TW531442B - Device for purifying material for organic light emitting device - Google Patents

Device for purifying material for organic light emitting device Download PDF

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Publication number
TW531442B
TW531442B TW91108286A TW91108286A TW531442B TW 531442 B TW531442 B TW 531442B TW 91108286 A TW91108286 A TW 91108286A TW 91108286 A TW91108286 A TW 91108286A TW 531442 B TW531442 B TW 531442B
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Taiwan
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purified
vacuum
item
vacuum system
organic light
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TW91108286A
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Chinese (zh)
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Shin-Liang Chen
Wen-Jr Wang
Tz-Chin Tang
Shu-Ju Shie
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Ritdisplay Corp
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Abstract

This invention adopts laminating precipitation and fractional distillation of an ideal panel size in purifying material for organic light emitting device to obtain a material of a higher purity. A device for purifying material for organic light emitting device, including a vacuum system and a least one chamber of an ideal panel size zone, characterized in that: the vacuum system is intended for controlling a degree of vacuum of the chamber of an ideal panel size zone, and the material for organic light emitting device purified in the chamber of an ideal panel size zone. As such, a material of a higher purity is obtained by the purifying device of this invention so as to improve production of the organic light emitting device.

Description

531442 五、發明說明(1) 發明領域 本發明係關於一種純化材料之裝置,尤其是純化有 機發光元件(orgaruc light emitting 材料之純化裝置。 發明背景 、高 度佳 目之 有許 元件 材料 就會 要。 昇華 利用 般是 腔體 質量 在收 經由通電流激發而發光之有機發光元件具有平面化 對比、顯示速率快、構造簡單、重量輕了戶外可視 、耗電低’以及亮度高等優點,近年來成為儀受注 顯示裔元件。然而對於此有機發光元件之。所 多技術上的困難待克服,尤其是如何提高;口 :發光 材料之純度’為目丽業界所欲突破的技術之一 -般而言,0LED元件的電洞、電子傳發 都要經過,時間電流電壓考驗,只要有不純物 影響兀件哥命,所以0LED材料的純化能力就格外重 :般化學材料的純化可以利用層析、結晶、分館、 專方法;而傳統上,純化有機發光元件 昇華方法加以去除溶劑、水分、金屬殘要= 利用低壓/高溫的環境下經過具有—定距::寸: CChambeiO,並依據不同之溫度及真 由 ^丁之 流(mass f low)分離,致使欲庐得:由力造成的 集區的各段裡。然❿,其為了得又到^純化物沉殿 竿又純化之〇LED元531442 V. Description of the invention (1) Field of the invention The present invention relates to a device for purifying materials, especially a device for purifying organic light-emitting elements (orgaruc light emitting materials). Background of the Invention A high-quality component material may be required. Sublimation uses organic light-emitting elements whose cavity mass emits light when excited by passing current. It has the advantages of flat contrast, fast display rate, simple structure, light weight, outdoor visibility, low power consumption, and high brightness. It has become an instrument in recent years. Noted that the display device. However, for this organic light-emitting device, all the technical difficulties need to be overcome, especially how to improve; mouth: the purity of light-emitting materials is one of the technologies that the industry wants to break through-in general, 0LED components have to pass through holes and electrons, and are tested by time, current, and voltage. As long as there are impurities that affect the life of the components, the purification ability of 0LED materials is particularly important: general chemical materials can be purified by chromatography, crystallization, and branch offices. Special method; and traditionally, the sublimation method of purified organic light-emitting elements is used to remove the solvent. , Moisture, metal residues = use under low pressure / high temperature environment with-fixed distance :: inch: CChambeiO, and according to different temperatures and true separation ^ 丁 之流 (mass f low), resulting in desire: by force In the various segments of the resulting pool, then, in order to get the purified product Shen Diangan and purified OLED

