The method for forming the lower wiring layer 31 is, for example, the same as the method for forming the first substrate wiring layer 12 described above. A conventional method for forming a wiring layer used for manufacturing printed wiring boards can be used. The photo-etching process is the same step as forming the metal layer 2 1 A of the upper wiring layer 21. Soldering for connecting the members having the upper wiring layer 21 and the lower wiring layer 31 are formed on the upper wiring layer 21 and the upper insulating layer 20 and the lower wiring layer 31 and the lower insulating layer 30 respectively. The solder-resist layers 2 5 and 3 5 of the openings 2 6 and 36 exposed in the area can obtain a multilayer wiring board as shown in FIG. 3. In the case of such a multilayer wiring board, the substrate wiring layers 12 and 13 are used as electrode for deposition in an electrode deposition solution in which conductive fine particles and organic particles are dispersed, and an interlayer short circuit is formed in a short time by electrode deposition treatment. Department 2, 2, 3 2, so you can get high productivity when manufacturing multilayer wiring boards. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ----------- ----- I --- Order --------- (Please read the precautions on the back before filling out this page) Printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs 538073 Λ7 Β7 V. Description of the invention ( 34) Low-viscosity electrode source effusion can be easily prepared. When this kind of electrode source effusion is used, even though the through holes 2 1 Η, 3 1 形成 formed by each of the upper insulating layer 20 and the lower insulating layer 30 are In the case of a small diameter, the electrode deposition liquid can also enter the through holes 2 1Η, 3 1Η, and as a result, a desired interlayer short-circuit portion 2 2, 3 2 can be surely formed, and thus high reliability can be obtained. The conductive layer forming aqueous dispersion of the present invention forms a conductive layer by electrode deposition. Therefore, it is easier to form a conductive layer with higher film thickness and position accuracy than conventional techniques such as coating and printing. In addition, plating is not performed, and the film is formed by electrode deposition of fine particles, so the film has a fast growth rate and good productivity. According to this aqueous dispersion, conductive particles and organic particles of a resin component are deposited by an electrode, and a conductive layer having excellent adhesion to a substrate can be obtained. In the present invention, the resin component is dispersed in the form of particles in an aqueous medium. Therefore, unlike the case where the resin component is used in an organic solvent solution or a non-solvent state, the concentration or molecular weight of the resin component has little influence on the viscosity of the dispersion, and can be used as A dispersion liquid suitable for electrode deposition. The conductive layer of the present invention using this aqueous dispersion liquid can obtain one having excellent adhesion to a substrate, high film thickness accuracy, and high position accuracy, as described above. The conductive layer of the present invention exhibits such characteristics and is suitable for electronic parts such as conductive circuits, bumps, and circuit boards combining these. According to the method for manufacturing a circuit board according to the present invention, a circuit board formed from the aqueous dispersion of the present invention and having a through conductive portion penetrating an insulating layer can be manufactured with high efficiency. When the multilayer wiring board according to the present invention is used, the conductive fine particles and organic particles are sized according to the Chinese National Standard (CNS) A4 (210 x 297 mm) ------------ f --- ----- Order --------- Line · (Please read the notes on the back before filling this page) 538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (35) In the electrode deposition liquid formed by the sub-dispersion, the substrate wiring layer is used as a deposition electrode, and the interlayer short-circuit portion is formed in a short time by the electrode deposition process. Therefore, high productivity can be obtained when manufacturing a multilayer wiring board. It can easily prepare a low-viscosity electrode deposition solution. When using this electrode deposition solution, the electrode deposition solution can enter the through-holes even if the through-holes formed by the insulating layer have a smaller diameter. Because of the short circuit between layers, high reliability can be obtained. In the method for manufacturing a multilayer wiring board according to the present invention, a substrate wiring layer is used as an electrode for precipitation in an electrode deposition liquid in which conductive fine particles and organic particles are dispersed, and an interlayer short-circuit portion is formed in a short time by electrode deposition processing. Therefore, when manufacturing a multilayer wiring board, high productivity can be obtained. It can easily prepare a low-viscosity electrode deposition solution. When using this electrode deposition solution, the electrode deposition solution can enter the through-holes even if the through-holes formed by the insulating layer have a smaller diameter. The interlayer short-circuiting part makes it possible to manufacture a multilayer wiring board with high connection reliability. Brief Description of Drawings Figs. 1 (a) to (e) are schematic sectional views showing the manufacturing steps of the circuit substrate using the method 1. Figs. 2 (a) to (e) are schematic sectional views showing the manufacturing steps of the circuit board using the method 2; Fig. 3 is an explanatory sectional view showing the structure of an example of a multilayer wiring board of the present invention. Figure 4 shows that in order to obtain the thick core of the multilayer wiring board shown in Figure 3, the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm)-όό------------ --------- Order -------- 1 (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 538073 A7 ______B7_____ V. Invention Description ( 37) Hereinafter, the present invention will be described more specifically with reference to examples and comparative examples. Unless otherwise stated, "%" means "% by weight". (Synthesis Example 1: Dispersion liquid a of copper fine particles a) Copper fine particles (manufactured by Vacuum Metallurgy Co., Ltd., the number-average primary particle diameter of 0.05 0 / m) 2 0 parts by weight and 80 parts by weight of isopropanol were mixed in a homomixer, 0.6 parts by weight of diethanolamine was added, and the particles were dispersed by ultrasonic for 10 minutes to obtain an alcohol dispersion (solid content concentration of 0) of copper fine particles without aggregates. %). (Synthesis Example 2: Dispersion liquid b of copper fine particles) Copper fine particles (manufactured by Sumitomo Metal Co., Ltd., number average primary particle diameter 0 · 3 // m) produced by reduction method 20 parts by weight and isopropanol 2 0 After mixing parts by weight with a homomixer, add 1 part by weight of monoethanolamine and 30 parts by weight of isopropanol, and then use a high-pressure homogenizer (manufactured by Shimizu Chemicals) to obtain an alcohol dispersion of copper particles without solids (solid content) Concentration 20%). (Synthesis Example 3: Dispersion liquid c of copper microparticles) Copper microparticles produced by electrolytic method (Chuantie Mining Co., Ltd., number average primary particle diameter 0 · 5 // m) 2 0 parts by weight and isopropyl alcohol After mixing 30 parts by weight with a homomixer, 50 parts by weight of isopropyl alcohol was added, and then a high-pressure homogenizer (made by Shimizu Chemical Co., Ltd.) was used to obtain an alcohol dispersion of copper particles without agglomerates (solid content concentration 20%). . This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) 74u--------------------- Order -------- -Line (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 538073 A7 _ B7 V. Description of the invention (38) (Synthesis Example 4: Dispersion liquid of nickel particles) 10 parts by weight of nickel fine particles (manufactured by Vacuum Metallurgy Co., Ltd., the number-average primary particle size 0 · 020 # m) manufactured by the middle evaporation method and 90 parts by weight of isopropanol were mixed in a homomixer, and then diethanolamine 0 was added. -3 parts by weight, and then ultrasonically dispersed for 10 minutes to obtain an alcohol dispersion (solid content concentration of 10%) of nickel fine particles without aggregates. (Synthesis Example 5: Dispersion liquid of silver fine particles) 20 parts by weight of silver fine particles (manufactured by Vacuum Metallurgy Co., Ltd., the number average primary particle diameter of 0 · 050 # m) and 80 parts by weight of ethanol produced by a gas evaporation method After mixing with a homomixer, 0.3 parts by weight of diethanolamine was added, followed by ultrasonic dispersion for 10 minutes to obtain an alcohol dispersion (solid content concentration of 20%) of silver fine particles without aggregates. [2] Preparation of organic particle latex (Synthesis Example 6: acrylic resin latex) 100 parts by weight of isopropanol was put into a reactor, and the temperature was raised to 80 ° C. In a separate container, 8 parts by weight of ethyl acrylate, 10 parts by weight of methacrylic acid, 5 parts by weight of glycidyl methacrylate, and 1 part by weight of azoisobutyronitrile were mixed, and then the aforementioned isocyanate was continuously added dropwise over 5 hours. In propanol, an alcohol solution of an acrylic resin was obtained. Add 20 parts by weight of this acrylic resin solution (10 parts by weight in terms of solid content conversion) and 0.2 parts by weight of monoethanolamine in a strong stirring state of 90 parts by weight of ion-exchanged water to obtain the acrylic paper standard applicable to Chinese national standards. (CNS) A4 specification (210 X 297 mm) Τ7ΓΡ · (Please read the notes on the back before filling this page) -------- 1T ------ 1 — ^ Intellectual Property Bureau, Ministry of Economic Affairs Printed by employee consumer cooperatives 538073 A7 _ B7 V. Description of the invention (39) is a latex of anionic organic particles with resin polymer as the main component. (Synthesis Example 7: Epoxy resin latex A) 40 parts by weight of an isocyanate composed of toluene diisocyanate and 2-ethylhexanol was mixed with Epycoat 8 2 8 (oilized Sheel