531442 五、發明說明(2) 件材料’常常需要較大的腔體(C h a m b e r ),其缺點除了 佔空間之外’亦使得操作員操作不易(例如,該腔體之 長度未能符合人體工學)。更且,一般的腔體(Chamber )係使用石英或玻璃等材質,過長的腔體因而容易破碎 。因此’如何縮短腔體(Chamber)提高廠房的利用率, 縮小人為的失誤,便是突破傳統製程障礙,邁向商業化 之重要關鍵。 有鑑於上述問題,本發明揭露一種有機發光元件 (organic light emitting device, OLED)材料之純 化裝置,該裝置具有一真空系統具有及至少一理論板數 區之腔體;其特徵在於:該真空系統用以控制具有理論 板數區之腔體的真空度,並於具有理論板數區之腔體内 純化有機發光二極體材料。本發明使用具有理論板數區 之腔體’純化有機發光元件材料,不僅可大幅度地提高 純化效果、增加純化效益、·延長元件壽命、減少昇華次 數、降低人為失誤、增進有機發光元件(〇rganic light emitting device, 0LED)材料的使用率,同時 亦可大幅度地降低裝置所需空間、提高下游元件再現性 、延長元件壽命、提高產能、提高良率及降低元件製造 成本。 發明目的: 本發明提供一種有機發光元件(〇rganic Ught531442 V. Description of the invention (2) Pieces of material 'often require a larger cavity (C hamber), which has disadvantages in addition to occupying space' and also makes it difficult for the operator to operate (for example, the length of the cavity does not conform to ergonomics) learn). Moreover, the general cavity (Chamber) is made of quartz or glass, and the excessively long cavity is easily broken. Therefore, how to shorten the chamber to increase the utilization rate of the factory building and reduce human errors is the key to breaking through the traditional process barriers and moving towards commercialization. In view of the above problems, the present invention discloses an organic light emitting device (OLED) material purification device. The device has a vacuum system having a cavity with at least one theoretical plate number region. The feature is that the vacuum system It is used to control the vacuum degree of the cavity with the theoretical plate number region, and purify the organic light emitting diode material in the cavity with the theoretical plate number region. The invention uses a cavity 'purified organic light emitting element material with a theoretical plate number region, which can not only greatly improve the purification effect, increase the purification benefit, extend the life of the element, reduce the number of sublimation, reduce human errors, and promote the organic light emitting element (0 Rganic light emitting device (0LED) material usage rate can also greatly reduce the space required by the device, improve downstream component reproducibility, extend component life, increase production capacity, increase yield and reduce component manufacturing costs. Object of the invention: The present invention provides an organic light emitting element (〇rganic Ught

第5頁 531442Page 5 531442

五、發明說明(3) emitting device,OLED)材料之純化裝置,利用具有 理論板數區之腔體,大幅度地提升純化效益。 〃 本發明之主要目的是提高純化效益,藉此材料提高 下游元件再現性、延長元件壽命、提高產能、提 = 及降低元件製造成本等等的優點。 ^ + 本發明之另一目的係提供一有機發光元件材料純化 裝置,用以降低腔體尺寸、並減少裝置所需空間。 發明概述: 本發明提供一種純化有 裝置。尤其是該裝置具有: 待純化材料;至少一理論板 化材料,以產生一純化後材 係用以收集該純化後材料。 光元件所需且純度較高之材 機發光元件(OLED)材料之 一樣品區域,係用以裝載一 數區域,係用以純化該待純 料;以及至少一收集區域,V. Description of the invention (3) A purification device for emitting device (OLED) materials, which utilizes a cavity with a theoretical plate number area, greatly improves purification efficiency. 〃 The main purpose of the present invention is to improve the purification efficiency, by which the material has the advantages of improving the reproducibility of downstream components, prolonging component life, increasing production capacity, improving and reducing component manufacturing costs. ^ + Another object of the present invention is to provide an organic light-emitting element material purification device for reducing the cavity size and reducing the space required by the device. Summary of the Invention: The present invention provides a purified device. In particular, the device has: the material to be purified; at least one theoretical plated material to produce a purified material for collecting the purified material. A sample area of a high-purity material for an organic light-emitting element (OLED) material required for an optical element is used for loading a number of regions for purifying the material to be purified; and at least one collection region,