Epoxy公司製)與聚竣酸(Johnson Polymer製)反應所得 之環氧聚羧酸加成物6 0重量份,添加作爲P Η調節劑之 一乙醇胺3重量份。在離子交換水4 0 0重量份中攪拌狀 態下添加上述混合液,得到以環氧系樹脂前驅物爲主成份 之陰離子性有機粒子之乳膠。 (合成例8 :環氧系樹脂乳膠Β ) 混合由甲苯二異氰酸酯與2 -乙基己醇所構成之嵌斷 異氰酸酯3 5重量份,與使E p y c〇a t 8 2 8 (油 化Sheel Epoxy公司製之商品名)與二乙胺反應所得之環氧 胺加成物6 5重量份,添加作爲p Η調節劑之醋酸2 · 5 重量份。在離子交換水4 0 0重量份中攪拌狀態下添加上 述混合液,得到以環氧系樹脂前驅物爲主成份之陽離子性 有機粒子之乳膠。 (合成例9 :聚醯亞胺系樹脂乳膠) 將四羧酸二酐之3 ,3 ',4,4,一聯苯砸四羧酸二 酉于 32 . 29g (9〇mmol)及 1,3,3a ,4, 5 ,9b —六氫化—5 -(四氫化一 2,5 —二羰基一 3 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -42 - ----------------I---訂--------I ^_w (請先閱讀背面之注意事項再填寫本頁) 538073 經濟部智慧財產局員工消費合作社印製 Λ7 B7___ 五、發明說明(40 ) —呋喃基)一萘〔1 ,2 — C〕—呋喃一 1 ,3 -二酮 3 ·〇〇g (l〇mmo 1),二胺化合物之2 , 2 —雙 〔4 一(4 —胺基苯氧基)苯基〕丙烷36 · 95g ( 9〇m m ◦ 1 )及有機基矽氧烷(信越化學製,商品名「 LP71〇〇」)2 · 49g (lOmmo 1)溶解 N — 甲基一吡咯烷酮4 5 0 g中,室溫下反應1 2小時。然後 此反應溶液中添加吡啶3 2 g及醋酐7 1 g,以1 0 0 °C 進行脫水閉環反應3小時。接著減壓餾去反應溶液,精製 後得到固形份1 0 %之聚醯亞胺溶液。 將含有r - 丁內酯1 0 0重量份之反應容器在氮氣體 氣氛下保持8 5 °C,將由正丁基丙烯酸酯6 5重量份,二 甲胺基乙基丙烯酸酯3 0重量份,縮水甘油基甲基丙烯酸 酯5重量份及偶氮雙異丁腈1重量份所構成之混合液以5 個小時連續添加於該反應容器內,攪拌下進行溶液聚合。 滴下結束後,以8 5 °C繼續攪拌2小時,完成溶液聚合, 得到固形份5 0 %之丙烯酸聚合物之溶液。 混合聚醯亞胺溶液5 0重量份(固形份),丙烯酸聚 合物之溶液3 0重量份(固形份)及E p y c 〇 a t 8 2 8 (油化 Sheel Epoxy公司製之商品名)2 0重量份,以7 〇°C反應 3小時後,徐徐添加醋酸3重量份混合調整p Η。接著徐 徐添加蒸餾水1 〇 〇 〇重量份,強力攪拌得到以聚醯亞胺 系樹脂爲主成份之陽離子性有機粒子之乳膠。 〔水性分散液之調製〕 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) -4^- --------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 538〇73 A7 五、發明說明(41 ) (實施例1 ) 將合成例1製得之銅微粒子之分散液a 5 0 0重量份 (固形份換算1 〇 〇重量份)與合成例6製得之丙烯酸系 樹脂乳膠1 0 0重量份(固形份換算1 〇重量份)混合調 製水性分散液。此水性分散液中之銅微粒子與丙烯酸系樹 脂之體積比爲5 3 / 4 7,以Karr-Fisc her、法所測得之水 份量爲1 3重量%。 (實施例2 ) 將合成例2製得之銅微粒子之分散液b 5 0 0重量份 (固形份換算1 〇 〇重量份)與合成例6製得之丙烯酸系 樹脂乳膠1 0 0重量份(固形份換算1 0重量份)混合調 製水性分散液。此水性分散液中之銅微粒子與丙烯酸系樹 脂之體積比爲5 3 / 4 7,以Karr-Fi scher' s法所測得之水 份重爲1 3重量%。 (實施例3 ) 將合成例4製得之鎳微粒子之分散液1 〇 〇 0重量份 (固形份換算1 Ο 0重量份)與合成例6製得之丙烯酸系 樹脂乳膠1 0 0重量份(固形份換算1 0重量份)混合調 製水性分散液。此水性分散液中之鎳微粒子與丙烯酸系樹 脂之體積比爲5 3/ 47,以1^^4^(:1^^法所測得之水 份量爲7重量%。 (請先閱讀背面之注意事項再填寫本頁} f--------訂———線 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 14 _ 538073 Λ7 B7 五、發明說明(42) (實施例4 ) (請先閱讀背面之注意事項再填寫本頁) 將合成例5製得之銀微粒子之分散液5 0 0重量份( 固形份換算1 0 0重量份)與合成例6製得之丙烯酸系樹 脂乳膠1 0 0重量份(固形份換算1 0重量份)混合調製 水性分散液。此水性分散液中之銀微粒子與丙烯酸系樹脂 之體積比爲49/51,以Karr-Fischer's法所測得之水份 量爲1 3重量%。 (實施例5 ) 將合成例5製得之銀微粒子之分散液5 0 0重量份( 固形份換算1 0 0重量份)與合成例7製得之環氧系樹脂 乳膠A 5 0重量份(固形份換算1 0重量份)混合調製水 性分散液。此水性分散液中之銀微粒子與環氧系樹脂之體 積比爲49/5 1 ,以Karr-Fis cher's法所測得之水份量爲 7重量%。 (實施例6 ) 經濟部智慧財產局員工消費合作社印製 將合成例1製得之銅微粒子之分散液a 5 0 0重量份 (固形份換算1 0 0重量份)與合成例6製得之環氧系樹 脂乳膠1 0 0重量份(固形份換算1 0重量份)混合調製 水性分散液。此水性分散液中之銅微粒子與環氧系樹脂之 體積比爲5 3 / 4 7,以Ka^-Fischer、法所測得之水份量 爲6 · 5重量%。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 經濟部智慧財產局員工消費合作社印製 538073 Λ7 B7 五、發明說明(43) (實施例7 ) 將合成例3製得之銅微粒子之分散液c 5 0 0重量份 (固形份換算1 〇 〇重量份)與合成例9製得之聚醯亞胺 系樹脂乳膠3 0 . 1重量份(固形份換算2 · 0重量份) 混合調製水性分散液。此水性分散液中之銅微粒子與聚醯 亞胺系樹脂之體積比爲8 5 / 1 5,以Karr-Fischer's法所 測得之水份量爲3 . 7重量%。 (實施例8 ) 將合成例4製得之鎳微粒子之分散液1 0 0 0重量份 (固形份換算1 0 0重量份)與合成例8製得之環氧系樹 脂乳膠B 1 〇 〇重量份(固形份換算1 0重量份)混合調 製水性分散液。此水性分散液中之鎳微粒子與環氧系樹脂 之體積比爲5 3 / 4 7,以Karr-Fischer's法所測得之水份 量爲3 . 5重量%。 (實施例9 ) 將合成例5製得之銀微粒子之分散液5 0 0重量份( 固形份換算1 0 0重量份)與合成例9製得之聚醯亞胺系 樹脂乳膠1 0 0重量份(固形份換算6 · 5重量份)混合 調製水性分散液。此水性分散液中之銀微粒子與聚醯亞胺 系樹脂之體積比爲5 9 / 4 1,以Karr-Fischer's法所測得 之水份量爲1 1重量%。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -46 - ------------衣--------訂---------線AW (請先閱讀背面之注意事項再填寫本頁) 538073 經濟部智慧財產局員工消費合作社印製 Λ7 B7 五、發明說明(44) (比較例1 ) 以離子交換水1 0 0重量份取代實施例1之丙烯酸系 樹脂乳膠1 0 0重量份,然後添加於合成例1製得之銅微 粒子之分散液a 5 0 0重量份(固形份換算1 〇 〇重量份 )中,調製水性分散液。 (比較例2 ) 直接使用(即,未添加水性分散液)合成例1製得之 銅微粒子之醇分散液a 5 0 0重量份(固形份換算1 〇 〇 重量份)。 (比較例3 ) 以離子交換水5 0 0重量份取代實施例6之環氧系樹 脂乳膠1 0 0重量份,然後添加於合成例1製得之銅微粒 子之分散液a 5 0 0重量份(固形份換算1 〇 〇重量份) 中,調製水性分散液。 〔導電層之形成及性能評價〕 〔4 一 1〕陽極上之電極澱積 分別於實施例1〜5及比較例1 ,2之分散液中配置 作爲陽極之銅濺鍍砂晶圓及作爲對向電極(陰極)之 S U S板,以7 Ο V之定電壓法在陽極上電極澱積(電極 澱積時間:2分鐘)粒子。然後,以1 0 0 °C加熱1 0分 鐘,再於混合3 %氫之氮氣氛中以2 5 0 °C加熱1小時, 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ------------衣--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 538073 A7 ______Β7__一 五、發明說明(45 ) 得到厚度1 5 // m之導電層。又比較例2之醇分散液中即 使施加電壓也無法形成膜。 實施例1〜5及比較例1 ,2之分散液之貯藏安定性 係以下述方法評價。電極澱積所得之導電層之性能係以下 述方法評價。結果如表1及表2所示。 〔貯藏安定性〕 將分散液置入塑膠瓶內,以目視觀察在2 0 °C保存 1 0天後之分散狀態及粘度。評價結果係以下述2階段表 不。 〇:粘度無變化,分散狀態良好 X :分離成兩層 〔體積電阻率〕 依據J I S K 6 4 8 1測定。 (先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 並 離 剝 之 層 電 導 斷 評 驗 試 離 剝 之 帶 膠 。化化 著價變變 。 粘評無微離 玢段全稍剝 1 洛階完僅有 性賽 2 ...... 著以述〇 △ X 粘下 C 以 木紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) 538073 A7 B7 五、發明說明(46 ) 經濟部智慧財產局員工消費合作社印製 表1 實施例1 實施例2 實施例3 導 粒子材質 銅 銅 鎳 電 體積電阻率&quot; 0.017 0.017 0.070 性 一次粒徑(// m)重 0.05 0.30 0.02 粒 量份(固形分) 100 100 100 子 有 粒子材質 丙烯酸羧基 丙烯酸羧基 丙烯酸羧基 機 官能基 10 10 10 业丄 重量份(固形分) 子 水 體積比2) 53/47 53/47 53/47 性 pH 9.0 9.2 8.9 分 粘度(mPa · s) 10 10 10 散 水分量(%) 13 13 7 液 固形分濃度(%) 18 18 18 貯存安定性 〇 〇 〇 導 膜厚(// m) 15 16 15 電 體積電阻率&quot; 0.2 0.08 0.9 層 接著性 〇 〇 〇 1) 體積電阻率之單位爲(ΗΤ4Ω · cm)。 2) 體積比係以導電性粒子/有機粒子表示。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -49 - ------------41k衣--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 538073 經濟部智慧財產局員工消費合作社印製 五、發明說明(47 ) 表2 實施例4 實施例5 比較例1 比較例2 導 粒 子 材 質 銀 銀 銅 銅 電 體 積 電 阻率&quot; 0.016 0.0176 0.017 0.017 性 — 次 徑(// m) 0.07 0.07 0.05 0.05 重 量 份 (固形分) 100 100 100 100 子 有 业丄 子 材 質 丙烯酸 丙烯酸 - - 機 官 能 基 羧基 羧基 - - 、f/丄 重 量 份 (固形分) 10 10 - - 子 水 體 積 比 2 ) 49/51 49/51 100/0 100/0 性 pH 9.0 9.2 9.0 - 分 粘 度 (m Pa · s) 10 10 10 7 散 水 分 量 (%) 13 7 17 1 液 固 形 分 濃度(%) 18 18 17 20 貯 存 安 定性 〇 〇 〇 X 導 膜 厚 (β m) 15 15 - - 電 體 積 電 阻率&quot; 0.1 0.2 - - 層 接 著 性 〇 〇 - - 1)體 積 電 阻 率之單位 爲(10·4Ω • cm) ° 2)體積比係以導電性粒子/有機粒子表示。 --------訂·-------- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) -50 - 538073 Λ7 B7 五、發明說明(48 ) 由表1及表2得知實施例1〜5之水性分散液之貯藏 安定性皆優異,由此水性分散液以電極澱積所形成之導電 層之體積電阻率皆低,基板之粘著性也良好。 然而不含有機粒子之水性分散液之比較例1成膜性不 足,不含有機粒子之醇分散液之比較例2無法進行電極澱 積。比較例1及2之分散液之貯藏安定性不佳。 〔4 一 2〕陰極上之電極澱積 分別於上述實施例6〜9及比較例2,3之分散液中 配置作爲陰極之銅濺鍍矽晶圓及作爲對向電極(陽極)之 S U S板,以2 0 0 V之定電壓法在陰極上電極丨殿積(電 極澱積時間:2分鐘)粒子。然後,以1 0 0 °C加熱1 〇 分鐘,再於混合3 %氫之氮氣氛中以2 5 0 °C加熱1小時 ,得到厚度1 5 之導電層。又使用比較例2 ’ 3之分 散液時,即使電極澱積也無法形成膜。 上述實施例6〜9及比較例2,3之分散液之貯藏安 定性係如上述方法評價。電極澱積所得之導電層之性能係 以上述方法評價。結果如表3及表4所示。 --------------------訂---------線^^ (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) 538073 Λ7 B7 五、發明說明(49 ) 經濟部智慧財產局員工消費合作社印製 表3 實施例6 實施例7 實施例8 導 、七丄 子 材 質 銅 銅 鎳 電 一 次粒 徑(// m) 0.05 0.5 0.02 性 重 量 份 (固形分) 100 100 100 子 有 子 材 質 環氧 聚醯亞胺 環氧 機 重 里 份 (固形分) 10 2.0 10 业丄 子 水 企丄 松 子 體 積比(導電性/有機) 53/47 85/15 53/47 性 pH 9.0 5.5 8.9 分 粘 度 (m Pa · s) 10 10 10 散 水 分 量 (%) 6.5 11 3.5 液 固 形 分 濃度(%) 18 18 10 貯 存 安 定性 〇 〇 〇 導 膜 厚 (&quot; m) 15 16 15 電 體 積 電 阻率(1CT4Q · cm) 0.1 0.1 0.2 層 粘 著 性 〇 〇 〇 -----------------------------^ (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) 538073 A7 B7 五、發明說明(50 ) 經濟部智慧財產局員工消費合作社印製 表4 實施例9 比較例2 比較例3 導 粒子材質 銀 銅 鎳 電 一次粒徑(μ m) 0.07 0.05 0.05 性 重量份(固形分) 100 100 100 子 有 粒子材質 聚醯亞胺 - - 機 重量份(固形分) 6.5 - - 业丄 子 水 粒子體積比 59/41 100/0 100/0 性 (導電性/有機) 分 pH 9.0 - 9.0 散 粘度(mPa · s) 10 7 10 液 水分量(%) 11 1 56 固形分濃度(%) 18 20 17 貯存安定性 〇 X 〇 導 膜厚(# m) 15 無法成膜 無法成膜 電 體積電阻率 層 (1 Ο'4 Ω · cm) 0.05 - - 粘著性 〇 - - 由表3及表4得知實施例6〜9之水性分散液之貯藏 (請先閱讀背面之注意事項再填寫本頁) --------訂—--------· 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538073 A7 B7 五、發明說明(51 ) 安定性皆優異,由此水性分散液電極澱積所形成之導電層 之電特性,粘著性良好。然而不含有機粒子之比較例2 , 3之分散液不具有成膜性,比較例2之分散液之貯藏安定 性也不佳。 〔5〕電路基板之製造及性能評價 使用調製之水性分散液製造電路基板,評價其性能。 (貫施例1 0 :依據方法1製造電路基板) 使玻璃纖維含浸B T樹脂(三菱瓦斯化學(股)製之 商品名),使之半硬化之1 〇 〇 // m厚之基板作爲厚芯絕 緣層4 1使用。在此厚芯絕緣層4 1之所定位置上藉由二 氧化碳雷射形成直徑80//m之貫通孔411 〔圖1 (a )〕。其次藉由熱壓製使由1 8 //m厚之銅箔所構成之導 電性箔4 2粘著於厚芯絕緣層4 1之另一表面上〔圖1 ( b )〕。 接著將具有之導電性箔4 2之厚芯絕緣層4 1浸漬於 實施例6之分散液中,使導電性箔4 2成爲陰極,對向電 極成爲陽極,攪拌狀態下以溫度2 0 °C,電極間距離1 5 cm,電壓200V進行電極澱積2分鐘。接著將被電極 殿積於貫通孔4 1 1內之環氧樹脂以1 0 0 °C預乾燥1 5 分鐘,形成貫通導電部431 〔圖1(c)〕。 將導電性箔對準層合於含此導電性箔之半硬化基板上 ,以真空熱壓製在混合3 %氣之氮氣氛中以2 0 0 C加熱 本纸張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) (請先閱讀背面之注意事項再填寫本頁) 訂---------線- 經濟部智慧財產局員工消費合作社印製 538073 Λ7 B7 五、發明說明(52) 1小時完全硬化,得到以貫通導電部4 3 1接合層間電路 之基板〔圖1 ( d )〕。其次在導電性箔4 2之上使用乾 式薄膜抗蝕劑形成圖形後,浸漬於氯化亞鐵蝕刻液中進行 蝕刻,得到含電路之硬化基板〔圖1 ( e )〕。 (實施例1 1 :依據方法2製造電路基板) 以實施例1 0製造電路之基板作爲厚芯配線基板4 8 〔圖2 ( a )〕,將光敏性環氧樹脂以厚度1 0 0 // m塗 佈於厚芯配線基板4 8之兩面形成絕緣層4 5 〔圖2 ( b )〕。然後絕緣層4 5上形成圖形狀之直徑8 0 // m之貫 通孔4 5 1成爲絕緣層圖形4 6 〔圖2 ( c )〕。對此進 行化學鍍敷後〔圖2 ( d )〕,浸漬於實施例7之分散液 中,使化學鍍層4 7成爲陰極,對向電極成爲陽極,攪拌 狀態下以溫度2 Ο T:,電極間距離1 5 c m,電壓2〇0 V進行電極澱積2分鐘。接著將被電極澱積之聚醯亞胺系 樹脂以1 0 0 °C預乾燥1 5分鐘,在化學鍍層4 7之全面 上形成導電層43 〔圖2 (e)〕。此導電層43之一部 份成爲貫通孔45 1內所形成之貫通導電部432。以熱 乾燥爐在混合3 %氫之氮氣氛中以2 3 0 °C加熱1小時, 使導電層4 3完全硬化,得到以貫通導電部4 3 2接合層 間電路之電路基板。 (實施例1 2 ) 實施例1 0中,形成貫通導電部4 3 1時,將實施例 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) —P衣--------訂---------線一 經濟部智慧財產局員工消費合作社印製 53807360 parts by weight of an epoxy polycarboxylic acid adduct obtained by the reaction of Epoxy Co., Ltd. with polyunsaturated acid (manufactured by Johnson Polymer), and 3 parts by weight of monoethanolamine as a P Η regulator were added. The above-mentioned mixed solution was added with stirring in 400 parts by weight of ion-exchanged water to obtain a latex of anionic organic particles containing an epoxy resin precursor as a main component. (Synthesis Example 8: Epoxy resin latex B) 35 parts by weight of an interrupted isocyanate composed of toluene diisocyanate and 2-ethylhexanol was mixed with E pycoat 8 2 8 (Oilated Sheel Epoxy Corporation) (Trade name of the system) is 65 parts by weight of epoxyamine adduct obtained by reacting with diethylamine, and 2.5 parts by weight of acetic acid as a p Η regulator is added. The above-mentioned mixed solution was added with stirring in 400 parts by weight of ion-exchanged water to obtain a latex of cationic organic particles containing epoxy resin precursor as a main component. (Synthesis Example 9: Polyfluorene imide resin latex) Tetracarboxylic dianhydride 3,3 ', 4,4, diphenyl tetracarboxylic acid difluoride was charged to 32.29 g (90 mmol) and 1, 3,3a, 4,5,9b —hexahydro-5 — (tetrahydro-2,5 —dicarbonyl — 3) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -42-- --------------- I --- Order -------- I ^ _w (Please read the notes on the back before filling this page) 538073 Intellectual Property Bureau, Ministry of Economic Affairs Printed by employee consumer cooperatives Λ7 B7___ V. Description of the invention (40) —furanyl] -naphthalene [1,2-C] —furan-1, 3-dione 3. 1.00 g (10 mmo 1), diamine Compound No. 2, 2-bis [4-mono (4-aminophenoxy) phenyl] propane 36.95g (90mm ◦ 1) and organosiloxane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name "LP71〇〇 ") 2. 49 g (10 mmo 1) of 4-50 g of N-methyl-pyrrolidone were dissolved and reacted at room temperature for 12 hours. Then, 3 g of pyridine and 71 g of acetic anhydride were added to the reaction solution, and the dehydration ring-closure reaction was performed at 100 ° C for 3 hours. Then, the reaction solution was distilled off under reduced pressure, and after purification, a polyimide solution having a solid content of 10% was obtained. A reaction vessel containing 100 parts by weight of r-butyrolactone was maintained at 85 ° C under a nitrogen gas atmosphere, 65 parts by weight of n-butyl acrylate, and 30 parts by weight of dimethylaminoethyl acrylate, A mixed solution composed of 5 parts by weight of glycidyl methacrylate and 1 part by weight of azobisisobutyronitrile was continuously added to the reaction container for 5 hours, and solution polymerization was performed while stirring. After the dropping was completed, stirring was continued at 85 ° C for 2 hours to complete the solution polymerization to obtain a 50% solids acrylic acid solution. 50 parts by weight of the polyimide solution (solid content), 30 parts by weight of the acrylic polymer solution (solid content) and Epyc 〇at 8 2 8 (trade name manufactured by Sheol Epoxy Corporation) 20 weight After reacting at 70 ° C. for 3 hours, 3 parts by weight of acetic acid was slowly added and mixed to adjust p Η. Next, 1,000 parts by weight of distilled water was added slowly, and vigorous stirring was performed to obtain a latex of cationic organic particles containing polyimide resin as a main component. [Modulation of Aqueous Dispersion] This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) -4 ^--------- Order --------- Line ( Please read the precautions on the back before filling in this page) 538〇73 A7 V. Description of the invention (41) (Example 1) The dispersion liquid of copper fine particles a 5 0 0 parts by weight (converted by solid content) (100 parts by weight) was mixed with 100 parts by weight of the acrylic resin latex obtained in Synthesis Example 6 (100 parts by weight in terms of solid content) to prepare an aqueous dispersion. The volume ratio of the copper fine particles to the acrylic resin in this aqueous dispersion was 5 3/47, and the water content measured by the Karr-Fischer method was 13% by weight. (Example 2) A copper fine particle dispersion liquid b 500 parts by weight (100 parts by weight in terms of solid content conversion) prepared in Synthesis Example 2 and 100 parts by weight of an acrylic resin latex obtained in Synthesis Example 6 ( 10 parts by weight in terms of solid content) was mixed to prepare an aqueous dispersion. The volume ratio of the copper fine particles to the acrylic resin in this aqueous dispersion was 5 3/47, and the water weight measured by the Karr-Fi scher's method was 13% by weight. (Example 3) 10,000 parts by weight (100 parts by weight of solid content conversion) of the dispersion liquid of the nickel fine particles obtained in Synthesis Example 4 and 100 parts by weight of the acrylic resin latex obtained in Synthesis Example 6 ( 10 parts by weight in terms of solid content) was mixed to prepare an aqueous dispersion. The volume ratio of the nickel fine particles to the acrylic resin in this aqueous dispersion is 5 3/47, and the water content measured by the 1 ^^ 4 ^ (: 1 ^^ method is 7% by weight. (Please read the back Please fill in this page again for attention} f -------- Order ———— Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economy 14 _ 538073 Λ7 B7 V. Description of the invention (42) (Example 4) (Please read the precautions on the back before filling out this page) The dispersion liquid of silver fine particles obtained in Synthesis Example 5 is 5 0 parts by weight (solid content 100 parts by weight) was mixed with 100 parts by weight of acrylic resin latex obtained in Synthesis Example 6 (10 parts by weight in terms of solid content) to prepare an aqueous dispersion. The silver particles and acrylic resin in the aqueous dispersion were mixed. The volume ratio is 49/51, and the water content measured by the Karr-Fischer's method is 13% by weight. (Example 5) The dispersion liquid of the silver fine particles obtained in Synthesis Example 5 was 500 parts by weight (solid content) 100 parts by weight) and 50 parts by weight of epoxy resin latex A prepared in Synthesis Example 7 (exchange of solid content) 10 parts by weight) were mixed to prepare an aqueous dispersion. The volume ratio of the silver fine particles to the epoxy resin in the aqueous dispersion was 49/5 1, and the moisture content measured by the Karr-Fischer's method was 7% by weight. (Example 6) The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed a dispersion of copper fine particles a (50 parts by weight in solid content conversion) prepared in Synthesis Example 1 and those produced in Synthesis Example 6. 100 parts by weight of epoxy resin latex (10 parts by weight in terms of solid content) is mixed to prepare an aqueous dispersion. The volume ratio of the copper fine particles to the epoxy resin in the aqueous dispersion is 5 3/4 7 in Ka ^ -The amount of water measured by Fischer and France is 6.5 wt%. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 538073 Λ7 B7 V. Explanation of the Invention (43) (Example 7) The copper fine particle dispersion c 50 (parts in solid content conversion) of the copper fine particles prepared in Synthesis Example 3 and the polyisocyanate obtained in Synthesis Example 9 were used. 30.1 parts by weight of amine resin latex (2 · 0 parts by weight in terms of solid content) An aqueous dispersion was prepared by mixing. The volume ratio of the copper fine particles to the polyimide-based resin in the aqueous dispersion was 8 5/15, and the water content measured by the Karr-Fischer's method was 3.7 wt%. Example 8) 100 parts by weight (100 parts by weight of solid content conversion) of the dispersion liquid of the nickel fine particles obtained in Synthesis Example 4 and 100 parts by weight of the epoxy resin latex B obtained in Synthesis Example 8. (10 parts by weight in terms of solid content) An aqueous dispersion was prepared by mixing. The volume ratio of the nickel fine particles to the epoxy resin in the aqueous dispersion was 5 3/47, and the water content measured by the Karr-Fischer's method was 3.5% by weight. (Example 9) 5,000 parts by weight (100 parts by weight of solid content conversion) of the dispersion liquid of the silver fine particles obtained in Synthesis Example 5 and 100 parts by weight of the polyimide resin latex obtained in Synthesis Example 9. Parts (6 · 5 parts by weight in terms of solid content) were mixed to prepare an aqueous dispersion. The volume ratio of the silver fine particles to the polyfluorene-based resin in this aqueous dispersion was 5 9/4 1, and the water content measured by the Karr-Fischer's method was 11% by weight. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) -46------------- clothing -------- order ------ --- Line AW (Please read the notes on the back before filling out this page) 538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Λ7 B7 V. Description of the invention (44) (Comparative Example 1) Ion exchanged water 1 0 0 A part by weight was substituted for 100 parts by weight of the acrylic resin latex of Example 1, and then added to the dispersion liquid a 500 parts by weight (the solid content was converted to 1,000 parts by weight) of the copper fine particles prepared in Synthesis Example 1. Aqueous dispersion. (Comparative Example 2) The alcohol dispersion liquid a of copper fine particles a prepared in Synthesis Example 1 a (50 parts by weight, 100 parts by weight in terms of solid content) was directly used (that is, no aqueous dispersion was added). (Comparative Example 3) 500 parts by weight of ion-exchanged water was used instead of 100 parts by weight of the epoxy-based resin latex of Example 6, and then added to the dispersion liquid a 50 parts by weight of the copper fine particles obtained in Synthesis Example 1. (100 parts by weight in terms of solid content), an aqueous dispersion was prepared. [Formation and Performance Evaluation of the Conductive Layer] [4-1] The electrode deposition on the anode was arranged in the dispersions of Examples 1 to 5 and Comparative Examples 1 and 2 as a copper sputtered sand wafer as an anode and as a countermeasure. On the SUS plate of the electrode (cathode), particles were deposited on the anode electrode (electrode deposition time: 2 minutes) by a constant voltage method of 70 V. Then, it is heated at 100 ° C for 10 minutes, and then heated at 250 ° C for 1 hour in a nitrogen atmosphere mixed with 3% hydrogen. The paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm). Li) ------------ clothing -------- order --------- line (please read the precautions on the back before filling this page) 538073 A7 ______ Β7_ _15. Description of the invention (45) A conductive layer having a thickness of 1 5 // m is obtained. Also, in the alcohol dispersion of Comparative Example 2, a film could not be formed even when a voltage was applied. The storage stability of the dispersions of Examples 1 to 5 and Comparative Examples 1 and 2 were evaluated by the following methods. The performance of the conductive layer obtained by electrode deposition was evaluated by the method described below. The results are shown in Tables 1 and 2. [Storage Stability] Place the dispersion in a plastic bottle and visually observe the dispersion state and viscosity after storage at 20 ° C for 10 days. The evaluation results are expressed in the following two stages. 〇: No change in viscosity and good dispersion state X: Separation into two layers [Volume resistivity] Measured in accordance with J I S K 6 4 8 1. (Read the precautions on the back before filling out this page.) Printed and peeled off layer of the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economics, conducts electrical conductivity test, and tests the stripped tape. Change in price changes. Sticky review without peeling off the whole part slightly peeled off 1 Luo Ji Wan only sexual race 2 ...... Writing description 0 △ X Sticky C Applicable to China National Standard (CNS) A4 specifications (210 x 297 mm) 538073 A7 B7 V. Description of the invention (46) Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economy Table 1 Example 1 Example 2 Example 3 Conductor particle material copper copper nickel volume resistivity &quot; 0.017 0.017 0.070 Primary particle size (// m) Weight 0.05 0.30 0.02 Grain weight (solid content) 100 100 100 Particle material Acrylic carboxyl Acrylic carboxyl Acrylic acid carboxyl functional group 10 10 10 Industry parts by weight (solid content) Water volume Ratio 2) 53/47 53/47 53/47 pH 9.0 9.2 8.9 Viscosity (mPa · s) 10 10 10 Water content (%) 13 13 7 Liquid-solid content concentration (%) 18 18 18 Storage stability. 〇Conductive film thickness (// m) 15 16 15 Electrical volume resistivity &quot; 0.2 0.08 0.9 Layer adhesiveness 0.001) The unit of volume resistivity is (ΗΤ4Ω · cm). 2) The volume ratio is expressed by conductive particles / organic particles. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) -49------------- 41k clothing -------- Order ----- ---- Line (Please read the notes on the back before filling this page) 538073 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of Invention (47) Table 2 Example 4 Example 5 Comparative Example 1 Comparative Example 2 Conductor particle material Silver Silver Copper Copper Electrical volume resistivity &quot; 0.016 0.0176 0.017 0.017 Properties-secondary diameter (/ m) 0.07 0.07 0.05 0.05 parts by weight (solid content) 100 100 100 100 Ziyezhengzi material acrylic acrylic-- Organic functional carboxyl carboxyl group--, f / 丄 parts by weight (solid content) 10 10--water volume ratio 2) 49/51 49/51 100/0 100/0 pH 9.0 9.2 9.0-viscosity (m Pa · S) 10 10 10 7 Water content (%) 13 7 17 1 Liquid-solid content concentration (%) 18 18 17 20 Storage stability 〇〇〇 Conductive film thickness (β m) 15 15--Electrical volume resistivity &quot; 0.1 0.2--layer adhesion 〇〇--1) unit of volume resistivity (10 · 4Ω • cm) ° 2) represents a volume ratio based conductive particles / organic particles. -------- Order · -------- (Please read the precautions on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) -50-538073 Λ7 B7 V. Description of the invention (48) From Tables 1 and 2, it is known that the storage stability of the aqueous dispersions of Examples 1 to 5 are excellent, and thus the conductive formed by the aqueous dispersion by electrode deposition The volume resistivity of each layer is low, and the adhesion of the substrate is also good. However, Comparative Example 1 without an organic particle-containing aqueous dispersion had insufficient film-forming properties, and Comparative Example 2 without an organic particle-containing alcohol dispersion was unable to perform electrode deposition. The storage stability of the dispersions of Comparative Examples 1 and 2 was not good. [4-2] The electrode deposition on the cathode was arranged in the dispersions of Examples 6 to 9 and Comparative Examples 2 and 3, respectively, as a copper sputtered silicon wafer as a cathode and a SUS plate as a counter electrode (anode) Particles were deposited on the cathode using a constant voltage method of 2000 V (electrode deposition time: 2 minutes). Then, it was heated at 100 ° C for 10 minutes, and then heated at 250 ° C for 1 hour in a nitrogen atmosphere mixed with 3% hydrogen to obtain a conductive layer having a thickness of 15%. When the dispersion liquid of Comparative Example 2'3 was also used, a film could not be formed even by electrode deposition. The storage stability of the dispersions of Examples 6 to 9 and Comparative Examples 2 and 3 was evaluated as described above. The performance of the conductive layer obtained by electrode deposition was evaluated by the above method. The results are shown in Tables 3 and 4. -------------------- Order --------- line ^^ (Please read the notes on the back before filling this page) Intellectual Property of the Ministry of Economic Affairs The paper size printed by the Bureau ’s Consumer Cooperatives applies the Chinese National Standard (CNS) A4 (210 x 297 mm) 538073 Λ7 B7 V. Description of the Invention (49) Printed by the Consumers ’Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 3 Example 7 Example 8 Conductor, Hepsticks Material Copper Copper Nickel Primary Primary Particle Size (// m) 0.05 0.5 0.02 Sexual Weight (solid content) 100 100 100 Epoxy Polyimide Epoxy Resin Machine Centrifugal content (solid content) 10 2.0 10 Volume ratio of pine nuts (conductivity / organic) 53/47 85/15 53/47 pH 9.0 5.5 8.9 Viscosity (m Pa · s) 10 10 10 Water Amount (%) 6.5 11 3.5 Concentration of liquid and solid content (%) 18 18 10 Storage stability 0.00 Thickness of conductive film (m) 15 16 15 Electrical volume resistivity (1CT4Q · cm) 0.1 0.1 0.2 Layer adhesion 〇〇〇 ----------------------------- ^ (Please read first Please fill in this page again before filling in this page) This paper size is applicable to Chinese National Standard (CNS) A4 (210 x 297 mm) 538073 A7 B7 V. Description of Invention (50) Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 4 Example 9 Comparative Example 2 Comparative Example 3 Conductor particle material: silver copper nickel primary particle size (μm) 0.07 0.05 0.05 Sexual weight part (solid content) 100 100 100 Particle material polyfluorene imide--Machine weight part ( Solid content) 6.5--Volume ratio of water particles in industry 丄 59/41 100/0 100/0 (conductivity / organic) pH 9.0-9.0 Bulk viscosity (mPa · s) 10 7 10 Liquid water content (%) 11 1 56 Solid content concentration (%) 18 20 17 Storage stability 〇X 〇 Conductive film thickness (# m) 15 No film formation No film formation Electrical volume resistivity layer (1 〇'4 Ω · cm) 0.05--Sticky Charging property 0--From Tables 3 and 4, we know the storage of the aqueous dispersions of Examples 6 to 9 (please read the precautions on the back before filling this page) -------- Order ----- ----- · This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) 538073 A7 B7 V. Description of the invention (51) The stability is excellent. The conductive layer formed by the aqueous dispersion electrode deposition has good electrical properties and good adhesion. However, the dispersion liquids of Comparative Examples 2 and 3 containing no organic particles did not have film-forming properties, and the storage stability of the dispersion liquid of Comparative Example 2 was not good. [5] Production and performance evaluation of circuit board A circuit board was prepared using the prepared aqueous dispersion, and its performance was evaluated. (Example 10: Production of a circuit board in accordance with Method 1) A glass fiber was impregnated with a BT resin (trade name of Mitsubishi Gas Chemical Co., Ltd.), and a semi-hardened 100 / m thick substrate was used as a thick core. The insulating layer 41 is used. A through-hole 411 having a diameter of 80 // m is formed at a predetermined position of the thick-core insulating layer 41 by a carbon dioxide laser [Fig. 1 (a)]. Next, a conductive foil 4 2 composed of a copper foil of 