藉此方式可獲得製作有機發 料。 X 詳細說明與較佳實施例 :機發光兀件各層的材料都要經過長時間的電 太考驗’因在匕’只要存在不純物就會二 ;發】Ϊ要提供有機發光元件材料的之純化裝t;;利 工糸統控制具有理論板數區之腔體的真空产, 於八有理論板數區之腔體内純化有機發光二極體:料並In this way it is possible to make organic hair. X Detailed description and preferred embodiment: The materials of each layer of the organic light-emitting element have to be tested for a long time. Because of the impurities, it will be as long as there are impurities. Ϊ] It is necessary to provide purification equipment for organic light-emitting element materials. t ;; The control of vacuum production of the cavity with the theoretical plate number region by the Leeko system, and the organic light emitting diode is purified in the cavity with the theoretical plate number region:

第6頁 531442 五、發明說明(4) 以獲得純度較高之有機發光元件之材料。有關本發明為 達成上述之目的,所採用之技術、手段及具體結構特徵 ,茲舉一較佳可行之實施例,並藉由圖示說明而更進一 步揭示明暸,詳如下述。 請參考圖一,純化有機發光元件(〇 r g a n i c 1 i g h t emitting device, OLED)材料之裝置1【通常是呈現腔 體(chamber)之型態】,包含:一樣品區域1 1,係用 以裝載一待純化材料(例如,未純化之有機發光元件材 料);至少一理論板數區域1 2,係用以純化該待純化材 料,以產生一純化後材料;以及至少一收集區域1 3,係 用以收集該純化後材料,較佳者,該純化後材料係高度 純化之有機發光元件材料。舉例而言’被裝載在該樣品 區域1 1之材料,其質量流(m a s s f 1 〇 w)經過該理論板 數區域1 2之純化,可使得該收集區域1 3收集到純度較高 的材料。 在一較佳實施例中,請參考圖二,該純化裝置1進 一步包含一溫度控制器1 4,用以控制該純化裝置1的溫 度。該純化裝置1還包含一真空系統1 5,致使該純化裝 置1維持一特定之真空度。再進一步來說,該真空系統 1 5包含一真空泵1 5 3用來將該裝置抽成真空、一過濾器 1 5 1、及/或一凝結器1 5 2係分別用以過濾、凝結未純 化之有機發光元件材料。舉例來說,該純化裝置1可利 用溫度控制器1 4控制其溫度,還可利用真空系統1 5維持 一特定之真空度,其中該真空系統15可包含真空泵153Page 6 531442 V. Description of the invention (4) Material for obtaining organic light emitting elements with high purity. Regarding the technology, means, and specific structural features adopted by the present invention to achieve the above-mentioned object, a preferred and feasible embodiment is provided, and it is further disclosed through illustrations, as detailed below. Please refer to FIG. 1. A device 1 for purifying an organic light emitting device (OLED) material [usually in the form of a chamber] includes: a sample area 11 for loading a Material to be purified (for example, unpurified organic light-emitting device material); at least one theoretical plate number region 12 is used to purify the material to be purified to produce a purified material; and at least one collection region 13 is used To collect the purified material, preferably, the purified material is a highly purified organic light emitting device material. For example, the material loaded in the sample area 11 has a mass flow (m a s s f 1 0 w) purified through the theoretical plate number area 12, so that the collection area 13 can collect the material with higher purity. In a preferred embodiment, please refer to FIG. 2. The purification device 1 further includes a temperature controller 14 for controlling the temperature of the purification device 1. The purification device 1 further comprises a vacuum system 15 so that the purification device 1 maintains a specific degree of vacuum. Furthermore, the vacuum system 15 includes a vacuum pump 15 for evacuating the device, a filter 15 1 and / or a condenser 1 5 2 for filtering and coagulation respectively. Materials for organic light-emitting devices. For example, the purification device 1 may use a temperature controller 14 to control its temperature, and may also use a vacuum system 15 to maintain a specific vacuum degree, wherein the vacuum system 15 may include a vacuum pump 153