1 8 // m thick is adhered to the other surface of the thick-core insulating layer 41 by hot pressing [FIG. 1 (b)]. Next, the thick core insulating layer 41 having the conductive foil 4 2 was immersed in the dispersion liquid of Example 6, so that the conductive foil 42 became the cathode, the counter electrode became the anode, and the temperature was 20 ° C under stirring. The electrode was deposited at a distance of 15 cm and a voltage of 200 V for 2 minutes. Next, the epoxy resin accumulated in the through hole 4 1 1 was pre-dried at 100 ° C for 15 minutes to form a through conductive portion 431 [Fig. 1 (c)]. The conductive foil is aligned and laminated on a semi-hardened substrate containing the conductive foil, and heated by vacuum heating in a nitrogen atmosphere mixed with 3% gas and heated at 200 ° C. This paper applies Chinese national standards (CNS) A4 size (210 x 297 mm) (Please read the notes on the back before filling out this page) Order --------- Line-Printed by the Intellectual Property Bureau Staff Consumer Cooperatives of the Ministry of Economy 538073 Λ7 B7 V. Invention Explanation (52) The substrate is completely hardened in 1 hour, and a substrate [3 (1)] where an interlayer circuit is bonded by penetrating the conductive portion 4 3 1 is obtained. Next, a pattern was formed on the conductive foil 42 using a dry film resist, and then immersed in a ferrous chloride etchant for etching to obtain a hardened circuit-containing substrate [Fig. 1 (e)]. (Example 11: Manufacture of circuit board according to method 2) The substrate of the circuit manufactured in Example 10 was used as a thick-core wiring board 4 8 [Fig. 2 (a)], and the photosensitive epoxy resin was formed to a thickness of 1 0 0 // m is coated on both sides of the thick-core wiring substrate 4 8 to form an insulating layer 4 5 [FIG. 2 (b)]. Then, a through hole 4 5 1 with a diameter of 8 0 // m is formed on the insulating layer 4 5 to form an insulating layer pattern 4 6 [Fig. 2 (c)]. After this was electrolessly plated [Fig. 2 (d)], it was immersed in the dispersion liquid of Example 7 so that the electroless plating layer 47 became the cathode, the counter electrode became the anode, and the electrode was stirred at a temperature of 20 ° C. The electrode was deposited at a distance of 15 cm and a voltage of 2000 V for 2 minutes. Next, the polyimide-based resin deposited by the electrode was pre-dried at 100 ° C for 15 minutes to form a conductive layer 43 on the entire surface of the electroless plating layer 47 [Fig. 2 (e)]. A part of this conductive layer 43 becomes a through conductive portion 432 formed in the through hole 451. The conductive layer 43 was completely hardened by heating in a heat-drying oven in a nitrogen atmosphere mixed with 3% hydrogen at 230 ° C for 1 hour, and a circuit board was obtained by bonding the interlayer circuit with the conductive portion 4 32. (Example 1 2) In Example 10, when the through conductive part 4 3 1 was formed, the paper size of the example was applied to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the note on the back first) Please fill in this page again for matters) —P-shirt -------- Order --------- Printed by the Consumers Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 538073

經濟部智慧財產局員工消費合作社印製 五、發明說明(53 ) 7之分散液用於電極澱積液進行電極澱積,以1 〇 〇 °C預 乾燥1 5分鐘。然後再浸漬於電鍍銅液(日本電鍍公司製 ,商品名「Micropharb Cu200」)中’以導電性箔4 2作爲 陰極,以電壓IV’ 1循環中之通電時間〇ms ( 5 〇 〇ni s爲〇 V )下進行電析處理5分鐘。其餘同實施 例1 0的方法得到含電路之硬化基板。 (比較例4 ) 與藉由電極澱積於貫通孔411內形成貫通導電部 431之實施例10不同,將銅系導電膏(粘度:100 Pa · s)介於金屬板(厚度100//m,孔徑90//m )以網版印刷機塡充於貫通孔4 1 1內。其餘同實施例1 〇的方法得到比較例4之電路基板。 〔絕緣層之電阻率〕 依據J I S K 6 9 1 1測定。 〔貫通導電部之電阻率〕 測定上下層間之電阻率,得到體積電阻率。 〔貫通導電部之連接信賴性試驗〕 將電路基板在—5 5 °C放置3 0分鐘後,1 2 5 t:放 置3 0分鐘之循環重複5 0 0次,觀察連接5 0 〇個凸塊 之電路之電阻之變化量。試驗結果係當電阻爲2 5 0 m Ω 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) 衣 訂---------線 _ 538073 Λ' ----------— __ 五、發明說明(54 ) 以下判定爲合格(〇),2 5 0 m Ω以上則判定爲不合格 (X )。 〔焊錫浸漬試驗〕 將電路基板浸漬於加熱至2 6 0 °C熔解之焊錫槽1 0 秒鐘之前後’觀察連接5 0 0個凸塊之電路之電阻的變化 重。試驗結果係當電阻爲2 5 ΟιώΩ以下時’母一凸塊爲 〇· 5 m Ω以下判定爲合格(〇),〇 · 5 πι Ω以上則判 定爲不合格(X)。 表5 實施例1 0 實施例11 實施例1 2 比較例4 導通貫 通部之 實施例6之 實施例7之 實施例7之 市販之導 形成材料 分散液 分散液 分散液 電膏 回路基 板之製 方法1 方法2 方法1 印刷 造法 (電極澱積) (電極澱積) (電極澱積) 導電貫通部之 0.2 0.3 0.1 10 電阻率( m Ω · cm) 導電貫 溫度循 〇 〇 〇 X 通部之 環試驗 連接信 焊錫浸 〇 〇 〇 X 賴性 漬試驗 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) --------訂---------線一 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 538073 A7 ____ B7 五、發明說明(55) 由表5得知具備由本發明之水性分散液所形成之導電 層的電路基板係藉由貫通導電部以層間電路較低之電阻率 連接,又連接信賴性也優異。另外使用以往之導電膏以印 刷法形成貫通導電部之比較例4無法將粘度較高之導電膏 確實塡充於直徑8 0 //m之貫通孔內,因此貫通導電部之 電阻率高,且連接信賴性也不足。 〔多層配線板之製造及性能評價〕 (實施例1 3 ) (1 )厚芯配線基板之製作: 首先準備在由厚度5 0 0 //m之玻璃纖維補強型環氧 樹脂所構成之絕緣性基板上形成厚度1 8 // m之銅層所成 之層合材料,藉由二氧化碳雷射裝置在此層合材料之絕緣 性基板上形成直徑1 〇 〇 // m之貫通孔(參照圖5及圖6 )〇 此層合材料以保護該金屬層之一面的狀態浸漬於實施 例6之分散液中,以該金屬層作爲析出用陰極,電極澱積 液溫度2 0 °C,電極間距離2 5 c m,外加電壓2 Ο Ο V ’處理時間6 0分鐘之條件下,進行定電壓法之電極澱積 處理’絕緣性基板之貫通孔內形成導電性微粒子及有機粒 子之堆積物,以1 〇 〇 °C,1 5分鐘之條件進行預乾燥處 理後’還原氣氛(含3%氫之氮氣體中)中以1 7 Ot, 3 0分鐘之條件加熱處理形成基板短路部(參照圖7 )。 接著層合材料之絕緣性基板之表面硏磨處理後,該絕 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) --------^---------線 01^ (請先閱讀背面之注意事項再填寫本頁) 538073 A7 _ B? 五、發明說明(56) (請先閱讀背面之注意事項再填寫本頁) 緣性基板之表面施予化學鍍或電鍍形成厚度2 0 v m之金 屬層,對於此金屬層實施光蝕刻處理形成第1基板配線層 ,製作具有第1基板配線層,同時在下面具有介於基板短 路部以電連接第1基板配線層之金屬層之厚芯配線基板( 參照圖4 )。 (2 )上部絕緣層,層間短路部及厚芯配線基板之形成 以溫度1 6 5 t,壓力3 0 k g / c m 2的條件下,將 厚度6 0 //m之環氧樹脂預浸體片熱壓粘於上述(1 )之 步驟所得之厚芯配線基板之上面,形成上部絕緣層,此上 部絕緣層上以二氧化碳雷射形成直徑1 0 0 // m之貫通孔 (參照圖8 )。 接著保護厚芯配線基板之金屬層之下面的狀態,於實 施例6之分散液中,以第1基板配線層作爲析出用陰極, 電極澱積液溫度2 0 °C,電極間距離2 5 c m,外加電壓 2 Ο Ο V,處理時間1 5分鐘之條件下,進行定電壓法之 經濟部智慧財產局員工消費合作社印製 電極澱積處理,在上部絕緣層之貫通孔內形成導電性微粒 子及有機粒子之堆積物,以1 0 0 °C,1 5分鐘之條件進 行預乾燥處理後,還原氣氛(含3 %氫之氮氣體中)中以 1 7 0 t,3 0分鐘之條件加熱處理形成層間短路部(參 照圖9 )。 其次上部絕緣層之表面硏磨處理後,該上部絕緣層之 表面施予化學鍍及電鍍形成厚度2 0 之金屬層(參照 圖1 0 )。然後對於厚芯配線基板之金屬層施予光蝕刻處 -59 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538073 Λ7 B7 五、發明說明(57 ) 理形成第2基板配線層,製作厚芯配線基板(參照圖1 1 )。 (請先閱讀背面之注意事項再填寫本頁) (3 )下部配線層,層間短路部與上部絕緣層及下部 配線層之形成 以溫度1 6 5 t:,壓力3 0 k g / c m 2的條件下,將 厚度6 0 //m之環氧樹脂預浸體片熱壓粘於上述(2 )之 步驟所得之上面形成上部絕緣層及層間短路部之厚芯配線 基板之下面,形成下部絕緣層,此下部絕緣層上以二氧化 碳雷射形成直徑10 0 //m之貫通孔(參照圖12)。 接著保護上部絕緣層上所形成之金屬層之上面的狀態 ,於實施例6之分散液中,以第2基板配線層作爲析出用 陰極,電極澱積液溫度2 0 t,電極間距離2 5 c m,外 加電壓2 0 0 V,處理時間8分鐘之條件下,進行定電壓 法之電極澱積處理,在上部絕緣層之貫通孔內形成導電性 微粒子及有機粒子之堆積物,以1 0 0 °C,1 5分鐘之條 件進行預乾燥處理後,還原氣氛(含3 %氫之氮氣體中) 中以1 7 0 t,3 0分鐘之條件加熱處理形成層間短路部 (參照圖1 3 )。 經濟部智慧財產局員工消費合作社印製 其次下部絕緣層之表面硏磨處理後,該下部絕緣層之 表面施予化學鍍及電鍍形成厚度2 0 //m之金屬層。然後 對於上部絕緣層及下部配線層之各表面所形成之金屬層施 予光蝕刻處理形成上部配線層及下部配線層(參照圖1 4 )° 含有上部配線層之上部絕緣層之表面及含有下部配線 -OU - 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 經濟部智慧財產局員工消費合作社印製 538073 A7 B7 五、發明說明(58) 層之下部絕緣層之表面形成焊錫抗蝕層,製造本發明之多 層配線板。 以上各基板短路部與上部絕緣層及下部絕緣層所形成 之層間短路部之導電性微粒子的體積分率爲約5 3 %。 (實施例1 4 ) 基板短路部及層間短路部之形成中,使用實施例7之 分散液取代實施例6之分散液,電極澱積處理所形成之堆 積物之預乾燥處理後,再浸漬於電鍍銅液(日本電鍍公司 製,商品名「Micropharb Cu200」)中,以導電性箔4 2作 爲陰極,以電壓1 V,1循環中之通電時間1 〇 〇 m s ( 3〇0 m s爲〇 V )下進行電析處理。其餘同實施例1 3 的方法製造本發明之多層配線板。 以上各基板短路部與上部絕緣層及下部絕緣層所形成 之層間短路部之導電性微粒子的體積分率爲約8 5 %。 (比較例5 ) 除了將銅系導電膏(粘度:lOOPa · s)介於金 屬板(厚度1 0 0 // m,孔徑9 0 // m )以網版印刷機塡 充於貫通孔4 1 1內,還原氣氛(含3%氫之氮氣體中) 中以1 7 0 °C ’ 3 0分鐘之條件加熱處理形成基板短路部 及層間短路部’以取代藉由電極澱積液形成基板短路部及 層間短路部外’其餘同實施例1 2的方法製造比較用之多 層配線板。 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -01 - ------------,衣--------訂---------線· (請先閱讀背面之注意事項再填寫本頁) 538073 Λ7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(59 ) 〔多層配線板之評價〕 (1 )配線初期之電阻: 測定多層配線板之上部配線層之連接用焊接區與下部 配線層之連接用焊接區之間之電阻,取其平均値。 (2)熱循環試驗後之配線之電阻: 將多層配線板在一 5 5 t:放置3 0分鐘後,在1 2 5 t放置3 0分鐘之操作當作1循環,合計進行5 0 0循環 後,測定該多層配線板之上部配線層之連接用焊接區與下 部配線層之連接用焊接區之間之電阻,求得每一個連接用 焊接區之平均値。 以上結果如表6所示。 表6 電阻(m Ω )熱循環 初期 試驗後 實施例1 3 0.2 0.3 實施例1 4 0.1 0.1 比較例5 0.4 1.0 由表6的結果得知實施例1 3及實施例1 4之多層配 線板之配線之電阻低,且即使熱循環試驗後之配線之電阻 變化也低,具有高的連接信賴性。 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 4^衣--------訂---------線· (請先閱讀背面之注意事項再填寫本頁) 538073 A7 B7 五、發明說明(60 ) 本發明不限於上述之實施形態,尙有各種變化。例如 厚芯配線基板上所形成之絕緣層可在該厚芯配線基板之一 面或另一面,且絕緣層上可再層合絕緣層。厚芯配線基板 只要是形成兩面彼此以電連接之基板配線層所成者時,可 爲多層構成者。 (請先閱讀背面之注意事項再填寫本頁) · I 丨 I ----訂---------線 經^部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Disclosure of invention (53) 7 is used for electrode deposition, and pre-dried at 1000 ° C for 15 minutes. Then, it was immersed in a copper electroplating bath (manufactured by Japan Electroplating Co., Ltd. under the trade name "Micropharb Cu200") with "conducting foil 4 2 as the cathode and voltage IV 'in one cycle of the energization time of 0 ms (500 ns). 0V) for 5 minutes. The rest of the method was the same as that of Example 10 to obtain a hardened substrate including a circuit. (Comparative Example 4) Unlike Example 10 in which a through-conductive portion 431 is formed by depositing an electrode in a through-hole 411, a copper-based conductive paste (viscosity: 100 Pa · s) is interposed between a metal plate (thickness 100 // m , The aperture 90 // m) is filled in the through hole 4 1 1 by a screen printing machine. The rest was the same as in Example 10 to obtain the circuit board of Comparative Example 4. [Resistivity of Insulating Layer] Measured in accordance with J I S K 6 9 1 1. [Resistance through the conductive portion] The resistivity between the upper and lower layers was measured to obtain the volume resistivity. [Connection Reliability Test of Penetrating Conductive Parts] After the circuit board was left at -5 5 ° C for 30 minutes, it was repeated for 1 2 5 t: the cycle for 30 minutes was repeated 5000 times, and the connection was observed with 500 bumps The amount of change in the resistance of the circuit. The test result is when the resistance is 250 m Ω. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page). ---- Line _ 538073 Λ '------------ __ V. Description of the invention (54) The following are judged as passing (0), and above 250 m Ω are judged as failing (X) . [Solder immersion test] The circuit board was immersed in a solder bath heated to 260 ° C for 10 seconds, and the change in resistance of the circuit connected to 500 bumps was observed. The test result is judged as pass (0) when the resistance of the mother-bump is 0.5 m or less when the resistance is less than 2 5 μm Ω, and it is judged as unsatisfactory (X) when the resistance is 0.5 m or more. Table 5 Example 1 0 Example 11 Example 1 2 Comparative Example 4 Method of making a conductive material forming liquid dispersion liquid dispersion liquid dispersion liquid electric circuit board substrate of a commercially available conductive material of Example 7 and Example 7 of Example 6 of the through-through portion 1 Method 2 Method 1 Printing method (electrode deposition) (electrode deposition) (electrode deposition) 0.2 0.3 0.1 10 resistivity (m Ω · cm) of the through-conducting temperature Ring test connection letter solder immersion 〇〇〇 × Reliability stain test This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) ---- ---- Order --------- Line 1 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 538073 A7 ____ B7 V. Description of the Invention (55) From Table 5 It was found that a circuit board provided with a conductive layer formed from the aqueous dispersion of the present invention is connected with a low resistivity of an interlayer circuit by penetrating a conductive portion and has excellent connection reliability. In addition, in Comparative Example 4 in which a through conductive part was formed by a printing method using a conventional conductive paste, a conductive paste having a relatively high viscosity could not be filled in a through hole with a diameter of 80 / m. Therefore, the resistivity of the through conductive part is high, and Connection reliability is also insufficient. [Manufacturing and Performance Evaluation of Multilayer Wiring Boards] (Example 1 3) (1) Production of thick-core wiring board: First, prepare the insulating property made of glass fiber reinforced epoxy resin with a thickness of 50 0 // m A laminated material made of a copper layer with a thickness of 1 8 // m is formed on the substrate. A carbon dioxide laser device is used to form a through hole with a diameter of 1000 / m (see FIG. 5) on the insulating substrate of the laminated material. And Figure 6). This laminated material was immersed in the dispersion of Example 6 in a state of protecting one side of the metal layer, and the metal layer was used as a cathode for precipitation. The temperature of the electrode deposition solution was 20 ° C, and the distance between the electrodes. 2 5 cm, applied voltage 2 Ο Ο V 'Condition time electrode deposition process under the condition of 60 minutes' Conductive fine particles and organic particles are formed in the through holes of the insulating substrate. After pre-drying at 〇 ° C for 15 minutes, the substrate short-circuit portion was formed by heat treatment at 17 Ot and 30 minutes in a reducing atmosphere (in a nitrogen gas containing 3% hydrogen) (see FIG. 7). . After the honing of the surface of the insulating substrate of the laminated material, the paper size of this paper applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -------- ^ ----- ---- Line 01 ^ (Please read the notes on the back before filling this page) 538073 A7 _ B? V. Description of the invention (56) (Please read the notes on the back before filling this page) The surface of the marginal substrate Electroless plating or electroplating is performed to form a metal layer with a thickness of 20 vm. The metal layer is subjected to a photo-etching process to form a first substrate wiring layer, and a first substrate wiring layer is produced, and a short circuit portion between the substrate is electrically connected below. A thick-core wiring board with a metal layer of the first substrate wiring layer (see FIG. 4). (2) The upper insulating layer, the interlayer short-circuit portion and the thick core wiring substrate are formed at a temperature of 16 5 t and a pressure of 30 kg / cm 2, and an epoxy prepreg sheet with a thickness of 60 0 // m is formed. Hot pressing is performed on the thick core wiring substrate obtained in the above step (1) to form an upper insulating layer, and a carbon dioxide laser is formed on the upper insulating layer to form a through hole with a diameter of 0 0 // // m (see FIG. 8). Next, the state under the metal layer of the thick-core wiring substrate was protected. In the dispersion of Example 6, the first substrate wiring layer was used as the cathode for precipitation. The temperature of the electrode deposition solution was 20 ° C, and the distance between the electrodes was 25 cm. Under the conditions of an applied voltage of 2 0 0 V and a processing time of 15 minutes, the printed electrode deposition process of the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs of the Ministry of Economic Affairs was performed with a constant voltage method, and conductive particles and conductive particles were formed in the through holes of the upper insulating layer. The organic particles are pre-dried at 100 ° C for 15 minutes, and then heat-treated at 170 t for 30 minutes in a reducing atmosphere (in a nitrogen gas containing 3% hydrogen). An interlayer short-circuit portion is formed (see FIG. 9). Next, after honing the surface of the upper insulating layer, the surface of the upper insulating layer is chemically plated and electroplated to form a metal layer with a thickness of 20 (see FIG. 10). Then apply a photo-etching place to the metal layer of the thick-core wiring substrate -59-This paper size applies the Chinese National Standard (CNS) A4 (210 X 297 mm) 538073 Λ7 B7 V. Description of the invention (57) Form the second substrate wiring Layer to produce a thick-core wiring board (see FIG. 1 1). (Please read the precautions on the back before filling in this page) (3) The formation of the lower wiring layer, the interlayer short-circuit part, the upper insulation layer and the lower wiring layer is at a temperature of 1 6 5 t: and a pressure of 30 kg / cm 2 Next, an epoxy prepreg sheet with a thickness of 60 / m is thermally adhered to the bottom of the thick-core wiring substrate on which the upper insulating layer and the interlayer short-circuit portion are formed on the upper surface obtained in the step (2) above to form a lower insulating layer. A carbon dioxide laser is used to form a through hole with a diameter of 10 0 // m on the lower insulating layer (refer to FIG. 12). Next, the upper state of the metal layer formed on the upper insulating layer was protected. In the dispersion liquid of Example 6, the second substrate wiring layer was used as the cathode for precipitation, the temperature of the electrode deposition solution was 20 t, and the distance between the electrodes was 2 5 cm, an applied voltage of 200 V, and a processing time of 8 minutes, the electrode deposition process of the constant voltage method was performed to form a deposit of conductive fine particles and organic particles in the through hole of the upper insulating layer. After pre-drying at 15 ° C for 15 minutes, heat treatment is performed at 170 t for 30 minutes in a reducing atmosphere (in a nitrogen gas containing 3% hydrogen) to form an interlayer short-circuit portion (see Figure 13) . Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Second, after the surface of the lower insulating layer is honed, the surface of the lower insulating layer is electrolessly plated and electroplated to form a metal layer with a thickness of 20m. Then, the metal layers formed on the surfaces of the upper insulating layer and the lower wiring layer are subjected to photo-etching to form an upper wiring layer and a lower wiring layer (see FIG. 14). The surface containing the upper insulating layer above the upper wiring layer and the lower wiring- OU-This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 538073 A7 B7 V. Description of the invention (58) The surface of the lower insulating layer is formed The solder resist is used to manufacture the multilayer wiring board of the present invention. The volume fraction of the conductive fine particles in the interlayer short-circuit portion formed by the short-circuit portion of each of the substrates and the upper and lower insulating layers is about 53%. (Example 1 4) In the formation of the substrate short-circuit portion and the interlayer short-circuit portion, the dispersion liquid of Example 7 was used instead of the dispersion liquid of Example 6, and the deposit formed by the electrode deposition process was pre-dried and then immersed in In a copper plating solution (manufactured by Japan Electroplating Co., Ltd. under the trade name "Micropharb Cu200"), a conductive foil 42 is used as a cathode, and a voltage of 1 V is applied for 1 millisecond of conduction time (3,000 milliseconds is 0 millivolts). ). The rest is the same as the method of Example 1 3 to manufacture the multilayer wiring board of the present invention. The volume fraction of the conductive fine particles in the interlayer short-circuit portion formed by the short-circuit portion of each of the substrates and the upper and lower insulating layers is about 85%. (Comparative Example 5) Except that a copper-based conductive paste (viscosity: 100 Pa · s) was interposed between a metal plate (thickness 1 0 0 // m, hole diameter 9 0 // m), the through hole 4 1 was filled with a screen printing machine. 1. In a reducing atmosphere (in a nitrogen gas containing 3% hydrogen), a substrate short-circuit portion and an interlayer short-circuit portion are formed by heat treatment at 170 ° C for 30 minutes to replace the substrate short-circuit formed by the electrode deposition solution. The multilayer wiring board for comparison was manufactured in the same manner as in Example 12 except for the other parts except the interlayer short-circuit part. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -01-------------, clothing -------- order ----- ---- Wire · (Please read the precautions on the back before filling in this page) 538073 Λ7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention (59) [Evaluation of multilayer wiring boards] (1) Wiring Initial resistance: Measure the resistance between the bonding pads on the upper wiring layer of the multilayer wiring board and the bonding pads on the lower wiring layer, and take the average value. (2) Resistance of the wiring after the thermal cycle test: The operation of placing the multilayer wiring board at a temperature of 5 5 t: 30 minutes, and placing it at 30 minutes at 12 5 t is regarded as 1 cycle, and a total of 5 0 cycles are performed. Then, the resistance between the bonding pads on the upper wiring layer and the bonding pads on the lower wiring layer of the multilayer wiring board is measured, and the average 値 of each bonding pad is obtained. The above results are shown in Table 6. Table 6 Example 1 after initial resistance (m Ω) thermal cycle test 1 3 0.2 0.3 Example 1 4 0.1 0.1 Comparative example 5 0.4 1.0 From the results in Table 6, the multilayer wiring boards of Example 1 3 and Example 14 are known. The resistance of the wiring is low, and the resistance change of the wiring is low even after the thermal cycle test, and it has high connection reliability. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 4 ^ clothing -------- order --------- line · (Please read the note on the back first Please fill in this page again for details) 538073 A7 B7 V. Description of the invention (60) The present invention is not limited to the above-mentioned embodiments, and there are various changes. For example, an insulating layer formed on a thick-core wiring substrate may be on one side or the other side of the thick-core wiring substrate, and an insulating layer may be further laminated on the insulating layer. A thick-core wiring substrate may be a multilayer structure as long as it is formed by forming a substrate wiring layer having both sides electrically connected to each other. (Please read the notes on the back before filling in this page) (CNS) A4 size (210 X 297 mm)

Claims (1)

CC 3 5CC 3 5 六、申請專利範圍 ^ 第891 24708號專利申請案 中文申請專利範圍修正本 (請先閲讀背面之注意事項再填寫本頁) 民國91年8月30日修正 1 . 一種導電層形成用水性分散液,其特徵係將 數目平均粒子徑1 μ m以下選自金、銀、銅、鋁、鋅、鎳 、鈀、鉑、鈷、铑、銥、鐵、釕、餓、鉻、鎢、鉬、鈦' 鉍、鉛、硼、矽、錫及鋇之金屬或這些之合金之導電性微 粒子與由聚合性化合物及聚合物中之至少一種所構成之有 機粒子分散於水性媒體中,上述導電性微粒子與有機粒子 之體積比爲99 : 1〜40 : 60,藉由電極澱積可形成 導電層。 2 ·如申請專利範圍第1項之導電層形成用水性分散 液,其係將上述導電性微粒子分散於有機溶媒之導電性微 粒子分散液,與將上述有機粒子分散於水性媒體之有機粒 子分散液予以混合所成。 3 . —種導電層,其特徵係藉由使用如申請專利範圍 第1或2項之導電層形成用水性分散液之電極澱積所形成 經濟部智慧財產局員工消費合作社印製 ,體積電阻率1 0 — 4 Ω · c m以下。 4 . 一種電子零件,其特徵係具備藉由使用如申請專 利範圍第1或2項之導電層形成用水性分散液之電極澱積 所形成之導電層。 5 · —種電路基板,其特徵係具有絕緣層,及藉由以 如申請專利範圍第1或2項之導電層形成用水性分散液爲 電極澱積液之電極澱積法所形成,且含有貫通該絕緣層之 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) -1 - ^3^〇73 Α8 Β8 C8 D8 R、申請專利範圍 貧通導電部的導電層。 6 · —種電路基板之製造方法,其特徵係使用如申請 _利範圍第1項之導電層形成用水性分散液之電路基板的 W造方法,具備 (a )絕緣層上形成貫通孔之步驟, (b )該絕緣層之其中之一的表面含有該貫通孔之一 開口端上之部分設置導電性箔的步驟, (c )將上述導電層形成用水性分散液用於電極澱積 液,藉由以上述導電性箔作爲其中之一之電極的電極澱積 法’在上述貫通孔內形成貫通孔導電部的步驟。 7 · —種電路基板之製造方法,其特徵係使用如申請 專利範圍第1項之導電層形成用水性分散液之電路基板的 製造方法,具備 (a )形成導體圖形之厚芯配線基板上形成絕緣層的· 步驟, (b )將該絕緣層形成圖形,形成具有使上述導體圖 形之一部份露出之貫通孔之絕緣層圖形的步驟, (c )藉由以該絕緣層圖形爲掩模材料之化學鍍敷, 在含有上述貫通孔內之部分形成化學鍍層的步驟, (d )將上述導電層形成用水性分散液用於電極澱積 液,藉由以上述導體圖形及上述化學鍍層作爲其中之一之 電極之電極澱積法,形成含有上述貫通孔內之貫通孔導電 部之導電層的步驟。 8 · —種電路基板之製造方法,其特徵係將如申請專 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 538073 A8 B8 C8 ___ D8 六、申請專利範圍 利範圍第6或7項之方法所製得之電路基板進行多片層合 〇 9 · 一種多層配線板,其特徵係具有:絕緣性基板之 兩面形成彼此以電連接之基板配線層所成之厚芯配線基板 ;層合於此厚芯配線基板之至少一面之絕緣層;此絕緣層 上所形成之配線層;此配線層以電連接上述基板配線層之 貫通上述絕緣層之厚度方向延伸之層間短路部;之多層配 線基板, 上述層間短路部係由高分子物質中含有導電性微粒子 所成之導電體所構成,該導電體係導電性微粒子與由聚合 性化合物及聚合物中之至少一種所構成之有機粒子分散於 水性媒體中所構成之電極澱積液中,藉由電極澱積處理所 形成者。 1 〇 .如申請專利範圍第9項之多層配線板,其中構 成層間短路部之導電體之導電性微粒子之體積分率爲 4 0 〜9 9 % 〇 1 1 .如申請專利範圍第9項之多層配線板,其係具 有:在絕緣性基板之兩面形成彼此以電連接之基板配線層 所成之厚芯配線基板;層合於此厚芯配線基板之至少一面 之絕緣層;此絕緣層上所形成之配線層,此配線層以電連 接上述基板配線層之貫通上述絕緣層之厚度方向之延伸之 層間短路部;之多層配線板, 上述層間短路部係由高分子物質中含有導電性微粒子 所成之導電體所構成,該導電體係導電性微粒子與由聚合 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (請先閱讀背面之注意事項再填寫本頁) 、1T 經濟部智慧財產局員工消費合作社印製 538073 A8 B8 C8 D8 六、申請專利範圍 (請先閲讀背面之注意事項再填寫本頁) 性化合物及聚合物中之至少一種所構成之有機粒子分散於 水性媒體中所構成之電極澱積液中,藉由電極澱積處理所 形成者, 上述厚芯配線基板具有彼此以電連接在絕緣性基板之 兩面所形成之基板配線層之貫通該絕緣性基板之厚度方向 延伸之基板短路部, 該基板短路部係由高分子物質中含有導電性微粒子所 成之導電體所構成,該導電體係導電性微粒子與由聚合性 化合物及聚合物中之至少一種所構成之有機粒子分散於水 性媒體中所構成之電極澱積液中,藉由電極澱積處理所形 成者。 1 2 .如申請專利範圍第1 1項之多層配線板,其中 構成層間短路部及/或基板短路部之導電體之導電性微粒 子之比例之體積分率爲4 0〜9 9%。 經濟部智慧財產局員工消費合作社印製 1 3 · —種多層配線板之製造方法,其係製造如申請 專利範圍第9項之多層配線板的方法,其特徵係具有以下 步驟:準備由絕緣性基板;此絕緣性基板之一面所形成之 基板配線層;在上述絕緣性基板之另一面上形成,且與該 基板配線層以電連接之金屬層;所構成之厚芯配線基板, 此厚芯配線基板之一面上形成具有與應在該基板配線 層上形成之層間短路部對應所形成之貫通孔之絕緣層, 以形成此絕緣層之厚芯配線基板之基板配線層作爲析 出用電極,由導電性微粒子與由聚合性化合物及聚合物中 之至少一種所構成之有機粒子分散於水性媒體中所構成之 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) ΓΤΓ 538073 A8 B8 C8 D8 六、申請專利範圍 電極澱積液中,藉由電極澱積處理在該絕緣層之貫通孔內 形成構成層間短路部之導電體的步驟。 (請先閲讀背面之注意事項再填寫本頁) 1 4 .如申請專利範圍第1 3項之多層配線板之製造 方法,其中形成構成上述層間短路部之導電體之電極澱積 液中,導電性微粒子與有機粒子之體積比爲9 9 : 1〜 4 0:6 0。 1 5 . —種多層配線板之製造方法,其係製造如申請 專利範圍第1 1項之多層配線板的方法,其特徵係具有下 述步驟:準備具有絕緣性基板與此絕緣性基板之至少其他 面所形成之金屬層之基板形成材料, 形成貫通此基板形成材料之絕緣性基板之厚度方向之 貫通孔, 經濟部智慧財產局員工消費合作社印製 以此基板形成材料之金屬層作爲析出用電極,由導電 性微粒子與由聚合性化合物及聚合物中之至少一種所構成 之有機粒子分散於水性媒體中所構成之電極澱積液中,藉 由電極澱積處理在該絕緣性基板之貫通孔內形成構成層間 短路部之導電體,然後在上述絕緣性基板之一面上形成基 板配線層,形成由在上述絕緣性基板之一面上形成之基板 配線層;在上述絕緣性基板之另一面所形成,且與該基板 配線層以電連接之上述金屬層所構成之厚芯配線基板, 此厚芯配線基板之一面上形成具有與應在該基板配線 層上形成之層間短路部對應形成之貫通孔的絕緣層, 以形成此絕緣層之厚芯配線基板之基板配線層作爲析 出用電極,由導電性微粒子與由聚合性化合物及聚合物中 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) -5 - 538073 A8 B8 C8 D8 κ、申請專利範圍 t至少一種所構成之有機粒子分散於水性媒體中所構成之 _極源積液中,藉由電極澱積處理在此絕緣層之貫通孔內 开多成構成層間短路部之導電體的步驟。 1 6 ·如申請專利範圍第1 5項之多層配線板之製造 方法’其中形成構成上述層間短路部之導電體之電極澱積 '液及/或形成構成上述基板短路部之導電體之電極澱積、液 中’導電性微粒子與有機粒子之體積比爲9 9 : 1〜4 〇 :6 0 〇 (請先閲讀背面之注意事項再填寫本頁} 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) -6 -Sixth, the scope of patent application ^ No. 891 24708 Patent Application Chinese Patent Application Amendment (please read the precautions on the back before filling this page) Amendment on August 30, 1991 1. An aqueous dispersion for conductive layer formation , Characterized in that the number average particle diameter is less than 1 μm selected from gold, silver, copper, aluminum, zinc, nickel, palladium, platinum, cobalt, rhodium, iridium, iron, ruthenium, starvation, chromium, tungsten, molybdenum, titanium '' Conductive fine particles of bismuth, lead, boron, silicon, tin, and barium metals or alloys of these and organic particles composed of at least one of a polymerizable compound and a polymer are dispersed in an aqueous medium. The volume ratio of the organic particles is 99: 1 ~ 40: 60, and a conductive layer can be formed by electrode deposition. 2 · The aqueous dispersion for the formation of the conductive layer according to item 1 of the scope of patent application, which is a conductive fine particle dispersion in which the above-mentioned conductive fine particles are dispersed in an organic solvent, and an organic particle dispersion in which the above-mentioned organic particles are dispersed in an aqueous medium. Made by mixing. 3. A conductive layer, which is characterized by printed by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economics formed by electrode deposition using an electrically conductive layer such as the first or the second patent application to form an aqueous dispersion. Volume resistivity 1 0 — 4 Ω · cm or less. 4. An electronic part, characterized by having a conductive layer formed by electrode deposition using an electrically conductive layer as described in the first or second aspect of the patent application to form an aqueous dispersion. 5 · A circuit substrate, which is characterized by having an insulating layer, and formed by an electrode deposition method using an aqueous dispersion formed of a conductive layer as described in item 1 or 2 of the patent application as an electrode deposition solution, and containing The paper size penetrating the insulating layer is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -1-^ 3 ^ 〇73 Α8 Β8 C8 D8 R, the conductive layer of the poorly conductive portion of the patent application scope. 6 · A method for manufacturing a circuit board, which is characterized by the method of manufacturing a circuit board using an aqueous dispersion of conductive layer formation as described in the first item of the application_profit scope, and includes (a) a step of forming a through hole in the insulating layer (B) a surface of one of the insulating layers includes a step of disposing a conductive foil on a part of an open end of the through hole, (c) forming the above-mentioned conductive layer into an aqueous dispersion for an electrode deposition solution, A step of forming a through-hole conductive portion in the through-hole by an electrode deposition method using the conductive foil as one of the electrodes. 