531442 五、發明說明(5) 用來將該裝置1抽成真空,並可利用過濾器1 5丨過濾待純 化材料中之固悲物(欲去除之材料)以及利用凝結器 1 5 2凝結待純化材料中之揮發物(欲去除之材料),以 保護該真空泵1 5 1 ’避免雜物流入其中使之受損或減少 哥命’因此被裝載在該樣品區域1丨之材料,其質量流 (mass flow)經過該理論板數區域12之純化,可使得 該收集區域1 3收集到純度較高的純化後材料。 請參考圖三與圖四,係圖一之較佳實施例示意圖。 其有機發光元件(OLED)材料之純化裝置2係利用兩端 抽真空,其中理論板數區域2 2係分別位在樣品區域2 1之 左右兩側’收集區域2 3則分別位於理論板數區域2 2之左 右兩外侧。如圖四所示,該純化裝置2可利用溫度控制 器2 4控制其溫度’還可利用真空系統2 5維持一特定之真 空度,其中該真空系統25可包含真空泵2 5 3用來將該裝 置2抽成真空,並可利用過濾器251過濾待純化材料中之 固態物(欲去除之材料)以及利用凝結器2 5 2凝結待純 化材料中之揮發物(欲去除之材料),避免雜物流入其 中使之受損或減少壽命,以保護該真空泵2 5 3。因此,、 舉例言之’被裝載在該樣品區域2 1之材料,其質量流 (mass f low)經過該些理論板數區域22之純化,可使 得該些收集區域2 3收集到純度較高的純化後材料。 圖五與圖六係本發明之另一實施例,其特徵在於有 機發光元件(OLED)材料之純化裝置3具有:一樣品區 域3 1,係用以裝載一待純化材料,以及至少一理論板數531442 V. Description of the invention (5) Used to evacuate the device 1 and use the filter 1 5 丨 to filter the solid matter (material to be removed) in the material to be purified and use the condenser 1 5 2 to condense Purify the volatiles (materials to be removed) in the material to protect the vacuum pump 1 5 1 'Avoid the ingress of impurities into the material to damage it or reduce the life of the brother' Therefore the material loaded in the sample area 1 丨 its mass flow (mass flow) Purification of the theoretical plate number region 12 enables the collection region 13 to collect the purified material with higher purity. Please refer to FIG. 3 and FIG. 4, which are schematic diagrams of the preferred embodiment of FIG. 1. The organic light-emitting element (OLED) material purification device 2 uses both ends to evacuate, of which the theoretical plate number area 2 2 is located on the left and right sides of the sample area 21 'collection area 2 3 is located in the theoretical plate number area 2 2 of the left and right sides. As shown in FIG. 4, the purification device 2 may use a temperature controller 24 to control its temperature, and may also use a vacuum system 25 to maintain a specific vacuum degree, wherein the vacuum system 25 may include a vacuum pump 2 53 to The device 2 is evacuated, and the solid matter (material to be removed) in the material to be purified can be filtered by the filter 251 and the volatile matter (material to be removed) in the material to be purified is condensed by the condenser 2 5 2 to avoid contamination Flow into it to damage or reduce life to protect the vacuum pump 2 5 3. Therefore, for example, 'mass f low' of the material loaded in the sample area 21 is purified by the theoretical plate number areas 22, so that the collection areas 23 can be collected to a higher purity Purified material. 5 and 6 are another embodiment of the present invention, which is characterized in that the organic light-emitting element (OLED) material purification device 3 has: a sample area 31 for loading a material to be purified, and at least one theoretical board number

531442 五、發明酬⑹ "' " --- =收集區域3 2,係用以純化該待純化材料,以產生並收 :一純化後材料。在較佳實施例中,該純化裝置3進一 =包含一溫度控制器3 3,用以控制該純化裝置3的溫度 么-亥純化裝置3還包含一真空系統3 4,致使該純化裝置3 i持特定之真空度。再進一步來說,該真空系統3 4包 各—真空栗343用來將該裝置3抽成真空、一過濾器341531442 V. Invention reward " '" --- = Collection area 3 2 is used to purify the material to be purified to produce and collect: a purified material. In a preferred embodiment, the purification device 3 further includes a temperature controller 3 3 to control the temperature of the purification device 3-the purification device 3 further includes a vacuum system 3 4, so that the purification device 3 i Maintain a specific degree of vacuum. Further, the vacuum system 3 4 packs each-a vacuum pump 343 is used to evacuate the device 3 into a vacuum, a filter 341

右^ /或一凝結器342係分別用以過濾、凝結未純化之 機發光7L件材料。舉例來說,該純化裝置3可利用溫 ,控制=33控制其溫度,還可利用真空系統34維持一特 定,真空度’其中該真空系統34可包含真空泵343用來 將该裝置3抽成真空,並可利用過濾器3 4 1過濾待純化材 $中之固怨物(欲去除之材料)以及利用凝結器3 4 2凝 結2純化材料中之揮發物(欲去除之材料),以保護該 一二果3 4 3 ’避免雜物流入其中使之受損或減少壽命, 因此被裝載在該樣品區域31之材料,其質量流(mass Π/w)經過理論板數暨收集區域32之純化與收集,可 使彳于待純化材料經純化而得到純度較高的純化後材料。The right ^ / or a condenser 342 is used to filter and condense the unpurified organic light-emitting 7L pieces of material, respectively. For example, the purification device 3 can use temperature, control = 33 to control its temperature, and can also use a vacuum system 34 to maintain a certain degree of vacuum, where the vacuum system 34 can include a vacuum pump 343 to vacuum the device 3 The filter 3 4 1 can be used to filter the solid matter (the material to be removed) in the material to be purified and the condenser 3 4 2 to condense the volatile material (the material to be removed) in the purified material to protect the material. One or two fruit 3 4 3 'Avoid the impurities flowing into it to damage or reduce the life, so the mass flow (mass Π / w) of the material loaded in the sample area 31 is purified by the theoretical plate number and the collection area 32 With collection, the purified material can be obtained by purifying the material to be purified.

請參考圖七與圖八,係圖五之另一較佳實施例示意 ,。有機發光元件(OLED)材料之純化裝置4係利用兩。 ,抽真空’其中理論板數暨收集區域4 2係分別位在樣品 區域4 1之左右兩側。如圖八所示,該純化裝置4可利用 溫度控制器43控制其溫度,還可利用真空系統44維持一 特定之f空度,其中該真空系統44可包含真空泵443用 來將該裝置4抽成真空,並可利用過濾器4 4丨過濾待純化Please refer to FIG. 7 and FIG. 8, which are schematic diagrams of another preferred embodiment of FIG. 5. The organic light emitting device (OLED) material purification device 4 uses two. , Vacuuming ', in which the theoretical plate number and the collection area 4 2 are respectively located on the left and right sides of the sample area 41. As shown in FIG. 8, the purification device 4 may use a temperature controller 43 to control its temperature, and may also use a vacuum system 44 to maintain a specific f-degree, wherein the vacuum system 44 may include a vacuum pump 443 to pump the device 4 Into a vacuum, and can be filtered using a filter 4 4 丨 to be purified