7 · A method for manufacturing a circuit board, which is characterized by using a method for manufacturing a circuit board using an aqueous dispersion for forming a conductive layer as described in item 1 of the scope of the patent application, and (a) forming a thick core wiring board on which a conductor pattern is formed Step of insulating layer, (b) forming the insulating layer into a pattern, forming an insulating layer pattern having a through hole exposing a part of the conductor pattern, (c) using the insulating layer pattern as a mask The step of chemical plating of materials to form an electroless plating layer in a portion containing the above-mentioned through-holes, (d) using the above-mentioned conductive layer forming aqueous dispersion liquid for the electrode deposition solution, and using the above-mentioned conductor pattern and the above-mentioned electroless plating layer as The electrode deposition method of one of the electrodes is a step of forming a conductive layer including the through-hole conductive portion in the through-hole. 8 · A kind of circuit board manufacturing method, the characteristics of which will apply the Chinese national standard (CNS) A4 specification (210X297 mm) if you apply for a special paper size (please read the precautions on the back before filling this page) Order the Ministry of Economic Affairs Printed by the Intellectual Property Bureau's Consumer Cooperatives 538073 A8 B8 C8 ___ D8 6. Multi-layer lamination of circuit substrates made by the method of patent application scope 6 or 7 09 · A multilayer wiring board, its characteristics are It has: a thick-core wiring substrate formed on both sides of an insulating substrate by substrate wiring layers electrically connected to each other; an insulating layer laminated on at least one side of the thick-core wiring substrate; a wiring layer formed on the insulating layer; The wiring layer is an interlayer short-circuiting portion that electrically connects the substrate wiring layer and extends through the thickness of the insulating layer. The multilayer wiring substrate is composed of a conductive material made of conductive particles in a polymer substance. The conductive fine particles of the conductive system are dispersed in an aqueous medium with organic particles composed of at least one of a polymerizable compound and a polymer. In the electrode deposition liquid formed in the body, the formed one is processed by electrode deposition. 1 〇. The multilayer wiring board of item 9 in the scope of the patent application, wherein the volume fraction of the conductive fine particles of the conductor constituting the interlayer short-circuit portion is 40 to 99%. A multilayer wiring board having a thick-core wiring substrate formed by forming substrate wiring layers electrically connected to each other on both sides of an insulating substrate; an insulating layer laminated on at least one side of the thick-core wiring substrate; and the insulating layer The formed wiring layer electrically connects the substrate wiring layer and the interlayer short-circuit portion extending through the thickness direction of the insulating layer; the multilayer wiring board, the interlayer short-circuit portion is made of conductive particles contained in a polymer substance Consisting of the conductive body, the conductive particles of the conductive system and the size of the paper conform to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page), 1T Economy Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperatives 538073 A8 B8 C8 D8 6. Scope of Patent Application (Please read the precautions on the back before filling this page) Organic particles composed of at least one of a compound and a polymer are dispersed in an electrode deposition solution composed of an aqueous medium, and formed by an electrode deposition process. The thick-core wiring substrates are electrically connected to each other for insulation. A substrate short-circuiting portion of the substrate wiring layer formed on both sides of the substrate and extending through the thickness direction of the insulating substrate. The substrate short-circuiting portion is made of a conductive body made of conductive particles contained in a polymer substance, and the conductive system is conductive. Organic fine particles and organic particles composed of at least one of a polymerizable compound and a polymer are dispersed in an electrode deposition solution composed of an aqueous medium, and formed by electrode deposition treatment. 12. The multilayer wiring board according to item 11 of the scope of patent application, wherein the volume fraction of the proportion of the conductive fine particles constituting the conductors between the interlayer short-circuit portion and / or the substrate short-circuit portion is 40-99.9%. Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. A manufacturing method for multilayer wiring boards, which is a method for manufacturing multilayer wiring boards such as the scope of patent application No. 9, which is characterized by the following steps: A substrate; a substrate wiring layer formed on one surface of the insulating substrate; a metal layer formed on the other surface of the insulating substrate and electrically connected to the substrate wiring layer; a thick-core wiring substrate composed of the thick core An insulating layer having a through hole formed corresponding to the interlayer short-circuit portion to be formed on the substrate wiring layer is formed on one surface of the wiring substrate, and the substrate wiring layer of the thick-core wiring substrate forming the insulating layer is used as a precipitation electrode. This paper is made up of conductive fine particles and organic particles composed of at least one of polymerizable compounds and polymers dispersed in an aqueous medium. This paper is applicable to Chinese National Standard (CNS) A4 (210X297 mm) ΓΤΓ 538073 A8 B8 C8 D8 VI. Patent application electrode deposition solution, through electrode deposition treatment in the through hole of the insulation layer The step of short circuit portion of the conductor to constitute the interlayer. (Please read the precautions on the back before filling in this page) 1 4. If you are manufacturing a multilayer wiring board according to item 13 of the scope of patent application, in which the electrode deposition liquid forming the conductor constituting the interlayer short-circuit part described above, conducts electricity The volume ratio of the microparticles to the organic particles is 9 9: 1 to 4 0: 60. 15. A method for manufacturing a multilayer wiring board, which is a method for manufacturing a multilayer wiring board such as item 11 of the scope of patent application, which is characterized by having the following steps: preparing at least an insulating substrate and at least one insulating substrate The substrate forming material of the metal layer formed on the other surface forms a through-hole that penetrates the thickness direction of the insulating substrate of the substrate forming material. The employee's cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the metal layer of the substrate forming material for precipitation. An electrode, which is composed of conductive fine particles and organic particles composed of at least one of a polymerizable compound and a polymer, is dispersed in an electrode deposition solution composed of an aqueous medium, and is passed through the insulating substrate through electrode deposition. A conductive body constituting an interlayer short-circuit portion is formed in the hole, and then a substrate wiring layer is formed on one surface of the insulating substrate, and a substrate wiring layer formed on one surface of the insulating substrate is formed; Thick-core wiring substrate formed by the above-mentioned metal layer electrically connected to the substrate wiring layer An insulating layer having through-holes corresponding to the interlayer short-circuit portions to be formed on the substrate wiring layer is formed on one surface of the thick-core wiring substrate, and the substrate wiring layer of the thick-core wiring substrate forming the insulating layer is used as an electrode for precipitation. It is composed of conductive particles and at least one of the Chinese paper standard (CNS) A4 (210X297 mm) applicable to the paper size of polymerizable compounds and polymers. -5-538073 A8 B8 C8 D8 κ, at least one of the scope of patent application t Organic particles are dispersed in a polar source effusion formed in an aqueous medium, and an electrode deposition process is performed in the through hole of the insulating layer to form a conductive body constituting an interlayer short-circuit portion. 1 6 · A method for manufacturing a multilayer wiring board according to item 15 of the scope of the patent application, wherein the electrode deposition of the conductors constituting the interlayer short-circuit portion is formed, and / or the electrode deposits of the conductors constituting the short-circuit portion of the substrate are formed. The volume ratio of conductive microparticles and organic particles in the liquid and liquid is 9 9: 1 ~ 4 〇: 6 0 〇 (Please read the precautions on the back before filling out this page} Printed by the Intellectual Property Bureau Staff Consumer Cooperative Paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) -6-
TW89124708A 2000-11-20 2000-11-20 Aqueous dispersion for forming conductive layer, conductive layer, electronic component, circuit board and method for manufacturing the same, and multilayer wiring board and method for manufacturing the same TW538073B (en)

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