第9頁 531442 五、發明說明 材料中 凝結待 物流入 。因此 質量流 化與收 純化後 此 步設計 、2 2與 ,並進 皆為本 雖 以限定 作之精 發明之 (7) 之固態物(欲去除之材料)以及利用凝結器4 4 2 純化材料中之揮發物(欲去除之材料),避免雜 其中使之受損或減少壽命,以保護該真空泵4 4 3 ,舉例s之5被裝載在该樣品區域41之材料^其 (m a s s f 1 〇w)經過理論板數暨收集區域4 2之純 集,可使得待純化材料經純化而得到純度較高的 材料。 外,本發明的具有理論板數區之腔體1、2可進一 成如圖九及圖十所示之變化。而理論板數區域12 收集區域1 3、2 3可合併為理論板數收集區3 2、4 2 一步可設計成如圖十一及圖十二所示,這些變化 發明保護之範圍。 然本發明已以較佳實施例揭露如上,然其並非用 本發明,任何熟悉本技藝之人士,在不脫離本創 神和範圍内,當可做些許之更動與潤飾,因此本 保護範圍當視後附之申請專利範圍所界定者為準Page 9 531442 V. Description of the invention Condensation in the material is to be carried in. Therefore, after the mass fluidization and purification, this step design, 2 2 and the progress are based on the solid substance (material to be removed) of (7), which is the refined invention, and the condenser 4 4 2 is used to purify the material. Volatile matter (material to be removed), to avoid damage to it or reduce life, to protect the vacuum pump 4 4 3, for example, 5 of the material loaded in the sample area 41 ^ its (massf 1 〇w) After the number of theoretical plates and the pure set in the collection area 42, the material to be purified can be purified to obtain a higher purity material. In addition, the cavities 1, 2 of the present invention having a theoretical plate number region can be further changed as shown in Figs. 9 and 10. The theoretical plate number area 12 collection area 1 3, 2 3 can be merged into the theoretical plate number collection area 3 2, 4 2 in one step can be designed as shown in Figure 11 and Figure 12, these changes within the scope of invention protection. However, the present invention has been disclosed as above with a preferred embodiment, but it is not the invention. Anyone familiar with the art can make some modifications and retouching without departing from the spirit and scope of the invention. Therefore, the scope of this protection should be Subject to the scope of the attached patent application

第10頁 531442 圖式簡單說明 圖一係本發明的純化裝置之示意圖; 圖二係圖一之較佳實施例示意圖; 圖三本發明純化裝置的另一實施例示意圖; 圖四係圖三之另一較佳實施例示意圖; 圖五係本發明的另一純化裝置之示意圖; 圖六係圖五之較佳實施例示意圖; 圖七本發明純化裝置的再一實施例示意圖; 圖八係圖七之另一較佳實施例示意圖;以及 圖九〜圖十二係本發明依據圖--圖八之變化所繪製的 其他實施例示意圖。 主要元件符號說明 1、2、3、4純化裝置 1 1、2 1、3卜4 1樣品區域 1 2、2 2理論板數區域 1 3、2 3收集區域 3 2、4 2理論板數暨收集區域 1 4、2 4、3 3、4 3溫度控制器 1 5、2 5、3 4、4 4真空系統 15卜25:1、34卜441過濾器 1 5 2、2 5 2、3 4 2、4 4 2凝結器 153、 253、 343、 443真空泵Page 10 531442 Brief description of the diagram Figure 1 is a schematic diagram of the purification device of the present invention; Figure 2 is a schematic diagram of the preferred embodiment of Figure 1; Figure 3 is a schematic diagram of another embodiment of the purification apparatus of the present invention; Schematic diagram of another preferred embodiment; Figure 5 is a schematic diagram of another purification device of the present invention; Figure 6 is a schematic diagram of a preferred embodiment of Figure 5; Figure 7 is a schematic diagram of another embodiment of the purification apparatus of the present invention; A schematic diagram of another preferred embodiment of the seventh; and FIG. 9 to FIG. 12 are schematic diagrams of other embodiments of the present invention drawn according to the changes of FIG. Explanation of main component symbols 1, 2, 3, 4 Purification device 1 1, 2 1, 3 4 4 Sample area 1 2, 2 2 Theoretical plate area 1 3, 2 3 Collection area 3 2, 4 2 Theoretical plate number and Collection area 1 4, 2 4, 3 3, 4 3 Temperature controller 1 5, 2 5, 3 4, 4 4 Vacuum system 15 BU 25: 1, 34 BU 441 Filter 1 5 2, 2 5 2, 3 4 2, 4 4 2 Condenser 153, 253, 343, 443 Vacuum pump

第11頁Page 11

Claims (1)

531442 六、申請專利範圍 1 · 一種純化有 在於該裝置 '^樣品區域 至少 產生 至少 2. 依據 控制 3. 依據 糸統 4. 依據 含一 5·依據 含一 該真 6·依據 — 該真 7· -種 在於 一樣 至少 料, 8 ·依據 一理論 一純化 一收集 申請專 器,用 申請專 ,致使 申請專 真空泵 申請專 過濾器 空泵。 申請專 凝結器 空泵。 純化有 該裝置 機發光 具有: ,係用 板數區 後材料 區域, 利範圍 以控制 利範圍 該裝置 利範圍 ’將該 利範圍,用以 利範圍,用以 元件(OLED)材料之裝置,其特徵 以裝載一待純化材料; 域’係用以純化該待純化材料,以 ;以及 係用以收集該純化後材料。 第1項之裝置,進一步包含一溫度 該裝置的溫度。 又 第1項之裝置,進一步包含一真空 維持一特定之真空度。 工 第4項之裝置’其中該真空系統包 裝置抽成真空。 第5項之裝置,其中該真空系統包 過濾一部分之待純化材料,以保護 ξ :項之裂置’其中該真空系統包 旋一部分之待純化材#,以保護 機發光 具有: 品區域,係用 一理論板數暨 並收集 利範圍 以產生 中請專 疋件(OLED)材料之裝置,其 特徵 凌载一待純化材料.以及 收集區域,係用以及 一純化後材料。 第7項之裝置,進.531442 VI. Application for patent scope 1 · A kind of purification is that the device '^ sample area generates at least 2. Basis control 3. Basis system 4. Basis contains a 5 · Basis contains a truth 6 · Basis— the truth 7 · -It is the same as the minimum material. 8 · Purify and collect the application equipment based on a theory, use the application equipment, and cause the application vacuum pump to apply for the filter air pump. Apply for special condenser air pump. The light emitting device with the device has the following: The material area after the number of plates is used to control the profit range. The device's profit range is used to benefit the range and to the device of the OLED material. The feature is to load a material to be purified; the field is to purify the material to be purified; and to collect the purified material. The device of item 1, further comprising a temperature of the device. The device of item 1 further comprises a vacuum to maintain a specific vacuum degree. The device of item 4, wherein the vacuum system package device is evacuated. The device of item 5, wherein the vacuum system package filters a part of the material to be purified to protect ξ: the split of the item 'where the vacuum system wraps a part of the material to be purified #, to protect the machine from having A device that uses a theoretical number of plates and collects the profit range to generate OLED materials, which features a material to be purified, and a collection area, which is used as well as a purified material. Device for item 7, advance. 純化該待純化材 '步包含一溫度 531442 六、申請專利範圍 控制器,用以控制該裝置的溫度。 9.依據申請專利範圍第7項之裝置,進一步包含一真空 系統,致使該裝置維持一特定之真空度。 1 0 .依據申請專利範圍第9項之裝置,其中該真空系統包 含一真空泵,將該裝置抽成真空。 1 1.依據申請專利範圍第1 0項之裝置,其中該真空系統 包含一過濾器,用以過濾一部分之待純化材料,以保 護該真空泵。 1 2 .依據申請專利範圍第1 0項之裝置,其中該真空系統 包含一凝結器,用以凝結一部分之待純化材料,以保 護該真空泵。The step of purifying the material to be purified includes a temperature of 531442 6. The scope of the patent application controller is used to control the temperature of the device. 9. The device according to item 7 of the scope of patent application, further comprising a vacuum system, so that the device maintains a specific degree of vacuum. 10. The device according to item 9 of the scope of patent application, wherein the vacuum system includes a vacuum pump to evacuate the device. 1 1. The device according to item 10 of the scope of patent application, wherein the vacuum system includes a filter for filtering a part of the material to be purified to protect the vacuum pump. 12. The device according to item 10 of the scope of the patent application, wherein the vacuum system includes a condenser for condensing a portion of the material to be purified to protect the vacuum pump. 第13頁Page 13
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